JP4051634B2 - Glow discharge drilling apparatus and glow discharge drilling method - Google Patents
Glow discharge drilling apparatus and glow discharge drilling method Download PDFInfo
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Description
本発明はグロー放電に伴うスパッタリングで試料表面を掘削する場合、所望する深さまで精度良く試料の掘削加工を行えるようにしたグロー放電掘削装置及びグロー放電掘削方法に関する。 The present invention relates to a glow discharge excavation apparatus and a glow discharge excavation method that enable excavation of a sample to a desired depth with high accuracy when excavating a sample surface by sputtering associated with glow discharge.
従来、試料の構造及び組織等を視覚的に観察する際、透過電子顕微鏡（TEM）及び二次電子顕微鏡（SEM）のような各種顕微鏡を用いることがある。このような顕微鏡で試料を観察するには、準備処理として試料の観察面を整える必要があり、例えば、試料断面を観察する場合では、試料を破断して観察面となる断面を表出させ、その表出させた断面が清浄で且つ一定以上の平滑度になるまで研磨を行わねばならない。 Conventionally, when visually observing the structure and structure of a sample, various microscopes such as a transmission electron microscope (TEM) and a secondary electron microscope (SEM) are sometimes used. In order to observe the sample with such a microscope, it is necessary to prepare the observation surface of the sample as a preparatory process.For example, in the case of observing a cross section of the sample, the cross section that becomes the observation surface is exposed by breaking the sample, Polishing must be performed until the exposed cross section is clean and has a smoothness of a certain level or more.
試料の研磨には研磨剤を用いることが一般的であるが、研磨剤及び研磨作業により発生する研磨粉等の影響で作業環境の悪化が懸念されている。また、研磨作業は手間がかかるので各種顕微鏡で試料観察を行う準備処理の段階で長時間を要する。さらに、観察を行う試料の構造によっては研磨を行っても観察に適した面を得られないこともあり、例えば、試料がガラスのような硬い材料と、金のような軟らかい材料を組み合わせて構成されている場合、研磨により軟らかい材料が変形して硬い材料側へ流れ出るような形態となり、良好な観察面を形成することが非常に困難となる。 A polishing agent is generally used for polishing the sample, but there is a concern that the working environment is deteriorated due to the influence of the polishing agent and polishing powder generated by the polishing operation. In addition, since the polishing work takes time, a long time is required at the stage of the preparation process in which the sample is observed with various microscopes. Furthermore, depending on the structure of the sample to be observed, it may not be possible to obtain a surface suitable for observation even after polishing. For example, the sample is composed of a hard material such as glass and a soft material such as gold. In such a case, the soft material is deformed by polishing and flows to the hard material side, and it is very difficult to form a good observation surface.
上述した試料研磨に関する不具合を回避して試料の清浄な観察面を得るために、研磨ではなくグロー放電によるスパッタリングの威力で試料の観察対象となる表面を削り取り、試料表面を所望の平滑度に仕上げるようにした装置及び方法が下記の特許文献１乃至特許文献３に開示されている。なお、グロー放電を用いて試料の削り取り（掘削）を行うには、グロー放電管を用いる形態と、グロー放電を行う処理室内に電極及び試料等を配置する形態がある（特許文献１、２参照）。
試料表面から所定の深さで観察を行う場合、観察を行う深さまで試料を正確に削り取る（掘削する）ことが重要になる。しかし、上述した特許文献１に係る装置では、グロー放電を用いて単に試料表面を削り取るだけなので、加工者の技量により加工精度が変動すると共に、掘削量を確認するために何度も加工を一時停止する必要があるため効率的な加工を行えないと云う問題がある。 When observing at a predetermined depth from the surface of the sample, it is important to accurately scrape (excavate) the sample to the depth to be observed. However, in the apparatus according to Patent Document 1 described above, since the sample surface is simply scraped off using glow discharge, the processing accuracy varies depending on the skill of the operator, and the processing is temporarily performed several times in order to confirm the excavation amount. There is a problem that efficient machining cannot be performed because it is necessary to stop.
また、特許文献２及び特許文献３に係る装置では、グロー放電に係る放電時間（スパッタ時間）に基づいて間接的に削り取る深さを判断するにすぎないため、高精度な掘削加工を実現できないと云う問題がある。さらに、そのような状況で掘削加工の自動化を図っても、望みうる加工精度が得られていないので、自動加工の後に所望の寸法精度に近付ける手動作業的な追加工が結局必要になると云う問題がある。 Moreover, in the apparatuses according to Patent Document 2 and Patent Document 3, since the depth of scraping is only determined based on the discharge time (sputtering time) related to glow discharge, high-precision excavation cannot be realized. There is a problem. In addition, even if the excavation process is automated in such a situation, the desired processing accuracy is not obtained, so that a manual additional work that approaches the desired dimensional accuracy is eventually required after automatic processing. There is.
本発明は、斯かる問題に鑑みてなされたものであり、掘削する箇所を直接的に測定することで掘削した深さを高精度に測定すると共に、測定した深さに応じてグロー放電による掘削加工を終了する制御を行って高精度な自動加工を達成したグロー放電掘削装置及びグロー放電掘削方法を提供することを目的とする。 The present invention has been made in view of such a problem. The depth of excavation is measured with high accuracy by directly measuring the location to be excavated, and excavation by glow discharge is performed according to the measured depth. It is an object of the present invention to provide a glow discharge excavation apparatus and a glow discharge excavation method that achieves high-precision automatic machining by controlling to finish machining.
本発明に係るグロー放電掘削装置は、電極及び該電極に対向配置される試料の間に電圧を印可して発生させたグロー放電で試料を掘削するグロー放電掘削装置において、掘削箇所への光の照射及び掘削箇所で反射した反射光の受光を行って掘削深さを測定する測定手段と、高周波電圧を前記試料及び前記電極に印加すべく高周波電力を生成する高周波電力生成部と、前記高周波電力生成部による一秒間あたりの給電回数を変更する手段と、該手段により変更された一秒間あたりの給電回数に基づき、前記高周波電力生成部により生成される高周波電圧を前記試料及び前記電極に断続的に印加する手段とを備え、前記測定手段は、高周波電圧の断続印加中の印加断時に反射光の受光を行うようにしてあることを特徴とする。 A glow discharge excavation apparatus according to the present invention is a glow discharge excavation apparatus for excavating a sample by glow discharge generated by applying a voltage between an electrode and a sample disposed opposite to the electrode. Measuring means for measuring the depth of excavation by irradiating and receiving the reflected light reflected at the excavation site, a high-frequency power generator for generating high-frequency power to apply a high-frequency voltage to the sample and the electrode, and the high-frequency power A means for changing the number of times of power supply per second by the generator, and a high-frequency voltage generated by the high-frequency power generator based on the number of times of power supply per second changed by the means is intermittently applied to the sample and the electrode. and means for applying to said measuring means is characterized Citea Rukoto to perform reception of reflected light upon application cutoff during intermittent application of high frequency voltage.
本発明にあっては、掘削箇所への光の照射及び反射光の受光を行って掘削した深さを直接的に測定する測定手段を備えるので、グロー放電を用いた掘削加工に対しても精度の高い掘削深さの数値を確認できるようになる。なお、測定に用いる光には、グロー放電に伴い発光する試料固有の元素に係る光に対して、波長が相異するものを用いることが掘削状況によらず測定を行えるようにする点で好ましく、具体的には数十から数万ｎｍ（ナノメートル）の波長のレーザ光が好適である。 In the present invention, since a measuring means for directly measuring the depth of excavation by irradiating light to the excavation site and receiving reflected light is provided, it is accurate even for excavation processing using glow discharge. It becomes possible to confirm the numerical value of high drilling depth. In addition, it is preferable to use light having different wavelengths for the light used for the measurement, regardless of the excavation condition, with respect to the light related to the element specific to the sample that is emitted by glow discharge. Specifically, a laser beam having a wavelength of several tens to several tens of thousands of nanometers is suitable.
本発明に係るグロー放電掘削装置は、前記電極の試料に対向する部分には、貫通部が形成してあり、前記測定手段は、前記貫通部を通じて掘削箇所への光の照射及び反射光の受光を行うようにしてあることを特徴とする。
本発明にあっては、電極に貫通部を形成すると共に、その貫通部を通じて光の照射及び反射光の受光を行うので、電極と試料が対向配置しても試料の掘削箇所に対して確実に光を照射でき、掘削深さを安定して測定できる。
In the glow discharge excavation apparatus according to the present invention, a penetrating portion is formed in a portion of the electrode facing the sample, and the measuring means irradiates light to the excavation site and receives reflected light through the penetrating portion. It is characterized by carrying out.
In the present invention, a penetration part is formed in the electrode, and light irradiation and reflection light reception are performed through the penetration part, so that even if the electrode and the sample are arranged to face each other, it is ensured against the excavation part of the sample Can irradiate light and can measure the excavation depth stably.
本発明に係るグロー放電掘削装置は、前記電極を保持する保持体を備え、該保持体は、前記電極の貫通部に連通する空洞を形成しており、該空洞を介して前記貫通部に対向する透光部材を備え、前記測定手段は、前記透光部材、前記空洞及び前記貫通部を通じて掘削箇所への光の照射及び反射光の受光を行うようにしてあることを特徴とする。 A glow discharge excavation apparatus according to the present invention includes a holding body that holds the electrode, and the holding body forms a cavity that communicates with a through portion of the electrode, and faces the through portion through the cavity. The measurement means is configured to irradiate light to the excavation site and receive reflected light through the light transmissive member, the cavity, and the penetrating portion.
本発明にあっては、空洞を形成して外部から光を取り込める透光部材を備える保持体で貫通部を有する電極を保持すると共に、透光部材、空洞及び貫通部を通じて光の照射及び反射光の受光を行うので、グロー放電管のようなグロー放電を生じさせる手段を用いて試料の掘削を行う場合でも、確実に掘削箇所へ光を照射して掘削深さの測定を行えるようになる。なお、透光部材には照射する光の光径を変更するレンズ機能を持たせるようにしてもよい。 In the present invention, the electrode having the penetrating part is held by the holding body including the transparent member that forms the cavity and can take in light from the outside, and the light irradiation and the reflected light are transmitted through the transparent member, the cavity, and the penetrating part. Therefore, even when a sample is excavated using a means for generating a glow discharge such as a glow discharge tube, the excavation depth can be measured by reliably irradiating the excavation site with light. The translucent member may have a lens function for changing the light diameter of the irradiated light.
本発明に係るグロー放電掘削装置は、前記測定手段は、光の照射及び反射光の受光を行う照射受光部を備えており、該照射受光部は、前記透光部材に対向するように前記保持体に並置してあり、前記照射受光部及び透光部材を被って遮光する遮光部材を備えることを特徴とする。
本発明にあっては、光の照射及び反射光の受光を行う照射受光部を透光部材に対向させるので、スムーズに試料へ向けて光を照射可能になると共に、照射受光部及び透光部材を遮光部材で遮光するので、照射受光部が周囲の明光の影響を受けることを回避でき、掘削深さを安定して測定できる。
In the glow discharge excavation apparatus according to the present invention, the measuring means includes an irradiation light receiving unit that irradiates light and receives reflected light, and the irradiation light receiving unit holds the holding member so as to face the translucent member. A light-shielding member that is juxtaposed on the body and shields light by covering the irradiation light-receiving part and the light-transmissive member is provided.
In the present invention, since the irradiation light receiving part for irradiating light and receiving reflected light is opposed to the light transmitting member, it is possible to irradiate light smoothly toward the sample, and the irradiation light receiving part and the light transmitting member. Is shielded by the light shielding member, it is possible to avoid the irradiation light receiving portion from being affected by the surrounding bright light, and the excavation depth can be measured stably.
本発明にあっては、反射光の受光を行うときに電圧の印加を停止するので、電圧印加を停止している間は、グロー放電による試料固有の元素の発光が生じなくなる。その結果、測定手段は反射光のみを確実に受光できるようになり、測定誤差の一原因となる反射光以外の光を排除して測定に係る精度を高く維持できる。 In the present invention, since application of voltage is stopped when receiving reflected light, light emission of an element specific to the sample due to glow discharge does not occur while voltage application is stopped. As a result, the measuring means can reliably receive only the reflected light, and can eliminate the light other than the reflected light that causes a measurement error, and can maintain high accuracy in measurement.
本発明にあっては、電圧の印加を断続的に行うので、グロー放電によるスパッタリングの発生も断続的なものになる。そのため、スパッタリングの威力を受ける試料の負荷も低減されるため、溶融しやすい材料で形成されている試料、及び一定以上の外力で破壊されやすい材料で形成されている試料等に対して、試料の負荷を低減して良好な観察面を形成できるようになる。さらに、反射光の受光は、上述した断続的な印加の印加断時に同期して行うので、グロー放電に伴う試料固有の元素の発光の影響を受けることなく、測定手段は反射光のみを確実に受光して高精度の深さ測定を行えるようになると共に、断続的な電圧印加に係る印加断時の時間を有効に活用できる。 In the present invention, since the voltage is applied intermittently, the occurrence of sputtering due to glow discharge becomes intermittent. Therefore, since the load on the sample that receives the power of sputtering is reduced, the sample is made of a material that is easily melted and a material that is easily broken by a certain external force. A good observation surface can be formed by reducing the load. Furthermore, since the reflected light is received in synchronization with the intermittent application of the above-mentioned intermittent application, the measuring means reliably receives only the reflected light without being affected by the light emission of the element specific to the sample accompanying the glow discharge. It is possible to measure the depth with high accuracy by receiving light, and to effectively utilize the time at the time of application interruption related to intermittent voltage application.
本発明に係るグロー放電掘削装置は、掘削深さを受け付ける受付手段と、該受付手段が受け付けた掘削深さ及び前記測定手段が測定する掘削深さの比較判定を行う手段と、前記測定手段が測定した掘削深さが、前記受付手段が受け付けた掘削深さになったと判定された場合、電圧印加を停止して掘削を終了する手段とを備えることを特徴とする。 A glow discharge excavation apparatus according to the present invention includes: a receiving unit that receives a drilling depth; a unit that performs a comparison determination between a drilling depth received by the receiving unit and a drilling depth measured by the measuring unit; And a means for stopping the voltage application and ending the excavation when it is determined that the measured excavation depth has reached the excavation depth accepted by the accepting means.
本発明にあっては、掘削深さを受け付けて、その掘削深さに測定した掘削深さが達した場合、掘削を終了するので、グロー放電を用いた掘削加工の自動化を高い加工精度で実現でき、所望する深さで形成した試料観察面を容易に得られる。その結果、加工者に依存することなく安定した掘削加工を一定の加工時間で行えるため、観察の準備段階に要する手間及び時間を従来に比べて大幅に削減できる。 In the present invention, the excavation is completed when the excavation depth is received and the measured excavation depth reaches the excavation depth, so automation of excavation using glow discharge is realized with high machining accuracy. It is possible to easily obtain a sample observation surface formed at a desired depth. As a result, since stable excavation processing can be performed with a constant processing time without depending on the operator, the labor and time required for the observation preparation stage can be greatly reduced as compared with the prior art.
本発明に係るグロー放電掘削装置は、前記測定手段は、複数の光を照射して複数の反射光を受光する手段を備えており、受光した複数の反射光に基づく複数の掘削深さの平均値を算出する平均値算出手段を備えることを特徴とする。
本発明にあっては、複数の光の照射により複数の掘削深さを得ると共に、得られた複数の掘削深さの平均値を算出するので、微視的なレベルでの掘削面の凹凸の影響をソフト的な処理で排除でき、掘削面の凹凸による測定精度の悪化を防止し、安定して高精度の測定を行える。
In the glow discharge excavation apparatus according to the present invention, the measuring means includes means for irradiating a plurality of lights and receiving a plurality of reflected lights, and averages a plurality of excavation depths based on the received plurality of reflected lights. Mean value calculating means for calculating a value is provided.
In the present invention, a plurality of excavation depths are obtained by irradiation with a plurality of lights, and an average value of the obtained plural excavation depths is calculated. The influence can be eliminated by software processing, the deterioration of measurement accuracy due to the unevenness of the excavation surface can be prevented, and stable and highly accurate measurement can be performed.
本発明に係るグロー放電掘削方法は、電極及び該電極に対向配置される試料の間に電圧を印可して発生させたグロー放電で試料を掘削するグロー放電掘削方法において、掘削箇所への光の照射及び掘削箇所で反射した反射光の受光を行って掘削深さを測定し、高周波電力生成部により、高周波電圧を前記試料及び前記電極に印加すべく高周波電力を生成させ、前記高周波電力生成部による一秒間あたりの給電回数を変更させ、該変更した一秒間あたりの給電回数に基づき、前記高周波電力生成部により生成される高周波電圧を前記試料及び前記電極に断続的に印加し、掘削深さを測定する場合、高周波電圧の断続印加中の印加断時に反射光の受光を行い、測定した掘削深さに応じて電圧印加を停止して掘削を終了することを特徴とする。
本発明にあっては、光の照射及び反射光の受光により掘削深さの測定を行い、その測定結果に応じて掘削を終了するので、掘削終了の時期を測定値に基づき判断でき、掘削加工の自動化を良好な加工精度で達成できる。
A glow discharge excavation method according to the present invention includes a glow discharge excavation method in which a sample is excavated with a glow discharge generated by applying a voltage between an electrode and a sample disposed opposite to the electrode. Irradiation and reception of reflected light reflected at the excavation site are performed to measure the excavation depth, and the high frequency power generator generates high frequency power to apply a high frequency voltage to the sample and the electrode, and the high frequency power generator The frequency of power supply per second is changed, and the high frequency voltage generated by the high frequency power generation unit is intermittently applied to the sample and the electrode based on the changed power supply frequency per second, and the excavation depth Is measured, the reflected light is received when the high-frequency voltage is intermittently applied, and the excavation is terminated by stopping the voltage application according to the measured excavation depth.
In the present invention, the excavation depth is measured by irradiating light and receiving reflected light, and the excavation is completed according to the measurement result. Can be achieved with good machining accuracy.
本発明にあっては、光の照射及び受光により掘削深さを直接的に測定するので、掘削深さを高精度で測定できる。
本発明にあっては、電極に形成した貫通部を通じて光の照射及び反射光の受光を行うので、電極と試料が対向配置する形態でも確実に掘削深さを測定できる。
本発明にあっては、透光部材、保持体に形成した空洞及び電極の貫通部を通じて光の照射及び反射光の受光を行うので、グロー放電管を用いた場合でも確実に掘削深さを測定できる。
In the present invention, since the excavation depth is directly measured by light irradiation and light reception, the excavation depth can be measured with high accuracy.
In the present invention, light irradiation and reflected light reception are performed through the penetrating portion formed in the electrode, so that the excavation depth can be reliably measured even in a form in which the electrode and the sample are arranged to face each other.
In the present invention, light is radiated and reflected light is received through the translucent member, the cavity formed in the holding body, and the electrode through-hole, so that the digging depth is reliably measured even when a glow discharge tube is used. it can.
本発明にあっては、照射受光部及び透光部材を遮光部材で遮光するので、周囲の明光の影響を遮光部材で排除して掘削深さを安定して測定できる。
本発明にあっては、反射光の受光を行うときに電圧の印加を停止するので、電圧印加を停止している間は、測定時は反射光のみを受光でき、高精度測定に貢献できる。
本発明にあっては、電圧の印加を断続的に行うので、掘削時に試料が受ける負荷を低減でき、材質の種類によらず試料を掘削できると共に、電圧の印加断時に同期して測定処理を行うことで、高精度な深さ測定を行える。
In the present invention, since the irradiation light receiving part and the translucent member are shielded by the light shielding member, the influence of the surrounding bright light is eliminated by the light shielding member, and the excavation depth can be measured stably.
In the present invention, since application of voltage is stopped when receiving reflected light, only reflected light can be received during measurement while voltage application is stopped, which contributes to high-accuracy measurement.
In the present invention, since the voltage is intermittently applied, the load applied to the sample during excavation can be reduced, the sample can be excavated regardless of the type of material, and the measurement process can be performed synchronously when the voltage application is interrupted. By doing so, highly accurate depth measurement can be performed.
本発明にあっては、測定値が受け付けた掘削深さに達した場合、掘削を終了するので、グロー放電を用いた掘削加工の自動化を高い加工精度で実現できる。
本発明にあっては、複数の光の照射により複数の掘削深さを得ると共に、得られた複数の掘削深さの平均値を算出するので、微視的なレベルでの掘削面の凹凸の影響をソフト的な処理で排除でき、掘削面の凹凸による測定精度の悪化を防止し、安定して高精度の測定を行える。
本発明にあっては、光の照射及び反射光の受光により掘削深さの測定を行い、その測定結果に応じて掘削を終了するので、良好な加工精度で掘削加工の自動化を達成できる。
In the present invention, when the measured value reaches the accepted excavation depth, the excavation is terminated, so that excavation using glow discharge can be automated with high machining accuracy.
In the present invention, a plurality of excavation depths are obtained by irradiation with a plurality of lights, and an average value of the obtained plural excavation depths is calculated. The influence can be eliminated by software processing, the deterioration of measurement accuracy due to the unevenness of the excavation surface can be prevented, and stable and highly accurate measurement can be performed.
In the present invention, the excavation depth is measured by irradiating light and receiving the reflected light, and the excavation is terminated according to the measurement result. Therefore, the excavation can be automated with good machining accuracy.
図１は本発明の実施形態に係るグロー放電掘削装置１の全体的な構成を示している。グロー放電掘削装置１は、試料Ｓを掘削するためにグロー放電を発生させるグロー放電管２、電圧印加に係る電力生成を行う電源部４、掘削深さを測定する測長器３０、及び装置の全体的な制御を行うコンピュータ７を備えており、所定の深さまで試料Ｓを掘削すれば、自動的に掘削加工を停止するようにしたことが特徴である。 FIG. 1 shows the overall configuration of a glow discharge excavator 1 according to an embodiment of the present invention. The glow discharge excavator 1 includes a glow discharge tube 2 that generates a glow discharge for excavating a sample S, a power supply unit 4 that generates electric power according to voltage application, a length measuring device 30 that measures the excavation depth, and an apparatus A computer 7 that performs overall control is provided, and when the sample S is excavated to a predetermined depth, the excavation process is automatically stopped.
グロー放電掘削装置１の電源部４は交流電源ＡＣ（本実施形態では２２０Ｖ）に接続されて高周波電力を生成するジェネレータ６及びマッチングボックス５を備え、測定手段に相当する測長器３０はコントローラ３１及びセンサヘッド３２を備える。また、図１中、破線で囲まれた部分は、グロー放電掘削装置１の本質的な構成に属しない周辺機器類を示し、周辺機器類にはグロー放電管２の内部を真空引きする真空引き装置８と、真空引きした後にグロー放電管２の内部に不活性ガス（アルゴンガス）を供給するためのガス供給調整部９及びガス供給源１０が含まれる。なお、ガス供給調整部９は流量を調整するためのバルブ等を具備し、ガス供給源１０はアルゴンガスのような不活性ガス又は不活性ガスの混合ガス等を充填したボンベが相当する。 The power supply unit 4 of the glow discharge excavator 1 includes a generator 6 and a matching box 5 that are connected to an AC power supply AC (220 V in this embodiment) and generates high-frequency power, and a length measuring device 30 corresponding to a measuring means is a controller 31. And a sensor head 32. Further, in FIG. 1, a portion surrounded by a broken line indicates peripheral devices that do not belong to the essential configuration of the glow discharge excavator 1, and the peripheral devices include vacuum evacuation for evacuating the inside of the glow discharge tube 2. The apparatus 8 includes a gas supply adjusting unit 9 and a gas supply source 10 for supplying an inert gas (argon gas) to the inside of the glow discharge tube 2 after evacuation. The gas supply adjusting unit 9 includes a valve for adjusting the flow rate, and the gas supply source 10 corresponds to a cylinder filled with an inert gas such as argon gas or a mixed gas of inert gas.
図２は、グロー放電管２及び測長器３０のセンサヘッド３２に係る構成を示しており、グロー放電管２は短円柱状のランプボディ１１、電極１２、セラミックス部材１３、及び押圧ブロック１５が組み合わされて構成される。 FIG. 2 shows a configuration relating to the glow discharge tube 2 and the sensor head 32 of the length measuring device 30. The glow discharge tube 2 includes a short cylindrical lamp body 11, an electrode 12, a ceramic member 13, and a pressing block 15. Composed in combination.
ランプボディ１１は電極１２を保持する保持体に相当し、押圧ブロック１５が組み合わされる端面１１ａの中心箇所に電極１２を保持するための窪部１１ｂを凹設すると共に、窪部１１ｂの中心部に空洞１１ｃを穿設している。また、ランプボディ１１は、周壁部１１ｄから中心へ向けて真空引き用の吸引孔１１ｅ、１１ｆを複数設け、一部の吸引孔１１ｅは空洞１１ｃに連通させると共に、他の吸引孔１１ｆは窪部１１ｂ側に連通させている。さらに、ランプボディ１１は、周壁部１１ｄから中心へ向けて不活性ガスの供給用のガス供給孔１１ｇを空洞１１ｃと連通するように形成している。さらにまた、ランプボディ１１は、保持される試料Ｓと反対側になる端面１１ｈの空洞１１ｃに対応する箇所にガラス部材３５（透光部材に相当）を取り付けて、空洞１１ｃを封止している。 The lamp body 11 corresponds to a holding body for holding the electrode 12, and a recess 11 b for holding the electrode 12 is provided in the center of the end surface 11 a where the pressing block 15 is combined, and at the center of the recess 11 b. A cavity 11c is formed. The lamp body 11 is provided with a plurality of vacuum suction holes 11e and 11f from the peripheral wall part 11d toward the center. Some of the suction holes 11e communicate with the cavity 11c, and the other suction holes 11f are recessed parts. It communicates with the 11b side. Further, the lamp body 11 is formed so that a gas supply hole 11g for supplying an inert gas communicates with the cavity 11c from the peripheral wall portion 11d toward the center. Furthermore, in the lamp body 11, a glass member 35 (corresponding to a translucent member) is attached to a location corresponding to the cavity 11c on the end surface 11h opposite to the sample S to be held, thereby sealing the cavity 11c. .
ランプボディ１１に保持される電極１２は、円板部１２ａの中心から円筒部１２ｂを突出した形状にしており、円筒部１２ｂ及び円板部１２ａを貫通する貫通孔１２ｃ（貫通部に相当）を穿設している。なお、円板部１２ａには、真空引き用の吸引孔１１ｆと連通させる穴１２ｄを形成している。また、電極１２は、ランプボディ１１の窪部１１ｂに取り付けられると、アース電位になると共に、貫通孔１２ｃがランプボディ１１の空洞１１ｃに連通してガラス部材３５に対向する。なお、電極１２が保持された状態でランプボディ１１の空洞１１ｃ及び電極１２の貫通孔１２ｃの密閉性を維持するため、第１オーリング（シール部材）１６がランプボディ１１及び電極１２の間に取り付けられている。 The electrode 12 held by the lamp body 11 has a shape in which the cylindrical portion 12b protrudes from the center of the disc portion 12a, and has a through hole 12c (corresponding to a through portion) that penetrates the cylindrical portion 12b and the disc portion 12a. It is drilled. The disk portion 12a has a hole 12d that communicates with the vacuum suction hole 11f. When the electrode 12 is attached to the recess 11 b of the lamp body 11, the electrode 12 becomes ground potential, and the through hole 12 c communicates with the cavity 11 c of the lamp body 11 and faces the glass member 35. In order to maintain the sealing property of the cavity 11c of the lamp body 11 and the through hole 12c of the electrode 12 with the electrode 12 held, the first O-ring (seal member) 16 is interposed between the lamp body 11 and the electrode 12. It is attached.
電極１２を円筒部１２ｂ側から被うように配置されるセラミックス部材１３は、厚みが大きい円板状部材であり、電極１２の円板部１２ａを被うフランジ部１３ｄを有すると共に、中心となる箇所には、円筒部１２ｂを挿通させる挿通孔１３ｃを形成している。また、セラミックス部材１３は表出する側の端面１３ａにオーリング装着用のリング溝１３ｂを凹設している。セラミックス部材１３は、耐熱性の第１絶縁体１７を介して電極１２の円板部１２ａに対して配置され、配置された状態では、セラミックス部材１３の挿通孔１３ｃと電極１２の円筒部１２ｂとの間に所定の隙間が形成され、円筒部１２ａの先端１２ｅはセラミックス部材１３の端面１３ａより少し奥まった箇所に位置するようになっている。なお、第１絶縁体１７と電極１２の円板部１２ａとの間にも密閉性維持のために第２オーリング１８が取り付けられている。 The ceramic member 13 disposed so as to cover the electrode 12 from the cylindrical portion 12b side is a disk-shaped member having a large thickness, and has a flange portion 13d that covers the disk portion 12a of the electrode 12 and becomes the center. An insertion hole 13c through which the cylindrical portion 12b is inserted is formed at the location. The ceramic member 13 has a ring groove 13b for mounting an O-ring on the end surface 13a on the exposed side. The ceramic member 13 is disposed with respect to the disk portion 12a of the electrode 12 via the heat-resistant first insulator 17, and in the disposed state, the insertion hole 13c of the ceramic member 13 and the cylindrical portion 12b of the electrode 12 A predetermined gap is formed between them, and the tip 12e of the cylindrical portion 12a is located at a position slightly recessed from the end face 13a of the ceramic member 13. A second O-ring 18 is also attached between the first insulator 17 and the disk portion 12a of the electrode 12 in order to maintain hermeticity.
電極１２及びセラミックス部材１３をランプボディ１１に固定するための押圧ブロック１５は、環状の部材であり、内周縁側の突出部１５ａでセラミックス部材１３のフランジ部１３ｄをランプボディ１１側へ押圧するようにしている。なお、押圧ブロック１５自体は、ボルトによりランプボディ１１の端面１１ａに取り付けられる。また、押圧ブロック１５の突出部１５ａと、セラミックス部材１３のフランジ部１３ｄとの間にも耐熱性の第２絶縁体１９を介在させている。 The pressing block 15 for fixing the electrode 12 and the ceramic member 13 to the lamp body 11 is an annular member, and the flange portion 13d of the ceramic member 13 is pressed toward the lamp body 11 by the protruding portion 15a on the inner peripheral side. I have to. The pressing block 15 itself is attached to the end surface 11a of the lamp body 11 with a bolt. Further, a heat-resistant second insulator 19 is interposed between the protruding portion 15 a of the pressing block 15 and the flange portion 13 d of the ceramic member 13.
一方、グロー放電管２に取り付けられる掘削対象の試料Ｓは、セラミックス部材１３の端面１３ａに取り付けられた第３オーリング２０（閉鎖部材に相当）に試料表面Ｓａが当接するように配置される。さらに、この状態で試料Ｓの裏面Ｓｄには発振子３が押し当てられて試料Ｓがグロー放電管２側へ押圧される。このように配置された試料Ｓは電極１２の貫通孔１２ｃに対向すると共に、電極１２の先端１２ｅが対向する箇所（試料表面Ｓａ）に閉鎖した空間Ｋが形成される。なお、発振子３は、図１に示すように電源線Ｄにより電源部４と接続されており、また、図示しない所定の係止手段で試料Ｓを最適な押圧力でグロー放電管２へ押圧している。 On the other hand, the sample S to be excavated attached to the glow discharge tube 2 is arranged so that the sample surface Sa abuts on a third O-ring 20 (corresponding to a closing member) attached to the end surface 13a of the ceramic member 13. Further, in this state, the oscillator 3 is pressed against the back surface Sd of the sample S, and the sample S is pressed toward the glow discharge tube 2 side. The sample S arranged in this manner is opposed to the through hole 12c of the electrode 12, and a closed space K is formed at a location (sample surface Sa) where the tip 12e of the electrode 12 is opposed. As shown in FIG. 1, the oscillator 3 is connected to the power supply unit 4 by a power supply line D, and presses the sample S against the glow discharge tube 2 with an optimal pressing force by a predetermined locking means (not shown). is doing.
上述した構成のグロー放電管２は、ランプボディ１１の各吸引孔１１ｅ、１１ｆが図１に示す真空引き装置８と接続され、ガス供給孔１１ｇがガス供給調整部９と接続される。そのため、真空引き装置８が真空引きを行うと、各吸引孔１１ｅ、１１ｆ、空洞１１ｃ、及び電極１２の貫通孔１２ｃを通じて空間Ｋが真空にされる。また、空間Ｋが真空にされた状態で、ガス供給調整部９がガス供給を開始すると、ガス供給孔１１ｇ、空洞１１ｃ、及び電極１２の貫通孔１２ｃを通じて空間Ｋに不活性ガスが供給される。この際、空間Ｋは第３オーリング２０により閉鎖されて小さい体積となっているため、空間Ｋには十分な不活性ガスが供給される。 In the glow discharge tube 2 configured as described above, the suction holes 11 e and 11 f of the lamp body 11 are connected to the vacuuming device 8 shown in FIG. 1, and the gas supply hole 11 g is connected to the gas supply adjusting unit 9. Therefore, when the vacuuming device 8 performs vacuuming, the space K is evacuated through the suction holes 11e and 11f, the cavity 11c, and the through hole 12c of the electrode 12. Further, when the gas supply adjusting unit 9 starts gas supply in a state where the space K is evacuated, an inert gas is supplied to the space K through the gas supply hole 11g, the cavity 11c, and the through hole 12c of the electrode 12. . At this time, since the space K is closed by the third O-ring 20 to have a small volume, a sufficient inert gas is supplied to the space K.
また、グロー放電管２のランプボディ１１の一方の端面１１ｈ側には、測長器３０のセンサヘッド３２が並置してある。センサヘッド３２は、先端側にレーザ光Ｒの照射及び反射したレーザ光Ｒ（反射光）の受光を行う照射受光部３２ａを有し、この照射受光部３２ａをランプボディ１１のガラス部材３５に対向させている。その結果、センサヘッド３２の照射受光部３２ａから照射されたレーザ光Ｒは、ガラス部材３５、空洞１１ｃ、及び貫通孔１２ｃを通過して試料Ｓの試料表面Ｓａへ到達する。また、到達したレーザ光Ｒは試料表面Ｓａで反射して、貫通孔１２ｃ、空洞１１ｃ、及びガラス部材３５を通過して照射受光部３２ａに戻る。 A sensor head 32 of the length measuring device 30 is juxtaposed on one end face 11 h side of the lamp body 11 of the glow discharge tube 2. The sensor head 32 has an irradiation light receiving unit 32 a that receives the laser beam R and receives the reflected laser beam R (reflected light) on the tip side, and this irradiation light receiving unit 32 a faces the glass member 35 of the lamp body 11. I am letting. As a result, the laser beam R irradiated from the irradiation / light receiving unit 32a of the sensor head 32 passes through the glass member 35, the cavity 11c, and the through hole 12c and reaches the sample surface Sa of the sample S. In addition, the laser beam R that has arrived is reflected by the sample surface Sa, passes through the through hole 12c, the cavity 11c, and the glass member 35, and returns to the irradiation light receiving unit 32a.
さらに、グロー放電管のランプボディ１１の端面１１ｈには、カップ状の遮光部材３３を取り付けている。具体的には、遮光部材３３は内部にセンサヘッド３２及びガラス部材３５を被うようにした状態で周縁端部３３ａをランプボディ１１の端面１１ｈに当接しており、その結果、センサヘッド３２の照射受光部３２ａに周囲の明光が入り込むことを防止して測定の安定化を図っている。また、遮光部材３３はセンサヘッド３２から延出する接続線Ｌ４を通過させる通過孔を形成して、接続線Ｌ４を外方へ引き出して測長器３０のコントローラ３１（図１参照）へ接続している。なお、遮光部材３３は、グロー放電管２全体を被うような形状にすることも可能であり、また、掘削加工自体を暗室のような周囲の明光を排除できる場所で行うときは遮光部材３３を省略してもよい。 Further, a cup-shaped light shielding member 33 is attached to the end surface 11h of the lamp body 11 of the glow discharge tube. Specifically, the light shielding member 33 abuts the peripheral edge portion 33a on the end surface 11h of the lamp body 11 while covering the sensor head 32 and the glass member 35 therein. Measurements are stabilized by preventing ambient bright light from entering the irradiation light receiving part 32a. Further, the light shielding member 33 forms a passage hole through which the connection line L4 extending from the sensor head 32 passes, and the connection line L4 is pulled out to be connected to the controller 31 (see FIG. 1) of the length measuring device 30. ing. The light shielding member 33 can be shaped so as to cover the entire glow discharge tube 2, and the light shielding member 33 is used when excavation processing itself is performed in a place such as a dark room where ambient bright light can be excluded. May be omitted.
測長器３０のコントローラ３１は、センサヘッド３２に対するレーザ光Ｒの照射制御、試料Ｓに反射して戻ってきたレーザ光の受光に基づき距離を測定する処理、及び測定した距離を測定用接続線Ｌ５を通じて出力する処理等を行う。 The controller 31 of the length measuring device 30 controls the irradiation of the laser light R to the sensor head 32, the process of measuring the distance based on the reception of the laser light reflected back to the sample S, and the measured distance to the connection line for measurement. Processing to output through L5 is performed.
コントローラ３１は、レーザ光Ｒの照射制御について、測定用接続線Ｌ５を通じて入力された照射指示に基づき照射時期を決定して、センサヘッド３２の照射受光部３２ａからレーザ光を照射する制御処理を行う。また、距離測定に関して、コントローラ３１は、距離測定の準備段階でレーザ光Ｒに係る照射受光処理を行うと共に、そのときの状態（照射から受光までの時間等）を記憶しておき、次に測定時に行うレーザ光Ｒに係る照射受光の状態と記憶している状態とを比較して距離を算出し、その算出した距離を測定値として特定する。 For the irradiation control of the laser light R, the controller 31 determines the irradiation time based on the irradiation instruction input through the measurement connection line L5, and performs control processing for irradiating the laser light from the irradiation light receiving unit 32a of the sensor head 32. . Further, regarding the distance measurement, the controller 31 performs irradiation light reception processing related to the laser beam R in the distance measurement preparation stage, and stores the state (time from irradiation to light reception, etc.) at that time, and then measures. The distance is calculated by comparing the state of irradiation received and received with respect to the laser light R sometimes performed and the stored state, and the calculated distance is specified as a measured value.
なお、測長器３０は、レーザ光の照射及び受光による測定を、コントローラ３１が測定用接続線Ｌ５を通じてコンピュータ７から指示を受け付けた場合に行うようにしている。詳しくは、コンピュータ７から準備指示を受け付けると、準備段階の照射受光処理を行い、コンピュータ７から測定指示を受け付けると、照射受光を行って距離算出処理を経て掘削深さの測定値を求め、その求めた測定値を測定用接続線Ｌ５を通じてコンピュータ７へ出力する処理を行う。また、測長器３０は、コントローラ３１がコンピュータ７から測定終了指示を受け付けると、測定を終了し、コントローラ３１がコンピュータ７から一時停止指示を受け付けると、測定を一時的に停止する。なお、本実施形態の測長器３０は、照射するレーザ光Ｒの種類がHe-Neであり、レーザ光Ｒの波長が６３２．８ｎｍ（ナノメートル）、分解能が約０．０８μｍのものを用いている。 The length measuring device 30 performs measurement by laser light irradiation and light reception when the controller 31 receives an instruction from the computer 7 through the measurement connection line L5. Specifically, when a preparation instruction is received from the computer 7, irradiation light reception processing at a preparation stage is performed. When a measurement instruction is received from the computer 7, irradiation light reception is performed and a measured value of the excavation depth is obtained through a distance calculation process, A process of outputting the obtained measurement value to the computer 7 through the measurement connection line L5 is performed. Further, the length measuring device 30 ends the measurement when the controller 31 receives a measurement end instruction from the computer 7, and temporarily stops the measurement when the controller 31 receives a pause instruction from the computer 7. Note that the length measuring device 30 of this embodiment uses a laser beam R of which type is He—Ne, the wavelength of the laser beam R is 632.8 nm (nanometers), and the resolution is about 0.08 μm. ing.
図３は、電源部４を構成するジェネレータ６の内部構成を示している。ジェネレータ６は、高周波電力生成部６ａ、制御部６ｂ及び電力計測部６ｃを具備する。高周波電力生成部６ａは交流電源ＡＣと接続されて図４に示す正（＋）及び負（−）に変化する交流（高周波）電圧を試料Ｓ及び電極１２に印加するために高周波電力を生成する。また、高周波電力生成部６ａは第１内部接続線６ｄにより制御部６ｂと接続されており、制御部６ｂの制御により高周波電力に係る出力モード及び電力値等を調整する。なお、本実施形態の高周波電力生成部６ａは１３．５６ＭＨｚの高周波電圧に係る電力を生成している。 FIG. 3 shows the internal configuration of the generator 6 constituting the power supply unit 4. The generator 6 includes a high frequency power generation unit 6a, a control unit 6b, and a power measurement unit 6c. The high frequency power generation unit 6a is connected to the AC power source AC and generates high frequency power to apply the alternating current (high frequency) voltage changing to positive (+) and negative (−) shown in FIG. 4 to the sample S and the electrode 12. . The high-frequency power generation unit 6a is connected to the control unit 6b through the first internal connection line 6d, and adjusts the output mode and power value related to the high-frequency power under the control of the control unit 6b. In addition, the high frequency electric power production | generation part 6a of this embodiment produces | generates the electric power which concerns on the high frequency voltage of 13.56 MHz.
制御部６ｂはＩＣ（集積回路）で構成されており、第１接続コードＬ１を通じてコンピュータ７と接続されており、コンピュータ７から出力される各種信号に基づきグロー放電管２及び試料Ｓへの給電形態を判断し、判断結果に基づき高周波電力生成部６ａの出力モードを制御する。 The control unit 6b is composed of an IC (integrated circuit), and is connected to the computer 7 through the first connection cord L1. The power supply form to the glow discharge tube 2 and the sample S based on various signals output from the computer 7 And the output mode of the high-frequency power generation unit 6a is controlled based on the determination result.
図５（ａ）は、制御部６ｂによる１つ目の出力モードを示すグラフであり、所定の時間内、連続して高周波電力（電力値Ｐ）を出力して試料Ｓ及び電極１２に連続的な高周波電圧の印加を行うモードである（以降、このモードを連続モードと称す）。また、図５（ｂ）は、制御部６ｂによる２つ目の出力モードを示すグラフであり、所定の時間内、パルス的（オン／オフ的）に高周波電力（電力値Ｐ）を出力して試料Ｓ及び電極１２に断続的な高周波電圧の印加を行うモードである（以降、このモードを断続モードと称す）。 FIG. 5A is a graph showing a first output mode by the control unit 6b, and continuously outputs high-frequency power (power value P) to the sample S and the electrode 12 within a predetermined time. In this mode, a high frequency voltage is applied (hereinafter, this mode is referred to as a continuous mode). FIG. 5B is a graph showing the second output mode by the control unit 6b, which outputs high-frequency power (power value P) in a pulsed (on / off) manner within a predetermined time. In this mode, intermittent high frequency voltage is applied to the sample S and the electrode 12 (hereinafter, this mode is referred to as intermittent mode).
なお、制御部６ｂは、断続モードでは電圧の印加を断続的に行う手段として内部のＩＣでパルス的な処理を行うことで電力供給及び電力供給休止を交互に行う。このような処理により、図５（ｂ）に示す棒状に突出した部分に対応する給電時間Ｔ１で高周波電力が出力され、１回の給電及び給電休止をそれぞれ含む単位時間Ｔ２から給電時間Ｔ１を引いた時間Ｔ３で高周波電力の出力が休止される。 Note that, in the intermittent mode, the control unit 6b alternately performs power supply and power supply suspension by performing pulse processing with an internal IC as means for intermittently applying voltage. By such processing, high-frequency power is output at the power supply time T1 corresponding to the bar-shaped protruding portion shown in FIG. 5B, and the power supply time T1 is subtracted from the unit time T2 including one power supply and power supply suspension. The output of the high frequency power is stopped at the time T3.
また、制御部６ｂは切替手段として、上述した連続モードと断続モードとの切替をコンピュータ７から出力される信号に基づき行う。さらに、制御部６ｂは断続モードでは断続的な給電に係る状態を変更し、単位時間（１秒間）当たりの給電回数（給電周波数）、断続的な給電に係るデューティー比、及び断続的な給電の電力値をそれぞれ変更可能にしている。 Further, the control unit 6b performs switching between the above-described continuous mode and intermittent mode based on a signal output from the computer 7 as a switching unit. Further, the control unit 6b changes the state related to intermittent power supply in the intermittent mode, the number of power supply per unit time (one second) (power supply frequency), the duty ratio related to intermittent power supply, and the intermittent power supply. Each power value can be changed.
なお、給電周波数の変更に対して制御部６ｂは、約３０Ｈｚ〜約３０００Ｈｚの範囲で給電周波数を調整可能にしており、給電周波数が変更されると図５（ｂ）のグラフにおいて、時間Ｔ３が変化する。また、デューティー比の変更に関しては、断続給電中の単位時間Ｔ２対し１回分の給電時間Ｔ１が占める割合（Ｔ１／Ｔ２）を適宜調節できるようにしている。 Note that the control unit 6b can adjust the power supply frequency in the range of about 30 Hz to about 3000 Hz with respect to the change of the power supply frequency, and when the power supply frequency is changed, the time T3 in the graph of FIG. Change. As for the change of the duty ratio, the ratio (T1 / T2) occupied by one power supply time T1 to the unit time T2 during intermittent power supply can be adjusted as appropriate.
また、試料Ｓの掘削が進行するにつれて、試料Ｓと電極１２の先端１２ｅとの距離が長くなり、電圧印加における試料Ｓに係るインピーダンス値が随時変化するため、断続モードにおけるインピーダンス値変化に対する調整処理も制御部６ｂが行っている。 Further, as the excavation of the sample S progresses, the distance between the sample S and the tip 12e of the electrode 12 becomes longer, and the impedance value related to the sample S in voltage application changes as needed. Therefore, the adjustment process for the impedance value change in the intermittent mode Is also performed by the control unit 6b.
具体的に制御部６ｂは、後述する電力計測部６ｃから伝送されてきた出力値Ｐｆ及び反射値Ｐｒとの差を演算し、演算された差に基づき高周波電力生成部６ａで生成された高周波電力の試料Ｓへ給電される進行波の電力値（出力値Ｐｆ）を変更する制御を行う。なお、制御部６ｂは演算された差（Ｐｆ−Ｐｒ）が一定となるように出力値Ｐｆを調整しており、本実施形態では演算された差（Ｐｆ−Ｐｒ）が後述するコンピュータ７から伝送されてきた基準電力値と同等となるように高周波電力生成部６ａで生成される出力値Ｐｆを制御部６ｂが内蔵するＩＣのソフト的な処理で調整する。 Specifically, the control unit 6b calculates the difference between the output value Pf and the reflection value Pr transmitted from the power measurement unit 6c described later, and the high frequency power generated by the high frequency power generation unit 6a based on the calculated difference. Control is performed to change the power value (output value Pf) of the traveling wave fed to the sample S. Note that the control unit 6b adjusts the output value Pf so that the calculated difference (Pf−Pr) is constant. In this embodiment, the calculated difference (Pf−Pr) is transmitted from the computer 7 described later. The output value Pf generated by the high-frequency power generation unit 6a is adjusted by software processing of an IC built in the control unit 6b so as to be equal to the reference power value that has been performed.
このように制御部６ｂがソフト的な調整を行うことで、断続モードでの試料Ｓのインピーダンス値の変化に対応して適切な給電を行える。なお、制御部６ｂが試料Ｓのインピーダンス値の変化に対応した調整を行うのは断続モードの場合であり、連続モードでは後述するようにマッチングボックス５が調整を行う。 As described above, the control unit 6b performs soft adjustment, so that appropriate power supply can be performed in response to a change in the impedance value of the sample S in the intermittent mode. The control unit 6b performs adjustment corresponding to the change in the impedance value of the sample S in the intermittent mode. In the continuous mode, the matching box 5 performs adjustment as described later.
図３に戻りジェネレータ６の電力計測部６ｃは、第２及び第３内部接続線６ｅ、６ｆにより制御部６ｂ、高周波電力生成部６ａと接続されている。電力計測部６ｃは、高周波電力生成部６ａで生成されて図１に示す発振子３へ向かう高周波電力の進行波の電力値である出力値Ｐｆを検出すると共に、試料Ｓから反射して戻ってくる反射波の電力値である反射値Ｐｒを検出し、検出した値を制御部６ｂへ伝送している。 Returning to FIG. 3, the power measurement unit 6 c of the generator 6 is connected to the control unit 6 b and the high-frequency power generation unit 6 a by the second and third internal connection lines 6 e and 6 f. The power measuring unit 6c detects the output value Pf that is the power value of the traveling wave of the high-frequency power that is generated by the high-frequency power generation unit 6a and travels toward the oscillator 3 shown in FIG. The reflection value Pr, which is the power value of the incoming reflected wave, is detected, and the detected value is transmitted to the control unit 6b.
また、電源部４のマッチングボックス５は、図６に示すように、連続モードにおいてジェネレータ６で生成された高周波電力に対する電源部４としての出力形態を調整する可変コンデンサ５ａ、可変コンデンサ５ａの電気容量を調整するモータ５ｂ、モータ５ｂの駆動等の制御を行うコンデンサ制御部５ｃを具備する。 Further, as shown in FIG. 6, the matching box 5 of the power supply unit 4 includes a variable capacitor 5a for adjusting the output form as the power supply unit 4 with respect to the high frequency power generated by the generator 6 in the continuous mode, and the electric capacity of the variable capacitor 5a. A motor 5b for adjusting the motor 5b and a capacitor controller 5c for controlling the driving of the motor 5b.
可変コンデンサ５ａはモータ５ｂの駆動に応じて自身の電気容量を変更でき、電気容量の変更によりモジュール及びフェーズが調節される。また、コンデンサ制御部５ｃは、第２接続コードＬ２によりコンピュータ７と接続されており、コンピュータ７からマッチングボックス５へ伝送されてくる断続モードの設定の通知信号に基づいてモータ５ｂの駆動を制御する。 The variable capacitor 5a can change its own electric capacity according to the driving of the motor 5b, and the module and the phase are adjusted by changing the electric capacity. The capacitor control unit 5c is connected to the computer 7 by the second connection cord L2, and controls the driving of the motor 5b based on the notification signal for setting the intermittent mode transmitted from the computer 7 to the matching box 5. .
具体的には、断続モードの通知信号を受け付けた場合、可変コンデンサ５ａの電気容量が一定に固定されるようにモータ５ｂを一定の状態に維持する制御をコンデンサ制御部５ｃは行う。よって、断続モードではマッチングボックス５で高周波電力のモジュール及びフェーズは調整されない。また、断続モードの通知信号を受け付けない場合、即ち、連続モードが設定されたとき、試料Ｓからの反射値Ｐｒが最小となるようにモータ５ｂの駆動を制御して可変コンデンサ５ａの電気容量を変更する制御をコンデンサ制御部５ｃは行う。なお、反射値Ｐｒが最小であれば、コンデンサ制御部５ｃは可変コンデンサ５ａの電気容量を変更する制御は行わない。 Specifically, when the notification signal of the intermittent mode is received, the capacitor control unit 5c performs control to maintain the motor 5b in a constant state so that the electric capacity of the variable capacitor 5a is fixed. Therefore, the high-frequency power module and phase are not adjusted in the matching box 5 in the intermittent mode. Further, when the notification signal of the intermittent mode is not received, that is, when the continuous mode is set, the drive of the motor 5b is controlled so that the reflection value Pr from the sample S is minimized, and the electric capacity of the variable capacitor 5a is increased. The capacitor control unit 5c performs control to be changed. If the reflection value Pr is minimum, the capacitor controller 5c does not perform control to change the electric capacity of the variable capacitor 5a.
また、図１に示すコンピュータ７は、ジェネレータ６から延在する第１接続コードＬ１及びマッチングボックス５から延在する第２接続コードＬ２が接続されるインタフェース基板７ｂを設けており、このインタフェース基板７ｂをＣＰＵ７ａ、外部接続部７ｃ、ＲＡＭ７ｄ、ＲＯＭ７ｅ、及びハードディスク装置７ｆが接続された内部バス７ｇに繋げている。なお、内部バス７ｇにはモニタ接続線Ｌ３を介してモニタ部７ｈも接続している。 Further, the computer 7 shown in FIG. 1 is provided with an interface board 7b to which a first connection cord L1 extending from the generator 6 and a second connection cord L2 extending from the matching box 5 are connected. Are connected to an internal bus 7g to which a CPU 7a, an external connection unit 7c, a RAM 7d, a ROM 7e, and a hard disk device 7f are connected. Note that a monitor unit 7h is also connected to the internal bus 7g via a monitor connection line L3.
外部接続部７ｃは外部機器の接続用であり、本実施形態では、測定用接続線Ｌ５を通じて測長器３０のコントローラ３１を接続している。また、ＲＡＭ７ｄはＣＰＵ７ａが行う各種制御処理に伴うデータ等を一時的に記憶し、ＲＯＭ７ｅはＣＰＵ７ａが行う基本的な処理内容を規定したプログラム等を予め記憶しており、ハードディスク装置７ｆはＣＰＵ７ａが行う掘削処理に関連する制御内容を規定した掘削プログラム２１等を記憶している。 The external connection portion 7c is for connecting an external device, and in this embodiment, the controller 31 of the length measuring device 30 is connected through the measurement connection line L5. The RAM 7d temporarily stores data associated with various control processes performed by the CPU 7a, the ROM 7e stores in advance a program that defines basic processing contents performed by the CPU 7a, and the hard disk device 7f is performed by the CPU 7a. The excavation program 21 etc. which prescribed | regulated the control content relevant to excavation processing are memorize | stored.
インタフェース基板７ｂは連続モード用回路、断続モード用回路を有し、ＣＰＵ７ａの制御に基づき、ユーザにより設定されたモードがインタフェース基板７ｂへ通知されれば、通知されたモードに対応する回路が作動し、作動した回路による処理でモード切替の制御信号がジェネレータ６へ出力される。 The interface board 7b has a continuous mode circuit and an intermittent mode circuit. When the mode set by the user is notified to the interface board 7b based on the control of the CPU 7a, the circuit corresponding to the notified mode operates. The control signal for mode switching is output to the generator 6 by the processing by the activated circuit.
また、インタフェース基板７ｂの断続モード用回路には、断続モードに対してユーザによりコンピュータ７で設定された給電周波数、デューティー比、電力値等のパラメータが伝送され、断続モード用回路は伝送された内容を１つにまとめた信号を生成してジェネレータ６へ出力すると共に、断続モードを通知するマニュアル・アダプテーションと云う通知信号をマッチングボックス５へ出力する処理を行う。なお、伝送されるパラメータには、高周波電力のピーク電力値、変動するインピーダンス値に対応した調整処理に用いられる基準電力値（基準値）等も含まれる。 Also, parameters such as the power supply frequency, duty ratio, and power value set by the user for the intermittent mode are transmitted to the intermittent mode circuit of the interface board 7b, and the intermittent mode circuit transmits the transmitted contents. Are generated and output to the generator 6, and a notification signal called manual adaptation for notifying the intermittent mode is output to the matching box 5. The transmitted parameter includes a peak power value of high-frequency power, a reference power value (reference value) used for adjustment processing corresponding to a varying impedance value, and the like.
ＣＰＵ７ａは、ハードディスク装置７ｆに記憶された掘削プログラム２１に基づいて各種処理を行い、図１で示していないキーボード又はマウス等の操作でユーザにより入力された指示に基づき所定の設定及び制御を行う。 The CPU 7a performs various processes based on the excavation program 21 stored in the hard disk device 7f, and performs predetermined setting and control based on an instruction input by the user through an operation of a keyboard or a mouse not shown in FIG.
例えば、掘削プログラム２１が起動すると、図７に示す設定メニュー２２をモニタ部７ｈに表示させる処理をＣＰＵ７ａは行う。また、設定メニュー２２に従い断続モード又は連続モードのいずれかの設定操作をユーザから受け付けた場合、ＣＰＵ７ａは受け付けた設定内容に対応するインタフェース基板７ｂ内の回路を作動させる処理を行う。 For example, when the excavation program 21 is activated, the CPU 7a performs a process of displaying the setting menu 22 shown in FIG. 7 on the monitor unit 7h. When the setting operation in either the intermittent mode or the continuous mode is received from the user according to the setting menu 22, the CPU 7a performs a process of operating the circuit in the interface board 7b corresponding to the received setting content.
設定メニュー２２で断続モードが設定された場合、ＣＰＵ７ａは周波数（給電周波数）及びデューティー比の数値設定もユーザから受け付ける処理を行い、受け付けた内容をインタフェース基板７ｂへ通知してジェネレータ６へ所定の信号を伝送する。なお、デューティー比は、掘削対象の試料Ｓが特に溶解しやすい場合及び破壊しやすい場合、０．５より低い数値に設定することが好ましい。また、ＣＰＵ７ｂは、上述した設定メニュー２２以外の別のメニューで、高周波電力のピーク等の他のパラメータも設定可能にしている。さらに、断続モードが設定されたとき、ＣＰＵ７ａは、断続モードの設定を伝える通知信号をインタフェース基板７ｂからマッチングボックス５へ出力する制御を行う。 When the intermittent mode is set in the setting menu 22, the CPU 7a performs processing for accepting numerical settings of the frequency (feeding frequency) and the duty ratio from the user, notifies the received contents to the interface board 7b, and sends a predetermined signal to the generator 6 Is transmitted. The duty ratio is preferably set to a value lower than 0.5 when the excavation target sample S is particularly easily dissolved and easily broken. In addition, the CPU 7b can set other parameters such as a peak of high-frequency power using another menu other than the setting menu 22 described above. Further, when the intermittent mode is set, the CPU 7a performs a control to output a notification signal that notifies the setting of the intermittent mode from the interface board 7b to the matching box 5.
一方、設定メニュー２２で連続モードが設定された場合、ＣＰＵ７ａは連続的に電力を生成するようにインタフェース基板７ｂからジェネレータ６に指示信号を出力させる制御を行う。 On the other hand, when the continuous mode is set in the setting menu 22, the CPU 7a performs control to cause the generator 6 to output an instruction signal so as to continuously generate power.
さらに、いずれのモードが設定された場合でも、設定メニュー２２は試料Ｓに対する掘削深さを設定できるようにしており、コンピュータ７がキーボード又はマウスでユーザから掘削深さの入力を受け付けた場合、ＣＰＵ７ａは受け付けた数値をＲＡＭ７ｄに記憶すると共に、グロー放電による掘削処理を行う前に試料表面Ｓａに対する準備指示を外部接続部７ｃから測長器３０のコントローラ３１へ送る処理を行う。 Further, regardless of which mode is set, the setting menu 22 is configured so that the digging depth for the sample S can be set. When the computer 7 receives an input of the digging depth from the user with a keyboard or a mouse, the CPU 7a Stores the received numerical value in the RAM 7d and performs a process of sending a preparation instruction for the sample surface Sa from the external connection portion 7c to the controller 31 of the length measuring device 30 before performing the excavation process by glow discharge.
また、本実施形態では連続モードが設定されたときは、図８に示すように、グロー放電による掘削と共に測長器３０での掘削深さの測定を行うようＣＰＵ７ａは測長器３０を制御する。この場合、ＣＰＵ７ｂは、ジェネレータ６へ給電開始を指示する時期に合わせて、測長器３０のコントローラ３１へ測定指示を出力する制御を行う。なお、この場合は、グロー放電に伴う発光が生じている最中に、測長器３０はレーザ光の照射及び受光により測定を行うことになるが、グロー放電で生じる光の波長と、レーザ光の波長は値が大きく相異していることが多いため、測定精度に影響を及ぼす割合は小さい。 Further, in the present embodiment, when the continuous mode is set, the CPU 7a controls the length measuring device 30 to measure the excavation depth by the length measuring device 30 together with the excavation by glow discharge as shown in FIG. . In this case, the CPU 7b performs control to output a measurement instruction to the controller 31 of the length measuring device 30 in accordance with the time when the generator 6 is instructed to start power feeding. In this case, while the light emission associated with the glow discharge is occurring, the length measuring device 30 performs measurement by irradiating and receiving the laser beam. The wavelength of the light generated by the glow discharge and the laser beam are measured. Since the wavelengths of are often greatly different, the rate of influence on the measurement accuracy is small.
一方、断続モードが設定されたときは、図５（ｂ）に示すように、断続給電時の給電断時（高周波電圧の断続印加中の印加断時）の時間Ｔ３で測定を行うように、ＣＰＵ７ａは測長器３０を制御する。詳しくは、各給電時間Ｔ１の間の時間Ｔ３に同期して掘削深さの測定を行えるように、ＣＰＵ７ａは給電時間Ｔ１の終了時期に測定指示を外部接続部７ｃから測長器３０のコントローラ３１へ出力すると共に、時間Ｔ３の終了時期に一時停止指示をコントローラ３１へ出力する。このようにＣＰＵ７ａが指示を出力することで、測長器３０が測定を行うとき（反射したレーザ光Ｒをセンサヘッド３２で受光するとき）、グロー放電に伴う発光が生じていないので、グロー放電による発光の影響を受けることなく、一段と安定した高精度測定を行える。 On the other hand, when the intermittent mode is set, as shown in FIG. 5B, the measurement is performed at time T3 when the power supply is interrupted during intermittent power supply (when the application of high-frequency voltage is intermittently applied). The CPU 7a controls the length measuring device 30. Specifically, the CPU 7a sends a measurement instruction from the external connection unit 7c to the controller 31 of the length measuring device 30 at the end time of the feeding time T1 so that the excavation depth can be measured in synchronization with the time T3 between the feeding times T1. And a temporary stop instruction to the controller 31 at the end time of the time T3. Since the CPU 7a outputs the instruction in this way, when the length measuring device 30 performs measurement (when the reflected laser beam R is received by the sensor head 32), no light emission is caused by the glow discharge. This makes it possible to perform more stable and highly accurate measurement without being affected by the light emission caused by.
さらに、設定メニュー２２で設定された掘削深さまで試料Ｓが掘削されれば、掘削加工を自動的に終了させるため、コンピュータ７は測長器３０から送られてくる測定値を外部接続部７ｃで受け付け、受け付けた測定値をモニタ部７ｈに随時表示する制御をＣＰＵ７ａが行うと共に、受け付けた測定値とＲＡＭ７ｄに記憶している掘削深さ（記憶値）をＣＰＵ７ｂが比較判定する。比較の結果、測定値が記憶値に達しないときは、ＣＰＵ７ｂは掘削加工を継続する制御処理を行う一方、測定値が記憶値に達したと判定したとき、ジェネレータ６へ給電を停止する指示を出して掘削を終了させる。なお、このときＣＰＵ７ｂは、測長器３０には測定終了指示を出す。 Further, when the sample S is excavated to the excavation depth set in the setting menu 22, the computer 7 automatically transmits the measured value sent from the length measuring device 30 through the external connection unit 7c in order to terminate excavation processing automatically. The CPU 7a performs control for receiving and displaying the received measurement values on the monitor unit 7h as needed, and the CPU 7b compares and determines the received measurement values and the excavation depth (stored value) stored in the RAM 7d. As a result of the comparison, when the measured value does not reach the stored value, the CPU 7b performs a control process for continuing the excavation process. On the other hand, when it is determined that the measured value has reached the stored value, the CPU 6b instructs the generator 6 to stop power supply. To complete the excavation. At this time, the CPU 7b issues a measurement end instruction to the length measuring device 30.
次に上述した構成のグロー放電掘削装置１を用いたグロー放電掘削方法に係る全体的な処理手順を図９の第１フローチャートに基づいて説明する。
先ず、図７に示す設定メニュー２２等でモード、並びに周波数、デューティー比、及び掘削深さ等の各種パラメータを設定し（Ｓ１）、試料Ｓを図２に示すようにグロー放電管２にセットする（Ｓ２）。
Next, an overall processing procedure according to the glow discharge excavation method using the glow discharge excavation apparatus 1 having the above-described configuration will be described based on the first flowchart of FIG.
First, the mode and various parameters such as frequency, duty ratio, and excavation depth are set in the setting menu 22 shown in FIG. 7 (S1), and the sample S is set in the glow discharge tube 2 as shown in FIG. (S2).
次に、グロー放電管２の内部を真空引き装置８で真空引きしてから、ガス供給源１０よりグロー放電管２の内部へ不活性ガス（アルゴンガス）を供給する（Ｓ３）。それから、測長器３０の準備段階のとして基準状態測定用に掘削前の試料表面Ｓａにレーザ光Ｒの照射及び反射したレーザ光Ｒを受光する処理を行ってから、設定された内容に応じた給電を行って電圧を印加し（Ｓ４）、試料Ｓの空間Ｋに表出した試料表面Ｓａを掘削する（Ｓ５）。 Next, after the inside of the glow discharge tube 2 is evacuated by the vacuuming device 8, an inert gas (argon gas) is supplied from the gas supply source 10 to the inside of the glow discharge tube 2 (S3). Then, as a preparatory stage of the length measuring device 30, the sample surface Sa before excavation is subjected to a process of irradiating the laser beam R and receiving the reflected laser beam R for reference state measurement, and then according to the set contents. Power is applied to apply a voltage (S4), and the sample surface Sa exposed in the space K of the sample S is excavated (S5).
図１０（ａ）は、試料Ｓの掘削状態を示し、第３オーリング２０で閉鎖された空間Ｋでは、電極１２の貫通孔１２ｃを通じアルゴンガスがスムーズに導かれた状態で電極１２及び試料Ｓの間に電圧が印加されてグロー放電が発生し、アルゴンガスに含まれるアルゴンイオンが試料表面Ｓａに向けて飛び出して衝突し、スパッタリングが起こる。このスパッタリングによるアルゴンイオンの衝突で試料表面Ｓａが掘削されて凹部Ｓｂが生じる。また、凹部Ｓｂの底面Ｓｃは測長器３０からレーザ光Ｒが照射されると共に、照射されたレーザ光Ｒを反射するので、試料表面Ｓａから底面Ｓｃまでの距離Ｄが測長器３０により掘削深さとして測定される（図１０（ｂ）参照）。 FIG. 10A shows the excavation state of the sample S. In the space K closed by the third O-ring 20, the argon gas is smoothly guided through the through hole 12c of the electrode 12 and the electrode 12 and the sample S. During this time, a voltage is applied to generate glow discharge, and argon ions contained in the argon gas jump out and collide with the sample surface Sa, and sputtering occurs. The sample surface Sa is excavated by the collision of argon ions by the sputtering, and a recess Sb is generated. Further, the bottom surface Sc of the recess Sb is irradiated with the laser light R from the length measuring device 30 and reflects the irradiated laser light R, so that the distance D from the sample surface Sa to the bottom surface Sc is excavated by the length measuring device 30. It is measured as the depth (see FIG. 10B).
また、図１１は、図９の第１フローチャートの掘削の処理段階（Ｓ５）で、掘削に伴い行われる掘削深さの測定に係る制御処理を示す第２フローチャートである。なお、第２フローチャートは、測定処理に係る基本的な内容を表しており、図５（ｂ）に示すように断続的に測定を行う場合と、図８に示すように連続的に測定を行う場合での共通的な処理を示している。 FIG. 11 is a second flowchart showing a control process related to the measurement of excavation depth performed in excavation in the excavation processing stage (S5) of the first flowchart of FIG. Note that the second flowchart shows the basic contents related to the measurement process. When the measurement is intermittently performed as shown in FIG. 5B, the measurement is continuously performed as shown in FIG. Shows the common processing in some cases.
先ず、グロー放電掘削装置１は測定を行う場合、測長器３０のセンサヘッド３２からレーザ光Ｒを照射し（Ｓ１０）、試料Ｓの掘削箇所となる凹部Ｓｂの底面Ｓｃで反射したレーザ光Ｒを受光して（Ｓ１１）、測長器３０が掘削深さを測定する（Ｓ１２）。次に、コンピュータ７０は、測長器３０で測定した掘削深さが第１フローチャートの最初の段階（Ｓ１）で設定された掘削深さと同一になったかを比較する（Ｓ１３）。 First, when performing the measurement, the glow discharge excavation apparatus 1 irradiates the laser beam R from the sensor head 32 of the length measuring device 30 (S10), and reflects the laser beam R reflected by the bottom surface Sc of the recess Sb serving as the excavation site of the sample S. Is received (S11), and the length measuring device 30 measures the excavation depth (S12). Next, the computer 70 compares whether the excavation depth measured by the length measuring device 30 is the same as the excavation depth set in the first stage (S1) of the first flowchart (S13).
コンピュータ７０が測定した掘削深さは、設定された掘削深さと同一でないと判定した場合（Ｓ１３：ＮＯ）、最初の照射の段階（Ｓ１０）へ戻り、測長器３０は測定を継続する。また、測定した掘削深さが、設定された掘削深さと同一であると判定された場合（Ｓ１３：ＹＥＳ）、グロー放電掘削装置１は、所望の深さまで試料Ｓを掘削したとして、電圧印加を止めて掘削を停止し（Ｓ１４）、全体的な処理を終了する。 When it is determined that the excavation depth measured by the computer 70 is not the same as the set excavation depth (S13: NO), the process returns to the first irradiation stage (S10), and the length measuring device 30 continues the measurement. Moreover, when it is determined that the measured excavation depth is the same as the set excavation depth (S13: YES), the glow discharge excavator 1 determines that the sample S has been excavated to a desired depth and applies voltage. The excavation is stopped to stop (S14), and the entire process is terminated.
このように、本実施形態のグロー放電掘削装置１は、掘削に伴って試料Ｓの掘削箇所を測長器３０で直接的に測定するので、掘削加工中での掘削した深さ（長さ）を従来に比べて正確に求めることができる。また、所望する掘削深さを設定すれば、設定した掘削深さに測定値が到達すると自動的に掘削加工が終了するので、本実施形態のグロー放電掘削装置１はユーザの操作負担を従来の装置に比べて大幅に低減すると共に、加工者の技量に左右されることなく高精度な掘削加工を実現している。 Thus, since the glow discharge excavation apparatus 1 of this embodiment directly measures the excavation location of the sample S with the length measuring device 30 along with excavation, the depth (length) excavated during excavation processing. Can be obtained more accurately than in the past. Moreover, if the desired excavation depth is set, the excavation process automatically ends when the measured value reaches the set excavation depth. Therefore, the glow discharge excavation apparatus 1 according to the present embodiment places a burden on the user in the conventional operation. Compared to the equipment, it is significantly reduced, and highly accurate excavation is realized without being affected by the skill of the operator.
なお、本発明に係るグロー放電掘削装置１は、上述した実施形態に限定されるものではなく種々の変形例の適用が可能である。例えば、グロー放電掘削装置１で電極１２と試料Ｓの間に印加する電圧は直流電圧にしてもよく、この場合は電源部４を直流の電力を生成して給電する構成に変更することになる。また、グロー放電掘削装置１に係る仕様を簡略化する場合は、設定した掘削深さと測定値との比較により電圧印加を停止して掘削加工を終了する制御を省略してもよく、この場合は、モニタ部７ｈに表示される測定値をユーザが確認しながら、ユーザがマニュアル操作で掘削加工を終了することになる。 In addition, the glow discharge excavation apparatus 1 according to the present invention is not limited to the above-described embodiment, and various modifications can be applied. For example, the voltage applied between the electrode 12 and the sample S in the glow discharge excavation apparatus 1 may be a DC voltage, and in this case, the power supply unit 4 is changed to a configuration that generates and supplies DC power. . Further, when simplifying the specifications related to the glow discharge excavator 1, the control for stopping the voltage application and ending the excavation process may be omitted by comparing the set excavation depth and the measured value. While the user confirms the measurement value displayed on the monitor unit 7h, the user ends the excavation process manually.
さらに、グロー放電掘削装置１は、電圧印加に対して連続モード及び断続モードの両方を必ず具備する必要はなく、いずれか一方のモードだけで電圧印加を行うようにして、装置コストの低減を図ってもよい。 Furthermore, the glow discharge excavation apparatus 1 does not necessarily have both the continuous mode and the intermittent mode for voltage application, and the voltage application is performed only in one of the modes to reduce the apparatus cost. May be.
さらにまた、連続モードにおける測定の時期については、図８のように掘削と共に随時行う以外にも、図１２に示すように、一定の時間（Ｔ１０、Ｔ１２）で掘削を行うと、次に時間（Ｔ１１、Ｔ１３）で測定を行うようにして、掘削と測定が時間的に重ならないようにしてもよい。この場合、測長器３０が測定のためレーザ光Ｒを受光するときに、電圧の印加が停止されグロー放電に伴うスパッタリングの発光が生じないので、測定の安定度を高められる。 Furthermore, as for the timing of measurement in the continuous mode, if excavation is performed at a fixed time (T10, T12) as shown in FIG. Measurement may be performed at T11 and T13) so that excavation and measurement do not overlap in time. In this case, when the length measuring device 30 receives the laser beam R for measurement, the application of voltage is stopped and sputtering light emission due to glow discharge does not occur, so that the measurement stability can be improved.
なお、掘削に係る時間Ｔ１０、Ｔ１２等は、メニューで設定可能にすることが好適であり、細かな設定を行う場合には、各掘削時間Ｔ１１、Ｔ１２毎に数値を個別に設定できるようにしてもよい。この場合のコンピュータ７の制御は、設定された時間Ｔ１１、Ｔ１２をコンピュータ７が計時し、時間Ｔ１１の計時が終了した時にジェネレータ６に対しては電圧印加を一時停止する指示を出力すると共に、測長器３０へは測定指示を出力し、測定値が送られるとジェネレータ６に電圧印加を再開する指示を出力すると共に測長器３０へは一時停止指示を出力してから、次の時間Ｔ１２の計時を開始するような制御処理となる。 In addition, it is preferable that the time T10, T12, etc. related to excavation can be set in the menu, and in the case of performing detailed setting, numerical values can be individually set for each excavation time T11, T12. Also good. In this case, the computer 7 measures the set times T11 and T12, and outputs an instruction to temporarily stop the voltage application to the generator 6 when the time T11 ends. A measurement instruction is output to the length measuring device 30, and when a measurement value is sent, an instruction to resume voltage application is output to the generator 6, and a pause instruction is output to the length measuring device 30, and then at the next time T12. The control process starts timing.
また、断続モードを行う場合でも、図８に示すように、掘削加工と共に測定処理を随時行ってもよく、このようにすることで、掘削加工に伴ってリアルタイム的に掘削深さを測定でき、掘削加工を終了するタイミングを一段と正確に特定できるようになる。 In addition, even when performing the intermittent mode, as shown in FIG. 8, the measurement process may be performed at any time together with the excavation process, and in this way, the excavation depth can be measured in real time along with the excavation process, The timing for ending the excavation process can be specified more accurately.
図１３は、変形例のグロー放電管２′を示しており、このグロー放電管２′は、ランプボディ１１′に設けた空洞１１ｃ′内に棒状のセンサヘッド４０を配置したことを特徴にしている。センサヘッド４０は、図２に示すセンサヘッド３２に比べて小型であると共に、耐スパッタリング性能を具備した外装を施している。また、センサヘッド４０を取り付けるランプボディ１１′は、試料Ｓを配置する側と反対側の端面１１ｈ′に空洞１１ｃ′と連通する連通孔１１ｉ′を形成し、この連通孔１１ｉ′に、センサヘッド４０を挿通すると共に、連通孔１１ｉ′の内縁とセンサヘッド４０の外面の間に環状の封止部材４１を取り付けて空洞１１ｃ′を閉鎖している。 FIG. 13 shows a glow discharge tube 2 'according to a modification. The glow discharge tube 2' is characterized in that a rod-shaped sensor head 40 is disposed in a cavity 11c 'provided in the lamp body 11'. Yes. The sensor head 40 is smaller than the sensor head 32 shown in FIG. 2 and has an exterior with anti-sputtering performance. The lamp body 11 ′ to which the sensor head 40 is attached has a communication hole 11i ′ communicating with the cavity 11c ′ on the end surface 11h ′ opposite to the side on which the sample S is disposed, and the sensor head is formed in the communication hole 11i ′. 40, and an annular sealing member 41 is attached between the inner edge of the communication hole 11i 'and the outer surface of the sensor head 40 to close the cavity 11c'.
なお、変形例のグロー放電管２′は上述した以外については、図２に示す構成と同様であり、電極１２、セラミックス部材１３、及び押圧ブロック１５を有すると共に、発振子３を押し当てて試料Ｓを取り付けている。上記のようにセンサヘッド４０を取り付けることで、センサヘッド４０の先端部４０ａは、電極１２の円筒部１２ｂに形成された貫通孔１２ｃを通じて試料表面Ｓａに対向し、先端面４０ａからレーザ光を照射し、試料表面Ｓａで反射したレーザ光を先端面４０ａで受光できる。 The glow discharge tube 2 'of the modified example has the same configuration as that shown in FIG. 2 except for the above, and includes an electrode 12, a ceramic member 13, and a pressing block 15, and a sample by pressing the oscillator 3. S is attached. By attaching the sensor head 40 as described above, the tip portion 40a of the sensor head 40 faces the sample surface Sa through the through-hole 12c formed in the cylindrical portion 12b of the electrode 12, and laser light is irradiated from the tip surface 40a. Then, the laser beam reflected by the sample surface Sa can be received by the tip surface 40a.
このような変形例のグロー放電管２′は、センサヘッド４０を空洞１１ｃ′内に取り付けているので、図２に示すグロー放電管２の端面１１ｈに取り付けた遮光部材３３を不要にでき、また、センサヘッド４０のレーザ光照射部（受光部）から試料表面Ｓａまでの距離も縮まるため、測定精度の向上も図れる。 Since the glow discharge tube 2 'of such a modification has the sensor head 40 mounted in the cavity 11c', the light shielding member 33 mounted on the end surface 11h of the glow discharge tube 2 shown in FIG. In addition, since the distance from the laser beam irradiation part (light receiving part) of the sensor head 40 to the sample surface Sa is reduced, the measurement accuracy can be improved.
図１４（ａ）は、別の変形例のグロー放電管２に対する測長器３００の構成を示している。この測長器３００は、複数のセンサヘッド（第１センサヘッド３２１、第２センサヘッド３２２）を備えること、及び各センサヘッド３２１、３２２から試料Ｓへレーザ光Ｒ１、Ｒ２を照射できるように、反射部材４５、４６を設けたことが特徴である。詳しくは、各センサヘッド３２１、３２２は、電極１２の貫通孔１２ｃの中心軸に直交する向きで配置されており、反射部材４５、４６でレーザ光Ｒ１、Ｒ２の進行方向を変えて、試料Ｓへのレーザ光照射及び反射したレーザ光の受光を行えるようにしている。なお、反射部材４５、４６は１つのプリズムで代替することも可能である。また、グロー放電管２自体は、図２に示す構成と同等である。 FIG. 14A shows a configuration of the length measuring device 300 for the glow discharge tube 2 of another modification. The length measuring device 300 includes a plurality of sensor heads (first sensor head 321 and second sensor head 322), and can irradiate the sample S with laser beams R1 and R2 from the sensor heads 321 and 322. It is characterized in that the reflecting members 45 and 46 are provided. Specifically, each of the sensor heads 321 and 322 is arranged in a direction orthogonal to the central axis of the through-hole 12c of the electrode 12, and the traveling direction of the laser beams R1 and R2 is changed by the reflecting members 45 and 46, so that the sample S The laser beam can be irradiated and the reflected laser beam can be received. The reflecting members 45 and 46 can be replaced with one prism. The glow discharge tube 2 itself is equivalent to the configuration shown in FIG.
各センサヘッド３２１、３２２は、接続線Ｌ４１、Ｌ４２でコントローラ３１１に接続されており、コントローラ３１１は、各センサヘッド３２１、３２２でのレーザ光照射及び受光結果を受け付けて、センサヘッド３２１、３２２毎に掘削深さを特定すると共に、特定した各掘削深さの平均値を算出し、その算出した平均値を試料Ｓの掘削深さとしてコンピュータ７へ出力する処理を行う。このように２本のレーザ光Ｒ１、Ｒ２を用いて掘削深さを測定することで、測定精度の更なる向上を図れる。 The sensor heads 321 and 322 are connected to the controller 311 via connection lines L41 and L42. The controller 311 receives the laser light irradiation and light reception results of the sensor heads 321 and 322, and each sensor head 321 and 322. In addition, the drilling depth is specified, the average value of each specified drilling depth is calculated, and the calculated average value is output to the computer 7 as the drilling depth of the sample S. Thus, the measurement accuracy can be further improved by measuring the excavation depth using the two laser beams R1 and R2.
即ち、図１４（ｂ）に示すように、試料Ｓの掘削箇所となる凹部Ｓｂを微視的に見れば、凹部Ｓｂの底面Ｓｃにはスパッタリングの発生状況に応じて凹凸が生じるが、上述した変形例のように２本のレーザ光Ｒ１、Ｒ２による測定値の平均値を求めることで、底面Ｓｃの凹凸の影響を最小限に抑えて高精度な測定を実現できる。 That is, as shown in FIG. 14B, when the concave portion Sb that becomes the excavation site of the sample S is viewed microscopically, the bottom surface Sc of the concave portion Sb is uneven depending on the state of occurrence of sputtering. By obtaining the average value of the measurement values obtained by the two laser beams R1 and R2 as in the modification, it is possible to achieve highly accurate measurement while minimizing the influence of the unevenness of the bottom surface Sc.
なお、センサヘッド３２１、３２２の個数は２本に限定されるものではなく、２本以上用いて掘削深さを測定してもよい。また、１台のコントローラ３１１を複数のセンサヘッド３２１、３２２の共用にするのではなく、センサヘッド毎にコントローラを対応付けてセンサヘッド数と同数のコントローラを設け、各コントローラでは掘削深さのみを測定してコンピュータ７へ出力し、掘削深さの平均値の算出はコンピュータ７で行うようにしてもよい。さらに、各センサヘッド３２１、３２２、反射部材４５、４６、及びガラス部材３５を少なくとも被うように遮光部材を取り付けて、周囲の明光の影響を排除するようにしてもよい。さらにまた、グロー放電管２におけるランプボディ１１の空洞１１ｃ及び電極１２の貫通孔１２ｃの内径寸法が充分大きければ、反射部材４５、４６を用いることなく、直接的に試料Ｓへ向けてレーザ光Ｒ１、Ｒ２を照射するように各センサヘッド３２１、３２２を配置してもよい。 The number of sensor heads 321 and 322 is not limited to two, and two or more sensor heads may be used to measure the excavation depth. Also, instead of sharing one controller 311 with a plurality of sensor heads 321 and 322, controllers are associated with each sensor head, and the same number of controllers as the number of sensor heads are provided. It may be measured and output to the computer 7, and the average value of the excavation depth may be calculated by the computer 7. Furthermore, a light shielding member may be attached so as to cover at least the sensor heads 321 and 322, the reflecting members 45 and 46, and the glass member 35, thereby eliminating the influence of ambient bright light. Furthermore, if the inner diameter dimensions of the cavity 11c of the lamp body 11 and the through hole 12c of the electrode 12 in the glow discharge tube 2 are sufficiently large, the laser beam R1 is directed directly toward the sample S without using the reflecting members 45 and 46. The sensor heads 321 and 322 may be arranged to irradiate R2.
図１５は、グロー放電管を用いない場合の変形例となるグロー放電掘削装置５０を示し、密閉された掘削処理室５１の内部に第１電極５２及び試料Ｓを配置する第２電極５３を設け、第１電極５２を図１と同等の構成の電源部４に接続すると共に、第２電極５３を交流電源ＡＣの接地側に接続している。なお、電源部４は図１と同等にコンピュータ７により制御される。 FIG. 15 shows a glow discharge excavation apparatus 50 which is a modification when no glow discharge tube is used, and a first electrode 52 and a second electrode 53 for arranging the sample S are provided inside a sealed excavation processing chamber 51. The first electrode 52 is connected to the power supply unit 4 having the same configuration as that shown in FIG. 1, and the second electrode 53 is connected to the ground side of the AC power supply AC. The power supply unit 4 is controlled by a computer 7 as in FIG.
第１電極５２は、絶縁した状態で掘削処理室５１の天板部５１ａの内面側に取り付けられており、第２電極５３に載置される試料Ｓと対向する部分に貫通孔５２ａ（貫通部に相当）を形成している。また、第１電極５２の貫通孔５２ａを通じて試料Ｓへレーザ光Ｒを照射すると共に、試料Ｓで反射したレーザ光Ｒを受光できるように測長器３０のセンサヘッド３２を掘削処理室５１の天板部５１ａに取り付けており、センサヘッド３２は、コントローラ３１に接続されると共に、コントローラ３１はコンピュータ７に接続されている。 The first electrode 52 is attached to the inner surface side of the top plate portion 51 a of the excavation processing chamber 51 in an insulated state, and a through hole 52 a (through portion) is formed in a portion facing the sample S placed on the second electrode 53. Equivalent). In addition, the sample S is irradiated with the laser light R through the through hole 52a of the first electrode 52, and the sensor head 32 of the length measuring device 30 is placed in the excavation processing chamber 51 so that the laser light R reflected by the sample S can be received. The sensor head 32 is attached to the plate portion 51 a, and the controller 31 is connected to the computer 7 while being connected to the controller 31.
掘削処理室５１は、天板部５１ａにアルゴンガス供給用のガス供給穴５１ｂを開口し、底板部５１ｃに真空引き用穴５１ｄを開口し、掘削処理室５１の内部空間５１ｅを真空引き用穴５１ｄより真空引きしてから、ガス供給穴５１ｂよりアルゴンガス（不活性ガス）を供給した状態で、電源部４で高周波電力を生成して第１電極５２及び第２電極５３（試料Ｓ）の間に電圧を印可し、グロー放電によるスパッタリングで試料Ｓを掘削する。なお、図１５に示す変形例に係るグロー放電掘削装置５０では、上述した各種給電形態（連続モード、断続モード）、及びそれらに応じた各種測定形態（図５（ｂ）、図８、図１２参照）の適用が可能である。 In the excavation processing chamber 51, a gas supply hole 51b for supplying argon gas is opened in the top plate portion 51a, an evacuation hole 51d is opened in the bottom plate portion 51c, and the internal space 51e of the excavation processing chamber 51 is evacuated. After evacuating from 51d, in a state where argon gas (inert gas) is supplied from the gas supply hole 51b, high-frequency power is generated by the power supply unit 4, and the first electrode 52 and the second electrode 53 (sample S) are supplied. A voltage is applied between them, and the sample S is excavated by sputtering using glow discharge. In the glow discharge excavator 50 according to the modification shown in FIG. 15, the above-described various power supply modes (continuous mode, intermittent mode) and various measurement modes corresponding to them (FIG. 5B, FIG. 8, FIG. 12). Can be applied.
この変形例のグロー放電掘削装置５０では、試料Ｓを掘削処理室５１の第２電極５３に配置するだけで試料Ｓのセットが済むため、試料Ｓのセットに要する手間が少なく、また、第２電極５３に載置できるかぎり、どのような形態の試料Ｓでも掘削できるため、掘削できる試料形態の自由度が大きいと云う利点がある。また、センサヘッド５２を掘削処理室５１の天板部５１ａに取り付けるため、周囲の明光の影響も受けにくく、図２に示す遮光部材３３を省略できやすい。なお、変形例のグロー放電掘削装置５０に対しても、図１４（ｂ）に示す場合と同様に複数のセンサヘッドを用いて測定を行ってもよく、特に、グロー放電掘削装置５０は、掘削処理室５１を用いるためスペース的な余裕が大きいので、反射部材４５、４６を設けることなく複数のセンサヘッドを配置しやすいと云う利点もある。 In the glow discharge excavator 50 according to this modification, since the sample S can be set only by placing the sample S on the second electrode 53 of the excavation processing chamber 51, the time required for setting the sample S is small. Since any type of sample S can be excavated as long as it can be placed on the electrode 53, there is an advantage that the degree of freedom of the form of the sample that can be excavated is large. Further, since the sensor head 52 is attached to the top plate portion 51a of the excavation processing chamber 51, it is difficult to be affected by the surrounding bright light, and the light shielding member 33 shown in FIG. Note that the glow discharge excavator 50 according to the modified example may be measured using a plurality of sensor heads as in the case shown in FIG. 14 (b). Since the processing chamber 51 is used, there is a large space, so there is an advantage that a plurality of sensor heads can be easily arranged without providing the reflecting members 45 and 46.
１ グロー放電掘削装置
２ グロー放電管
３ 発振子
４ 電源部
７ コンピュータ
１１ ランプボディ
１１ｃ 空洞
１２ 電極
１２ｃ 貫通孔
３０ 測長器
３１ コントローラ
３２ センサヘッド
３３ 遮光部材
３５ ガラス部材
Ｋ 空間
Ｓ 試料
DESCRIPTION OF SYMBOLS 1 Glow discharge excavator 2 Glow discharge tube 3 Oscillator 4 Power supply part 7 Computer 11 Lamp body 11c Cavity 12 Electrode 12c Through-hole 30 Length measuring device 31 Controller 32 Sensor head 33 Shading member 35 Glass member K Space S Sample
Claims (7)
掘削箇所への光の照射及び掘削箇所で反射した反射光の受光を行って掘削深さを測定する測定手段と、
高周波電圧を前記試料及び前記電極に印加すべく高周波電力を生成する高周波電力生成部と、
前記高周波電力生成部による一秒間あたりの給電回数を変更する手段と、
該手段により変更された一秒間あたりの給電回数に基づき、前記高周波電力生成部により生成される高周波電圧を前記試料及び前記電極に断続的に印加する手段とを備え、
前記測定手段は、高周波電圧の断続印加中の印加断時に反射光の受光を行うようにしてあることを特徴とするグロー放電掘削装置。 In a glow discharge excavation apparatus for excavating a sample with a glow discharge generated by applying a voltage between an electrode and a sample arranged opposite to the electrode,
Measuring means for measuring the depth of excavation by irradiating light to the excavation site and receiving reflected light reflected at the excavation site ;
A high-frequency power generator that generates high-frequency power to apply a high-frequency voltage to the sample and the electrode;
Means for changing the number of times of power supply per second by the high-frequency power generation unit;
A means for intermittently applying a high-frequency voltage generated by the high-frequency power generation unit to the sample and the electrode based on the number of times of power supply per second changed by the means;
The measuring means is a glow-discharge digging apparatus according to claim Citea Rukoto to perform reception of reflected light upon application cutoff during intermittent application of high frequency voltage.
前記測定手段は、前記貫通部を通じて掘削箇所への光の照射及び反射光の受光を行うようにしてある請求項１に記載のグロー放電掘削装置。 In the part facing the sample of the electrode, a through part is formed,
The glow discharge excavation apparatus according to claim 1, wherein the measurement unit is configured to irradiate light to the excavation site and receive reflected light through the penetrating portion.
該保持体は、前記電極の貫通部に連通する空洞を形成しており、該空洞を介して前記貫通部に対向する透光部材を備え、
前記測定手段は、前記透光部材、前記空洞及び前記貫通部を通じて掘削箇所への光の照射及び反射光の受光を行うようにしてある請求項２に記載のグロー放電掘削装置。 A holding body for holding the electrode;
The holding body forms a cavity that communicates with the penetrating portion of the electrode, and includes a translucent member that faces the penetrating portion through the cavity,
The glow discharge excavation apparatus according to claim 2, wherein the measurement unit is configured to irradiate light to the excavation site and receive reflected light through the translucent member, the cavity, and the penetrating portion.
該照射受光部は、前記透光部材に対向するように前記保持体に並置してあり、
前記照射受光部及び透光部材を被って遮光する遮光部材を備える請求項３に記載のグロー放電掘削装置。 The measuring means includes an irradiation light receiving unit that performs irradiation of light and reception of reflected light,
The irradiation light receiving unit is juxtaposed to the holding body so as to face the translucent member,
The glow discharge excavation apparatus according to claim 3, further comprising a light shielding member that covers the irradiation light receiving unit and the light transmitting member to shield the light.
該受付手段が受け付けた掘削深さ及び前記測定手段が測定する掘削深さの比較判定を行う手段と、
前記測定手段が測定した掘削深さが、前記受付手段が受け付けた掘削深さになったと判定された場合、電圧印加を停止して掘削を終了する手段と
を備える請求項１乃至請求項４のいずれか１つに記載のグロー放電掘削装置。 A receiving means for receiving the digging depth;
Means for comparing and determining the excavation depth received by the accepting means and the excavation depth measured by the measuring means;
Digging depth in which the measuring means has measured, when said reception means is determined to become digging depth accepted, of claims 1 to 4 and means for terminating the drilling stops the voltage application The glow discharge excavator according to any one of the above.
受光した複数の反射光に基づく複数の掘削深さの平均値を算出する平均値算出手段を備える請求項１乃至請求項５のいずれか１つに記載のグロー放電掘削装置。 The measuring means includes means for irradiating a plurality of lights and receiving a plurality of reflected lights,
The glow discharge excavator according to any one of claims 1 to 5 , further comprising an average value calculating means for calculating an average value of a plurality of excavation depths based on a plurality of received reflected lights.
掘削箇所への光の照射及び掘削箇所で反射した反射光の受光を行って掘削深さを測定し、
高周波電力生成部により、高周波電圧を前記試料及び前記電極に印加すべく高周波電力を生成させ、
前記高周波電力生成部による一秒間あたりの給電回数を変更させ、
該変更した一秒間あたりの給電回数に基づき、前記高周波電力生成部により生成される高周波電圧を前記試料及び前記電極に断続的に印加し、
掘削深さを測定する場合、高周波電圧の断続印加中の印加断時に反射光の受光を行い、
測定した掘削深さに応じて電圧印加を停止して掘削を終了することを特徴とするグロー放電掘削方法。 In a glow discharge excavation method for excavating a sample with a glow discharge generated by applying a voltage between an electrode and a sample arranged opposite to the electrode,
Measure the excavation depth by irradiating light to the excavation site and receiving the reflected light reflected at the excavation site,
The high-frequency power generator generates high-frequency power to apply a high-frequency voltage to the sample and the electrode,
Change the number of power supply per second by the high-frequency power generation unit,
Based on the changed number of times of power supply per second, the high frequency voltage generated by the high frequency power generation unit is intermittently applied to the sample and the electrode,
When measuring the excavation depth, the reflected light is received when the high frequency voltage is intermittently applied.
A glow discharge excavation method, wherein the excavation is terminated by stopping voltage application according to the measured excavation depth.
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| CN103868468A (en) * | 2014-03-25 | 2014-06-18 | 武汉工程大学 | Pavement sample structure depth detection platform and method |
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| JPH04126347A (en) * | 1990-09-18 | 1992-04-27 | Toshiba Corp | Secondary ion mass spectrometry |
| JPH11304709A (en) * | 1998-04-20 | 1999-11-05 | Shimadzu Corp | Membrane analyzer |
| EP1235067B1 (en) * | 2001-02-01 | 2004-09-08 | Jobin Yvon S.A.S. | Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample |
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