JP4027313B2 - マイクロシステム・スイッチ - Google Patents
マイクロシステム・スイッチ Download PDFInfo
- Publication number
- JP4027313B2 JP4027313B2 JP2003519663A JP2003519663A JP4027313B2 JP 4027313 B2 JP4027313 B2 JP 4027313B2 JP 2003519663 A JP2003519663 A JP 2003519663A JP 2003519663 A JP2003519663 A JP 2003519663A JP 4027313 B2 JP4027313 B2 JP 4027313B2
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- Prior art keywords
- bridge
- switch
- recess
- stable state
- waveguide
- Prior art date
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- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Switches With Compound Operations (AREA)
Description
凹部を画定する支持部と、
該支持部に装着され、該凹部に架橋された可撓性ブリッジであって、ブリッジが該凹部内部に***する凹面安定状態と、ブリッジが該凹部から外部に***する凸面安定状態とを選択的に保持するような形状のブリッジと、
該ブリッジを一方の安定状態から他方の安定状態に撓曲させるアクチュエータと、
安定状態間の該ブリッジの移動によってスイッチング素子がオン位置とオフ位置との間で移動するように該ブリッジ上に装着されたスイッチング素子とを含むマイクロシステム・スイッチが提供される。
Claims (13)
- 凹部(3)を画定する支持部(2)と、
前記支持部(2)に装着され、前記凹部(3)に架橋する可撓性ブリッジ(6)であって、ブリッジが前記凹部(3)内部に出っ張る凹面安定状態と、ブリッジが前記凹部(3)から外に出っ張る凸面安定状態とを選択的に保持するような形状をしたブリッジ(6)と、
前記安定状態の一方の安定状態から他方の安定状態にブリッジ(6)を撓曲させるアクチュエータ(8、9;26、27)であって、一対のバイモルフ作動層(8、9;26、27)を含むアクチュエータと、
前記安定状態間の前記ブリッジの動きによって、スイッチング素子がオン位置とオフ位置との間を移動するように前記ブリッジ(6)に装着されたスイッチング素子(7、31、34)とを含み、
前記アクチュエータの各バイモルフ作動層は、前記ブリッジ(6)のそれぞれの部分上に延びて該部分と共にバイモルフ構造を形成し、それによって前記バイモルフ作動層の作動時に前記バイモルフ構造における膨張差が、ブリッジを一方の安定状態から他方の安定状態に撓曲させる力を及ぼし、配置構成が前記バイモルフ作動層(8、9;26、27)のうちの一方の層の作動によって前記ブリッジを凸面安定状態から凹面安定状態に撓曲させ、他方の層の作動によってブリッジを前記凹面安定状態から前記凸面安定状態に撓曲させ、さらに、
前記バイモルフ作動層の2つの層は、前記スイッチング素子(7、31、34)の対向する側の前記ブリッジ(6)の同一表面上に配置され、前記一方の層の熱膨張率が前記それぞれの部分の熱膨張率よりも大きく、前記他方の層の熱膨張率が前記それぞれの部分の熱膨張率よりも小さいことを特徴とする、
マイクロシステム・スイッチ(1、20、25、30、33)。 - 前記ブリッジ(6)が前記支持部(2)のほぼ平坦な表面に装着され、前記凹部(3)が前記支持部の前記表面内に形成された、請求項1に記載のスイッチ。
- 前記ブリッジ(6)が、前記凹部(3)を横断する前記ブリッジの長さに沿った断面においてほぼ対称な湾曲断面を有し、前記スイッチング素子(7、31、34)が前記長さのほぼ中間に装着された、請求項1または2に記載のスイッチ。
- 前記スイッチング素子(7、31、34)がブリッジ(6)の前記凹部(3)から遠い側に装着された、請求項1ないし3のいずれかに記載のスイッチ。
- 前記ブリッジ(6)が、前記凹部(3)を横断する前記ブリッジの長さ方向に前記スイッチング素子(7)の各側のばね構造(21)を使用して形成されて、前記ブリッジを一方の安定状態から他方の安定状態に撓曲させやすくした、請求項1ないし4のいずれかに記載のスイッチ(20)。
- 前記スイッチング素子が電気接点(31、34)を含む、請求項1ないし5のいずれか一項に記載のスイッチ(30、33)。
- 前記スイッチング素子が光学素子(7、45)を含む、請求項1ないし5のいずれか一項に記載のスイッチ(1、20、25、40、55)。
- 前記光学素子がミラーを含む、請求項7に記載のスイッチ。
- 請求項1ないし8のいずれかに記載のスイッチのアレイを含む、スイッチング装置。
- 請求項6または7に記載のスイッチ(1、20、25、40、55)と、
光導波管(11、12、51)を有し、前記導波管と交差する空洞(13、52)を画定する導波管構造(10、50)とを含み、
前記スイッチ(1、20、25、40、55)が、前記安定状態間の前記ブリッジ(6、43、56)の動きによって、前記光学素子(7、45)が前記空洞(13、52)内で、前記光学素子が前記導波管(11、12、51)によって画定された光路と交差するオン位置と、前記光学素子が前記光路と交差しないオフ位置との間で移動するように、前記導波管構造(10、50)を基準にして配置されている、光スイッチング・デバイス。 - 前記導波管構造(10、50)が交差した一対の導波管(11、12;51)を有し、前記空洞(13、52)がその交点で両方の導波管と交差し、
前記光学素子(7、45)がミラーを含み、
前記スイッチ(1、20、25、40、55)が、オン位置において前記ミラーが一方の導波管からの光を他方の導波管内に反射するように配置されるように、前記導波管構造(10、50)を基準にして配置された、請求項10に記載の光スイッチング・デバイス。 - 請求項10または11に記載の光スイッチング・デバイスを含む光スイッチング装置。
- 請求項11に記載の光スイッチング・デバイスのアレイを含む光スイッチング装置であって、
前記デバイスの前記導波管構造が導波管アレイ・チップ(50)によって提供され、前記デバイスの前記スイッチがスイッチ・アレイ・チップ(53)によって提供され、
前記導波管(51)が前記導波管アレイ・チップ(50)上に格子状に配置され、
各スイッチの前記ミラーが前記ブリッジの前記凹部から遠い側に装着され、
前記スイッチ・アレイ・チップ(53)が、各スイッチの前記ミラーが導波管(51)のそれぞれの対の交点における前記空洞(52)内でオン位置とオフ位置との間で移動するように配置されるように、前記導波管アレイ・チップ(50)を基準にして配置された、光スイッチング装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01810658 | 2001-07-05 | ||
PCT/IB2002/002117 WO2003014789A2 (en) | 2001-07-05 | 2002-06-07 | Microsystem switches |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004538507A JP2004538507A (ja) | 2004-12-24 |
JP4027313B2 true JP4027313B2 (ja) | 2007-12-26 |
Family
ID=8184005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003519663A Expired - Fee Related JP4027313B2 (ja) | 2001-07-05 | 2002-06-07 | マイクロシステム・スイッチ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7146067B2 (ja) |
EP (1) | EP1456699B1 (ja) |
JP (1) | JP4027313B2 (ja) |
AU (1) | AU2002309106A1 (ja) |
DE (1) | DE60230673D1 (ja) |
WO (1) | WO2003014789A2 (ja) |
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-
2002
- 2002-06-07 US US10/482,828 patent/US7146067B2/en not_active Expired - Lifetime
- 2002-06-07 EP EP02735752A patent/EP1456699B1/en not_active Expired - Lifetime
- 2002-06-07 JP JP2003519663A patent/JP4027313B2/ja not_active Expired - Fee Related
- 2002-06-07 WO PCT/IB2002/002117 patent/WO2003014789A2/en active Application Filing
- 2002-06-07 AU AU2002309106A patent/AU2002309106A1/en not_active Abandoned
- 2002-06-07 DE DE60230673T patent/DE60230673D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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WO2003014789A2 (en) | 2003-02-20 |
AU2002309106A1 (en) | 2003-02-24 |
DE60230673D1 (de) | 2009-02-12 |
JP2004538507A (ja) | 2004-12-24 |
US20040252936A1 (en) | 2004-12-16 |
EP1456699B1 (en) | 2008-12-31 |
WO2003014789A3 (en) | 2004-05-21 |
US7146067B2 (en) | 2006-12-05 |
EP1456699A2 (en) | 2004-09-15 |
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