JP4017648B2 - プラズマ処理装置および同装置により製造された半導体素子 - Google Patents
プラズマ処理装置および同装置により製造された半導体素子 Download PDFInfo
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- JP4017648B2 JP4017648B2 JP2006013947A JP2006013947A JP4017648B2 JP 4017648 B2 JP4017648 B2 JP 4017648B2 JP 2006013947 A JP2006013947 A JP 2006013947A JP 2006013947 A JP2006013947 A JP 2006013947A JP 4017648 B2 JP4017648 B2 JP 4017648B2
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- Prior art keywords
- gas
- plasma processing
- introduction pipe
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- dilution gas
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45512—Premixing before introduction in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
本発明の実施形態1に係るプラズマ処理装置を図を基に説明する。図1は、本発明の実施形態1に係るプラズマ処理装置の概略断面図およびガス配管系統図である。密閉可能なプラズマ処理反応容器101内にカソード電極102・アノード電極103対が設置されており、プラズマ処理反応容器101外には、カソード電極102に電力を供給するための電源104と、電源104と複数のカソード電極102・アノード電極103対間のインピーダンス整合を行うマッチングボックス105が設置されている。
(実施形態2)
本発明の実施形態2に係るプラズマ処理装置を図を基に説明する。図2は、本発明の実施形態2に係るプラズマ処理装置の概略断面図およびガス配管系統図である。ガス供給部およびガス配管部以外の構成は実施形態1と同様である。
希釈ガス108として、N2、Ar、He、Ne、N2等の不活性ガスやH2等が用いられ、材料ガス205としてSiH4、CH4、GeH4等、ドーピングガス206としてPH3、AsH3、B2H6等が用いられる。
(実施形態3)
本発明の実施形態3に係るプラズマ処理装置を図を基に説明する。図3は、本発明の実施形態3に係るプラズマ処理装置のガス配管系統図である。プラズマ処理反応容器101が複数設置されており、希釈ガス供給部112からそれぞれのプラズマ処理反応容器101に対して希釈ガス導入管111が接続されている構成である。反応ガス導入管113は、実施形態1と同様に希釈ガス導入管111に接続されている。
108 希釈ガス
112 希釈ガス供給部
111 希釈ガス導入管
109 反応ガス
114 反応ガス供給部
113 反応ガス導入管
204 材料ガス供給部
203 材料ガス導入管
202 ドーピングガス供給部
201 ドーピングガス導入管
Claims (5)
- プラズマ処理反応容器と、プラズマ処理反応容器に一端が接続され希釈ガスを導入する希釈ガス導入管と、希釈ガス導入管の他端に接続され希釈ガスを供給する希釈ガス供給部と、前記希釈ガス導入管の中間部より前記希釈ガス供給部寄りの部分において一端が接続されて反応ガスを導入する反応ガス導入管と、反応ガス導入管の他端に接続され前記希釈ガスの流量より少ない流量の反応ガスを供給する反応ガス供給部と、を有し、
前記反応ガスは複数種あり、それぞれは材料ガスまたはドーピングガスであって、材料ガス導入管はドーピングガス導入管より前記希釈ガス導入管の前記プラズマ処理反応容器側に接続されており、
前記希釈ガス導入管内で希釈ガスと反応ガスを混合するプラズマ処理装置。 - 前記反応ガス導入管は前記希釈ガス供給部の近傍において接続されていることを特徴とする請求項1に記載のプラズマ処理装置。
- 前記希釈ガス導入管の内径は前記反応ガス導入管の内径より大きいことを特徴とする請求項1または請求項2に記載のプラズマ処理装置。
- 前記プラズマ処理反応容器、前記希釈ガス導入管、前記希釈ガス供給部、前記反応ガス導入管、前記反応ガス供給部の組は複数あり、前記希釈ガス供給部および前記反応ガス供給部はそれぞれ1つの容器内に設置されていることを特徴とする請求項1から請求項3の何れか1項に記載のプラズマ処理装置。
- 請求項1から請求項4のいずれか1項に記載のプラズマ処理装置を用いて製造された半導体素子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006013947A JP4017648B2 (ja) | 2006-01-23 | 2006-01-23 | プラズマ処理装置および同装置により製造された半導体素子 |
EP06843042A EP1981068A4 (en) | 2006-01-23 | 2006-12-22 | PLASMA PROCESSING DEVICE AND SEMICONDUCTOR ELEMENT PRODUCED BY SUCH A DEVICE |
US12/161,877 US20090166622A1 (en) | 2006-01-23 | 2006-12-22 | Plasma processing apparatus and semiconductor element manufactured by such apparatus |
PCT/JP2006/325583 WO2007083480A1 (ja) | 2006-01-23 | 2006-12-22 | プラズマ処理装置および同装置により製造された半導体素子 |
TW096100190A TW200809954A (en) | 2006-01-23 | 2007-01-03 | Plasma processing apparatus and semiconductor element manufactured by such apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006013947A JP4017648B2 (ja) | 2006-01-23 | 2006-01-23 | プラズマ処理装置および同装置により製造された半導体素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007200918A JP2007200918A (ja) | 2007-08-09 |
JP4017648B2 true JP4017648B2 (ja) | 2007-12-05 |
Family
ID=38287436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006013947A Expired - Fee Related JP4017648B2 (ja) | 2006-01-23 | 2006-01-23 | プラズマ処理装置および同装置により製造された半導体素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090166622A1 (ja) |
EP (1) | EP1981068A4 (ja) |
JP (1) | JP4017648B2 (ja) |
TW (1) | TW200809954A (ja) |
WO (1) | WO2007083480A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008181965A (ja) * | 2007-01-23 | 2008-08-07 | Sharp Corp | 積層型光電変換装置及びその製造方法 |
JP5457021B2 (ja) | 2008-12-22 | 2014-04-02 | 東京エレクトロン株式会社 | 混合ガスの供給方法及び混合ガスの供給装置 |
KR101912886B1 (ko) * | 2017-03-07 | 2018-10-29 | 에이피시스템 주식회사 | 가스 분사 장치, 이를 포함하는 기판 처리 설비 및 이를 이용한 기판 처리 방법 |
JP7340170B2 (ja) * | 2019-06-25 | 2023-09-07 | 東京エレクトロン株式会社 | ガス導入構造、熱処理装置及びガス供給方法 |
KR20210004024A (ko) * | 2019-07-03 | 2021-01-13 | 주성엔지니어링(주) | 기판처리장치용 가스공급장치 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2626925B2 (ja) * | 1990-05-23 | 1997-07-02 | 三菱電機株式会社 | 基板処理装置および基板処理方法 |
JP2922440B2 (ja) * | 1994-02-21 | 1999-07-26 | 松下電器産業株式会社 | 空圧機器の大気開放方法 |
KR0164922B1 (ko) * | 1994-02-21 | 1999-02-01 | 모리시다 요이치 | 반도체제조장치, 가스공급장치 및 배가스처리장치와 공압기기의 대기개방방법 |
US20030101938A1 (en) * | 1998-10-27 | 2003-06-05 | Applied Materials, Inc. | Apparatus for the deposition of high dielectric constant films |
JP2001267241A (ja) | 2000-03-10 | 2001-09-28 | L'air Liquide | クリーニング方法及び装置並びにエッチング方法及び装置 |
US7137354B2 (en) * | 2000-08-11 | 2006-11-21 | Applied Materials, Inc. | Plasma immersion ion implantation apparatus including a plasma source having low dissociation and low minimum plasma voltage |
JP3534690B2 (ja) * | 2000-09-29 | 2004-06-07 | シャープ株式会社 | プラズマ反応方法および装置 |
US6766260B2 (en) * | 2002-01-04 | 2004-07-20 | Mks Instruments, Inc. | Mass flow ratio system and method |
JP4002768B2 (ja) * | 2002-02-14 | 2007-11-07 | 株式会社アルバック | 成膜装置 |
JP3868324B2 (ja) * | 2002-04-15 | 2007-01-17 | 三菱電機株式会社 | シリコン窒化膜の成膜方法、成膜装置、及び半導体装置の製造方法 |
JP2006022354A (ja) * | 2004-07-06 | 2006-01-26 | Tokyo Electron Ltd | 成膜方法 |
-
2006
- 2006-01-23 JP JP2006013947A patent/JP4017648B2/ja not_active Expired - Fee Related
- 2006-12-22 EP EP06843042A patent/EP1981068A4/en not_active Withdrawn
- 2006-12-22 WO PCT/JP2006/325583 patent/WO2007083480A1/ja active Application Filing
- 2006-12-22 US US12/161,877 patent/US20090166622A1/en not_active Abandoned
-
2007
- 2007-01-03 TW TW096100190A patent/TW200809954A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2007200918A (ja) | 2007-08-09 |
EP1981068A1 (en) | 2008-10-15 |
TW200809954A (en) | 2008-02-16 |
EP1981068A4 (en) | 2010-05-26 |
US20090166622A1 (en) | 2009-07-02 |
TWI336910B (ja) | 2011-02-01 |
WO2007083480A1 (ja) | 2007-07-26 |
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