JP3946643B2 - 光粒子装置のx線分析方法 - Google Patents
光粒子装置のx線分析方法 Download PDFInfo
- Publication number
- JP3946643B2 JP3946643B2 JP2002583956A JP2002583956A JP3946643B2 JP 3946643 B2 JP3946643 B2 JP 3946643B2 JP 2002583956 A JP2002583956 A JP 2002583956A JP 2002583956 A JP2002583956 A JP 2002583956A JP 3946643 B2 JP3946643 B2 JP 3946643B2
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- JP
- Japan
- Prior art keywords
- wall
- separating wall
- sample
- separating
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
a)前記サンプル内に、2つの隣接する穴を形成して、前記穴同士の間に、分離する壁を得るステップと、
b)前記分離する壁の第一の側に、電気的に帯電された粒子のビームを照射するステップであって、これに応答して、前記分離する壁にX線が生じるステップと、
c)前記X線を検出するステップと、
を有し、
前記ステップb)の前に、前記分離する壁の他の側に設置された前記穴は、少なくとも部分的に、前記分離する壁とは異なる組成の充填材料で充填されることを特徴とする、方法に関する。
Claims (7)
- 帯電粒子のビームを用いる機器内のサンプルをX線分析する方法であって、
a)前記サンプル内に、2つの隣接する穴を形成して、前記穴同士の間に、分離する壁を得るステップと、
b)前記分離する壁の第一の側に、電気的に帯電された粒子のビームを照射するステップであって、これに応答して、前記分離する壁にX線が生じるステップと、
c)前記X線を検出するステップと、
を有し、
前記ステップb)の前に、前記分離する壁の他の側に設置された前記穴は、少なくとも部分的に、前記分離する壁とは異なる組成の充填材料で充填されることを特徴とする方法。 - 前記分離する壁は、シリコンを含んでおり、前記充填材料は、原子番号が71よりも大きな固体元素によって構成されることを特徴とする請求項1に記載の方法。
- 前記充填材料は、白金を含むことを特徴とする請求項2に記載の方法。
- 前記分離する壁は、シリコンを含んでおり、前記充填材料は、原子番号が13よりも小さな固体元素によって構成されることを特徴とする請求項1に記載の方法。
- 前記充填材料は、炭素を含むことを特徴とする請求項4に記載の方法。
- 前記分離する壁の前記第一の側に設置された前記穴の前記壁は、少なくとも一部が、ライニング材料でライニングされ、前記ライニング材料は、原子番号が13未満の固体元素によって構成され、前記ライニング材料の組成は、前記分離する壁とは異なっていることを特徴とする請求項1乃至5のいずれか一項に記載の方法。
- 前記分離する壁は、シリコンを含んでおり、前記ライニング材料は、原子番号が13よりも小さな固体元素によって構成されることを特徴とする請求項6に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01401010 | 2001-04-19 | ||
PCT/IB2002/001292 WO2002086476A2 (en) | 2001-04-19 | 2002-04-09 | High spatial resolution x-ray microanalysis |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004524541A JP2004524541A (ja) | 2004-08-12 |
JP3946643B2 true JP3946643B2 (ja) | 2007-07-18 |
Family
ID=8182693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002583956A Expired - Lifetime JP3946643B2 (ja) | 2001-04-19 | 2002-04-09 | 光粒子装置のx線分析方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6646263B2 (ja) |
EP (1) | EP1381851B1 (ja) |
JP (1) | JP3946643B2 (ja) |
DE (1) | DE60231705D1 (ja) |
WO (1) | WO2002086476A2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7429733B2 (en) * | 2005-12-29 | 2008-09-30 | Lsi Corporation | Method and sample for radiation microscopy including a particle beam channel formed in the sample source |
WO2018133087A1 (en) * | 2017-01-23 | 2018-07-26 | Shenzhen Xpectvision Technology Co., Ltd. | X-ray detectors capable of identifying and managing charge sharing |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3221797B2 (ja) * | 1994-06-14 | 2001-10-22 | 株式会社日立製作所 | 試料作成方法及びその装置 |
US5940678A (en) * | 1997-01-14 | 1999-08-17 | United Microelectronics Corp. | Method of forming precisely cross-sectioned electron-transparent samples |
US6188068B1 (en) * | 1997-06-16 | 2001-02-13 | Frederick F. Shaapur | Methods of examining a specimen and of preparing a specimen for transmission microscopic examination |
US5990478A (en) * | 1997-07-10 | 1999-11-23 | Taiwan Semiconductor Manufacturing Co. Ltd. | Method for preparing thin specimens consisting of domains of different materials |
US6194720B1 (en) * | 1998-06-24 | 2001-02-27 | Micron Technology, Inc. | Preparation of transmission electron microscope samples |
US6576900B2 (en) * | 2000-05-19 | 2003-06-10 | Imago Scientific Instruments | Methods of sampling specimens for microanalysis |
-
2002
- 2002-04-09 JP JP2002583956A patent/JP3946643B2/ja not_active Expired - Lifetime
- 2002-04-09 DE DE60231705T patent/DE60231705D1/de not_active Expired - Lifetime
- 2002-04-09 EP EP02720383A patent/EP1381851B1/en not_active Expired - Lifetime
- 2002-04-09 WO PCT/IB2002/001292 patent/WO2002086476A2/en active Application Filing
- 2002-04-16 US US10/123,666 patent/US6646263B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2002086476A3 (en) | 2003-02-06 |
DE60231705D1 (de) | 2009-05-07 |
US6646263B2 (en) | 2003-11-11 |
EP1381851B1 (en) | 2009-03-25 |
JP2004524541A (ja) | 2004-08-12 |
WO2002086476A2 (en) | 2002-10-31 |
US20020154731A1 (en) | 2002-10-24 |
EP1381851A2 (en) | 2004-01-21 |
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