JP3945775B2 - 電界放出低速電子回折用引き込み電極及びそれを用いた電子回折装置 - Google Patents
電界放出低速電子回折用引き込み電極及びそれを用いた電子回折装置 Download PDFInfo
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- JP3945775B2 JP3945775B2 JP2003270105A JP2003270105A JP3945775B2 JP 3945775 B2 JP3945775 B2 JP 3945775B2 JP 2003270105 A JP2003270105 A JP 2003270105A JP 2003270105 A JP2003270105 A JP 2003270105A JP 3945775 B2 JP3945775 B2 JP 3945775B2
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Claims (6)
- 試料に対して電界放出により低速電子線を照射する探針と、
該探針をシールドする探針シールド電極と、前記試料から出射された散乱電子を引き込むための引き込み電極とを有し、
前記引き込み電極は、前記探針シールド電極の外側に配置され、その内壁が前記試料側に向けて狭くなるように形成されていることを特徴とする低速電子線回折装置。 - 前記探針シールド電極の中心軸と前記引き込み電極の中心軸とが略同軸であることを特徴とする請求項1に記載の低速電子線回折装置。
- 前記探針シールド電極は、前記試料側が半球型の形状を有することを特徴とする請求項2に記載の低速電子線回折装置。
- さらに、前記引き込み電極は、前記探針シールド側に向けて突出する鍔部を有していることを特徴とする請求項1から3までのいずれか1項に記載の低速電子線回折装置。
- 前記鍔部は、前記引き込み電極又は前記探針シールドに対する相対位置を変更可能とする微調整機構を有していることを特徴とする請求項4に記載の低速電子線回折装置。
- さらに、前記引き込み電極と前記探針シールド又は試料を保持する試料ホルダーの少なくとも一方とを相対移動させる移動機構を有していることを特徴とする請求項3から5までのいずれか1項に記載の低速電子線回折装置。
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JP2003270105A JP3945775B2 (ja) | 2003-07-01 | 2003-07-01 | 電界放出低速電子回折用引き込み電極及びそれを用いた電子回折装置 |
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JP2003270105A JP3945775B2 (ja) | 2003-07-01 | 2003-07-01 | 電界放出低速電子回折用引き込み電極及びそれを用いた電子回折装置 |
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JP2005026169A JP2005026169A (ja) | 2005-01-27 |
JP3945775B2 true JP3945775B2 (ja) | 2007-07-18 |
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JP2003270105A Expired - Fee Related JP3945775B2 (ja) | 2003-07-01 | 2003-07-01 | 電界放出低速電子回折用引き込み電極及びそれを用いた電子回折装置 |
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WO2014185074A1 (en) * | 2013-05-15 | 2014-11-20 | Okinawa Institute Of Science And Technology School Corporation | Leed for sem |
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