JP3938129B2 - Ultrasonic cleaning equipment - Google Patents

Ultrasonic cleaning equipment Download PDF

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Publication number
JP3938129B2
JP3938129B2 JP2003341743A JP2003341743A JP3938129B2 JP 3938129 B2 JP3938129 B2 JP 3938129B2 JP 2003341743 A JP2003341743 A JP 2003341743A JP 2003341743 A JP2003341743 A JP 2003341743A JP 3938129 B2 JP3938129 B2 JP 3938129B2
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Prior art keywords
ultrasonic
liquid
container
housing
ultrasonic cleaning
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JP2005103466A (en
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真人 布村
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Panasonic Electric Works Co Ltd
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Matsushita Electric Works Ltd
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Priority to JP2003341743A priority Critical patent/JP3938129B2/en
Priority to PCT/JP2004/014577 priority patent/WO2005030406A1/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • A—HUMAN NECESSITIES
    • A45—HAND OR TRAVELLING ARTICLES
    • A45D—HAIRDRESSING OR SHAVING EQUIPMENT; EQUIPMENT FOR COSMETICS OR COSMETIC TREATMENTS, e.g. FOR MANICURING OR PEDICURING
    • A45D29/00—Manicuring or pedicuring implements
    • A45D29/17—Nail cleaners, e.g. scrapers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • B05B17/063—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn having an internal channel for supplying the liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/026—Cleaning by making use of hand-held spray guns; Fluid preparations therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
    • B08B2203/0288—Ultra or megasonic jets

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Body Washing Hand Wipes And Brushes (AREA)

Description

本発明は、生体などの洗浄に好適に実施され、超音波領域での振動エネルギを利用して、任意の目的箇所を洗浄する超音波洗浄装置に関する。   The present invention relates to an ultrasonic cleaning apparatus that is suitably used for cleaning a living body and that cleans an arbitrary target location using vibration energy in an ultrasonic region.

超音波振動子で発生させた超音波振動を、液体を介して洗浄目的箇所に伝達させ、洗浄を行う装置に関しては、既に多くの提案がなされている。従来の一般的な超音波洗浄装置としては、図１０の超音波洗浄装置１で示すように、超音波振動子２による振動エネルギ３を、タンクなどの容器４に入れた洗浄液５に伝達させ、前記容器４内の洗浄液５に、小型の部品や、指６などの生体を浸漬して超音波洗浄する例がある。また、特許文献１で示すように、洗浄液で満たした容器中に被洗浄物と超音波振動子とを共に浸漬するようにした例がある。これらは、一般にバッチ式超音波洗浄装置と呼ばれている。   Many proposals have already been made regarding an apparatus for performing cleaning by transmitting ultrasonic vibration generated by an ultrasonic vibrator to a target position through a liquid. As a conventional general ultrasonic cleaning apparatus, as shown in the ultrasonic cleaning apparatus 1 of FIG. 10, the vibration energy 3 by the ultrasonic vibrator 2 is transmitted to the cleaning liquid 5 placed in a container 4 such as a tank, There is an example in which a small part or a living body such as a finger 6 is immersed in the cleaning liquid 5 in the container 4 for ultrasonic cleaning. Moreover, as shown in Patent Document 1, there is an example in which an object to be cleaned and an ultrasonic vibrator are both immersed in a container filled with a cleaning liquid. These are generally called batch type ultrasonic cleaning apparatuses.

しかしながら、上述のような超音波洗浄装置には、少なくとも被洗浄物よりも大きな容器が必要であること、容器の大きさによって超音波の入力を大きくしなければならないこと、大きい物体の局部洗浄には向かないこと等々、被洗浄物に対する制約が多い。そこで、このような問題を解決する他の従来技術として、図１１で示すような超音波洗浄装置１１が提案された。この超音波洗浄装置１１は、スポットまたはスリット状になった吐出口１２から洗浄液１３を吐出させ、その洗浄液１３中にメガヘルツ帯の超音波を照射して伝播させ、その洗浄液１３に接する被洗浄物１４に有効に作用させるようにした流水式の超音波洗浄装置であり、一般にノズルシャワー式の超音波洗浄装置と呼ばれている。   However, the ultrasonic cleaning apparatus as described above requires at least a container larger than the object to be cleaned, the input of ultrasonic waves must be increased depending on the size of the container, and local cleaning of large objects. There are many restrictions on the objects to be cleaned, such as being unsuitable. Therefore, as another conventional technique for solving such a problem, an ultrasonic cleaning apparatus 11 as shown in FIG. 11 has been proposed. This ultrasonic cleaning apparatus 11 discharges a cleaning liquid 13 from a discharge port 12 in the form of a spot or slit, irradiates and propagates ultrasonic waves in the megahertz band into the cleaning liquid 13, and the object to be cleaned that comes into contact with the cleaning liquid 13 14 is a flowing water type ultrasonic cleaning device that is effectively operated on the nozzle 14, and is generally called a nozzle shower type ultrasonic cleaning device.

すなわち、この超音波洗浄装置１１では、円筒部１５ａの一方の端部を端板１５ｂで閉塞して成る超音波伝達体１５の底部１５ｃに超音波振動子１６が取付けられ、その円筒部１５ａの外周面がハウジング１７の内周面に密着されるとともに、前記ハウジング１７の先端に取付けられた筒状の容器１８とによって貯留部１９を形成し、その貯留部１９に管路２０を介して図示しないポンプから前記洗浄液１３が供給される。これによって、前記超音波伝達体１５の底部１５ｃから発生された超音波振動２１は、前記洗浄液１３中を伝播して前記被洗浄物１４に到達し、前記洗浄液１３とともに表面汚れ２２を除去する。 That is, in this ultrasonic cleaning apparatus 11, the ultrasonic transducer 16 is attached to the bottom 15c of the ultrasonic transmission body 15 formed by closing one end of the cylindrical portion 15a with the end plate 15b, and the cylindrical portion 15a The outer peripheral surface is in close contact with the inner peripheral surface of the housing 17, and a storage portion 19 is formed by a cylindrical container 18 attached to the tip of the housing 17, and the storage portion 19 is illustrated via a conduit 20. The cleaning liquid 13 is supplied from a pump that does not. As a result, the ultrasonic vibration 21 generated from the bottom 15 c of the ultrasonic transmission body 15 propagates through the cleaning liquid 13 to reach the object to be cleaned 14, and removes the surface contamination 22 together with the cleaning liquid 13 .

しかしながら、この従来技術では、前記貯留部１９に供給される洗浄液１３中に高効率に超音波を伝播させるためには、超音波放射面である超音波伝達体１５の底部１５ｃの側面を保持する必要があり、上述のように円筒部１５ａの外周面がハウジング１７の内周面に密着される。一方、前記ハウジング１７への取付けのために、超音波伝達体１５に振動しない側面を確保するためには、比較的高い周波数、具体的には、メガヘルツ帯の超音波（低くとも５００ｋＨｚ以上）しか利用できない。すなわち、このように超音波伝達体１５の側部をハウジング１７の内周面に接合した構造では、数十ｋＨｚ程度の比較的低い超音波を使用すると、前記超音波振動の腹（振幅が最大）となる部分を支持することになり、振動エネルギが無駄となる他、保持部分が異常に発熱してしまう。   However, in this prior art, in order to propagate ultrasonic waves with high efficiency into the cleaning liquid 13 supplied to the reservoir 19, the side surface of the bottom 15c of the ultrasonic transmission body 15 that is an ultrasonic radiation surface is held. As described above, the outer peripheral surface of the cylindrical portion 15 a is in close contact with the inner peripheral surface of the housing 17. On the other hand, in order to secure a side surface that does not vibrate in the ultrasonic transmission body 15 for attachment to the housing 17, only a relatively high frequency, specifically, an ultrasonic wave of a megahertz band (at least 500 kHz or more) is used. Not available. That is, in the structure in which the side of the ultrasonic transmission body 15 is joined to the inner peripheral surface of the housing 17 in this way, when a relatively low ultrasonic wave of about several tens of kHz is used, the ultrasonic vibration antinode (the amplitude is maximum). ), The vibration energy is wasted, and the holding portion generates heat abnormally.

ここで、一般的には、数十ｋＨｚ程度の比較的低い周波数の超音波は強固な汚れを、また数百ｋＨｚから数ＭＨｚまでの高い周波数の超音波はホコリのような表面的な汚れを除去できることが言われている。したがって、上述の超音波洗浄装置１１では、超音波の周波数が高いため、表面的な汚れ２２しか除去できず、たとえば半導体のウエハ用の洗浄装置としての用途にしか利用できなかった。また、超音波出力も数十ワット程度と大きくする必要があった。   Here, in general, an ultrasonic wave with a relatively low frequency of about several tens of kHz gives strong dirt, and an ultrasonic wave with a high frequency from several hundred kHz to several MHz gives a superficial dirt like dust. It is said that it can be removed. Therefore, since the ultrasonic cleaning apparatus 11 described above has a high frequency of ultrasonic waves, only the superficial dirt 22 can be removed. For example, the ultrasonic cleaning apparatus 11 can only be used as a cleaning apparatus for semiconductor wafers. Also, the ultrasonic output has to be increased to several tens of watts.

さらにまた、従来からの一般的な超音波洗浄装置としては、特許文献２が挙げられる。図１２は、その従来技術の超音波洗浄装置３１の使用方法を示す図である。この従来技術では、洗面器やビーカ等の別容器３２中に被洗浄物３３が軽く浸るように水をはり、その被洗浄物３３の被洗浄部位３４に該超音波洗浄装置３１の振動面３５を接触させて、前記数十ｋＨｚ程度の比較的低い周波数の超音波の振動エネルギによって、強固な汚れを除去している。   Furthermore, Patent Document 2 is an example of a conventional general ultrasonic cleaning apparatus. FIG. 12 is a diagram showing a method of using the conventional ultrasonic cleaning device 31. In this prior art, water is poured so that the cleaning object 33 is lightly immersed in another container 32 such as a wash basin or a beaker, and the vibration surface 35 of the ultrasonic cleaning device 31 is applied to the cleaning target part 34 of the cleaning object 33. The solid dirt is removed by the vibration energy of the ultrasonic wave having a relatively low frequency of about several tens of kHz.

しかしながら、この従来技術では、超音波振動を行っている振動面３５を被洗浄部位３４に直接接触させる必要があり、その振動エネルギが汚れを除去することのみで使用できずに、余ったエネルギが、被洗浄部位３４や、その被洗浄物３３を保持している手指を傷めてしまう恐れがあった。
特開平１０−３２８４７２号公報 特開２００１−３１０１６５号公報 However, in this prior art, it is necessary to directly contact the vibration surface 35 performing ultrasonic vibration with the site to be cleaned 34, and the vibration energy cannot be used only by removing dirt, and surplus energy is generated. There is a risk of damaging the part 34 to be cleaned and the finger holding the article 33 to be cleaned.
JP 10-328472 A JP 2001-310165 A

したがって、上述の各従来技術では、任意の箇所を確実に洗浄することができないという問題がある。一方、被洗浄物の種類としては、生体や精密部位等、超音波放射面を接触させることに制約のある箇所があり、かつ機械の脂汚れや生体の垢汚れ等、高い洗浄力を必要とする箇所も多い。   Therefore, each of the above-described conventional techniques has a problem that it is not possible to reliably wash an arbitrary portion. On the other hand, the types of objects to be cleaned include places where there are restrictions on contacting the ultrasonic radiation surface, such as living organisms and precision parts, and high cleaning power is required, such as machine oil stains and organism dirt stains. There are many places to do.

そこで、前記任意の箇所の強固な汚れを除去するために、図１３で示すノズルシャワー式の超音波洗浄装置４１が考えられる。この超音波洗浄装置４１は、前述の超音波洗浄装置３１の構成で、短くした超音波伝達体４６を用い、前述の超音波洗浄装置１１の管路２０を設け、図示しないポンプから洗浄液１３を供給するようにしたものである。   Therefore, in order to remove the strong dirt at the arbitrary location, a nozzle shower type ultrasonic cleaning device 41 shown in FIG. 13 can be considered. This ultrasonic cleaning device 41 has a configuration of the above-described ultrasonic cleaning device 31 and uses a shortened ultrasonic transmission body 46, and is provided with the conduit 20 of the above-described ultrasonic cleaning device 11, and the cleaning liquid 13 is supplied from a pump (not shown). It is to be supplied.

これによれば、略円錐台状に形成される超音波伝達体４６において、振動しない（超音波振動子４２からの前記数十ｋＨｚ程度の比較的低い超音波振動に対して、節（振幅が最小）となる）部分４６ａがハウジング４３に取付けられているので、前記比較的低い超音波を使用し、任意の箇所の強固な汚れを除去することができる。   According to this, the ultrasonic transmission body 46 formed in a substantially truncated cone shape does not vibrate (with respect to the relatively low ultrasonic vibration of about several tens of kHz from the ultrasonic transducer 42, the node (the amplitude is Since the portion 46a, which is the smallest), is attached to the housing 43, the relatively low ultrasonic waves can be used to remove strong dirt at any location.

しかしながら、この従来技術では、前記略円錐台状に形成される超音波伝達体４６の側面４６ｂが、前記洗浄液１３を通過させるために容器１８に保持できておらず、該側面４６ｂが振動し、効率が悪いという問題がある。この点、前記ノズルシャワー式ではなく、超音波伝達体３６の振動面３５付近だけが洗浄液３７に浸漬される前記超音波洗浄装置３１では、前記略円錐台状に形成される超音波伝達体３６の側面３６ｂは洗浄液３７に接触しておらず、大きな損失とはならない。   However, in this prior art, the side surface 46b of the ultrasonic transmission body 46 formed in the substantially truncated cone shape is not held in the container 18 for allowing the cleaning liquid 13 to pass through, and the side surface 46b vibrates, There is a problem of inefficiency. In this respect, in the ultrasonic cleaning device 31 in which only the vicinity of the vibration surface 35 of the ultrasonic transmission body 36 is immersed in the cleaning liquid 37 instead of the nozzle shower type, the ultrasonic transmission body 36 formed in the substantially truncated cone shape. The side surface 36b is not in contact with the cleaning liquid 37 and does not cause a large loss.

本発明の目的は、前記ノズルシャワー式の超音波洗浄装置において、比較的低い超音波を使用可能で、高効率な超音波洗浄装置を提供することである。   An object of the present invention is to provide a highly efficient ultrasonic cleaning apparatus that can use relatively low ultrasonic waves in the nozzle shower type ultrasonic cleaning apparatus.

本発明の超音波洗浄装置は、内部に超音波放射面を有する容器に液体を供給し、該液体を前記容器に形成された吐出口から流出させて被洗浄部位と接触させることで超音波の伝播路を形成し、前記被洗浄部位を洗浄するようにした超音波洗浄装置において、超音波振動子と、略円錐台状に形成され、その下底面に前記超音波振動子が取付けられるとともに、その下底面側で振動の節となる部分がハウジングに支持され、上底面が前記超音波放射面となり、前記ハウジングの先端側の内周面とで前記容器を形成する超音波伝達体と、弾性体から成り、前記超音波伝達体を、その超音波放射面の近傍で、前記ハウジングの内周面に気密に保持固定する保持部材とを含むことを特徴とする。 The ultrasonic cleaning apparatus of the present invention supplies a liquid to a container having an ultrasonic radiation surface inside, and causes the liquid to flow out of a discharge port formed in the container and to come into contact with a site to be cleaned. the propagation path is formed, the in ultrasonic cleaning apparatus adapted to clean the object to be cleaned site, an ultrasonic transducer, is formed in a substantially truncated cone shape, the ultrasonic transducer attached to the bottom surface Rutotomoni its under the bottom side portion serving as the node of vibration is supported by the housing, the upper base surface Ri Do the ultrasonic radiating surface, you form the container and the inner peripheral surface of the distal end side of the housing ultrasound a transmission member made of an elastic body, the ultrasound transmission member, in the vicinity of the ultrasonic wave emitting surface, characterized in that it comprises a holding member for holding airtightly fixed to the inner peripheral surface of the housing.

上記の構成によれば、たとえば吐出口側に向けて先細り状となる錐体形状（絞り形状）となるように形成された容器に液体を供給し、その液体を前記吐出口から流出させて被洗浄部位と接触させることで超音波の伝播路を形成し、前記容器内に形成された超音波放射面からの超音波振動で、生体などの前記被洗浄部位を洗浄するようにした、いわゆるノズルシャワー式の超音波洗浄装置において、前記液体から超音波振動子を気密に封止するにあたって、該超音波振動子が下底面に取付けられ、略円錐台状に形成される超音波伝達体の外周部を該超音波洗浄装置のハウジングに直接取付けてしまうと、該外周部が振動しない比較的高周波（５００ＭＨｚ以上）の超音波しか使用できなくなるのに対して、本発明では、下底面側で振動の節となる部分を前記ハウジングに保持固定するとともに、上底面側は前記超音波放射面の近傍を、弾性体から成る保持部材で保持固定する。具体的には、たとえばＯリングを前記超音波伝達体の前記超音波放射面の近傍の外周面に形成された溝に嵌め込むことで実現する。 According to the above configuration, for example, liquid is supplied to a container formed in a cone shape (throttle shape) that is tapered toward the discharge port side, and the liquid is allowed to flow out of the discharge port to be covered. A so-called nozzle in which an ultrasonic wave propagation path is formed by contacting with a cleaning site, and the cleaned site such as a living body is cleaned by ultrasonic vibration from an ultrasonic radiation surface formed in the container. In the shower type ultrasonic cleaning apparatus, when sealing the ultrasonic transducer from the liquid in an airtight manner, the ultrasonic transducer is attached to the lower bottom surface, and the outer periphery of the ultrasonic transmission body formed in a substantially truncated cone shape If parts become attached directly to the housing of the ultrasonic cleaning device, while the outer peripheral portion can not only be used ultrasound relatively high frequency which does not vibrate (or 500 MHz), in the present invention, vibration below the bottom side And the verse It holds fixed part to the housing, the upper bottom side in the vicinity of the ultrasonic wave emitting surface, held fixed by a holding member made of an elastic material. Specifically, for example, it is realized by fitting an O-ring into a groove formed on the outer peripheral surface in the vicinity of the ultrasonic radiation surface of the ultrasonic transmission body.

したがって、前記ノズルシャワー式の超音波洗浄装置において、弾性体から成る前記保持部材が放射面の側面での超音波振動を抑制しないようにしつつ、超音波伝達体の保持が可能になり、振動振幅の大きな比較的低い数十ｋＨｚ、好ましくは２０〜６０ｋＨｚ程度の超音波を使用することができ、強固な汚れを除去することができるとともに、またそのように低い周波数の超音波を使用しても、超音波伝達体の超音波振動が接合部分でハウジングに吸収されてしまい、損失になってしまうことを抑制することができ、超音波出力をむやみに大きくする必要もなくなる。また、超音波伝達体の側面や超音波振動子部分が液体と接触することを防止でき、これによってもまた高効率化を図ることができる。さらにまた、前記２０〜６０ｋＨｚ程度の超音波振動を利用することによって、キャビテーション圧力を積極的に利用することも可能である。 Therefore, in the nozzle shower type ultrasonic cleaning apparatus, the holding member made of an elastic body can hold the ultrasonic transmission body while preventing the ultrasonic vibration on the side surface of the radiation surface from being suppressed. The ultrasonic wave of a relatively low tens of kHz, preferably about 20 to 60 kHz can be used, and it is possible to remove strong dirt, and even if such a low frequency ultrasonic wave is used. ultrasonic vibration of the ultrasonic transmission member is absorbed by the joining part DEHA Ujingu, it is possible to suppress that become lost, even not necessary to excessively increase the ultrasonic power. Further, it is possible to prevent the side surface of the ultrasonic transmission body and the ultrasonic transducer part from coming into contact with the liquid, and this can also increase the efficiency. Furthermore, the cavitation pressure can be positively utilized by utilizing the ultrasonic vibration of about 20 to 60 kHz.

また、本発明の超音波洗浄装置は、内部に超音波放射面を有する容器に液体を供給し、該液体を前記容器に形成された吐出口から流出させて被洗浄部位と接触させることで超音波の伝播路を形成し、前記被洗浄部位を洗浄するようにした超音波洗浄装置において、超音波振動子と、略円錐台状に形成され、その下底面に前記超音波振動子が取付けられるとともに、その下底面側で振動の節となる部分がハウジングに支持され、上底面側が前記超音波放射面となる超音波伝達体とを含み、前記容器は、内部に前記液体の貯留空間を有する錐体形状に形成され、その底面が前記超音波伝達体の上底面に固着されることを特徴とする。 Further, the ultrasonic cleaning apparatus of the present invention supplies a liquid to a container having an ultrasonic radiation surface inside, and causes the liquid to flow out from a discharge port formed in the container and to come into contact with a portion to be cleaned. In an ultrasonic cleaning apparatus that forms a propagation path of a sound wave and cleans the portion to be cleaned, the ultrasonic vibrator is formed in a substantially truncated cone shape, and the ultrasonic vibrator is attached to the bottom surface of the ultrasonic vibrator. Rutotomoni, portion to be a node of vibration at the bottom surface side is supported by the housing, and a ultrasonic wave transmission body upper base side is the ultrasonic wave emitting surface, said container, storage of the liquid therein is formed in a cone shape having a space, the bottom, characterized in Rukoto is fixed to the upper bottom surface of the ultrasound transmission member.

上記の構成によれば、吐出口側に向けて先細り状となる錐体形状（絞り形状）となるように形成された容器に液体を供給し、その液体を前記吐出口から流出させて被洗浄部位と接触させることで超音波の伝播路を形成し、前記容器内に形成された超音波放射面からの超音波振動で、生体などの前記被洗浄部位を洗浄するようにした、いわゆるノズルシャワー式の超音波洗浄装置において、前記液体から超音波振動子を気密に封止するにあたって、該超音波振動子が下底面に取付けられ、略円錐台状に形成される超音波伝達体の外周部を該超音波洗浄装置のハウジングに直接取付けてしまうと、該外周部が振動しない比較的高周波（５００ＭＨｚ以上）の超音波しか使用できなくなるのに対して、本発明では、下底面側で振動の節となる部分を前記ハウジングに保持固定するとともに、前記ハウジングから前記容器を分離して、その容器の底面を前記超音波伝達体の上底面に固着する。 According to the arrangement, the liquid is supplied to the formed container such that the cone shape which is tapered (aperture shape) toward the discharge opening side, to be cleaned by flowing out the liquid from the discharge port A so-called nozzle shower in which an ultrasonic wave propagation path is formed by contact with a part, and the part to be cleaned such as a living body is cleaned by ultrasonic vibration from an ultrasonic radiation surface formed in the container. In the ultrasonic cleaning apparatus of the above type, when sealing the ultrasonic transducer from the liquid in an airtight manner, the ultrasonic transducer is attached to the lower bottom surface, and the outer periphery of the ultrasonic transmission body formed in a substantially truncated cone shape Is attached directly to the housing of the ultrasonic cleaning apparatus, only the relatively high frequency (500 MHz or higher) ultrasonic waves that do not vibrate the outer periphery can be used . The part that becomes the clause Holds fixed the serial housing, by separating the container from the housing to secure the bottom of the container to the upper bottom surface of the ultrasound transmission member.

したがって、前記ノズルシャワー式の超音波洗浄装置において、前記液体を貯留する容器は、前記吐出口および前記液体の流入口を除いて閉塞され、超音波振動子を液体から保護しつつ、比較的低い数十ｋＨｚ、好ましくは２０〜６０ｋＨｚ程度の超音波を使用することができ、強固な汚れを除去することができるとともに、またそのように低い周波数の超音波を使用しても、超音波伝達体の超音波振動が接合部分でハウジングに吸収されてしまい、損失になってしまうことを抑制することができ、超音波出力をむやみに大きくする必要もなくなる。また、超音波伝達体の側面や超音波振動子部分が液体と接触することを防止でき、これによってもまた高効率化を図ることができる。さらにまた、前記２０〜６０ｋＨｚ程度の超音波振動を利用することによって、キャビテーション圧力を積極的に利用することも可能である。 Therefore, in the nozzle shower type ultrasonic cleaning apparatus, the container for storing the liquid is closed except for the discharge port and the liquid inlet, and is relatively low while protecting the ultrasonic vibrator from the liquid. Ultrasonic waves of several tens of kHz, preferably about 20 to 60 kHz can be used, and strong dirt can be removed, and even when such low frequency ultrasonic waves are used, an ultrasonic transmission body of the ultrasonic vibration is absorbed by the joining part DEHA Ujingu, it is possible to suppress that become lost, even not necessary to excessively increase the ultrasonic power. Further, it is possible to prevent the side surface of the ultrasonic transmission body and the ultrasonic transducer part from coming into contact with the liquid, and this can also increase the efficiency. Furthermore, the cavitation pressure can be positively utilized by utilizing the ultrasonic vibration of about 20 to 60 kHz.

さらにまた、本発明の超音波洗浄装置は、前記液体の流路が、棒状の超音波振動子および円錐台状の超音波伝達体内を軸線方向に穿設されて形成され、前記液体の流入口は前記超音波放射面に形成されていることを特徴とする。   Furthermore, in the ultrasonic cleaning apparatus of the present invention, the liquid flow path is formed by drilling in the axial direction through a rod-shaped ultrasonic transducer and a truncated cone-shaped ultrasonic transmission body, and the liquid inlet Is formed on the ultrasonic radiation surface.

上記の構成によれば、超音波を伝達させる液体を円滑に導き、前記超音波放射面から直接液体を吐出することができるので、容器内で空気が混入することがなく、高効率に超音波を液体に伝達させることができる。   According to said structure, since the liquid which transmits an ultrasonic wave can be guide | induced smoothly and a liquid can be discharged directly from the said ultrasonic radiation surface, air does not mix in a container, but ultrasonic waves are highly efficient. Can be transmitted to the liquid.

また、本発明の超音波洗浄装置は、前記容器において、前記吐出口の反対側に超音波放射面を有し、該容器は、前記超音波放射面側から吐出口側に向けて先細り状となる錐体形状に形成されていることを特徴とする。 Further, the ultrasonic cleaning apparatus of the present invention has an ultrasonic radiation surface on the opposite side of the discharge port in the container, and the container is tapered from the ultrasonic radiation surface side toward the discharge port side. It is formed in the cone shape which becomes.

上記の構成によれば、吐出口の反対側に超音波放射面が設けられ、かつその容器が前記超音波放射面側から吐出口側に向けて先細り状となる錐体形状（絞り形状）となるように形成されることで、超音波振動子で発生し、超音波伝達体内を伝播した超音波を、容器に貯留された液体内で集束させ、強める（単位断面積あたり）ことができる。   According to the above configuration, the cone shape (throttle shape) in which the ultrasonic radiation surface is provided on the opposite side of the discharge port and the container is tapered from the ultrasonic radiation surface side toward the discharge port side. By being formed in this way, the ultrasonic wave generated by the ultrasonic transducer and propagated in the ultrasonic transmission body can be focused and strengthened (per unit cross-sectional area) in the liquid stored in the container.

したがって、被洗浄物を洗浄するために必要な超音波圧力を少ない超音波出力で確保でき、高効率に洗浄することができる。また、好ましくは、前記容器の内側面を超音波を反射する部材で構成することで、前記超音波放射面からの超音波を減衰させることなく、被洗浄部位方向へ伝達することができる。   Therefore, the ultrasonic pressure required for cleaning the object to be cleaned can be secured with a small ultrasonic output, and the cleaning can be performed with high efficiency. Preferably, the inner surface of the container is made of a member that reflects ultrasonic waves, so that the ultrasonic waves from the ultrasonic radiation surface can be transmitted toward the site to be cleaned without being attenuated.

本発明の超音波洗浄装置は、以上のように、いわゆるノズルシャワー式の超音波洗浄装置において、液体から超音波振動子を気密に封止するにあたって、該超音波振動子が一端部側に取付けられ、たとえば円錐台状に形成される超音波伝達体の外周部をハウジングに直接取付けてしまうと、該外周部が振動しない比較的高周波（５００ＭＨｚ以上）の超音波しか使用できなくなるのに対して、下底面側で振動の節となる部分を前記ハウジングに保持固定するとともに、上底面側は前記超音波放射面の近傍を、弾性体から成るＯリングなどの保持部材で保持固定する。 As described above, the ultrasonic cleaning device of the present invention is a so-called nozzle shower type ultrasonic cleaning device. When the ultrasonic transducer is hermetically sealed from a liquid, the ultrasonic transducer is attached to one end side. is, for example, when the outer peripheral portion of the ultrasonic transmission member is formed in a truncated cone shape will attach directly to the housings, the outer circumferential portion does not vibrate relatively high frequency with respect to (500 MHz or higher) of the only unavailable ultrasonic In addition, the portion serving as a vibration node on the lower bottom surface side is held and fixed to the housing, and the upper bottom surface side is held and fixed near the ultrasonic radiation surface by a holding member such as an O-ring made of an elastic body.

それゆえ、前記保持部材が放射面の側面での超音波振動を抑制しないようにしつつ、超音波伝達体の保持が可能になり、振動振幅の大きな比較的低い数十ｋＨｚ、好ましくは２０〜６０ｋＨｚ程度の超音波を使用することができ、強固な汚れを除去することができるとともに、またそのように低い周波数の超音波を使用しても、超音波伝達体の超音波振動が接合部分でハウジングに吸収されてしまい、損失になってしまうことを抑制することができ、超音波出力をむやみに大きくする必要もなくなる。また、超音波伝達体の側面や超音波振動子部分が液体と接触することを防止でき、これによってもまた高効率化を図ることができる。さらにまた、前記２０〜６０ｋＨｚ程度の超音波振動を利用することによって、キャビテーション圧力を積極的に利用することも可能である。 Therefore, it is possible to hold the ultrasonic transmission body while preventing the holding member from suppressing the ultrasonic vibration on the side surface of the radiation surface, and a relatively low tens of kHz, preferably 20 to 60 kHz, with a large vibration amplitude. can use the degree of ultrasonic, it is possible to remove the solid stains, also using ultrasound of such low frequencies, ultrasonic vibration bonding portion of the ultrasound transmission member DEHA It is possible to prevent the loss due to absorption by uzing, and it is not necessary to increase the ultrasonic output unnecessarily. Further, it is possible to prevent the side surface of the ultrasonic transmission body and the ultrasonic transducer part from coming into contact with the liquid, and this can also increase the efficiency. Furthermore, the cavitation pressure can be positively utilized by utilizing the ultrasonic vibration of about 20 to 60 kHz.

また、本発明の超音波洗浄装置は、以上のように、いわゆるノズルシャワー式の超音波洗浄装置において、前記液体から超音波振動子を気密に封止するにあたって、該超音波振動子が下底面に取付けられ、略円錐台状に形成される超音波伝達体の外周部を該超音波洗浄装置のハウジングに直接取付けてしまうと、該外周部が振動しない比較的高周波（５００ＭＨｚ以上）の超音波しか使用できなくなるのに対して、下底面側で振動の節となる部分を前記ハウジングに保持固定するとともに、前記ハウジングから前記容器を分離して、その容器の底面を前記超音波伝達体の上底面に固着する。 The ultrasonic cleaning device of the present invention, as described above, in the ultrasonic cleaning apparatus of the so-called nozzle a shower, in order to seal hermetically an ultrasonic vibrator from the liquid, the bottom surface is ultrasonic vibrator If the outer peripheral part of the ultrasonic transmission body that is attached in the shape of a truncated cone is directly attached to the housing of the ultrasonic cleaning device , the outer peripheral part does not vibrate and the relatively high frequency (500 MHz or higher) ultrasonic waves whereas only unavailable, holds fixed the portion that becomes the node of vibration to the housing bottom surface side, and separating the container from the housing, on the bottom surface of the container of the ultrasonic transmission member Stick to the bottom .

それゆえ、前記液体を貯留する容器は、前記吐出口および前記液体の流入口を除いて閉塞され、超音波振動子を液体から保護しつつ、比較的低い数十ｋＨｚ、好ましくは２０〜６０ｋＨｚ程度の超音波を使用することができ、強固な汚れを除去することができるとともに、またそのように低い周波数の超音波を使用しても、超音波伝達体の超音波振動が接合部分でハウジングに吸収されてしまい、損失になってしまうことを抑制することができ、超音波出力をむやみに大きくする必要もなくなる。また、超音波伝達体の側面や超音波振動子部分が液体と接触することを防止でき、これによってもまた高効率化を図ることができる。さらにまた、前記２０〜６０ｋＨｚ程度の超音波振動を利用することによって、キャビテーション圧力を積極的に利用することも可能である。 Therefore, the container for storing the liquid is closed except for the discharge port and the liquid inflow port, and protects the ultrasonic transducer from the liquid, while being relatively low tens of kHz, preferably about 20 to 60 kHz. the can using ultrasound, it is possible to remove the solid stains, also using ultrasound of such low frequencies, the ultrasonic vibration of the ultrasonic transmission member is bonded part DEHA Ujingu It is possible to prevent the loss and loss, and it is not necessary to increase the ultrasonic output unnecessarily. Further, it is possible to prevent the side surface of the ultrasonic transmission body and the ultrasonic transducer part from coming into contact with the liquid, and this can also increase the efficiency. Furthermore, the cavitation pressure can be positively utilized by utilizing the ultrasonic vibration of about 20 to 60 kHz.

以降、本発明に関わる超音波洗浄装置の実施の形態を図面に従って説明するにあたり、図面では超音波振動の伝達方向を便宜上矢印の方向で示し、超音波の強さを矢印の太さと大きさとで示している。また、本来の縦波等の振動を、すべて横波で表現して記述、図示している。   Hereinafter, in describing the embodiments of the ultrasonic cleaning apparatus according to the present invention with reference to the drawings, in the drawings, the transmission direction of ultrasonic vibration is indicated by the direction of the arrow for convenience, and the strength of the ultrasonic wave is indicated by the thickness and size of the arrow. Show. In addition, all the vibrations such as the longitudinal waves are described and illustrated as transverse waves.

［実施の形態１］
図１は、本発明の実施の第１の形態の超音波洗浄装置５１の内部構成を示す断面図である。この図において、超音波洗浄装置５１は、大略的に、ハウジング５２と、前記ハウジング５２内に配設された超音波振動子５３と、前記ハウジング５２内に配設されるとともに、一端部が前記超音波振動子５３に接続された超音波伝達体５４と、前記超音波振動子５３を駆動する駆動回路５５と、ハウジング５２内の所定箇所に液体（洗浄液）を供給する液体供給部５６とを備えて構成されている。 [Embodiment 1]
FIG. 1 is a cross-sectional view showing an internal configuration of an ultrasonic cleaning apparatus 51 according to the first embodiment of the present invention. In this figure, the ultrasonic cleaning device 51 is roughly arranged in a housing 52, an ultrasonic vibrator 53 disposed in the housing 52, and disposed in the housing 52, and one end portion of the ultrasonic cleaning device 51 is disposed in the housing 52. An ultrasonic transmission body 54 connected to the ultrasonic transducer 53, a drive circuit 55 that drives the ultrasonic transducer 53, and a liquid supply unit 56 that supplies a liquid (cleaning liquid) to a predetermined location in the housing 52. It is prepared for.

前記ハウジング５２は、合成樹脂などの絶縁材料で構成されたもので、筒状の本体部５２ａと、前記本体部５２ａの一端に接続された液体貯留部５２ｂとを備えて構成されている。前記液体貯留部５２ｂは、内部に液体を貯留する貯留空間５７を備えるとともに、この貯留空間５７に貯留された液体を外部に吐出（噴出）する任意形状の吐出口５８を備えており、本体部５２ａ側から吐出口５８側に向けて先細り状となる錐体形状（絞り形状）に形成されている。   The housing 52 is made of an insulating material such as synthetic resin, and includes a cylindrical main body 52a and a liquid reservoir 52b connected to one end of the main body 52a. The liquid storage part 52b includes a storage space 57 for storing the liquid therein, and includes an arbitrarily shaped discharge port 58 for discharging (spouting) the liquid stored in the storage space 57 to the outside. It is formed in a cone shape (aperture shape) that tapers from the 52a side toward the discharge port 58 side.

前記超音波振動子５３は、チタン酸鉛などのセラミック材料や水晶などで構成された圧電振動子から成り、厚み振動を利用するものである。前記超音波伝達体５４は、金属材料によって略円錐台状に形成され、下底面５４ａに前記超音波振動子５３が取付けられ、該下底面５４ａ側で、振動の節（振幅が最小）となる部分５４ｂがハウジング５２の本体部５２ａに突出形成された支持体５２ｃによって支持され、超音波放射面となる上底面５４ｃが前記貯留空間５７に臨んでいる。なお、この超音波伝達体５４を構成する好適な金属材料として、アルミニウムなどの軽金属やアルミニウム合金などの軽合金を用いることができる。   The ultrasonic vibrator 53 is made of a piezoelectric vibrator made of a ceramic material such as lead titanate or quartz, and utilizes thickness vibration. The ultrasonic transmission body 54 is formed of a metal material in a substantially truncated cone shape, the ultrasonic transducer 53 is attached to the lower bottom surface 54a, and a vibration node (amplitude is minimum) is formed on the lower bottom surface 54a side. The portion 54 b is supported by a support body 52 c that is formed to protrude from the main body 52 a of the housing 52, and the upper bottom surface 54 c that becomes an ultrasonic radiation surface faces the storage space 57. As a suitable metal material constituting the ultrasonic transmission body 54, a light metal such as aluminum or a light alloy such as aluminum alloy can be used.

前記駆動回路５５は、回路基板に発振回路などを構成する電子部品が実装されて構成されたものである。なお、本実施形態では、この駆動回路５５は、図略のバッテリで駆動するようにしたものであるが、商用電源で駆動するようにすることも可能である。   The drive circuit 55 is configured by mounting electronic components constituting an oscillation circuit or the like on a circuit board. In the present embodiment, the drive circuit 55 is driven by a battery (not shown), but can be driven by a commercial power source.

前記液体供給部５６は、液体を貯留するタンク５６ａと、ポンプ５６ｂと、パイプ５６ｃとを備えて構成されており、パイプ５６ｃの一端がハウジング５２の内側部を介して前記貯留空間５７の内部に挿通され、タンク５６ａ内の液体がポンプ５６ｂによって所定の圧力で前記貯留空間５７へ供給され、参照符５９で示すように、前記吐出口５８から図示しない被洗浄部位に向けて吐出される。前記ポンプ５６ｂを駆動する駆動回路は、超音波振動子５３を駆動する駆動回路５５に併設されている。   The liquid supply unit 56 includes a tank 56 a for storing liquid, a pump 56 b, and a pipe 56 c, and one end of the pipe 56 c is located inside the storage space 57 via the inner side of the housing 52. The liquid in the tank 56a is inserted into the storage space 57 at a predetermined pressure by the pump 56b, and is discharged from the discharge port 58 toward a portion to be cleaned (not shown) as indicated by reference numeral 59. A drive circuit for driving the pump 56 b is provided in the drive circuit 55 for driving the ultrasonic transducer 53.

このように構成される超音波洗浄装置５１では、液体供給部５６が液体５９を連続的に液体貯留部５２ｂに供給することによって、前記貯留空間５７に液体５９が貯留される一方、駆動回路５５によって超音波振動子５３が駆動されることで、超音波伝達体５４の超音波放射面から出力される超音波（超音波振動エネルギ）が前記貯留空間５７に貯留されている液体に伝播される。   In the ultrasonic cleaning device 51 configured as described above, the liquid supply unit 56 continuously supplies the liquid 59 to the liquid storage unit 52b, whereby the liquid 59 is stored in the storage space 57, while the drive circuit 55 is provided. By driving the ultrasonic transducer 53 by the ultrasonic wave, the ultrasonic wave (ultrasonic vibration energy) output from the ultrasonic radiation surface of the ultrasonic transmission body 54 is propagated to the liquid stored in the storage space 57. .

そして、超音波伝達体５４から出力された超音波は、前記液体貯留部５２ｂが吐出口５８側を先細り状とする錐体形状を有しているために、該液体貯留部５２ｂの中央部側に集束され、吐出口５８に集中される。こうして、参照符６０で示す超音波が貯留空間５７に貯留されている液体５９に効率的に伝播され、吐出口５８からはその超音波６０の伝播された液体が順次吐出されることになる。これによって、水道水や、それに洗浄剤などが添加されて成る前記液体５９が前記被洗浄部位への伝播路となって、前記被洗浄部位へ超音波６０が伝播され、該超音波６０が被洗浄部位から汚れを剥し取り、前記液体５９がそれを流し去ることで、前記被洗浄部位を洗浄する。なお、前記パイプ５６の他端を水道の蛇口などに直結してもよい。   The ultrasonic wave output from the ultrasonic transmission body 54 has a conical shape in which the liquid reservoir 52b is tapered on the discharge port 58 side. And concentrated on the discharge port 58. In this way, the ultrasonic wave indicated by reference numeral 60 is efficiently propagated to the liquid 59 stored in the storage space 57, and the liquid to which the ultrasonic wave 60 is propagated is sequentially discharged from the discharge port 58. As a result, the liquid 59 to which tap water or a cleaning agent or the like is added becomes a propagation path to the site to be cleaned, and the ultrasonic wave 60 is transmitted to the site to be cleaned. The dirt is removed from the cleaning site, and the liquid 59 is washed away, thereby cleaning the site to be cleaned. The other end of the pipe 56 may be directly connected to a tap or the like.

ここで、一般に、超音波伝達体の超音波放射面を生体に接触させると、生体が発熱するか、もしくは傷付く等で激しい痛みを伴う。また、痛みを伴わなくても、長期の使用によって、生体組織に何らかの悪影響を及ぼす危険性があることが知られている。そのため、上記のように流水を超音波の伝達媒体とするノズルシャワー式の超音波洗浄を行うことで、生体を超音波放射面に直接触れさせずに、安全に洗浄することが可能となる。また、超音波を伝達させる液体を、別の洗浄容器等に確保しておく必要がなくなる。こうして、任意の被洗浄物を容易に洗浄することができる。   Here, generally, when the ultrasonic radiation surface of an ultrasonic transmission body is brought into contact with a living body, the living body generates heat or is severely painful because it is damaged. In addition, it is known that there is a risk of some adverse effects on living tissue due to long-term use even without pain. Therefore, by performing nozzle shower type ultrasonic cleaning using flowing water as an ultrasonic transmission medium as described above, the living body can be safely cleaned without directly touching the ultrasonic radiation surface. In addition, it is not necessary to secure a liquid for transmitting ultrasonic waves in another cleaning container or the like. In this way, any object to be cleaned can be easily cleaned.

上述のように構成される超音波洗浄装置５１において、注目すべきは、本実施の形態では、略円錐台状に形成され、一端部である下底面５４ａに超音波振動子５３が取付けられ、他端部である上底面５４ｃが前記超音波放射面となる超音波伝達体５４を、前記超音波放射面の近傍で、前記ハウジング５２の内周面に、弾性体から成る保持部材６１によって気密に保持固定することである。   In the ultrasonic cleaning device 51 configured as described above, it should be noted that in the present embodiment, the ultrasonic cleaning device 51 is formed in a substantially truncated cone shape, and the ultrasonic transducer 53 is attached to the lower bottom surface 54a which is one end portion. The ultrasonic transmission body 54 whose upper bottom surface 54c, which is the other end, becomes the ultrasonic radiation surface is hermetically sealed by a holding member 61 made of an elastic material on the inner peripheral surface of the housing 52 in the vicinity of the ultrasonic radiation surface. It is to hold and fix to.

前記保持部材６１は、繰返しの伸縮に対して、所期の弾発性を維持し、硬化し難い材料が望ましく、ゴムから成るＯリングなどで実現される。また、超音波振動においては、超音波伝達体５４の超音波放射面の振動振幅が最も大きく、たとえば４０ｋＨｚで２０μｍ程度となる。そのため、好ましくは、図２で示すように、超音波伝達体５４の超音波放射面における外径ａと、保持部材６１の外径ｂとの差は、振動による伸縮量と、保持部材６１の弾性となどに応じて決定すればよく、２ｍｍ以下程度にすることが望ましい。   The holding member 61 is preferably made of a material that maintains desired elasticity against repeated expansion and contraction and is hard to be cured, and is realized by an O-ring made of rubber or the like. In ultrasonic vibration, the vibration amplitude of the ultrasonic radiation surface of the ultrasonic transmission body 54 is the largest, for example, about 20 μm at 40 kHz. Therefore, preferably, as shown in FIG. 2, the difference between the outer diameter a on the ultrasonic radiation surface of the ultrasonic transmission body 54 and the outer diameter b of the holding member 61 is the amount of expansion / contraction due to vibration and the holding member 61. What is necessary is just to determine according to elasticity etc., and it is desirable to set it as about 2 mm or less.

こうして、超音波６０を伝達させるための液体５９を、前記液体貯留部５２ｂの貯留空間５７のみに貯留し、該液体５９が超音波伝達体５４の超音波放射面以外の、側面や超音波振動子５３部分へ浸水しないように、気密に封止することができる。これによって、超音波振動子５３で発生し、超音波伝達体５４の超音波放射面から放射された超音波６０は、前記超音波放射面以外の部位に負荷を与えることなく、該超音波伝達媒体５４内を進み、任意の被洗浄部位に伝達されて、高効率に洗浄を行うことができる。   In this way, the liquid 59 for transmitting the ultrasonic wave 60 is stored only in the storage space 57 of the liquid storage part 52 b, and the liquid 59 is a side surface or ultrasonic vibration other than the ultrasonic radiation surface of the ultrasonic transmission body 54. It can seal airtight so that it may not immerse into the child 53 part. As a result, the ultrasonic wave 60 generated by the ultrasonic transducer 53 and emitted from the ultrasonic radiation surface of the ultrasonic transmission body 54 is transmitted without applying a load to a portion other than the ultrasonic radiation surface. Proceeding through the medium 54, it is transmitted to an arbitrary site to be cleaned, and cleaning can be performed with high efficiency.

そして、そのような封止構造にしても、前記超音波放射面の側面での超音波振動は抑制されず、比較的低い数十ｋＨｚ、好ましくは２０〜６０ｋＨｚ程度の超音波を使用することができ、強固な汚れを除去することができるとともに、またそのように低い周波数の超音波を使用しても、超音波伝達体５４の超音波振動が接合部分で前記ハウジング５２に吸収されてしまい、損失になってしまうことを抑制することができ、超音波出力をむやみに大きくする必要もなくなる。さらにまた、前記２０〜６０ｋＨｚ程度の超音波振動を利用することによって、キャビテーション圧力を積極的に利用することも可能である。このようにして、任意の被洗浄物を、その汚れの種類によらず、綺麗に洗浄することができる。   Even with such a sealing structure, ultrasonic vibrations on the side surface of the ultrasonic radiation surface are not suppressed, and ultrasonic waves of relatively low tens of kHz, preferably about 20 to 60 kHz can be used. In addition to removing strong dirt, even when using ultrasonic waves of such a low frequency, the ultrasonic vibration of the ultrasonic transmission body 54 is absorbed by the housing 52 at the joint portion, It is possible to suppress loss, and it is not necessary to increase the ultrasonic output unnecessarily. Furthermore, the cavitation pressure can be positively utilized by utilizing the ultrasonic vibration of about 20 to 60 kHz. In this way, any object to be cleaned can be cleaned cleanly regardless of the type of dirt.

また、前記ハウジング５２の液体貯留部５２ｂは、吐出口５８の反対側に超音波放射面が設けられ、かつ前記超音波放射面側から吐出口５８側に向けて断面積が小さくなるように側壁が傾斜されて、先細り状となる錐体形状（絞り形状）となるように形成されているので、超音波振動子５３で発生し、超音波伝達体５４内を伝播した超音波を、参照符６０ａから前記参照符６０で示すように、貯留空間５７に貯留された液体５９内で集束させ、強める（単位断面積あたり）ことができる。したがって、被洗浄物を洗浄するために必要な超音波圧力を少ない超音波出力で確保でき、高効率に洗浄することができる。   The liquid storage portion 52b of the housing 52 is provided with an ultrasonic radiation surface on the opposite side of the discharge port 58 and has a side wall so that a cross-sectional area decreases from the ultrasonic radiation surface side to the discharge port 58 side. Are inclined so as to have a tapered cone shape (diaphragm shape). Therefore, an ultrasonic wave generated in the ultrasonic transducer 53 and propagated in the ultrasonic transmission body 54 is referred to as a reference symbol. As indicated by the reference numeral 60 from 60a, the liquid 59 stored in the storage space 57 can be focused and strengthened (per unit cross-sectional area). Therefore, the ultrasonic pressure required for cleaning the object to be cleaned can be secured with a small ultrasonic output, and the cleaning can be performed with high efficiency.

好ましくは、前記Ｏリングから成る保持部材６１に対応して、図３の超音波伝達体５４’で示すように、前記保持部材６１が締着される外周面に、凹溝５４ｄを形成するようにしてもよい。同様に、図４で示すように、ハウジング５２側でも、本体部５２の内周面で前記保持部材６１が密着する部分に、凹溝５２ｄを形成するようにしてもよい。それぞれの凹溝５４ｄ，５２ｄの深さｄ１，ｄ２は、たとえば１ｍｍ以下程度にすることが望ましい。 Preferably, corresponding to the holding member 61 made of the O-ring, a concave groove 54d is formed on the outer peripheral surface to which the holding member 61 is fastened, as shown by an ultrasonic transmission body 54 ' in FIG. It may be. Similarly, as shown in FIG. 4, on the housing 52 side, a concave groove 52d may be formed in a portion where the holding member 61 is in close contact with the inner peripheral surface of the main body 52. It is desirable that the depths d1 and d2 of the respective concave grooves 54d and 52d be, for example, about 1 mm or less.

このように構成することで、保持部材６１が確実に超音波伝達体５４の振動に追従できるようになり、より確実に超音波放射面付近のみに液体５９を導き、溜めることが可能となる。前記凹溝５４ｄ，５２ｄに代えて、前記Ｏリングから成る保持部材６１を挟み込む一対（２条）の凸条を用いてもよい。   With this configuration, the holding member 61 can reliably follow the vibration of the ultrasonic transmission body 54, and the liquid 59 can be guided and stored only near the ultrasonic radiation surface more reliably. Instead of the concave grooves 54d and 52d, a pair (two strips) of convex strips sandwiching the holding member 61 made of the O-ring may be used.

［実施の形態２］
図５は、本発明の実施の第２の形態の超音波洗浄装置７１の内部構成を示す断面図である。この超音波洗浄装置７１は、上述の超音波洗浄装置５１に類似し、対応する部分には同一の参照符号を付して示し、その説明を省略する。注目すべきは、この超音波洗浄装置７１では、前記超音波放射面を有する超音波伝達体５４と、前記貯留空間５７を形成する容器７２とを分離し、前記超音波伝達体の超音波放射面に、その超音波放射面程度の底面積を有する前記容器７２の底面７２ａを固着することである。これによって、前記超音波放射面からの超音波振動は容器７２内の液体５９中を伝播することになり、容器７２の側面に伝達される振動は少ないので、該容器７２の側面をハウジング５２にて保持することができる。 [Embodiment 2]
FIG. 5 is a cross-sectional view showing an internal configuration of an ultrasonic cleaning device 71 according to the second embodiment of the present invention. The ultrasonic cleaning device 71 is similar to the ultrasonic cleaning device 51 described above, and corresponding portions are denoted by the same reference numerals, and description thereof is omitted. It should be noted that in this ultrasonic cleaning apparatus 71, the ultrasonic transmission body 54 having the ultrasonic emission surface and the container 72 forming the storage space 57 are separated, and the ultrasonic emission of the ultrasonic transmission body is performed. The bottom surface 72a of the container 72 having a bottom area equivalent to the ultrasonic radiation surface is fixed to the surface. Accordingly, the ultrasonic vibration from the ultrasonic radiation surface propagates in the liquid 59 in the container 72, and the vibration transmitted to the side surface of the container 72 is small. Therefore, the side surface of the container 72 is moved to the housing 52. Can be held.

このようにしてもまた、前記ノズルシャワー式の超音波洗浄装置において、前記液体５９を貯留する容器７２は、前記吐出口５８および前記液体５９の流入口を除いて閉塞され、超音波振動子５３を液体５９から保護しつつ、比較的低い周波数の超音波を使用することができ、強固な汚れを除去することができるとともに、またそのように低い周波数の超音波を使用しても、超音波伝達体５４の超音波振動が接合部分で前記ハウジング５２に吸収されてしまい、損失になってしまうことを抑制することができ、超音波出力をむやみに大きくする必要もなくなる。また、超音波伝達体５４の側面や超音波振動子５３部分が液体５９と接触することを防止でき、これによってもまた高効率化を図ることができる。さらにまた、前記２０〜６０ｋＨｚ程度の超音波振動を利用することによって、キャビテーション圧力を積極的に利用することも可能である。   Also in this case, in the nozzle shower type ultrasonic cleaning apparatus, the container 72 for storing the liquid 59 is closed except for the discharge port 58 and the inlet of the liquid 59, and the ultrasonic vibrator 53. Can protect the liquid 59 from the liquid 59 and can use relatively low frequency ultrasonic waves to remove strong dirt. Even if such low frequency ultrasonic waves are used, It is possible to suppress the ultrasonic vibration of the transmission body 54 from being absorbed by the housing 52 at the joining portion and causing a loss, and it is not necessary to increase the ultrasonic output unnecessarily. Further, it is possible to prevent the side surface of the ultrasonic transmission body 54 and the ultrasonic transducer 53 portion from coming into contact with the liquid 59, and this can also increase the efficiency. Furthermore, the cavitation pressure can be positively utilized by utilizing the ultrasonic vibration of about 20 to 60 kHz.

好ましくは、前記容器７２の内側面７２ｂを超音波６０を反射する部材で構成することで、前記超音波放射面からの超音波６０を減衰させることなく、被洗浄部位方向へ伝達することができる。また、この容器７２も、底面７２ａ側から吐出口５８側にかけて超音波を集束させる構造となっており、被洗浄物を洗浄するために必要な超音波圧力を少ない超音波出力で確保でき、高効率に洗浄することができる。   Preferably, by configuring the inner side surface 72b of the container 72 with a member that reflects the ultrasonic wave 60, the ultrasonic wave 60 from the ultrasonic wave emission surface can be transmitted toward the cleaned region without being attenuated. . The container 72 also has a structure for focusing ultrasonic waves from the bottom surface 72a side to the discharge port 58 side, and can secure an ultrasonic pressure necessary for cleaning the object to be cleaned with a small ultrasonic output. It can be washed efficiently.

また、好ましくは、図６で示すように、容器７２の側面とハウジング５２との間に、ゴムなどの弾性体７３を設けて保持する。これによって、容器７２の側面に微小な振動が発生しても、前記弾性体７３がその振動を吸収して、確実に容器７２を保持することができる。   Preferably, an elastic body 73 such as rubber is provided and held between the side surface of the container 72 and the housing 52, as shown in FIG. As a result, even if a minute vibration is generated on the side surface of the container 72, the elastic body 73 absorbs the vibration and can reliably hold the container 72.

さらにまた、好ましくは、図７で示すように、容器７２の底面７２ａと、超音波伝達体５４の超音波放射面である上底面５４ｃとを、ボルト７４による締め付け固定とする。これによって、一層の振動応力に耐えることができ、超音波振動の損失を削減することができる。   Furthermore, preferably, as shown in FIG. 7, the bottom surface 72 a of the container 72 and the upper bottom surface 54 c that is the ultrasonic radiation surface of the ultrasonic transmission body 54 are fastened and fixed by bolts 74. As a result, it is possible to withstand further vibrational stress and reduce the loss of ultrasonic vibration.

［実施の形態３］
図８および図９は、本発明の実施の第３の形態の超音波洗浄装置５１’，７１’の内部構成を示す断面図である。これらの超音波洗浄装置５１’，７１’は、それぞれ前述の超音波洗浄装置５１，７１に類似し、対応する部分には同一の参照符号を付して示し、その説明を省略する。注目すべきは、これらの超音波洗浄装置５１’，７１’では、前記液体５９の流路８１が、棒状の超音波振動子５３’および円錐台状の超音波伝達体５４’内を軸線方向に穿設されて形成され、前記液体５９の流入口８２が前記超音波放射面に形成されていることである。 [Embodiment 3]
8 and 9 are cross-sectional views showing the internal configuration of ultrasonic cleaning apparatuses 51 'and 71' according to the third embodiment of the present invention. These ultrasonic cleaning apparatuses 51 ′ and 71 ′ are similar to the above-described ultrasonic cleaning apparatuses 51 and 71, respectively, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. It should be noted that in these ultrasonic cleaning apparatuses 51 ′ and 71 ′, the flow path 81 of the liquid 59 passes through the rod-shaped ultrasonic transducer 53 ′ and the truncated cone-shaped ultrasonic transmission body 54 ′ in the axial direction. The inflow port 82 for the liquid 59 is formed on the ultrasonic radiation surface.

これに対応して、液体供給部５６’は、超音波振動子５３’の後方側に設けられ、タンク５６ａ’からの液体は、ポンプ５６ｂから短いパイプ５６ｃ’を介して、所定の圧力で前記超音波振動子５３’の流路８１に供給される。前記超音波振動子５３’は、好ましくは、小型化に好適な図示のランジュバン型振動子から成り、前記流路８１は、該超音波振動子５３’および前記超音波伝達体５４’の中軸を通す形状とすることが望ましい。   Correspondingly, the liquid supply unit 56 ′ is provided on the rear side of the ultrasonic transducer 53 ′, and the liquid from the tank 56a ′ is supplied from the pump 56b through the short pipe 56c ′ at a predetermined pressure. It is supplied to the flow path 81 of the ultrasonic transducer 53 ′. The ultrasonic transducer 53 ′ is preferably composed of the illustrated Langevin type transducer suitable for miniaturization, and the flow path 81 has a central axis of the ultrasonic transducer 53 ′ and the ultrasonic transmission body 54 ′. It is desirable to make it pass through.

これによって、超音波を伝達させる液体５９を円滑に前記貯留空間５７へ導くことができる。また、超音波放射面から直接液体を吐出することができるので、前記貯留空間５７内で空気が混入することはなく、高効率に超音波６０を液体５９に伝達することができる。   Accordingly, the liquid 59 that transmits ultrasonic waves can be smoothly guided to the storage space 57. In addition, since the liquid can be directly discharged from the ultrasonic radiation surface, air is not mixed in the storage space 57, and the ultrasonic wave 60 can be transmitted to the liquid 59 with high efficiency.

前記液体５９は、洗浄力を高めるために、ポンプ５６ｂによって間欠的に吐出されてもよく、またヒータなどで暖められてもよく、さらにまた洗浄剤や薬品が混入されてもよい。   The liquid 59 may be discharged intermittently by the pump 56b in order to increase the cleaning power, may be warmed by a heater or the like, and may be mixed with a cleaning agent or chemicals.

また、好ましくは、前記液体貯留部５２ｂおよび容器７２の形状は、懸垂状であるとよい。これによって、超音波放射面からの超音波が容器内側面で反射されても、超音波放射面側に戻ることがなく、被洗浄部位へ高効率に伝達させることができる。   Preferably, the liquid storage part 52b and the container 72 have a suspended shape. As a result, even if ultrasonic waves from the ultrasonic radiation surface are reflected by the inner surface of the container, they can be transmitted to the site to be cleaned with high efficiency without returning to the ultrasonic radiation surface side.

本発明の実施の第１の形態の超音波洗浄装置の内部構成を示す断面図である。It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus of the 1st Embodiment of this invention. 図１で示す超音波洗浄装置において、超音波伝達体と、それに嵌着される保持部材との寸法関係を説明するための図である。In the ultrasonic cleaning apparatus shown in FIG. 1, it is a figure for demonstrating the dimensional relationship of an ultrasonic transmission body and the holding member fitted to it. 図１で示す超音波洗浄装置の改良例を示す断面図である。It is sectional drawing which shows the example of improvement of the ultrasonic cleaning apparatus shown in FIG. 図１で示す超音波洗浄装置の他の改良例を示す断面図である。It is sectional drawing which shows the other example of improvement of the ultrasonic cleaning apparatus shown in FIG. 本発明の実施の第２の形態の超音波洗浄装置の内部構成を示す断面図である。It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus of the 2nd Embodiment of this invention. 図５で示す超音波洗浄装置の改良例を示す断面図である。It is sectional drawing which shows the example of improvement of the ultrasonic cleaning apparatus shown in FIG. 図５で示す超音波洗浄装置の他の改良例を示す断面図である。It is sectional drawing which shows the other example of improvement of the ultrasonic cleaning apparatus shown in FIG. 本発明の実施の第３の形態の超音波洗浄装置の内部構成を示す断面図である。It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus of the 3rd Embodiment of this invention. 本発明の実施の第３の形態の超音波洗浄装置の内部構成を示す断面図である。It is sectional drawing which shows the internal structure of the ultrasonic cleaning apparatus of the 3rd Embodiment of this invention. 典型的な従来技術の超音波洗浄装置の断面図である。1 is a cross-sectional view of a typical prior art ultrasonic cleaning apparatus. 他の従来技術の超音波洗浄装置の断面図である。It is sectional drawing of the ultrasonic cleaning apparatus of another prior art. さらに他の従来技術の超音波洗浄装置の使用方法を示す図である。It is a figure which shows the usage method of the ultrasonic cleaning apparatus of another prior art. 各従来技術から想到されるノズルシャワー式の超音波洗浄装置の断面図である。It is sectional drawing of the nozzle shower type ultrasonic cleaning apparatus conceived from each prior art.

符号の説明Explanation of symbols

５１，５１’，７１，７１’ 超音波洗浄装置
５２ ハウジング
５２ａ 本体部
５２ｂ 液体貯留部
５２ｃ 支持体
５２ｄ，５４ｄ 凹溝
５３，５３’ 超音波振動子
５４，５４’ 超音波伝達体
５４ａ 下底面
５４ｃ 上底面（超音波放射面）
５５ 駆動回路
５６ 液体供給部
５６ａ，５６ａ’ タンク
５６ｂ ポンプ
５６ｃ，５６ｃ’ パイプ
５７ 貯留空間
５８ 吐出口
５９ 液体
６０ 超音波
６１ 保持部材
７２ 容器
７２ａ 底面
７３ 弾性体
７４ ボルト
８１ 流路 51, 51 ', 71, 71' Ultrasonic cleaning device 52 Housing 52a Main body 52b Liquid reservoir 52c Support body 52d, 54d Groove 53, 53 'Ultrasonic transducer 54, 54' Ultrasonic transmitter 54a Lower bottom surface 54c Top bottom (ultrasonic radiation surface)
55 Drive circuit 56 Liquid supply part 56a, 56a 'Tank 56b Pump 56c, 56c' Pipe 57 Storage space 58 Discharge port 59 Liquid 60 Ultrasonic wave 61 Holding member 72 Container 72a Bottom surface 73 Elastic body 74 Bolt 81 Flow path

Claims (4)

内部に超音波放射面を有する容器に液体を供給し、該液体を前記容器に形成された吐出口から流出させて被洗浄部位と接触させることで超音波の伝播路を形成し、前記被洗浄部位を洗浄するようにした超音波洗浄装置において、
超音波振動子と、
略円錐台状に形成され、その下底面に前記超音波振動子が取付けられるとともに、その下底面側で振動の節となる部分がハウジングに支持され、上底面が前記超音波放射面となり、前記ハウジングの先端側の内周面とで前記容器を形成する超音波伝達体と、
弾性体から成り、前記超音波伝達体を、その超音波放射面の近傍で、前記ハウジングの内周面に気密に保持固定する保持部材とを含むことを特徴とする超音波洗浄装置。 A liquid is supplied to a container having an ultrasonic radiation surface inside, and an ultrasonic wave propagation path is formed by allowing the liquid to flow out from a discharge port formed in the container and to come into contact with a portion to be cleaned. In the ultrasonic cleaning device designed to clean the part,
An ultrasonic transducer,
Is formed in a substantially truncated cone shape, it said at its lower bottom surface ultrasonic transducers attached Rutotomoni, portion to be a node of vibration at the bottom surface side is supported by the housing, and the upper bottom surface the ultrasonic emitting surface and Do Ri, form the container and the inner peripheral surface of the distal end side of the housing ultrasound transmission member,
Made of an elastic material, wherein the ultrasound transmission member, the in the vicinity of the ultrasonic wave emitting surface, an ultrasonic cleaning device which comprises a holding member for holding airtightly fixed to the inner peripheral surface of the housing. 内部に超音波放射面を有する容器に液体を供給し、該液体を前記容器に形成された吐出口から流出させて被洗浄部位と接触させることで超音波の伝播路を形成し、前記被洗浄部位を洗浄するようにした超音波洗浄装置において、
超音波振動子と、
略円錐台状に形成され、その下底面に前記超音波振動子が取付けられるとともに、その下底面側で振動の節となる部分がハウジングに支持され、上底面側が前記超音波放射面となる超音波伝達体とを含み、
前記容器は、内部に前記液体の貯留空間を有する錐体形状に形成され、その底面が前記超音波伝達体の上底面に固着されることを特徴とする超音波洗浄装置。 A liquid is supplied to a container having an ultrasonic radiation surface inside, and an ultrasonic wave propagation path is formed by allowing the liquid to flow out from a discharge port formed in the container and to come into contact with a portion to be cleaned. In the ultrasonic cleaning device designed to clean the part,
An ultrasonic transducer,
Is formed in a substantially truncated cone shape, the ultrasonic vibrator is attached Rutotomoni, portion to be a node of vibration at the bottom surface side is supported by the housing, the upper base surface element of the ultrasonic emitting surface to the bottom surface and a become ultrasound transmission member,
The container is formed in a cone shape having a storage space of the liquid therein, an ultrasonic cleaning device according to claim Rukoto its bottom is secured to the upper bottom surface of the ultrasound transmission member. 前記液体の流路が、棒状の超音波振動子および円錐台状の超音波伝達体内を軸線方向に穿設されて形成され、前記液体の流入口は前記超音波放射面に形成されていることを特徴とする請求項１または２記載の超音波洗浄装置。   The liquid flow path is formed by being drilled in the axial direction through a rod-shaped ultrasonic transducer and a truncated cone-shaped ultrasonic transmission body, and the liquid inlet is formed on the ultrasonic radiation surface. The ultrasonic cleaning apparatus according to claim 1 or 2. 前記容器において、前記吐出口の反対側に超音波放射面を有し、該容器は、前記超音波放射面側から吐出口側に向けて先細り状となる錐体形状に形成されていることを特徴とする請求項１〜３のいずれか１項に記載の超音波洗浄装置。 The container has an ultrasonic radiation surface on the opposite side of the discharge port, and the container is formed in a conical shape that tapers from the ultrasonic radiation surface side toward the discharge port side. The ultrasonic cleaning apparatus according to claim 1, wherein the ultrasonic cleaning apparatus is characterized in that
JP2003341743A 2003-09-30 2003-09-30 Ultrasonic cleaning equipment Expired - Fee Related JP3938129B2 (en)

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