JP3852570B2

JP3852570B2 - Clean room equipment

Info

Publication number: JP3852570B2
Application number: JP2001329410A
Authority: JP
Inventors: 浩鈴岡; 好洋松尾
Original assignee: 石川島播磨重工業株式会社
Priority date: 2001-10-26
Filing date: 2001-10-26
Publication date: 2006-11-29
Anticipated expiration: 2021-10-26
Also published as: JP2003130413A

Abstract

PROBLEM TO BE SOLVED: To provide a clean room device that can provide a conveying route of work with high grade cleanness locally with a simple structure, does not require high grade cleanness in the entire clean room, does not require a large- scale air conditioning facility, and can reduce facility cost and operation cost. SOLUTION: A process-side hood member 1 projecting outward is mounted to the upper and lower edges of a process-side delivery opening 18. The upper and lower edges of a conveying-side delivery opening 22 are provided with a conveying-side hood member 2 projecting outward so as to overlap on the process-side hood member 1 with a required clearance in the vertical direction when the conveying-side delivery opening 22 faces the process-side delivery opening 18 in transferring the work 15. Air purge by clean flow is performed in a space between the openings while the conveying-side delivery opening 22 is facing the process-side delivery opening 18 in transferring the work 15.

Description

【０００１】
【発明の属する技術分野】
本発明は、クリーンルーム装置に関するものである。
【０００２】
【従来の技術】
一般に、半導体、液晶、医薬品、食料品等を製造するために、ワークの加工を行う工場には、内部を所望の清浄度に保持したクリーンルーム装置が設けられている。
【０００３】
図８は従来のクリーンルーム装置の一例を表わすものであって、これは、低グレードな清浄度に保持されるクリーンルーム１１内に、高グレードな清浄度に保持される複数のプロセス装置１２を設置すると共に、該複数のプロセス装置１２間を、クリーンブースで囲われたトンネル状のコンベヤ１３でつなぎ、最初のプロセス装置１２で加工されたワークをコンベヤ１３で次のプロセス装置１２へ搬送し、順次、ワークの加工を行うようにしたものである。
【０００４】
しかし、図８に示されるようなクリーンルーム装置では、ワークの搬送方向が一方向に限定され、工程の組換え等が困難となって融通が利かないため、近年においては、図９に示されるように、ＡＧＶ（ＡｕｔｏｍａｔｉｃＧｕｉｄｅｄＶｅｈｉｃｌｅ）等の搬送台車１４によりワーク１５を搬送してプロセス装置１２へ受け渡すようにし、これに伴い、搬送台車１４とプロセス装置１２との間におけるワーク１５の受け渡し時にワーク１５が汚染されることを防止すべく、クリーンルーム１１全体を高グレードな清浄度としたものが開発されている。
【０００５】
尚、前記プロセス装置１２は、内部が高グレードな清浄度に保持され且つワーク１５を受台１６上に載置する形で収容可能な受渡部１７と、該受渡部１７の側面に開口され且つワーク１５を出し入れ可能なプロセス側受渡口１８と、該プロセス側受渡口１８を開閉可能なプロセス側気密扉１９と、前記受渡部１７に搬入されたワーク１５の加工を行う加工部２０とを有している。
【０００６】
又、前記搬送台車１４は、内部が高グレードな清浄度に保持され且つワーク１５を収容可能な搬送室２１と、該搬送室２１の側面に開口され且つワーク１５を出し入れ可能な搬送側受渡口２２と、該搬送側受渡口２２を開閉可能な搬送側気密扉２３と、前記搬送室２１とプロセス装置１２の受渡部１７との間でワーク１５を受け渡し可能な移載装置２４とを有し、前記クリーンルーム１１内に走行可能に配設されている。
【０００７】
【発明が解決しようとする課題】
しかしながら、前述の如く、ワーク１５の搬送経路となるクリーンルーム１１全体を高グレードな清浄度とするのでは、大掛かりな空調設備が必要となり、その設備費並びに運転費が嵩むという欠点を有していた。
【０００８】
このような欠点を解消するものとしては、従来、例えば、特開平９−１３３３８５号公報に開示されたようなものが存在し、これは、図１０に示される如く、搬送台車１４の高グレードな清浄度に保持される搬送室２１全体をせり出すように進退可能に設け、搬送台車１４とプロセス装置１２との間におけるワーク１５の受け渡し時には、搬送室２１全体をせり出すように前進させることにより、搬送側受渡口２２をプロセス側受渡口１８に密着させ、この状態で、プロセス側気密扉１９と搬送側気密扉２３とを開き、移載装置２４によりワーク１５を受け渡すようにしたものである。
【０００９】
しかしながら、特開平９−１３３３８５号公報に開示されたようなものでは、搬送台車１４の一側にしか搬送側受渡口２２を形成できなくなると共に、高グレードな清浄度に保持される搬送室２１全体をせり出すように進退可能とするための機構が必要となり、搬送台車１４の構造が非常に複雑化し、コストアップにつながるという不具合があった。
【００１０】
本発明は、斯かる実情に鑑み、ワークの搬送経路を簡単な構造で局所的に高グレードな清浄度とすることができ、クリーンルーム全体を高グレードな清浄度とする必要をなくして、大掛かりな空調設備を不要とし得、設備費並びに運転費を削減し得るクリーンルーム装置を提供しようとするものである。
【００１１】
【課題を解決するための手段】
本発明は、内部が低グレードな清浄度に保持されるクリーンルームと、
内部が前記クリーンルームの内圧より陽圧となるよう高グレードな清浄度に保持され且つワークを収容可能な受渡部と、該受渡部の側面に開口され且つワークを出し入れ可能なプロセス側受渡口と、該プロセス側受渡口を開閉可能なプロセス側気密扉とを有し、前記クリーンルーム内に設置されるプロセス装置と、
内部が前記クリーンルームの内圧より陽圧となるよう高グレードな清浄度に保持され且つワークを収容可能な搬送室と、該搬送室の側面に開口され且つワークを出し入れ可能な搬送側受渡口と、該搬送側受渡口を開閉可能な搬送側気密扉と、前記搬送室とプロセス装置の受渡部との間でワークを受け渡し可能な移載装置とを有し、前記クリーンルーム内に走行可能に配設される搬送台車とを備え、
前記プロセス側受渡口の上下縁部に外方へ張り出すプロセス側庇部材を取り付けると共に、前記搬送側受渡口の上下縁部に、ワークの移載時に搬送側受渡口をプロセス側受渡口へ対向させた際に前記プロセス側庇部材に対し上下方向へ所要の隙間をあけて重なり合うよう外方へ張り出す搬送側庇部材を取り付け、
ワークの移載時に搬送側受渡口をプロセス側受渡口に対向させた状態でその間の空間にクリーンフローによるエアパージが行われるよう構成したことを特徴とするクリーンルーム装置にかかるものである。
【００１２】
上記手段によれば、以下のような作用が得られる。
【００１３】
ワークの移載時に搬送側受渡口をプロセス側受渡口に対向させた状態でその間の空間にクリーンフローによるエアパージが行われると、ワークの搬送経路となる搬送側受渡口とプロセス側受渡口との間の空間が局所的に高グレードな清浄度に保持される形となり、クリーンルーム全体を高グレードな清浄度としなくて済み、大掛かりな空調設備が不要となり、設備費並びに運転費を削減可能となる。
【００１４】
【発明の実施の形態】
以下、本発明の実施の形態を図示例と共に説明する。
【００１５】
図１〜図７は本発明を実施する形態の一例であって、図中、図９と同一の符号を付した部分は同一物を表わしており、基本的な構成は図９に示す従来のものと同様であるが、本図示例の特徴とするところは、図１〜図７に示す如く、プロセス側受渡口１８の上下縁部に外方へ張り出すプロセス側庇部材１を取り付けると共に、搬送側受渡口２２の上下縁部に、ワーク１５の移載時に搬送側受渡口２２をプロセス側受渡口１８へ対向させた際に前記プロセス側庇部材１に対し上下方向へ所要の隙間をあけて重なり合うよう外方へ張り出す搬送側庇部材２を取り付け、ワーク１５の移載時に搬送側受渡口２２をプロセス側受渡口１８に対向させた状態でその間の空間にクリーンフローによるエアパージが行われるよう構成した点にある。
【００１６】
次に、上記図示例の作動を説明する。
【００１７】
先ず、図１に示す如く、搬送室２１にワーク１５を収容した搬送台車１４を走行させ、図２に示す如く、搬送台車１４をプロセス装置１２に接近させて搬送側受渡口２２をプロセス側受渡口１８に対向させると、搬送側気密扉２３が開き始める。
【００１８】
前記搬送側気密扉２３が開き始めると、搬送室２１の内部はクリーンルーム１１の内圧より陽圧となっているため、搬送側受渡口２２とプロセス側受渡口１８との間の空間には、図３に示す如く、クリーンフローによるエアパージが行われる形となり、該空間が局所的に高グレードな清浄度に保持される。ここで、クリーンルーム１１における気流は主に上方から下方へ向かう流れとなっているが、前記搬送側受渡口２２をプロセス側受渡口１８へ対向させた際には、該搬送側庇部材２がプロセス側庇部材１に対し上下方向へ所要の隙間をあけて重なり合うようになっており、搬送側庇部材２とプロセス側庇部材１とによっていわゆるラビリンス構造が搬送側受渡口２２とプロセス側受渡口１８との間の空間の上下に形成されているため、クリーンルーム１１における上方から下方へ向かう気流にごく僅かに含まれる微小な塵埃等が搬送側受渡口２２とプロセス側受渡口１８との間の空間に侵入する心配はなく、プロセス側庇部材１と搬送側庇部材２が、プロセス側受渡口１８と搬送側受渡口２２の上下縁部にそれぞれ取り付けられているだけで、プロセス側受渡口１８と搬送側受渡口２２の左右縁部が開放されていても、搬送側受渡口２２とプロセス側受渡口１８との間の空間を高グレードな清浄度に保持することに関して支障を来たすことはない。尚、この点については、実際に気流可視化装置（水蒸気式）を用い、搬送側受渡口２２とプロセス側受渡口１８との間の空間にダーティー領域を形成するように模擬して行った実験においても、白く目視される水蒸気がクリーンフローによるエアパージにより除去され、透明となることが確認されている。
【００１９】
続いて、図４に示す如く、搬送側気密扉２３とプロセス側気密扉１９が完全に開放されると、ワーク１５の移載が開始され、図５に示す如く、移載装置２４のフォークがスライドするように張り出されてワーク１５がプロセス装置１２の受渡部１７へ移載され、図６に示す如く、ワーク１５が受渡部１７の受台１６の上に載置され、前記移載装置２４のフォークがスライドするように引き戻された後、図７に示す如く、プロセス側気密扉１９と搬送側気密扉２３が閉じられ、ワーク１５の移載が完了する。このような動作が行われている間、搬送側受渡口２２とプロセス側受渡口１８との間の空間は、クリーンエアで満たされたまま保持されている。
【００２０】
このように、ワーク１５の移載時に搬送側受渡口２２をプロセス側受渡口１８に対向させた状態でその間の空間にクリーンフローによるエアパージが行われると、ワーク１５の搬送経路となる搬送側受渡口２２とプロセス側受渡口１８との間の空間が局所的に高グレードな清浄度に保持される形となり、クリーンルーム１１全体を高グレードな清浄度としなくて済み、大掛かりな空調設備が不要となり、設備費並びに運転費を削減可能となる。又、図示したように両側に搬送側受渡口２２が形成された搬送台車１４への適用も容易に行うことが可能となる。
【００２１】
こうして、ワーク１５の搬送経路を簡単な構造で局所的に高グレードな清浄度とすることができ、クリーンルーム１１全体を高グレードな清浄度とする必要をなくして、大掛かりな空調設備を不要とし得、設備費並びに運転費を削減し得る。
【００２２】
尚、本発明のクリーンルーム装置は、上述の図示例にのみ限定されるものではなく、搬送側受渡口２２とプロセス側受渡口１８との間の空間にクリーンフローによるエアパージを行うための専用のノズルを別途設けるようにしてもよいこと等、その他、本発明の要旨を逸脱しない範囲内において種々変更を加え得ることは勿論である。
【００２３】
【発明の効果】
以上、説明したように本発明のクリーンルーム装置によれば、ワークの搬送経路を簡単な構造で局所的に高グレードな清浄度とすることができ、クリーンルーム全体を高グレードな清浄度とする必要をなくして、大掛かりな空調設備を不要とし得、設備費並びに運転費を削減し得るという優れた効果を奏し得る。
【図面の簡単な説明】
【図１】本発明を実施する形態の一例におけるワーク搬送状態を表わす概要側面図である。
【図２】本発明を実施する形態の一例において、搬送台車をプロセス装置に接近させて搬送側受渡口をプロセス側受渡口に対向させ、搬送側気密扉を開き始めた状態を表わす概要側面図である。
【図３】図２のＩＩＩ部拡大図である。
【図４】本発明を実施する形態の一例において、搬送側気密扉とプロセス側気密扉を完全に開放し、ワークの移載を開始する直前の状態を表わす概要側面図である。
【図５】本発明を実施する形態の一例において、ワークの移載途中の状態を表わす概要側面図である。
【図６】本発明を実施する形態の一例において、ワークを受渡部へ移載した状態を表わす概要側面図である。
【図７】本発明を実施する形態の一例において、ワークの移載が完了した状態を表わす概要側面図である。
【図８】従来のクリーンルーム装置の一例を表わす概要平面図である。
【図９】従来のクリーンルーム装置の他の例を表わす概要側面図である。
【図１０】従来のクリーンルーム装置の更に他の例を表わす概要側面図である。
【符号の説明】
１プロセス側庇部材
２搬送側庇部材
１１クリーンルーム
１２プロセス装置
１４搬送台車
１５ワーク
１７受渡部
１８プロセス側受渡口
１９プロセス側気密扉
２１搬送室
２２搬送側受渡口
２３搬送側気密扉
２４移載装置[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a clean room apparatus.
[0002]
[Prior art]
Generally, in order to manufacture semiconductors, liquid crystals, pharmaceuticals, foodstuffs, etc., factories that process workpieces are provided with a clean room apparatus that maintains the interior at a desired cleanliness level.
[0003]
FIG. 8 shows an example of a conventional clean room apparatus. In the clean room 11, a plurality of process apparatuses 12 maintained at a high grade cleanliness are installed in a clean room 11 maintained at a low grade cleanliness. At the same time, the plurality of process devices 12 are connected by a tunnel-shaped conveyor 13 surrounded by a clean booth, and workpieces processed by the first process device 12 are transported to the next process device 12 by the conveyor 13. The workpiece is processed.
[0004]
However, in the clean room apparatus as shown in FIG. 8, since the transfer direction of the work is limited to one direction and the recombination of the process becomes difficult and flexibility is not available, in recent years, as shown in FIG. In addition, the work 15 is transported to the process apparatus 12 by a transport carriage 14 such as AGV (Automatic Guided Vehicle), and the work 15 is transferred between the transport carriage 14 and the process apparatus 12 accordingly. In order to prevent the contamination of the clean room 11, a clean room having a high-grade cleanliness has been developed.
[0005]
The process device 12 includes a delivery unit 17 that has a high-grade cleanliness inside and can accommodate the workpiece 15 in a form of placing the workpiece 15 on the receiving table 16, and is opened on a side surface of the delivery unit 17. A process side delivery port 18 through which the work 15 can be taken in and out, a process side airtight door 19 capable of opening and closing the process side delivery port 18, and a processing unit 20 for processing the work 15 carried into the delivery unit 17 are provided. is doing.
[0006]
The transfer carriage 14 includes a transfer chamber 21 in which the inside is maintained at a high-grade cleanliness and can accommodate the work 15, and a transfer-side delivery port that is opened on a side surface of the transfer chamber 21 and can be taken in and out of the work 15. 22, a transfer-side airtight door 23 that can open and close the transfer-side delivery port 22, and a transfer device 24 that can transfer the workpiece 15 between the transfer chamber 21 and the transfer unit 17 of the process device 12. In the clean room 11, the vehicle is movably disposed.
[0007]
[Problems to be solved by the invention]
However, as described above, in order to make the clean room 11 as a whole transport route of the work 15 have a high grade cleanliness, a large-scale air conditioning equipment is required, and the equipment cost and the operating cost are increased. .
[0008]
Conventionally, for example, as disclosed in Japanese Patent Application Laid-Open No. 9-133385, there is a high grade of the carriage 14 as shown in FIG. It is provided so as to be able to move forward and backward so as to project the entire transfer chamber 21 maintained at a clean level, and when transferring the workpiece 15 between the transfer carriage 14 and the process device 12, the transfer chamber 21 is moved forward so as to protrude. The side delivery port 22 is brought into close contact with the process side delivery port 18. In this state, the process side airtight door 19 and the transfer side airtight door 23 are opened, and the work 15 is delivered by the transfer device 24.
[0009]
However, in the case disclosed in Japanese Patent Laid-Open No. 9-133385, the transfer-side delivery port 22 can be formed only on one side of the transfer carriage 14, and the entire transfer chamber 21 maintained at a high grade cleanliness. As a result, a mechanism for allowing the vehicle to move forward and backward is required, and the structure of the transport carriage 14 becomes very complicated, leading to an increase in cost.
[0010]
In view of such a situation, the present invention can locally increase the cleanliness of a workpiece with a simple structure and a high-grade cleanliness, and eliminates the need for the entire cleanroom to have a high-grade cleanliness. An object of the present invention is to provide a clean room apparatus that can eliminate the need for air conditioning equipment and can reduce equipment costs and operation costs.
[0011]
[Means for Solving the Problems]
The present invention is a clean room in which the inside is kept at a low grade cleanliness,
A delivery part that is maintained at a high-grade cleanliness so that the internal pressure is higher than the internal pressure of the clean room and can accommodate the workpiece, and a process-side delivery port that is open on the side surface of the delivery part and that allows the workpiece to be taken in and out; A process side hermetic door capable of opening and closing the process side delivery port, and a process device installed in the clean room;
A transfer chamber that is maintained at a high-grade cleanliness so that the internal pressure becomes positive pressure from the internal pressure of the clean room and can accommodate a workpiece, a transfer-side delivery port that is open on a side surface of the transfer chamber and that can take in and out the workpiece, A transfer-side airtight door capable of opening and closing the transfer-side delivery port; and a transfer device capable of transferring a workpiece between the transfer chamber and a transfer unit of the process device, and disposed to be able to travel in the clean room. And a transport carriage
Attach process side flanges projecting outward at the upper and lower edges of the process side delivery port, and oppose the transfer side delivery port to the process side delivery port at the upper and lower edges of the transfer side delivery port When carrying out, attach a transport side scissors member that protrudes outward so as to overlap with a necessary gap in the vertical direction with respect to the process side scissors member,
The present invention relates to a clean room apparatus characterized in that air purge by clean flow is performed in a space between a transfer side delivery port facing a process side delivery port when a workpiece is transferred.
[0012]
According to the above means, the following operation can be obtained.
[0013]
If air purge by clean flow is performed in the space between the transfer side delivery port and the process side delivery port when the workpiece is transferred, the transfer side transfer port and the process side delivery port that are the workpiece transfer path The space between them is locally maintained at a high-grade cleanliness, and the entire cleanroom does not have to be a high-grade cleanliness, eliminating the need for large-scale air conditioning equipment and reducing equipment and operating costs. .
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0015]
1 to 7 show an example of an embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 9 denote the same components, and the basic configuration is the conventional configuration shown in FIG. Although it is the same as that of this thing, the place of the feature of this example of illustration is that, as shown in FIGS. 1 to 7, the process side eaves member 1 projecting outward is attached to the upper and lower edges of the process side delivery port 18, and When the workpiece 15 is transferred, when the workpiece-side delivery port 22 is opposed to the process-side delivery port 18 at the upper and lower edges of the delivery-side delivery port 22, a necessary gap is formed in the vertical direction with respect to the process-side flange member 1. The transfer side flange member 2 that protrudes outward so as to overlap with each other is attached, and when the work 15 is transferred, the air purge by the clean flow is performed in the space between the transfer side transfer port 22 and the process side transfer port 18 facing each other. It is in the point constituted as follows.
[0016]
Next, the operation of the illustrated example will be described.
[0017]
First, as shown in FIG. 1, a transport carriage 14 containing a work 15 is run in a transfer chamber 21, and as shown in FIG. 2, the transport carriage 14 is brought close to the process device 12 so that the transfer-side delivery port 22 is received on the process side. When facing the transfer port 18, the conveyance-side airtight door 23 starts to open.
[0018]
When the transfer-side airtight door 23 begins to open, the inside of the transfer chamber 21 is at a positive pressure from the internal pressure of the clean room 11, so the space between the transfer-side delivery port 22 and the process-side delivery port 18 is not illustrated in FIG. As shown in FIG. 3, an air purge is performed by a clean flow, and the space is locally maintained at a high grade cleanliness. Here, the airflow in the clean room 11 is mainly a flow from the upper side to the lower side. However, when the transfer side delivery port 22 is opposed to the process side transfer port 18, the transfer side saddle member 2 moves to the process side. The side hook member 1 is overlapped with a predetermined gap in the vertical direction, and the so-called labyrinth structure is formed by the transfer side hook member 2 and the process side hook member 1 so as to form a transfer side delivery port 22 and a process side delivery port 18. The space between the transfer side delivery port 22 and the process side delivery port 18 contains minute dust or the like contained in the airflow from the upper side to the lower side in the clean room 11. There is no fear of intruding, and the process side flange member 1 and the transfer side flange member 2 are only attached to the upper and lower edges of the process side transfer port 18 and the transfer side transfer port 22, respectively. Even if the left and right edges of the process-side delivery port 18 and the transport-side delivery port 22 are open, there is a problem in maintaining the high-grade cleanliness of the space between the transport-side delivery port 22 and the process-side delivery port 18 Never came. In this regard, in this experiment, an air flow visualization device (steam type) was actually used to simulate the formation of a dirty area in the space between the transfer side delivery port 22 and the process side delivery port 18. In addition, it has been confirmed that water vapor that is visually recognized as white is removed by air purge by a clean flow and becomes transparent.
[0019]
Subsequently, as shown in FIG. 4, when the conveyance side hermetic door 23 and the process side hermetic door 19 are completely opened, the transfer of the work 15 is started, and as shown in FIG. 5, the fork of the transfer device 24 is moved. The workpiece 15 is projected so as to slide, and is transferred to the delivery unit 17 of the process device 12, and the workpiece 15 is placed on the receiving table 16 of the delivery unit 17 as shown in FIG. After the 24 forks are pulled back so as to slide, the process side hermetic door 19 and the transfer side hermetic door 23 are closed as shown in FIG. 7, and the transfer of the work 15 is completed. While such an operation is performed, the space between the transfer-side delivery port 22 and the process-side delivery port 18 is kept filled with clean air.
[0020]
As described above, when air purge by clean flow is performed in the space between the transfer side delivery port 22 and the process side delivery port 18 when the work 15 is transferred, the transfer side receiving port that becomes the transfer path of the work 15 is performed. The space between the delivery port 22 and the process side delivery port 18 is locally maintained at a high-grade cleanliness, and the entire clean room 11 does not have to be a high-grade cleanliness, so that a large-scale air conditioning facility is not required. It is possible to reduce equipment costs and operation costs. Further, as shown in the figure, it can be easily applied to the transport carriage 14 having the transport side delivery ports 22 formed on both sides.
[0021]
In this way, the transport path of the work 15 can be made to have a high grade cleanliness locally with a simple structure, and it is not necessary to make the entire clean room 11 have a high grade cleanliness, thus eliminating the need for large-scale air conditioning equipment. Equipment costs as well as operating costs can be reduced.
[0022]
The clean room apparatus according to the present invention is not limited to the above-described illustrated example, and is a dedicated nozzle for purging air in the space between the transfer side delivery port 22 and the process side delivery port 18 by clean flow. As a matter of course, various modifications can be made without departing from the scope of the present invention.
[0023]
【The invention's effect】
As described above, according to the clean room apparatus of the present invention, it is possible to locally increase the high-grade cleanliness of the workpiece transport path with a simple structure, and the entire cleanroom needs to have a high-grade cleanliness. Without this, it is possible to eliminate the need for large-scale air conditioning equipment, and it is possible to achieve an excellent effect that equipment costs and operation costs can be reduced.
[Brief description of the drawings]
FIG. 1 is a schematic side view showing a workpiece conveyance state in an example of an embodiment of the present invention.
FIG. 2 is a schematic side view showing a state where, in an example of an embodiment of the present invention, a conveyance carriage is brought close to a process device, a conveyance side delivery port is opposed to a process side delivery port, and a conveyance side airtight door starts to be opened. It is.
FIG. 3 is an enlarged view of a portion III in FIG. 2;
FIG. 4 is a schematic side view showing a state immediately before the transfer of a workpiece is started after the transfer side airtight door and the process side airtight door are completely opened in an example of an embodiment of the present invention.
FIG. 5 is a schematic side view showing a state during transfer of a workpiece in an example of an embodiment of the present invention.
FIG. 6 is a schematic side view showing a state where a work is transferred to a delivery unit in an example of an embodiment of the present invention.
FIG. 7 is a schematic side view showing a state in which transfer of a workpiece is completed in an example of an embodiment of the present invention.
FIG. 8 is a schematic plan view illustrating an example of a conventional clean room apparatus.
FIG. 9 is a schematic side view showing another example of a conventional clean room apparatus.
FIG. 10 is a schematic side view showing still another example of a conventional clean room apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Process side saddle member 2 Conveyance side saddle member 11 Clean room 12 Process apparatus 14 Conveyor carriage 15 Work 17 Delivery part 18 Process side delivery port 19 Process side airtight door 21 Conveyance chamber 22 Conveyance side delivery port 23 Conveyance side airtight door 24 Transfer device

Claims

内部が低グレードな清浄度に保持されるクリーンルームと、
内部が前記クリーンルームの内圧より陽圧となるよう高グレードな清浄度に保持され且つワークを収容可能な受渡部と、該受渡部の側面に開口され且つワークを出し入れ可能なプロセス側受渡口と、該プロセス側受渡口を開閉可能なプロセス側気密扉とを有し、前記クリーンルーム内に設置されるプロセス装置と、
内部が前記クリーンルームの内圧より陽圧となるよう高グレードな清浄度に保持され且つワークを収容可能な搬送室と、該搬送室の側面に開口され且つワークを出し入れ可能な搬送側受渡口と、該搬送側受渡口を開閉可能な搬送側気密扉と、前記搬送室とプロセス装置の受渡部との間でワークを受け渡し可能な移載装置とを有し、前記クリーンルーム内に走行可能に配設される搬送台車とを備え、
前記プロセス側受渡口の上下縁部に外方へ張り出すプロセス側庇部材を取り付けると共に、前記搬送側受渡口の上下縁部に、ワークの移載時に搬送側受渡口をプロセス側受渡口へ対向させた際に前記プロセス側庇部材に対し上下方向へ所要の隙間をあけて重なり合うよう外方へ張り出す搬送側庇部材を取り付け、
ワークの移載時に搬送側受渡口をプロセス側受渡口に対向させた状態でその間の空間にクリーンフローによるエアパージが行われるよう構成したことを特徴とするクリーンルーム装置。A clean room where the interior is kept at a low grade cleanliness,
A delivery part that is maintained at a high-grade cleanliness so that the internal pressure is higher than the internal pressure of the clean room and can accommodate the workpiece, and a process-side delivery port that is open on the side surface of the delivery part and that allows the workpiece to be taken in and out; A process side hermetic door capable of opening and closing the process side delivery port, and a process device installed in the clean room;
A transfer chamber that is maintained at a high-grade cleanliness so that the internal pressure becomes positive pressure from the internal pressure of the clean room and can accommodate a workpiece, a transfer-side delivery port that is open on a side surface of the transfer chamber and that can take in and out the workpiece, A transfer-side airtight door capable of opening and closing the transfer-side delivery port; and a transfer device capable of transferring a workpiece between the transfer chamber and a transfer unit of the process device, and disposed to be able to travel in the clean room. And a transport carriage
Attach process side flanges projecting outward at the upper and lower edges of the process side delivery port, and oppose the transfer side delivery port to the process side delivery port at the upper and lower edges of the transfer side delivery port When carrying out, attach a transport side scissors member that protrudes outward so as to overlap with a necessary gap in the vertical direction with respect to the process side scissors member,
A clean room apparatus, wherein air purge by clean flow is performed in a space between a transfer side delivery port facing a process side delivery port when a workpiece is transferred.