JP3837573B2 - 窒素原子が結合したカーボンナノチューブの製造方法 - Google Patents
窒素原子が結合したカーボンナノチューブの製造方法 Download PDFInfo
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- JP3837573B2 JP3837573B2 JP2004081472A JP2004081472A JP3837573B2 JP 3837573 B2 JP3837573 B2 JP 3837573B2 JP 2004081472 A JP2004081472 A JP 2004081472A JP 2004081472 A JP2004081472 A JP 2004081472A JP 3837573 B2 JP3837573 B2 JP 3837573B2
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- nitrogen atom
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 26
- 239000002041 carbon nanotube Substances 0.000 title claims description 26
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 125000004433 nitrogen atom Chemical group N* 0.000 title description 31
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 11
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 4
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 7
- 238000001000 micrograph Methods 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002071 nanotube Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000027756 respiratory electron transport chain Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000619 electron energy-loss spectrum Methods 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- DSSYKIVIOFKYAU-XCBNKYQSSA-N (R)-camphor Chemical compound C1C[C@@]2(C)C(=O)C[C@@H]1C2(C)C DSSYKIVIOFKYAU-XCBNKYQSSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 241000723346 Cinnamomum camphora Species 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229960000846 camphor Drugs 0.000 description 1
- 229930008380 camphor Natural products 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- MGNCLNQXLYJVJD-UHFFFAOYSA-N cyanuric chloride Chemical compound ClC1=NC(Cl)=NC(Cl)=N1 MGNCLNQXLYJVJD-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 108010025899 gelatin film Proteins 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- -1 reaction temperature Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 1
Description
R.Sen,ほか,「ケミカル・フィジックス・レターズ(Chem.Phys.Lett.)」, 287巻,671頁,1998年 M.Terrones,ほか,「ネイチャー(Nature)」, 388巻,52頁,1997年 K.Suenaga,ほか,「ケミカル・フィジックス・レターズ(Chem.Phys.Lett.)」, 300巻,695頁,1999年 E.G.Wang,「アドバンスト・マテリアルズ(Adv.Mater.)」, 11巻,1129頁,1999年 W.Q.Han,ほか,「アプライド・フィジックス・レターズ(Appl.Phys.Lett.)」, 77巻,1807頁,2000年
ミド蒸気とアンモニアガスを導入し、500℃以上の温度で加熱することを特徴とする窒素原子が結合したカーボンナノチューブの製造方法を提供する。
)基板が加熱炉に設置され、この炉中にN,N-ジメチルホルムアミド蒸気とアンモニア
ガスを導入し、500℃以上の温度で加熱することを特徴としている。
を吹き込み、N,N-ジメチルホルムアミドを霧状化して炉内に導入する。
りも低いと、ナノチューブの成長が難しくなるため好ましくない。
モニウム(純度99.0%)水溶液(濃度0.1M)の混合溶液をゆっくり攪拌しながら約3ml滴下した。この溶液は数分でゲル化するので、ゲル化する前に直ちにn−型シリコン基板に2〜3滴を滴下してスピンコートした。滴下後、数分で透明なゲル被膜になったので、このゲル化した薄膜のついたシリコン基板を2日間室温でエージングし、さらに、窒素ガス雰囲気中で100℃に乾燥して、アルミナに酸化鉄と酸化モリブデンが保持された薄膜の付いたシリコン基板を得た。得られた薄膜付きシリコン基板を横型石英管状炉の中に設置した。一方、和光純薬工業(株)製のN,N−ジメチルホルムアミド(純度99.5%)18gを60℃に加熱し、この液体中にアルゴンガスを300ml/minの流量で吹き込んで霧状にして横型石英管状炉の中へ導入した。これと並行して乾燥アンモニアガスを200ml/minの流量で横型石英管状炉の中へ移送した。シリコン基板を800℃に加熱して、この温度で30分間維持した。シリコン基板の表面に厚さ約1μmの黒色の薄膜が堆積した。
始電圧の値は1.32±0.29V/μmであり、1.8V/μmにおける電流密度は80μA/cm2であり、従来から知られているカーボンナノチューブや低窒素原子含有の
カーボンナノチューブと比べて低い開始電圧と高い放射電流密度を示すことが確認できた。
Claims (3)
- 酸化鉄と酸化モリブテンが保持されたアルミナ基板を加熱炉に設置し、この炉中にN,N-ジメチルホルムアミド蒸気とアンモニアガスを導入し、500℃以上の温度で加熱す
ることを特徴とする窒素原子が結合したカーボンナノチューブの製造方法。 - アルミナ基板は、シリコンの表面にアルミナ薄膜が配設された基板とすることを特徴とする請求項1の製造方法。
- 600℃〜900℃の温度範囲において加熱することを特徴とする請求項1または2の製造方法。
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JP3837573B2 true JP3837573B2 (ja) | 2006-10-25 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4911758B2 (ja) * | 2006-06-16 | 2012-04-04 | 学校法人 名城大学 | カーボンナノチューブの製造方法 |
KR100794386B1 (ko) | 2006-10-31 | 2008-01-15 | 한국과학기술원 | 질소를 매개로 한 전이금속-탄소나노튜브 혼성재료의제조방법 |
KR101680412B1 (ko) | 2010-03-01 | 2016-11-28 | 니폰 제온 가부시키가이샤 | 카본 나노튜브 배향 집합체의 제조 방법 |
JP6876216B2 (ja) * | 2016-02-02 | 2021-05-26 | 合同会社Caab−Ct | 竹状窒素含有カーボンナノチューブ、竹状窒素含有カーボンナノチューブの製造装置および竹状窒素含有カーボンナノチューブの製造方法 |
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