JP3779950B2 - Hard coating tool - Google Patents
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- JP3779950B2 JP3779950B2 JP2002301363A JP2002301363A JP3779950B2 JP 3779950 B2 JP3779950 B2 JP 3779950B2 JP 2002301363 A JP2002301363 A JP 2002301363A JP 2002301363 A JP2002301363 A JP 2002301363A JP 3779950 B2 JP3779950 B2 JP 3779950B2
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Description
【0001】
【発明が属する技術分野】
本発明は、金属材料等の切削加工に使用される硬質皮膜被覆工具に関するものである。
【0002】
【従来の技術】
従来はTiN、Ti(CN)等を被覆した切削工具が汎用的かつ一般的であった。TiNは比較的耐酸化性に優れるため、切削時の発熱によって生じる工具のすくい面摩耗に対して、優れた耐摩耗性を示すだけでなく、基体との密着性も良好であることが特長である。また、Ti(CN)は、TiNに比べ高硬度かつ被加工物から排出される切り粉との接触抵抗が低いため工具表面の発熱が抑制される。このことから、被削材との機械的な擦り摩耗によって工具逃げ面に生じるフランク摩耗を抑制することができる。しかしながら、金属加工の高能率化を目的とした切削速度の高速化傾向に対し、上記硬質皮膜では、十分な耐酸化性、耐摩耗性を示さなくなった。この様な背景から、皮膜の耐酸化性、耐摩耗性をより向上させる研究がなされ、その結果、特許第3248897号公報には(TiSi)N皮膜をa層とし、(TiAl)N皮膜をb層として、a層とb層とを1層以上交互に被覆することによって得られた皮膜が耐酸化性、耐摩耗性を有するという技術が開示されている。一方、特開2001−293601号公報では、耐摩耗性皮膜中に、BN、TiB2、TiB等の超微粒化合物を含む皮膜についての開示があり、この超微粒化合物が非晶質構造を有し、皮膜の硬度を向上させる働きがあると記載されている。これにより耐摩耗性、高滑り性、高焼き付き性、被削材の加工精度向上が図れるとのことであるが、超微粒化合物の特性や存在状態についての詳細な記述はなされていない。
【0003】
(TiAl)N皮膜は、その皮膜中に含有するTiとAlの成分比率又はSiやCの皮膜中の含有量により異なるが、概略2300〜2800のビッカース硬さを有する。また、耐酸化性が前記TiN、Ti(CN)に比べ著しく優れるため、刃先が高温に達する切削条件下においては、切削工具の性能をめざましく向上させる。また、(TiAlSi)(CN)皮膜は、(TiAl)N皮膜よりも耐酸化性を向上させようとSiを含有させたものである。更に同じ効果を目論み、(TiAl)系に第3元素としてZrやHf、Bの含有が試みられている。近年では、こうした硬質皮膜被覆切削工具が使用される環境は益々過酷になり、例えば、切削速度の高速化傾向、また従来使用されていた湿式での切削加工が環境問題上重要視されるなかで、乾式での切削加工が注目されている。また、金型用鋼材の多種含有元素の影響による鋼材の難削化、高能率加工を重視した高送り加工の傾向にあり、硬質皮膜被覆切削工具の使用環境は益々過酷なものとなってきている。
【0004】
本発明者の研究によれば、大気中における(TiAl)N皮膜の酸化開始温度は、TiNの450℃に対し、Alの含有量に依存して750〜900℃に向上する。しかしながら、前述の乾式高速切削加工においては、使用する工具の刃先温度が900℃以上の高温に達する。このような過酷の条件下で行われている切削加工では、硬質皮膜の耐酸化性が重要であることは言うまでもないが、それよりも先に硬質皮膜被覆切削工具の刃先部と被加工物が化学反応を起こすことで発生する、溶着現象を防ぐことが不可欠である。近年の金型用鋼材には金型の性能を著しく向上させるために様々な元素の含有が行われるようになり、切削工具への溶着現象は益々発生しやすくり、硬質皮膜の酸化による摩耗よりも先に硬質皮膜中への被加工物元素の拡散が発生しやすい状況になってきている。このため、従来のTiとAlの窒化物などは、大気中における酸化抵抗は著しく優れるものの、高温状態での切削においては、前記化学反応の1種である溶着や被加工物の拡散を防ぐことが困難であり、十分な工具寿命が得られないのが現状である。
【0005】
【発明が解決しようとする課題】
本発明はこうした事情に鑑みなされたものであって、従来の耐酸化性の優れる(TiAl)N皮膜など、耐酸化性の優れる硬質皮膜の耐摩耗性並びに密着性を犠牲にすること無く、更に高温状態での耐溶着性並びに硬質皮膜中への被加工物元素の拡散を改善し、切削加工の乾式化、高速化、高送り化に対応する硬質皮膜被覆工具を提供することが目的である。
【0006】
【課題を解決するための手段】
本発明者は、硬質皮膜の耐溶着性、耐摩耗性、母材との密着性に及ぼす、様々な元素との影響および皮膜の最適な層構造について鋭意研究を重ねた結果、金属成分がTiとBで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれかであるa層と、金属成分がAlとTiで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれかであるb層とが、それぞれ1層以上交互に被覆され、該a層のX線回折における結晶配向面について(111)面の強度をI(111)、(200)面の強度をI(200)としたときに、ピーク強度比I(200)/I(111)≧1.0であり、かつ該a層のラマン分光分析においてc−BN並びにh−BNのピークが検出され、該c−BNのピーク強度をQ1、h−BNのピーク強度をQ2としたとき、ピーク強度比Q1/Q2<1.0であることを特徴する硬質皮膜被覆工具とすることで、乾式の高速切削加工、高送り加工において、切削工具の性能が極めて良好となることをつきとめ本発明に到達した。ここでの高送り加工とは、切削条件中の1刃当たりの送り量が0.3mm/刃を越えるような切削と定義する。また、本発明は、該a層がTiとBの合金ターゲットを用いて被覆され、皮膜の組成が、該a層に含まれるBの含有量Mを金属成分のみの原子%で示すと、0.1≦M≦40であり、該a層の膜厚Dが、D≧0.1μmであることが好ましい。
【0007】
【発明の実施の形態】
a層の構成について詳細を述べる。一般に(TiAl)N皮膜は、大気中で酸化テストを行うと、皮膜表面近傍のAlが最表面に向かって外向拡散し、Al2O3層を形成する。この現象により、その後の皮膜内への酸素の進入が抑制される。本発明者の研究によれば、このことが耐酸化性向上の理由と考えられるが、この時、最表層に形成されるAl2O3層直下には、Alを含有しない非常にポーラスなTi酸化物が形成する。静的な酸化テストにおいては、酸化の進行である酸素の内向拡散に対し、最表面に形成されたAl2O3層が、酸化保護膜として機能するものの、動的な切削においては、最表面のAl2O3層は、その直下のポーラスなTi酸化物層より容易に剥離してしまい、酸化の進行に対し十分な効果を発揮しない。また、この最表面に形成されたAl2O3層が動的な切削に対し、剥離しなければ、Al2O3の化学的安定性から被加工物との溶着現象を防ぐことができるのだが、現状この化学的に安定なAl2O3の剥離を防ぐことは困難である。つまり、高温下で発生する溶着現象は最表層に形成されるAl2O3が剥離してしまうために発生することが明らかとなった。また、(TiAlSi)(CN)膜や(TiAlZrB)N、(TiAlB)N、(TiAlSiB)Nについても、従来の(TiAl)N膜にSi、Zr、Bなどを含有させることで硬質皮膜そのものの高硬度化や耐酸化性を若干良好にさせるが、前述同様、酸化物に対する生成自由エネルギーの差から表面の酸化保護膜のAl2O3層が直ちに形成され、更にその直下にポーラスなTiの酸化物を形成してしまい、その結果切削中の皮膜剥離をもたらす。よって、動的な切削における溶着現象を防ぐには至らないのである。
【0008】
しかしながら、溶着現象の原因となるAlを除く、TiとBで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物等は、皮膜自体の耐酸化性は、従来のTiとAlの窒化物と同程度であり、高温下における溶着現象に対しては、TiとAlの窒化物などよりも優れている。本発明者は、各種元素の溶着発生現象への抵抗性、つまり鋼に含まれる元素と、硬質皮膜中に含まれる元素との濡れ性という観点から鋭意研究を重ねた結果、本発明硬質皮膜は高温下における被加工物の溶着を防ぐのに効果があることをつきとめた。本発明者は、硬質皮膜中に含有させるBについて、切削工具に適用した際に生じる現象を詳細に調査した結果、Bの有効性は、硬質皮膜の高硬度化や耐酸化性向上ではなく、切削時におけるFeとの親和性が低いことや被加工物の膜中への拡散現象がほとんど発生しないことである。図1に本発明のa層を用いた硬質皮膜被覆切削工具の切削加工後の切刃近傍を、基体方向に元素分析を行った結果を示す。また、図2に従来の(TiAl)Nを同様に分析した結果を示す。図1、2の比較により、図1には皮膜内部に被加工物であるFe元素は見られないが、図2の従来膜である(TiAl)Nでは膜の最表層にAlの酸化物が形成されており、被加工物であるFeが膜中に拡散していることがわかる。図2に示した傾向は従来の(TiAlSi)(CN)や(TiAlZrB)N、(TiAlB)Nなどにも見られることを確認した。つまり、本発明のa層を使用することで、被加工物との高温下における化学反応が発生しにくい特性を持っているのである。また、同時に、耐酸化性も従来のTiとAlの窒化物とほぼ同程度であることを見出したのである。本発明者等は更に、鋭意研究を重ね、(TiAlB)Nといった耐酸化性の優れる従来の(TiAl)NにBを含有させる実験を試み、その硬質皮膜の耐溶着性に着目し、評価を行った結果、前述Alを含有させている従来の皮膜は、そのなかに含まれるAlはTiやBよりも高温下におけるFeとの親和性が高いため、最表層に酸素の内部拡散を防ぐAl2O3層を形成させる前に、被加工物中の含有物と化学反応が発生していることを得た。切削工具にこのようなAlを含有させている硬質皮膜を適用した場合、この溶着現象により、工具すくい面に異常なクレーター摩耗の進行促進、更に境界部には溶着物が多量に貯め込まれ、チッピングをもたらすのである。このような実験結果からも硬質皮膜被覆工具の最表面には耐酸化性を十分にもった皮膜を被覆するよりも、従来使用してきたTiとAlの窒化物などの特異的な酸化機構を発生させるまでに硬質皮膜被覆工具表面に溶着を防ぐための、いわば自己潤滑皮膜が必要になるのである。つまり、本発明の硬質皮膜を切削工具最表層に被覆させることで、被加工物との溶着を防ぎ、その結果異常摩耗を防ぐことで、従来使用してきたTiとAlの窒化物などを被覆した硬質皮膜被覆工具の寿命よりも著しく伸びることを確認した。
【0009】
a層は、静的及び動的条件下において優れた耐溶着性を有すものの、皮膜自身がもつ残留圧縮応力が大きいため基体との密着性においては十分でない。そのため、基体表面直上には、密着性、耐摩耗性、耐酸化性等をバランス良く適度に付与するため、AlとTiで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物等のb層を被覆することが好ましい。また、基体表面直上には、上記記載の硬質皮膜の他に元素周期表に記載される4a、5a、6a族の金属を1種以上含んだ合金膜をもちいてもよい。(TiAl)系窒化物等の皮膜であるb層におけるAlの役割は、皮膜の耐摩耗性及び耐酸化性を向上させることである。そのため、密着性、耐摩耗性、耐酸化性をバランス良く得るためには、好ましくはb層のAl含有量Fを、皮膜の金属成分のみの原子%で、30≦F≦75に調整することが好ましい。b層における好ましいAlの含有量Fを設定した理由については、Fが30原子%以上のときに耐酸化性が著しく向上し始めるためである。また、75原子%以下に調整する理由は、耐酸化性が向上しても、皮膜硬度が著しく低下し耐摩耗性が劣化してしまうためである。
【0010】
以上のように本発明においては、基体との密着性、皮膜自体の耐摩耗性および耐酸化性をバランス良く有するb層を基体表面直上に被覆し、その上に著しく耐溶着性や被加工物元素拡散性に優れるa層を被覆することが極めて重要であり、その結果、乾式の高速切削並びに高送り切削に対応する切削工具を得ることが可能となる。また、a層の結晶配向強度比を限定した理由について述べる。本発明の硬質皮膜を硬質皮膜被覆切削工具として成り立たせるためには、硬質皮膜物性中の結晶配向は重要である。高い密着性を保つためには、第1として物理蒸着法特有に発生する残留圧縮応力を低減させなければならない。更に、硬質皮膜同士の密着性を確保するために第2として本発明に使用される異種硬質皮膜をヘテロエピタキシャルの関係に保たなければならない。この両者の条件を満足させるために、本発明者は、a層のX線回折における結晶配向面の強度比がI(200)/I(111)≧1.0を満たすことで成し得たのである。また、基体表面直上にb層を被覆した後、a層並びにb層をそれぞれ交互に積層した多層皮膜によっても同様の効果が得られた。a層はラマン分光分析において、c−BNとh−BNのピークを検出することができ、そのときのc−BNのピーク強度をQ1、h−BNのピーク強度をQ2としたときに、ピーク強度比がQ1/Q2<1.0の関係でなければならない。これは、硬質膜の潤滑性を向上されるためである。一般的に立方晶のc−BNよりも六方晶のh−BNの方が結晶のすべり面の観点から潤滑性がある。a層内部には、図3に示すようにc−BNとh−BNのピークが検出される。しかし、図3のようにc−BNのピークの方が大きくなると、硬質膜の硬度は高くなるが、内部応力が大きくなり容易に剥離が発生してしまう。つまり、耐摩耗性は向上できるものの硬質皮膜の優れた特性を導き出すことができない。従って、硬質膜中にh−BNが多く含まれるようにコーティング条件を制御することによって硬質皮膜被覆工具表面は、潤滑性の著しく優れたものに改質され、耐溶着性を向上させることができるのである。また、各層は必要に応じて窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれかに調整でき、それらを被覆した工具についても同様の切削性能が得られる。
【0011】
金属成分がTiとBで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物ある硬質皮膜のBの含有量Mについて限定した理由を述べる。Tiに対してBの含有量が0.1原子%未満の場合、本発明の目的とする溶着や元素拡散を防ぐ効果が得られない。従って、目標とする近年の過酷な切削加工に対応できないため、著しく効果の出はじめる0.1原子%以上としたのである。また、TiとBで構成される本発明の硬質皮膜は、TiNなどで良く見られるような柱状晶を呈するが、Bの含有量が40原子%を越えると柱状晶から微細粒状結晶構造に変化することが認められた。このようにBの含有量が多い硬質皮膜は、内部の欠陥が多く、密度も低くなることが認められた。また、皮膜密着性を阻害する内部応力が非常に大きくなり容易に剥離現象が発生することを確認した。更には、硬質皮膜の結晶が微細であるために切削加工中に発生する粒界破壊の頻度が高く、それに起因する異常摩耗が認められた。本発明者等は、以上の様な知見を得るに至り、本発明の硬質皮膜中のB含有量Mを、原子%で、0.1≦M≦40に限定したのである。本発明の硬質皮膜を作成するにあたっては、物理蒸着法が好ましい。従って成膜のもととなるターゲットが必要になる。そのターゲットはTiとBからなる2種を用いても良いが、組成のばらつきや、放電の安定性を考慮するとTiとBの合金ターゲットがより好ましい。
【0012】
硬質皮膜中に含有させるB含有量によって、TiとBで構成される硬質皮膜中の金属元素の存在形態に特徴があることを確認した。従来の硬質皮膜であるTiとAlの窒化物などは、その組成によって異なるが、実用化されている皮膜を取り上げると、一般にTiNと同じ結晶格子形態であるNaCl型B1構造をとることがわかっており、TiN格子中のTiがAlに置き換わっている形態をとり、いわば、Alが固溶された状態にある。しかしながら、本発明のTiとBで構成される硬質皮膜は、Bの含有量に左右されるものの、その含有量が0.1原子%以上になると、前記TiとAlの窒化物などとは異なった形態を示す。Bの含有量が0.1原子%以上になるとBはTiN格子中のTiに置き換わる形態の他に、Bの化合物が単独で存在するような形態になる。つまり、Bの含有量が0.1原子%以上になると、例えば、本発明の硬質皮膜であるTiとBの窒化物の場合、硬質皮膜中にはTiNの結晶とBNの結晶が混在する形態をとるのである。Bの含有量が0.1原子%未満ではBがTiN結晶格子の中に完全に取り込まれ、固溶体の形態を呈する。この結晶形態の変化が切削性能に多大な影響を及ぼす。本発明の組成範囲にある窒化物の場合、TiN類似の結晶のほかにBNの結晶が存在する。このBNは自己潤滑が優れるという事やFeとの濡れ性が低いという事が知られており、このBN結晶の存在が、主として化学反応が起因のクレーター摩耗を著しく抑制させる効果があるものと考えられる。また、BNは酸化に対する自由生成エネルギーの面からも酸化に対する抵抗力があるため、高温下における硬質皮膜の特性が劣化しない。これらの驚くべき事実は、本発明者が鋭意研究を重ねることで得られた結果である。しかしながら、Bの含有量が40原子%を越えると、上記BNの結晶は存在するが、内部応力が非常に大きくなるために、良好な密着性を維持することが困難となる。つまり、切削加工の様に硬質皮膜に外部からの衝撃を与えると硬質皮膜が自身の内部応力に耐えられず、容易に剥離が発生してしまい、硬質皮膜被覆工具としての役割を果たさなくなることが認められた。従って、本発明者等の目標である切削工具を提供するためには、硬質皮膜中に含有されるBの量は40原子%を越えてはいけないことになり、かつ、硬質皮膜中にBNの結晶を存在させるような、新しい技術を創生しなければならないのである。
【0013】
膜厚Dを規定した理由について述べる。本硬質皮膜の特性が近年の過酷な切削加工に対応するためには、D≧0.1μmを被覆しなければならない。つまり、それよりも薄い場合は、硬質皮膜の特性が発揮されないのである。また、本発明に記載の硬質皮膜を工具すくい面に厚く被覆し、すくい面摩耗が著しく発生するような切削加工に適用した場合、従来の硬質皮膜である(TiAl)Nや(TiAlSi)(CN)、(TiAlZrB)N、(TiAlB)Nでは、すでに説明したようにクレーター摩耗が容易に発生し、高能率加工を満足させるにいたらない。本発明者は、適用する金属成分がTiとBで構成される硬質皮膜の効果を十分に発揮させるための最適膜厚を詳細に調査した結果、その膜厚DがD≧0.1μmであることを明らかにした。この調査に基づき、被覆される工具すくい面の膜厚DがD≧0.1μmであることがより好ましい。
【0014】
本発明の硬質皮膜被覆工具は、その被覆方法については、特に限定されるものではないが、被覆基体への熱影響、工具の疲労強度、皮膜の密着性等を考慮した場合、比較的低温で被覆でき、被覆した皮膜に圧縮応力が残留するアーク放電方式イオンプレーティング、もしくはスパッタリング等の被覆基体側にバイアス電圧を印加する物理蒸着法であることが望ましい。以下、本発明を実施例に基づいて説明する。
【0015】
【実施例】
小型アークイオンプレーティング装置を用い、金属成分の蒸発源である各種合金製ターゲット、並びに反応ガスであるN2ガス、CH4ガス、ArとO2混合ガスから目的の皮膜が得られるものを選択し、被覆基体温度400℃にて、被覆基体である超硬合金製インサートに−350Vの電位を印加させて被覆を行った。
【0016】
得られた硬質皮膜被覆インサートを用い、次に示す乾式の高能率切削条件にて、刃先の欠けないしは摩耗等により工具が切削不能となるまで加工を行い、その時の切削長を工具寿命とした。表1に本発明例、比較例及び従来例に関する硬質皮膜の詳細及びその切削結果を示す。
【0017】
【表1】
【0018】
インサート切削条件は、切削工具は正面フライス(インサート形状:SDE53TN特殊形)を使用し、切削方法はセンターカット方式、被削材形状は巾100mm、長さ250mm、被削材はS50C(HRC30)、切り込みは2.0mm、切削速度は150m/min、1刃送り量は1.80mm/刃、切削油は無しである。
【0019】
表1に示したように、本発明の硬質皮膜は、その結晶配向強度比とラマン分光分析におけるh−BNとc−BNのピーク強度比が切削性能に大きく影響を及ぼすことは明らかである。つまり、本発明例1〜20に示す様に、XRD強度比I(200)/I(111)≧1.0を満たし、更に、ラマン分光分析によるc−BN、h−BNが検出され、そのときのc−BNのピーク強度Q1並びにh−BNのピーク強度Q2の比、Q1/Q2<1.0の時は、材料の特性を如何なく発揮し、大幅な切削寿命の向上をもたらし、十分満足できる結果が得られている。しかし、例えば、比較例22、25はXRD回折におけるピーク強度比が満足されていないのに加え、ラマン分光分析においてc−BNのピーク強度が強いため、従来例28〜34と比較しても効果が認められなかった。更に、比較例23、26、27は、XRD回折におけるピーク強度比が満足されない状態で、しかもラマン分光分析におけるc−BNのピーク強度が強くなると硬質皮膜の内部応力が著しく増大し、早期剥離発生後、欠損に至ってしまった。表1に示したように、本発明の硬質皮膜は、BNの結晶の存在と、その化学構造の制御によって、耐溶着性はもとより、耐熱性も優れるため、著しい工具性能向上をもたらすことは明らかである。しかし例えば、比較例21、24は硬質皮膜中に添加されるB量が微量のため、TiN結晶格子の中に取り込まれ、固溶体の形態をとっており、その結果、膜としてはTiとBで構成される硬質皮膜であるが、本発明の目的である工具性能の改善には遠く至らないのである。また、比較例22、23、25、26、27では、TiとBで構成される硬質皮膜中にBNの結晶が存在することが認められても、添加されるB添加量がTiに対して50原子%を越えてしまっている。このような場合、切削加工においては、硬質皮膜が自身の内部応力に負けて、容易に剥離が発生する。特に、比較例26は、硬質皮膜全体の内部応力が最も高くなり、約−6GPaにも到達してしまうことが認められた。本試料にて切削試験を行ったところ、インサートの切削初期に工具逃げ面、すくい面に大きな剥離が発生し、切削続行が不可能となった。従って、本発明の硬質皮膜は、膜中のBN結晶を存在させることも非常に重要な技術であるが、単に存在させるのではなく、添加するBの量も含め、硬質皮膜被覆工具の設計を行わない限り、著しく優れた性能を発揮する工具の提供は不可能であることは明らかである。一方、従来例28の(TiSi)N皮膜と(TiAl)N皮膜との2層膜とした試料、また従来例29から34の(TiAl)系の窒化物層に第3元素としてZr、B、Siを添加した試料に対し、本発明例は、いずれの場合も工具寿命で優っていることが確認された。本発明皮膜の成膜実施にあたっては、使用する導入ガスの検討も同時に行った。その結果、著しく優れた耐溶着性を保つためには、金属成分がTiとBで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物いずれかで、Bの含有量Mが金属成分のみの原子%で、0.1≦M≦40.0であることが望ましいが、工具の発熱並びに被加工物との摩擦を考慮した場合、成膜時に上記記載の皮膜を製膜する上で必要となる窒素、酸素を含むガスの他に、炭素を含むガスを導入し、炭窒化物、酸炭窒化物を被覆することにより更に優れた工具性能を発揮する。本発明硬質皮膜の適用は、実施例で示したインサートだけでなく、旋削用途など他の高能率切削加工にも十分対応できうるものである。
【0020】
【発明の効果】
以上の如く、本発明の硬質皮膜被覆工具は、TiとBで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれかである層にラマン分光分析においてc−BNとh−BNのピークが検出される皮膜が被覆され、この皮膜が優れた耐溶着、耐拡散性、耐酸化性、耐摩耗性を達成することにより、乾式高能率切削加工において著しく長い工具寿命が得られ、切削加工における生産性の向上に極めて有効である。
【図面の簡単な説明】
【図1】図1は、本発明例の皮膜を被覆した工具の切削後の刃先近傍における元素分析結果を示す。
【図2】図2は、従来例の皮膜を被覆した工具の切削後の刃先近傍における元素分析結果を示す。
【図3】図3は、比較例の皮膜のラマン分光解析結果で、c―BNとh―BNとの回折ピークを示す。[0001]
[Technical field to which the invention belongs]
The present invention relates to a hard film-coated tool used for cutting a metal material or the like.
[0002]
[Prior art]
Conventionally, a cutting tool coated with TiN, Ti (CN) or the like has been widely used. TiN is relatively excellent in oxidation resistance, so it not only exhibits excellent wear resistance against tool rake face wear caused by heat generated during cutting, but also has good adhesion to the substrate. is there. Further, Ti (CN) has higher hardness and lower contact resistance with the chips discharged from the workpiece than TiN, so that heat generation on the tool surface is suppressed. From this, it is possible to suppress flank wear that occurs on the tool flank due to mechanical rubbing wear with the work material. However, the hard coating does not exhibit sufficient oxidation resistance and wear resistance against the tendency to increase the cutting speed for the purpose of improving the efficiency of metal working. From such a background, studies have been made to further improve the oxidation resistance and wear resistance of the coating. As a result, Japanese Patent No. 3248897 discloses a (TiSi) N coating as a layer and a (TiAl) N coating as b. As a layer, a technique is disclosed in which a film obtained by alternately covering one or more a layers and b layers has oxidation resistance and wear resistance. On the other hand, JP-A-2001-293601 discloses a film containing an ultrafine compound such as BN, TiB2, or TiB in an abrasion-resistant film, and the ultrafine compound has an amorphous structure, It is described that it has the function of improving the hardness of the film. This is intended to improve wear resistance, high slipperiness, high seizure property, and machining accuracy of the work material, but there is no detailed description of the characteristics and existence state of the ultrafine compound.
[0003]
The (TiAl) N coating has a Vickers hardness of approximately 2300 to 2800, although it varies depending on the component ratio of Ti and Al contained in the coating or the content of Si or C in the coating. Further, since the oxidation resistance is remarkably superior to those of TiN and Ti (CN), the performance of the cutting tool is remarkably improved under the cutting conditions where the cutting edge reaches a high temperature. The (TiAlSi) (CN) film contains Si so as to improve the oxidation resistance as compared with the (TiAl) N film. Furthermore, aiming at the same effect, attempts have been made to contain Zr, Hf, and B as the third element in the (TiAl) system. In recent years, the environment in which these hard coating coated cutting tools are used has become increasingly severe. For example, the trend toward higher cutting speeds and the fact that conventional wet cutting has become an important environmental issue. Attention has been focused on dry cutting. In addition, there is a tendency for high-feed machining with emphasis on high-efficiency machining, making the steel difficult to machine due to the effects of various elements in the steel for molds, and the usage environment of hard coating coated cutting tools has become increasingly severe. Yes.
[0004]
According to the study of the present inventor, the oxidation start temperature of the (TiAl) N film in the atmosphere is improved to 750 to 900 ° C. depending on the Al content with respect to 450 ° C. of TiN. However, in the dry high-speed cutting described above, the cutting edge temperature of the tool used reaches a high temperature of 900 ° C. or higher. It goes without saying that the oxidation resistance of the hard coating is important in the cutting performed under such severe conditions, but the cutting edge portion of the hard coating coated cutting tool and the work piece are before that. It is essential to prevent the welding phenomenon that occurs when a chemical reaction occurs. In recent years, steel materials for metal molds contain various elements in order to significantly improve the performance of the metal mold, and the phenomenon of welding to cutting tools is more likely to occur, rather than wear due to oxidation of hard coatings. However, it is becoming easier for the workpiece elements to easily diffuse into the hard coating. For this reason, although conventional Ti and Al nitrides, etc., have extremely good oxidation resistance in the atmosphere, they prevent welding and diffusion of the workpiece, which are one of the chemical reactions, in cutting at high temperatures. However, it is difficult to obtain a sufficient tool life.
[0005]
[Problems to be solved by the invention]
The present invention has been made in view of such circumstances, and without sacrificing the wear resistance and adhesion of a hard coating having excellent oxidation resistance, such as a conventional (TiAl) N coating having excellent oxidation resistance, The objective is to provide a hard coating tool that improves welding resistance at high temperatures and diffusion of workpiece elements into the hard coating, and is suitable for dry machining, high speed, and high feed cutting. .
[0006]
[Means for Solving the Problems]
As a result of intensive studies on the influence of various elements on the adhesion resistance, wear resistance, and adhesion to a base material and the optimum layer structure of the film, the present inventor has found that the metal component is Ti. A layer which is any of nitride, carbonitride, oxynitride and oxycarbonitride composed of B and B, and nitride, carbonitride and oxynitride whose metal components are composed of Al and Ti And b layers which are any of oxycarbonitrides are alternately coated with one or more layers, respectively, and the intensity of the (111) plane of the crystal orientation plane in the X-ray diffraction of the a layer is I (111), (200 ) When the intensity of the surface is I (200), the peak intensity ratio I (200) / I (111) ≧ 1.0, and c-BN and h-BN in the Raman spectroscopic analysis of the a layer A peak is detected, the peak intensity of the c-BN is Q1, and the peak intensity of the h-BN is Q2. By using a hard film coated tool characterized by a peak intensity ratio Q1 / Q2 <1.0, the performance of the cutting tool is extremely good in dry high-speed cutting and high-feed machining. We have reached the present invention. The high feed processing here is defined as cutting in which the feed amount per blade in the cutting condition exceeds 0.3 mm / tooth. Further, according to the present invention, when the a layer is coated using an alloy target of Ti and B, and the composition of the film indicates the content M of B contained in the a layer in atomic percent of only the metal component, 0 0.1 ≦ M ≦ 40, and the film thickness D of the a layer is preferably D ≧ 0.1 μm.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
The configuration of the a layer will be described in detail. In general, when a (TiAl) N film is subjected to an oxidation test in the air, Al in the vicinity of the film surface diffuses outward toward the outermost surface to form an Al 2 O 3 layer. This phenomenon suppresses the subsequent entry of oxygen into the film. According to the inventor's research, this is considered to be the reason for improving the oxidation resistance. At this time, a very porous Ti containing no Al is provided immediately below the Al 2 O 3 layer formed in the outermost layer. An oxide is formed. In the static oxidation test, the Al 2 O 3 layer formed on the outermost surface functions as an oxidation protective film against the inward diffusion of oxygen, which is the progress of oxidation. The Al 2 O 3 layer is easily peeled off from the porous Ti oxide layer immediately below the Al 2 O 3 layer, and does not exhibit a sufficient effect on the progress of oxidation. In addition, if the Al 2 O 3 layer formed on the outermost surface does not peel off against dynamic cutting, it is possible to prevent the welding phenomenon with the workpiece from the chemical stability of Al 2 O 3 . However, it is difficult to prevent this chemically stable peeling of Al 2 O 3 at present. That is, it has been clarified that the welding phenomenon occurring at a high temperature occurs because Al 2 O 3 formed on the outermost layer peels off. In addition, (TiAlSi) (CN) film, (TiAlZrB) N, (TiAlB) N, and (TiAlSiB) N can also be obtained by adding Si, Zr, B, etc. to the conventional (TiAl) N film. Although the hardness and oxidation resistance are slightly improved, the Al 2 O 3 layer of the surface oxidation protective film is immediately formed from the difference in the free energy of formation with respect to the oxide, as described above. Oxides are formed, resulting in film peeling during cutting. Therefore, the welding phenomenon in dynamic cutting cannot be prevented.
[0008]
However, nitrides composed of Ti and B, carbonitrides, oxynitrides, oxycarbonitrides, etc., excluding Al, which causes the welding phenomenon, have the same oxidation resistance as that of the conventional Ti and Al. It is similar to the nitride of Nd, and is superior to the nitride of Ti and Al for the welding phenomenon at high temperature. The inventor has conducted extensive research from the viewpoint of resistance to the phenomenon of welding of various elements, that is, wettability between elements contained in steel and elements contained in the hard film. It has been found that it is effective in preventing the welding of workpieces at high temperatures. As a result of investigating in detail the phenomenon that occurs when applied to a cutting tool for B to be contained in the hard film, the effectiveness of B is not an increase in the hardness or oxidation resistance of the hard film, That is, the affinity with Fe during cutting is low and the diffusion phenomenon of the workpiece into the film hardly occurs. FIG. 1 shows the result of elemental analysis in the substrate direction of the vicinity of the cutting edge of the hard film coated cutting tool using the a layer of the present invention after cutting. Further, FIG. 2 shows the result of the same analysis of conventional (TiAl) N. From the comparison of FIGS. 1 and 2, there is no Fe element as a work piece in FIG. 1, but in the conventional film of FIG. 2 (TiAl) N, an oxide of Al is present on the outermost layer of the film. It can be seen that Fe, which is a workpiece, is diffused in the film. It was confirmed that the tendency shown in FIG. 2 was also observed in conventional (TiAlSi) (CN), (TiAlZrB) N, (TiAlB) N, and the like. In other words, by using the a layer of the present invention, it has a characteristic that a chemical reaction with a workpiece is difficult to occur at a high temperature. At the same time, the inventors have found that the oxidation resistance is almost the same as that of conventional nitrides of Ti and Al. The present inventors have further conducted intensive research and tried an experiment in which B is contained in conventional (TiAl) N having excellent oxidation resistance such as (TiAlB) N, focusing on the welding resistance of the hard coating, and evaluating it. As a result, the conventional film containing Al described above has a higher affinity with Fe at a higher temperature than Ti and B, so that Al contained therein contains Al to prevent internal diffusion of oxygen in the outermost layer. Before forming the 2 O 3 layer, it was found that chemical reaction with the contents in the workpiece occurred. When such a hard film containing Al is applied to the cutting tool, this welding phenomenon promotes the progress of abnormal crater wear on the rake face of the tool, and a large amount of deposit is stored in the boundary part. It brings about chipping. From these experimental results, rather than coating the outermost surface of the hard coating tool with a coating with sufficient oxidation resistance, a specific oxidation mechanism such as nitrides of Ti and Al that have been used in the past has been generated. In other words, a self-lubricating film is required to prevent welding on the surface of the hard film-coated tool. In other words, the outermost layer of the cutting tool is coated with the hard coating of the present invention, so that welding with the workpiece is prevented, and as a result, abnormal wear is prevented, so that conventionally used Ti and Al nitrides are coated. It was confirmed that the life of the hard-coated tool was significantly increased.
[0009]
The layer a has excellent welding resistance under static and dynamic conditions, but the residual compressive stress of the coating itself is large, so that the adhesion with the substrate is not sufficient. Therefore, nitrides, carbonitrides, oxynitrides, oxycarbonitrides composed of Al and Ti are provided just above the substrate surface in order to appropriately provide adhesion, wear resistance, oxidation resistance, etc. in a balanced manner. It is preferable to coat the b layer such as. In addition to the hard film described above, an alloy film containing one or more metals of groups 4a, 5a, and 6a described in the periodic table of elements may be used immediately above the substrate surface. The role of Al in the b layer, which is a (TiAl) -based nitride film, is to improve the wear resistance and oxidation resistance of the film. Therefore, in order to obtain a good balance of adhesion, wear resistance, and oxidation resistance, preferably the Al content F of the b layer is adjusted to 30 ≦ F ≦ 75 with only the atomic% of the metal component of the film. Is preferred. The reason why the preferable Al content F is set in the b layer is that the oxidation resistance starts to be remarkably improved when F is 30 atomic% or more. Moreover, the reason for adjusting to 75 atomic% or less is that even if the oxidation resistance is improved, the film hardness is remarkably lowered and the wear resistance is deteriorated.
[0010]
As described above, in the present invention, the b layer having a good balance between adhesion to the substrate, wear resistance and oxidation resistance of the coating itself is coated directly on the surface of the substrate, and remarkably welding resistance and workpiece are further formed thereon. It is extremely important to coat the a layer having excellent element diffusibility, and as a result, it is possible to obtain a cutting tool that supports dry high-speed cutting and high-feed cutting. The reason for limiting the crystal orientation strength ratio of the a layer will be described. The crystal orientation in the physical properties of the hard coating is important in order for the hard coating of the present invention to be realized as a hard coating-coated cutting tool. In order to maintain high adhesion, first, it is necessary to reduce the residual compressive stress generated peculiar to physical vapor deposition. Furthermore, in order to ensure adhesion between the hard coatings, secondly, the different hard coatings used in the present invention must be maintained in a heteroepitaxial relationship. In order to satisfy both of these conditions, the present inventor has been able to achieve that the intensity ratio of the crystal orientation plane in the X-ray diffraction of the a layer satisfies I (200) / I (111) ≧ 1.0. It is. The same effect was obtained by a multilayer coating in which the a layer and the b layer were alternately laminated after the b layer was coated directly on the substrate surface. The layer a can detect c-BN and h-BN peaks in Raman spectroscopic analysis. When the peak intensity of c-BN is Q1 and the peak intensity of h-BN is Q2, The intensity ratio should be Q1 / Q2 <1.0. This is because the lubricity of the hard film is improved. In general, hexagonal h-BN is more lubricious than cubic c-BN in terms of crystal slip plane. In the a layer, c-BN and h-BN peaks are detected as shown in FIG. However, when the c-BN peak becomes larger as shown in FIG. 3, the hardness of the hard film increases, but the internal stress increases and peeling easily occurs. That is, although the wear resistance can be improved, the excellent characteristics of the hard coating cannot be derived. Accordingly, by controlling the coating conditions so that a large amount of h-BN is contained in the hard film, the surface of the hard film-coated tool can be modified to a material with extremely excellent lubricity, and the welding resistance can be improved. It is. Each layer can be adjusted to any one of nitride, carbonitride, oxynitride, and oxycarbonitride as required, and the same cutting performance can be obtained for a tool coated with these layers.
[0011]
The reason why the content M of B in the hard film having nitride, carbonitride, oxynitride and oxycarbonitride in which the metal component is composed of Ti and B is limited will be described. When the B content is less than 0.1 atomic% with respect to Ti, the effect of preventing the intended welding and element diffusion of the present invention cannot be obtained. Therefore, since it cannot cope with the target of severe cutting work in recent years, it is set to 0.1 atomic% or more where the effect starts to be remarkable. In addition, the hard coating of the present invention composed of Ti and B exhibits columnar crystals that are often seen in TiN, etc., but when the B content exceeds 40 atomic%, it changes from columnar crystals to a fine granular crystal structure. Admitted to do. Thus, it was recognized that the hard film having a large B content has many internal defects and a low density. In addition, it was confirmed that the internal stress that hinders the adhesion of the film becomes very large and the peeling phenomenon easily occurs. Furthermore, since the crystal of the hard coating is fine, the frequency of grain boundary fracture occurring during the cutting process is high, and abnormal wear due to this was observed. The present inventors have obtained the above knowledge and limited the B content M in the hard film of the present invention to 0.1 ≦ M ≦ 40 in atomic%. In producing the hard coating of the present invention, physical vapor deposition is preferred. Therefore, a target for film formation is required. Two targets composed of Ti and B may be used as the target, but an alloy target of Ti and B is more preferable in consideration of variation in composition and stability of discharge.
[0012]
It was confirmed that the presence form of the metal element in the hard film composed of Ti and B is characterized by the B content contained in the hard film. The conventional hard coatings such as nitrides of Ti and Al vary depending on their compositions, but it is understood that when a practically used coating is taken up, it generally takes the NaCl type B1 structure which is the same crystal lattice form as TiN. In other words, the Ti in the TiN lattice is replaced by Al, so to speak, Al is in a solid solution state. However, although the hard film composed of Ti and B of the present invention depends on the B content, when the content is 0.1 atomic% or more, it is different from the Ti and Al nitrides. The form is shown. When the content of B is 0.1 atomic% or more, B becomes a form in which the compound of B exists alone in addition to the form in which Ti in the TiN lattice is replaced. That is, when the B content is 0.1 atomic% or more, for example, in the case of a Ti and B nitride that is the hard coating of the present invention, a form in which TiN crystals and BN crystals are mixed in the hard coating. Is taken. When the B content is less than 0.1 atomic%, B is completely taken into the TiN crystal lattice and takes the form of a solid solution. This change in crystal form greatly affects the cutting performance. In the case of the nitride in the composition range of the present invention, BN crystals exist in addition to TiN-like crystals. This BN is known to have excellent self-lubrication and low wettability with Fe, and the presence of this BN crystal is considered to have an effect of significantly suppressing crater wear mainly due to chemical reaction. It is done. In addition, since BN is resistant to oxidation from the viewpoint of free generation energy against oxidation, the characteristics of the hard coating at high temperatures do not deteriorate. These surprising facts are the results obtained by the inventor's extensive research. However, if the B content exceeds 40 atomic%, the BN crystals exist, but the internal stress becomes very large, and it becomes difficult to maintain good adhesion. In other words, when an external impact is applied to the hard coating as in cutting, the hard coating cannot withstand its own internal stress, and peeling may occur easily, making it difficult to serve as a hard coating tool. Admitted. Therefore, in order to provide the cutting tool which is the target of the present inventors, the amount of B contained in the hard film must not exceed 40 atomic%, and BN is contained in the hard film. We must create new technologies that make crystals exist.
[0013]
The reason for defining the film thickness D will be described. In order for the characteristics of the hard coating to cope with the severe cutting work in recent years, D ≧ 0.1 μm must be coated. That is, when it is thinner than that, the characteristics of the hard coating are not exhibited. Further, when the hard coating described in the present invention is thickly coated on the rake face of the tool and applied to a cutting process in which rake face wear is significantly generated, (TiAl) N and (TiAlSi) (CN) which are conventional hard coatings. ), (TiAlZrB) N, and (TiAlB) N, crater wear easily occurs as described above, and high-efficiency machining is not satisfied. As a result of investigating in detail the optimum film thickness for sufficiently exerting the effect of the hard film in which the metal component to be applied is composed of Ti and B, the film thickness D is D ≧ 0.1 μm. It revealed that. Based on this investigation, the thickness D of the tool rake face to be coated is more preferably D ≧ 0.1 μm.
[0014]
The coating method of the hard film-coated tool of the present invention is not particularly limited. However, when considering the thermal effect on the coated substrate, the fatigue strength of the tool, the adhesion of the film, etc., at a relatively low temperature. It is desirable to be a physical vapor deposition method in which a bias voltage is applied to the coated substrate side, such as arc discharge ion plating in which the coating film can be coated and compressive stress remains in the coated film, or sputtering. Hereinafter, the present invention will be described based on examples.
[0015]
【Example】
Using a small arc ion plating device, select from various alloy targets that are the evaporation source of metal components, and N 2 gas, CH 4 gas, and mixed gas of Ar and O 2 that are the target gas. Then, coating was performed by applying a potential of −350 V to the cemented carbide insert as the coated substrate at a coated substrate temperature of 400 ° C.
[0016]
Using the obtained hard coating-coated insert, machining was performed under the following dry high-efficiency cutting conditions until the tool became uncut due to chipping or abrasion of the blade edge, and the cutting length at that time was defined as the tool life. Table 1 shows the details of the hard coating and the cutting results for the inventive examples, comparative examples, and conventional examples.
[0017]
[Table 1]
[0018]
The insert cutting conditions are as follows. The cutting tool uses a face mill (insert shape: SDE53TN special type), the cutting method is the center cut method, the work material shape is 100 mm wide, the length is 250 mm, the work material is S50C (HRC30), The incision is 2.0 mm, the cutting speed is 150 m / min, the blade feed amount is 1.80 mm / blade, and there is no cutting oil.
[0019]
As shown in Table 1, in the hard coating of the present invention, it is clear that the crystal orientation strength ratio and the peak intensity ratio of h-BN and c-BN in Raman spectroscopic analysis greatly affect the cutting performance. That is, as shown in Examples 1 to 20 of the present invention, the XRD intensity ratio I (200) / I (111) ≧ 1.0 is satisfied, and c-BN and h-BN are detected by Raman spectroscopic analysis. When the ratio of the peak intensity Q1 of c-BN and the peak intensity Q2 of h-BN, Q1 / Q2 <1.0, the characteristics of the material are fully exhibited, and the cutting life is greatly improved. Satisfactory results have been obtained. However, for example, in Comparative Examples 22 and 25, the peak intensity ratio in XRD diffraction is not satisfied, and the peak intensity of c-BN is strong in Raman spectroscopic analysis. Was not recognized. Further, in Comparative Examples 23, 26, and 27, when the peak intensity ratio in XRD diffraction is not satisfied, and when the peak intensity of c-BN in Raman spectroscopic analysis is increased, the internal stress of the hard coating is remarkably increased, and early peeling occurs. Later, it ended up being deficient. As shown in Table 1, it is clear that the hard coating of the present invention has a remarkable improvement in tool performance because of its excellent heat resistance as well as welding resistance by the presence of BN crystals and control of its chemical structure. It is. However, for example, in Comparative Examples 21 and 24, since the amount of B added to the hard film is very small, it is taken into the TiN crystal lattice and takes the form of a solid solution. As a result, the film is composed of Ti and B. Although it is a hard film comprised, it does not go far to the improvement of the tool performance which is the objective of this invention. Further, in Comparative Examples 22, 23, 25, 26, and 27, even if it is recognized that crystals of BN are present in the hard film composed of Ti and B, the amount of added B is relative to Ti. It has exceeded 50 atomic%. In such a case, in the cutting process, the hard coating loses its own internal stress, and peeling easily occurs. In particular, in Comparative Example 26, it was recognized that the internal stress of the entire hard coating was the highest and reached about −6 GPa. When a cutting test was conducted on this sample, large detachment occurred on the tool flank and rake face at the beginning of cutting of the insert, making it impossible to continue cutting. Therefore, in the hard coating of the present invention, the presence of BN crystals in the film is also a very important technique. However, the hard coating coating tool including the amount of B to be added is not simply present. Clearly, it would be impossible to provide a tool that would perform significantly better if not done. On the other hand, a sample formed as a two-layer film of (TiSi) N film and (TiAl) N film of Conventional Example 28, and (TiAl) -based nitride layers of Conventional Examples 29 to 34 as Zr, B, It was confirmed that the examples of the present invention were superior in tool life in any case to the sample to which Si was added. In carrying out the film formation of the present invention, the introduction gas to be used was also examined. As a result, in order to keep remarkably excellent welding resistance, the metal component is any of nitride, carbonitride, oxynitride, oxycarbonitride composed of Ti and B, and the content M of B is Although it is desirable that 0.1 ≦ M ≦ 40.0 by atomic percent of only the metal component, the film described above is formed at the time of film formation in consideration of heat generation of the tool and friction with the workpiece. In addition to the gas containing nitrogen and oxygen required above, a gas containing carbon is introduced to cover the carbonitride and oxycarbonitride, thereby further improving the tool performance. The application of the hard coating of the present invention can sufficiently cope with not only the insert shown in the embodiment but also other high-efficiency cutting such as a turning application.
[0020]
【The invention's effect】
As described above, the hard film-coated tool of the present invention has c-BN in a Raman spectroscopic analysis in a layer composed of any one of nitride, carbonitride, oxynitride, and oxycarbonitride composed of Ti and B. A coating with a h-BN peak detected is coated, and this coating achieves excellent welding resistance, diffusion resistance, oxidation resistance, and wear resistance, so that it has a significantly long tool life in dry high-efficiency cutting. It is obtained and is extremely effective for improving productivity in cutting.
[Brief description of the drawings]
FIG. 1 shows the results of elemental analysis in the vicinity of a cutting edge of a tool coated with a film of an example of the present invention after cutting.
FIG. 2 shows the results of elemental analysis in the vicinity of the cutting edge of a tool coated with a conventional film after cutting.
FIG. 3 is a result of Raman spectroscopic analysis of a film of a comparative example and shows diffraction peaks of c-BN and h-BN.
Claims (3)
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