JP3779675B2 - Method for manufacturing printed wiring board - Google Patents

Method for manufacturing printed wiring board Download PDF

Info

Publication number
JP3779675B2
JP3779675B2 JP2002334817A JP2002334817A JP3779675B2 JP 3779675 B2 JP3779675 B2 JP 3779675B2 JP 2002334817 A JP2002334817 A JP 2002334817A JP 2002334817 A JP2002334817 A JP 2002334817A JP 3779675 B2 JP3779675 B2 JP 3779675B2
Authority
JP
Japan
Prior art keywords
resin
wiring board
printed wiring
hole
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002334817A
Other languages
Japanese (ja)
Other versions
JP2004172266A (en
Inventor
裕誉 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noda Screen Co Ltd
Original Assignee
Noda Screen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noda Screen Co Ltd filed Critical Noda Screen Co Ltd
Priority to JP2002334817A priority Critical patent/JP3779675B2/en
Publication of JP2004172266A publication Critical patent/JP2004172266A/en
Application granted granted Critical
Publication of JP3779675B2 publication Critical patent/JP3779675B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Description

【0001】
【発明の属する技術分野】
本発明は、スルーホール内を樹脂で穴埋めしたプリント配線基板の製造方法に関する。
【0002】
【従来の技術】
プリント配線基板のスルーホールを穴埋めするための技術としては、例えば、スルーホールを形成したプリント配線基板に、例えば光硬化性の樹脂をスクリーン印刷等によって塗布してその樹脂をスルーホール内に充填し、その後プリント配線基板の両面から硬化用の光を照射して樹脂を硬化させる技術が公知である。
【0003】
【特許文献1】
特開2000−277921公報
【0004】
【発明が解決しようとする課題】
上述の方法にあって、プリント配線基板に硬化用の光が照射されると、樹脂はスルーホールの両端側からスルーホールの深部に向かって徐々に硬化される。ところが、この種の樹脂において、硬化収縮が比較的大きいものを使用する場合には、従来のようにプリント配線基板の両面から光を照射すると、樹脂は硬化収縮によってスルーホールの両開口側に引っ張られ易く、スルーホールの奥方に位置する樹脂に大きな応力がかかる。その結果、スルーホールの内部で空洞やクラックが発生し易くなるという問題がある。
【0005】
本発明は上記事情に鑑みてなされたもので、硬化収縮が大きい樹脂を使用する場合でも、スルーホール内に穴埋めされた樹脂中に空洞やクラック等の不具合が生じ難いプリント配線基板の製造方法およびその製造装置を提供することを目的とする。
【0006】
【課題を解決するための手段】
上記課題を解決するための請求項1の発明は、スルーホール内に光硬化性を有する樹脂を充填して硬化させることでそのスルーホールを穴埋めしたプリント配線基板を製造する方法であって、前記樹脂の硬化用の光を前記スルーホールの一方の開口側からのみ照射するとともに、その光が前記スルーホールの他方の開口に回り込むことを防止して、前記一方の開口側から他方の開口側に至るまで前記スルーホール内の樹脂を硬化させた後、前記樹脂の硬化用の光を前記スルーホールの他方の開口側から照射して前記他方の開口側にある前記スルーホール外の樹脂を硬化させるところに特徴を有する。
【0007】
また、請求項2の発明は、請求項1に記載のプリント配線基板の製造方法であって、前記樹脂の硬化用の光は、前記プリント配線基板に対し垂直な光軸に沿う平行光成分を他の方向成分よりも多く含むところに特徴を有する。
【0013】
【発明の作用および効果】
上記請求項1の発明によれば、プリント配線基板のスルーホール内に充填された光硬化性を有する樹脂は、その樹脂の硬化用の光がスルーホールの一方の開口側からだけ照射されるから、その光が照射される開口側からだけ硬化が開始される。この場合、まず光の照度が高い樹脂の表面付近から硬化が開始され、その後スルーホールの奥方に向かって徐々に樹脂の硬化領域が広がる。そしてついには、スルーホールの他方の開口側の樹脂まで硬化が進み、スルーホール内の樹脂全体が硬化される。このように、スルーホールの一方の開口側からだけ光の照射を行い、他方の開口には光が回り込まない構成とすることにより、硬化収縮が比較的大きい樹脂を使用する場合でも、スルーホール内の樹脂に硬化収縮による内部応力が発生することを防止することができる。
【0014】
このように、請求項1の発明によれば、樹脂中に空洞やクラック等の不具合が生じ難く、均質で優れた電気的特性のプリント配線板を得ることができる。
また、スルーホールの一方の開口側から樹脂の硬化用の光を照射してスルーホール内の樹脂を硬化させた後に、他方の開口側からも樹脂の硬化用の光を照射して他方の開口側にあるスルーホール外の樹脂を硬化させる構成であるから、塗布された樹脂全体が硬化されるとともに、スルーホール内の樹脂の重合度が高まって樹脂の硬度が増す。よって、その後平坦化のために行われる表面研磨をむらなく行うことができる。また、一旦硬化された樹脂はその重合度が増しても収縮量が少ないため、内部応力はほとんど発生せず、スルーホール内に空洞やクラック等が生じることはない。
【0015】
また、請求項2の発明によれば、硬化用の光は、プリント配線基板に対し垂直な光軸に沿う平行光成分を他の成分よりも多く含む光とされているから、スルーホールのアスペクト比が小さくてスルーホール内壁での光の反射を期待できない場合でも、平行光成分によりスルーホールの他方の開口側の樹脂まで確実に硬化させることができる。
【0020】
【発明の実施の形態】
<第1実施形態>
以下、本発明を具体化した第1実施形態について図1および図2を参照して説明する。
図1は本実施形態のプリント配線基板の露光装置20の概略図である。プリント配線基板10は、図示しない一般のスクリーン印刷機によってスルーホール11内を光硬化性の樹脂12にて穴埋めされた後、この露光装置20内に搬送装置30によって搬入される。
【0021】
露光装置20は、露光室21と、この露光室21内に備えられ、後述する搬送装置30によって搬入されるプリント配線基板10に対し露光用の光を上方から照射可能な露光光源22とを備えている。この露光光源22は、下方側に開いた放物面鏡24と、この放物面鏡の焦点に位置する紫外線ランプ23とから構成されており、紫外線ランプ23から発せられた光はこの放物面鏡24によって下方へ向けて反射されるようになっている。これにより、プリント配線基板10には、プリント配線基板10に対し垂直な光軸に沿う平行光成分を他の方向成分よりも多く含む光(以下平行光として説明する)が照射される構成となっている。
【0022】
この露光装置20の露光室21の内壁は、全面にわたって、露光光源22から発せられた光を吸収するための光吸収部材25によって覆われており(本発明の光照射防止手段に相当)、これにより、プリント配線基板10の下面側への照射光の反射による回り込みが防止される構成とされている。
【0023】
一方、搬送装置30は、図示しないモータによって一定の速度で回転される一対の搬送ローラ31,31に、2本のベルトコンベア32,32が互いに一定の距離を介して架けられたものであり、これらベルトコンベア32,32上に載置されるプリント配線基板10が、露光装置20の露光室21内を通過できるようになっている。
【0024】
さらに、プリント配線基板10の搬送方向の露光室21の下流側(図1中右側)には、搬送装置30の下方に紫外線ランプ26が備えられており、プリント配線基板10の下面側に光を照射可能な構成とされている。
【0025】
次に、本実施形態におけるプリント配線基板10のスルーホール11の穴埋め方法について図2を参照して説明する。
まず、スルーホール11が形成されたプリント配線基板10に紫外線硬化型樹脂12を図示しないスクリーン印刷機によって塗布して、スルーホール11を樹脂12にて穴埋めする(図2A参照)。
【0026】
次に、このプリント配線基板10を上述した搬送装置30のベルトコンベア32,32上に架け渡すように載置し、露光装置20の露光室21内に搬送する。搬送されたプリント配線基板10は、露光光源22の下方の所定位置で一旦停止される。この所定位置のプリント配線基板10に対し、露光光源22から平行光が照射される。この平行光の照射により、まずスルーホール11内の樹脂12の上部開口の表面付近だけが膜状に薄く硬化され(図2B参照)、その後スルーホール11の下方側に向けて徐々に硬化が進む(図2C参照)。そしてついには、スルーホール11内の樹脂12全体が硬化される(図2D参照)。
【0027】
この後、再び搬送装置30を作動させ、プリント配線基板10を露光室21の外へ搬出する。そして、搬送装置30の下方側に位置する紫外線ランプ26によってプリント配線基板10の下面側から照射を行う。これにより、上方側からの照射では光が届かない、プリント配線基板10の下面側に回り込んだ樹脂12部分まで完全に硬化されるとともに、スルーホール11内の樹脂12の重合度が高められる(図2E参照)。その後、プリント配線基板10の表面を例えばバフ研磨機によって研磨して平坦化すれば、スルーホール11内の穴埋め作業が終了する(図2F参照)。
【0028】
このように本実施形態によれば、プリント配線板基板10のスルーホール11内に充填された樹脂12に対し、その樹脂12の硬化用の光をまずプリント配線基板10の一方の面側からだけ照射して、硬化させる構成である。従って、硬化収縮が大きい樹脂を使用した場合でも、樹脂12の硬化収縮によってスルーホール11内部の樹脂12に応力がかかることが防止され、その結果、スルーホール11の内部に空洞やクラックが生じない、均質で優れた電気的特性のプリント配線板10を得ることができる。しかも、硬化用の光は平行光とされているから、スルーホールの一方の開口側からの照射により、他方の開口側の樹脂まで確実に硬化させることができる。
【0029】
<第2実施形態>
以下、本発明の第2実施形態について図3および図4を参照して説明する。本実施形態では、上記第1実施形態と重なる部分は省略する。
本実施形態では、スクリーン印刷によりスルーホール11を穴埋めしたプリント配線基板10をフレーム40(本発明の遮光カバーに相当)上に載置し、このフレーム40を搬送装置30によって搬送する構成とされている。フレーム40は、図3に示すように、上面が開口した扁平な箱形のものであり、その開口縁には側壁が肉厚になるように外側に張り出したフランジ部41が形成されており、その上面には全周にわたって滑り止めのゴムリング42が嵌め込まれている。これにより、プリント配線基板10の端部付近がフランジ部41の上面で支持可能とされている。また、このフレーム40は、プリント配線基板10に形成された全てのスルーホール11の下面側の開口がフレーム40内の凹部43内に臨む大きさとされている。
【0030】
一方、露光装置20は、上記第1実施形態と同様に、搬送装置30によって所定位置に搬送されたプリント配線基板10に対して上方から平行光を照射可能な露光光源22を備えているが、上記第1実施形態に示した露光室21は設けられていない。また、プリント配線基板10の搬送方向の下流側(図4中右側)には、プリント配線基板10に樹脂12の硬化用の光を照射可能な紫外線ランプ26が、搬送装置30の上方に備えられている。
【0031】
本実施形態においては、まず、プリント配線基板10に紫外線硬化型樹脂12をスクリーン印刷機によって塗布して、スルーホール11を樹脂12にて穴埋めする。そして、プリント配線基板10の下面側のスルーホール11の開口がフレーム40の凹部43に臨むようにプリント配線基板10をフレーム40のフランジ41上に載置するとともに、このフレーム40を搬送装置30のベルトコンベア32,32上に架け渡すように載置し、搬送する。そして、露光光源22の下方の所定位置でフレーム40を一旦停止させ、プリント配線基板10に平行光を照射する。
【0032】
この平行光の照射によりスルーホール11内の樹脂12が硬化されたら、再び搬送装置30を作動させてプリント配線基板10を搬送する。そして、プリント配線基板10の上下面を反転させるとともに、フレーム40を取り除き、露光光源22によって平行光を照射されなかった面側から、紫外線ランプ26によって樹脂12の硬化用の光を照射する。その後、プリント配線基板10の表面を例えばバフ研磨機によって研磨して、基板を平坦化させる。
【0033】
このように本実施形態においても、プリント配線板基板10のスルーホール11内に充填された樹脂12に対し、その樹脂12の硬化用の光をプリント配線基板10の一方の面側から照射することが可能であるから、硬化収縮が大きい樹脂を使用した場合でも、スルーホール内部に空洞やクラックが生じない、均質で優れた電気的特性のプリント配線板10を得ることができる。
【0034】
<他の実施形態>
本発明は上記記述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も本発明の技術的範囲に含まれ、さらに、下記以外にも要旨を逸脱しない範囲内で種々変更して実施することができる。
【0035】
(1)上記実施形態では、プリント配線基板10を大気中で照射する構成としたが、これに限らず、プリント配線基板を液体中に浸漬した状態で光を照射する構成としてもよい。この場合、液体のヒートシンク作用により、樹脂の温度上昇を抑制することが可能である。また、紫外光感度の高い樹脂を使用する場合には、微弱光にて薄い硬化膜を形成した後、例えば−10℃〜0℃程度の低温度の液体中にて照射を行う構成としてもよい。
【0036】
(2)上記実施形態では、露光光源を単一の光源にて構成したが、これに限らず、複数の露光光源を並べて複数の基板を一括照射する構成としてもよい。
【0037】
(3)上記実施形態では、プリント配線基板10を2本のベルトコンベア32,32上に架け渡すように載置して搬送させる構成としたが、これに限らず、立てた状態で搬送させる構成としてもよい。
【図面の簡単な説明】
【図1】本発明の第1実施形態の露光装置および搬送装置の概略図
【図2】同じくプリント配線基板のスルーホール内の樹脂の硬化過程を示す一部拡大断面図
【図3】本発明の第2実施形態のフレームの斜視図
【図4】同じく露光装置および搬送装置の概略図
【符号の説明】
10…プリント配線基板
11…スルーホール
12…樹脂
20…露光装置
21…露光室
22…露光光源
23,26…紫外線ランプ
24…放物面鏡
25…光吸収部材
30…搬送装置
40…フレーム(遮光カバー)
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to the through-hole in the production how the printed wiring board filling with resin.
[0002]
[Prior art]
As a technique for filling a through hole of a printed wiring board, for example, a photo-curing resin is applied to the printed wiring board in which the through hole is formed by screen printing or the like, and the resin is filled in the through hole. Then, a technique for curing the resin by irradiating light for curing from both sides of the printed wiring board is known.
[0003]
[Patent Document 1]
[Patent Document 1] Japanese Unexamined Patent Publication No. 2000-277721
[Problems to be solved by the invention]
In the above-described method, when the curing light is irradiated to the printed wiring board, the resin is gradually cured from the both end sides of the through hole toward the deep part of the through hole. However, when using this type of resin that has a relatively large cure shrinkage, if the resin is irradiated with light from both sides of the printed wiring board as in the past, the resin is pulled to both opening sides of the through-hole by the cure shrinkage. It is easy to be applied, and a large stress is applied to the resin located in the back of the through hole. As a result, there is a problem that cavities and cracks are likely to occur inside the through hole.
[0005]
The present invention has been made in view of the above circumstances, and even when a resin having a large cure shrinkage is used, a method for producing a printed wiring board that is less likely to cause defects such as cavities and cracks in the resin buried in the through hole, and It aims at providing the manufacturing apparatus.
[0006]
[Means for Solving the Problems]
The invention of claim 1 for solving the above problem is a method of manufacturing a printed wiring board in which a through hole is filled by filling a through hole with a photocurable resin and curing the resin. The resin curing light is irradiated only from one opening side of the through hole, and the light is prevented from wrapping around the other opening of the through hole, so that the one opening side moves to the other opening side. after curing the resin in the through hole until, curing the through hole outside the resin by irradiating in the open side of the other light for curing of the resin from the other opening side of the through hole However, it has characteristics.
[0007]
The invention according to claim 2 is the method for manufacturing a printed wiring board according to claim 1, wherein the light for curing the resin has a parallel light component along an optical axis perpendicular to the printed wiring board. It is characterized by including more than other direction components.
[0013]
Operation and effect of the invention
According to the first aspect of the present invention, the photo-curing resin filled in the through hole of the printed wiring board is irradiated with light for curing the resin only from one opening side of the through hole. Curing is started only from the opening side irradiated with the light. In this case, curing is first started from the vicinity of the surface of the resin having high light illuminance, and then the cured region of the resin gradually expands toward the back of the through hole. Finally, curing proceeds to the resin on the other opening side of the through hole, and the entire resin in the through hole is cured. In this way, by irradiating light only from one opening side of the through hole and preventing the light from entering the other opening, the inside of the through hole can be used even when a resin having a relatively large curing shrinkage is used. It is possible to prevent internal stress due to curing shrinkage from occurring in the resin.
[0014]
As described above, according to the first aspect of the present invention, it is possible to obtain a printed wiring board having uniform and excellent electrical characteristics, which is less likely to cause defects such as cavities and cracks in the resin.
Also, after the resin curing light is irradiated from one opening side of the through hole to cure the resin in the through hole, the other opening side is irradiated with the resin curing light from the other opening side. Since the resin outside the through-hole on the side is cured, the entire applied resin is cured, and the degree of polymerization of the resin in the through-hole increases to increase the hardness of the resin. Therefore, the surface polishing performed for planarization after that can be performed uniformly. In addition, since the resin once cured has a small amount of shrinkage even when the degree of polymerization is increased, almost no internal stress is generated, and cavities and cracks are not generated in the through holes.
[0015]
According to the second aspect of the present invention, the curing light is light that contains more parallel light components along the optical axis perpendicular to the printed circuit board than other components. Even when the ratio is small and reflection of light on the inner wall of the through hole cannot be expected, the resin on the other opening side of the through hole can be reliably cured by the parallel light component.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
<First Embodiment>
A first embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
FIG. 1 is a schematic diagram of an exposure apparatus 20 for a printed wiring board according to the present embodiment. The printed wiring board 10 is filled in the through-hole 11 with a photocurable resin 12 by a general screen printing machine (not shown), and then carried into the exposure device 20 by the transport device 30.
[0021]
The exposure apparatus 20 includes an exposure chamber 21 and an exposure light source 22 that is provided in the exposure chamber 21 and that can irradiate exposure light from above onto the printed wiring board 10 that is carried in by a transfer device 30 described later. ing. The exposure light source 22 includes a parabolic mirror 24 that opens downward, and an ultraviolet lamp 23 that is positioned at the focal point of the parabolic mirror, and light emitted from the ultraviolet lamp 23 is the paraboloid. Reflected downward by the surface mirror 24. Thereby, the printed wiring board 10 is configured to be irradiated with light containing more parallel light components along the optical axis perpendicular to the printed wiring board 10 than other direction components (hereinafter described as parallel light). ing.
[0022]
The inner wall of the exposure chamber 21 of the exposure apparatus 20 is entirely covered with a light absorbing member 25 for absorbing light emitted from the exposure light source 22 (corresponding to the light irradiation preventing means of the present invention). Thus, the wraparound due to the reflection of the irradiation light to the lower surface side of the printed wiring board 10 is prevented.
[0023]
On the other hand, the conveying device 30 is configured such that two belt conveyors 32 and 32 are suspended from each other at a certain distance between a pair of conveying rollers 31 and 31 that are rotated at a constant speed by a motor (not shown). The printed wiring board 10 placed on the belt conveyors 32 and 32 can pass through the exposure chamber 21 of the exposure apparatus 20.
[0024]
Furthermore, an ultraviolet lamp 26 is provided below the transfer device 30 on the downstream side (right side in FIG. 1) of the exposure chamber 21 in the transfer direction of the printed wiring board 10, and light is emitted to the lower surface side of the printed wiring board 10. It is set as the structure which can be irradiated.
[0025]
Next, a method for filling the through hole 11 of the printed wiring board 10 in the present embodiment will be described with reference to FIG.
First, the ultraviolet curable resin 12 is applied to the printed wiring board 10 in which the through holes 11 are formed by a screen printer (not shown), and the through holes 11 are filled with the resin 12 (see FIG. 2A).
[0026]
Next, the printed wiring board 10 is placed on the belt conveyors 32 and 32 of the transfer device 30 described above, and is transferred into the exposure chamber 21 of the exposure device 20. The conveyed printed wiring board 10 is temporarily stopped at a predetermined position below the exposure light source 22. Parallel light is irradiated from the exposure light source 22 to the printed wiring board 10 at the predetermined position. By this parallel light irradiation, first, only the vicinity of the surface of the upper opening of the resin 12 in the through hole 11 is thinly cured in a film shape (see FIG. 2B), and thereafter, the curing gradually proceeds toward the lower side of the through hole 11. (See FIG. 2C). Finally, the entire resin 12 in the through hole 11 is cured (see FIG. 2D).
[0027]
Thereafter, the transfer device 30 is operated again, and the printed wiring board 10 is carried out of the exposure chamber 21. Then, irradiation is performed from the lower surface side of the printed wiring board 10 by the ultraviolet lamp 26 positioned below the transport device 30. Thereby, light does not reach by irradiation from the upper side, and the resin 12 portion that wraps around the lower surface side of the printed wiring board 10 is completely cured, and the degree of polymerization of the resin 12 in the through hole 11 is increased ( (See FIG. 2E). After that, if the surface of the printed wiring board 10 is polished and flattened by, for example, a buffing machine, the filling operation in the through hole 11 is completed (see FIG. 2F).
[0028]
As described above, according to the present embodiment, the resin 12 filled in the through hole 11 of the printed wiring board substrate 10 is first irradiated with light for curing the resin 12 only from one surface side of the printed wiring board 10. It is the structure which is irradiated and hardened. Accordingly, even when a resin having a large cure shrinkage is used, stress is prevented from being applied to the resin 12 inside the through hole 11 due to the cure shrinkage of the resin 12, and as a result, no cavity or crack is generated inside the through hole 11. Thus, the printed wiring board 10 which is homogeneous and has excellent electrical characteristics can be obtained. Moreover, since the curing light is parallel light, the resin from the other opening side can be reliably cured by irradiation from the one opening side of the through hole.
[0029]
Second Embodiment
Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 3 and 4. In this embodiment, the part which overlaps with the said 1st Embodiment is abbreviate | omitted.
In the present embodiment, the printed wiring board 10 in which the through holes 11 are filled by screen printing is placed on a frame 40 (corresponding to the light shielding cover of the present invention), and the frame 40 is conveyed by the conveying device 30. Yes. As shown in FIG. 3, the frame 40 has a flat box shape with an upper surface opened, and a flange portion 41 is formed on the opening edge so as to protrude outward so that the side wall is thick. A non-slip rubber ring 42 is fitted over the entire surface of the upper surface. Thus, the vicinity of the end portion of the printed wiring board 10 can be supported by the upper surface of the flange portion 41. The frame 40 is sized so that the openings on the lower surface side of all the through holes 11 formed in the printed wiring board 10 face the recesses 43 in the frame 40.
[0030]
On the other hand, the exposure apparatus 20 includes an exposure light source 22 capable of irradiating parallel light from above on the printed wiring board 10 conveyed to a predetermined position by the conveyance apparatus 30 as in the first embodiment. The exposure chamber 21 shown in the first embodiment is not provided. Further, an ultraviolet lamp 26 capable of irradiating the printed wiring board 10 with light for curing the resin 12 is provided above the conveying device 30 on the downstream side in the conveying direction of the printed wiring board 10 (right side in FIG. 4). ing.
[0031]
In the present embodiment, first, an ultraviolet curable resin 12 is applied to the printed wiring board 10 by a screen printing machine, and the through holes 11 are filled with the resin 12. Then, the printed wiring board 10 is placed on the flange 41 of the frame 40 so that the opening of the through hole 11 on the lower surface side of the printed wiring board 10 faces the recess 43 of the frame 40, and the frame 40 is attached to the conveying device 30. The belt is placed on the belt conveyors 32, 32 and transported. Then, the frame 40 is temporarily stopped at a predetermined position below the exposure light source 22 to irradiate the printed wiring board 10 with parallel light.
[0032]
When the resin 12 in the through hole 11 is cured by this parallel light irradiation, the transport device 30 is operated again to transport the printed wiring board 10. Then, the upper and lower surfaces of the printed wiring board 10 are reversed, the frame 40 is removed, and light for curing the resin 12 is irradiated from the surface side where the parallel light is not irradiated by the exposure light source 22 by the ultraviolet lamp 26. Thereafter, the surface of the printed wiring board 10 is polished by, for example, a buffing machine to flatten the board.
[0033]
Thus, also in the present embodiment, the resin 12 filled in the through hole 11 of the printed wiring board substrate 10 is irradiated with light for curing the resin 12 from one surface side of the printed wiring board 10. Therefore, even when a resin having a large cure shrinkage is used, it is possible to obtain a printed wiring board 10 having uniform and excellent electrical characteristics in which cavities and cracks are not generated in the through holes.
[0034]
<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further, within the scope not departing from the gist of the invention other than the following. Various modifications can be made.
[0035]
(1) In the said embodiment, although it was set as the structure which irradiates the printed wiring board 10 in air | atmosphere, it is good also as a structure which irradiates light in the state which immersed the printed wiring board in the liquid. In this case, it is possible to suppress the temperature rise of the resin by the liquid heat sink action. Moreover, when using resin with a high ultraviolet light sensitivity, after forming a thin cured film with weak light, it is good also as a structure which irradiates in the liquid of low temperature, such as about -10 degreeC-0 degreeC, for example. .
[0036]
(2) In the above-described embodiment, the exposure light source is configured by a single light source. However, the present invention is not limited to this, and a plurality of exposure light sources may be arranged to collectively irradiate a plurality of substrates.
[0037]
(3) In the above embodiment, the printed wiring board 10 is placed and transported so as to be bridged over the two belt conveyors 32, 32. It is good.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of an exposure apparatus and a transport apparatus according to a first embodiment of the present invention. FIG. 2 is a partially enlarged cross-sectional view showing a curing process of a resin in a through hole of a printed wiring board. FIG. 4 is a schematic view of an exposure apparatus and a transport apparatus.
DESCRIPTION OF SYMBOLS 10 ... Printed circuit board 11 ... Through hole 12 ... Resin 20 ... Exposure apparatus 21 ... Exposure chamber 22 ... Exposure light source 23, 26 ... Ultraviolet lamp 24 ... Parabolic mirror 25 ... Light absorption member 30 ... Conveyance apparatus 40 ... Frame (light-shielding) cover)

Claims (2)

スルーホール内に光硬化性を有する樹脂を充填して硬化させることでそのスルーホールを穴埋めしたプリント配線基板を製造する方法であって、前記樹脂の硬化用の光を前記スルーホールの一方の開口側からのみ照射するとともに、その光が前記スルーホールの他方の開口に回り込むことを防止して、前記一方の開口側から他方の開口側に至るまで前記スルーホール内の樹脂を硬化させた後、前記樹脂の硬化用の光を前記スルーホールの他方の開口側から照射して前記他方の開口側にある前記スルーホール外の樹脂を硬化させることを特徴とするプリント配線基板の製造方法。A method of manufacturing a printed wiring board in which a through-hole is filled with a resin having photo-curing property and cured to fill the through-hole, and light for curing the resin is applied to one opening of the through-hole. After irradiating only from the side and preventing the light from wrapping around the other opening of the through hole, after curing the resin in the through hole from the one opening side to the other opening side , A method of manufacturing a printed wiring board, comprising: irradiating light for curing the resin from the other opening side of the through hole to cure the resin outside the through hole on the other opening side . 前記樹脂の硬化用の光は、前記プリント配線基板に対し垂直な光軸に沿う平行光成分を他の方向成分よりも多く含むことを特徴とする請求項1に記載のプリント配線基板の製造方法。  2. The method of manufacturing a printed wiring board according to claim 1, wherein the light for curing the resin contains more parallel light components along an optical axis perpendicular to the printed wiring board than other direction components. .
JP2002334817A 2002-11-19 2002-11-19 Method for manufacturing printed wiring board Expired - Fee Related JP3779675B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002334817A JP3779675B2 (en) 2002-11-19 2002-11-19 Method for manufacturing printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002334817A JP3779675B2 (en) 2002-11-19 2002-11-19 Method for manufacturing printed wiring board

Publications (2)

Publication Number Publication Date
JP2004172266A JP2004172266A (en) 2004-06-17
JP3779675B2 true JP3779675B2 (en) 2006-05-31

Family

ID=32699100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002334817A Expired - Fee Related JP3779675B2 (en) 2002-11-19 2002-11-19 Method for manufacturing printed wiring board

Country Status (1)

Country Link
JP (1) JP3779675B2 (en)

Also Published As

Publication number Publication date
JP2004172266A (en) 2004-06-17

Similar Documents

Publication Publication Date Title
KR101670115B1 (en) Imprint apparatus and method of manufacturing article
KR101114178B1 (en) Imprint method, chip production process, and imprint apparatus
US7049176B2 (en) Method of forming thick-film wiring and method of producing laminated electronic component
CN104698743B (en) The method of imprinting apparatus and manufacture article
JP2006253644A (en) Fine pattern forming device
KR101505242B1 (en) Imprint method, imprint apparatus, and article manufacturing method
US7320946B2 (en) Method for generating dynamic mask pattern
KR100804734B1 (en) Continuous lithography apparatus and method using ultraviolet roll nanoimprinting
JP2014120604A (en) Imprint device, method of manufacturing device and mold for use in imprint device
JP6021365B2 (en) Imprint apparatus and article manufacturing method using the same
JP2014154624A (en) Imprinting method and imprinting device
US20150118603A1 (en) Photo mask and method of manufacturing the same, and method of forming trenches by using photo mask
KR101348466B1 (en) Template, surface processing method of template, surface processing apparatus of template, and pattern formation method
TW201501816A (en) Method for forming thin film and apparatus for forming thin film
JP3779675B2 (en) Method for manufacturing printed wiring board
TWI528470B (en) Film forming method and thin film forming apparatus
KR20070078264A (en) Method and apparatus for resist pattern foriming on a substrate
US20210299960A1 (en) Three-dimensional printing apparatus and manufacturing method thereof
TWI641428B (en) Centrifugal glue injection system and method thereof
TWI608459B (en) Manufacturing apparatus and manufacturing method of component for display device
KR20150030654A (en) Imprint device and template
JP2012199329A (en) Etching method and imprint device
JPH0534926A (en) Exposing device
KR102350358B1 (en) Imprint apparatus, and method of manufacturing article
JP2009175475A (en) Method of manufacturing optical coupler and optical coupler

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040326

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051201

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060130

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060228

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060302

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100310

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100310

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110310

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110310

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120310

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130310

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130310

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140310

Year of fee payment: 8

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees