JP3539369B2 - Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same - Google Patents

Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same Download PDF

Info

Publication number
JP3539369B2
JP3539369B2 JP2000251870A JP2000251870A JP3539369B2 JP 3539369 B2 JP3539369 B2 JP 3539369B2 JP 2000251870 A JP2000251870 A JP 2000251870A JP 2000251870 A JP2000251870 A JP 2000251870A JP 3539369 B2 JP3539369 B2 JP 3539369B2
Authority
JP
Japan
Prior art keywords
waveguide
refractive index
input
output
side slab
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000251870A
Other languages
Japanese (ja)
Other versions
JP2002062444A (en
Inventor
貴史 千葉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP2000251870A priority Critical patent/JP3539369B2/en
Priority to US09/934,670 priority patent/US6643427B2/en
Priority to CA002355551A priority patent/CA2355551A1/en
Priority to GB0120563A priority patent/GB2367381B/en
Publication of JP2002062444A publication Critical patent/JP2002062444A/en
Application granted granted Critical
Publication of JP3539369B2 publication Critical patent/JP3539369B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、選択波長を空間的に分波ないし合波する合分波器に関し、特に、アレイ導波路型光波長合分波器およびその製造方法に関する。
【０００２】
【従来の技術】
一般に、図２に示すように、基板１上に、波長分割多重光信号を入力する複数本の入力導波路２と、波長分割多重光信号を合波して出力する出力導波路３と、所定の導波路長差△Ｌを有する複数本の導波路からなるアレイ導波路５と、入力導波路２とアレイ導波路５とを接続する入力側スラブ導波路４と、出力導波路３とアレイ導波路５とを接続する出力側スラブ導波路７とを備えるＡＷＧ（ａｒｒａｙｅｄ ｗａｖｅｇｕｉｄｅ ｇｒａｔｉｎｇ）を利用したアレイ導波路型光波長合分波器が知られている。
【０００３】
この種のものでは、入力導波路２から入射した光は入力側スラブ導波路４に入り放射し、アレイ導波路５に結合する。しかしその際、スラブ導波路出力部４Ａとアレイ導波路入力部５Ａの光伝搬のモード形状が一般に違うため入射光すべてが結合することはなく結合損失を生じさせる。
【０００４】
そのため、従来、図３に示すようにアレイ導波路５の間隔Ｌを狭くし、アレイ導波路入力部５Ａとスラブ導波路出力部４Ａとの光伝搬のモード形状を一致させるように工夫してＡＷＧ型合分波器の低損失化を図っている。
【０００５】
【発明が解決しようとする課題】
しかし、従来の構成では、スラブ導波路出力部４Ａのアレイ導波路間隔Ｌ１が狭くなりすぎ、オーバークラッドの埋め込みが非常に困難になり、もし埋め込めない場合、逆に損失が大きくなるという問題がある。
【０００６】
そこで、本発明の目的は、上述した従来技術が有する課題を解消し、スラブ導波路出力部のモード形状をアレイ導波路入力部のモード形状にあわせ、アレイ導波路間隔にこだわらず低損失化を達成できるアレイ導波路型光波長合分波器およびその製造方法を提供することにある。
【０００７】
【課題を解決するための手段】
請求項１記載の発明は、基板上に、波長分割多重光信号を入力する複数本の入力導波路と、波長分割多重光信号を合波して出力する出力導波路と、所定の導波路長差を有する複数本の導波路からなるアレイ導波路と、前記入力導波路と前記アレイ導波路とを接続する入力側スラブ導波路と、前記出力導波路と前記アレイ導波路とを接続する出力側スラブ導波路とを備えるアレイ導波路型光波長合分波器において、前記入力側スラブ導波路および／または前記出力側スラブ導波路は、伝搬する光のモード形状を前記アレイ導波路のモード形状と略一致させる屈折率分布を有するように形成されていることを特徴とするものである。
【０００８】
請求項２記載の発明は、請求項１記載のものにおいて、前記入力側スラブ導波路および／または前記出力側スラブ導波路が、紫外線レーザーにより部分的にコアの屈折率を変化させて所望の屈折率分布を有するように形成されていることを特徴とするものである。
【０００９】
請求項３記載の発明は、請求項２記載のものにおいて、前記入力側スラブ導波路および／または前記出力側スラブ導波路が、屈折率を高くしたい部分以外をマスクし、ＡｒＦエキシマレーザーまたはＫｒＦエキシマレーザーを照射することにより所望の屈折率変化および屈折率分布を有するように形成されていることを特徴とするものである。
【００１０】
請求項４記載の発明は、請求項１〜３のいずれかに記載のものにおいて、前記入力導波路および／または前記出力導波路が、基板上にＧｅ、Ｐ或いはＢ等のフォトリフラクティブ効果を有するドーパントをドープしたコアをそのコアよりも屈折率の小さいクラッドで埋め込んで単一モードのチャネル導波路として形成されていることを特徴とするものである。
【００１１】
請求項５記載の発明は、基板上に、波長分割多重光信号を入力する複数本の入力導波路と、波長分割多重光信号を合波して出力する出力導波路と、所定の導波路長差を有する複数本の導波路からなるアレイ導波路と、前記入力導波路と前記アレイ導波路とを接続する入力側スラブ導波路と、前記出力導波路と前記アレイ導波路とを接続する出力側スラブ導波路とを備えるアレイ導波路型光波長合分波器の製造方法において、前記入力側スラブ導波路および／または前記出力側スラブ導波路は、伝搬する光のモード形状を前記アレイ導波路のモード形状と略一致させる屈折率分布を有するように形成されることを特徴とするものである。

【００１２】
請求項６記載の発明は、請求項５記載のものにおいて、前記入力側スラブ導波路および／または前記出力側スラブ導波路が、紫外線レーザーにより部分的にコアの屈折率を変化させて所望の屈折率分布を有するように形成されることを特徴とするものである。
【００１３】
請求項７記載の発明は、請求項６記載のものにおいて、前記入力側スラブ導波路および／または前記出力側スラブ導波路が、屈折率を高くしたい部分以外をマスクし、ＡｒＦエキシマレーザーまたはＫｒＦエキシマレーザーを照射することにより所望の屈折率変化および屈折率分布を有するように形成されることを特徴とするものである。
【００１４】
請求項８記載の発明は、請求項５〜７のいずれかに記載のものにおいて、前記入力導波路および／または前記出力導波路が、基板上にＧｅ、Ｐ或いはＢ等のフォトリフラクティブ効果を有するドーパントをドープしたコアをそのコアよりも屈折率の小さいクラッドで埋め込んで単一モードのチャネル導波路として形成されることを特徴とするものである。
【００１５】
【発明の実施の形態】
以下、本発明の一実施形態を添付図面に基づいて詳述する。
【００１６】
図１Ａおよび図１Ｂにおいて、１は石英等からなる基板を示している。この基板１上には、波長分割多重光信号を入力する複数本の入力導波路２と、波長分割多重光信号を合波して出力する出力導波路３と、所定の導波路長差△Ｌを有する複数本の導波路からなるアレイ導波路５と、入力導波路２とアレイ導波路５とを接続する入力側スラブ導波路４と、出力導波路３とアレイ導波路５とを接続する出力側スラブ導波路７とを備えて構成されている。
【００１７】
本実施形態では、入力側スラブ導波路４の出力部４Ａに屈折率がほかの部分に比べて高い屈折率変化領域６が形成され、この入力側スラブ導波路４が所望の屈折率分布を有するように形成されている。
【００１８】
上記屈折率変化領域６は、入力側スラブ導波路４のそのほかの部分をマスクした上で、屈折率変化領域６の光伝搬のモード形状が、アレイ導波路５のモード形状に略一致するように、例えばＡｒＦエキシマレーザーまたはＫｒＦエキシマレーザー等の紫外線レーザーを、入力側スラブ導波路４に照射することで形成される。この屈折率変化領域６が、上記所望の屈折率変化および屈折率分布を有するように、紫外線レーザーの照射時間およびパワーを調整する。
【００１９】
つぎに、動作を説明する。
【００２０】
図１において、入力導波路２から入力した光は、入力側スラブ導波路４により放射され、ガウス形の光伝搬のモード形状を拡大させながら導波する。ここを伝搬する光は、屈折率がほかの部分に比べて高い屈折率変化領域６に入射すると、位相が変化しその屈折率分布と屈折率差により入力側スラブ導波路４の出力部４Ａのモード形状を変形させる。このときのモード形状はアレイ導波路５の入力部５Ａのモード形状に一致させ、このアレイ導波路５を進んだ光は、出力側スラブ導波路７に入射し出力導波路３に集光し出力される。
【００２１】
本実施形態では、入力側スラブ導波路４の出力部４Ａのモード形状を、アレイ導波路５の入力部５Ａのモード形状に一致させることにより、ＡＷＧ型合分波器の損失を低減することができる。
【００２２】
スラブ導波路４のモード形状は、紫外線レーザーを照射することによるＧｅ、Ｐ或いはＢ等のフォトリフラクティブ効果を有するドーパントをドープしたコアの屈折率変化を利用し、スラブ導波路内の屈折率分布は紫外線レーザーを照射する際、マスクを用いることで実現するため、簡単な構成で実現することができ、その製造コストの上昇が抑制される。
【００２３】
また、アレイ導波路５の間隔Ｌ２は、従来の図２に示すものと略同等の比較的広い間隔で形成されている。従って、スラブ導波路出力部４Ａのアレイ導波路間隔Ｌ３が狭くなりすぎることがなく、オーバークラッドの埋め込みが、従来の図３に示すものと比較して容易になる。
【００２４】
以上、一実施形態に基づいて本発明を説明したが、本発明は、これに限定されるものでないことは明らかである。
【００２５】
例えば、入力側スラブ導波路４に、屈折率がほかの部分に比べて高い屈折率変化領域６を形成した例を示したが、出力側スラブ導波路７にも、上記と同様構成の屈折率変化領域９を形成することが望ましい。
【００２６】
また、入力導波路２および／または出力導波路３は、基板１上に矩形状のＧｅ、Ｐ或いはＢ等のフォトリフラクティブ効果を有するドーパントをドープしたコアを、そのコアよりも屈折率の小さいオーバークラッドで埋め込んで単一モードのチャネル導波路として形成することが望ましい。
【００２７】
【発明の効果】
本発明では、スラブ導波路出力部のモード形状をアレイ導波路入力部のモード形状にあわせることができるため、アレイ導波路の間隔にこだわらず波長合分波器の結合損失を低減することができる。
【図面の簡単な説明】
【図１】Ａは本発明によるアレイ導波路型光波長合分波器の一実施形態を示す平面図、Ｂはその一部拡大図である。
【図２】Ａは従来のアレイ導波路型光波長合分波器を示す平面図、Ｂはその一部拡大図である。
【図３】Ａは従来のアレイ導波路型光波長合分波器を示す平面図、Ｂはその一部拡大図である。
【符号の説明】
１ 基板
２ 入力導波路
３ 出力導波路
４ 入力側スラブ導波路
５ アレイ導波路
６ 屈折率変化領域
７ 出力側スラブ導波路[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a multiplexer / demultiplexer for spatially demultiplexing or combining selected wavelengths, and more particularly to an arrayed waveguide type optical wavelength multiplexer / demultiplexer and a method of manufacturing the same.
[0002]
[Prior art]
In general, as shown in FIG. 2, a plurality of input waveguides 2 for inputting a wavelength division multiplexed optical signal, an output waveguide 3 for multiplexing and outputting the wavelength division multiplexed optical signal, , An input slab waveguide 4 connecting the input waveguide 2 and the array waveguide 5, an output waveguide 3 and an array waveguide. There is known an arrayed waveguide type optical wavelength multiplexer / demultiplexer using an AWG (arrayed waveguide grating) including an output side slab waveguide 7 connected to a waveguide 5.
[0003]
In this type, the light incident from the input waveguide 2 enters the input side slab waveguide 4 and radiates, and is coupled to the array waveguide 5. However, at this time, since the light transmission mode shapes of the slab waveguide output section 4A and the array waveguide input section 5A are generally different, all the incident light is not coupled, and a coupling loss occurs.
[0004]
For this reason, conventionally, as shown in FIG. 3, the distance L between the arrayed waveguides 5 is narrowed, and the mode of light propagation between the arrayed waveguide input section 5A and the slab waveguide output section 4A is devised so as to match the AWG. The loss of the type multiplexer / demultiplexer is reduced.
[0005]
[Problems to be solved by the invention]
However, in the conventional configuration, there is a problem that the array waveguide interval L1 of the slab waveguide output section 4A is too narrow, and it is very difficult to embed the over cladding. .
[0006]
Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art, to match the mode shape of the slab waveguide output section to the mode shape of the array waveguide input section, and to reduce the loss regardless of the array waveguide interval. An object of the present invention is to provide an arrayed waveguide type optical wavelength multiplexer / demultiplexer which can be achieved and a method of manufacturing the same.
[0007]
[Means for Solving the Problems]
According to the first aspect of the present invention, a plurality of input waveguides for inputting a wavelength division multiplexed optical signal, an output waveguide for multiplexing and outputting the wavelength division multiplexed optical signal, and a predetermined waveguide length are provided on a substrate. An array waveguide including a plurality of waveguides having a difference, an input side slab waveguide connecting the input waveguide and the array waveguide, and an output side connecting the output waveguide and the array waveguide. An array waveguide type optical wavelength multiplexer / demultiplexer including a slab waveguide, wherein the input-side slab waveguide and / or the output-side slab waveguide has a mode shape of propagating light set to a mode shape of the array waveguide. It is characterized in that it is formed so as to have a refractive index distribution that substantially matches .
[0008]
According to a second aspect of the present invention, in the first aspect, the input side slab waveguide and / or the output side slab waveguide partially change a refractive index of a core by an ultraviolet laser to obtain a desired refraction. It is characterized by being formed to have a rate distribution.
[0009]
According to a third aspect of the present invention, in the second aspect, the input-side slab waveguide and / or the output-side slab waveguide mask portions other than a portion where a refractive index is desired to be increased, and use an ArF excimer laser or a KrF excimer. It is characterized by being formed so as to have a desired refractive index change and refractive index distribution by irradiating a laser.
[0010]
According to a fourth aspect of the present invention, in any one of the first to third aspects, the input waveguide and / or the output waveguide has a photorefractive effect such as Ge, P or B on a substrate. The present invention is characterized in that a core doped with a dopant is embedded in a clad having a smaller refractive index than that of the core to form a single-mode channel waveguide.
[0011]
According to a fifth aspect of the present invention, a plurality of input waveguides for inputting a wavelength division multiplexed optical signal, an output waveguide for multiplexing and outputting the wavelength division multiplexed optical signal, and a predetermined waveguide length are provided on the substrate. An array waveguide including a plurality of waveguides having a difference, an input side slab waveguide connecting the input waveguide and the array waveguide, and an output side connecting the output waveguide and the array waveguide. A method for manufacturing an arrayed waveguide optical wavelength multiplexer / demultiplexer including a slab waveguide, wherein the input-side slab waveguide and / or the output-side slab waveguide change the mode shape of propagating light to the array waveguide. It is characterized by being formed so as to have a refractive index distribution that substantially matches the mode shape .

[0012]
According to a sixth aspect of the present invention, in the fifth aspect, the input side slab waveguide and / or the output side slab waveguide partially change a refractive index of a core by an ultraviolet laser to obtain a desired refraction. It is characterized by being formed to have a rate distribution.
[0013]
According to a seventh aspect of the present invention, in the sixth aspect, the input-side slab waveguide and / or the output-side slab waveguide mask a portion other than a portion whose refractive index is desired to be increased, and use an ArF excimer laser or a KrF excimer. It is characterized by being formed so as to have a desired refractive index change and refractive index distribution by irradiating a laser.
[0014]
The invention according to claim 8 is the device according to any one of claims 5 to 7, wherein the input waveguide and / or the output waveguide has a photorefractive effect such as Ge, P or B on a substrate. A core doped with a dopant is embedded in a cladding having a smaller refractive index than the core to form a single-mode channel waveguide.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
[0016]
1A and 1B, reference numeral 1 denotes a substrate made of quartz or the like. On this substrate 1, a plurality of input waveguides 2 for inputting a wavelength division multiplexed optical signal, an output waveguide 3 for multiplexing and outputting the wavelength division multiplexed optical signal, and a predetermined waveguide length difference ΔL , An input slab waveguide 4 connecting the input waveguide 2 and the array waveguide 5, and an output connecting the output waveguide 3 and the array waveguide 5. And a side slab waveguide 7.
[0017]
In this embodiment, a refractive index change region 6 having a higher refractive index than the other portions is formed in the output section 4A of the input slab waveguide 4, and the input slab waveguide 4 has a desired refractive index distribution. It is formed as follows.
[0018]
The refractive index change region 6 is formed such that the other portion of the input side slab waveguide 4 is masked so that the mode shape of light propagation in the refractive index change region 6 substantially matches the mode shape of the arrayed waveguide 5. For example, it is formed by irradiating the input side slab waveguide 4 with an ultraviolet laser such as an ArF excimer laser or a KrF excimer laser. The irradiation time and power of the ultraviolet laser are adjusted so that the refractive index change region 6 has the above-described desired refractive index change and refractive index distribution.
[0019]
Next, the operation will be described.
[0020]
In FIG. 1, light input from an input waveguide 2 is radiated by an input side slab waveguide 4 and is guided while expanding a Gaussian light propagation mode shape. When the light propagating here enters the refractive index change region 6 where the refractive index is higher than the other portions, the phase changes, and the refractive index distribution and the refractive index difference cause the output portion 4A of the input side slab waveguide 4 to emit light. Deform the mode shape. The mode shape at this time matches the mode shape of the input section 5A of the arrayed waveguide 5, and the light traveling through the arrayed waveguide 5 enters the output side slab waveguide 7, is condensed on the output waveguide 3, and is output. Is done.
[0021]
In the present embodiment, the loss of the AWG type multiplexer / demultiplexer can be reduced by matching the mode shape of the output portion 4A of the input side slab waveguide 4 with the mode shape of the input portion 5A of the arrayed waveguide 5. it can.
[0022]
The mode shape of the slab waveguide 4 uses a change in the refractive index of a core doped with a dopant having a photorefractive effect such as Ge, P or B by irradiating an ultraviolet laser, and the refractive index distribution in the slab waveguide is Irradiation with an ultraviolet laser can be realized by using a mask, so that it can be realized with a simple configuration, and an increase in manufacturing cost is suppressed.
[0023]
The interval L2 between the arrayed waveguides 5 is formed at a relatively wide interval substantially equal to that shown in FIG. Therefore, the array waveguide interval L3 of the slab waveguide output section 4A does not become too narrow, and the overcladding can be easily buried as compared with the conventional one shown in FIG.
[0024]
As described above, the present invention has been described based on one embodiment, but it is apparent that the present invention is not limited to this.
[0025]
For example, although the example in which the refractive index change region 6 having a higher refractive index than the other portions is formed in the input side slab waveguide 4 is shown, the output side slab waveguide 7 also has the same refractive index as the above. It is desirable to form the change region 9.
[0026]
In addition, the input waveguide 2 and / or the output waveguide 3 may be formed by forming a rectangular core on a substrate 1 doped with a dopant having a photorefractive effect such as Ge, P, or B into a substrate having a smaller refractive index than the core. It is desirable to form a single-mode channel waveguide by embedding with a clad.
[0027]
【The invention's effect】
According to the present invention, since the mode shape of the slab waveguide output section can be matched with the mode shape of the array waveguide input section, the coupling loss of the wavelength multiplexer / demultiplexer can be reduced regardless of the distance between the array waveguides. .
[Brief description of the drawings]
FIG. 1A is a plan view showing an embodiment of an arrayed waveguide type optical wavelength multiplexer / demultiplexer according to the present invention, and FIG. 1B is a partially enlarged view thereof.
FIG. 2A is a plan view showing a conventional arrayed waveguide type optical wavelength multiplexer / demultiplexer, and FIG. 2B is a partially enlarged view thereof.
3A is a plan view showing a conventional arrayed waveguide type optical wavelength multiplexer / demultiplexer, and FIG. 3B is a partially enlarged view thereof.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Substrate 2 Input waveguide 3 Output waveguide 4 Input side slab waveguide 5 Array waveguide 6 Refractive index change area 7 Output side slab waveguide

Claims (8)

基板上に、波長分割多重光信号を入力する複数本の入力導波路と、波長分割多重光信号を合波して出力する出力導波路と、所定の導波路長差を有する複数本の導波路からなるアレイ導波路と、前記入力導波路と前記アレイ導波路とを接続する入力側スラブ導波路と、前記出力導波路と前記アレイ導波路とを接続する出力側スラブ導波路とを備えるアレイ導波路型光波長合分波器において、前記入力側スラブ導波路および／または前記出力側スラブ導波路は、伝搬する光のモード形状を前記アレイ導波路のモード形状と略一致させる屈折率分布を有するように形成されていることを特徴とするアレイ導波路型光波長合分波器。A plurality of input waveguides for inputting a wavelength division multiplexed optical signal, an output waveguide for multiplexing and outputting the wavelength division multiplexed optical signal, and a plurality of waveguides having a predetermined waveguide length difference on a substrate An array waveguide comprising: an array waveguide comprising: an input side slab waveguide connecting the input waveguide and the array waveguide; and an output side slab waveguide connecting the output waveguide and the array waveguide. In the waveguide type optical wavelength multiplexer / demultiplexer, the input side slab waveguide and / or the output side slab waveguide have a refractive index distribution that makes a mode shape of propagating light substantially coincide with a mode shape of the arrayed waveguide. An arrayed waveguide type optical wavelength multiplexer / demultiplexer characterized by being formed as described above. 前記入力側スラブ導波路および／または前記出力側スラブ導波路が、紫外線レーザーにより部分的に屈折率を変化させて所望の屈折率分布を有するように形成されていることを特徴とする請求項１記載のアレイ導波路型光波長合分波器。The input-side slab waveguide and / or the output-side slab waveguide are formed so as to have a desired refractive index distribution by partially changing a refractive index by an ultraviolet laser. An arrayed waveguide optical wavelength multiplexer / demultiplexer according to any one of the preceding claims. 前記入力側スラブ導波路および／または前記出力側スラブ導波路が、屈折率を高くしたい部分以外をマスクし、ＡｒＦエキシマレーザーまたはＫｒＦエキシマレーザーを照射することにより所望の屈折率変化および屈折率分布を有するように形成されていることを特徴とする請求項２記載のアレイ導波路型光波長合分波器。The input-side slab waveguide and / or the output-side slab waveguide mask a portion other than the portion where the refractive index is to be increased, and irradiate an ArF excimer laser or a KrF excimer laser to obtain a desired change in the refractive index and the refractive index distribution. 3. An arrayed waveguide optical wavelength multiplexer / demultiplexer according to claim 2, wherein said optical wavelength multiplexer / demultiplexer is formed so as to have. 前記入力導波路および／または前記出力導波路が、基板上にＧｅ、Ｐ或いはＢ等のフォトリフラクティブ効果を有するドーパントをドープしたコアをそのコアよりも屈折率の小さいクラッドで埋め込んで単一モードのチャネル導波路として形成されていることを特徴とする請求項１〜３のいずれかに記載のアレイ導波路型光波長合分波器。The input waveguide and / or the output waveguide may be formed by embedding a core doped with a dopant having a photorefractive effect such as Ge, P or B on a substrate with a cladding having a smaller refractive index than that of the core. The array waveguide type optical wavelength multiplexer / demultiplexer according to any one of claims 1 to 3, which is formed as a channel waveguide. 基板上に、波長分割多重光信号を入力する複数本の入力導波路と、波長分割多重光信号を合波して出力する出力導波路と、所定の導波路長差を有する複数本の導波路からなるアレイ導波路と、前記入力導波路と前記アレイ導波路とを接続する入力側スラブ導波路と、前記出力導波路と前記アレイ導波路とを接続する出力側スラブ導波路とを備えるアレイ導波路型光波長合分波器の製造方法において、前記入力側スラブ導波路および／または前記出力側スラブ導波路は、伝搬する光のモード形状を前記アレイ導波路のモード形状と略一致させる屈折率分布を有するように形成されることを特徴とするアレイ導波路型光波長合分波器の製造方法。A plurality of input waveguides for inputting a wavelength division multiplexed optical signal, an output waveguide for multiplexing and outputting the wavelength division multiplexed optical signal, and a plurality of waveguides having a predetermined waveguide length difference on a substrate An array waveguide comprising: an array waveguide comprising: an input side slab waveguide connecting the input waveguide and the array waveguide; and an output side slab waveguide connecting the output waveguide and the array waveguide. In the method of manufacturing a waveguide type optical wavelength multiplexer / demultiplexer, the input side slab waveguide and / or the output side slab waveguide have a refractive index that makes a mode shape of propagating light substantially coincide with a mode shape of the arrayed waveguide. A method for manufacturing an arrayed waveguide optical wavelength multiplexer / demultiplexer, characterized in that the optical wavelength multiplexer / demultiplexer is formed to have a distribution . 前記入力側スラブ導波路および／または前記出力側スラブ導波路が、紫外線レーザーにより部分的に屈折率を変化させて所望の屈折率分布を有するように形成されることを特徴とする請求項５記載のアレイ導波路型光波長合分波器の製造方法。6. The input-side slab waveguide and / or the output-side slab waveguide is formed so as to have a desired refractive index distribution by partially changing a refractive index by an ultraviolet laser. Of manufacturing an arrayed waveguide type optical wavelength multiplexer / demultiplexer according to (1). 前記入力側スラブ導波路および／または前記出力側スラブ導波路が、屈折率を高くしたい部分以外をマスクし、ＡｒＦエキシマレーザーまたはＫｒＦエキシマレーザーを照射することにより所望の屈折率変化および屈折率分布を有するように形成されることを特徴とする請求項６記載のアレイ導波路型光波長合分波器の製造方法。The input-side slab waveguide and / or the output-side slab waveguide mask a portion other than the portion where the refractive index is to be increased, and irradiate an ArF excimer laser or a KrF excimer laser to obtain a desired change in the refractive index and the refractive index distribution. 7. The method of manufacturing an arrayed waveguide optical wavelength multiplexer / demultiplexer according to claim 6, wherein said optical wavelength multiplexer / demultiplexer is formed. 前記入力導波路および／または前記出力導波路が、基板上にＧｅ、Ｐ或いはＢ等のフォトリフラクティブ効果を有するドーパントをドープしたコアをそのコアよりも屈折率の小さいクラッドで埋め込んで単一モードのチャネル導波路として形成されることを特徴とする請求項５〜７のいずれかに記載のアレイ導波路型光波長合分波器の製造方法。The input waveguide and / or the output waveguide may be formed by embedding a core doped with a dopant having a photorefractive effect such as Ge, P or B on a substrate with a cladding having a smaller refractive index than that of the core. 8. The method according to claim 5, wherein the optical waveguide is formed as a channel waveguide.
JP2000251870A 2000-08-23 2000-08-23 Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same Expired - Fee Related JP3539369B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000251870A JP3539369B2 (en) 2000-08-23 2000-08-23 Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same
US09/934,670 US6643427B2 (en) 2000-08-23 2001-08-23 Waveguide-arrayed optical wavelength multiplexer/demultiplexer and fabrication method of the same
CA002355551A CA2355551A1 (en) 2000-08-23 2001-08-23 Waveguide-arrayed optical wavelength multiplexer/demultiplexer and fabrication method of the same
GB0120563A GB2367381B (en) 2000-08-23 2001-08-23 Waveguide-arrayed optical wavelength multiplexer/demultiplexer and fabrication method of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000251870A JP3539369B2 (en) 2000-08-23 2000-08-23 Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JP2002062444A JP2002062444A (en) 2002-02-28
JP3539369B2 true JP3539369B2 (en) 2004-07-07

Family

ID=18741214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000251870A Expired - Fee Related JP3539369B2 (en) 2000-08-23 2000-08-23 Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same

Country Status (4)

Country Link
US (1) US6643427B2 (en)
JP (1) JP3539369B2 (en)
CA (1) CA2355551A1 (en)
GB (1) GB2367381B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002311264A (en) * 2001-04-16 2002-10-23 Nec Corp Array waveguide grating, array waveguide grating module and optical communication system
US6810167B2 (en) * 2001-10-29 2004-10-26 Fujitsu Limited Wavelength division demultiplexing apparatus
JP2003185865A (en) * 2001-12-20 2003-07-03 Fujitsu Ltd Optical multiplexer/demultiplexer and waveguide type optical coupler
GB2385677A (en) * 2002-02-22 2003-08-27 Bookham Technology Plc Refractive index control of optic waveguide
JP2004013076A (en) 2002-06-11 2004-01-15 Fujitsu Ltd Arrayed waveguide type optical wavelength demultiplexer device
JP3994860B2 (en) * 2002-11-19 2007-10-24 富士通株式会社 Arrayed waveguide grating
JP4150374B2 (en) 2003-02-26 2008-09-17 富士通株式会社 Arrayed waveguide type wavelength multiplexer / demultiplexer
JP5473868B2 (en) 2010-11-09 2014-04-16 Ｎｔｔエレクトロニクス株式会社 Optical waveguide and arrayed waveguide diffraction grating
US9091827B2 (en) 2012-07-09 2015-07-28 Luxtera, Inc. Method and system for grating couplers incorporating perturbed waveguides
US10782479B2 (en) * 2013-07-08 2020-09-22 Luxtera Llc Method and system for mode converters for grating couplers

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5805751A (en) * 1995-08-29 1998-09-08 Arroyo Optics, Inc. Wavelength selective optical couplers
FR2743234B1 (en) * 1995-12-28 1998-01-23 Alcatel Optronics WAVELENGTH DEMULTIPLEXER
JP2870499B2 (en) 1996-08-02 1999-03-17 日立電線株式会社 Optical wavelength multiplexer / demultiplexer
US5745618A (en) * 1997-02-04 1998-04-28 Lucent Technologies, Inc. Optical device having low insertion loss
US6058233A (en) * 1998-06-30 2000-05-02 Lucent Technologies Inc. Waveguide array with improved efficiency for wavelength routers and star couplers in integrated optics
US6195482B1 (en) * 1998-12-29 2001-02-27 Lucent Technologies Inc. Waveguide grating router
KR100293954B1 (en) 1999-05-11 2001-06-15 윤종용 Low loss awg demultiplexer with flat spectral response
JP4250811B2 (en) * 1999-06-25 2009-04-08 日立電線株式会社 Optical wavelength multiplexer / demultiplexer
US6493487B1 (en) * 2000-07-14 2002-12-10 Applied Wdm, Inc. Optical waveguide transmission devices
US6434303B1 (en) * 2000-07-14 2002-08-13 Applied Wdm Inc. Optical waveguide slab structures

Also Published As

Publication number Publication date
GB0120563D0 (en) 2001-10-17
GB2367381A (en) 2002-04-03
JP2002062444A (en) 2002-02-28
CA2355551A1 (en) 2002-02-23
GB2367381B (en) 2004-08-04
US20020064339A1 (en) 2002-05-30
US6643427B2 (en) 2003-11-04

Similar Documents

Publication Publication Date Title
JP3563376B2 (en) Manufacturing method of optical multiplexer / demultiplexer
JP2008293020A (en) Adiabatic waveguide transitions
JP3539369B2 (en) Array waveguide type optical wavelength multiplexer / demultiplexer and method of manufacturing the same
JP3952696B2 (en) Optical coupling structure
JPH08304664A (en) Wavelength demultiplexing element
US7046881B2 (en) Manufacturing method for optical coupler/splitter and method for adjusting optical characteristics of planar lightwave circuit device
JP2002323626A (en) Optical wavelength multiplexing and demultiplexing device and optical multiplexing and demultiplexing system
JP6286457B2 (en) Optical multiplexing / demultiplexing device and arrayed waveguide diffraction grating type optical wavelength filter
JP4377848B2 (en) Spot size converter
US20030118284A1 (en) Optical multiplexer/demultiplexer and waveguide type optical coupler
JP3448518B2 (en) Array waveguide diffraction grating
JPH09243856A (en) Device for stabilizing optical filter by wavelength and its operation
JP2001174653A (en) Array waveguide grating
EP1130424A3 (en) Optical waveguide circuit
JP2007072133A (en) Waveguide type band rejection filter
JP3912250B2 (en) Optical multiplexer / demultiplexer
JP2000171663A (en) Clad mode coupler, add/drop filter formed by bragg fiber grating and multiplexer
JP2004170627A (en) Planar waveguide and array waveguide type grating
JPH1068833A (en) Optical waveguide and its production as well as output circuit
US8086105B2 (en) Wavelength division multiplexer/demultiplexer having flat wavelength response
KR100289052B1 (en) Integrated optical coupler using phase-lattice structure
JP3937218B2 (en) Programmable optical circuit
JP2003329861A (en) Optical waveguide, method for manufacturing optical waveguide and array waveguide type light wavelength multiplexer/demultiplexer
JP3137165B2 (en) Manufacturing method of optical waveguide circuit
JP2002202420A (en) Optical wavelength coupling/branching device

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20031209

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040205

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040302

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040315

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090402

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100402

Year of fee payment: 6

LAPS Cancellation because of no payment of annual fees