JP3536202B2 - Light switch - Google Patents
Light switchInfo
- Publication number
- JP3536202B2 JP3536202B2 JP2000073618A JP2000073618A JP3536202B2 JP 3536202 B2 JP3536202 B2 JP 3536202B2 JP 2000073618 A JP2000073618 A JP 2000073618A JP 2000073618 A JP2000073618 A JP 2000073618A JP 3536202 B2 JP3536202 B2 JP 3536202B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- movable electrode
- locking
- fixed electrode
- optical switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は光通信システム等
において用いられる光スイッチに関し、特に空間的に光
路をスイッチングする光スイッチに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical switch used in an optical communication system or the like, and more particularly to an optical switch for spatially switching an optical path.
【０００２】[0002]
【従来の技術】この種の光スイッチの従来構造の一例を
図７に示す。固定電極板１１上にその板面と平行に可動
電極板１２が対向されて配置される。可動電極板１２は
この例では図に示したように方形の各辺の中央部が切り
欠かれたような形状とされており、この切り欠き部にお
いてそれぞれフレクチャア部１３に連結支持され、それ
らフレクチャア部１３の他端がそれぞれアンカー部１４
を介して固定電極板１１に結合されたものとなってい
る。2. Description of the Related Art FIG. 7 shows an example of a conventional structure of this type of optical switch. The movable electrode plate 12 is arranged on the fixed electrode plate 11 so as to face the plate surface in parallel with the plate surface. In this example, the movable electrode plate 12 has a shape in which the central portion of each side of the rectangle is cut out as shown in the figure, and the cutout portions are connected to and supported by the flexure parts 13 respectively. The other ends of the parts 13 are anchor parts 14 respectively.
It is connected to the fixed electrode plate 11 via.
【０００３】フレクチャア部１３は図に示したように幅
狭とされて繰り返し折れ曲がった形状とされ、つまりジ
グザグ状をなすように形成されている。可動電極板１２
はこのような４本のフレクチャア部１３によって支持さ
れることにより、固定電極板１１の板面に対して垂直方
向に変位可能とされており、この可動電極板１２の中央
部上面にマイクロミラー１５が直立形成されている。固
定電極板１１には例えばシリコン基板が用いられ、この
シリコン基板上に可動電極板１２，フレクチャア部１３
及びアンカー部１４が薄膜形成技術を使用して例えばポ
リシリコン膜により一体に形成される。マイクロミラー
１５は例えばメッキ技術を使用して形成され、材料とし
ては金などが用いられる。なお、マイクロミラー１５を
レジストで構成し、その表面に金蒸着膜を設けるといっ
た構成も採用される。As shown in the figure, the flexure portion 13 has a narrow width and is repeatedly bent, that is, formed in a zigzag shape. Movable electrode plate 12
Is supported by such four flexure parts 13 so that it can be displaced in the direction perpendicular to the plate surface of the fixed electrode plate 11, and the micro mirror 15 is placed on the upper surface of the central part of the movable electrode plate 12. Is formed upright. For example, a silicon substrate is used as the fixed electrode plate 11, and the movable electrode plate 12 and the flexure part 13 are provided on the silicon substrate.
The anchor portion 14 is integrally formed of, for example, a polysilicon film using a thin film forming technique. The micro mirror 15 is formed by using, for example, a plating technique, and gold or the like is used as a material. The micromirror 15 may be made of resist, and a gold vapor deposition film may be provided on the surface of the resist.
【０００４】上記のような構造とされた光スイッチ１６
においては固定電極板１１と可動電極板１２との間に電
圧を印加してそれら電極板間に互いに吸引する静電気力
を発生させることにより、その静電気力によって可動電
極板１２が固定電極板１１側に駆動変位され、これによ
りマイクロミラー１５を固定電極板１１の板面に対して
垂直方向に変位させることができるため、固定電極板１
１の板面と平行方向から入射する光の光路切り換えを行
うことができるものとなっている。The optical switch 16 having the above structure
In the above, by applying a voltage between the fixed electrode plate 11 and the movable electrode plate 12 to generate an electrostatic force that attracts each other between these electrode plates, the movable electrode plate 12 causes the movable electrode plate 12 to move toward the fixed electrode plate 11 side. Since the micro mirror 15 can be displaced in the direction perpendicular to the plate surface of the fixed electrode plate 11, the fixed electrode plate 1
It is possible to switch the optical path of the light incident from the direction parallel to the plate surface of No. 1.
【０００５】図７Ａ中、１７ａ〜１７ｃは例えばこの光
スイッチ１６の周囲に配置される光ファイバを示し、１
８は光スイッチ１６に入射される入射光、１９ａ，１９
ｂは出射光を示す。光路にマイクロミラー１５が挿入さ
れている時は入射光１８はマイクロミラー１５によって
反射され、その出射光１９ａは光ファイバ１７ｂに入射
される。一方、光路にマイクロミラー１５が挿入されて
いない時は入射光１８はそのまま進行して出射光１９ｂ
となり、光ファイバ１７ｃに入射される。In FIG. 7A, reference numerals 17a to 17c denote, for example, optical fibers arranged around the optical switch 16.
8 is incident light that is incident on the optical switch 16, and 19a and 19a.
b shows emitted light. When the micro mirror 15 is inserted in the optical path, the incident light 18 is reflected by the micro mirror 15, and the emitted light 19a is incident on the optical fiber 17b. On the other hand, when the micro mirror 15 is not inserted in the optical path, the incident light 18 advances as it is and the outgoing light 19b.
And enters the optical fiber 17c.
【０００６】[0006]
【発明が解決しようとする課題】ところで、上述した従
来の光スイッチ１６においては、静電気力により可動電
極板１２を固定電極板１１側に駆動変位させ、光ファイ
バ１７ｃに出射光１９ｂが出力される状態となっている
時に、例えば停電等が発生して静電気力が消失すると、
可動電極板１２はフレクチャア部１３の弾性復帰力によ
り引っ張られて上方に変位してしまうため、マイクロミ
ラー１５が光路に挿入されて出射光が１９ｂから１９ａ
に切り換わってしまい、つまりスイッチ状態が切り換わ
ってしまうといった問題が発生する。By the way, in the above-mentioned conventional optical switch 16, the movable electrode plate 12 is driven and displaced to the fixed electrode plate 11 side by the electrostatic force, and the emitted light 19b is output to the optical fiber 17c. If the static electricity disappears due to a power failure, etc.
The movable electrode plate 12 is pulled upward by the elastic restoring force of the flexure portion 13 and is displaced upward, so that the micro mirror 15 is inserted into the optical path and the emitted light is emitted from 19b to 19a.
However, there is a problem that the switch state is switched.
【０００７】この発明の目的はこの問題に鑑み、停電等
により静電気力が消失しても固定電極板側に変位してい
る状態を可動電極板が維持し、つまり可動電極板が上昇
しないようにした光スイッチを提供することにある。In view of this problem, an object of the present invention is to keep the movable electrode plate in a state of being displaced to the fixed electrode plate side even if the electrostatic force disappears due to a power failure or the like, that is, to prevent the movable electrode plate from rising. It is to provide the optical switch.
【０００８】[0008]
【課題を解決するための手段】請求項１の発明によれ
ば、固定電極板と、その固定電極板と対向配置され、フ
レクチャア部及びアンカー部を介して固定電極板に結合
された第１の可動電極板と、その第１の可動電極板上に
直立形成されたマイクロミラーとを備え、静電気力によ
り第１の可動電極板を固定電極板の板面に対して垂直方
向に駆動してマイクロミラーを変位させることにより入
射する光の光路切り換えを行う光スイッチにおいて、固
定電極板上に上記駆動により固定電極板側に変位した第
１の可動電極板を係止する係止爪を有し、その係止爪を
弾性変形させて上記係止を解除する第２の可動電極板を
有するものとされる。According to the invention of claim 1, the fixed electrode plate and the first fixed electrode plate are arranged to face the fixed electrode plate and are connected to the fixed electrode plate through the flexure portion and the anchor portion. A movable electrode plate and a micromirror that is formed upright on the first movable electrode plate are provided, and the first movable electrode plate is driven by an electrostatic force in a direction perpendicular to the plate surface of the fixed electrode plate so as to be micro. In an optical switch for switching the optical path of incident light by displacing a mirror, a locking claw for locking the first movable electrode plate displaced to the fixed electrode plate side by the above drive is provided on the fixed electrode plate, A second movable electrode plate for elastically deforming the locking claw to release the locking is provided.
【０００９】請求項２の発明では請求項１の発明におい
て、係止爪は固定電極板上に近接して直立形成された一
対の可撓部と、それら可撓部の先端に下面が互いに外向
きに突出され、上面が互いの外側に向かって下降する傾
斜面とされて形成された一対の係止部とよりなるものと
され、第１の可動電極板は係止孔を具備するものとされ
て上記駆動による変位に伴い、その係止孔に上記係止爪
が押し込まれて係止される構造とされ、第２の可動電極
板はマイクロミラーを通す孔と係止解除孔とを備え、第
１の可動電極板の上方に配置されて静電気力により固定
電極板側に駆動変位されるものとされ、その変位に伴い
係止解除孔の対向する内縁が上記両傾斜面を押圧して上
記一対の係止部を閉じさせることにより第１の可動電極
板の係止を解除する構造とされる。According to a second aspect of the present invention, in the first aspect of the present invention, the locking claws are a pair of flexible portions that are vertically formed close to each other on the fixed electrode plate, and the lower surfaces of the flexible portions are outside each other at the tips thereof. The first movable electrode plate is provided with a locking hole, and the upper surface of the first movable electrode plate has a locking hole. With the displacement caused by the driving, the locking claw is pushed into the locking hole and locked, and the second movable electrode plate has a hole through which the micromirror is passed and a locking release hole. , Disposed above the first movable electrode plate and driven and displaced toward the fixed electrode plate side by an electrostatic force, and the inner edges of the lock release holes which are opposed to each other press the both inclined surfaces with the displacement. The locking of the first movable electrode plate is released by closing the pair of locking portions. It is a structure.
【００１０】請求項３の発明では請求項１の発明におい
て、係止爪は固定電極板上に直立形成された可撓部と、
その可撓部に鉤状をなすように突設された係止部とより
なり、その係止部の上面は突端に向かって下降する傾斜
面とされて、第１の可動電極板の両端縁に対応する位置
に係止部が互いに内向きとされてそれぞれ配置され、第
１の可動電極板は上記駆動による変位に伴い、上記両係
止爪間に押し込まれて係止される構造とされ、第２の可
動電極板はマイクロミラーを通す孔を備え、第１の可動
電極板の上方に配置されて静電気力により固定電極板側
に駆動変位されるものとされ、その変位に伴い両端縁が
上記両係止爪の傾斜面を押圧して係止部を互いに開かせ
ることにより第１の可動電極板の係止を解除する構造と
される。According to a third aspect of the present invention, in the first aspect of the present invention, the locking claw includes a flexible portion formed upright on the fixed electrode plate,
The flexible portion has a hooking portion projecting in a hook shape, and the upper surface of the hooking portion is an inclined surface that descends toward the projecting end, and both end edges of the first movable electrode plate are formed. The locking portions are arranged inwardly at positions corresponding to, and the first movable electrode plate is pushed between the locking claws and locked by the displacement caused by the driving. The second movable electrode plate is provided with holes through which the micromirrors pass, and is disposed above the first movable electrode plate and driven and displaced toward the fixed electrode plate side by electrostatic force. Has a structure in which the locking of the first movable electrode plate is released by pressing the inclined surfaces of both the locking claws to open the locking portions to each other.
【００１１】[0011]
【発明の実施の形態】この発明の実施の形態を図面を参
照して実施例により説明する。なお、図７と対応する部
分には同一符号を付し、その説明を省略する。図１はこ
の発明の一実施例を示したものであり、図２はその要部
を拡大して示したものである。この例では固定電極板１
１上に静電気力により駆動されて固定電極板１１側に変
位した可動電極板１２を係止する係止爪２１が設けら
れ、さらにその係止爪２１を弾性変形させて可動電極板
１２の係止を解除する第２の可動電極板２２が設けられ
る。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described by way of examples with reference to the drawings. The parts corresponding to those in FIG. 7 are designated by the same reference numerals, and the description thereof will be omitted. FIG. 1 shows an embodiment of the present invention, and FIG. 2 shows an enlarged main part thereof. In this example, fixed electrode plate 1
1 is provided with a locking claw 21 that locks the movable electrode plate 12 which is driven by an electrostatic force and is displaced toward the fixed electrode plate 11 side. Further, the locking claw 21 is elastically deformed to engage the movable electrode plate 12. A second movable electrode plate 22 that releases the stop is provided.
【００１２】係止爪２１は図２に拡大して示したように
固定電極板１１上に近接して直立形成された一対の可撓
部２３ａ，２４ａと、それら可撓部２３ａ，２４ａの先
端に、下面が互いに外向きに突出され、上面が互いの外
側に向かって下降する傾斜面とされて形成された一対の
係止部２３ｂ，２４ｂとよりなるものとされる。マイク
ロミラー１５が搭載されている可動電極板（第１可動電
極板）１２には係止爪２１と対向する位置に矩形状をな
す係止孔２５が設けられる。As shown in the enlarged view of FIG. 2, the locking claw 21 is provided with a pair of flexible portions 23a and 24a which are vertically formed close to each other on the fixed electrode plate 11 and tips of the flexible portions 23a and 24a. In addition, the lower surfaces of the engaging portions 23b and 24b are formed so that the lower surfaces thereof project outwardly and the upper surfaces thereof are inclined surfaces that descend toward the outside. The movable electrode plate (first movable electrode plate) 12 on which the micro mirror 15 is mounted is provided with a rectangular locking hole 25 at a position facing the locking claw 21.
【００１３】一方、第２可動電極板２２は図１に示した
ように第１可動電極板１２の上方に、つまり第１可動電
極板１２を挟んで固定電極板１１と反対側に、その板面
が固定電極板１１と平行とされて配置される。第２可動
電極板２２はこの例では第１可動電極板１２と同様の外
形形状を有するものとされ、また第１可動電極板１２と
同様に、４本のフレクチャア部２６によって支持されて
固定電極板１１の板面と垂直方向に変位可能とされてい
る。On the other hand, the second movable electrode plate 22 is disposed above the first movable electrode plate 12 as shown in FIG. 1, that is, on the side opposite to the fixed electrode plate 11 with the first movable electrode plate 12 interposed therebetween. The surface is arranged parallel to the fixed electrode plate 11. In this example, the second movable electrode plate 22 has an outer shape similar to that of the first movable electrode plate 12, and similarly to the first movable electrode plate 12, the second movable electrode plate 22 is supported by the four flexure portions 26 and fixed electrodes. It is displaceable in the direction perpendicular to the plate surface of the plate 11.
【００１４】各フレクチャア部２６の他端はアンカー部
２７にそれぞれ連結されており、これらアンカー部２７
は例えばＳｉＯ2 膜よりなる絶縁層２８を介してそれぞ
れアンカー部１４上に搭載された構造となっている。な
お、この例では各フレクチャア部２６もフレクチャア部
１３と同様の形状を有するものとされている。第２可動
電極板２２，フレクチャア部２６及びアンカー部２７は
第１可動電極板１２，フレクチャア部１３及びアンカー
部１４と同様に、例えばポリシリコン膜等により一体に
形成される。The other ends of the flexure parts 26 are connected to anchor parts 27, respectively.
Are mounted on the anchor portion 14 via an insulating layer 28 made of, for example, a SiO 2 film. In this example, each of the flexure parts 26 has the same shape as the flexure part 13. The second movable electrode plate 22, the flexure portion 26 and the anchor portion 27 are integrally formed of, for example, a polysilicon film or the like, like the first movable electrode plate 12, the flexure portion 13 and the anchor portion 14.
【００１５】第２可動電極板２２には係止孔２５と対向
する位置に係止解除孔２９が形成されており、またマイ
クロミラー１５を通すための孔３１が形成されている。
マイクロミラー１５はこの孔３１を介して第２可動電極
板２２上に突出されている。ここで、係止爪２１，係止
孔２５及び係止解除孔２９の寸法関係（大きさの関係）
について説明する。今、図２Ｂ中に示したように、係止
爪２１の両可撓部２３ａ，２４ａ間の間隙をａ，両係止
部２３ｂ，２４ｂの互いの外側突端間の寸法をｂ，係止
孔２５の幅をｃ，係止解除孔２９の幅をｄ，可撓部２３
ａ，２４ａの長さ（高さ）をｅ，第１可動電極板１２の
厚さをｆ，両可撓部２３ａ，２４ａの互いの外側面間の
寸法をｇとする時、これらａ〜ｇは次のような関係を満
たすように選定される。なお、係止爪２１，係止孔２５
及び係止解除孔２９の各中心線は一致されている。The second movable electrode plate 22 is formed with a lock release hole 29 at a position facing the lock hole 25, and a hole 31 for allowing the micromirror 15 to pass therethrough.
The micro mirror 15 is projected on the second movable electrode plate 22 through the hole 31. Here, the dimensional relationship (size relationship) of the locking claw 21, the locking hole 25, and the locking release hole 29.
Will be described. As shown in FIG. 2B, the gap between the flexible portions 23a and 24a of the locking claw 21 is a, the dimension between the outer protrusions of the locking portions 23b and 24b is b, and the locking hole is The width of 25 is c, the width of the lock release hole 29 is d, and the flexible portion 23
When the length (height) of a, 24a is e, the thickness of the first movable electrode plate 12 is f, and the dimension between the outer side surfaces of both flexible portions 23a, 24a is g, these a to g Are selected to satisfy the following relationships. The locking claw 21 and the locking hole 25
The center lines of the unlocking holes 29 are aligned with each other.
【００１６】ｂ＞ｃ＞ｂ−ａ＞ｄ＞ａ
ｃ＞ｇ，ｅ＞ｆ
即ち、可撓部２３ａ，２４ａが閉じる方向に弾性変形す
ることにより、両係止部２３ｂ，２４ｂは係止孔２５を
通過し、弾性復帰することにより第１可動電極板１２が
両係止部２３ｂ，２４ｂによって係止される構造とされ
る。一方、係止解除孔２９に対しては両係止部２３ｂ，
２４ｂは通過することはできず、係止解除孔２９の対向
する内縁２９ａ，２９ｂは常に両係止部２３ｂ，２４ｂ
の傾斜面２３ｃ，２４ｃ上に位置するものとされる。B>c>ba-d> a c> g, e> f That is, the elastic portions 23a, 24a are elastically deformed in the closing direction so that the engaging portions 23b, 24b are engaged with the engaging holes. The first movable electrode plate 12 is locked by the locking portions 23b and 24b by passing through 25 and elastically returning. On the other hand, with respect to the unlocking hole 29, both locking portions 23b,
24b cannot pass through, and the inner edges 29a, 29b of the lock release hole 29 that face each other are always locked by both lock portions 23b, 24b.
Are located on the inclined surfaces 23c and 24c.
【００１７】なお、これらａ〜ｇの数値例を示せば、例
えば下記のような値に設定される。
ａ＝５μm ，ｂ＝１５μm ，ｃ＝１１μm ，ｄ＝７μm
ｅ＝１０μm ，ｆ＝５μm ，ｇ＝９μm
次に、上記のような構成を具備する光スイッチ３２の動
作について、図３を参照して説明する。図３（１）は第
１可動電極板１２及び第２可動電極板２２に対し、固定
電極板１１との間において、それぞれ電圧が印加されて
いない状態を示したものであって、マイクロミラー１５
が光路に挿入されている状態を示す。If the numerical examples of these a to g are shown, for example, the following values are set. a = 5 μm, b = 15 μm, c = 11 μm, d = 7 μm e = 10 μm, f = 5 μm, g = 9 μm Next, with reference to FIG. 3, the operation of the optical switch 32 having the above-mentioned configuration will be described. explain. FIG. 3A shows a state in which no voltage is applied to the first movable electrode plate 12 and the second movable electrode plate 22 between the fixed electrode plate 11 and the first movable electrode plate 12 and the second movable electrode plate 22.
Shows the state of being inserted in the optical path.
【００１８】マイクロミラー１５を変位させて光路を切
り換えるべく、第１可動電極板１２と固定電極板１１と
の間に電圧を印加すると、静電気力により第１可動電極
板１２は駆動され、固定電極板１１側へ、つまり下方へ
変位する。この変位に伴い、係止爪２１が係止孔２５に
押し込まれて図３（２）に示した状態となり、第１可動
電極板１２は係止爪２１によって機械的に係止された状
態となる。従って、この状態では静電気力は不要であ
り、たとえ停電等により静電気力が消失しても第１可動
電極板１２はこの位置を維持する。When a voltage is applied between the first movable electrode plate 12 and the fixed electrode plate 11 so as to switch the optical path by displacing the micro mirror 15, the first movable electrode plate 12 is driven by electrostatic force to move the fixed electrode. It is displaced toward the plate 11 side, that is, downward. With this displacement, the locking claw 21 is pushed into the locking hole 25 to be in the state shown in FIG. 3B, and the first movable electrode plate 12 is mechanically locked by the locking claw 21. Become. Therefore, the electrostatic force is unnecessary in this state, and the first movable electrode plate 12 maintains this position even if the electrostatic force disappears due to a power failure or the like.
【００１９】マイクロミラー１５を光路に挿入して再度
光路切り換えを行う場合は第２可動電極板２２と固定電
極板１１との間に電圧を印加する。第２可動電極板２２
は静電気力により駆動されて固定電極板１１側に変位
し、この際係止解除孔２９の両内縁２９ａ，２９ｂが図
３（３）に示したように係止爪２１の両傾斜面２３ｃ，
２４ｃに当接し、さらに第２可動電極板２２が下降する
ことにより、両内縁２９ａ，２９ｂが両傾斜面２３ｃ，
２４ｃを押圧する。When the micromirror 15 is inserted in the optical path and the optical path is switched again, a voltage is applied between the second movable electrode plate 22 and the fixed electrode plate 11. Second movable electrode plate 22
Is driven by the electrostatic force to be displaced toward the fixed electrode plate 11 side, and at this time, both inner edges 29a and 29b of the lock release hole 29 have both inclined surfaces 23c of the lock claw 21 as shown in FIG.
24c, and the second movable electrode plate 22 is further lowered, so that both inner edges 29a and 29b move to both inclined surfaces 23c and
Press 24c.
【００２０】この押圧により係止爪２１はその可撓部２
３ａ，２４ａが弾性変形して図３（４）に示したように
両係止部２３ｂ，２４ｂが完全に閉じた状態となり、こ
の状態で第２可動電極板２２はその下降が阻止され、ま
た第１可動電極板１２は係止爪２１による係止が解除さ
れるため、図に示したように上昇して第２可動電極板２
２と当接する。第２可動電極板２２への電圧印加をオフ
にすれば、両可動電極板１２，２２はそれぞれフレクチ
ャア部１３，２６の弾性復帰力によって上方へ引っ張ら
れ、これにより図３（１）の状態に復帰して光路が切り
換わる。Due to this pressing, the locking claw 21 has its flexible portion 2
3a and 24a elastically deform so that both locking portions 23b and 24b are completely closed as shown in FIG. 3 (4), and in this state, the second movable electrode plate 22 is prevented from descending, and Since the first movable electrode plate 12 is unlocked by the locking claws 21, the first movable electrode plate 12 is lifted as shown in the drawing to move to the second movable electrode plate 2.
Abut 2. When the voltage application to the second movable electrode plate 22 is turned off, the movable electrode plates 12 and 22 are pulled upward by the elastic restoring force of the flexure parts 13 and 26, respectively, whereby the state of FIG. It returns and the optical path is switched.
【００２１】このように、この例によれば第１可動電極
板１２が固定電極板１１側に下降変位している状態で停
電等により静電気力が消失しても第１可動電極板１２は
上昇することなく、その位置を維持するため、スイッチ
状態が切り換わってしまうといった従来の問題を解消す
ることができる。図４は上記のような形状を有する係止
爪２１の形成寸法の一例を工程順に示したものであり、
以下各工程（１）〜（５）について説明する。As described above, according to this example, even if the electrostatic force disappears due to a power failure or the like while the first movable electrode plate 12 is displaced downward toward the fixed electrode plate 11, the first movable electrode plate 12 moves upward. Since the position is maintained without doing so, the conventional problem that the switch state is switched can be solved. FIG. 4 shows an example of the forming dimensions of the locking claw 21 having the above-described shape in the order of steps,
Each of the steps (1) to (5) will be described below.
【００２２】（１）シリコン基板よりなる固定電極板１
１上にレジスト４１を塗布し、パターニングして一対の
ホール４２を形成する。
（２）メッキ技術を用いてホール４２をニッケル４３で
充填する。この際、シリコン基板上にはクロム／金など
のシードレーヤーを設けておき、ニッケルとの接合強化
を図ってもよい。
（３）さらにレジスト４４を塗布し、パターニングして
ニッケル４３が充填された一対のホール４２上に図に示
したような大きさのホール４５をそれぞれ形成する。(1) Fixed electrode plate 1 made of silicon substrate
A resist 41 is applied on the surface 1 and patterned to form a pair of holes 42. (2) The holes 42 are filled with nickel 43 by using a plating technique. At this time, a seed layer of chromium / gold or the like may be provided on the silicon substrate to strengthen the bond with nickel. (3) Further, a resist 44 is applied and patterned to form a hole 45 having a size as shown in the drawing on each of the pair of holes 42 filled with nickel 43.
【００２３】（４）ホール４５に（２）と同様にニッケ
ルメッキを施す。（２）の工程で充填されたニッケル４
３の上には相対的に速いレートでニッケルメッキが堆積
し、レジスト４１の上では相対的に遅いレートでニッケ
ルメッキが堆積することから図に示したような傾斜をも
ったニッケル４６のメッキが形成される。
（５）レジスト４１，４４を剥離除去することにより、
ニッケルよりなる係止爪２１が完成する。(4) The hole 45 is plated with nickel in the same manner as in (2). Nickel 4 filled in step (2)
3 deposits nickel plating at a relatively high rate and nickel resist deposits on the resist 41 at a relatively slow rate. Therefore, nickel 46 having a slope as shown in the figure is formed. It is formed. (5) By peeling and removing the resists 41 and 44,
The locking claw 21 made of nickel is completed.
【００２４】なお、係止爪２１の構成材料にはニッケル
以外の金属材を用いてもよい。図５はこの発明の他の実
施例を示したものであり、図６はその要部を拡大して示
したものである。この例では第１可動電極板１２を係止
する係止爪が図５に示したように固定電極板１１上、第
１可動電極板１２の中央方形部の両端縁１２ａ，１２ｂ
にそれぞれ対応する位置に配置されたものとされる。こ
れら係止爪２３，２４は図２に示した係止爪２１の各片
と同様の形状を有するものとされ、即ち係止爪２３，２
４はそれぞれ固定電極板１１上に直立形成された可撓部
２３ａ，２４ａと、その可撓部２３ａ，２４ａに鉤状を
なすように突設された係止部２３ｂ，２４ｂとよりな
り、係止部２３ｂ，２４ｂの上面は突端に向かって下降
する傾斜面２３ｃ，２４ｃとされている。A metal material other than nickel may be used as the constituent material of the locking claw 21. FIG. 5 shows another embodiment of the present invention, and FIG. 6 shows an enlarged main part thereof. In this example, the locking claws for locking the first movable electrode plate 12 are provided on the fixed electrode plate 11 and both end edges 12a and 12b of the central square portion of the first movable electrode plate 12 as shown in FIG.
Are arranged at the positions respectively corresponding to. These locking claws 23 and 24 have the same shape as each piece of the locking claw 21 shown in FIG.
Reference numeral 4 is composed of flexible portions 23a and 24a formed upright on the fixed electrode plate 11, and locking portions 23b and 24b projectingly hooked to the flexible portions 23a and 24a. The upper surfaces of the stoppers 23b and 24b are inclined surfaces 23c and 24c that descend toward the projecting end.
【００２５】係止爪２３，２４はその係止部２３ｂ，２
４ｂが互いに内向きとされて配置されており、第１可動
電極板１２はこれら係止爪２３，２４間にその中央方形
部が押し込まれて係止される構造とされる。この係止状
態及び係止の解除を図６Ｂを参照して説明する。なお、
図６Ｂは一方の係止爪２４のみについて示しているが、
他方の係止爪２３も同様に動作する。The locking claws 23 and 24 have locking parts 23b and 2 respectively.
4b are arranged so as to face each other, and the first movable electrode plate 12 has a structure in which the central rectangular portion is pushed between the locking claws 23 and 24 and locked. This locked state and unlocking will be described with reference to FIG. 6B. In addition,
Although FIG. 6B shows only one locking claw 24,
The other locking claw 23 operates similarly.
【００２６】静電気力により第１可動電極板１２を駆動
すると、第１可動電極板１２はその変位に伴い、両係止
爪２３，２４間に押し込まれて係止される。係止の解除
は図１に示した光スイッチ３２と同様に配置された第２
可動電極板２２を静電気力により駆動変位させることに
よって行われ、変位に伴い第２可動電極板２２の中央方
形部の両端縁２２ａ，２２ｂが両係止爪２３，２４の傾
斜面２３ｃ，２４ｃを押圧して係止部２３ｂ，２４ｂを
互いに開かせ、これにより第１可動電極板１２の係止が
解除される。When the first movable electrode plate 12 is driven by the electrostatic force, the first movable electrode plate 12 is pushed between the locking claws 23 and 24 and locked by the displacement thereof. The lock is released by the second switch arranged in the same manner as the optical switch 32 shown in FIG.
This is performed by drivingly displacing the movable electrode plate 22 with an electrostatic force, and the two end edges 22a and 22b of the central rectangular portion of the second movable electrode plate 22 move the inclined surfaces 23c and 24c of the two locking claws 23 and 24 along with the displacement. The locking portions 23b and 24b are opened by pressing so that the locking of the first movable electrode plate 12 is released.
【００２７】なお、第２可動電極板２２の両端縁２２
ａ，２２ｂの位置は第１可動電極板１２の両端縁１２
ａ，１２ｂの位置に対してわずかに外側に位置され、つ
まり第２可動電極板２２の中央方形部の幅は第１可動電
極板１２の中央方形部の幅に対してわずかに大とされて
いる。また、第１，第２可動電極板１２，２２の厚さを
それぞれｆ，ｈとし、可撓部２３ａ，２４ａの高さをｅ
とする時、これらは
ｆ＋ｈ＞ｅ＞ｆ
を満たすように選定される。これにより第２可動電極板
２２が両係止部２３ｂ，２４ｂの下に嵌り込むことが防
止され、つまり第２可動電極板２２が係止爪２３，２４
によって係止されることが防止される。Both end edges 22 of the second movable electrode plate 22
The positions of a and 22b are the edges 12 of the first movable electrode plate 12.
It is located slightly outside of the positions of a and 12b, that is, the width of the central rectangular portion of the second movable electrode plate 22 is slightly larger than the width of the central rectangular portion of the first movable electrode plate 12. There is. The thicknesses of the first and second movable electrode plates 12 and 22 are f and h, respectively, and the heights of the flexible portions 23a and 24a are e.
, They are chosen to satisfy f + h>e> f. This prevents the second movable electrode plate 22 from being fitted under the locking portions 23b and 24b, that is, the second movable electrode plate 22 is locked by the locking claws 23 and 24.
Is prevented from being locked.
【００２８】なお、この図５に示した光スイッチ５１に
おいては一対の係止爪２３，２４によって第１可動電極
板１２の中央方形部の両端を係止するようにしている
が、例えば係止爪を一方のみとし、一つの係止爪によっ
て係止することも可能である。In the optical switch 51 shown in FIG. 5, both ends of the central rectangular portion of the first movable electrode plate 12 are locked by the pair of locking claws 23, 24. It is also possible to use only one pawl and lock with one locking pawl.
【００２９】[0029]
【発明の効果】以上説明したように、この発明によれば
静電気力により駆動されて固定電極板側へ変位した第１
可動電極板は係止爪によって自動的に係止され、つまり
機械的に係止されてその位置を維持する構造とされてい
るため、例えば停電等により静電気力が消失しても第１
可動電極板は上昇せず、よって静電気力の消失によりマ
イクロミラーが光路に挿入されていない状態から光路に
挿入された状態に切り換わり、スイッチ状態（出力ポー
ト）が切り換わってしまうといった従来の光スイッチの
不具合を解消することができる。As described above, according to the present invention, the first electrode is driven by the electrostatic force and is displaced toward the fixed electrode plate side.
Since the movable electrode plate is automatically locked by the locking claws, that is, mechanically locked to maintain its position, even if the electrostatic force disappears due to, for example, a power failure, the first
The movable electrode plate does not rise, and therefore, the loss of the electrostatic force causes the micromirror to switch from the state where it is not inserted into the optical path to the state where it is inserted into the optical path, and the switch state (output port) switches. It is possible to eliminate the malfunction of the switch.
【００３０】また、このように係止爪によって第１可動
電極板は係止されるため、固定電極板側へ変位した状態
を維持するために従来必要であった静電気力は不要とな
り、よって電力供給は不要となるため、その分消費電力
の低減化を図ることができる。なお、第１可動電極板の
係止状態の解除は第２可動電極板を用いて係止爪を弾性
変形させることにより、簡単に行うことができる。Further, since the first movable electrode plate is locked by the locking claws in this manner, the electrostatic force conventionally required to maintain the state of being displaced to the fixed electrode plate side is unnecessary, and thus the power consumption is reduced. Since power supply is unnecessary, power consumption can be reduced accordingly. Note that the locked state of the first movable electrode plate can be easily released by elastically deforming the locking claw using the second movable electrode plate.
【図１】Ａはこの発明の一実施例を示す平面図、Ｂはそ
の断面図。FIG. 1A is a plan view showing an embodiment of the present invention, and B is a sectional view thereof.
【図２】図１の要部拡大図、Ａは平面図、Ｂは断面図。2 is an enlarged view of a main part of FIG. 1, A is a plan view, and B is a sectional view.
【図３】図１に示した光スイッチの動作を説明するため
の図。FIG. 3 is a diagram for explaining the operation of the optical switch shown in FIG.
【図４】図１における係止爪の形成方法を説明するため
の工程図。4A to 4C are process drawings for explaining a method of forming the locking claw in FIG.
【図５】Ａはこの発明の他の実施例を示す平面図、Ｂは
その断面図。5A is a plan view showing another embodiment of the present invention, and B is a sectional view thereof.
【図６】図５の要部拡大図、Ａは平面図、Ｂは断面図。6 is an enlarged view of a main part of FIG. 5, A is a plan view, and B is a sectional view.
【図７】Ａは従来の光スイッチを示す平面図、Ｂはその
断面図。FIG. 7A is a plan view showing a conventional optical switch, and B is a sectional view thereof.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G02B 26/08 B81B 7/02 ＪＩＣＳＴファイル（ＪＯＩＳ)─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G02B 26/08 B81B 7/02 JISST file (JOIS)
Claims (3)
置され、フレクチャア部及びアンカー部を介して固定電
極板に結合された第１の可動電極板と、その第１の可動
電極板上に直立形成されたマイクロミラーとを備え、静
電気力により上記第１の可動電極板を上記固定電極板の
板面に対して垂直方向に駆動して上記マイクロミラーを
変位させることにより入射する光の光路切り換えを行う
光スイッチにおいて、 上記固定電極板上に、上記駆動により上記固定電極板側
に変位した上記第１の可動電極板を係止する係止爪を有
し、 その係止爪を弾性変形させて上記係止を解除する第２の
可動電極板を有することを特徴とする光スイッチ。1. A fixed electrode plate, a first movable electrode plate which is disposed so as to face the fixed electrode plate and is coupled to the fixed electrode plate via a flexure portion and an anchor portion, and on the first movable electrode plate. And a micromirror formed upright on the first movable electrode plate by electrostatic force to drive the first movable electrode plate in a direction perpendicular to the plate surface of the fixed electrode plate to displace the micromirror. In the optical switch for switching the optical path, a locking claw for locking the first movable electrode plate displaced to the fixed electrode plate side by the driving is provided on the fixed electrode plate, and the locking claw is elastic. An optical switch having a second movable electrode plate that is deformed to release the locking.
た一対の可撓部と、それら可撓部の先端に、下面が互い
に外向きに突出され、上面が互いの外側に向かって下降
する傾斜面とされて形成された一対の係止部とよりなる
ものとされ、 上記第１の可動電極板は係止孔を具備するものとされ
て、上記駆動による変位に伴い、その係止孔に上記係止
爪が押し込まれて係止される構造とされ、 上記第２の可動電極板は上記マイクロミラーを通す孔と
係止解除孔とを備え、上記第１の可動電極板の上方に配
置されて静電気力により上記固定電極板側に駆動変位さ
れるものとされ、その変位に伴い、係止解除孔の対向す
る内縁が上記両傾斜面を押圧して上記一対の係止部を閉
じさせることにより上記第１の可動電極板の係止を解除
する構造とされていることを特徴とする光スイッチ。2. The optical switch according to claim 1, wherein the locking claws are a pair of flexible portions formed upright in proximity to the fixed electrode plate, and lower surfaces of the flexible portions are provided at the tips of the flexible portions. The first movable electrode plate is provided with a pair of locking portions that are formed so as to project outward and the upper surfaces thereof are inclined surfaces that descend toward the outside. With the displacement caused by the drive, the locking claw is pushed into the locking hole and locked, and the second movable electrode plate is locked with the hole through which the micromirror is inserted. And a disengagement hole, which is disposed above the first movable electrode plate and is driven and displaced to the fixed electrode plate side by an electrostatic force. By pressing both inclined surfaces to close the pair of locking parts, An optical switch having a structure for unlocking the first movable electrode plate.
と、その可撓部に鉤状をなすように突設された係止部と
よりなり、その係止部の上面は突端に向かって下降する
傾斜面とされて、上記第１の可動電極板の両端縁に対応
する位置に係止部が互いに内向きとされてそれぞれ配置
され、 上記第１の可動電極板は上記駆動による変位に伴い、上
記両係止爪間に押し込まれて係止される構造とされ、 上記第２の可動電極板は上記マイクロミラーを通す孔を
備え、上記第１の可動電極板の上方に配置されて静電気
力により上記固定電極板側に駆動変位されるものとさ
れ、その変位に伴い、両端縁が上記両係止爪の傾斜面を
押圧して係止部を互いに開かせることにより上記第１の
可動電極板の係止を解除する構造とされていることを特
徴とする光スイッチ。3. The optical switch according to claim 1, wherein the locking claw is provided with a flexible portion formed upright on the fixed electrode plate, and a hook provided on the flexible portion so as to project like a hook. The upper surface of the locking portion is an inclined surface that descends toward the projecting end, and the locking portions are directed inward at positions corresponding to both end edges of the first movable electrode plate. Each of the first movable electrode plates is arranged so as to be pushed and locked between the locking claws according to the displacement by the driving, and the second movable electrode plate passes through the micromirror. A hole is provided, the hole is arranged above the first movable electrode plate, and is driven and displaced toward the fixed electrode plate side by an electrostatic force. With the displacement, both end edges are inclined surfaces of the locking claws. Of the first movable electrode plate by pressing to open the locking parts to each other An optical switch characterized by having a structure for releasing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000073618A JP3536202B2 (en) | 2000-03-16 | 2000-03-16 | Light switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000073618A JP3536202B2 (en) | 2000-03-16 | 2000-03-16 | Light switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001264651A JP2001264651A (en) | 2001-09-26 |
| JP3536202B2 true JP3536202B2 (en) | 2004-06-07 |
Family
ID=18591839
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000073618A Expired - Fee Related JP3536202B2 (en) | 2000-03-16 | 2000-03-16 | Light switch |
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| Country | Link |
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|---|---|---|---|---|
| DE10015598C2 (en) * | 2000-03-29 | 2002-05-02 | Fraunhofer Ges Forschung | Mikroaktoranordnung |
| AU2002354246A1 (en) * | 2002-01-09 | 2003-07-30 | Nikon Corporation | Optical element, thin-film structural body, optical switch, and optical element manufacturing method |
| US7177065B2 (en) | 2002-01-09 | 2007-02-13 | Nikon Corporation | Optical element, thin film structure, optical switch, and method of manufacturing optical element |
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2000
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