JP3525117B2 - Cooling filter for UV irradiation - Google Patents
Cooling filter for UV irradiationInfo
- Publication number
- JP3525117B2 JP3525117B2 JP2001115587A JP2001115587A JP3525117B2 JP 3525117 B2 JP3525117 B2 JP 3525117B2 JP 2001115587 A JP2001115587 A JP 2001115587A JP 2001115587 A JP2001115587 A JP 2001115587A JP 3525117 B2 JP3525117 B2 JP 3525117B2
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- heat
- ultraviolet
- ultraviolet lamp
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Radiation-Therapy Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【発明の詳細な説明】
【０００１】
【発明の属する技術分野】この発明は、紫外線を照射し
て種々の加工を行う際、被照射体の熱弊害を防止する技
術に関するものである。
【０００２】
【従来の技術】一般に、紫外線を照射して印刷、接着、
表面処理等の種々の加工が行われている。このとき、紫
外線ランプからは、紫外線だけでなく熱線も放射され、
その熱エネルギが被照射体に変形・変質等の悪影響を及
ぼすことがある。
【０００３】この現象を防止するため、従来、図２に示
すように、紫外線ランプ１１と被照射体１２の間に光学
式の熱線吸収フィルタ１３を設けたり、熱線(Ｈ)が透過
し、紫外線(ＵＶ)を反射するコールドミラーを紫外線ラ
ンプ１１の反射鏡１４に用いたりしている。
【０００４】また、紫外線ランプ１１と被照射体１２の
間にダクト１５から送風して、その中間空気層を冷却し
たり、紫外線ランプ１１の外周に冷却液を循環させて、
紫外線ランプ１１を冷却したりすることもある。
【０００５】
【発明が解決しようとする課題】しかしながら、このよ
うな方法では、紫外線の出力減衰が大きく、その減衰を
補うために出力を増強すれば、消費エネルギが増大し、
熱エネルギも増大して悪循環に陥るという問題があっ
た。
【０００６】そこで、この発明は、紫外線の減衰を伴う
ことなく、被照射体の熱弊害を防止することを課題とす
る。
【０００７】
【課題を解決するための手段】上記課題を解決するた
め、この発明は、真空にしたコンテナの内部に作動液を
封入して、蒸発部、断熱部及び凝縮部を備えた熱サイフ
ォンを形成し、紫外線ランプと被照射体の間に前記蒸発
部を位置させると、紫外線ランプから放射された光線の
うち、紫外線は前記蒸発部を透過し、熱線は作動液に吸
収され、その熱エネルギで気化した作動液の蒸気が前記
断熱部を経て凝縮部に流入し、凝縮部で液化して蒸発部
に戻る過程が繰り返される紫外線照射用冷却フィルタを
提供する。
【０００８】紫外線照射に際し、このフィルタを使用す
ると、紫外線は遮られることなく被照射体に到達し、熱
エネルギは凝縮部から効率よく放出される。
【０００９】
【発明の実施の形態】以下、この発明の実施形態の一例
を図１に基づいて説明する。
【００１０】図示のように、この発明に係る紫外線照射
用冷却フィルタは、真空にしたコンテナ１の内部に作動
液２を封入して、蒸発部３、断熱部４及び凝縮部５を備
えた熱サイフォン構造としたものである。
【００１１】コンテナ１の材料には、紫外線透過率が最
も高い石英ガラスが使用され、作動液２としては、紫外
線透過率が高く、無圧状態で低温沸騰する純水が使用さ
れている。この作動液２には、エタノールやフロン等を
用いることもできる。
【００１２】このようなフィルタを用いて紫外線を照射
するには、蒸発部３を紫外線ランプ１１と被照射体１２
の間に位置させる。
【００１３】また、凝縮部５への伝熱を防止するため、
断熱部４の周囲を断熱材６で包囲する。紫外線ランプ１
１の背後には、従来と同様の反射鏡１４を設けておく。
【００１４】そして、紫外線ランプ１１を点灯すると、
紫外線ランプ１１から放射された紫外線(ＵＶ)は蒸発部
３を透過し、被照射体１２には所要の加工が施される。
【００１５】一方、熱線(Ｈ)の熱エネルギは作動液２に
吸収され、その熱エネルギで気化した作動液２の蒸気が
断熱部４を経て凝縮部５に流入する。
【００１６】この蒸気は、凝縮部５でコンテナ１の壁面
に触れ、冷却されて潜熱を放出し、液化する。
【００１７】そして、再び液体となった作動液２は、重
力によりコンテナ１の壁面に沿って蒸発部３へ戻り、上
記過程が繰り返される。
【００１８】このように、上記フィルタを用いると、熱
線の熱エネルギが凝縮部５から効率よく放出されるの
で、被照射体１２には、熱線の影響が及ぶことがなく、
被照射体１２の変形や変質が防止される。
【００１９】なお、被照射体１２に若干の熱エネルギー
を与えたい場合には、凝縮部５で除去する熱量を低下さ
せることで対応できる。
【００２０】
【発明の効果】以上のように、この発明に係るフィルタ
を使用すると、紫外線をほとんど減衰させることなく、
紫外線照射に伴い放射される熱エネルギを効率よく除去
することができるので、印刷、接着、表面改質や殺菌
等、様々な分野において、消費エネルギを抑制し、高品
質の加工を施すことができる。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for preventing an object to be irradiated from being adversely affected by heat when performing various processes by irradiating ultraviolet rays. 2. Description of the Related Art In general, printing, bonding,
Various processes such as surface treatment are performed. At this time, the ultraviolet lamp radiates not only ultraviolet rays but also heat rays,
The heat energy may adversely affect the irradiation target such as deformation and alteration. Conventionally, as shown in FIG. 2, an optical heat ray absorbing filter 13 is provided between an ultraviolet lamp 11 and an irradiation object 12 or a heat ray (H) is transmitted therethrough to prevent this phenomenon. A cold mirror that reflects (UV) is used for the reflecting mirror 14 of the ultraviolet lamp 11. Further, air is blown from a duct 15 between the ultraviolet lamp 11 and the irradiation target 12 to cool an intermediate air layer or to circulate a cooling liquid around the outer periphery of the ultraviolet lamp 11,
The ultraviolet lamp 11 may be cooled. [0005] However, in such a method, the output of ultraviolet light is greatly attenuated, and if the output is increased to compensate for the attenuation, energy consumption increases.
There has been a problem that the heat energy also increases and a vicious cycle occurs. SUMMARY OF THE INVENTION It is an object of the present invention to prevent an object to be irradiated from being adversely affected by heat without attenuating ultraviolet rays. [0007] In order to solve the above-mentioned problems, the present invention is directed to a thermosiphon having an evaporating section, a heat insulating section, and a condensing section by enclosing a working liquid in a evacuated container. Is formed, and when the evaporator is positioned between the ultraviolet lamp and the irradiation target, of the light emitted from the ultraviolet lamp, ultraviolet light passes through the evaporator, heat rays are absorbed by the working fluid, and the heat Provided is a cooling filter for ultraviolet irradiation in which a process of vaporizing a working fluid vaporized by energy flows into a condenser through the heat insulating part, liquefies in the condenser and returns to the evaporator. When this filter is used during the irradiation of ultraviolet rays, the ultraviolet rays reach the object without being blocked, and the heat energy is efficiently released from the condensing portion. An embodiment of the present invention will be described below with reference to FIG. As shown in the figure, the cooling filter for irradiating ultraviolet light according to the present invention has a working fluid 2 sealed in a evacuated container 1 and a heat filter having an evaporator 3, a heat insulator 4 and a condenser 5. It has a siphon structure. As the material of the container 1, quartz glass having the highest ultraviolet transmittance is used, and as the working fluid 2, pure water having a high ultraviolet transmittance and boiling at low temperature under no pressure is used. As the working fluid 2, ethanol, chlorofluorocarbon, or the like can be used. In order to irradiate ultraviolet rays using such a filter, the evaporating section 3 is connected to the ultraviolet lamp 11 and the irradiation target 12.
Position between In order to prevent heat transfer to the condenser 5,
The periphery of the heat insulating part 4 is surrounded by a heat insulating material 6. UV lamp 1
Behind 1 is provided a reflecting mirror 14 similar to the conventional one. When the ultraviolet lamp 11 is turned on,
Ultraviolet rays (UV) emitted from the ultraviolet lamp 11 pass through the evaporating section 3, and the irradiation target 12 is subjected to a required process. On the other hand, the heat energy of the heat ray (H) is absorbed by the working fluid 2, and the vapor of the working fluid 2 vaporized by the heat energy flows into the condensing section 5 through the heat insulating section 4. This vapor touches the wall of the container 1 in the condensing section 5 and is cooled to release latent heat and liquefy. Then, the working liquid 2 which has become liquid again returns to the evaporating section 3 along the wall surface of the container 1 by gravity, and the above process is repeated. As described above, when the above filter is used, the heat energy of the heat rays is efficiently released from the condensing part 5, so that the irradiation object 12 is not affected by the heat rays.
Deformation and deterioration of the irradiation target 12 are prevented. When it is desired to apply a small amount of thermal energy to the irradiation object 12, the amount of heat to be removed by the condenser 5 can be reduced. As described above, when the filter according to the present invention is used, almost no ultraviolet light is attenuated.
Since heat energy radiated with ultraviolet irradiation can be efficiently removed, energy consumption can be suppressed and high quality processing can be performed in various fields such as printing, bonding, surface modification and sterilization. .
【図面の簡単な説明】 【図1】この発明の一実施形態を示す概略図 【図2】従来の熱エネルギの除去方法を示す概略図 【符号の説明】 １ コンテナ ２ 作動液 ３ 蒸発部 ４ 断熱部 ５ 凝縮部 １１ 紫外線ランプ １２ 被照射体 ＵＶ 紫外線 Ｈ 熱線[Brief description of the drawings] FIG. 1 is a schematic diagram showing an embodiment of the present invention. FIG. 2 is a schematic diagram showing a conventional thermal energy removing method. [Explanation of symbols] 1 container 2 Hydraulic fluid 3 Evaporation section 4 Thermal insulation 5 Condenser 11 UV lamp 12 Irradiated object UV UV H heat rays
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) F28D 15/02 G21K 5/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) F28D 15/02 G21K 5/00
Claims (1)
照射体の熱弊害を防止するフィルタにおいて、真空にし
たコンテナの内部に作動液を封入して、蒸発部、断熱部
及び凝縮部を備えた熱サイフォンを形成し、紫外線ラン
プと被照射体の間に前記蒸発部を位置させると、紫外線
ランプから放射された光線のうち、紫外線は前記蒸発部
を透過し、熱線は作動液に吸収され、その熱エネルギで
気化した作動液の蒸気が前記断熱部を経て凝縮部に流入
し、凝縮部で液化して蒸発部に戻る過程が繰り返される
ことを特徴とする紫外線照射用冷却フィルタ。(1) Claims 1. A filter for preventing thermal harm of an object to be irradiated due to irradiation of ultraviolet rays from an ultraviolet lamp, in which a working fluid is sealed in a evacuated container, and an evaporating section is provided. Forming a thermosiphon having a heat insulating part and a condensing part, and positioning the evaporating part between the ultraviolet lamp and the irradiation target, ultraviolet rays of the light emitted from the ultraviolet lamp pass through the evaporating part. The heat rays are absorbed by the hydraulic fluid, and the process of vaporizing the hydraulic fluid vaporized by the thermal energy flows into the condenser through the heat insulating part, liquefies in the condenser and returns to the evaporator. Cooling filter for UV irradiation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001115587A JP3525117B2 (en) | 2001-04-13 | 2001-04-13 | Cooling filter for UV irradiation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001115587A JP3525117B2 (en) | 2001-04-13 | 2001-04-13 | Cooling filter for UV irradiation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002310579A JP2002310579A (en) | 2002-10-23 |
| JP3525117B2 true JP3525117B2 (en) | 2004-05-10 |
Family
ID=18966459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001115587A Expired - Fee Related JP3525117B2 (en) | 2001-04-13 | 2001-04-13 | Cooling filter for UV irradiation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3525117B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4882699B2 (en) * | 2005-12-20 | 2012-02-22 | 株式会社デンソー | Waste heat recovery device |
-
2001
- 2001-04-13 JP JP2001115587A patent/JP3525117B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002310579A (en) | 2002-10-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3094902B2 (en) | UV irradiation device | |
| US5523262A (en) | Rapid thermal annealing using thermally conductive overcoat | |
| JP2008116672A (en) | Equipment and method for manufacturing liquid crystal panel | |
| JPS5939031A (en) | Method of reflowing phosphosilicate glass | |
| JPH0768163A (en) | Ultraviolet irradiation device | |
| JP3525117B2 (en) | Cooling filter for UV irradiation | |
| JP2927877B2 (en) | Uniform heating structure of semiconductor manufacturing equipment | |
| JP2004163937A (en) | Liquid crystal fence forming apparatus | |
| WO2002100531A1 (en) | Uv curing system for heat sensitive substances | |
| US4841342A (en) | Apparatus for treating photoresists | |
| US20090218924A1 (en) | Light source for ultraviolet ray irradiation | |
| US5234484A (en) | Method for annealing phosphors applied to surfaces having melting points below the annealing temperature of the phosphor | |
| JPH0729844A (en) | Infrared heating method and equipment for semiconductor substrate | |
| TW546679B (en) | Heating method | |
| JPH0940499A (en) | Excimer laser annealing treatment device | |
| JP2006043641A (en) | Light irradiator | |
| US4608272A (en) | Method of reducing optical coating absorptance | |
| JPS61158451A (en) | Ultraviolet-ray irradiating device | |
| JP5776082B2 (en) | How to dry the coating | |
| EP0283667B1 (en) | Method and apparatus of treating photoresists | |
| JPH0231976Y2 (en) | ||
| JPH09199509A (en) | Semiconductor film forming apparatus | |
| JP2007324369A (en) | Substrate circumference treating apparatus | |
| JPH07270091A (en) | Radiant heat exchange type cooler for preventing dew condensation on cooling plate surface | |
| JPH11513975A (en) | Device manufacturing method, heater for implementing the method, and display device processed by the method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040109 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040120 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040216 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090220 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100220 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110220 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120220 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130220 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140220 Year of fee payment: 10 |
|
| LAPS | Cancellation because of no payment of annual fees |