JP3517443B2 - Optical fiber sensor head - Google Patents

Optical fiber sensor head

Info

Publication number
JP3517443B2
JP3517443B2 JP02540894A JP2540894A JP3517443B2 JP 3517443 B2 JP3517443 B2 JP 3517443B2 JP 02540894 A JP02540894 A JP 02540894A JP 2540894 A JP2540894 A JP 2540894A JP 3517443 B2 JP3517443 B2 JP 3517443B2
Authority
JP
Japan
Prior art keywords
optical fiber
light
sensor head
core
fiber sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP02540894A
Other languages
Japanese (ja)
Other versions
JPH07234319A (en
Inventor
幹雄 勢羅
武雄 大倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
Original Assignee
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp, Mitsubishi Rayon Co Ltd filed Critical Mitsubishi Chemical Corp
Priority to JP02540894A priority Critical patent/JP3517443B2/en
Publication of JPH07234319A publication Critical patent/JPH07234319A/en
Application granted granted Critical
Publication of JP3517443B2 publication Critical patent/JP3517443B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Light Guides In General And Applications Therefor (AREA)

Description

【発明の詳細な説明】 【0001】 【産業上の利用分野】この発明は、光ファイバ式光電セ
ンサのヘッドに関し、より詳細には、分解能が向上し、
センサ出力の立上がりが鋭い微小エリア検出用光ファイ
バセンサヘッド関する。 【0002】 【従来の技術】従来、光ファイバセンサヘッドには、種
々の態様のヘッド構造があり、微小エリア検出用とし
て、送光用光ファイバの外周に複数本の受光用光ファイ
バが配設された同軸型センサヘッドものである。このセ
ンサヘッドでは、送光用光ファイバから検査対象である
ワークに、例えば60゜の開口角で光を出射し、ワーク
からの反射光を受光用光ファイバから入射して検出に用
いられる。 【0003】 【発明が解決しようとする課題】しかしながら、従来の
同軸型光ファイバセンサヘッドでは、開口数、開口角が
芯と鞘の組合せで一義的に決り、特に、プラスチック光
ファイバを用いると開口角が広く、検出領域の小さい個
々のワークを判別できず、分解能が良好ではない。ま
た、同様の理由から、センサ出力の立ち上も緩やかであ
るので、高い検出感度を示さない。 【0004】この発明は、上述の背景に基づきなされた
ものであり、その目的とするところは、検出領域の小さ
い個々のワークを判別できて、分解能が良好であり、セ
ンサ出力の立ち上も急峻で、高い検出感度を示す同軸型
光ファイバセンサヘッドを提供することである。 【0005】 【課題を解決させるための手段】上記課題は、この発明
により解決される。すなわち、この発明の光ファイバセ
ンサヘッドは、芯鞘構造の送光用光ファイバの先端部の
外周に複数本の受光用光ファイバが配設され、受光用光
ファイバの外周に口金が形成されてなる同軸光ファイバ
センサヘッドであって、送光用光ファイバのみの一部に
おいて、光ファイバの芯の外周表面が粗面化され、粗面
化された芯外周表面に光吸収層が形成されて、送光ビー
ムが絞られていることを特徴とするものである。 【0006】 【0007】 【作用】上記構成を有するこの発明の光ファイバセンサ
ヘッドは、以下のように作用・動作する。この発明で用
いられる光ファイバセンサヘッドは、芯鞘構造の送光用
光ファイバを少なくとも有する光ファイバセンサヘッド
である。 【0008】この発明の光ファイバセンサヘッドでは、
送光用光ファイバの端部若しくはその近傍の一部におい
て、光ファイバの芯の外周表面が粗面化され、その粗面
化された芯外周表面の送光用光ファイバの鞘材が光吸収
層に置換されて、送光ビームが絞られる。この送光用光
ファイバの端部若しくはその近傍では、芯外周表面の粗
面でファイバ内を伝送中の送光ビームの高次モード光が
芯から出射し粗面化された芯外周表面を覆う光吸収層に
吸収され、低次光のみが送光用光ファイバ端から出射さ
れて、送光ビームが絞られる。従って、検出領域の小さ
い個々のワークを判別でき、高い分解能を呈し、しか
も、センサ出力の立ち上も急峻で、高い検出感度を示
す。 【0009】 【実施例】この発明による光ファイバセンサヘッドを、
実施例により具体的に説明する。図1に、この発明によ
る光ファイバセンサヘッドの一実施例の概略断面図を、
図1(A)に、図1(A)に示す光ファイバセンサヘッ
ドの端面図を、図1(B)に示す。この態様の光ファイ
バセンサヘッドは、芯2と鞘3とからなる送光用光ファ
イバ1を有する光ファイバセンサヘッドであって、送光
用光ファイバ1の先端部において、光ファイバ1の芯2
の外周表面4が長さLだけ粗面化され、粗面化された芯
外周表面4に光吸収層5が形成され、送光用光ファイバ
1の先端部の外周に複数本の受光用光ファイバ6が配設
され、最外周に口金7が形成されたものであって、送光
ビームが開口角θに絞られていることを特徴とする同軸
型光ファイバセンサヘッドである。 【0010】この態様の光ファイバセンサヘッドでは、
送光用光ファイバの先端部において、送光用光ファイバ
1の鞘3が除去され、露出した芯2の外周面4が、サン
ドペーパー#800により、粗面化されている。光ファ
イバ1の芯2の外周表面4の長さLを5mmと設定し、
この設定では送光ビームの開口角θが、8゜(半値巾)
であった。この発明において、芯の外周面の粗面化は、
この実施例のサンドペーパーによる粗面化のみならず、
サンドブラストなどの機械的な粗面化の他、加熱凹凸面
の押し付けなどの熱的な粗面化などがある。 【0011】この態様において、鞘3が光吸収層5
(1.5%カーボン・ブラック含有エポキシ系接着剤
層)に置換されて、送光ビームが絞られている。この態
様の接着剤は、光ファイバの特性に悪影響を及ぼさない
ものであれば、種々の材質のものを使用することができ
るが、好ましくは、エポキシ系であり、光ファイバの芯
材と同じ若しくは近い屈折率を有するものである。この
態様における光ファイバは、石英系及びプラスチック系
の光ファイバであり、好ましくは、プラスチック系であ
る。 【0012】上記態様では、この送光用光ファイバの先
端部では、光ファイバ芯表面の粗面部分で、このファイ
バ内を伝送中の送光ビームの高次モード光が芯から出射
してファイバ周辺部の接着剤層に吸収され、低次光のみ
が出射されて、送光ビームが絞られる。 【0013】次いで、この実施例の同軸型光ファイバセ
ンサヘッドの製造法の実施例を説明する。先ず、送光用
光ファイバと受光用光ファイバを準備する。送光用光フ
ァイバの先端部分の鞘材を、有機溶剤(例えば、酢酸エ
チルなど)で膨潤させ、この鞘材を柔らかい布(例え
ば、ガーゼなど)で拭き取る。この鞘材を取り除いた送
光用光ファイバの先端部分、露出した芯外周表面を、サ
ンドペーパー#800で粗面化する。次いで、1.5%
カーボン・ブラック混入したエポキシ系接着剤で被覆す
ると共に、同時に受光用光ファイバと接合させる。この
発明において上記実施例に限定されず、鞘の除去を、例
えば、サンドペーパーで送光用光ファイバの鞘を削り取
る方法で行うことができる。最後に、口金7を取り付け
て、この実施例の光ファイバセンサヘッドを製造するこ
とができる。 【0014】上記実施例の同軸型光ファイバセンサヘッ
ドの使用方法の一例を説明する。多数個の検査対象であ
るワークに向けて、センサヘッドを設置し、ワーク又は
/及びセンサヘッドを相対的に移動させる。送光用光フ
ァイバから光を、所定の開口角で出射させてワークに照
射させる。ワークからの反射光を受光用光ファイバで入
射し、検出する。センサからの出力とワークの位置との
関連は、ビームが絞られているので、分解能が高く、個
々のワークを容易に識別し、しかも、出力の立上がりが
急峻で検出感度が高い。 【0015】これに対して、従来のセンサヘッドを用い
て同じ条件で行っても、従来のセンサからの出力とワー
クの位置との関連では、分解能が低くので、個々のワー
クを識別することができず、しかも、出力の立上がりが
緩かで検出感度が劣っている。 【0016】この発明は、上記実施例に限定されず、こ
の発明で開示された技術思想に包含される種々の変形例
もこの発明の範囲内である。例えば、この発明の好まし
い態様において、芯外周表面の軸方向長さを調整して送
光ビームの開口角を制御することができる。上記実施例
では、光ファイバ1の芯2の外周表面4の長さLを5m
mと設定し、送光ビームの開口角θが、8゜(半値巾)
であったが、光ファイバ1の芯2の外周表面4の長さL
を10mmと設定した場合、送光ビームの開口角θを、
4゜(半値巾)に絞ることができる。この様に、芯外周
表面の粗面化及び光吸収層配置の処理の長さ(L)を変
更することにより、任意に出射/受光のビーム角度を調
整することができる。 【0017】その他の変形例として、図2に示すような
反射型光ファイバセンサヘッドがある。この例では、芯
2と鞘3とからなる送光用光ファイバ1と受光用光ファ
イバ6を有する光ファイバセンサヘッドであって、送光
・受光用光ファイバ1と6の先端部において、光ファイ
バの芯2の外周表面4が長さLだけ粗面化され、粗面化
された芯外周表面4に光吸収層5が形成され、最外周に
口金7が形成されたものであって、送光ビームが開口角
θに絞られている反射型光ファイバセンサヘッドであ
る。 【0018】上述の反射型のみならず、更に、透過型に
も用いることができ、送光用光ファイバのみならず、受
光用光ファイバにも適用できる。また、上記例では、先
端部のみが粗面化及び光吸収層配置の処理が施されてい
たが、図3に示すように、光ファイバの途中の中間部や
先端近傍などに、芯外周表面の粗面化及び光吸収層配置
の処理を行うことことができる。この様な態様により、
口金を形成して光ファイバセンサヘッドを組み立てた後
でも、口金から出た光ファイバ部分に芯外周表面の粗面
化及び光吸収層配置の処理を行うことができ、これによ
り狭ビームの光ファイバセンサヘッドを得ることができ
る。しかも、その処理の長さ(L)を変更することによ
り、任意に出射/受光のビーム角度を調整することがで
きる。 【0019】 【発明の効果】上記実施例で具体的に実証されるよう
に、この発明により、検出領域の小さい個々のワークを
判別できて、分解能が良好であり、センサ出力の立ち上
も急峻で、検出感度に優れている光ファイバセンサヘッ
ドを得ることができる。また、芯外周表面の粗面化及び
光吸収層配置の処理の長さ(L)を変更することによ
り、任意に出射/受光のビーム角度を調整することがで
きる。この発明の好ましい態様において、光ファイバセ
ンサヘッドの送光用光ファイバの先端部の外周に複数本
の受光用光ファイバを配設し、受光用光ファイバの外周
に口金を形成した同軸型光ファイバセンサヘッドとする
ことにより、分解能が高く、個々のワークを容易に識別
することができ、しかも出力の立ち上がりが急峻で検出
感度が高い光ファイバセンサヘッドを得ることができ
る。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a head for an optical fiber type photoelectric sensor, and more particularly, to a head having improved resolution.
The present invention relates to an optical fiber sensor head for detecting a minute area in which a rising of a sensor output is sharp. 2. Description of the Related Art Conventionally, an optical fiber sensor head has various types of head structures, and a plurality of light receiving optical fibers are arranged around a light transmitting optical fiber for detecting a minute area. A coaxial sensor head is shown. In this sensor head, light is emitted from a light transmitting optical fiber to a work to be inspected at an opening angle of, for example, 60 °, and reflected light from the work is incident on a light receiving optical fiber and used for detection. [0003] However, in the conventional coaxial optical fiber sensor head, the numerical aperture and the aperture angle are uniquely determined by the combination of the core and the sheath. An individual work having a wide angle and a small detection area cannot be determined, and the resolution is not good. Further, for the same reason, the rise of the sensor output is also gradual, so that high detection sensitivity is not exhibited. The present invention has been made on the basis of the above-mentioned background, and has as its object to discriminate individual workpieces having a small detection area, to have good resolution, and to have a sharp rise in sensor output. Accordingly, an object of the present invention is to provide a coaxial optical fiber sensor head that exhibits high detection sensitivity. [0005] The above-mentioned problems are solved by the present invention. That is, the optical fiber sensor head of this invention, the distal end portion of the transmission Hikari Mitsumochi fiber core-sheath structure
A plurality of light receiving optical fibers are arranged on the outer circumference,
A coaxial fiber optic sensor head is die to the outer periphery of the fiber formed by forming, in the Mino part of transmission Hikari Mitsumochi fiber, the core outer peripheral surface of the core of the optical fiber is roughened roughened A light absorbing layer is formed on the outer peripheral surface, and the light transmission beam is narrowed. [0007] The optical fiber sensor of the present invention having the above configuration.
The head operates and operates as follows. The optical fiber sensor head used in the present invention is an optical fiber sensor head having at least a light transmitting optical fiber having a core-sheath structure. In the optical fiber sensor head according to the present invention,
The outer peripheral surface of the core of the optical fiber is roughened at or near the end of the light transmitting optical fiber, and the sheath material of the light transmitting optical fiber on the roughened core outer peripheral surface absorbs light. The light transmission beam is narrowed by being replaced with a layer. At or near the end of the light-transmitting optical fiber, the higher-order mode light of the light beam transmitted through the fiber is emitted from the core and covers the roughened outer surface of the core at the rough surface of the core outer surface. Only the low-order light is emitted from the end of the light transmitting optical fiber and absorbed by the light absorbing layer, and the light transmitting beam is narrowed. Therefore, it is possible to discriminate individual workpieces having a small detection area, exhibit a high resolution, and show a high detection sensitivity with a sharp rise of the sensor output. An optical fiber sensor head according to the present invention is
This will be described more specifically with reference to examples. FIG. 1 is a schematic sectional view of one embodiment of the optical fiber sensor head according to the present invention.
FIG. 1A shows an end view of the optical fiber sensor head shown in FIG. 1A. The optical fiber sensor head according to this embodiment is an optical fiber sensor head having a light transmitting optical fiber 1 composed of a core 2 and a sheath 3.
The outer peripheral surface 4 is roughened by a length L, and the light absorbing layer 5 is formed on the roughened core outer peripheral surface 4. A coaxial optical fiber sensor head in which a fiber 6 is provided and a base 7 is formed on the outermost periphery, and a light transmission beam is narrowed to an aperture angle θ. In the optical fiber sensor head according to this aspect,
At the tip of the light transmitting optical fiber, the sheath 3 of the light transmitting optical fiber 1 is removed, and the outer peripheral surface 4 of the exposed core 2 is roughened by sandpaper # 800. The length L of the outer peripheral surface 4 of the core 2 of the optical fiber 1 is set to 5 mm,
In this setting, the aperture angle θ of the transmitted beam is 8 ° (half width)
Met. In the present invention, roughening of the outer peripheral surface of the core is performed by:
Not only roughening with the sandpaper of this example,
In addition to mechanical roughening such as sand blasting, thermal roughening such as pressing of an uneven surface by heating is available. In this embodiment, the sheath 3 is formed of the light absorbing layer 5
(1.5% carbon black-containing epoxy adhesive layer), and the light transmission beam is narrowed. The adhesive of this embodiment can be made of various materials as long as it does not adversely affect the characteristics of the optical fiber, but is preferably an epoxy-based adhesive, which is the same as or similar to the core material of the optical fiber. It has a near refractive index. The optical fiber in this embodiment is a quartz-based or plastic-based optical fiber, and is preferably a plastic-based optical fiber. In the above aspect, at the end of the light transmitting optical fiber, the higher-order mode light of the transmitted light beam transmitted through the fiber is emitted from the core at the rough surface portion of the optical fiber core surface. The light is absorbed by the adhesive layer in the peripheral portion, and only low-order light is emitted, thereby narrowing the light transmission beam. Next, an embodiment of a method of manufacturing the coaxial optical fiber sensor head of this embodiment will be described. First, a light transmitting optical fiber and a light receiving optical fiber are prepared. The sheath at the tip of the optical fiber for light transmission is swollen with an organic solvent (eg, ethyl acetate), and the sheath is wiped off with a soft cloth (eg, gauze). The end portion of the light transmitting optical fiber from which the sheath material has been removed and the exposed outer peripheral surface of the core are roughened with sandpaper # 800. Then 1.5%
The resin is covered with an epoxy adhesive mixed with carbon black, and is simultaneously bonded to a light receiving optical fiber. In the present invention, the sheath is not limited to the above embodiment, and the sheath can be removed by, for example, removing the sheath of the light transmitting optical fiber with sandpaper. Finally, the base 7 is attached, and the optical fiber sensor head of this embodiment can be manufactured. An example of how to use the coaxial optical fiber sensor head of the above embodiment will be described. A sensor head is installed toward a plurality of workpieces to be inspected, and the workpiece and / or the sensor head are relatively moved. Light is emitted from the optical fiber for light transmission at a predetermined opening angle and is irradiated on the work. Light reflected from the work is incident on the light receiving optical fiber and detected. The relationship between the output from the sensor and the position of the work is high because the beam is narrowed, the resolution is high, individual works can be easily identified, and the output rises sharply and the detection sensitivity is high. On the other hand, even when the conventional sensor head is used under the same conditions, since the resolution is low in relation to the output from the conventional sensor and the position of the work, it is difficult to identify each work. In addition, the output rises slowly and the detection sensitivity is poor. The present invention is not limited to the above-described embodiment, and various modifications included in the technical concept disclosed in the present invention are also within the scope of the present invention. For example, in a preferred embodiment of the present invention, the aperture angle of the light transmission beam can be controlled by adjusting the axial length of the core outer peripheral surface. In the above embodiment, the length L of the outer peripheral surface 4 of the core 2 of the optical fiber 1 is 5 m.
m, the aperture angle θ of the transmitted beam is 8 ° (half width)
However, the length L of the outer peripheral surface 4 of the core 2 of the optical fiber 1 is
Is set to 10 mm, the aperture angle θ of the transmitted beam is
It can be reduced to 4 cm (half width). As described above, by changing the length (L) of the roughening process of the outer peripheral surface of the core and the arrangement of the light absorbing layer, the beam angle of emission / reception can be arbitrarily adjusted. As another modified example, there is a reflection type optical fiber sensor head as shown in FIG. In this example, an optical fiber sensor head having a light transmitting optical fiber 1 composed of a core 2 and a sheath 3 and a light receiving optical fiber 6 is provided. An outer peripheral surface 4 of a fiber core 2 is roughened by a length L, a light absorbing layer 5 is formed on the roughened core outer peripheral surface 4, and a base 7 is formed on the outermost periphery. This is a reflection type optical fiber sensor head in which a light beam is narrowed to an opening angle θ. The present invention can be used not only in the above-mentioned reflection type but also in the transmission type, and can be applied not only to the light transmitting optical fiber but also to the light receiving optical fiber. Further, in the above example, only the end portion was subjected to the surface roughening and light absorbing layer arrangement processing. However, as shown in FIG. Surface roughening and light absorption layer arrangement can be performed. By such an aspect,
Even after forming the base and assembling the optical fiber sensor head, it is possible to roughen the outer peripheral surface of the core and to arrange the light absorbing layer on the optical fiber portion coming out of the base, thereby providing a narrow beam optical fiber. A sensor head can be obtained. In addition, by changing the length (L) of the processing, it is possible to arbitrarily adjust the emission / reception beam angle. As specifically demonstrated in the above embodiment, according to the present invention, individual works having a small detection area can be determined, the resolution is good, and the rise of the sensor output is sharp. Thus, an optical fiber sensor head having excellent detection sensitivity can be obtained. Also, by changing the length (L) of the roughening of the outer peripheral surface of the core and the arrangement of the light absorbing layer, the beam angle of emission / reception can be arbitrarily adjusted. In a preferred embodiment of the present invention, the optical fiber cell
Around the tip of the optical fiber for transmitting light from the sensor head.
Of the receiving optical fiber, and the outer circumference of the receiving optical fiber
Coaxial optical fiber sensor head with base
High resolution enables easy identification of individual workpieces
And the output rises steeply for detection.
An optical fiber sensor head with high sensitivity can be obtained
You.

【図面の簡単な説明】 【図1】図1は、この発明による光ファイバセンサヘッ
ドの一実施例の概略断面図及び端面図である。 【図2】図2は、この発明による光ファイバセンサヘッ
ドの別の一実施例の概略断面図である。 【図3】図3は、この発明による光ファイバセンサヘッ
ドの別の一実施例の概略断面図である。 【符号の説明】 1 送光用光ファイバ 2 芯 3 鞘 4 粗面 5 光吸収層 6 受光用光ファイバ 7 口金
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic sectional view and an end view of an embodiment of an optical fiber sensor head according to the present invention. FIG. 2 is a schematic sectional view of another embodiment of the optical fiber sensor head according to the present invention. FIG. 3 is a schematic sectional view of another embodiment of the optical fiber sensor head according to the present invention. [Description of Signs] 1 Optical fiber for transmitting light 2 Core 3 Sheath 4 Rough surface 5 Light absorbing layer 6 Optical fiber for receiving light 7 Base

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G02B 6/00 G01B 11/00 - 11/30 ──────────────────────────────────────────────────続 き Continuation of the front page (58) Field surveyed (Int. Cl. 7 , DB name) G02B 6/00 G01B 11/00-11/30

Claims (1)

(57)【特許請求の範囲】 【請求項1】 芯鞘構造の送光用光ファイバの先端部の
外周に複数本の受光用光ファイバが配設され、受光用光
ファイバの外周に口金が形成されてなる同軸型光ファイ
バセンサヘッドであって、送光用光ファイバのみの一部
において、光ファイバの芯の外周表面が粗面化され、粗
面化された芯外周表面に光吸収層が形成されて、送光ビ
ームが絞られていることを特徴とする光ファイバセンサ
ヘッド。
(57) [Claims 1] The tip of the optical fiber for light transmission having a core-sheath structure
A plurality of light receiving optical fibers are arranged on the outer circumference,
A coaxial type optical fiber sensor heads is die to the outer periphery of the fiber formed by forming, in the Mino part of transmission Hikari Mitsumochi fiber, the outer peripheral surface of the core of the optical fiber is roughened roughened An optical fiber sensor head, wherein a light absorbing layer is formed on an outer peripheral surface of a core and a light transmission beam is narrowed.
JP02540894A 1994-02-23 1994-02-23 Optical fiber sensor head Expired - Lifetime JP3517443B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP02540894A JP3517443B2 (en) 1994-02-23 1994-02-23 Optical fiber sensor head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02540894A JP3517443B2 (en) 1994-02-23 1994-02-23 Optical fiber sensor head

Publications (2)

Publication Number Publication Date
JPH07234319A JPH07234319A (en) 1995-09-05
JP3517443B2 true JP3517443B2 (en) 2004-04-12

Family

ID=12165097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02540894A Expired - Lifetime JP3517443B2 (en) 1994-02-23 1994-02-23 Optical fiber sensor head

Country Status (1)

Country Link
JP (1) JP3517443B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6140456B2 (en) * 2013-01-17 2017-05-31 パナソニック デバイスSunx株式会社 Coaxial optical fiber head, optical fiber sensor, and coaxial optical fiber head manufacturing method
JP2017102193A (en) * 2015-11-30 2017-06-08 パナソニック デバイスSunx株式会社 Coaxial fiber head, fiber sensor, and method of manufacturing coaxial fiber head

Also Published As

Publication number Publication date
JPH07234319A (en) 1995-09-05

Similar Documents

Publication Publication Date Title
US4785171A (en) Fingerprint acquisition system with a fiber optic block
US4701614A (en) Fiber optic pressure sensor
US4492427A (en) Optical slip ring assembly
DE3878485D1 (en) DEVICE FOR CIRCUMFERENTIAL RADIATION OF OBJECTS.
JPS61503019A (en) Microlens manufacturing method
CA1313077C (en) Light source system with uniforming device for optical fiber type lightguide
CN102538702B (en) Side doped bent sensitivity-enhanced type optical fiber curvature sensor
JPH07275182A (en) Endoscope
JP3517443B2 (en) Optical fiber sensor head
CA2070215A1 (en) Reflection monitor optical fiber coupler manufacturing system and method
CN105738007A (en) Biconical polymer optical fiber probe and preparation method thereof and temperature sensor
JP3425985B2 (en) Optical fiber sensor head
WO1990013807A1 (en) Optical sensor for detecting quantity of protective coating
JP2001257434A5 (en)
JPS5988672A (en) Optical fiber sensor
CN114370894B (en) Optical fiber temperature and humidity sensor and preparation method thereof
US5686723A (en) Light sensing detector assembly with integral fiber optic light transmission elements
JP3150752B2 (en) Optical discrimination structure of optical transmission line
JP2887839B2 (en) Manufacturing method of fiber array plate
JP3657711B2 (en) Light emitting element module and light emitting element module holder
US5146515A (en) Structure of lens combination for optical fiber fine displacement detecting system
JPS5910761Y2 (en) optical coupling device
JPS6138444B2 (en)
JPS61108929A (en) Measuring method of optical power
JPH0688922A (en) Optical coupler

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040120

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040126

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080130

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090130

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090130

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100130

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100130

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110130

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120130

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120130

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120130

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130130

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130130

Year of fee payment: 9

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130130

Year of fee payment: 9

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130130

Year of fee payment: 9

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term