JP3515146B2 - Output control method of discharge pumped laser oscillator and discharge pumped laser oscillator - Google Patents
Output control method of discharge pumped laser oscillator and discharge pumped laser oscillatorInfo
- Publication number
- JP3515146B2 JP3515146B2 JP26262793A JP26262793A JP3515146B2 JP 3515146 B2 JP3515146 B2 JP 3515146B2 JP 26262793 A JP26262793 A JP 26262793A JP 26262793 A JP26262793 A JP 26262793A JP 3515146 B2 JP3515146 B2 JP 3515146B2
- Authority
- JP
- Japan
- Prior art keywords
- power
- discharge
- power supply
- laser oscillator
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Description
【０００１】[0001]
【産業上の利用分野】本発明は放電励起式レーザ発振器
の出力制御方法および放電励起式レーザ発振器に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge pumping laser oscillator output control method and a discharge pumping laser oscillator.
【０００２】[0002]
【従来の技術】気体レーザの発振器として、放電励起式
のレーザ発振器がよく知られている。放電励起式レーザ
発振器における出力制御は、放電電極に供給する電力を
定量的に制御することにより、定量的に行われている。
またこの出力制御において、発振器が出力する光パワー
を光パワー計により計測し、この計測値を使用して光パ
ワーを供給電力制御により、フィードバック制御するこ
とが行われている。2. Description of the Related Art A discharge excitation type laser oscillator is well known as a gas laser oscillator. Output control in the discharge excitation type laser oscillator is quantitatively performed by quantitatively controlling the electric power supplied to the discharge electrode.
In this output control, the optical power output from the oscillator is measured by an optical power meter, and the measured power is used to perform feedback control by controlling the supplied power.
【０００３】[0003]
【発明が解決しようとする課題】放電励起式レーザ発振
器においては、一般に、供給電力に対する光パワーの変
化率が高く、このため供給電力が微調整されても、光パ
ワーが比較的大きく変化し、光パワーを微調整すること
が難しい。In the discharge excitation type laser oscillator, the rate of change of the optical power with respect to the supplied power is generally high. Therefore, even if the supplied power is finely adjusted, the optical power changes relatively greatly. It is difficult to fine-tune the optical power.
【０００４】光パワーをフィードバック制御する場合に
は、ゲインが大きくなり、オーバシュート、アンダシュ
ートが大きく、整定特性が悪い。When the optical power is feedback-controlled, the gain becomes large, the overshoot and the undershoot become large, and the settling characteristic is poor.
【０００５】本発明は、従来の放電励起式レーザ発振器
に於ける上述の如き問題点に着目してなされたものであ
り、光パワーの微調整を的確に行え、またフィードバッ
ク制御においては良好な整定特性が得られるよう、改良
された放電励起式レーザ発振器の出力制御方法、および
この制御方法の実施に使用する放電励起式レーザ発振器
を提供することを目的としている。The present invention has been made by paying attention to the above-mentioned problems in the conventional discharge excitation type laser oscillator, and it is possible to perform fine adjustment of the optical power accurately and to achieve good settling in feedback control. It is an object of the present invention to provide an improved output control method for a discharge excitation type laser oscillator so that the characteristics can be obtained, and a discharge excitation type laser oscillator used for implementing this control method.
【０００６】[0006]
【課題を解決するための手段】上述の如き目的は、本発
明によれば、放電励起空間に配置される放電電極をｎ個
に分割し、各放電電極に個別に電力を供給するｎ個の電
源部を共通して制御する放電励起式レーザ発振器の出力
制御方法であって、光パワーの制御目標値のレベルを第
１範囲から第ｎ範囲までｎ個の範囲に分け、制御目標値
が第ｍ（１＜ｍ＜ｎ）範囲にあるときは、（ｍ−１）個
の電源部をフルパワーにし、かつ、別の１個の電源部を
定量的に制御し、残りの電源部はオフ状態にしておくこ
とで、光パワーを目標値になるよう制御することを特徴
とする放電励起式レーザ発振器の出力制御方法によって
達成される。According to the present invention, there are n discharge electrodes arranged in the discharge excitation space.
And divide it into n power sources that individually supply power to each discharge electrode.
Output of discharge-pumped laser oscillator with common source control
A control method, in which the level of the control target value of optical power is
The control target value is divided into n ranges from the 1st range to the nth range.
Is in the m-th (1 <m <n) range, (m-1)
Full power of the power supply unit and another one power supply unit
Control quantitatively and keep the rest of the power supply in the off state.
And the optical power is controlled so as to reach the target value .
【０００７】また上述の如き目的を達成するため、本発
明による放電励起式レーザ発振器は、放電励起空間に配
置されるｎ個の放電電極と、各放電電極に個別に電力を
供給するｎ個の電源部と、各電源部を共通して制御する
制御部とを備え、光パワーの制御目標値のレベルを第１
範囲から第ｎ範囲までｎ個の範囲に分けて制御する放電
励起式レーザ発振器であって、前記制御部が、光パワー
の前記制御目標値が第ｍ（１＜ｍ＜ｎ）範囲にあるとき
は、（ｍ−１）個の電源部をフルパワーにし、かつ、別
の１個の電源部を定量的に制御し、残りの電源部はオフ
状態にしておくことで、光パワーを目標値になるよう制
御することを特徴としている。In order to achieve the above-mentioned object, the discharge excitation type laser oscillator according to the present invention is arranged in the discharge excitation space.
Power is applied to each of the n discharge electrodes and each discharge electrode.
Control the power supply units in common with the n power supply units to be supplied.
And a control unit for setting the level of the control target value of the optical power to the first level.
Discharge that controls by dividing into n ranges from the range to the nth range
An excitation type laser oscillator, wherein the control unit controls the optical power
When the control target value of is within the m-th range (1 <m <n)
Sets (m-1) power supply units to full power, and
Quantitatively controls one power supply unit of the
By keeping it in this state, the optical power is controlled to reach the target value.
The feature is to control .
【０００８】[0008]
【作用】上述の如き構成によれば、複数個に分割された
放電電極のうちの一つの放電電極に対する供給電力の定
量的制御による光パワーの変化率は、供給電力の最小制
御量が同一であっても、すべての放電電極に対する供給
電力の一斉に制御した場合に比して、その分割数に応じ
て低減する。According to the above-mentioned structure, the rate of change of the optical power by the quantitative control of the power supplied to one of the plurality of discharge electrodes is the same when the minimum control amount of the power supplied is the same. Even if there is, it is reduced according to the number of divisions, as compared with the case where the electric power supplied to all the discharge electrodes is controlled simultaneously.
【０００９】[0009]
【実施例】以下に本発明の実施例を図面を用いて詳細に
説明する。Embodiments of the present invention will be described in detail below with reference to the drawings.
【００１０】図１は本発明による放電励起式レーザ発振
器の一実施例を示している。FIG. 1 shows an embodiment of a discharge excitation type laser oscillator according to the present invention.
【００１１】放電励起式レーザ発振器は、レーザ媒体で
あるレーザガスの放電励起空間１の両側に図にて上下方
向に対向配置されたカソード電極３およびアノード電極
５と、放電励起空間１の両側に図にて左右方向に対向配
置された折り返しミラー７および出力ミラー９とを有
し、矢印Ａ方向へレーザを出力する。The discharge excitation type laser oscillator includes a cathode electrode 3 and an anode electrode 5 which are vertically opposed to each other on both sides of a discharge excitation space 1 of a laser gas as a laser medium, and both sides of the discharge excitation space 1. The output mirror 9 and the folding mirror 7 are arranged to face each other in the left-right direction, and the laser is output in the direction of arrow A.
【００１２】カソード電極３とアノード電極５とは、複
数個、この実施例では、放電電極３ａ、３ｂ、３ｃおよ
び放電電極５ａ、５ｂ、５ｃとして、三個に並列に分割
され、各々個別に放電作用を行う。A plurality of cathode electrodes 3 and anode electrodes 5, in this embodiment, discharge electrodes 3a, 3b, 3c and discharge electrodes 5a, 5b, 5c, are divided into three in parallel, and are individually discharged. To act.
【００１３】放電電極３ａ、３ｂ、３ｃには各々個別の
電源装置１１ａ、１１ｂ、１１ｃが接続され、電源装置
１１ａ、１１ｂ、１１ｃにより、放電電極３ａと５ａ、
３ｂと５ｂ、３ｃと５ｃの各々に個別に電力が供給され
る。Discharge electrodes 3a, 3b and 3c are respectively connected to individual power supply devices 11a, 11b and 11c, and the power supply devices 11a, 11b and 11c cause discharge electrodes 3a and 5a, respectively.
Electric power is individually supplied to each of 3b and 5b, 3c and 5c.
【００１４】電源装置１１ａ、１１ｂ、１１ｃは共通の
制御装置１３と接続されている。制御装置１３は、図示
されていない制御目標値入力部より光パワーの制御目標
値を入力し、光パワー計１５により光パワーの計測値を
入力し、フィードバック制御式に、電源装置１１ａ、１
１ｂ、１１ｃによる各放電電極に対する電力供給量を順
次個別に定量的に制御する。なお、光パワー計１５は、
ハーフミラー１７により出力レーザの一部を与えられて
光パワーを計測する。The power supply devices 11a, 11b and 11c are connected to a common control device 13. The control device 13 inputs the control target value of the optical power from a control target value input unit (not shown), inputs the measured value of the optical power by the optical power meter 15, and feedback-controls the power supply devices 11a, 1
The amount of power supplied to each discharge electrode by 1b and 11c is sequentially and quantitatively controlled individually. The optical power meter 15
A part of the output laser is given by the half mirror 17 to measure the optical power.
【００１５】制御装置１３による電力制御は、図２
（ａ）〜（ｃ）に示されている如く、光パワーの制御目
標値Ｔが０〜第一の所定値Ｔ1 である場合は、電源装置
１１ｂと１１ｃをともにオフ状態にして、電源装置１１
ａによる放電電極３ａ、５ａに対する供給電力のみを定
量的に制御し、光パワーの制御目標値が第一の所定値Ｔ
1〜第二の所定値Ｔ2 （ただしＴ2 ＞Ｔ1 ）である場合
は、電源装置１１ｃをオフ状態に、電源装置１１ａによ
る放電電極３ａ、５ａに対する供給電力を第一の所定値
Ｔ1 が得られる値に保った状態、即ち電源装置１１ａを
フルパワー状態にして、電源装置１１ｂによる放電電極
３ｂ、５ｂに対する供給電力を定量的に制御し、光パワ
ーの制御目標値が第二の所定値Ｔ2 〜第三の所定値Ｔ3
（ただしＴ3＞Ｔ2 ）である場合は、電源装置１１ａに
よる放電電極３ａ、５ａに対する供給電力および電源装
置１１ｂによる放電電極３ｂ、５ｂに対する供給電力を
各々第二の所定値Ｔ2 が得られる値に保った状態、即ち
電源装置１１ａと１１ｂとをフルパワー状態にして、電
源装置１１ｃによる放電電極３ｃ、５ｃに対する供給電
力を定量的に制御する。The power control by the controller 13 is shown in FIG.
As shown in (a) to (c), when the control target value T of the optical power is 0 to the first predetermined value T 1 , both the power supply devices 11b and 11c are turned off and the power supply device 11b is turned off. 11
Only the power supplied to the discharge electrodes 3a, 5a by a is quantitatively controlled, and the control target value of the optical power is the first predetermined value T.
1 to the second case is a predetermined value T 2 (provided that T 2> T 1), the power supply device 11c in the OFF state, the power supply apparatus 11a according to the discharge electrode 3a, the first predetermined value the supply power to 5a T 1 The power supply device 11a is in a full power state to quantitatively control the power supplied to the discharge electrodes 3b and 5b by the power supply device 11b, and the control target value of the optical power is the second predetermined value. Value T 2 to third predetermined value T 3
When (T 3 > T 2 ), the second predetermined value T 2 is obtained for the power supplied to the discharge electrodes 3 a and 5 a by the power supply device 11 a and the power supplied to the discharge electrodes 3 b and 5 b by the power supply device 11 b. The power supply device 11a and the power supply device 11b are kept in a full power state, and the power supply device 11c supplies power to the discharge electrodes 3c and 5c quantitatively.
【００１６】なお、図２の（ａ）は電源装置１１ａによ
る放電電極３ａ、５ａに対する供給電力の制御特性を、
（ｂ）は電源装置１１ｂによる放電電極３ｂ、５ｂに対
する供給電力の制御特性を、（ｃ）は電源装置１１ｃに
よる放電電極３ｃ、５ｃに対する供給電力の制御特性を
各々示している。2 (a) shows the control characteristics of the electric power supplied to the discharge electrodes 3a, 5a by the power supply device 11a,
(B) shows the control characteristic of the electric power supplied to the discharge electrodes 3b, 5b by the power supply device 11b, and (c) shows the control characteristic of the electric power supplied to the discharge electrodes 3c, 5c by the power supply device 11c.
【００１７】これにより供給電力の微小変化量ΔＳに対
する光パワーの変化量ΔＰは、カソード電極３とアノー
ド電極５とに対する供給電力を一括して制御する場合
（仮想線により示す）に比して概ね１／３になる。As a result, the change amount ΔP of the optical power with respect to the minute change amount ΔS of the supplied power is approximately as compared with the case where the supplied power to the cathode electrode 3 and the anode electrode 5 is collectively controlled (shown by a virtual line). It becomes 1/3.
【００１８】この実施例においては、カソード電極３と
アノード電極５の分割数は３にしてが、これは要求され
る光パワーの調整精度に応じて適当な数値に設定されれ
ばよく、この分割数が大きいほど光パワーの調整精度が
高精度化される。In this embodiment, the number of divisions of the cathode electrode 3 and the anode electrode 5 is set to 3, but this may be set to an appropriate value according to the required accuracy of adjusting the optical power. The larger the number, the higher the accuracy of adjusting the optical power.
【００１９】以上に於ては、本発明を特定の実施例につ
いて詳細に説明したが、本発明は、これに限定されるも
のではなく、本発明の範囲内にて種々の実施例が可能で
あることは当業者にとって明らかであろう。In the above, the present invention has been described in detail with respect to a specific embodiment, but the present invention is not limited to this, and various embodiments are possible within the scope of the present invention. It will be apparent to those skilled in the art.
【００２０】[0020]
【発明の効果】以上の説明から理解される如く、本発明
による放電励起式レーザ発振器の出力制御方法および放
電励起式レーザ発振器によれば、複数個に分割された放
電電極のうちの一つの放電電極に対する供給電力の定量
的制御による光パワーの変化率は、供給電力の最小制御
量が同一であっても、すべての放電電極に対する供給電
力の一斉に制御した場合に比して、その分割数に応じて
低減するから、光パワーの微調整が的確に行われ得るよ
うになり、またフィードバック制御においては良好な整
定特性が得られるようになり、またＳ／Ｎ比が向上し、
フィードバック制御の精度も向上する。As can be understood from the above description, according to the output control method of the discharge excitation laser oscillator and the discharge excitation laser oscillator according to the present invention, one of the discharge electrodes divided into a plurality of discharges is discharged. The rate of change in the optical power due to the quantitative control of the power supply to the electrodes is the number of divisions compared to the case where the power supply to all discharge electrodes is controlled simultaneously, even if the minimum control amount of the power supply is the same. Therefore, fine adjustment of the optical power can be accurately performed, good settling characteristics can be obtained in the feedback control, and the S / N ratio is improved.
The accuracy of feedback control is also improved.
【図１】本発明による放電励起式レーザ発振器の一実施
例を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an embodiment of a discharge excitation type laser oscillator according to the present invention.
【図２】本発明による放電励起式レーザ発振器における
制御特性を示すグラフである。FIG. 2 is a graph showing control characteristics of the discharge excitation laser oscillator according to the present invention.
【図３】本発明による放電励起式レーザ発振器におけ光
パワー出力特性とを示すグラフである。FIG. 3 is a graph showing optical power output characteristics in the discharge excitation type laser oscillator according to the present invention.
１ 放電励起空間 ３ カソード電極 ３ａ、３ｂ、３ｃ 放電電極 ５ アノード電極 ５ａ、５ｂ、５ｃ 放電電極 １１ａ、１１ｂ、１１ｃ 電源装置 １３ 制御装置 １５ 光パワー計 1 Discharge excitation space 3 cathode electrode 3a, 3b, 3c discharge electrodes 5 Anode electrode 5a, 5b, 5c discharge electrodes 11a, 11b, 11c power supply device 13 Control device 15 Optical power meter
Claims (2)
個に分割し、各放電電極に個別に電力を供給するｎ個の
電源部を共通して制御する放電励起式レーザ発振器の出
力制御方法であって、 光パワーの制御目標値のレベルを第１範囲から第ｎ範囲
までｎ個の範囲に分け、制御目標値が第ｍ（１＜ｍ＜
ｎ）範囲にあるときは、（ｍ−１）個の電源部をフルパ
ワーにし、かつ、別の１個の電源部を定量的に制御し、
残りの電源部はオフ状態にしておくことで、光パワーを
目標値になるよう制御する ことを特徴とする放電励起式
レーザ発振器の出力制御方法。1. A discharge electrode disposed in the discharge excitation space is n.
It is divided into n pieces to supply power to each discharge electrode individually.
Output of a discharge excitation laser oscillator that controls the power supply unit in common
A power control method, wherein the level of the control target value of the optical power is from the first range to the n-th range.
Up to the nth range, and the control target value is m-th (1 <m <
n) range, full power supply of (m-1)
Power and quantitatively control another power supply unit,
By turning off the rest of the power supply unit, the optical power is
An output control method of a discharge excitation type laser oscillator, which is characterized by controlling to a target value .
極と、各放電電極に個別に電力を供給するｎ個の電源部
と、各電源部を共通して制御する制御部とを備え、光パ
ワーの制御目標値のレベルを第１範囲から第ｎ範囲まで
ｎ個の範囲に分けて制御する放電励起式レーザ発振器で
あって、 前記制御部が、光パワーの前記制御目標値が第ｍ（１＜
ｍ＜ｎ）範囲にあるときは、（ｍ−１）個の電源部をフ
ルパワーにし、かつ、別の１個の電源部を定量的に制御
し、残りの電源部はオフ状態にしておくことで、光パワ
ーを目標値になるよう制御する ことを特徴とする放電励
起式レーザ発振器。2. N discharge electrodes arranged in the discharge excitation space.
N poles and n power supply units that individually supply power to each discharge electrode
And a control unit that controls each power supply unit in common.
The control target level of the work from the 1st range to the nth range
With a discharge-pumped laser oscillator that controls by dividing into n ranges
Therefore, the control unit determines that the control target value of the optical power is m-th (1 <
When it is in the range of m <n, the (m-1) power supply units are
Power, and quantitatively control another power supply unit
Optical power by turning off the rest of the power supply.
Discharge pump type laser oscillator characterized by controlling the temperature to a target value .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26262793A JP3515146B2 (en) | 1993-10-20 | 1993-10-20 | Output control method of discharge pumped laser oscillator and discharge pumped laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26262793A JP3515146B2 (en) | 1993-10-20 | 1993-10-20 | Output control method of discharge pumped laser oscillator and discharge pumped laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07122799A JPH07122799A (en) | 1995-05-12 |
| JP3515146B2 true JP3515146B2 (en) | 2004-04-05 |
Family
ID=17378429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26262793A Expired - Fee Related JP3515146B2 (en) | 1993-10-20 | 1993-10-20 | Output control method of discharge pumped laser oscillator and discharge pumped laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3515146B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4012216B2 (en) * | 2005-06-08 | 2007-11-21 | ファナック株式会社 | Laser oscillator |
| JP5172996B2 (en) | 2011-07-15 | 2013-03-27 | ファナック株式会社 | Command device for gas laser oscillators that can command at high speed and high accuracy |
-
1993
- 1993-10-20 JP JP26262793A patent/JP3515146B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07122799A (en) | 1995-05-12 |
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