JP3511959B2 - Inlet / outlet symmetric flow meter - Google Patents
Inlet / outlet symmetric flow meterInfo
- Publication number
- JP3511959B2 JP3511959B2 JP31516399A JP31516399A JP3511959B2 JP 3511959 B2 JP3511959 B2 JP 3511959B2 JP 31516399 A JP31516399 A JP 31516399A JP 31516399 A JP31516399 A JP 31516399A JP 3511959 B2 JP3511959 B2 JP 3511959B2
- Authority
- JP
- Japan
- Prior art keywords
- inflow
- outflow
- flow rate
- fluid
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液体、気体などの
流量を計測する流量計測装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate measuring device for measuring the flow rate of liquid, gas and the like.
【０００２】[0002]
【従来の技術】従来の流量計測装置は、特開平７−２７
５８３号公報に示されるように、流体を計量する流量膜
をピストン状に構成し、このピストン動作を逆回転防止
機構を備えたクランク軸を用いて回転運動に変換すると
とともに、その回転数を検出し、流体の流量を計測して
いた。2. Description of the Related Art A conventional flow rate measuring device is disclosed in Japanese Patent Laid-Open No. 7-27.
As disclosed in Japanese Patent No. 583, the flow rate membrane for measuring the fluid is formed in a piston shape, and this piston operation is converted into rotational movement using a crankshaft equipped with a reverse rotation prevention mechanism, and at the same time, its rotational speed is detected. However, the flow rate of the fluid was measured.
【０００３】[0003]
【発明が解決しようとする課題】このように従来の流量
計測装置では、逆方向に流れる流体の流量を計測するこ
とができないため、流量計測装置の取付け方向が限定さ
れ、また、流体に圧力変動がある場合、流量計測装置に
方向性があるため正確に計測できないという課題があっ
た。As described above, since the conventional flow rate measuring device cannot measure the flow rate of the fluid flowing in the opposite direction, the mounting direction of the flow rate measuring device is limited, and the pressure fluctuation of the fluid is limited. If so, there is a problem in that the flow rate measuring device cannot be accurately measured because it has directionality.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するため
に、本発明の流入・流出対称型流量計は、流体の流入孔
と、流体の流入孔と、流量計測部と、流体の流出孔とか
らなり、前記流入孔と前記流量計測部との間に流入側整
流部を、前記流量計測部と前記流出孔との間に流出側整
流部をそれぞれ設け、さらに前記流入側整流部および流
出側整流部は、前記流入孔および流出孔よりも断面積を
大に設定したチャンバと、これらチャンバの流量計測部
側に配置した整流部材とで構成し、流入側・流出側とを
対称となるようにした。 In order to solve the above-mentioned problems, the inflow / outflow symmetric flowmeter of the present invention is provided with a fluid inflow hole.
, Fluid inflow hole, flow rate measuring unit, fluid outflow hole
Between the inflow hole and the flow rate measuring unit.
Align the flow section between the flow measurement section and the outflow hole on the outflow side.
A flow section, and the inflow side rectification section and the flow section.
The outlet side rectifying section has a cross-sectional area larger than that of the inflow hole and the outflow hole.
Large set chambers and flow rate measurement parts of these chambers
It is composed of a rectifying member arranged on the
I made it symmetrical.
【０００５】これによって、流入側から流体を流した時
も、流出側から流体を逆流させた時も、流体の流量を計
測することができる。また、流量計測装置の取付け方向
が自由となり、設置性 が向上すると共に、流体に圧力変
動がある場合にも、流量計測装置に方向性がなく対称で
あるため、正確に流量を計測することができる。 As a result, when the fluid flows from the inflow side
Also, when the fluid flows backward from the outflow side, the flow rate of the fluid is measured.
Can be measured. Also, install the flow rate measuring device.
Is free, the installation is improved, and the pressure changes to the fluid.
Even if there is movement, the flow rate measuring device is directional and symmetrical.
Therefore, the flow rate can be accurately measured.
【０００６】[0006]
【発明の実施の形態】本発明は、流体の流入孔と、流量
計測部と、流体の流出孔とからなり、前記流入孔と前記
流量計測部との間に流入側整流部を、前記流量計測部と
前記流出孔との間に流出側整流部をそれぞれ設け、さら
に前記流入側整流部および流出側整流部は、前記流入孔
および流出孔よりも断面積を大に設定したチャンバと、
これらチャンバの流量計測部側に配置した整流部材とで
構成した。BEST MODE FOR CARRYING OUT THE INVENTION The present invention comprises a fluid inflow hole, a flow rate measuring portion, and a fluid outflow hole. An inflow side rectifying portion is provided between the inflow hole and the flow rate measuring portion. With the measurement section
An outflow side rectification unit is provided between each of the outflow holes and
The inflow side rectification section and the outflow side rectification section are provided in the inflow hole.
And a chamber with a larger cross-sectional area than the outflow holes,
With the rectifying member arranged on the flow rate measurement side of these chambers
Configured .
【０００７】このため、流入側から流体を順流で流した
時も、流出側から流体を逆流で流した時も、流体の流量
を安定して正確に計測することができるとともに、流量
計測装置の取付け方向が限定されるということがなくな
る。しかも、流体に圧力変動がある場合にも、流量計測
装置に方向性がなく対称であるため、順流で流した時
も、逆流で流した時も、正確に計測することができる。 For this reason, the fluid was made to flow forward from the inflow side.
The flow rate of the fluid both when the fluid flows backward from the outlet side
The flow rate can be measured stably and accurately.
There is no need to limit the mounting direction of the measuring device.
It Moreover, flow rate measurement is possible even when there is pressure fluctuation in the fluid.
Since the device has no directionality and is symmetric, when flowing forward
Also, it is possible to accurately measure even when flowing backward.
【０００８】加えて、流入側から流体を流した時も、流
出側から流体を逆流させた時も、チャンバで流体が一度
拡大した後、縮小するので、流体が流路内を非常に安定
して流れる。そして、整流部材で流れが整流されるた
め、流体が流路内を非常に安定して流れる。特に、流量
計測部内では安定して流れるので、正確に流体の流量を
計測することができる。 In addition, when the fluid is made to flow from the inflow side,
Even when the fluid flows backward from the outlet side,
Expands and then shrinks, so fluid is very stable in the flow path
Then flow. Then, the flow is rectified by the rectifying member.
Therefore, the fluid flows in the flow channel very stably. Especially the flow rate
The flow rate of the fluid is accurate because it flows stably in the measuring section.
It can be measured.
【０００９】整流部材としては、ハニカムおよびメッシ
ュのどちらか一方もしくは両方を用いるようにしている
ため、流体がビーム状に整流され、安定して流れるた
め、正確に流体の流量を正確に計測することができる。 Honeycomb and mesh are used as the flow regulating member.
Either one or both
Therefore, the fluid is rectified into a beam and flows stably.
Therefore, the flow rate of the fluid can be accurately measured.
【００１０】また、流量計測部の中央部に、熱式フロー
センサを設けた。このため、流入側から流体を流した時
も、流出側から流体を逆流させた時も、流体が流量計測
部を安定して流れるので、流体の流量を安定に、しかも
正確に計測することができる。また、流体に圧力変動が
あっても、安定に、しかも正確に計測することができ
る。 Further , a thermal type flow is provided at the center of the flow rate measuring section.
A sensor was provided. For this reason, when flowing the fluid from the inflow side
Also, when the fluid flows backward from the outflow side, the fluid flow rate is measured.
Since it flows stably through the section, the flow rate of the fluid is stable, and
Can be measured accurately. Also, pressure fluctuations in the fluid
Even if there is, it can be measured stably and accurately.
It
【００１１】また、熱式フローセンサを、前記流量計測
部の壁面に設けた凹部に格納した。このため、流体に直
接曝されないため、前記熱式フローセンサの信頼性が向
上し、流体の流量を安定に、しかも正確に計測すること
ができる。 Further , a thermal type flow sensor is used to measure the flow rate.
It was stored in a recess provided on the wall surface of the part. For this reason,
Since it is not exposed to heat, the reliability of the thermal flow sensor is improved.
To measure the flow rate of the fluid stably and accurately.
You can
【００１２】また、流量計測部に一対の超音波振動子を
対向して設け、超音波伝播方向を流体の流れる方向に配
置した。このため、超音波が流体の中を伝播し、流体の
流量を流れの方向に沿って平均化しながら計測するの
で、流体の流れ方向に多少の乱れがあっても、流体の流
量を安定に、しかも正確に計測することができる。 Further , a pair of ultrasonic transducers is installed in the flow rate measuring section.
Installed facing each other, the ultrasonic wave propagation direction is set to the fluid flow direction.
I put it. Therefore, ultrasonic waves propagate in the fluid and
To measure the flow rate while averaging along the flow direction
Therefore, even if there is some disturbance in the fluid flow direction, the fluid flow
The amount can be measured stably and accurately.
【００１３】また、流量計測部に複数対の超音波振動子
を対向して設け超音波伝播方向を流体の流れる方向と交
差するようにして配設した。このため、超音波が流体を
横断して幅方向および流れ方向に沿って伝播しながら、
流体の流量を計測するので、流体の幅方向あるいは流れ
方向に多少の乱れがあっても、流体の流量を安定に、し
かも正確に計測することができる。 Further , a plurality of pairs of ultrasonic transducers are provided in the flow rate measuring unit.
Are placed facing each other and the ultrasonic wave propagation direction intersects with the fluid flow direction.
It was arranged so as to be inserted. Because of this, ultrasonic waves
Propagating transversely along the width and flow directions,
Since the flow rate of the fluid is measured,
Even if there is some turbulence in the direction,
Can also be measured accurately.
【００１４】また、流入孔と流入側整流部との間に流入
側開閉弁を、流量計測部と流出孔との間に流出側開閉弁
をそれぞれ設けた。このため、流入側・流出側から見た
流路を対称に形成するとともに、計測流量に異常が発生
した場合に、流入側あるいは流出側の開閉弁を閉じるこ
とができ、安全を確保することができる。In addition, an inflow occurs between the inflow hole and the inflow side rectifying section.
The side opening / closing valve is located between the flow rate measuring unit and the outlet hole.
Are provided respectively. Therefore, as seen from the inflow side / outflow side
Both when the channel is formed symmetrically, when an abnormality occurs in the measurement flow rate, can be closed-off valve on the inflow side or the outflow side, it is possible to ensure safety.
【００１５】また、流入側開閉弁と流出側開閉弁の少な
くとも一方を動作可能とした。このため、流入側・流出
側から見た流路を対称に形成するように、流入側および
流出側の両方に開閉弁を設置しても、一方は動作する必
要がないため、低価格とすることができる。 Also, the number of inflow-side opening / closing valves and outflow-side opening / closing valves is small.
At least one can be operated. Therefore, inflow side / outflow
So that the flow path seen from the side is formed symmetrically,
Even if on-off valves are installed on both the outflow side, one must operate.
Since it is unnecessary, the price can be reduced.
【００１６】また流量計測部の中央部に、ゲート型開閉
弁を設けた。このため、一つの開閉弁で、流入側・流出
側から見た流路を対称に形成できる。 A gate type opening / closing is provided at the center of the flow rate measuring unit.
A valve was installed. Therefore, one open / close valve can be used for inflow and outflow.
The flow channels viewed from the side can be formed symmetrically.
【００１７】[0017]
【実施例】以下、本発明の実施例について図面を用いて
説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１８】（実施例１）
図１は、本発明の実施例１の流入・流出対称型流量計に
おける側面図である。図１において、１は流入孔、２は
流出孔、３は流入側整流部、４は流出側整流部、５は流
量計測部を示す。流入孔１と流出孔２とは、対称形とな
るよう同じ形状、例えば、内径２０mm、長さ６０mmの円
筒状に構成した。流入側整流部３と流出側整流部４と
は、対称形となるよう同じ形状、例えば、４０mm立方体
とした。流量計測部５は、内径２０mmあるいは同面積の
矩形状とし、長さ４０mm程度とした。このような構成の
流量計測装置において、流量計測部５の中央部に熱線流
速計を設置し、流入孔１から、あるいは流出孔２から気
体、液体等の流体を流し、その流速を計測したところ、
流量計測部の断面にわたって、幅方向および高さ方向
に、同一の流速および流速分布が得られ、流体に対して
対称形となる。従って、１あるいは２のどちら側を流体
の入り口としても、同様に使用することができる。ま
た、供給する流体に、高周波、例えば、数Ｈｚ〜数十Ｈ
ｚの圧力変動を与えても、同一の流速および流速分布が
得られる。(Embodiment 1) FIG. 1 is a side view of an inflow / outflow symmetric flowmeter of Embodiment 1 of the present invention. In FIG. 1, 1 is an inflow hole, 2 is an outflow hole, 3 is an inflow side rectification unit, 4 is an outflow side rectification unit, and 5 is a flow rate measurement unit. The inflow hole 1 and the outflow hole 2 have the same shape so as to be symmetrical, for example, a cylindrical shape having an inner diameter of 20 mm and a length of 60 mm. The inflow side rectifying section 3 and the outflow side rectifying section 4 have the same shape so as to be symmetrical, for example, a 40 mm cube. The flow rate measuring unit 5 has a rectangular shape having an inner diameter of 20 mm or the same area and a length of about 40 mm. In the flow rate measuring device having such a configuration, a hot-wire anemometer is installed at the center of the flow rate measuring unit 5, and a fluid such as gas or liquid is flown from the inflow hole 1 or the outflow hole 2 and the flow velocity is measured. ,
The same flow velocity and flow velocity distribution are obtained in the width direction and the height direction over the cross section of the flow rate measurement unit, and the flow velocity measurement unit is symmetrical with respect to the fluid. Therefore, even if either side 1 or 2 is used as the fluid inlet, it can be used similarly. In addition, the supplied fluid has a high frequency, for example, several Hz to several tens of H.
Even if the pressure fluctuation of z is given, the same flow velocity and flow velocity distribution are obtained.
【００１９】このように、流入側から流体を流した時
も、流出側から流体を逆流させた時も、流体の流量を同
じように計測することができるため、流入・流出対称型
流量計測装置の取付け方向が限定されるということがな
くなる。また、流体に圧力変動がある場合にも、流入・
流出対称型流量計測装置に方向性がないため正確に計測
することができる。In this way, the flow rate of the fluid can be measured in the same way when the fluid is made to flow from the inflow side and when the fluid is made to flow backward from the outflow side. There is no limitation on the mounting direction of the. In addition, even if there is pressure fluctuation in the fluid,
Since the outflow symmetric type flow rate measuring device has no directionality, accurate measurement can be performed.
【００２０】なお、流入孔の長さ内径の２〜３倍以上の
長さがあれば、計測した流速は安定すると共に、流量計
測部５の長さは、４０mmとしたが、２０mm以上の長さで
あれば計測した流速は安定する。If the length of the inflow hole is at least 2 to 3 times the inner diameter, the measured flow velocity will be stable and the length of the flow rate measuring unit 5 will be 40 mm, but it will be at least 20 mm. If so, the measured flow velocity is stable.
【００２１】（実施例２）
図２は、本発明の実施例２の流入・流出対称型流量計に
おける流入側整流部３の断面図である。図２において、
６はチャンバを、７は流入孔１とチャンバ６との間に設
けた整流部材を、８はチャンバ６と流量計測部５との間
に設けた整流部材を示す。流出側整流部４も、対称形と
なるよう構成した（図示せず）。チャンバ６は、流入孔
１の断面積よりも５０％以上大きくなるよう構成した。
整流部材７、８はハニカムあるいはメッシュ等で構成
し、若干の圧力損失が発生するように構成した。流入孔
１から出た流体は、整流部材７で圧損を発生した後、流
路が滑らかに拡大するチャンバ６に導入され、流路が滑
らかに縮小する中を圧損を発生する整流部材８を通って
流量計測部５へと導入される。(Embodiment 2) FIG. 2 is a sectional view of an inflow side rectifying section 3 in an inflow / outflow symmetric flowmeter of Embodiment 2 of the present invention. In FIG.
Reference numeral 6 denotes a chamber, 7 denotes a rectifying member provided between the inflow hole 1 and the chamber 6, and 8 denotes a rectifying member provided between the chamber 6 and the flow rate measuring unit 5. The outflow side rectification unit 4 was also configured to be symmetrical (not shown). The chamber 6 was configured to be larger than the cross-sectional area of the inflow hole 1 by 50% or more.
The rectifying members 7 and 8 are made of a honeycomb, a mesh, or the like so that a slight pressure loss occurs. The fluid discharged from the inflow hole 1 is introduced into the chamber 6 in which the flow passage smoothly expands after the pressure loss is generated in the flow regulating member 7, and passes through the flow regulating member 8 that generates the pressure loss while the flow passage is smoothly contracted. And is introduced into the flow rate measuring unit 5.
【００２２】このように流体が滑らかに拡大し、チャン
バで淀み部分が発生し、また縮小する流路を経過し、流
量計測部５へ導入されるので、流入孔１以前の流体にど
のような乱れ成分があっても、流量計測部５の、流入側
あるいは流出側から約１０mm程度以降では、流体が非常
に安定して流れるので、正確に流体の流量を計測するこ
とができる。As described above, since the fluid smoothly expands, a stagnation portion is generated in the chamber, and passes through a contracting flow path and is introduced into the flow rate measuring unit 5, what kind of fluid is present before the inflow hole 1? Even if there is a turbulent component, the fluid flows very stably after about 10 mm from the inflow side or the outflow side of the flow rate measuring unit 5, so that the flow rate of the fluid can be accurately measured.
【００２３】（実施例３）
図３は、本発明の実施例３の流入・流出対称型流量計に
おける流入側の整流部材７の断面図である。図３におい
て、９はメッシュ部分を、１０はハニカム部分を示す。
メッシュ部分９は、ステンレスメッシュ＃５０〜＃２０
０を用いた。また、ハニカム部分１０は、一辺が２〜３
mmの六角形アルミハニカムを用いた。ハニカム長さは、
１０mm程度とした。なお、整流部材８も７と同様の構成
とした。なお、流出側も対称形となるよう同様の構成と
した。(Embodiment 3) FIG. 3 is a cross-sectional view of an inflow side rectifying member 7 in an inflow / outflow symmetric flowmeter of Embodiment 3 of the present invention. In FIG. 3, 9 indicates a mesh portion and 10 indicates a honeycomb portion.
The mesh portion 9 is made of stainless steel mesh # 50 to # 20.
0 was used. In addition, the honeycomb portion 10 has a side of 2 to 3
A hexagonal aluminum honeycomb of mm was used. Honeycomb length is
It was about 10 mm. The rectifying member 8 has the same configuration as 7. In addition, the same structure was adopted so that the outflow side was also symmetrical.
【００２４】このような構成にしたので、ハニカムによ
り流体がビーム状に整流され、また、メッシュにより流
体の圧力がメッシュの前面全域に渡って均一に印加され
整流される。このため流量計測部５では、流体が安定し
て流れるので、流体の流量を正確に計測することができ
る。なお、本実施例において、メッシュ・ハニカムの順
で構成したが、その逆の構成であっても同様の効果が得
られる。With such a structure, the fluid is rectified into a beam by the honeycomb, and the pressure of the fluid is uniformly applied and rectified by the mesh over the entire front surface of the mesh. Therefore, in the flow rate measuring unit 5, the fluid flows stably, so that the flow rate of the fluid can be accurately measured. In this embodiment, the mesh and the honeycomb are arranged in this order, but the same effect can be obtained even if the structure is reversed.
【００２５】（実施例４）
図４は、本発明の実施例４の流入・流出対称型流量計に
おける流量計測部５の断面図を示す。流量計測部５の流
入側と流出側との対称な位置、すなわち中央部の天井部
分に熱式フローセンサ１１を突出させる構成とした。流
量計測部５の中央部では、流入側から流体を流した時
も、流出側から流体を逆流させた時も、流体が十分安定
して流れているため、流体の流量を安定に、しかも正確
に計測することができる。(Embodiment 4) FIG. 4 shows a sectional view of a flow rate measuring section 5 in an inflow / outflow symmetric flowmeter of Embodiment 4 of the present invention. The thermal flow sensor 11 is configured to project at a symmetrical position between the inflow side and the outflow side of the flow rate measuring unit 5, that is, the central ceiling portion. In the central portion of the flow rate measuring unit 5, the fluid is flowing sufficiently stably both when the fluid is made to flow from the inflow side and when the fluid is made to flow backward from the outflow side, so the flow rate of the fluid is stable and accurate. Can be measured.
【００２６】また、流体に圧力変動があっても、安定
に、しかも正確に計測することができる。なお、流量計
測部５の底部に突出させても、同様の効果が得られる。
しかし、この場合には、天井部設置する場合にくらべ、
ゴミ等の付着が若干多くなり易い。また、流量計測部５
の側壁部分に熱式フローセンサを取付けてもよいが、こ
の場合には、対称性が若干悪くなるためか、天井部ある
いは底部の場合に比べ流量計測の再現性は低下する。Further, even if there is a pressure fluctuation in the fluid, stable and accurate measurement can be performed. The same effect can be obtained even if the flow rate measuring unit 5 is projected to the bottom.
However, in this case, compared to the case where the ceiling is installed,
A little more dust is likely to adhere. In addition, the flow rate measuring unit 5
Although a thermal type flow sensor may be attached to the side wall portion of the above, in this case, the reproducibility of the flow rate measurement is lower than that in the case of the ceiling portion or the bottom portion, probably because the symmetry is slightly deteriorated.
【００２７】（実施例５）
図５は、本発明の実施例５の流入・流出対称型流量計に
おける流量計測部５の中央部断面を示す。流量計測部５
の中央部に設けた凹部１２に熱式フローセンサ１１を突
出させる構成とした。このため、熱式フローセンサ１１
は、直接流体に曝されにくくなり、流体の流れが安定し
た。このため、実施例４に比べ、流量計測感度は若干落
ちるが、再現性は非常に向上する。(Embodiment 5) FIG. 5 shows a cross section of a central portion of a flow rate measuring unit 5 in an inflow / outflow symmetric flowmeter of Embodiment 5 of the present invention. Flow rate measurement unit 5
The thermal flow sensor 11 is configured to protrude into the recess 12 provided in the central portion of the. Therefore, the thermal flow sensor 11
Became difficult to be directly exposed to the fluid, and the fluid flow became stable. Therefore, compared with the fourth embodiment, the flow rate measurement sensitivity is slightly lowered, but the reproducibility is greatly improved.
【００２８】（実施例６）
図６は、本発明の実施例６の流入・流出対称型流量計に
おける流量計測部５の中央部断面を示す。流量計測部５
に設けた凹部１２に熱式フローセンサ１１を突出させ、
上面にメッシュ１２で覆う構成とした。このため、熱式
フローセンサ１１は、実施例５に比べ、さらに流体に曝
されにくくなり、流体の流れが非常に安定している。こ
のため、実施例５に比べ、流量計測感度は若干落ちる
が、再現性はさらに向上する。(Sixth Embodiment) FIG. 6 shows a cross section of a central portion of a flow rate measuring section 5 in an inflow / outflow symmetric flowmeter of a sixth embodiment of the present invention. Flow rate measurement unit 5
The thermal flow sensor 11 is projected into the recess 12 provided in
The upper surface was covered with the mesh 12. Therefore, the thermal type flow sensor 11 is more difficult to be exposed to the fluid as compared with the fifth embodiment, and the flow of the fluid is very stable. Therefore, the flow rate measurement sensitivity is slightly lower than that in the fifth embodiment, but the reproducibility is further improved.
【００２９】（実施例７）
図７は、本発明の実施例７の流入・流出対称型流量計に
おける流量計測計の側面図を示す。流入側整流部３と流
出側整流部４とに、流入側超音波振動子１４と流出側振
動子１５とを設けた。１６は超音波の伝播方向を示し、
流体の流れる方向と平行となるように構成した。流入側
超音波振動子１４の詳細断面を図８に示す。流入側超音
波振動子１４は、流入側整流部に設けた凹部に、圧電振
動子１７を設けた構成とした。(Embodiment 7) FIG. 7 shows a side view of a flow meter in an inflow / outflow symmetric type flow meter of Embodiment 7 of the present invention. The inflow-side ultrasonic transducer 14 and the outflow-side transducer 15 are provided in the inflow-side rectification unit 3 and the outflow-side rectification unit 4. 16 indicates the propagation direction of ultrasonic waves,
It was configured to be parallel to the direction of fluid flow. FIG. 8 shows a detailed cross section of the inflow side ultrasonic transducer 14. The inflow-side ultrasonic oscillator 14 has a configuration in which the piezoelectric oscillator 17 is provided in a recess provided in the inflow-side rectifying unit.
【００３０】なお、流出側にも同様にして、対称となる
ように構成した。このような配置において、流入側超音
波振動子と流出側超音波振動子との距離をＬ、流入側の
超音波振動子から超音波を送信し、流出側の超音波振動
子で受信する時の伝播時間をＴud、その逆に、流出側の
超音波振動子から超音波を送信し、流入側の超音波振動
子で受信する時の伝播時間をＴduとすると、音速をＣ、
流体の流速をＶfとすると、次式が成り立つ。The outflow side is also configured to be symmetrical. In such an arrangement, when the distance between the inflow-side ultrasonic transducer and the outflow-side ultrasonic transducer is L, ultrasonic waves are transmitted from the inflow-side ultrasonic transducer and received by the outflow-side ultrasonic transducer. Let Tud be the propagation time of Tud, and conversely, let Tdu be the propagation time when ultrasonic waves are transmitted from the ultrasonic transducer on the outflow side and received by the ultrasonic transducer on the inflow side.
When the flow velocity of the fluid is Vf, the following equation holds.
【００３１】
Ｔud＝Ｌ／（Ｃ＋Ｖf）、Ｔdu＝Ｌ／（Ｃ−Ｖf）
これより、Ｃ＋Ｖf＝Ｌ／Ｔud、Ｃ−Ｖf＝Ｌ／Ｔduが成
り立ち、その結果、２・Ｖf＝（Ｌ／Ｔud）＋（Ｌ／Ｔd
u）となる。Tud = L / (C + Vf), Tdu = L / (C−Vf) From this, C + Vf = L / Tud and C−Vf = L / Tdu are established, and as a result, 2 · Vf = (L / Tud ) + (L / Td
u).
【００３２】よって、 Ｖf＝（Ｌ／２）［（１／Ｔu
d）−（１／Ｔdu）］
このように、超音波伝播時間、ＴudおよびＴdu、を計測
することにより、流体の流速Ｖfを計測することができ
る。なお、この流体の流速Ｖfは、音速Ｃに依存しない
で求めることができ、流体の温度、すなわち、流体中の
音速が変化しても、計測結果に影響しないことがわか
る。この流体の流速Ｖfに、あらかじめ決められている
流量計測部５の断面積Ｓを乗ずることにより流体の流量
を、Ｑf＝Ｓ・Ｖfとして求められる。Therefore, Vf = (L / 2) [(1 / Tu
d)-(1 / Tdu)] As described above, the flow velocity Vf of the fluid can be measured by measuring the ultrasonic wave propagation time, Tud and Tdu. The flow velocity Vf of the fluid can be obtained without depending on the sound velocity C, and it can be seen that the measurement result is not affected even if the temperature of the fluid, that is, the sound velocity in the fluid changes. The flow rate of the fluid is obtained by multiplying the flow velocity Vf of the fluid by a predetermined cross-sectional area S of the flow rate measuring unit 5 as Qf = S · Vf.
【００３３】このように、流入側および流出側を対称に
構成した流量計としので、流体が安定して流れるため、
流量計測部５の高さ方向、すなわち図７の紙面の上下方
向、あるいは流量計測部５の横方向、すなわち図７の紙
面に垂直方向、ともに流速分布が安定しているので、超
音波が伝播する中央部のみを計測しても、再現性よく、
また精度よく流量を計測しりことができる。また、超音
波が流量計測部５内を伝播し流量を計測するため、流れ
方向に流体が若干乱れが発生していても、正確に流量を
計測することができる。なお、この場合流量計測部５は
円形、あるいは矩形断面形状であっても良い。Since the inflow side and the outflow side are configured symmetrically in this way, the fluid flows stably,
Since the flow velocity distribution is stable both in the height direction of the flow rate measuring unit 5, that is, in the vertical direction of the paper surface of FIG. 7, or in the horizontal direction of the flow rate measuring unit 5, that is, in the direction vertical to the paper surface of FIG. 7, ultrasonic waves propagate. Even if you measure only the central part,
In addition, the flow rate can be accurately measured. Further, since the ultrasonic waves propagate in the flow rate measuring unit 5 to measure the flow rate, the flow rate can be accurately measured even if the fluid is slightly disturbed in the flow direction. In this case, the flow rate measuring unit 5 may have a circular or rectangular sectional shape.
【００３４】（実施例８）
図９は、本発明の実施例８の流入・流出対称型流量計に
おける流入側超音波振動子１４の詳細断面を示す。１８
は、超音波振動子１４の前面に設けたメッシュを示す。
このメッシュ構成により、チェンバ内の流体が乱れるこ
となく流れ、流量計測部５を流れる流体の流れが安定し
て流れる。従って、流量計測精度がより一層向上し、再
現性がよくなる。(Embodiment 8) FIG. 9 shows a detailed cross section of the inflow side ultrasonic transducer 14 in the inflow / outflow symmetric flowmeter of Embodiment 8 of the present invention. 18
Indicates a mesh provided on the front surface of the ultrasonic transducer 14.
With this mesh configuration, the fluid in the chamber flows without being disturbed, and the flow of the fluid flowing through the flow rate measuring unit 5 flows stably. Therefore, the flow rate measurement accuracy is further improved and the reproducibility is improved.
【００３５】（実施例９）
図１０（ａ）は、本発明の実施例９の流入・流出対称型
流量計における流量計測部５の断面図を示す。図１０
（ｂ）は、図１０（ａ）の流出側から見た図を示す。図
中の記号Ｈは流量計測部５の高さ、すなわち図１の紙面
の上下方向、を示す。また、記号Ｗは流量計測部５横方
向、すなわち図１の紙面に垂直な方向を示す。矢印１９
およびは２０は流体の流れる方向を示し、破線２１およ
び２２は超音波の伝播する方向を示す。記号Ａは、流体
の流れる方向２０と、超音波の伝播する方向２１との交
差角を示す。２３と２４および２５と２６は、流体の流
れる流路を挟んで、それぞれ対向して設けられた圧電振
動子を示す。この構成において、流入側の振動子２３と
流出側の振動子２４、および、流入側の振動子２５と流
出側の振動子２６との間に、前記実施例７で示した超音
波の伝播時間と流体の流速との関係式が成り立つ。この
場合、振動子２３と２４間で得られた流速Ｖf1、振動子
２５と２６間で得られた流速Ｖf2、とから、流体の平均
流速値、Ｖf0＝（Ｖf1＋Ｖf2）／２を求め、流路の断面
積Ｓ（＝Ｈ・Ｗ、高さＨ、幅Ｗ）とを乗じ、流体の流
量、Ｑf0とした。すなわち、Ｑf0＝Ｖf0・Ｓとした。(Embodiment 9) FIG. 10A shows a sectional view of a flow rate measuring section 5 in an inflow / outflow symmetric flowmeter of Embodiment 9 of the present invention. Figure 10
(B) shows the figure seen from the outflow side of Fig. 10 (a). The symbol H in the drawing indicates the height of the flow rate measuring unit 5, that is, the vertical direction of the paper surface of FIG. The symbol W indicates the lateral direction of the flow rate measuring unit 5, that is, the direction perpendicular to the paper surface of FIG. Arrow 19
And 20 indicate the flow direction of the fluid, and broken lines 21 and 22 indicate the propagation direction of the ultrasonic waves. The symbol A indicates an intersection angle between the fluid flow direction 20 and the ultrasonic wave propagation direction 21. Reference numerals 23 and 24 and 25 and 26 denote piezoelectric vibrators provided so as to be opposed to each other with a fluid flow path interposed therebetween. In this configuration, the ultrasonic wave propagation time shown in the seventh embodiment is provided between the inflow side transducer 23 and the outflow side transducer 24, and between the inflow side transducer 25 and the outflow side transducer 26. And the relational expression of the fluid flow velocity holds. In this case, the average flow velocity value of the fluid, Vf0 = (Vf1 + Vf2) / 2, is calculated from the flow velocity Vf1 obtained between the oscillators 23 and 24 and the flow velocity Vf2 obtained between the oscillators 25 and 26, and the flow path is obtained. The cross-sectional area S (= H · W, height H, width W) of was multiplied by to obtain the fluid flow rate, Qf0. That is, Qf0 = Vf0 · S.
【００３６】このように超音波が流量計測部５の幅方向
および流れ方向に伝播して流量を計測するので、幅方向
および流れ方向に多少の乱れがあっても、高精度に流体
の流量を計測することができる。このように、流入側と
流出側、さらには幅方向にも対称に構成したので、流入
側、流出側の方向性のない高精度な流量計を構成するこ
とができる。Since the ultrasonic waves propagate in the width direction and the flow direction of the flow rate measuring unit 5 to measure the flow rate, the flow rate of the fluid can be accurately measured even if there is some disturbance in the width direction and the flow direction. It can be measured. In this way, since the inflow side and the outflow side are configured symmetrically in the width direction as well, it is possible to configure a highly accurate flowmeter without directivity on the inflow side and the outflow side.
【００３７】なお、上記実施例において、２組の振動子
による計測を示したが、どちらか一方の振動子組みだけ
であっても、高精度な計測が実現できる。すなわち、２
組みの配置があるため、流体の流れに対しては対称とな
り、流入側あるいは流出側から、流体を供給しても、同
様に安定して流れる。この結果安定した流量計測結果が
得られる。なお、一方の振動子の組み、例えば、２３と
２４、あるいは２５と２６とのみで構成されていても、
幅方向に対しては流れの対称が落ちるが、流入側と流出
側とに対しては、すなわち流れ方向には対称性を保つこ
とができるので、流入側あるいは流出側から、流体を供
給しても、安定して流れるので、安定して計測すること
ができる。In the above embodiment, the measurement with two sets of vibrators is shown. However, highly accurate measurement can be realized with only one of the sets of vibrators. Ie 2
Because of the arrangement of the pairs, the fluid is symmetrical with respect to the flow of the fluid, and even if the fluid is supplied from the inflow side or the outflow side, the fluid similarly flows. As a result, a stable flow rate measurement result can be obtained. In addition, even if it is configured only with one of the pairs of transducers, for example, 23 and 24, or 25 and 26,
Although the flow symmetry decreases in the width direction, it is possible to maintain symmetry with respect to the inflow side and the outflow side, that is, in the flow direction, so that the fluid is supplied from the inflow side or the outflow side. Also, since it flows stably, it is possible to measure stably.
【００３８】また、圧電振動子２３、２４および２５、
２６の前面にメッシュを設けることにより、流路の凹部
により流体が乱されなくなるので、流体の流れが更に安
定して流れ、流量計測精度がより一層向上する。Further, the piezoelectric vibrators 23, 24 and 25,
By providing the mesh on the front surface of 26, the fluid is not disturbed by the concave portion of the flow path, so that the fluid flow is more stable and the flow rate measurement accuracy is further improved.
【００３９】また、流量計測部５の流路を偏平な矩形断
面（高さＨ、幅Ｗ）としたので、流体の流れが偏平流路
の高さ方向；Ｈのみに規制されるため、偏平流路の幅方
向；Ｗの流速分布が小さくなる。従って、小流量から大
流量にわたって、より対称性が向上し、流体の流れが安
定し、正確に計測することができる。Further, since the flow path of the flow rate measuring section 5 has a flat rectangular cross section (height H, width W), the flow of the fluid is restricted only in the height direction of the flat flow path; The flow velocity distribution in the width direction of the flow path; W becomes smaller. Therefore, from a small flow rate to a large flow rate, the symmetry is improved, the fluid flow is stabilized, and accurate measurement can be performed.
【００４０】（実施例１０）
図１１は、本発明の実施例１０の流入・流出対称型流量
計における流量計測装置の側面図を示す。２７および２
８は流入孔１および流出孔２に設けた流入側および流出
側の開閉弁を示す。このように流入側、流出側に対称と
なるように開閉弁を設けたので、流入側から、あるいは
流出側から流体を供給しても同様の形状の開閉弁２７あ
るいは２８を、流体が通過する。このため、たとえ流体
に乱れ発生したとしても、同様の影響を流量計測部５を
流れる流れに与えることになるので、流入側から流体を
供給した時も、あるいは、流出側から流体を供給した時
も、同様に流量を安定して計測することができる。すな
わち、対称な流入・流出対称型流量計測装置を実現する
ことができる。(Embodiment 10) FIG. 11 is a side view of a flow rate measuring device in an inflow / outflow symmetric flowmeter of Embodiment 10 of the present invention. 27 and 2
Reference numeral 8 denotes inflow and outflow opening / closing valves provided in the inflow hole 1 and the outflow hole 2. Since the on-off valves are provided symmetrically on the inflow side and the outflow side in this way, even if the fluid is supplied from the inflow side or the outflow side, the fluid passes through the on-off valves 27 or 28 having the same shape. . For this reason, even if turbulence occurs in the fluid, the same effect is exerted on the flow flowing through the flow rate measuring unit 5. Therefore, even when the fluid is supplied from the inflow side or when the fluid is supplied from the outflow side. Also, similarly, the flow rate can be stably measured. That is, it is possible to realize a symmetrical inflow / outflow symmetrical flow rate measuring device.
【００４１】この構成により、計測流量に異常が発生し
た場合に、流入側あるいは流出側の開閉弁を、あるいは
両方の開閉弁を閉じることができ、安全を確保すること
ができる。この構成で、流入側、流出側の区別のない、
どちら側からもガスの供給できる、安全性の高い、いわ
ゆるマイコンガスメータを実現できる。With this configuration, when an abnormality occurs in the measured flow rate, the inflow side or outflow side open / close valve or both open / close valves can be closed, and safety can be ensured. With this configuration, there is no distinction between the inflow side and the outflow side,
It is possible to realize a highly safe so-called microcomputer gas meter that can supply gas from either side.
【００４２】なお、上記実施例において、流入側開閉弁
あるいは流出側開閉弁の内、どちらか一方の開閉弁が動
作可能であれば、上記の安全性の高いマイコンメータを
実現できる。この場合、動作しない開閉弁は、形状のみ
あれば良いので、低価格で構成することができる。In the above embodiment, if one of the inflow-side opening / closing valve and the outflow-side opening / closing valve can operate, the above highly safe microcomputer meter can be realized. In this case, since the on-off valve that does not operate may have only the shape, it can be constructed at a low cost.
【００４３】（実施例１１）
図１２は、本発明の実施例１１の流入・流出対称型流量
計測装置における流量計測装置の側面図を示す。２９
は、実施例９（図１０）に示した流量計測部５の中央部
である対称な位置に設けた左右対称に構成されるゲート
型開閉弁、いわゆるギロチン型弁を示す。流入側の超音
波振動子２３と、流出側の超音波振動子２６との中間位
置に相当する。ゲート型開閉弁２９は、比較的容易に口
径を大きくすることができるので、この目的には最適で
ある。口径を大きくすることにより、伝播する超音波を
乱すことがない。また、流体の流れをも乱すことがな
い。(Embodiment 11) FIG. 12 is a side view of a flow rate measuring device in an inflow / outflow symmetric type flow amount measuring device according to an eleventh embodiment of the present invention. 29
Shows a so-called guillotine type gate type on-off valve which is symmetrically provided at a symmetrical position which is the central portion of the flow rate measuring unit 5 shown in Example 9 (FIG. 10). It corresponds to an intermediate position between the ultrasonic transducer 23 on the inflow side and the ultrasonic transducer 26 on the outflow side. The gate-type on-off valve 29 is suitable for this purpose because it can relatively easily increase its diameter. By increasing the aperture, the propagating ultrasonic waves are not disturbed. Further, it does not disturb the flow of fluid.
【００４４】このように中央部にゲート型開閉弁を構成
することにより、一つの開閉弁で、対称性を確保すると
ともに、いわゆるマイコンメータを、簡単な構成で実現
することができる。By constructing the gate type on-off valve in the central portion in this way, it is possible to secure symmetry with one on-off valve and to realize a so-called microcomputer meter with a simple configuration.
【００４５】（実施例１２）
図１３は、本発明の実施例１２の流入・流出対称型流量
計測装置における流入・流出対称型流量計の正面図を示
す。３０は流入・流出対称型流量計の外装部を、３１は
流入側表示部を、３２１は流出側表示部を示す。流入・
流出対称型流量計を配管等に設置した後に、流入側およ
び流出側を確認し、流入側には流入側表示部３１を、流
出側には流出側表示部３２を取付ける。(Embodiment 12) FIG. 13 shows a front view of an inflow / outflow symmetric flowmeter in an inflow / outflow symmetric flowmeter of Embodiment 12 of the present invention. Reference numeral 30 denotes an exterior part of the symmetrical inflow / outflow type flow meter, 31 an inflow side display part, and 321 an outflow side display part. Inflow
After the outflow symmetric type flow meter is installed in a pipe or the like, the inflow side and the outflow side are confirmed, and the inflow side display unit 31 is attached to the inflow side and the outflow side display unit 32 is attached to the outflow side.
【００４６】この構成により、外部から見た場合に、配
管のどちら側が流体の、流入側もしくは流出側かが、一
目瞭然となり、逆取付けなどの問題がなくなる。また、
このような表示部を、内部に有するマイコン等を用い、
設置時に、自動的に流体の流入側あるいは流出側を判別
し、自動的にＬＣＤ等に表示することも可能となる。そ
してこの場合には、更に、人手を介することなく実施で
きるので、利便性および信頼性が向上する。With this structure, it is possible to see at a glance which side of the pipe is the fluid inflow side or outflow side when viewed from the outside, and problems such as reverse mounting are eliminated. Also,
Such a display unit, using a microcomputer or the like inside,
At the time of installation, it is possible to automatically identify the inflow side or outflow side of the fluid and automatically display it on the LCD or the like. Further, in this case, since it can be carried out without human intervention, convenience and reliability are improved.
【００４７】[0047]
【発明の効果】以上の説明から明らかなように本発明の
流量計測装置によれば次の効果が得られる。As is apparent from the above description, the following effects can be obtained by the flow rate measuring device of the present invention.
【００４８】（１）流体の流入孔と、流量計測部と、流
体の流出孔とを流れに沿って対称となるよう配置したの
で、流入側から流体を順流で流した時も、流出側から流
体を逆流で流した時も、流体の流量を安定して正確に計
測することができる。また、流量計測装置の取付け方向
が限定されるということがなくなる。また、流体に圧力
変動がある場合にも、流量計測装置に方向性がなく対称
であるため、順流で流した時も、逆流で流した時も、正
確に計測することができる。(1) Since the fluid inflow hole, the flow rate measuring portion, and the fluid outflow hole are arranged symmetrically along the flow, even when the fluid is made to flow forward from the inflow side, Even when the fluid is caused to flow backward, the flow rate of the fluid can be stably and accurately measured. Further, the mounting direction of the flow rate measuring device is not limited. Further, even when there is a pressure fluctuation in the fluid, since the flow rate measuring device has no directionality and is symmetric, it is possible to accurately measure the flow rate when flowing forward and when flowing backward.
【００４９】（２）整流部をチャンバと整流部材とで構
成したので、流入側から流体を流した時も、流出側から
流体を逆流させた時も、前記チャンバ部で流体が一度拡
大した後、縮小するので、流体が流路内を非常に安定し
て流れる。また、整流部材で流れが整流されるため、流
体が流路内を非常に安定して流れる。特に、流量計測部
内では安定して流れるので、正確に流体の流量を計測す
ることができる。(2) Since the rectifying section is composed of the chamber and the rectifying member, after the fluid once expanded in the chamber section, both when the fluid was made to flow from the inflow side and when the fluid was made to flow backward from the outflow side. , So that the fluid flows in the flow path very stably. Moreover, since the flow is rectified by the rectifying member, the fluid flows in the flow channel very stably. In particular, the flow rate can be accurately measured because the flow rate is stable in the flow rate measurement unit.
【００５０】（３）整流部材を、ハニカムおよびメッシ
ュを用いて構成したので、流体がビーム状に整流された
り、あるいは流体の圧力がメッシュの前面全域に渡って
均一に印加され、整流されるので、流体の流量を正確に
計測することができる。(3) Since the rectifying member is composed of the honeycomb and the mesh, the fluid is rectified into a beam shape, or the pressure of the fluid is uniformly applied and rectified over the entire front surface of the mesh. The flow rate of fluid can be measured accurately.
【００５１】（４）流量計測部の中央部の上流側・下流
側の対称な位置に、熱式フローセンサを設けたので、流
入側から流体を流した時も、流出側から流体を逆流させ
た時も、流体が流量計測部を安定して流れるので、流体
の流量を正確に計測することができる。また、流体に圧
力変動があっても、安定して、しかも正確に計測するこ
とができる。(4) Since the thermal type flow sensors are provided at symmetrical positions on the upstream side and the downstream side of the central portion of the flow rate measuring section, even when the fluid flows from the inflow side, the fluid flows backward from the outflow side. Even when the fluid flows, the fluid stably flows through the flow rate measuring unit, so that the fluid flow rate can be accurately measured. Further, even if there is a pressure fluctuation in the fluid, stable and accurate measurement can be performed.
【００５２】（５）熱式フローセンサを、流量計測部の
壁面に設けた凹部に格納する構成としたので、流体に直
接曝されないため、熱式フローセンサの信頼性が向上
し、流体の流量を安定して、しかも正確に計測すること
ができる。(5) Since the thermal type flow sensor is stored in the concave portion provided on the wall surface of the flow rate measuring section, the thermal type flow sensor is not directly exposed to the fluid, the reliability of the thermal type flow sensor is improved, and the flow rate of the fluid is increased. Can be measured stably and accurately.
【００５３】（６）熱式フローセンサを格納した凹部の
流量計測部に接する面に流体の乱れ防止網を配設したの
で、流体が前記熱式フローセンサに乱されないで、安定
して流れしかも正確に計測することができる。(6) Since the fluid turbulence prevention mesh is arranged on the surface of the concave portion accommodating the thermal type flow sensor in contact with the flow rate measuring portion, the fluid flows stably without being disturbed by the thermal type flow sensor. Can be measured accurately.
【００５４】（７）流量計測部に、一対の超音波振動子
を対向して設け、その超音波伝播方向を、流体の流れる
方向に配設したので、超音波が流体の中を伝播し、流体
の流量を流れの方向に沿って平均化しながら計測するこ
とができ、流体の流れ方向に多少の乱れがあっても、流
体の流量を安定して、しかも正確に計測することができ
る。(7) Since a pair of ultrasonic transducers are provided in the flow rate measuring unit so as to face each other and the ultrasonic wave propagation direction is arranged in the fluid flow direction, the ultrasonic wave propagates in the fluid, The flow rate of the fluid can be measured while being averaged along the flow direction, and even if there is some disturbance in the flow direction of the fluid, the flow rate of the fluid can be stably and accurately measured.
【００５５】（８）流量計測部に、複数対の超音波振動
子を対向して設け、その超音波伝播方向を、流体の流れ
る方向と交差して配設したので、超音波が流体を横断し
て幅方向に、また、流れ方向に沿って伝播しながら、流
体の流量を計測することができ、流体の幅方向あるいは
流れ方向に多少の乱れがあっても、流体の流量を安定し
て、しかも正確に計測することができる。(8) Since a plurality of pairs of ultrasonic transducers are provided in the flow rate measuring unit so as to face each other and the ultrasonic wave propagation direction thereof is arranged to intersect the flow direction of the fluid, the ultrasonic wave traverses the fluid. The flow rate of the fluid can be measured while propagating in the width direction and along the flow direction. Even if there is some disturbance in the width direction or the flow direction of the fluid, the flow rate of the fluid can be stabilized. Moreover, it is possible to measure accurately.
【００５６】（９）流入孔と流入側整流部との間に、流
入側開閉弁を設け、かつ、流出側整流部と流出孔との間
に、流出側開閉弁とを設けたので、流入側・流出側から
見た流路を対称に形成するとともに、計測流量に異常が
発生した場合に、流入側あるいは流出側の開閉弁を閉じ
ることができ、安全性を確保することができる。 (9 ) Flow between the inflow hole and the inflow side rectifying section
Provided with an inlet side on-off valve and between the outflow side rectifying section and the outflow hole
Since the on-off valve on the outflow side is provided on the
The flow path seen is formed symmetrically, and the measured flow rate is abnormal.
If it occurs, close the on / off valve on the inflow or outflow side.
It is possible to secure safety.
【００５７】（１０）流入側開閉弁と流出側開閉弁の
内、少なくとも一方の弁体を動作可能とする構成とした
ので、流入側・流出側から見た流路を対称に形成するよ
うに流入開閉弁側および流出側開閉弁を配設しても、一
方は動作する必要がないため低価格とすることができ
る。 (10) Inflow side opening / closing valve and outflow side opening / closing valve
Among them, at least one of the valve bodies is configured to be operable
Therefore, the flow paths viewed from the inflow side and the outflow side should be formed symmetrically.
Even if the inflow on-off valve side and the outflow-side on-off valve are installed,
People don't have to work so it can be cheaper
It
【００５８】（１１）量計測部の中央部に、ゲート型開
閉弁を設ける構成としたので、一つの開閉弁で、流入側
・流出側から見た流路を対称に形成でき、構成が簡単と
なる。 (11) Open the gate type at the center of the quantity measuring unit.
Since it is configured to have a closed valve, only one on-off valve
・ Since the flow path viewed from the outflow side can be formed symmetrically, the structure is simple.
Become.
【図１】本発明の実施例１の流入・流出対称型流量計の
側面図FIG. 1 is a side view of an inflow / outflow symmetric flowmeter according to a first embodiment of the present invention.
【図２】本発明の実施例２の流入・流出対称型流量計に
おける整流部３の断面図FIG. 2 is a cross-sectional view of a rectification unit 3 in an inflow / outflow symmetrical flow meter according to a second embodiment of the present invention.
【図３】本発明の実施例３流入・流出対称型流量計にお
けるの整流部材７の断面図FIG. 3 is a cross-sectional view of a rectifying member 7 in an inflow / outflow symmetrical flow meter according to a third embodiment of the present invention.
【図４】本発明の実施例４の流入・流出対称型流量計に
おける流量計測部５の断面図FIG. 4 is a sectional view of a flow rate measuring unit 5 in an inflow / outflow symmetrical flow meter according to a fourth embodiment of the present invention.
【図５】本発明の実施例５の流入・流出対称型流量計に
おける流量計測部５の中央断面図FIG. 5 is a central sectional view of a flow rate measuring unit 5 in an inflow / outflow symmetric flowmeter according to a fifth embodiment of the present invention.
【図６】本発明の実施例６の流入・流出対称型流量計に
おける流量計測部５の中央断面図FIG. 6 is a central cross-sectional view of a flow rate measuring unit 5 in an inflow / outflow symmetrical flow meter according to a sixth embodiment of the present invention.
【図７】本発明の実施例７の流入・流出対称型流量計の
側面図FIG. 7 is a side view of an inflow / outflow symmetrical flow meter according to a seventh embodiment of the present invention.
【図８】同流量計の流入側超音波振動子の断面図FIG. 8 is a sectional view of an ultrasonic transducer on the inflow side of the flow meter.
【図９】本発明の実施例８の流入・流出対称型流量計に
おける流入側超音波振動子の断面図FIG. 9 is a cross-sectional view of an inflow side ultrasonic transducer in an inflow / outflow symmetric flowmeter of Example 8 of the present invention.
【図１０】（ａ）本発明の実施例９の流入・流出対称型
流量計における流量計測部５の中央断面図
（ｂ）同計測部５の側面図FIG. 10 (a) is a central sectional view of a flow rate measuring unit 5 in an inflow / outflow symmetric flowmeter according to a ninth embodiment of the present invention (b) is a side view of the same measuring unit 5;
【図１１】本発明の実施例１０の流入・流出対称型流量
計の側面図FIG. 11 is a side view of an inflow / outflow symmetric flowmeter according to a tenth embodiment of the present invention.
【図１２】本発明の実施例１１の流入・流出対称型流量
計の側面図FIG. 12 is a side view of an inflow / outflow symmetrical flow meter according to an eleventh embodiment of the present invention.
【図１３】本発明の実施例１２の流入・流出対称型流量
計の側面図FIG. 13 is a side view of an inflow / outflow symmetrical flow meter according to a twelfth embodiment of the present invention.
１ 流入孔 ２ 流出孔 ３ 流入側整流部 ４ 流出側整流部 ５ 流量計測部 ６ チャンバ ７、８ 整流部材 ９、１８ メッシュ １０ ハニカム １１ 熱式フローセンサ １４ 流入側超音波振動子 １５ 流出側超音波振動子 １７ 流入側圧電振動子 ２３、２５ 流入側圧電振動子 ２４、２６ 流出側圧電振動子 ２７、２８ 開閉弁 ２９ ゲート型開閉弁 ３０ 外装部 ３１、３２ 表示部 1 inflow hole 2 Outflow hole 3 Inflow side rectifier 4 Outflow side rectifier 5 Flow rate measurement unit 6 chambers 7, 8 Straightening member 9, 18 mesh 10 Honeycomb 11 Thermal flow sensor 14 Inflow side ultrasonic transducer 15 Outflow side ultrasonic transducer 17 Inflow side piezoelectric vibrator 23, 25 Inflow side piezoelectric vibrator 24, 26 Outflow side piezoelectric vibrator 27, 28 open / close valve 29 gate type on-off valve 30 Exterior 31, 32 Display
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01F 1/68 G01F 1/00 G01F 1/66 101 G01F 3/22 Front page continuation (58) Fields surveyed (Int.Cl. 7 , DB name) G01F 1/68 G01F 1/00 G01F 1/66 101 G01F 3/22
Claims (9)
出孔とからなり、前記流入孔と前記流量計測部との間に
流入側整流部を、前記流量計測部と前記流出孔との間に
流出側整流部をそれぞれ設け、さらに前記流入側整流部
および流出側整流部は、前記流入孔および流出孔よりも
断面積を大に設定したチャンバと、これらチャンバの流
量計測部側に配置した整流部材とで構成した流入・流出
対称型流量計。1. A fluid inflow hole, a flow rate measuring portion, and a fluid outflow hole, which are provided between the inflow hole and the flow rate measuring portion.
An inflow side rectifying unit is provided between the flow rate measuring unit and the outflow hole.
Outflow side rectification units are provided, and the inflow side rectification units are further provided.
And the outflow side rectifying portion is more than the inflow hole and the outflow hole.
Chambers with large cross-sections and the flow of these chambers
Inflow / outflow symmetric flowmeter composed of a rectifying member arranged on the side of the volume measuring unit .
らか一方もしくは両方から構成した請求項１記載の流入
・流出対称型流量計。2. Which one of a honeycomb and a mesh is used as the rectifying member
The symmetrical inflow / outflow type flowmeter according to claim 1, wherein the flowmeter is composed of one or both .
を設けた請求項１記載の流入・流出対称型流量計。3. A thermal type flow sensor in the center of the flow rate measuring section.
The symmetrical inflow / outflow type flowmeter according to claim 1, wherein the flowmeter is provided .
面に設けた凹部に格納した請求項３記載の流入・流出対
称型流量計。4. A thermal type flow sensor is provided on the wall of the flow rate measuring section.
The symmetrical inflow / outflow type flowmeter according to claim 3, wherein the inflow / outflow symmetric flowmeter is housed in a recess provided in the surface .
て設け、超音波伝播方向を流体の流れる方向に配置した
請求項１記載の流入・流出対称型流量計。5. A pair of ultrasonic transducers are opposed to the flow rate measuring unit.
And the ultrasonic wave propagation direction is arranged in the fluid flow direction.
The symmetrical inflow / outflow type flowmeter according to claim 1 .
して設け超音波伝播方向を流体の流れる方向と交差する
ようにして配設した請求項５記載の流入・流出対称型流
量計。6. A plurality of ultrasonic transducers are opposed to the flow rate measuring unit.
The ultrasonic wave propagation direction intersects with the fluid flow direction
The symmetrical inflow / outflow type flowmeter according to claim 5, wherein the flowmeter is arranged as described above .
弁を、流量計測部と流出孔との間に流出側開閉弁をそれ
ぞれ設けた請求項１記載の流入・流出対称型流量計。7. An inflow side opening / closing is provided between the inflow hole and the inflow side rectifying portion.
Install a valve on the outflow side between the flow measurement unit and the outflow hole.
The inflow / outflow symmetric flowmeter according to claim 1, which is provided respectively .
一方を動作可能とした請求項７記載の流入・流出対称型
流量。8. At least an inflow-side opening / closing valve and an outflow-side opening / closing valve
The inflow / outflow symmetrical flow rate according to claim 7, wherein one of them is operable .
設けた請求項１記載の流入・流出対称型流量計。9. A gate type on-off valve is provided at the center of the flow rate measuring section.
The symmetrical inflow / outflow type flowmeter according to claim 1, which is provided .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31516399A JP3511959B2 (en) | 1999-11-05 | 1999-11-05 | Inlet / outlet symmetric flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31516399A JP3511959B2 (en) | 1999-11-05 | 1999-11-05 | Inlet / outlet symmetric flow meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001133307A JP2001133307A (en) | 2001-05-18 |
| JP3511959B2 true JP3511959B2 (en) | 2004-03-29 |
Family
ID=18062191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31516399A Expired - Fee Related JP3511959B2 (en) | 1999-11-05 | 1999-11-05 | Inlet / outlet symmetric flow meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3511959B2 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005003534A (en) * | 2003-06-12 | 2005-01-06 | Tokyo Gas Co Ltd | Flow regulating instrument |
| JP4684548B2 (en) * | 2003-12-08 | 2011-05-18 | 東京瓦斯株式会社 | Gas meter and assembling method thereof |
| JP4291338B2 (en) * | 2006-05-17 | 2009-07-08 | 株式会社オーバル | Servo type volumetric flow meter with sub flow meter |
| JP2008014833A (en) * | 2006-07-06 | 2008-01-24 | Toshiba Corp | Ultrasonic flowmeter |
| JP5086704B2 (en) * | 2007-06-15 | 2012-11-28 | 善胤 田村 | Ultrasonic current meter |
| JP2009058444A (en) * | 2007-08-31 | 2009-03-19 | Institute Of National Colleges Of Technology Japan | Flowmeter for artificial respirator |
| JP5229105B2 (en) * | 2009-05-15 | 2013-07-03 | パナソニック株式会社 | Flow measuring device |
| JP5229164B2 (en) * | 2009-09-02 | 2013-07-03 | パナソニック株式会社 | Fluid flow measuring device |
| JP2014077750A (en) * | 2012-10-12 | 2014-05-01 | Panasonic Corp | Ultrasonic meter |
| JP6136328B2 (en) * | 2013-02-13 | 2017-05-31 | 株式会社デンソー | Measuring method for gas flowmeter |
| JP7087811B2 (en) | 2018-08-10 | 2022-06-21 | オムロン株式会社 | Flow measuring device and piping equipment to which the flow measuring device is applied |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329163A (en) * | 1976-08-30 | 1978-03-18 | Hokushin Electric Works | Supersonic flowmeter |
| JPS57194313A (en) * | 1981-05-26 | 1982-11-29 | Oval Eng Co Ltd | Ultrasonic flow meter for gas |
| JPS58162815A (en) * | 1982-03-24 | 1983-09-27 | Honda Motor Co Ltd | Ultrasonic flowmeter for suction air in internal combustion engine |
| JPH02195941A (en) * | 1989-01-25 | 1990-08-02 | Yamatake Honeywell Co Ltd | Breathed air flow meter |
| JP3407443B2 (en) * | 1994-12-26 | 2003-05-19 | 日産自動車株式会社 | Air intake sensor for internal combustion engines |
| JPH11281438A (en) * | 1998-03-31 | 1999-10-15 | Yazaki Corp | Pulsation absorbing structure for flow meter |
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1999
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