JP3498134B2 - Pretreatment method for electrolytic plating - Google Patents
Pretreatment method for electrolytic platingInfo
- Publication number
- JP3498134B2 JP3498134B2 JP01171699A JP1171699A JP3498134B2 JP 3498134 B2 JP3498134 B2 JP 3498134B2 JP 01171699 A JP01171699 A JP 01171699A JP 1171699 A JP1171699 A JP 1171699A JP 3498134 B2 JP3498134 B2 JP 3498134B2
- Authority
- JP
- Japan
- Prior art keywords
- electrolytic plating
- pretreatment method
- laser
- inorganic filler
- fluence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、電解めっきの前処
理方法に関するものである。TECHNICAL FIELD The present invention relates to a pretreatment method for electrolytic plating.
【０００２】[0002]
【従来の技術】一般に、高分子材料からなる成形品に電
解めっきを施す場合、工程数が非常に多く（１５工
程）、生産性、コスト面等で問題がある。2. Description of the Related Art Generally, when electrolytically plating a molded article made of a polymer material, the number of steps is very large (15 steps), and there are problems in terms of productivity and cost.
【０００３】このため、従来から成形品の表面に簡単に
電解めっき膜を形成できる方法が望まれている。Therefore, conventionally, there has been a demand for a method capable of easily forming an electrolytic plating film on the surface of a molded product.
【０００４】ところで、成形品に紫外線レーザを照射す
ると、このレーザ照射領域が導電化することが判明して
いる。したがって、このレーザ照射により導電パターン
を形成できれば、工程数が２となり、前記問題の解決が
期待できる。By the way, it has been found that when a molded product is irradiated with an ultraviolet laser, the laser irradiation region becomes conductive. Therefore, if the conductive pattern can be formed by this laser irradiation, the number of steps becomes two, and the solution of the above problems can be expected.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、前記レ
ーザ照射による方法では、次のような問題点があり採用
されるに至っていないのが現状である。However, under the present circumstances, the method by laser irradiation has not been adopted because of the following problems.
【０００６】すなわち、レーザを高フルーエンスで照射
した場合、照射領域（特定箇所）の周囲が導電化し、パ
ターン制御性が得られないという不具合を有する。この
ため、低フルーエンスで行う必要があるが、それでは導
電性が不十分となり、電解めっき膜の形成が困難とな
る。したがって、レーザの照射回数を増大させる必要が
生じ、作業性が悪化する。具体的に、レーザを、０．０
４Ｊ／ｃｍ2／１パルスの低フルーエンスで照射した場
合、十分な導電性を得るための照射回数は１０００パル
ス以上である。That is, when the laser is irradiated with a high fluence, there is a problem that the periphery of the irradiation region (specific portion) becomes conductive and the pattern controllability cannot be obtained. For this reason, it is necessary to carry out with low fluence, but with that, the conductivity becomes insufficient and it becomes difficult to form the electrolytic plating film. Therefore, it is necessary to increase the number of times of laser irradiation, which deteriorates workability. Specifically, the laser is set to 0.0
When irradiated with a low fluence of 4 J / cm 2/1 pulse, the number of irradiations for obtaining sufficient conductivity is 1000 pulses or more.
【０００７】また、レーザを低フルーエンスで照射した
場合、照射領域の表面粗さが小さくなり、形成しためっ
きが剥離しやすい。Further, when the laser is irradiated with a low fluence, the surface roughness of the irradiation region becomes small, and the formed plating is easily peeled off.
【０００８】そこで、本発明は、特定箇所を効率的に、
しかも強固にめっき可能とする電解めっきの前処理方法
を提供することを課題とする。[0008] Therefore, the present invention efficiently and efficiently locates a specific portion.
Moreover, it is an object to provide a pretreatment method for electrolytic plating that enables strong plating.
【０００９】[0009]
【課題を解決するための手段】本発明者等は、レーザ照
射により成形品の表面が導電化する原因が、アブレーシ
ョンにより発生する除去飛散物（以下、デブリーと記載
する。）が主要因であることを突き止めた。そして、前
記デブリーは、成形品に無機フィラーを含有させること
により飛散しにくくできることを見出した。Means for Solving the Problems The inventors of the present invention mainly cause the surface of a molded article to become conductive by laser irradiation because of the removed scattered matter (hereinafter referred to as debris) generated by ablation. I found out that. Then, they have found that the debris can be prevented from scattering by including an inorganic filler in the molded product.
【００１０】本発明は、前記課題を解決するための手段
として、電解めっきの前処理方法を、高分子材料に無機
フィラーを添加し、得られた高分子成形品にレーザを照
射するようにしたものである。As a means for solving the above problems, the present invention employs a pretreatment method for electrolytic plating in which an inorganic filler is added to a polymer material and the obtained polymer molded article is irradiated with a laser. It is a thing.
【００１１】この構成により、添加した無機フィラー
が、高フルーエンス照射時の導電性の高いデブリーの照
射領域以外への飛散を防止する。したがって、レーザ照
射領域に所望の導電パターンを形成することができ、こ
の導電パターンに電解めっき膜を形成することが可能と
なる。With this configuration, the added inorganic filler prevents scattering of highly conductive debris outside the irradiation region during high fluence irradiation. Therefore, a desired conductive pattern can be formed in the laser irradiation region, and an electrolytic plated film can be formed on this conductive pattern.
【００１２】[0012]
【発明の実施の形態】以下、本発明に係る電解めっきの
前処理方法の実施形態を説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a pretreatment method for electrolytic plating according to the present invention will be described below.
【００１３】この電解めっきの前処理方法では、高分子
材料に無機フィラーを添加し、得られた高分子成形品に
レーザを照射するだけでよい。In this pretreatment method for electrolytic plating, it suffices to add an inorganic filler to a polymer material and irradiate the obtained polymer molded product with a laser.
【００１４】この場合、前記高分子材料には、液晶ポリ
マ（ＬＣＰ：Liquid Crystal Polymer）、ポリエーテル
スルホン、ポリブチレンテレフタレート、ポリカーボネ
ート、ポリフェニレンエーテル、ポリフェニレンオキサ
イド、ポリアセタール、ポリエチレンテレフタレート、
ポリアミド、アクリロニトリル・ブタジエン・スチレン
（ＡＢＳ）、ポリフェニレンサルファイド、ポリエーテ
ルイミド、ポリエーテルエーテルケトン、ポリスルホ
ン、ポリイミド、エポキシ樹脂、又は、これらの複合樹
脂等が使用可能である。In this case, the polymer material is a liquid crystal polymer (LCP: Liquid Crystal Polymer), polyether sulfone, polybutylene terephthalate, polycarbonate, polyphenylene ether, polyphenylene oxide, polyacetal, polyethylene terephthalate,
Polyamide, acrylonitrile butadiene styrene (ABS), polyphenylene sulfide, polyether imide, polyether ether ketone, polysulfone, polyimide, epoxy resin, or a composite resin thereof can be used.
【００１５】前記無機フィラーとしては、ガラスフィラ
ー、セラミックス粒子等が挙げられ、その高分子材料に
対する添加量は１０〜５０重量％とすると、より一層デ
ブリーの飛散を抑制することが可能となり、パターン分
解能を向上させることができる。Examples of the inorganic fillers include glass fillers and ceramic particles. When the amount of the inorganic fillers added to the polymer material is 10 to 50% by weight, scattering of debris can be further suppressed and the pattern resolution can be improved. Can be improved.
【００１６】また、前記レーザとしては、エキシマレー
ザ（波長λ＝１９３〜３５１ｎｍ）、ＹＡＧ第２高調波
（波長λ＝５３２ｎｍ）、ＹＡＧ第３高調波（波長λ＝
３５５ｎｍ）、Ａｒイオンレーザ（λ＝４５７．９〜５
１４．５ｎｍ）等の波長が６００ｎｍ以下のものであれ
ば使用できる。As the laser, an excimer laser (wavelength λ = 193 to 351 nm), a YAG second harmonic (wavelength λ = 532 nm), a YAG third harmonic (wavelength λ =
355 nm), Ar ion laser (λ = 457.9-5)
14.5 nm) or the like having a wavelength of 600 nm or less can be used.
【００１７】また、前記レーザによる投入エネルギーの
総計を１０〜５００J／ｃｍ2とすると、レーザ照射領域
の導電性を電解めっき膜の形成に適した状態とすること
が可能となる。When the total energy input by the laser is set to 10 to 500 J / cm 2 , the conductivity of the laser irradiation region can be brought into a state suitable for forming an electrolytic plating film.
【００１８】特に、前記レーザの照射条件を、フルーエ
ンス（単位パルスの単位面積当たりのエネルギー：Ｊ／
ｃｍ2／１パルス）及び照射回数が、レーザ照射領域で
電解めっきに適した導電性となるように設定するのがよ
い。具体的には、レーザのフルーエンス及び照射回数
が、図１に示すグラフの領域Ａ内のいずれかの値となる
ように設定すればよい。また、無機フィラーを添加する
と、無機フィラーは高分子材料に比べて加工されにくい
ために残留し、レーザ照射領域にさらに大きな凹凸を形
成することができるので、電解めっき膜を形成した場
合、より一層その密着性を高めることが可能となる。In particular, the laser irradiation conditions are fluence (energy per unit area of pulse: J /
cm 2/1 pulse) and irradiation number, may be set such that the conductivity suitable for electroplating the laser irradiation region. Specifically, the fluence of the laser and the number of times of irradiation may be set to any value within the area A of the graph shown in FIG. In addition, when an inorganic filler is added, the inorganic filler remains because it is more difficult to process than a polymer material, and it is possible to form even larger irregularities in the laser irradiation area. It is possible to improve the adhesion.
【００１９】このように、前述の前処理方法によれば、
高分子材料に無機フィラーを添加しているので、成形品
のレーザ照射領域のみを導電化することができる。した
がって、電解めっきを行うと、レーザ照射領域のみに電
解めっき膜を形成することが可能である。なお、前処理
段階で化学物質を一切使用せず、無電解めっき時には硫
酸銅溶液を使用するだけであるため、環境上も好まし
い。Thus, according to the above-mentioned pretreatment method,
Since the inorganic filler is added to the polymer material, only the laser irradiation region of the molded product can be made conductive. Therefore, when electrolytic plating is performed, it is possible to form an electrolytic plated film only in the laser irradiation region. It should be noted that no chemical substance is used in the pretreatment stage, and only a copper sulfate solution is used during electroless plating, which is environmentally preferable.
【００２０】[0020]
【実施例】以下、本発明に係る電解めっきの前処理方法
を、実施例によりさらに詳細に説明する。EXAMPLES Hereinafter, the pretreatment method for electrolytic plating according to the present invention will be described in more detail with reference to Examples.
【００２１】（比較実施例１） 高分子材料として何も
添加しないＬＣＰを使用し、この材料を射出成形して成
形品を得た。そして、得られた成形品の表面に、ＫｒＦ
エキシマレーザ（波長λ＝２４８ｎｍ）を、フルーエン
ス０．０４Ｊ／ｃｍ2／１パルス、照射回数２００パル
ス、発振周波数２０Ｈｚにより、大気中で照射した。続
いて、前記成形品を、硫酸銅浴中に１時間浸漬して電解
めっきを施した。この場合、レーザ照射領域には電解め
っき膜は得られなかった。これは、フルーエンスが小さ
いため、前記照射回数では十分な導電パターンを形成す
ることができなかったためと考えられる。(Comparative Example 1) As a polymer material, LCP to which nothing was added was used, and this material was injection-molded to obtain a molded product. Then, on the surface of the obtained molded product, KrF
The excimer laser (wavelength lambda = 248 nm), the fluence 0.04J / cm 2/1 pulse, irradiation frequency 200 pulse, the oscillation frequency 20 Hz, was irradiated in air. Subsequently, the molded product was immersed in a copper sulfate bath for 1 hour for electrolytic plating. In this case, no electrolytic plating film was obtained in the laser irradiation area. This is presumably because the fluence was so small that a sufficient conductive pattern could not be formed with the number of irradiations.
【００２２】（比較実施例２） 高分子材料として何も
添加しないＬＣＰを使用し、この材料を射出成形して成
形品を得た。そして、得られた成形品の表面に、ＫｒＦ
エキシマレーザを、フルーエンス０．０４Ｊ／ｃｍ2／
１パルス、照射回数１０００パルス、発振周波数２０Ｈ
ｚにより、大気中で照射した。続いて、前記成形品を、
硫酸銅浴中に１時間浸漬して電解めっきを施した。この
場合、レーザ照射領域には電解めっき膜を形成すること
ができたが、前述のように、フルーエンスを小さく抑え
て照射回数を多くする必要があり、導電パターンの形成
に長時間を要するので、実用的ではない。(Comparative Example 2) As a polymer material, LCP to which nothing was added was used, and this material was injection-molded to obtain a molded product. Then, on the surface of the obtained molded product, KrF
Excimer laser, fluence 0.04 J / cm 2 /
1 pulse, irradiation frequency 1000 pulses, oscillation frequency 20H
Irradiation in the atmosphere by z. Then, the molded article,
It was immersed in a copper sulfate bath for 1 hour for electrolytic plating. In this case, the electrolytic plating film could be formed in the laser irradiation region, but as described above, it is necessary to suppress the fluence to a small number and increase the number of irradiations, and it takes a long time to form the conductive pattern. Not practical.
【００２３】（実施例） 高分子材料としてＬＣＰを使
用し、これに、無機フィラーとして、直径φ１０μｍの
ガラスフィラーを４０重量％添加した。そして、この材
料を射出成形し、得られた成形品の表面に、ＫｒＦエキ
シマレーザを、フルーエンス０．２Ｊ／ｃｍ2／１パル
ス、照射回数２００パルス、発振周波数２０Ｈｚによ
り、大気中で照射した。続いて、前記成形品を、硫酸銅
浴中に１時間浸漬した。これにより、レーザ照射領域
に、短時間で電解めっき膜を形成することができた。(Example) LCP was used as a polymer material, and 40% by weight of a glass filler having a diameter of 10 μm was added as an inorganic filler. Then, the material was injection molded, on the surface of the resulting molded article, a KrF excimer laser, fluence 0.2J / cm 2/1 pulse, irradiation frequency 200 pulse, the oscillation frequency 20 Hz, was irradiated in air. Subsequently, the molded product was immersed in a copper sulfate bath for 1 hour. Thereby, the electrolytic plating film could be formed in the laser irradiation region in a short time.
【００２４】[0024]
【発明の効果】以上の説明から明らかなように、本発明
に係る電解めっきの前処理方法によれば、高分子材料に
無機フィラーを添加し、得られた高分子成形品にレーザ
を照射するようにしたので、発生する導電性を有するデ
ブリーの飛散範囲をレーザ照射領域のみに制限すること
が可能となる。したがって、レーザ照射領域のみを導電
化して電解めっき膜を形成することができ、品質の安定
させて生産性を高めることが可能である。As is apparent from the above description, according to the pretreatment method for electrolytic plating according to the present invention, an inorganic filler is added to a polymer material, and the obtained polymer molded product is irradiated with a laser. As a result, it is possible to limit the scattering range of the generated debris having conductivity to only the laser irradiation region. Therefore, only the laser irradiation region can be made conductive to form the electrolytic plating film, and the quality can be stabilized and the productivity can be improved.
【図１】 フルーエンスと照射回数の違いによる照射領
域の状態を示すグラフである。FIG. 1 is a graph showing a state of an irradiation area depending on a difference between fluence and the number of times of irradiation.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 田中 宏和 京都府京都市右京区花園土堂町10番地 オムロン株式会社内 (72)発明者 新納 弘之 茨城県つくば市東１−１ 工業技術院物 質工学工業技術研究所内 (72)発明者 矢部 明 茨城県つくば市東１−１ 工業技術院物 質工学工業技術研究所内 (56)参考文献 特開 平４−183873（ＪＰ，Ａ) 特開2000−212757（ＪＰ，Ａ) 特開2000−212755（ＪＰ，Ａ) 国際公開02／070780（ＷＯ，Ａ１) 特許3399434（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.7，ＤＢ名) C25D 5/56 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hirokazu Tanaka Inventor Hirokazu Tanaka 10th Hanazono Dodo-cho, Ukyo-ku, Kyoto Omron Co., Ltd. Technical Research Institute (72) Inventor Akira Yabe 1-1, East, Tsukuba City, Ibaraki Industrial Technology Research Institute (56) Reference JP-A-4-183873 (JP, A) JP-A-2000-212757 (JP , A) JP 2000-212755 (JP, A) International Publication 02/070780 (WO, A1) Patent 3399434 (JP, B2) (58) Fields investigated (Int.Cl. 7 , DB name) C25D 5/56
Claims (8)
られた高分子成形品にレーザを照射することを特徴とす
る電解めっきの前処理方法。1. A pretreatment method for electrolytic plating, which comprises adding an inorganic filler to a polymer material and irradiating the obtained polymer molded product with a laser.
あることを特徴とする請求項１に記載の電解めっきの前
処理方法。2. The pretreatment method for electrolytic plating according to claim 1, wherein the wavelength of the laser is 600 nm or less.
０．５Ｊ／ｃｍ2／１パルスであることを特徴とする請
求項１又は２に記載の電解めっきの前処理方法。3. The fluence of the laser is 0.1 to 10.
Pretreatment method for the electroless plating according to claim 1 or 2, characterized in that it is 0.5 J / cm 2/1 pulse.
が１０〜５００J／ｃｍ2であることを特徴とする請求項
１ないし３のいずれか１項に記載の電解めっきの前処理
方法。4. The pretreatment method for electrolytic plating according to claim 1, wherein the total energy input by the laser is 10 to 500 J / cm 2 .
数が、レーザ照射領域で電解めっきに適した導電性とな
るように照射することを特徴とする請求項１ないし４の
いずれか１項に記載の電解めっきの前処理方法。5. The laser is radiated so that the fluence and the number of times of irradiation are such that the laser irradiation region has conductivity suitable for electrolytic plating. Pretreatment method for electrolytic plating.
セラミック粒子であることを特徴とする請求項１ないし
５のいずれか１項に記載の電解めっきの前処理方法。6. The pretreatment method for electrolytic plating according to claim 1, wherein the inorganic filler is glass filler or ceramic particles.
加することを特徴とする請求項１ないし６のいずれか１
項に記載の電解めっきの前処理方法。7. The inorganic filler is added in an amount of 10 to 50% by weight, according to any one of claims 1 to 6.
The pretreatment method for electrolytic plating according to item.
ルスルホン、ポリブチレンテレフタレート、ポリカーボ
ネート、ポリフェニレンエーテル、ポリフェニレンオキ
サイド、ポリアセタール、ポリエチレンテレフタレー
ト、ポリアミド、ＡＢＳ、ポリフェニレンサルファイ
ド、ポリエーテルイミド、ポリエーテルエーテルケト
ン、ポリスルホン、ポリイミド、エポキシ樹脂、又は、
これらの複合樹脂であることを特徴とする請求項１ない
し７のいずれか１項に記載の電解めっきの前処理方法。8. The polymer material is LCP, polyether sulfone, polybutylene terephthalate, polycarbonate, polyphenylene ether, polyphenylene oxide, polyacetal, polyethylene terephthalate, polyamide, ABS, polyphenylene sulfide, polyetherimide, polyetheretherketone, Polysulfone, polyimide, epoxy resin, or
The pretreatment method for electrolytic plating according to any one of claims 1 to 7, which is a composite resin of these.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01171699A JP3498134B2 (en) | 1999-01-20 | 1999-01-20 | Pretreatment method for electrolytic plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01171699A JP3498134B2 (en) | 1999-01-20 | 1999-01-20 | Pretreatment method for electrolytic plating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000212793A JP2000212793A (en) | 2000-08-02 |
| JP3498134B2 true JP3498134B2 (en) | 2004-02-16 |
Family
ID=11785778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01171699A Expired - Lifetime JP3498134B2 (en) | 1999-01-20 | 1999-01-20 | Pretreatment method for electrolytic plating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3498134B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3399434B2 (en) | 2001-03-02 | 2003-04-21 | オムロン株式会社 | Method for forming plating of polymer molding material, circuit forming part, and method for manufacturing this circuit forming part |
| JP4367623B2 (en) * | 2004-01-14 | 2009-11-18 | 住友電気工業株式会社 | Method for producing electrical circuit component made of porous stretched polytetrafluoroethylene sheet or porous stretched polytetrafluoroethylene film, and electrical circuit component |
-
1999
- 1999-01-20 JP JP01171699A patent/JP3498134B2/en not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| JP2000212793A (en) | 2000-08-02 |
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