JP3497440B2 - Low temperature mechanical heat switch - Google Patents
Low temperature mechanical heat switchInfo
- Publication number
- JP3497440B2 JP3497440B2 JP2000097763A JP2000097763A JP3497440B2 JP 3497440 B2 JP3497440 B2 JP 3497440B2 JP 2000097763 A JP2000097763 A JP 2000097763A JP 2000097763 A JP2000097763 A JP 2000097763A JP 3497440 B2 JP3497440 B2 JP 3497440B2
- Authority
- JP
- Japan
- Prior art keywords
- state
- operating shaft
- thermal
- activated carbon
- cooled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001816 cooling Methods 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 162
- 239000007789 gas Substances 0.000 description 48
- 239000007788 liquid Substances 0.000 description 32
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 30
- 239000001307 helium Substances 0.000 description 26
- 229910052734 helium Inorganic materials 0.000 description 26
- 238000001179 sorption measurement Methods 0.000 description 20
- 239000003507 refrigerant Substances 0.000 description 15
- 230000005298 paramagnetic effect Effects 0.000 description 13
- 150000003839 salts Chemical class 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 12
- 230000005291 magnetic effect Effects 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 230000005347 demagnetization Effects 0.000 description 4
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 101100298222 Caenorhabditis elegans pot-1 gene Proteins 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000011555 saturated liquid Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
- F25D19/006—Thermal coupling structure or interface
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
Landscapes
- Thermally Actuated Switches (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は低温において熱的
なオンオフを行なうための熱スイッチに関し、特に機械
的な操作によって作動して、冷却部と被冷却部との間の
熱的なオンオフ、すなわち熱伝導状態と断熱状態との切
替えを行なう低温機械的熱スイッチに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal switch for performing thermal on / off at a low temperature, and in particular, it is activated by mechanical operation to perform thermal on / off between a cooling part and a cooled part. The present invention relates to a low temperature mechanical heat switch for switching between a heat conduction state and an adiabatic state.
【０００２】[0002]
【従来の技術】近年の低温科学の発展に伴ない、液体窒
素温度程度の低温領域あるいはそれよりさらに低い液体
ヘリウム温度程度の極低温領域で運転あるいは作動させ
る装置が種々開発されるようになっており、それに伴な
い、液体ヘリウム等の冷却媒体を有する冷却部と、冷却
すべき対象となる被冷却部との間を熱的にオンオフをす
るための低温熱スイッチの需要が多くなっている。2. Description of the Related Art With the development of low temperature science in recent years, various devices have been developed which are operated or operated in a low temperature range of about liquid nitrogen temperature or an extremely low temperature range of about lower liquid helium temperature. Along with this, there is an increasing demand for a low-temperature heat switch for thermally turning on and off a cooling unit having a cooling medium such as liquid helium and a cooled unit to be cooled.
【０００３】従来の低温熱スイッチの代表的なものとし
ては、熱交換ガスを利用した熱スイッチ、機械的スイッ
チ、超伝導熱スイッチ等がある。熱交換ガスを利用した
スイッチは、被冷却部材を容器内に断熱的に配置し、そ
の容器を液体ヘリウム等の冷媒内に浸漬させておき、容
器内にヘリウムガス等の熱交換ガスを導入して、その気
体伝熱によって被冷却部材を冷媒温度と等温とした状態
（熱的オン状態）を得、また熱交換ガスを真空排気して
断熱状態（熱的オフ状態）に切替えるように構成したも
のである。また機械的熱スイッチは、良伝熱材料の機械
的な接触／非接触を利用し、冷却部側と被冷却部側との
間を良伝熱材料によって機械的に接触させて熱伝導状態
（熱的オン状態）とし、また機械的に非接触として断熱
状態（熱的オフ状態）に切替えるようにしたものであ
る。さらに超伝導熱スイッチは、超伝導状態での熱伝導
率が常伝導状態よりも小さいことを利用したもので、冷
却部と被冷却部との間を超伝導体によって結合してお
き、その超伝導体に磁界を加えて熱的にオフとした状態
と、消磁して熱的にオンとした状態とを得るものであ
る。Typical conventional low-temperature heat switches include heat switches using heat exchange gas, mechanical switches, and superconducting heat switches. In a switch using heat exchange gas, a member to be cooled is adiabatically arranged in a container, the container is immersed in a refrigerant such as liquid helium, and heat exchange gas such as helium gas is introduced into the container. By the heat transfer of the gas, the member to be cooled has a temperature equal to the temperature of the refrigerant (thermally-on state), and the heat exchange gas is evacuated to adiabatic state (thermally-off state). It is a thing. Further, the mechanical heat switch utilizes mechanical contact / non-contact of the good heat transfer material to mechanically contact the cooling part side and the cooled part side with the good heat transfer material to achieve a heat conduction state ( The thermal on state) and the mechanical non-contact state are switched to the adiabatic state (thermal off state). Furthermore, the superconducting heat switch utilizes the fact that the thermal conductivity in the superconducting state is smaller than that in the normal conducting state. A state in which a magnetic field is applied to the conductor to turn it off thermally and a state in which it demagnetizes to turn it on thermally are obtained.
【０００４】ところで一般に熱スイッチのスイッチ特性
は、熱的オン状態での熱伝導率と熱的オフ状態での熱伝
導率との比で評価されるが、前述のような各種の熱スイ
ッチのうちでも機械的熱スイッチが最もスイッチ特性が
良好であり、また応答速度も早い等の利点を有するか
ら、一般には機械的熱スイッチが最も広く利用されてい
る。By the way, generally, the switch characteristic of a thermal switch is evaluated by the ratio of the thermal conductivity in the thermal ON state and the thermal conductivity in the thermal OFF state. However, the mechanical thermal switch is generally most widely used because it has advantages such as the best switching characteristics and a high response speed.
【０００５】従来の低温機械的熱スイッチとしては、図
９に示すように、冷却部１として例えば液体ヘリウム等
の冷媒３を収容した容器５を設けておき、その冷却部１
に銅等の良伝熱材料からなる進退ロッド７を挿通させ、
かつその進退ロッド７の先端側の部分をベローズ９によ
って取囲み、進退ロッド７を進退させることによって、
ベローズ９の先端部の中間伝熱部材１１を介して進退ロ
ッド７を被冷却部１３に機械的に接触させた状態（熱的
オン状態）と、進退ロッド７が被冷却部１３から離隔し
た状態（熱的オフ状態）とに切替えるようにしたものが
知られている。As a conventional low-temperature mechanical heat switch, as shown in FIG. 9, a container 5 containing a coolant 3 such as liquid helium is provided as a cooling unit 1, and the cooling unit 1 is provided.
Insert the retractable rod 7 made of a good heat transfer material such as copper into the
Moreover, by enclosing the part on the tip side of the advancing / retreating rod 7 with the bellows 9 and advancing / retreating the advancing / retreating rod 7,
A state in which the advancing / retreating rod 7 is mechanically brought into contact with the cooled portion 13 via the intermediate heat transfer member 11 at the tip of the bellows 9 (a thermal ON state), and a state in which the advancing / retreating rod 7 is separated from the cooled portion 13. It is known to switch to (thermally off state).
【０００６】また同じく従来の低温機械的熱スイッチと
しては、図１０に示すように、冷却部１にベローズ１５
を設けるとともに、そのベローズ１５の先端にベローズ
１５の伸縮によって開閉する良伝熱材料からなる機械的
クランプ１７を取付け、さらにベローズ１５を伸縮させ
ることによりクランプ１７を開閉させる線状あるいは棒
状の操作部材１９を設けておき、クランプ１７の先端部
対向面１７Ａ，１７Ｂ間において被冷却部１３を機械的
に挟む状態（熱的オン状態）と、被冷却部１３を開放さ
せた状態（熱的オフ状態）とを切替えるようにしたもの
も知られている。Similarly, as a conventional low-temperature mechanical heat switch, as shown in FIG.
And a mechanical clamp 17 made of a good heat transfer material that is opened and closed by expanding and contracting the bellows 15 is attached to the tip of the bellows 15, and the bellows 15 is expanded and contracted to open and close the clamp 17. 19 is provided so that the cooled portion 13 is mechanically sandwiched between the front end facing surfaces 17A and 17B of the clamp 17 (thermally-on state) and the cooled portion 13 is open (thermally-off state). ) And is also known to switch.
【０００７】[0007]
【発明が解決しようとする課題】図９に示すような従来
の低温機械的熱スイッチにおいては、進退ロッド７の先
端面を、中間伝熱部材１１を介して被冷却部１３の表面
に押し付けることによって熱的なオン状態が得られるた
め、進退ロッド７を押し付ける力の大きさによってオン
状態での熱伝導状態がばらついてしまい、そのためスイ
ッチ特性が安定せず、オン状態での信頼性が低いという
問題があった。In the conventional low temperature mechanical heat switch as shown in FIG. 9, the tip end surface of the advancing / retreating rod 7 is pressed against the surface of the cooled portion 13 via the intermediate heat transfer member 11. Since a thermal ON state is obtained by the above, the heat conduction state in the ON state varies depending on the magnitude of the force pressing the advancing / retreating rod 7, and therefore the switch characteristics are not stable and the reliability in the ON state is low. There was a problem.
【０００８】また図１０に示される従来の低温機械的熱
スイッチにおいては、クランプ１７の先端部対向面１７
Ａ，１７Ｂ間において被冷却部１３の両側面を挟み付け
ることによって熱的なオン状態が得られるため、クラン
プ１７により挟み込む力（したがって操作部材１９を引
く力）の大きさによってオン状態での熱伝導状態がばら
ついてしまうから、図９の機械的熱スイッチの場合と同
様に、スイッチ特性が安定せず、オン状態での信頼性が
低いという問題がある。Further, in the conventional low temperature mechanical thermal switch shown in FIG.
Since the thermal ON state is obtained by sandwiching both side surfaces of the cooled portion 13 between A and 17B, the heat in the ON state depends on the magnitude of the force (that is, the force pulling the operating member 19) sandwiched by the clamp 17. Since the conduction state varies, there is a problem that the switch characteristics are not stable and the reliability in the ON state is low, as in the case of the mechanical thermal switch of FIG.
【０００９】さらに図９や図１０に示される従来の機械
的熱スイッチにおいては、前述のようにオン状態での熱
伝導状態がばらつくため、例えば被冷却部が充分に冷却
されない場合等においては、高い熱伝導状態を得ようと
して、図９に示される機械的熱スイッチの進退ロッド７
を著しく大きな力で押し付けたり、また図１０に示され
る機械的熱スイッチの操作部材１９を著しく大きな力で
引張ったりしてしまうことがあり、これらの場合には限
界以上の力が加わって、機械的熱スイッチの一部が変形
したり、破壊されたりしてしまうこともあった。Further, in the conventional mechanical heat switch shown in FIGS. 9 and 10, the heat conduction state in the ON state varies as described above, so that, for example, when the cooled portion is not sufficiently cooled, In order to obtain a high heat conduction state, the forward / backward moving rod 7 of the mechanical heat switch shown in FIG.
May be pressed with a remarkably large force, or the operating member 19 of the mechanical heat switch shown in FIG. 10 may be pulled with a remarkably large force. In these cases, a force exceeding the limit is applied, and Part of the dynamic heat switch could be deformed or even destroyed.
【００１０】この発明は以上の事情を背景としてなされ
たもので、低温で使用する機械的熱スイッチとして、常
に安定なスイッチ特性、特に熱的オン状態での安定した
熱伝導状態を得ることができ、しかも過大な操作力によ
って構成部材を変形させたり破壊させたりするおそれの
少ない低温機械的熱スイッチを提供することを目的とす
るものである。The present invention has been made in view of the above circumstances, and as a mechanical heat switch used at a low temperature, it is possible to always obtain stable switch characteristics, particularly a stable heat conduction state in a thermal ON state. Moreover, it is an object of the present invention to provide a low-temperature mechanical thermal switch that is less likely to deform or destroy the constituent members by an excessive operating force.
【００１１】[0011]
【課題を解決するための手段】前述のような課題を解決
するため、本発明者等が従来の低温機械的熱スイッチに
ついて検討を加えたところ、図９や図１０に示される従
来の機械的熱スイッチにおいては、熱的オフ状態から熱
的オン状態に切替えるために被冷却部に対して冷却部側
の部材（例えば図９における進退ロッド７あるいは図１
０におけるクランプ１７の先端部）を移動させる方向
が、被冷却部の接触面に対して直交しているため、前述
のような問題が生じることを見出した。すなわち、熱的
オン状態とするために冷却部側の部材を被冷却部に押し
付けたり、挟み付けたりする力が、被冷却部の接触面に
対して直角に加わり、そのため押し付け力や挟み付け力
によって接触圧が変化し、それによって熱的オン状態で
の熱伝導状態がばらついてしまうことが判明した。そこ
でこの発明の熱スイッチでは、熱的オン状態とするため
の作動力が接触面に対して直角に加わらないようにし、
これによって前述の問題を一掃することとした。In order to solve the above-mentioned problems, the inventors of the present invention studied a conventional low temperature mechanical thermal switch, and found that the conventional mechanical mechanical switch shown in FIGS. In the thermal switch, in order to switch from the thermal off state to the thermal on state, a member on the cooling portion side with respect to the cooled portion (for example, the advancing / retreating rod 7 in FIG. 9 or FIG.
It has been found that the above-mentioned problem occurs because the direction in which the tip 17 of the clamp 17 at 0 is moved is orthogonal to the contact surface of the cooled portion. That is, the force of pressing or pinching the member on the cooling part side against the cooled part in order to make it into the thermal ON state is applied at a right angle to the contact surface of the cooled part. It was found that the contact pressure changes due to the change of the contact pressure, which causes the heat conduction state in the thermal ON state to fluctuate. Therefore, in the thermal switch of the present invention, the operating force for making the thermal ON state is not applied at a right angle to the contact surface,
This decided to eliminate the above problems.
【００１２】具体的には、請求項１の発明の低温熱スイ
ッチは、冷却対象となる被冷却部と、その被冷却部を冷
却するための冷却部との間を熱的にオンオフするための
低温機械的熱スイッチにおいて、前記被冷却部と冷却部
とのうち、いずれか一方の側に、その一方の側の部材に
常時熱的に接続されかつ所定方向へ進退可能な良伝熱材
料からなる作動軸を設け、前記被冷却部と冷却部とのう
ちの他方の側には、前記作動軸が挿入されてその作動軸
が進退し得る孔部を形成しておき、かつ前記作動軸と孔
部とのうち、いずれか一方に、作動軸の進退方向に対し
て直交する方向への付勢力を有する良伝熱材料からなる
バネ部材を取付けておき、そのバネ部材が前記付勢力に
よって作動軸と孔部のうちの他方に接触するように構成
し、前記作動軸の進退によって、作動軸が前記バネ部材
を介して孔部内面に接している熱的オン状態と、作動軸
がバネ部材を介して孔部内面に接触していない熱的オフ
状態とを切替えるようにしたことを特徴とするものであ
る。Specifically, the low-temperature heat switch according to the invention of claim 1 thermally turns on and off between the cooled portion to be cooled and the cooling portion for cooling the cooled portion. In the low-temperature mechanical heat switch, one of the cooled part and the cooled part, from a good heat transfer material that is always thermally connected to a member on that side and is capable of advancing and retracting in a predetermined direction. And an operating shaft is formed on the other side of the cooled part and the cooling part to allow the operating shaft to advance and retreat. A spring member made of a good heat transfer material having an urging force in a direction orthogonal to the forward / backward direction of the operating shaft is attached to one of the holes, and the spring member is operated by the urging force. It is configured to contact the other of the shaft and the hole, By retracting, the thermal ON state in which the operating shaft is in contact with the inner surface of the hole via the spring member and the thermal OFF state in which the operating shaft is not in contact with the inner surface of the hole via the spring member are switched. It is characterized by having done.
【００１３】このような請求項１の発明の低温熱スイッ
チにおいては、冷却部側（もしくは被冷却部側）に常時
熱的に接続されている作動軸がバネ部材を介して被冷却
部（もしくは冷却部）の孔部に接触している状態では、
冷却部（もしくは被冷却部）から作動軸、バネ部材、孔
部を介して被冷却部（もしくは冷却部）までの熱伝導が
なされる状態、すなわち熱的オン状態となる。そしてそ
の位置から作動軸を進出もしくは後退させて、作動軸を
被冷却部（もしくは冷却部）の孔部にバネ部材を介して
接触しない位置まで移動させれば、前述のような熱伝導
がなされない断熱状態、すなわち熱的オフ状態となる。
ここで、バネ部材は作動軸の進退方向に対して直交する
方向への付勢力（バネ弾発力）を有しており、この付勢
力によって作動軸の外面もしくは孔部の内面に対して機
械的な接触圧力が得られ、その接触圧力によって熱的オ
ン状態での熱伝導状態が得られるのであるが、このバネ
部材の付勢力は前述のように作動軸の進退方向に対して
直交する方向に作用するから、その付勢力による接触圧
力は作動軸の進退とは無関係となる。すなわち、作動軸
がバネ部材を介して冷却部（もしくは被冷却部）の孔部
内面に接している状態では、熱的オン状態を得るための
接触圧は、作動軸に加えられる操作力とは無関係に常に
一定となる。したがって熱的オン状態では常に一定の熱
伝導状態を保つことができるから、作動軸の操作力に影
響されることなく、スイッチ特性を安定化することがで
きる。In the low temperature thermal switch according to the first aspect of the present invention, the operating shaft, which is always thermally connected to the cooling portion side (or the cooled portion side), is the cooled portion (or the cooled portion) via the spring member. In the state where it is in contact with the hole of (cooling part),
A state in which heat is conducted from the cooling part (or the cooled part) to the cooled part (or the cooling part) via the actuating shaft, the spring member and the hole, that is, the thermal ON state. Then, if the actuating shaft is advanced or retracted from that position and the actuating shaft is moved to a position where it does not come into contact with the hole of the cooled part (or the cooling part) via the spring member, the heat conduction as described above will not occur. It is in an adiabatic state that is not controlled, that is, a thermal off state.
Here, the spring member has an urging force (spring elastic force) in a direction orthogonal to the advancing / retreating direction of the operating shaft, and this urging force causes the mechanical force with respect to the outer surface of the operating shaft or the inner surface of the hole. The contact pressure is obtained, and the contact pressure provides the heat conduction state in the thermal ON state.The biasing force of this spring member is, as described above, the direction orthogonal to the forward / backward direction of the operating shaft. The contact pressure due to the urging force is independent of the forward / backward movement of the operating shaft. That is, when the operating shaft is in contact with the inner surface of the hole of the cooling part (or the cooled part) via the spring member, the contact pressure for obtaining the thermal ON state is not equal to the operating force applied to the operating shaft. It is always constant regardless of the relationship. Therefore, in the thermal ON state, a constant heat conduction state can always be maintained, so that the switch characteristics can be stabilized without being affected by the operating force of the operating shaft.
【００１４】ここでバネ部材の具体的な構成は、基本的
には特に限定されるものではないが、通常は請求項２で
規定しているように、全体として帯状をなしかつ全体の
板面に対し直交する方向への付勢力を有するものを用
い、そのバネ部材を、被冷却部の孔部の内面もしくは作
動軸の外面に沿ってその全周にわたり取付けた構成とす
ることが望ましい。The specific structure of the spring member is not particularly limited in principle, but normally, as defined in claim 2, it has a band shape as a whole and the entire plate surface. It is preferable to use a member having an urging force in a direction orthogonal to, and to attach the spring member over the entire circumference along the inner surface of the hole of the cooled portion or the outer surface of the operating shaft.
【００１５】[0015]
【００１６】[0016]
【実施例】図１、図２にこの発明の一実施例の低温機械
的熱スイッチを示す。なお図１は熱的オン状態を示し、
図２は熱的オフ状態を示す。1 and 2 show a low temperature mechanical thermal switch according to an embodiment of the present invention. Note that FIG. 1 shows a thermal ON state,
FIG. 2 shows the thermal off state.
【００１７】図１、図２において、冷却部２１は、例え
ば冷媒としての液体ヘリウム（４Ｈｅ）を収容した容器
２３と、その容器２３から水平方向へ延出する銅等の良
伝熱材料からなる冷却部側熱伝導板２４と、その冷却部
側熱伝導板２４の固定された銅等の良伝熱材料からなる
冷却部側熱伝導ブロック２５とによって構成されてい
る。一方被冷却部２７は、例えば冷却対象としての３Ｈ
ｅガスを収容する容器２９と、その容器２９から水平方
向へ延出する銅等の良伝熱材料からなる被冷却部側熱伝
導板３０と、その被冷却部側熱伝導板３０の端部上面に
固定された銅等の良伝熱材料からなる被冷却部側熱伝導
ブロック３１とによって構成されている。In FIGS. 1 and 2, the cooling unit 21 is made of, for example, a container 23 containing liquid helium (4He) as a refrigerant, and a good heat transfer material such as copper extending horizontally from the container 23. The cooling section side heat conduction plate 24 and the cooling section side heat conduction block 25 made of a good heat transfer material such as copper are fixed to the cooling section side heat conduction plate 24. On the other hand, the cooled portion 27 is, for example, 3H as a cooling target.
A container 29 for containing e-gas, a heat conducting plate 30 on the cooled part side, which is made of a good heat transfer material such as copper, which extends horizontally from the container 29, and an end part of the heat conductive plate 30 on the cooled part side. It is composed of a heat conducting block 31 which is fixed to the upper surface and which is made of a good heat transfer material such as copper.
【００１８】前記被冷却部側熱伝導ブロック３１には、
上面側へ開口する円穴状の孔部３３が垂直に穿設されて
おり、この孔部３３の内周面には、その全周にわたって
帯状のバネ部材３５が取付けられている。このバネ部材
３５は、ベリリウム銅などの弾性を有する良伝熱材料か
らなるものであって、後に改めて説明するように、孔部
３３の中心軸線位置へ向かう方向（水平方向）の付勢力
（バネ弾発力）を示すように構成されている。そしてこ
の孔部３３に対しては、上方から例えば丸棒状の作動軸
３７の先端部３７Ａが挿入されるようになっており、こ
の作動軸先端部３７Ａの外周面が孔部３３内において前
記バネ部材３５に接し得るようになっている。In the heat conducting block 31 on the cooled side,
A circular hole-shaped hole portion 33 opening to the upper surface side is vertically formed, and a belt-shaped spring member 35 is attached to the inner peripheral surface of the hole portion 33 over the entire circumference thereof. The spring member 35 is made of a highly heat-conductive material having elasticity such as beryllium copper, and, as will be described later, the biasing force (spring) in the direction toward the central axis of the hole 33 (horizontal direction). Repulsive force) is shown. A distal end portion 37A of a round rod-shaped operating shaft 37 is inserted into the hole portion 33 from above, and an outer peripheral surface of the operating shaft distal end portion 37A is provided in the hole portion 33 with the spring. It can contact the member 35.
【００１９】前記作動軸３７は、銅等の良伝熱材料から
なるものであって、前記孔部３３に挿入、離脱されるよ
うに上下方向に進退可能とされている。そして作動軸３
７の上端部はＦＲＰ等の熱伝導率の低い材料からなる中
間連結軸３９を介して操作軸４１に延長接続され、その
操作軸４１は、中間部において固定基盤４３を上下に摺
動可能に貫通し、さに固定基盤４３よりも上方の操作軸
先端に水平棒状等の任意の形状の把持操作部４５が取付
けられている。そしてまた操作軸４１が固定基盤４３を
貫通する部分には、真空シール部４７が設けられてい
て、固定基盤４３よりも下方の部分全体を真空断熱し得
るように構成されている。The operating shaft 37 is made of a good heat transfer material such as copper and can be moved up and down so as to be inserted into and removed from the hole 33. And operating axis 3
The upper end portion of 7 is extendedly connected to an operating shaft 41 through an intermediate connecting shaft 39 made of a material having a low thermal conductivity such as FRP, and the operating shaft 41 can slide a fixed base 43 up and down in the intermediate portion. A gripping operation portion 45 having an arbitrary shape such as a horizontal rod is attached to the tip of the operation shaft above the fixed base plate 43 so as to penetrate therethrough. In addition, a vacuum seal portion 47 is provided at a portion where the operation shaft 41 penetrates the fixed base 43, and is configured so that the entire portion below the fixed base 43 can be vacuum-insulated.
【００２０】一方前記作動軸３７の上部は、前記冷却側
熱伝導ブロック２５に垂直に形成された貫通孔２５Ａを
上下に摺動可能に貫通しており、この貫通孔２５Ａの内
面には、前記バネ部材３５と同様なベリリウム銅等の良
伝熱バネ材料からなるバネ部材４９が取付けられ、その
バネ部材４９が作動軸３７の上部外周面に常時圧接され
ている。したがって作動軸３７は、バネ部材４９を介し
て冷却部側熱伝導ブロック２５（ひいては冷却部２１）
に対して常時熱的に接続されていることになる。On the other hand, the upper part of the actuating shaft 37 penetrates through a through hole 25A vertically formed in the cooling side heat conduction block 25 so as to be slidable up and down. The inner surface of the through hole 25A has the above-mentioned structure. A spring member 49 made of a good heat transfer spring material such as beryllium copper, which is similar to the spring member 35, is attached, and the spring member 49 is constantly pressed against the outer peripheral surface of the upper portion of the operating shaft 37. Therefore, the operating shaft 37 is connected to the cooling unit side heat conduction block 25 (and thus the cooling unit 21) via the spring member 49.
Will always be thermally connected to.
【００２１】さらに前記バネ部材３５の一例を図３、図
４に詳細に示す。なお図３はバネ部材３５の展開図であ
り、図４はその断面図である。Further, an example of the spring member 35 is shown in detail in FIGS. 3 is a development view of the spring member 35, and FIG. 4 is a sectional view thereof.
【００２２】図３、図４において、バネ部材３５はベリ
リウム銅等の良伝熱バネ材料からなる板材３６によって
全体として帯状に作られており、かつその幅方向両縁部
より内側の領域には、長さ方向に対し実質的に直交する
方向に沿う多数の切込部３５Ａが長さ方向に所定間隔を
置いて形成され、かつその切込部３５Ａの間の部分３５
Ｂが全体の板面に対し傾斜するように変形せしめられて
いる。すなわち切込部３５Ａの間の部分は切り起こし部
３５Ｂとなっており、このような多数の切り起こし部３
５Ｂが長さ方向に列設されていることになる。そしてこ
のようなバネ部材３５は、図５に示すようにその長さ方
向が被冷却部側熱伝導ブロック３１の孔部３３の内周方
向に沿うように孔部３３内に嵌め込まれている。したが
って孔部３３に作動軸３７の先端部が挿入された状態で
は、バネ部材３５の各切り起こし部３５Ｂが、作動軸３
７のほぼ中心軸線へ向う方向の力（すなわち作動軸３７
の進退方向に対し直交する方向）の付勢力をもって、作
動軸３７に弾性的に接することになる。なお冷却部側の
バネ部材４９も全く同様に作られていれば良い。In FIGS. 3 and 4, the spring member 35 is formed in a band shape as a whole by a plate member 36 made of a good heat transfer spring material such as beryllium copper, and in the region inside both widthwise edges thereof. , A plurality of notches 35A formed along the direction substantially orthogonal to the length direction at predetermined intervals in the length direction, and a portion 35 between the notches 35A.
B is deformed so as to be inclined with respect to the entire plate surface. That is, the portion between the cut portions 35A is the cut-and-raised portion 35B, and a large number of such cut-and-raised portions 3 are formed.
5B are arranged in the length direction. As shown in FIG. 5, such a spring member 35 is fitted in the hole portion 33 so that its length direction is along the inner circumferential direction of the hole portion 33 of the cooled part side heat conduction block 31. Therefore, in the state in which the tip of the operating shaft 37 is inserted into the hole 33, each cut-and-raised portion 35B of the spring member 35 is connected with the operating shaft
The force in the direction toward the central axis of 7 (that is, the operating shaft 37
With the urging force in the direction orthogonal to the advancing / retreating direction), it comes into elastic contact with the operating shaft 37. The spring member 49 on the cooling unit side may be made in the same manner.
【００２３】以上の実施例において、把持操作部４５を
手指などにより引上げて、作動軸３７を上昇させた状
態、すなわち図２に示すように作動軸３７の先端部３７
Ａを被冷却部側熱伝導ブロック３１の孔部３３から引上
げた状態では、冷却部２１と被冷却部２７との間の熱伝
導が断たれているため、熱的オフ状態となっている。そ
して把持操作部４５を手指などにより押し下げて、作動
軸３７を下降させ、その先端部３７Ａを被冷却部側熱伝
導ブロック３１の孔部３３に挿入させれば、図１に示す
ように冷却部２１の冷媒容器２３から冷却部側熱伝導板
２４、冷却部側熱伝導ブロック２５、バネ部材４９、作
動軸３７、バネ部材３５、被冷却部側熱伝導ブロック３
１、被冷却部側熱伝導板３０を経て、被冷却部２７の容
器２９に至る熱伝導経路が形成されて、熱的オン状態と
なり、例えば容器２９内の３Ｈｅを容器２３内の液体ヘ
リウム（４Ｈｅ）によって冷却することができる。その
状態から逆に作動軸３７を上昇させれば、前述のように
熱的オフ状態とすることができる。したがって作動軸３
７の下降／上昇（進退）によって、熱的オン状態と熱的
オフ状態とを交互に切替えることができる。In the above embodiment, the operating shaft 37 is raised by pulling up the grip operating portion 45 with a finger or the like, that is, the distal end portion 37 of the operating shaft 37 as shown in FIG.
In the state where A is pulled up from the hole 33 of the heat transfer block 31 to be cooled, the heat conduction between the cooling part 21 and the cooled part 27 is cut off, so that it is in a thermal off state. Then, the gripping operation part 45 is pushed down by a finger or the like to lower the operating shaft 37, and the tip end 37A thereof is inserted into the hole 33 of the heat transfer block 31 on the cooled part side, as shown in FIG. 21 to the cooling section side heat conduction plate 24, the cooling section side heat conduction block 25, the spring member 49, the operating shaft 37, the spring member 35, and the cooled section side heat conduction block 3.
1. A heat conduction path is formed through the cooled part side heat conduction plate 30 to the container 29 of the cooled part 27 to be in a thermal ON state. For example, 3 He in the container 29 becomes liquid helium in the container 23 ( It can be cooled by 4 He). Conversely, if the actuating shaft 37 is raised from that state, it can be brought into the thermal off state as described above. Therefore, the operating shaft 3
By descending / increasing (advancing / retreating) 7 it is possible to alternately switch between the thermal on state and the thermal off state.
【００２４】ここで、熱的オン状態におけるバネ部材３
５と作動軸３７の先端部３７Ａの外周面との間の接触圧
力は、作動軸３７の進退方向に直交する方向に加えられ
るから、その接触圧は作動軸３７の進退には影響され
ず、一定の接触圧力が維持される。したがって熱的オン
状態では、接触圧の変動により熱伝導状態が変動するこ
とがなく、安定したスイッチ特性を確保することができ
る。Here, the spring member 3 in the thermal ON state
5, the contact pressure between the outer peripheral surface of the tip portion 37A of the operating shaft 37 is applied in the direction orthogonal to the advancing / retreating direction of the operating shaft 37, so that the contact pressure is not affected by the advancing / retreating of the operating shaft 37, A constant contact pressure is maintained. Therefore, in the thermal ON state, the heat conduction state does not change due to the change in contact pressure, and stable switch characteristics can be secured.
【００２５】なお以上の実施例においては、被冷却部２
７における熱伝導ブロック３１に形成された孔部３３の
内周面にバネ部材３５を取付けた構成としているが、場
合によっては作動軸３７の先端部３７Ａの外周面にバネ
部材３５を取付けておき、バネ部材３５が作動軸３７と
一体に進退するように構成しても良い。この場合、作動
軸３７を上昇させた熱的オフ状態では、バネ部材３５は
作動軸先端部３７Ａとともに孔部３３から離隔してお
り、一方作動軸３７を下降させた時にバネ部材３５が作
動軸先端部３７Ａとともに孔部３３内に挿入され、その
バネ部材３５が孔部３３の内周面に接して熱伝導状態、
すなわち熱的オン状態が得られることになる。In the above embodiment, the cooled portion 2
7, the spring member 35 is attached to the inner peripheral surface of the hole 33 formed in the heat conduction block 31. However, in some cases, the spring member 35 is attached to the outer peripheral surface of the distal end portion 37A of the actuating shaft 37. The spring member 35 may be configured to advance and retreat integrally with the operating shaft 37. In this case, the spring member 35 is separated from the hole 33 together with the operating shaft tip portion 37A in the thermal off state in which the operating shaft 37 is raised, while the spring member 35 is moved when the operating shaft 37 is lowered. The tip end portion 37A is inserted into the hole portion 33, and the spring member 35 is in contact with the inner peripheral surface of the hole portion 33 to be in a heat conductive state,
That is, a thermal ON state is obtained.
【００２６】さらに前述の実施例では、作動軸３７を丸
棒状に作ったものとして説明したが、場合によっては作
動軸３７を角棒状に作るとともに孔部３３もそれに対応
して角孔状としても良い。その場合バネ部材３５を孔部
３３の内側の４面、もしくは作動軸３７の先端部３７Ａ
の外側の４面に取付ければ良いが、場合によっては対称
側の２面のみにバネ部材３５を取付けても良い。。Further, in the above-described embodiment, the operating shaft 37 was described as being formed into a round bar shape, but in some cases, the operating shaft 37 may be formed into a square bar shape, and the hole portion 33 may also be formed into a square hole shape correspondingly. good. In that case, the spring member 35 is provided on the inner surface of the hole 33 on four sides or the tip portion 37A of the operating shaft 37.
The spring members 35 may be attached only to the two surfaces on the symmetry side. .
【００２７】さらに前述の実施例では、冷却部２１の側
と作動軸３７とがバネ部材４９を介して常時熱的に接続
された構成とし、その作動軸３７を進退させた時に作動
軸３７と被冷却部２７の側の孔部３３の内周面との間で
バネ部材３５を介して熱的オンオフを行なうようにして
いるが、場合によっては冷却部と被冷却部の配置関係を
逆転させても良い。すなわち、被冷却部と作動軸とが常
時熱的に接続しているように構成し、その作動軸が冷却
部の側の熱伝導ブロックに形成された孔部に挿入／離脱
されるように構成するとともに、その孔部の内周面もし
くは作動軸の外周面に前記同様なバネ部材を設けておい
て、作動軸の進退に伴なって冷却部の側の孔部と作動軸
との間でバネ部材を介して熱的なオンオフを行なうよう
に構成しても良い。Further, in the above-described embodiment, the cooling section 21 side and the operating shaft 37 are always thermally connected via the spring member 49, and when the operating shaft 37 is moved back and forth, Although thermal on / off is performed via the spring member 35 between the inner peripheral surface of the hole 33 on the side of the cooled portion 27, the arrangement relationship between the cooling portion and the cooled portion may be reversed in some cases. May be. That is, it is configured such that the cooled portion and the operating shaft are always thermally connected, and the operating shaft is inserted into or removed from the hole formed in the heat conducting block on the cooling unit side. In addition, a spring member similar to the above is provided on the inner peripheral surface of the hole or the outer peripheral surface of the operating shaft, and as the operating shaft moves forward and backward, the hole is provided between the hole on the cooling unit side and the operating shaft. It may be configured to perform thermal on / off via a spring member.
【００２８】次にこの発明の低温機械的熱スイッチを実
際の極低温機器に適用した例について、図６〜図８を参
照して説明する。Next, an example in which the low temperature mechanical thermal switch of the present invention is applied to an actual cryogenic device will be described with reference to FIGS.
【００２９】先ず図６は３Ｈｅ冷凍機にこの発明の低温
機械的熱スイッチを適用した例を示すものである。３Ｈ
ｅ冷凍機は、３Ｈｅ液体を収容した３Ｈｅポット内を排
気減圧することによって、０．３Ｋ程度までの極低温を
得るものであるが、このような３Ｈｅ冷凍機では、排気
減圧のために活性炭吸着剤を用い、その活性炭吸着剤層
や３Ｈｅポットを冷却するために４Ｈｅの液体ヘリウム
を用いており、これらの制御のためにこの発明の熱スイ
ッチを有効に利用することができる。First, FIG. 6 shows an example in which the low temperature mechanical thermal switch of the present invention is applied to a 3He refrigerator. 3H
The e-refrigerator obtains a cryogenic temperature of up to about 0.3K by depressurizing the inside of the 3He pot containing the 3He liquid by exhaust gas depressurization. A liquid helium of 4He is used for cooling the activated carbon adsorbent layer and the 3He pot using the agent, and the thermal switch of the present invention can be effectively used for controlling these.
【００３０】すなわち図６において、前述の図１の実施
例における冷却部２１に相当する液体ヘリウム容器１０
１内には、冷媒としての液体ヘリウム４Ｈｅが収容され
ており、この液体ヘリウム容器１０１内の液体ヘリウム
４Ｈｅは、真空ポンプ１０３による排気減圧によって
１．２〜１．５Ｋ程度の低温とすることができる。また
その液体ヘリウム容器１０１の下面には銅等の良伝熱材
料からなる熱伝導ブロック１０５が取付けられており、
さらにその下方には、熱伝導ブロック１０５から離れた
位置に、前述の図１の実施例の被冷却部２７に相当する
３Ｈｅポット１０７および活性炭吸着装置１０９が配設
されている。３Ｈｅポット１０７は図示しない支持手段
によって固定された熱伝導ブロック１１１上に取付けら
れ、また活性炭吸着装置１０９は図示しない支持手段に
よって前記熱伝導ブロック１１１から離れた位置に固定
された熱伝導ブロック１１３上に取付けられている。そ
して液体ヘリウム容器１０１の側の熱伝導ブロック１０
５と３Ｈｅポット１０７の側の熱伝導ブロック１１１と
の間に第１の熱スイッチ１１５が設けられ、また液体ヘ
リウム容器１０１の側の熱伝導ブロック１０５と活性炭
吸着装置１０９の側の熱伝導ブロック１１３との間に第
２の熱スイッチ１１７が設けられている。ここで第１の
熱スイッチ１１５および第２の熱スイッチ１１７は、い
ずれも図１、図２に示したこの発明の実施例の低温機械
的熱スイッチと同様なものであれば良い。That is, referring to FIG. 6, a liquid helium container 10 corresponding to the cooling unit 21 in the embodiment shown in FIG.
Liquid helium 4He as a refrigerant is accommodated in 1 and liquid helium 4He in the liquid helium container 101 can be kept at a low temperature of about 1.2 to 1.5 K by decompressing the exhaust gas by the vacuum pump 103. it can. Further, a heat conduction block 105 made of a good heat transfer material such as copper is attached to the lower surface of the liquid helium container 101,
Further below that, a 3He pot 107 and an activated carbon adsorption device 109, which correspond to the cooled portion 27 of the embodiment of FIG. 1 described above, are disposed at positions apart from the heat conduction block 105. The 3He pot 107 is mounted on a heat conduction block 111 fixed by a support means (not shown), and the activated carbon adsorbing device 109 is mounted on a heat conduction block 113 fixed at a position separated from the heat conduction block 111 by a support means (not shown). Installed on. The heat conduction block 10 on the liquid helium container 101 side
The first heat switch 115 is provided between the heat conduction block 111 on the side of the 5 and 3 He pots 107, and the heat conduction block 105 on the side of the liquid helium container 101 and the heat conduction block 113 on the side of the activated carbon adsorption device 109. A second thermal switch 117 is provided between and. Here, both the first thermal switch 115 and the second thermal switch 117 may be the same as the low temperature mechanical thermal switch of the embodiment of the present invention shown in FIGS. 1 and 2.
【００３１】さらに前記３Ｈｅポット１０７の上端には
吸排気管１１９が接続されている。この吸排気管１１９
は、外部の３Ｈｅガス供給源１２１から開閉弁１２３を
介して活性炭吸着装置１０９の下端へ導かれてその活性
炭吸着装置１０９を貫通し、その上端から３Ｈｅポット
１０７に導かれてその上端に接続されている。活性炭吸
着装置１０９は、吸着剤としての活性炭層１０９Ａを収
容したものであって、その外周面にはヒータ１０９Ｂが
設けられており、また前述の吸排気管１１９における活
性炭層１０９Ａ内を貫通する部分には、吸排気管１１９
の内外を貫通する多数の小孔（図示せず）が形成されて
いる。Further, an intake / exhaust pipe 119 is connected to the upper end of the 3He pot 107. This intake / exhaust pipe 119
Is guided from the external 3He gas supply source 121 to the lower end of the activated carbon adsorption device 109 through the on-off valve 123, penetrates the activated carbon adsorption device 109, is guided from the upper end to the 3He pot 107, and is connected to the upper end thereof. ing. The activated carbon adsorption device 109 accommodates an activated carbon layer 109A as an adsorbent, a heater 109B is provided on the outer peripheral surface thereof, and a portion of the intake / exhaust pipe 119 that penetrates the activated carbon layer 109A. Is the intake / exhaust pipe 119
A large number of small holes (not shown) are formed penetrating the inside and outside.
【００３２】以上のような図６に示される３Ｈｅ冷凍機
の動作を以下に説明する。The operation of the 3He refrigerator shown in FIG. 6 will be described below.
【００３３】予め液体ヘリウム容器１０１内には４Ｋ程
度の大気圧の飽和液体ヘリウム４Ｈｅを収容しておく。
そして第１の熱スイッチ１１５および第２の熱スイッチ
１１７を熱的オン状態とし、かつ開閉弁１２３を開放す
る。なおヒータ１０９Ｂはオフ状態としておく。この状
態では３Ｈｅガス供給源から吸排気管１１９を経て３Ｈ
ｅガスが３Ｈｅポット１０７内に導かれるばかりでな
く、活性炭吸着装置１０９の活性炭層１０９Ａ中にも、
吸排気管１１９の図示しない小孔を経て３Ｈｅガスが導
かれる。このとき、前述の第１の熱スイッチ１１５およ
び第２の熱スイッチ１１７が熱的オン状態となっている
ため、液体ヘリウム容器１０１内の４Ｋ程度の４Ｈｅに
より、第１、第２の熱スイッチ１１５，１１７および熱
伝導ブロック１１１，１１３を介して３Ｈｅポット１０
７および活性炭吸着装置１０９が４Ｋ近くまで冷却され
る。ここで活性炭は一般に低温であるほど吸着能力が大
きくなり、４Ｋ程度では著しく大きな吸着能力を示すか
ら、活性炭層１０９Ａ内には多量の３Ｈｅガスが吸着保
持されることになる。In the liquid helium container 101, saturated liquid helium 4He having an atmospheric pressure of about 4K is stored in advance.
Then, the first thermal switch 115 and the second thermal switch 117 are brought into a thermal ON state, and the on-off valve 123 is opened. The heater 109B is kept off. In this state, from the 3He gas supply source through the intake / exhaust pipe 119, 3H
Not only is the e gas introduced into the 3He pot 107, but also in the activated carbon layer 109A of the activated carbon adsorption device 109,
3He gas is introduced through a small hole (not shown) of the intake / exhaust pipe 119. At this time, since the first thermal switch 115 and the second thermal switch 117 described above are in the thermal ON state, the first and second thermal switches 115 are heated by 4 He of about 4K in the liquid helium container 101. , 117 and the heat conduction blocks 111, 113 through the 3He pot 10
7 and the activated carbon adsorption device 109 are cooled to near 4K. Here, the activated carbon generally has a larger adsorption capacity at lower temperatures, and exhibits a remarkably large adsorption capacity at about 4K, so that a large amount of 3He gas is adsorbed and held in the activated carbon layer 109A.
【００３４】このようにして活性炭吸着装置１０９にお
ける３Ｈｅガスの吸着が終了した後、開閉弁１２３を閉
じて３Ｈｅガスの供給を停止させるとともに、真空ポン
プ１０３を作動させて液体ヘリウム容器１０１内を排気
減圧することにより液体ヘリウム４Ｈｅを１．２〜１．
５Ｋ程度まで温度降下させる。また第１の熱スイッチ１
１５は熱的オン状態を保ったまま、第２の熱スイッチ１
１７を熱的オフ状態に切替え、さらにヒータ１０９Ｂを
オン状態に切替えて、活性炭吸着装置１０９における活
性炭層１０９Ａを２０Ｋ程度まで温度上昇させる。この
ように活性炭層１０９Ａを２０Ｋ程度まで温度上昇させ
ることにより、それ以前の約４Ｋ程度の時よりも吸着能
力が大幅に低下し、その結果それ以前の約４Ｋ程度の段
階で吸着されていた多量の３Ｈｅガスが、活性炭層１０
９Ａから排出され、吸排気管１１９を経て３Ｈｅポット
１０７に至る。この３Ｈｅポット１０７は、第１の熱ス
イッチ１１５により液体ヘリウム容器１０１に熱的に接
続されているため、１．５Ｋ程度に冷却されており、そ
のため活性炭層１０９Ａから排出されて３Ｈｅポット１
０７に至った３Ｈｅガスは、３Ｈｅポット１０７内にお
いて液化する。このようにして、活性炭吸着装置１０９
の活性炭層１０９Ａに吸着されていた３Ｈｅガスは、そ
の多くが活性炭層１０９Ａから排出されて、３Ｈｅポッ
ト１０７内において液化し、３Ｈｅポット１０７内に３
Ｈｅ液体が溜まることになる。After the adsorption of 3He gas in the activated carbon adsorption device 109 is completed in this way, the on-off valve 123 is closed to stop the supply of 3He gas and the vacuum pump 103 is operated to exhaust the inside of the liquid helium container 101. By reducing the pressure, liquid helium 4He was added to 1.2-1.
Lower the temperature to about 5K. Also the first thermal switch 1
15 is the second thermal switch 1 while keeping the thermal ON state.
17 is switched to a thermal OFF state, and further, the heater 109B is switched to an ON state to raise the temperature of the activated carbon layer 109A in the activated carbon adsorption device 109 to about 20K. In this way, by raising the temperature of the activated carbon layer 109A to about 20K, the adsorption capacity is significantly lower than that before about 4K, and as a result, the large amount of adsorbed at about 4K before that was adsorbed. 3He gas of the activated carbon layer 10
It is discharged from 9A and reaches the 3He pot 107 through the intake / exhaust pipe 119. Since this 3He pot 107 is thermally connected to the liquid helium container 101 by the first thermal switch 115, it has been cooled to about 1.5K, and therefore is discharged from the activated carbon layer 109A and the 3He pot 1
The 3He gas reaching 07 is liquefied in the 3He pot 107. In this way, the activated carbon adsorption device 109
Most of the 3He gas adsorbed on the activated carbon layer 109A of No. 3 is discharged from the activated carbon layer 109A, liquefied in the 3He pot 107, and liquefied in the 3He pot 107.
He liquid will accumulate.
【００３５】次いで第１の熱スイッチ１１５を熱的オフ
状態に切替えるとともに、ヒータ１０９Ｂをオフ状態に
切替え、さらに第２の熱スイッチ１１７を熱的オン状態
に切替える。また液体ヘリウム容器１０１の排気減圧は
停止して大気圧に戻し、液体ヘリウム容器１０１内の液
体ヘリウム４Ｈｅを４Ｋ程度に戻す。これによって活性
炭吸着装置１０９における活性炭層１０９Ａは４Ｋ程度
まで温度降下され、再びその吸着能力が大きくなって３
Ｈｅガスの吸着を開始し、３Ｈｅポット１０７内におけ
る３Ｈｅ液体の液面上の空間および吸排気管１１９内が
減圧される。すなわち３Ｈｅポット１０７が排気減圧さ
れるため、その３Ｈｅポット１０７内の液体３Ｈｅが
０．３Ｋ程度まで温度降下されることになる。Next, the first thermal switch 115 is switched to the thermal off state, the heater 109B is switched to the off state, and the second thermal switch 117 is switched to the thermal on state. Further, the exhaust pressure reduction of the liquid helium container 101 is stopped and returned to atmospheric pressure, and the liquid helium 4He in the liquid helium container 101 is returned to about 4K. As a result, the temperature of the activated carbon layer 109A in the activated carbon adsorption device 109 is lowered to about 4K, and the adsorption capacity is increased again.
He gas adsorption is started, and the space above the liquid surface of the 3He liquid in the 3He pot 107 and the intake / exhaust pipe 119 are decompressed. That is, since the exhaust pressure of the 3He pot 107 is reduced, the temperature of the liquid 3He in the 3He pot 107 is lowered to about 0.3K.
【００３６】以上のようにして、熱スイッチ１１５，１
１７の切替動作などによって、最終的に３Ｈｅポット１
０７において０．３Ｋ程度の極低温を得ることが可能と
なるのである。As described above, the thermal switches 115, 1
By switching operation of 17 etc., finally 3 He pot 1
At 07, it becomes possible to obtain an extremely low temperature of about 0.3K.
【００３７】図７には、この発明の低温機械的熱スイッ
チを断熱消磁冷凍機に適用した例を示すものである。断
熱消磁冷凍機は、“ＣＭＮ”すなわち２Ｃｅ3+（Ｎ
Ｏ3）3・３Ｍｇ（ＮＯ3）2・２４Ｈ2Ｏで代表される常
磁性塩が、断熱してエントロピー不変としておいて磁場
を加えた状態から磁場を除去（消磁）すれば温度が低下
して極低温が得られることを利用したものであり、常磁
性塩としてＣＭＮを用いた場合は、数ｍＫ程度の極低温
が得られることが知られている。そしてこの場合、常磁
性塩を真空断熱層中に保持して、液体ヘリウム等の冷媒
によって１．５Ｋ程度に冷却して磁場を加えた状態か
ら、断熱層中において磁場の印加を停止（消磁）すると
ともに冷媒からの熱伝導を切断するためにこの発明の低
温機械的熱スイッチを利用する。FIG. 7 shows an example in which the low temperature mechanical heat switch of the present invention is applied to an adiabatic degauss refrigerator. The adiabatic demagnetization refrigerator is "CMN", that is, 2Ce 3+ (N
O 3) 3 · 3Mg (NO 3) paramagnetic salts typified by 2 · 24H 2 O is, the temperature is lowered by removing the magnetic field (deenergized) from the state plus the magnetic field had been entropy invariant with insulation It is known that a cryogenic temperature of about several mK can be obtained when CMN is used as a paramagnetic salt. Then, in this case, the paramagnetic salt is held in the vacuum heat insulating layer, cooled to about 1.5 K with a coolant such as liquid helium, and the magnetic field is applied, and then the application of the magnetic field is stopped (demagnetization) in the heat insulating layer. In addition, it utilizes the low temperature mechanical thermal switch of the present invention to disconnect heat conduction from the refrigerant.
【００３８】すなわち図７において、全体容器１３１内
の下部には主冷媒としての液体ヘリウム１３３を保持す
る主冷媒容器１３５（図１の実施例における冷却部２１
に相当）が配設され、その主冷媒容器１３５の上方には
バックアップ冷媒としての液体窒素１３７を保持するバ
ックアップ冷媒容器１３９が配設されている。また主冷
媒容器１３５およびバックアップ冷媒容器１３９の外面
と全体容器１３１の内面との間は真空断熱層１４１とさ
れている。主冷媒容器１３５における下底部中央は凹部
１３５Ａとされ、その凹部１３５Ａの内側（主冷媒容器
１３５から見ればその外部に相当する）には、冷却対象
となるＣＭＮで代表される常磁性塩１４３（図１の実施
例における被冷却部２７に相当）およびその常磁性塩１
４３に熱的に一体化された熱伝導ブロック１４７が配置
され、この熱伝導ブロック１４７に試料１４４が取付け
られている。また主冷却容器１３５の内部における常磁
性塩１４３を取囲む位置には、常磁性塩１４３に磁場を
加えるための超電導マグネット１４５が配置されてい
る。そして前記常磁性塩１４３に熱的に一体化された熱
伝導ブロック１４７と、前記主冷媒容器１３５に熱的に
一体化された熱伝導ブロック１４９との間にこの発明の
低温機械的熱スイッチ１５１が設けられている。That is, in FIG. 7, a main refrigerant container 135 holding a liquid helium 133 as a main refrigerant is provided in the lower part of the whole container 131 (the cooling unit 21 in the embodiment of FIG. 1).
Is provided, and a backup refrigerant container 139 holding liquid nitrogen 137 as a backup refrigerant is provided above the main refrigerant container 135. A vacuum heat insulating layer 141 is formed between the outer surfaces of the main refrigerant container 135 and the backup refrigerant container 139 and the inner surface of the whole container 131. The center of the lower bottom portion of the main refrigerant container 135 is a recess 135A, and inside the recess 135A (corresponding to the outside when viewed from the main refrigerant container 135), a paramagnetic salt 143 represented by CMN to be cooled ( (Corresponding to the cooled portion 27 in the embodiment of FIG. 1) and its paramagnetic salt 1
A heat conduction block 147 which is thermally integrated with 43 is arranged, and the sample 144 is attached to this heat conduction block 147. A superconducting magnet 145 for applying a magnetic field to the paramagnetic salt 143 is arranged at a position surrounding the paramagnetic salt 143 inside the main cooling container 135. The low temperature mechanical heat switch 151 of the present invention is provided between the heat conduction block 147 thermally integrated with the paramagnetic salt 143 and the heat conduction block 149 thermally integrated with the main refrigerant container 135. Is provided.
【００３９】以上のような図７に示される断熱消磁冷凍
機においては、先ず熱スイッチ１５１を熱的オン状態と
するとともに超電導マグネット１４５を作動させ、常磁
性塩１４３を１．５Ｋ程度の温度域とした状態でその常
磁性塩１４３に数テスラ以上の強力な磁場を加える。次
いで熱スイッチ１５１を熱的オフ状態に切替えるととも
に、超電導マグネット１４５の動作を停止させ、常磁性
塩１４３に対する磁場の印加を停止する。このとき、常
磁性塩１４３は断熱状態となるから、等エントロピー変
化によって常磁性塩１４３の温度が数ｍＫ程度まで低下
することになる。結局、熱スイッチ１５１および超電導
マグネット１４５の制御によって、数ｍＫ程度の極低温
を得ることができるのである。In the adiabatic demagnetization refrigerator shown in FIG. 7 as described above, first, the heat switch 151 is turned on thermally and the superconducting magnet 145 is operated to set the paramagnetic salt 143 to a temperature range of about 1.5K. In this state, a strong magnetic field of several tesla or more is applied to the paramagnetic salt 143. Next, the thermal switch 151 is switched to the thermal OFF state, the operation of the superconducting magnet 145 is stopped, and the application of the magnetic field to the paramagnetic salt 143 is stopped. At this time, since the paramagnetic salt 143 is in an adiabatic state, the temperature of the paramagnetic salt 143 is lowered to about several mK due to isentropic change. After all, by controlling the thermal switch 151 and the superconducting magnet 145, it is possible to obtain an extremely low temperature of about several mK.
【００４０】さらに図８には、この発明の低温スイッチ
を低温活性炭トラップ装置に適用した例を示す。低温活
性炭トラップ装置は、各種の極低温機器、低温機器にお
いて、３Ｈｅガスあるいは窒素ガスなどのガスを低温に
冷却した活性炭層中に通し、ガス中に含まれる油分など
を捕捉除去するためのものであって、ガス中に含まれる
油分等を低温で固化させて活性炭層中にトラップし、ま
た固化しない成分は活性炭の吸着能により吸着除去する
ように構成される。例えば希釈冷凍機においては、ロー
タリーポンプによって３Ｈｅガスを循環させることが行
なわれるが、ロータリーポンプにはオイルシールを用い
るのが通常であり、そのためガス中に油分が含まれてし
まうことが多く、そこでこのような油分を除去するため
に、低温活性炭トラップを用いるのが通常である。但し
従来一般の低温活性炭トラップ装置では、液体窒素を用
いて活性炭層を低温に冷却することが行われているが、
ここではより低温に活性炭層を冷却するため、冷凍機を
用いて２０Ｋ程度まで冷却してトラップを行なう低温活
性炭トラップ装置として示している。ここで、低温活性
炭トラップ装置は、活性炭層中に多量の油分等がトラッ
プされてガス流通が阻害されるような事態に至る前、あ
るいは活性炭の吸着能力が低下する前に、活性炭を交換
したり、あるいは再生したりする必要がある。そこで図
８に示す例では、２台の活性炭トラップを用い、その２
台のトラップを、低温熱スイッチにより低温での運転状
態（トラップ対象となるガスを流通させている状態）と
高温での再生操作状態とに交互に切替えるようにしてい
る。Further, FIG. 8 shows an example in which the low temperature switch of the present invention is applied to a low temperature activated carbon trap device. The low-temperature activated carbon trap device is used in various types of cryogenic equipment and low-temperature equipment to pass a gas such as 3He gas or nitrogen gas through the activated carbon layer cooled to a low temperature to capture and remove oil contained in the gas. Therefore, the oil component contained in the gas is solidified at a low temperature to be trapped in the activated carbon layer, and the component that is not solidified is adsorbed and removed by the adsorption capacity of the activated carbon. For example, in a dilution refrigerator, a 3He gas is circulated by a rotary pump, but an oil seal is usually used for the rotary pump, and therefore, the gas often contains an oil component. A low temperature activated carbon trap is usually used to remove such oil. However, in the conventional general low temperature activated carbon trap device, the activated carbon layer is cooled to a low temperature using liquid nitrogen.
Here, in order to cool the activated carbon layer to a lower temperature, it is shown as a low temperature activated carbon trap device in which a refrigerator is used to cool the activated carbon layer to about 20K for trapping. Here, the low-temperature activated carbon trap device replaces the activated carbon before a situation in which a large amount of oil or the like is trapped in the activated carbon layer and gas flow is obstructed, or before the activated carbon adsorption capacity decreases. , Or need to play. Therefore, in the example shown in FIG. 8, two activated carbon traps are used.
The trap of the table is alternately switched between a low-temperature operating state (a state in which the gas to be trapped is flowing) and a high-temperature regenerating operation state by a low-temperature heat switch.
【００４１】図８の例について具体的に説明すれば、真
空チャンバ１６１内には、図１の実施例における被冷却
部２７に相当する２基の活性炭トラップ１６３Ａ，１６
３Ｂが配設されている。各活性炭トラップ１６３Ａ，１
６３Ｂは、それぞれ全体として環状をなす容器１６５
Ａ，１６５Ｂの内部に活性炭層１６７Ａ，１６７Ｂを収
納し、かつ容器１６５Ａ，１６５Ｂの外周面にヒータ１
６９Ａ，１６９Ｂを設けたものであって、それぞれその
一端にはガス導入口１７１Ａ，１７１Ｂが、他端にはガ
ス排出口１７３Ａ，１７３Ｂが設けられている。そして
環状容器１６５Ａ，１６５Ｂの中空部分には熱伝導ブロ
ック１７５Ａ，１７５Ｂが配設されている。Explaining in detail the example of FIG. 8, in the vacuum chamber 161, two activated carbon traps 163A, 16 corresponding to the cooled portion 27 in the embodiment of FIG.
3B is provided. Each activated carbon trap 163A, 1
63B is a container 165 that has an annular shape as a whole.
A, 165B contains activated carbon layers 167A, 167B, and heaters 1 are provided on the outer peripheral surfaces of the containers 165A, 165B.
69A and 169B are provided with gas inlets 171A and 171B at one end and gas outlets 173A and 173B at the other end. Further, heat conduction blocks 175A and 175B are arranged in the hollow portions of the annular containers 165A and 165B.
【００４２】また前記真空チャンバ１６１内には、図１
の実施例における冷却部２１に相当する冷凍機１７７の
冷却ヘッド１７７Ａが上方から垂直に挿入されており、
この冷却ヘッド１７７Ａから熱伝導基板１７９が水平に
延出されており、その熱伝導基板１７９上には第１およ
び第２の熱伝導ブロック１８０Ａ，１８０Ｂが設けられ
ている。そして第１の活性炭トラップ１６３Ａにおける
熱伝導ブロック１７５Ａと冷却ヘッド側の第１の熱伝導
ブロック１８０Ａとの間に第１の低温熱スイッチ１８１
Ａが、また第２の活性炭トラップ１６３Ｂにおける熱伝
導ブロック１７５Ｂと冷却ヘッド側の第２の熱伝導ブロ
ック１８０Ｂとの間に第２の低温熱スイッチ１８１Ｂが
配設されている。Further, the inside of the vacuum chamber 161 is shown in FIG.
The cooling head 177A of the refrigerator 177 corresponding to the cooling unit 21 in the above embodiment is vertically inserted from above,
A heat conducting substrate 179 extends horizontally from the cooling head 177A, and first and second heat conducting blocks 180A and 180B are provided on the heat conducting substrate 179. The first low temperature heat switch 181 is provided between the heat conduction block 175A in the first activated carbon trap 163A and the first heat conduction block 180A on the cooling head side.
A, and a second low temperature thermal switch 181B is arranged between the heat conduction block 175B in the second activated carbon trap 163B and the second heat conduction block 180B on the cooling head side.
【００４３】一方、希釈冷凍機等の極低温機器１８３か
ら３Ｈｅガス等のガスが導出される導出管路１８５に
は、ガス循環用のロータリーポンプ１８７が配設されて
おり、このロータリーポンプ１８７の吐出側は、管路１
８９、開閉弁１９３Ａおよび管路１９１Ａを介して第１
の活性炭トラップ１６３Ａのガス導入口１７１Ａに接続
されるとともに、管路１８９、開閉弁１９３Ｂおよび管
路１９１Ｂを介して第２の活性炭トラップ１６３Ｂのガ
ス導入口１７１Ｂに接続されている。また第１の活性炭
トラップ１６３Ａのガス排出口１７３Ａは、管路１９５
Ａおよび開閉弁１９７Ａを介して前記極低温機器１８３
のガス戻り管路１９９に接続されるとともに、管路２０
１Ａおよび開閉弁２０３Ａを介して減圧排気用の真空ポ
ンプ２０５の吸引側に接続されている。さらに第２の活
性炭トラップ１６３Ｂのガス排出口１７３Ｂは、管路１
９５Ｂおよび開閉弁１９７Ｂを介して極低温機器１８３
のガス戻り管路１９９に接続されるとともに、管路２０
１Ｂおよび開閉弁２０３Ｂを介して前記真空ポンプ２０
５の吸引側に接続されている。On the other hand, a gas circulating rotary pump 187 is arranged in the outlet pipe 185 through which a gas such as 3He gas is discharged from the cryogenic device 183 such as a dilution refrigerator. Line 1 on the discharge side
89, the opening / closing valve 193A and the pipe 191A
Is connected to the gas introduction port 171A of the activated carbon trap 163A, and is also connected to the gas introduction port 171B of the second activated carbon trap 163B via the pipe line 189, the opening / closing valve 193B and the pipe line 191B. Further, the gas discharge port 173A of the first activated carbon trap 163A is connected to the pipe 195.
The cryogenic device 183 via A and the on-off valve 197A.
The gas return line 199 of the
It is connected to the suction side of a vacuum pump 205 for decompressing exhaust through 1A and an on-off valve 203A. Further, the gas outlet 173B of the second activated carbon trap 163B is connected to the conduit 1
Cryogenic device 183 via 95B and on-off valve 197B
The gas return line 199 of the
1B and the opening / closing valve 203B through the vacuum pump 20.
5 is connected to the suction side.
【００４４】以上のような図８に示される低温活性炭ト
ラップ装置の動作について次に説明する。The operation of the above-described low temperature activated carbon trap device shown in FIG. 8 will be described below.
【００４５】初期の運転状態では、例えば第１の活性炭
トラップ１６３Ａの側の第１の熱スイッチ１８１Ａを熱
的オン状態に設定しておき、また第１の活性炭トラップ
１６３Ａのヒータ１６９Ａをオフ状態としておく。さら
に開閉弁１９３Ａ，１９７Ａは開放し、開閉弁１９３
Ｂ，１９７Ｂ，２０３Ａは閉じておく。In the initial operating state, for example, the first thermal switch 181A on the side of the first activated carbon trap 163A is set to the thermal ON state, and the heater 169A of the first activated carbon trap 163A is turned OFF. deep. Further, the opening / closing valves 193A and 197A are opened, and the opening / closing valve 193 is opened.
B, 197B and 203A are closed.
【００４６】以上のような初期状態において、冷凍機１
７７の冷却ヘッド１７７Ａは、冷凍機の運転により例え
ば２０Ｋ程度の低温となっており、また第１の熱スイッ
チ１８１Ａが熱的オン状態となっていることから、冷却
ヘッド１７７Ａから熱伝導基板１７９、熱伝導ブロック
１８０Ａ、第１の熱スイッチ１８１Ａ、熱伝導ブロック
１７５Ａを経て第１の活性炭トラップ１６３Ａに至る熱
伝導経路が形成されているから、第１の活性炭トラップ
１６３Ａ内の活性炭層１６７Ａが２０Ｋ近くに冷却さ
れ、その状態で極低温機器１８３からのガスが、管路１
８５、ロータリーポンプ１８７、管路１８９、開閉弁１
９３Ａ、管路１９１Ａを経て第１の活性炭トラップ１６
３Ａ内に導かれ、前述のように油分等のトラップや吸着
がなされる。なお上述のような状態では第２の活性炭ト
ラップ１６３Ｂには極低温機器１８３からのガスは導入
されない。In the initial state as described above, the refrigerator 1
The cooling head 177A of 77 is at a low temperature of, for example, about 20K due to the operation of the refrigerator, and the first thermal switch 181A is in the thermal ON state. Since the heat conduction path from the heat conduction block 180A, the first heat switch 181A, and the heat conduction block 175A to the first activated carbon trap 163A is formed, the activated carbon layer 167A in the first activated carbon trap 163A is close to 20K. The gas from the cryogenic device 183 is cooled to the pipeline 1 in that state.
85, rotary pump 187, pipe line 189, open / close valve 1
First activated carbon trap 16 via 93A and pipe 191A
It is introduced into 3A and traps or adsorbs oil or the like as described above. In the state as described above, the gas from the cryogenic device 183 is not introduced into the second activated carbon trap 163B.
【００４７】ここで、上述のような初期状態での第１の
活性炭トラップ１６３Ａによるトラップ動作が続けば、
第１の活性炭トラップ１６３Ａの活性炭層１６７Ａに詰
りが生じ、流路抵抗が大きくなるともに、吸着能力も低
下する。そこでこのような事態に至る前に、極低温機器
１８３からのガスの流路を第２の活性炭トラップ１６３
Ｂの側に切替える。すなわち開閉弁１９３Ａ，１９７Ａ
を閉じるとともに、開閉弁１９３Ｂ，１９７Ｂを開放
し、また第２の熱スイッチ１８１Ｂを熱的オン状態とす
る。このようにすれば第２の活性炭トラップ１６３Ｂの
側にガスが流れて、油分等のトラップ、吸着がなされ
る。Here, if the trapping operation by the first activated carbon trap 163A in the initial state as described above continues,
The activated carbon layer 167A of the first activated carbon trap 163A is clogged, the flow path resistance increases, and the adsorption capacity also decreases. Therefore, before such a situation occurs, the flow path of the gas from the cryogenic device 183 is connected to the second activated carbon trap 163.
Switch to B side. That is, the on-off valves 193A and 197A
Is closed, the on-off valves 193B and 197B are opened, and the second thermal switch 181B is turned on. In this way, the gas flows to the side of the second activated carbon trap 163B to trap and adsorb oil and the like.
【００４８】以上のようにして極低温機器１８３からロ
ータリーポンプ１８７によって循環されるガスを、第１
の活性炭トラップ１６３Ａに流す運転状態と、第２の活
性炭トラップ１６３Ｂに流す運転状態とを交互に切替え
ることができる。As described above, the gas circulated by the rotary pump 187 from the cryogenic device 183 is fed to the first
The operating state of flowing into the activated carbon trap 163A and the operating state of flowing into the second activated carbon trap 163B can be switched alternately.
【００４９】そして一方の側の活性炭トラップにガスを
流している運転状態の間に、他方の側の活性炭トラップ
において活性炭の再生操作を行なうことができる。例え
ば図８に示すように第１の活性炭トラップ１６３Ａの側
にガスを流している運転状態において、第２の活性炭ト
ラップ１６３Ｂの側の再生操作を行なうためには、第２
の活性炭トラップ１６３Ｂの側の第２の熱スイッチ１８
１Ｂを熱的オフ状態とし、ヒータ１６９Ｂを作動させ
る。これによって第２の活性炭トラップ１６３Ｂの活性
炭層１６７Ｂの温度が、例えば常温近くまで上昇する。
また同時に開閉弁１９３Ｂ，１９７Ｂを閉じたまま、真
空ポンプ２０５を作動させるとともに開閉弁２０３Ｂを
開放させて、第２の活性炭トラップ１６３Ｂ内を排気減
圧する。このような温度上昇および排気減圧によって第
２の活性炭トラップ１６３Ｂの活性炭層１６７Ｂを再生
させることができる。また同様にして、第２の活性炭ト
ラップ１６３Ｂの側に極低温機器１８３からのガスを流
している運転状態の間に、第１の活性炭トラップ１６３
Ａの側の再生操作を行なうことができる。While the gas is flowing through the activated carbon trap on one side, the activated carbon can be regenerated in the activated carbon trap on the other side. For example, in order to perform the regeneration operation on the second activated carbon trap 163B side in the operating state in which the gas is flowing to the first activated carbon trap 163A side as shown in FIG.
Second thermal switch 18 on the side of the activated carbon trap 163B of
1B is brought into a thermal off state, and the heater 169B is operated. As a result, the temperature of the activated carbon layer 167B of the second activated carbon trap 163B rises, for example, to near room temperature.
At the same time, while the on-off valves 193B and 197B are closed, the vacuum pump 205 is operated and the on-off valve 203B is opened to exhaust and decompress the inside of the second activated carbon trap 163B. By such temperature rise and exhaust pressure reduction, the activated carbon layer 167B of the second activated carbon trap 163B can be regenerated. Similarly, during the operating state in which the gas from the cryogenic device 183 is flowing to the second activated carbon trap 163B side, the first activated carbon trap 163 is activated.
The reproduction operation on the A side can be performed.
【００５０】以上のように、図８に示される低温活性炭
トラップ装置においては、２基の活性炭トラップ１６３
Ａ，１６３Ｂを用いて、交互にトラップ運転を行なうと
ともに、一方の側のトラップ運転中に他方の側において
再生操作を行なうことができ、したがってガスを循環さ
せるべき極低温機器１８３の作動を停止させることな
く、長期間連続して運転することができる。As described above, in the low temperature activated carbon trap device shown in FIG. 8, two activated carbon traps 163 are provided.
A and 163B can be used to alternately perform trap operation and regenerative operation can be performed on the other side during trap operation on one side, thus stopping operation of the cryogenic device 183 through which gas is to be circulated. Without it, it can be operated continuously for a long time.
【００５１】[0051]
【発明の効果】この発明の低温機械的熱スイッチにおい
ては、作動軸の進退によりバネ部材と作動軸外面もしく
は孔部内面とが接触することにより熱的オン状態が得ら
れるが、バネ部材の付勢方向、したがって作動軸もしく
は孔部内面に熱的オン状態で接触圧力が加えられる方向
が、作動軸の進退方向に対して直交しているため、作動
軸の進退移動がバネ部材による接触圧力に影響を及ぼす
ことが回避され、そのため熱的オン状態では常に一定の
熱伝導状態を保つことができ、したがって作動軸の操作
力に影響されることなく、スイッチ特性を安定化するこ
とができ、また作動軸に過大な操作力を加えることによ
って熱的スイッチを構成している部材を変形させたり破
壊させたりするおそれもなく、信頼性、耐久性を従来の
機械的熱スイッチと比較して格段に向上させることがで
きる。In the low temperature mechanical heat switch of the present invention, a thermal ON state can be obtained by contact between the spring member and the outer surface of the operating shaft or the inner surface of the hole due to the forward / backward movement of the operating shaft. The biasing direction, and hence the direction in which the contact pressure is applied to the operating shaft or the inner surface of the hole in the thermal ON state, is orthogonal to the advancing / retreating direction of the operating shaft. The influence is avoided, so that a constant heat conduction state can always be maintained in the thermal ON state, so that the switch characteristics can be stabilized without being affected by the operating force of the operating shaft, and There is no risk of deforming or destroying the members that make up the thermal switch by applying excessive operating force to the operating shaft, and the reliability and durability of the conventional mechanical thermal switch It can be remarkably improved in comparison.
【図１】この発明の一実施例の低温機械的熱スイッチを
示すもので、熱的オン状態での縦断面図である。FIG. 1 is a longitudinal sectional view showing a low temperature mechanical thermal switch according to an embodiment of the present invention in a thermal ON state.
【図２】図１に示される実施例の低温機械的熱スイッチ
の熱的オフ状態における縦断面図である。FIG. 2 is a vertical cross-sectional view of the low temperature mechanical thermal switch of the embodiment shown in FIG. 1 in a thermally off state.
【図３】図１の低温機械的熱スイッチに使用される帯状
のバネ部材の一例を示す展開図である。3 is a development view showing an example of a strip-shaped spring member used in the low temperature mechanical thermal switch of FIG. 1. FIG.
【図４】図３のＩＶ−ＩＶ線における縦断面図である。4 is a vertical cross-sectional view taken along the line IV-IV in FIG.
【図５】図３、図４に示されるバネ部材を低温機械的熱
スイッチに組込んだ状態の部分拡大横断面図である。FIG. 5 is a partially enlarged transverse sectional view showing a state where the spring member shown in FIGS. 3 and 4 is incorporated in a low temperature mechanical heat switch.
【図６】この発明の機械的熱スイッチを用いた３Ｈｅ冷
凍機の一例の要部を示す略解的な縦断面図である。FIG. 6 is a schematic vertical sectional view showing a main part of an example of a 3He refrigerator using the mechanical thermal switch of the present invention.
【図７】この発明の機械的熱スイッチを用いた断熱消磁
冷凍機の一例の要部を示す略解的な断面図である。FIG. 7 is a schematic cross-sectional view showing a main part of an example of an adiabatic demagnetization refrigerator using the mechanical heat switch of the present invention.
【図８】この発明の機械的熱スイッチを用いた低温活性
炭トラップ装置の一例を示す略解図である。FIG. 8 is a schematic diagram showing an example of a low temperature activated carbon trap device using the mechanical thermal switch of the present invention.
【図９】従来の低温機械的熱スイッチの一例を示す略解
図である。FIG. 9 is a schematic diagram showing an example of a conventional low temperature mechanical thermal switch.
【図１０】従来の低温機械的熱スイッチの他の例を示す
略解図である。FIG. 10 is a schematic diagram showing another example of a conventional low temperature mechanical thermal switch.
２１ 冷却部 ２７ 被冷却部 ３３ 孔部 ３５ バネ部材 ３７ 作動軸 21 Cooling unit 27 Cooled part 33 holes 35 Spring member 37 Working axis
Claims (2)
部を冷却するための冷却部との間を熱的にオンオフする
ための低温機械的熱スイッチにおいて、 前記被冷却部と冷却部とのうち、いずれか一方の側に、
その一方の側の部材に常時熱的に接続されかつ所定方向
へ進退可能な良伝熱材料からなる作動軸を設け、前記被
冷却部と冷却部とのうちの他方の側には、前記作動軸が
挿入されてその作動軸が進退し得る孔部を形成してお
き、かつ前記作動軸と孔部とのうち、いずれか一方に、
作動軸の進退方向に対して直交する方向への付勢力を有
する良伝熱材料からなるバネ部材を取付けておき、その
バネ部材が前記付勢力によって作動軸と孔部のうちの他
方に接触するように構成し、前記作動軸の進退によっ
て、作動軸が前記バネ部材を介して孔部内面に接してい
る熱的オン状態と、作動軸がバネ部材を介して孔部内面
に接触していない熱的オフ状態とを切替えるようにした
ことを特徴とする低温機械的熱スイッチ。1. A low-temperature mechanical thermal switch for thermally turning on and off between a cooled part to be cooled and a cooling part for cooling the cooled part, wherein the cooled part and the cooling part. On one of the two sides,
An operating shaft made of a good heat transfer material that is always thermally connected to one of the members and is capable of moving forward and backward in a predetermined direction is provided, and the operating shaft is provided on the other side of the cooled part and the cooling part. A hole is formed in which the shaft is inserted so that the operating shaft can move forward and backward, and in either one of the operating shaft and the hole,
A spring member made of a good heat transfer material having an urging force in a direction orthogonal to the forward / backward direction of the operating shaft is attached, and the spring member contacts the operating shaft and the other of the holes by the urging force. With such a configuration, the operating shaft is moved forward and backward, and the operating shaft is in contact with the inner surface of the hole through the spring member, and the operating shaft is not in contact with the inner surface of the hole through the spring member. A low-temperature mechanical thermal switch characterized by being switched between a thermal off state.
において、 前記バネ部材として、全体として帯状をなしかつ全体の
板面に対し直交する方向への付勢力を有するものを用
い、そのバネ部材を、被冷却部の孔部の内面もしくは作
動軸の外面に沿ってその全周にわたり取付けたことを特
徴とする低温機械的熱スイッチ。2. The low-temperature mechanical heat switch according to claim 1, wherein the spring member is a member having a strip shape as a whole and having a biasing force in a direction orthogonal to a plate surface of the spring, and the spring is used. A low-temperature mechanical heat switch characterized in that a member is attached along the entire inner circumference of the inner surface of the hole of the cooled portion or the outer surface of the operating shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000097763A JP3497440B2 (en) | 2000-03-31 | 2000-03-31 | Low temperature mechanical heat switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000097763A JP3497440B2 (en) | 2000-03-31 | 2000-03-31 | Low temperature mechanical heat switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001280724A JP2001280724A (en) | 2001-10-10 |
| JP3497440B2 true JP3497440B2 (en) | 2004-02-16 |
Family
ID=18612340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000097763A Expired - Fee Related JP3497440B2 (en) | 2000-03-31 | 2000-03-31 | Low temperature mechanical heat switch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3497440B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104848718A (en) * | 2015-04-28 | 2015-08-19 | 中国科学院理化技术研究所 | Pre-cooling device of low-temperature pulsing heat pipe and testing system with device |
| KR101569918B1 (en) | 2014-03-10 | 2015-11-17 | 한국과학기술원 | Heat switch for using active carbon, crycooler system and method the heat switch |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6286242B2 (en) * | 2014-03-18 | 2018-02-28 | 株式会社日立製作所 | Superconducting magnet device |
| CN109520368A (en) * | 2018-12-25 | 2019-03-26 | 中国科学院理化技术研究所 | A kind of thermal switch |
| JP2021134951A (en) * | 2020-02-25 | 2021-09-13 | 住友重機械工業株式会社 | Cryogenic freezer and cryogenic system |
| JP7496229B2 (en) | 2020-04-14 | 2024-06-06 | 住友重機械工業株式会社 | Cryogenic refrigerator mounting structure and cryogenic refrigerator |
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2000
- 2000-03-31 JP JP2000097763A patent/JP3497440B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101569918B1 (en) | 2014-03-10 | 2015-11-17 | 한국과학기술원 | Heat switch for using active carbon, crycooler system and method the heat switch |
| CN104848718A (en) * | 2015-04-28 | 2015-08-19 | 中国科学院理化技术研究所 | Pre-cooling device of low-temperature pulsing heat pipe and testing system with device |
| CN104848718B (en) * | 2015-04-28 | 2017-04-19 | 中国科学院理化技术研究所 | Pre-cooling device of low-temperature pulsing heat pipe and testing system with device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001280724A (en) | 2001-10-10 |
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