JP3436817B2 - View position display device of inspection equipment - Google Patents
View position display device of inspection equipmentInfo
- Publication number
- JP3436817B2 JP3436817B2 JP00558795A JP558795A JP3436817B2 JP 3436817 B2 JP3436817 B2 JP 3436817B2 JP 00558795 A JP00558795 A JP 00558795A JP 558795 A JP558795 A JP 558795A JP 3436817 B2 JP3436817 B2 JP 3436817B2
- Authority
- JP
- Japan
- Prior art keywords
- display device
- slit
- ray
- visual field
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、各種検査装置等におい
て、検査位置あるいは視野位置をオペレータに指示する
視野位置表示装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention indicates an inspection position or a visual field position to an operator in various inspection devices and the like.
The present invention relates to a visual field position display device .
【０００２】[0002]
【従来の技術】図２、図３はそれぞれＸ線検査装置にお
ける従来方式を示す図である。2. Description of the Related Art FIGS. 2 and 3 are views showing a conventional method in an X-ray inspection apparatus.
【０００３】図２において１はＸ線源、２は被検査物、
３は撮像部、４はポイントレーザプロジェクタである。In FIG. 2, 1 is an X-ray source, 2 is an object to be inspected,
Reference numeral 3 is an image pickup unit, and 4 is a point laser projector.
【０００４】Ｘ線源１より発射されたＸ線は被検査物２
を透過し撮像部３に入射する。この際、Ｘ線が被検査物
２を透過する位置を、肉眼でも確認できるようにポイン
トレーザプロジェクタ４で直接斜方から照射し、表示す
る。The X-ray emitted from the X-ray source 1 is an object to be inspected 2
And is incident on the imaging unit 3. At this time, the point laser projector 4 irradiates the point laser projector 4 directly from an oblique direction so that the position where the X-ray passes through the inspection object 2 can be confirmed with the naked eye and is displayed.
【０００５】図３の例においてはにおいて１はＸ線源、
２は被検査物、３は撮像部、４はポントレーザプロジェ
クタ、６はミラーである。In the example of FIG. 3, 1 is an X-ray source,
Reference numeral 2 is an object to be inspected, 3 is an image pickup unit, 4 is a point laser projector, and 6 is a mirror.
【０００６】Ｘ線源１より発射されたＸ線はミラー６及
び被検査物２を透過し、撮像部３に入射する。この際Ｘ
線源１と被検査物２との間のミラー６によりＸ線が被検
査物２を透過する位置を、ミラー６による反射レーザ光
で照射し、肉眼で確認できるように表示する。The X-rays emitted from the X-ray source 1 pass through the mirror 6 and the inspection object 2 and enter the image pickup section 3. At this time X
The position where the X-ray passes through the inspection object 2 by the mirror 6 between the radiation source 1 and the inspection object 2 is illuminated with the laser light reflected by the mirror 6 and displayed so that it can be visually confirmed.
【０００７】[0007]
【発明が解決しようとする課題】前述の従来技術には次
のような問題点を有する。The above-mentioned prior art has the following problems.
【０００８】図２の例において、被検査物を搭載するス
テージに幾何学倍率可変用のＺステージを用いた場合、
矢印Ｚの方向にステージを駆動した時には、ポイントレ
ーザプロジェクタ照射位置が変化してしまう。In the example of FIG. 2, when a Z stage for varying the geometric magnification is used as the stage on which the object to be inspected is mounted,
When the stage is driven in the direction of arrow Z, the point laser projector irradiation position changes.
【０００９】また、図３の例においては、ミラーによる
物理的なデッドゾーンにより、Ｘ線源１と被検査物２を
密着もしくは、接近させることができない。このため、
幾何学倍率が少なくなる。さらにまた、ミラー６による
Ｘ線の減衰が起きる。In the example of FIG. 3, the X-ray source 1 and the inspection object 2 cannot be brought into close contact with or close to each other due to the physical dead zone of the mirror. For this reason,
Geometric magnification is reduced. Furthermore, by the mirror 6
X-ray attenuation occurs.
【００１０】そして、図２、図３共にポイントレーザに
より視野位置は判るが、視野エリアまでは表示できな
い、などの問題を有する。2 and 3, there is a problem that the field of view cannot be displayed even though the field of view can be known by the point laser.
【００１１】本発明はこれらの欠点を除去し、幾何学倍
率可変用Ｚステージを駆動した時にも指示位置が変化し
ないこと、また、エリア表示によって視野範囲が判別で
きるようにしたことを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to eliminate these drawbacks so that the pointing position does not change even when the Z stage for varying the geometric magnification is driven, and that the visual field range can be discriminated by the area display. .
【００１２】[0012]
【課題を解決するための手段】本発明は上記の目的を達
成するため、スリット光が被検査物上で９０°に交差す
る様に２個のスリット光プロジェクタを９０°ピッチで
配置する。 また、エリア表示の場合には、スリットレ
ーザ光の幅を広く設定するようにしたものである。In order to achieve the above object, the present invention arranges two slit light projectors at a 90 ° pitch so that slit light intersects 90 ° on an object to be inspected. Further, in the case of area display, the width of the slit laser light is set to be wide.
【００１３】[0013]
【作用】スリット光プロジェクタからのスリット光を２
つ、９０°に交差させることにより、被検査物の平行な
上下運動の際でも、上下軸（Ｚ）方向のスリット光の交
差位置は変わらず、視野位置を判別することができる。[Operation] Two slit light beams from the slit light projector
By crossing 90 °, the crossing position of the slit light in the vertical axis (Z) direction does not change and the visual field position can be determined even during the parallel vertical movement of the inspection object.
【００１４】また、Ｚステージ駆動時に、焦点と撮像部
とを結ぶ視野角によって生じる視野範囲の変化はスリッ
ト光に広がり角を持たせその角度を設定することによ
り、変化する視野範囲、エリアの判別を行う。Further, when the Z stage is driven, the change in the visual field range caused by the visual field angle connecting the focal point and the image pickup section is determined by setting the angle of the slit light so that the slit light has a divergence angle. I do.
【００１５】[0015]
【実施例】以下この発明の実施例をＸ線検査装置を例と
して、図１により説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. 1 using an X-ray inspection apparatus as an example.
【００１６】１はＸ線を発射するＸ線源、２は被検査物
で主に電子回路基板などが多く、その表裏及び内層のパ
ターンや実装部品のはんだ付状態などが検査される。３
は撮像部で被検査物２を透過してきたＸ線から被検査物
の状態を外部のモニタ（図示せず）などに出力する装
置、５はスリットレーザプロジェクタで、被検査物２上
に作る９０°に交差するスリットレーザ光を照射する装
置である。Reference numeral 1 is an X-ray source for emitting X-rays, and 2 is an object to be inspected, which is mainly an electronic circuit board. The patterns on the front and back surfaces and inner layers, and the soldering state of mounted components are inspected. Three
Is a device for outputting the state of the object to be inspected from an X-ray transmitted through the object to be inspected 2 in the imaging unit to an external monitor (not shown) or the like, and 5 is a slit laser projector, which is formed on the object to be inspected 90. It is a device that irradiates a slit laser beam that intersects with °.
【００１７】スリットレーザプロジェクタ５ａ、５ｂに
よって作られた、破線で示す直交する２つのスリットレ
ーザ光ａ、ｂは、被検査物２が平行に上下運動を行う際
にお互いのスリットレーザ光がスリット長手方向には、
ずれていく事にはなる。しかしながら、スリット短手方
向にはずれないため、スリットレーザ光の交差位置（交
差位置はＸ線の中心点を示す）は被検査物２上において
動かない事になる。この原理から直交する２つのスリッ
トレーザ光を用いてＸ線の視野中心位置を判別すること
ができる。Two slit laser lights a and b which are formed by the slit laser projectors 5a and 5b and which are orthogonal to each other and which are shown by broken lines are the slit laser lights which are slit longitudinally when the inspected object 2 vertically moves in parallel. In the direction
It will be shifted. However, since the slit laser beam does not deviate in the lateral direction, the intersection position of the slit laser light (the intersection position indicates the center point of the X-ray) does not move on the inspection object 2. From this principle, the center position of the X-ray field of view can be discriminated by using two slit laser beams orthogonal to each other.
【００１８】また、被検査物２が平行に上下運動を行う
際に、Ｘ線焦点と撮像部とを結ぶ視野角によって生じる
Ｘ線視野範囲の変化すなわち、広がりは実線ａ１、ａ
２、ｂ１、ｂ２で示すように予めスリットレーザプロジ
ェクタ５の照射スリットレーザ光にレンズ、あるいは振
動ミラー等の光学的手法で広がり角をもたせ、Ｘ線視野
範囲の変化に対応させることができる。Further, when the inspection object 2 moves up and down in parallel, a change in the X-ray visual field range caused by a visual field angle connecting the X-ray focal point and the image pickup section, that is, the spread is represented by solid lines a1 and a.
As shown by 2, b1 and b2, the irradiation slit laser light of the slit laser projector 5 can be given a divergence angle by an optical method such as a lens or a vibrating mirror in advance so as to cope with a change in the X-ray visual field range.
【００１９】これらによって検査中の被検査物２のＸ線
視野位置及び視野範囲が被検査物２の平行な上下運動に
影響を受けずに判別することが可能となる。By these, the X-ray visual field position and the visual field range of the inspection object 2 under inspection can be determined without being affected by the parallel vertical movement of the inspection object 2.
【００２０】また、ミラーによる物理的なデッドゾーン
がないため、Ｘ線源と被検査物が密着もしくは、接近さ
せることができる。このため、幾何学倍率を大きくとる
ことができる。また、ミラーによるＸ線の減衰は発生し
ない。Further, since there is no physical dead zone due to the mirror, the X-ray source and the object to be inspected can be brought into close contact with or brought close to each other. Therefore, the geometrical magnification can be increased. Further, the X-rays are not attenuated by the mirror.
【００２１】以上述べた実施例はＸ線検査装置の場合で
あるが、通常のテレビカメラを用いた検査装置において
も有効なことは説明するまでもない。例えば、テレビカ
メラにより撮像された被検査物体の中心が正しく画面中
央に位置するかをモニタ上の映像を見ずとも確認するこ
とが出来る。Although the above-mentioned embodiment is the case of the X-ray inspection apparatus, it is needless to say that it is effective also in the inspection apparatus using the ordinary TV camera. For example, it is possible to confirm whether the center of the object to be inspected captured by the television camera is correctly located at the center of the screen without looking at the image on the monitor.
【００２２】また、この実施例ではスリット光を得る手
段としてレーザ光源を用いたが、必ずしもレーザである
必要は無く、例えば通常のスポット光線を回転ミラー、
振動ミラー等によって走査するようにしても良い。Further, in this embodiment, the laser light source is used as the means for obtaining the slit light, but it is not always necessary to use a laser, and for example, an ordinary spot light beam is rotated by a rotating mirror,
Scanning may be performed by a vibrating mirror or the like.
【００２３】[0023]
【発明の効果】このように本発明ではスリット光線は、
被検査物の平行な上下運動には影響されずいかなる場合
でも同一ラインを照射し続ける。その結果、被検査物の
平行な上下運動に際して、いかなる場合においても、視
野の中心位置及び範囲を正しく表示することができる。As described above, according to the present invention, the slit light beam is
Irrespective of parallel vertical movement of the object to be inspected, the same line is continuously irradiated in any case. As a result, the center position and range of the visual field can be correctly displayed in any case when the test object is moved up and down in parallel.
【図１】本発明の全体構成図。FIG. 1 is an overall configuration diagram of the present invention.
【図２】従来技術構成図。FIG. 2 is a configuration diagram of a conventional technique.
【図３】従来技術構成側面図。FIG. 3 is a side view of a conventional technology configuration.
１ Ｘ線源、２ 被検査物、３ 撮像部、４ ポイント
レーザプロジェクタ、５ スリットレーザプロジェク
タ、６ ミラー1 X-ray source, 2 inspection object, 3 imaging unit, 4 point laser projector, 5 slit laser projector, 6 mirror
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 23/00 - 23/227 A61B 6/00 - 6/14 G21K 5/00 - 5/10 G01N 21/84 - 21/958 Front page continued (58) Fields surveyed (Int.Cl. 7 , DB name) G01N 23/00-23/227 A61B 6/00-6/14 G21K 5/00-5/10 G01N 21/84-21 / 958
Claims (2)
物上で各々のスリット光が９０°に交差するように配置Arranged so that each slit light crosses 90 ° on the object
した検査装置の視野位置表示装置において、視野角に対In the visual field position display device of the
してスリット光の広がり角が等しくなるスリット光プロAnd the slit light spread angle is the same.
ジェクタを用いることを特徴とする検査装置の視野位置Field-of-view position of inspection device characterized by using ejector
表示装置。Display device.
はレーザ光線プロジェクタであることを特徴とする検査
装置の視野位置表示装置。 2. The visual field position display device for an inspection apparatus, wherein the slit light projector according to claim 1 is a laser beam projector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00558795A JP3436817B2 (en) | 1995-01-18 | 1995-01-18 | View position display device of inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00558795A JP3436817B2 (en) | 1995-01-18 | 1995-01-18 | View position display device of inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08193963A JPH08193963A (en) | 1996-07-30 |
| JP3436817B2 true JP3436817B2 (en) | 2003-08-18 |
Family
ID=11615383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00558795A Expired - Fee Related JP3436817B2 (en) | 1995-01-18 | 1995-01-18 | View position display device of inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3436817B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5202045B2 (en) * | 2008-03-11 | 2013-06-05 | 日立アロカメディカル株式会社 | X-ray equipment |
| KR102301014B1 (en) * | 2021-04-28 | 2021-09-10 | 주식회사 준테크솔루션 | portable x-ray apparatus for non-destructive inspection |
-
1995
- 1995-01-18 JP JP00558795A patent/JP3436817B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08193963A (en) | 1996-07-30 |
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