JP3429007B2 - 光学的位置測定装置 - Google Patents

光学的位置測定装置

Info

Publication number
JP3429007B2
JP3429007B2 JP52208098A JP52208098A JP3429007B2 JP 3429007 B2 JP3429007 B2 JP 3429007B2 JP 52208098 A JP52208098 A JP 52208098A JP 52208098 A JP52208098 A JP 52208098A JP 3429007 B2 JP3429007 B2 JP 3429007B2
Authority
JP
Japan
Prior art keywords
drive unit
measuring
scale
movable
optical position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP52208098A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001503598A (ja
Inventor
ブラーシュ・ヤン
アルゴイアー・ミヒャエル
カリミツィ・クリスティアン
Original Assignee
ドクトル・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ドクトル・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング filed Critical ドクトル・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング
Priority claimed from PCT/EP1997/005520 external-priority patent/WO1998021810A1/de
Publication of JP2001503598A publication Critical patent/JP2001503598A/ja
Application granted granted Critical
Publication of JP3429007B2 publication Critical patent/JP3429007B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP52208098A 1996-11-13 1997-10-08 光学的位置測定装置 Expired - Fee Related JP3429007B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19646771.3 1996-11-13
DE19646771 1996-11-13
PCT/EP1997/005520 WO1998021810A1 (de) 1996-11-13 1997-10-08 Optische positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
JP2001503598A JP2001503598A (ja) 2001-03-13
JP3429007B2 true JP3429007B2 (ja) 2003-07-22

Family

ID=7811460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52208098A Expired - Fee Related JP3429007B2 (ja) 1996-11-13 1997-10-08 光学的位置測定装置

Country Status (3)

Country Link
JP (1) JP3429007B2 (de)
CN (1) CN1111936C (de)
DE (1) DE59704038D1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10050392A1 (de) * 2000-10-12 2002-04-18 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
EP1519158B1 (de) * 2003-09-23 2010-08-11 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
JP4784905B2 (ja) * 2004-09-03 2011-10-05 株式会社安川電機 Ｘｙ位置決め装置
DE102012221566A1 (de) * 2012-11-26 2014-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN109769407B (zh) * 2016-08-16 2022-04-15 罗伯特·博世有限公司 用于估计电动机中转子位置的光学传感器和方法、及包括光学传感器的电动机

Also Published As

Publication number Publication date
JP2001503598A (ja) 2001-03-13
CN1237284A (zh) 1999-12-01
DE59704038D1 (de) 2001-08-16
CN1111936C (zh) 2003-06-18

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