JP3400012B2 - Small object observation device - Google Patents
Small object observation deviceInfo
- Publication number
- JP3400012B2 JP3400012B2 JP11599893A JP11599893A JP3400012B2 JP 3400012 B2 JP3400012 B2 JP 3400012B2 JP 11599893 A JP11599893 A JP 11599893A JP 11599893 A JP11599893 A JP 11599893A JP 3400012 B2 JP3400012 B2 JP 3400012B2
- Authority
- JP
- Japan
- Prior art keywords
- prism
- lens group
- image
- rotation
- camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Closed-Circuit Television Systems (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
【発明の詳細な説明】
【０００１】
【産業上の利用分野】本発明は、マクロレンズ群の前に
入力用ミラー又はプリズムを配置して、これを光軸を中
心に回転させることにより、微小物体（被写体）を静止
させたまま３６０°方向からＴＶカメラを用いて観察で
きる微小物体観察装置に関する。
【０００２】
【従来の技術】ＴＶカメラを用いて観察できる微小物体
観察装置は、ＩＣや微小パーツ等の検査用に用いること
ができるもので、この装置の構成は図４に示すとおりで
ある。図４において、１はペンシル状の本体、２はマク
ロレンズ群、３はズームレンズ群、４はＴＶカメラ、５
は照明用リングレンズ、６、６ａは入力ミラー、７は入
力ミラー６、６ａを光軸を中心に回転させるミラーリン
グ、８はリング７を駆動するためのモータにして、この
モータ８の回転は、減速ギヤー９を経由して前記ミラー
リング７に伝達される。
【０００３】この従来装置の場合、焦点位置Ｐに微小物
体ａを置き、モータ８を駆動すると、入力ミラー６、６
ａが光軸を中心に回転し、像は一点鎖線で示すようにミ
ラー６→６ａと反射してマクロレンズ群２、ズームレン
ズ群３を経由してＴＶカメラ４で結像する。ＴＶカメラ
４は、この画像をモニタに送り、表示する。
【０００４】
【発明が解決しようとする課題】しかし、このような構
成の観察装置の最大の欠点は、図５に示すような被写体
を例にすると、ＴＶモニタされる被写体の画像は、図６
に示すように所謂すりこぎ運動を呈するため、観察者に
疲労を感じさせることである。
【０００５】本発明の目的は、微小物体観察装置におい
て、すりこぎ運動をなくし、あたかも被写体が回転テー
ブルの上に乗って、その回転軸を軸として３６０°回転
しているようにＴＶモニタに写し出すことにより、観察
者に疲労を感じさせないようにすることである。
【０００６】
【課題を解決するための手段】本発明に係る微小物体観
察装置の構成は次のとおりである。
【０００７】マクロレンズ群の前に入力用ミラー又はプ
リズムを配置して、これを光軸を中心に回転させること
により、微小物体を静止させたまま３６０°方向からＴ
Ｖカメラを用いて観察できる装置において、マクロレン
ズ群とＴＶカメラ間の光路内に、マクロレンズ群でとら
えた画像を奇数回反射させるミラー又はプリズムで構成
された画像補正装置を組み込むと共に、この画像補正装
置を、前記入力用ミラー又はプリズムの回転速度及び方
向に対して、速度は１／２で、回転方向は反対方向に同
期させて回転する駆動装置を設けて成る微小物体観察装
置。
【０００８】
【作用】入力ミラー又はプリズムの回転速度及び方向に
対して、画像補正装置の回転速度は２分の１、回転方向
は反対方向に駆動装置により駆動されている。この状態
において被写体から入力ミラー又はプリズムを経由して
入った光は、マクロレンズ群を経由して（ズームレンズ
群がある場合にはこのズームレンズ群を経由して）画像
補正装置内に入り、奇数回反射し、この結果鏡面反転す
る。これを、入力ミラー又はプリズムの屋根型構成の部
分で打ち消し、又、画像補正装置は入力ミラー又はプリ
ズムの回転の１／２回転で反対方向に回転することによ
り、画像を左右又は上下の反転のない、正常な画像に補
正してＴＶモニタ画面に表示する。
【０００９】
【実施例】図１に本発明に係る微小物体観察装置の実施
例を示す。
【００１０】２０は本体、２１はマクロレンズ群、２２
はズームレンズ群、２３はＴＶカメラ、２４は照明用リ
ングレンズ、２５は光源からの光をリングレンズ２４に
送るための光ファイバー束、２６は光軸を中心として回
転する入力プリズム２７を保持している回転リング、２
８はズームレンズ群２２とＴＶカメラ２３間の光路内に
組み込まれた画像補正装置にして、この装置２８は奇数
回反射の補正プリズム２９と、このプリズム２９を保持
しているホルダー３０と、ホルダー３０を光軸を中心と
して回転する回転機構３１と、駆動装置（モータ）３２
から成っている。
【００１１】３３は前記駆動モータ３２の回転を前記入
力プリズム２７の回転リング２６に伝達する回転伝達
軸、３４は伝達ギヤーにして、入力プリズム２７側と画
像補正装置２０側のプリズム２９の回転比は２：１で、
その回転方向は互いに反対方向である。
【００１２】上記実施例についてその作用を説明する
と、観察に際して、駆動装置３２を駆動すると、入力プ
リズム２７及び画像補正装置２８側補正プリズム２９が
同時に回転し、入力側プリズム２６は被写体の周囲を３
６０°回転し、この光はマクロレンズ群２１からズーム
レンズ群２２を経由して画像補正装置２８の補正プリズ
ム２９内に入って奇数回反射し、入力側プリズム２６の
屋根型構成の部分につくられる画像を打ち消してＴＶカ
メラ２３で結像する。
【００１３】図２（Ａ）〜（Ｇ）は補正プリズム２９の
回転を示し、図３は図５に示した被写体と同一の被写体
を観察したときの画像の展開であって、この被写体の画
像は、回転テーブルに乗せられ、この軸を中心に回転し
ている被写体を、定点で観察している場合の画像と同じ
画像のようにＴＶモニタに表示される。
【００１４】
【発明の効果】本発明は以上のように、微小物体を３６
０°方向から観察する際に、この微小物体が表示される
ＴＶモニタの画像から、すりこぎ運動をとり除いたの
で、観察者の疲労がなくなる。又、すりこぎ運動にとも
なう観察エラーもなくなる。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-lens arrangement in which an input mirror or prism is arranged in front of a macro lens group and is rotated about an optical axis. The present invention relates to a minute object observing apparatus that can observe an object (subject) from a 360 ° direction using a TV camera while keeping the object still. 2. Description of the Related Art A minute object observing apparatus which can be observed using a TV camera can be used for inspection of ICs, minute parts, and the like. The structure of this apparatus is as shown in FIG. In FIG. 4, 1 is a pencil-shaped body, 2 is a macro lens group, 3 is a zoom lens group, 4 is a TV camera, 5
Is an illumination ring lens, 6 and 6a are input mirrors, 7 is a mirror ring for rotating the input mirrors 6 and 6a around the optical axis, 8 is a motor for driving the ring 7, and the rotation of the motor 8 is as follows. The light is transmitted to the mirror ring 7 via the reduction gear 9. In the case of this conventional apparatus, when the minute object a is placed at the focal position P and the motor 8 is driven, the input mirrors 6, 6
a rotates around the optical axis, and the image is reflected by the mirror 6 → 6a as shown by the dashed line, and forms an image by the TV camera 4 via the macro lens group 2 and the zoom lens group 3. The TV camera 4 sends this image to a monitor and displays it. [0004] However, the biggest disadvantage of the observation apparatus having such a configuration is that, when an object as shown in FIG. 5 is taken as an example, an image of the object to be monitored on a TV is shown in FIG.
As shown in Fig. 5, the observer feels fatigue because of the so-called rubbing movement. SUMMARY OF THE INVENTION An object of the present invention is to eliminate a rubbing motion in a microscopic object observation apparatus, and to display an image on a TV monitor as if the object were on a rotary table and rotated 360 ° about its rotation axis. This is to prevent the observer from feeling fatigued. [0006] The configuration of a microscopic object observation apparatus according to the present invention is as follows. [0007] An input mirror or prism is arranged in front of the macro lens group, and is rotated about the optical axis.
In a device that can be observed using a V camera, an image correction device including a mirror or a prism that reflects an image captured by the macro lens group an odd number of times is incorporated in an optical path between the macro lens group and the TV camera. A minute object observation device comprising a correction device provided with a driving device that rotates the correction device at a speed of １ ／ with respect to the rotation speed and direction of the input mirror or prism, and rotates the rotation direction in synchronization with the opposite direction. The rotation speed of the image correction device is halved with respect to the rotation speed and direction of the input mirror or prism, and the rotation direction is driven by the driving device in the opposite direction. In this state, light entering from the subject via the input mirror or prism enters the image correction device via the macro lens group (or via the zoom lens group if there is a zoom lens group), The light is reflected an odd number of times, resulting in a mirror inversion. This is counteracted by the roof-type configuration of the input mirror or prism, and the image correction device rotates the image in the opposite direction by half the rotation of the input mirror or prism, thereby turning the image horizontally or vertically. No, correct to normal image and display on TV monitor screen. FIG. 1 shows an embodiment of a microscopic object observation apparatus according to the present invention. Reference numeral 20 denotes a main body, 21 denotes a macro lens group, 22
Denotes a zoom lens group, 23 denotes a TV camera, 24 denotes an illumination ring lens, 25 denotes an optical fiber bundle for transmitting light from a light source to the ring lens 24, and 26 denotes an input prism 27 which rotates around an optical axis. Rotating ring, 2
Reference numeral 8 denotes an image correction device incorporated in an optical path between the zoom lens group 22 and the TV camera 23. The device 28 includes a correction prism 29 for reflecting an odd number of times, a holder 30 holding the prism 29, and a holder 30. A rotation mechanism 31 for rotating the optical axis 30 about the optical axis, and a driving device (motor) 32
Consists of Reference numeral 33 denotes a rotation transmission shaft for transmitting the rotation of the drive motor 32 to the rotation ring 26 of the input prism 27. Reference numeral 34 denotes a transmission gear, which is a rotation ratio between the input prism 27 and the prism 29 on the image correction device 20 side. Is 2: 1
The directions of rotation are opposite to each other. The operation of the above embodiment will be described. When the driving device 32 is driven at the time of observation, the input prism 27 and the correction prism 29 on the image correction device 28 rotate simultaneously, and the input prism 26 moves around the subject by three times.
This light is rotated by 60 °, enters the correction prism 29 of the image correction device 28 from the macro lens group 21 via the zoom lens group 22, and is reflected an odd number of times, and is attached to the roof-side configuration of the input side prism 26. The image to be formed is canceled and the image is formed by the TV camera 23. FIGS. 2A to 2G show the rotation of the correction prism 29, and FIG. 3 shows the development of an image when the same object as the object shown in FIG. 5 is observed. Is displayed on a TV monitor as if it were the same image as when the subject rotating around this axis is observed at a fixed point. According to the present invention, as described above, a minute object is
When observing from the 0 ° direction, since the rubbing motion is removed from the image of the TV monitor on which the minute object is displayed, the fatigue of the observer is eliminated. In addition, there is no observation error associated with the rubbing motion.
【図面の簡単な説明】
【図１】本発明に係る微小物体観察装置の説明図。
【図２】（Ａ）、（Ｂ）、（Ｃ）、（Ｄ）、（Ｅ）、
（Ｆ）、（Ｇ）補正プリズムの回転の説明図。
【図３】すりこぎ運動を取り除いた画像の説明図。
【図４】従来の微小物体観察装置の説明図。
【図５】被写体の説明図。
【図６】従来の画像のすりこぎ運動の説明図。
【符号の説明】
２０ 本体
２１ マクロレンズ群
２２ ズームレンズ群
２３ ＴＶカメラ
２４ 照明用リングレンズ
２５ 光ファイバー束
２６ 回転リング
２７ 入力プリズム
２８ 画像補正装置
２９ 補正プリズム
３０ ホルダー
３１ 回転機構
３２ 駆動モータ
３３ 回転伝達軸
３４ 伝達ギヤーBRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram of a minute object observation device according to the present invention. FIG. 2 (A), (B), (C), (D), (E),
(F), (G) Explanatory drawing of rotation of a correction prism. FIG. 3 is an explanatory diagram of an image from which a rubbing motion has been removed; FIG. 4 is an explanatory view of a conventional minute object observation device. FIG. 5 is an explanatory diagram of a subject. FIG. 6 is an explanatory diagram of a conventional image rubbing motion. DESCRIPTION OF SYMBOLS 20 Body 21 Macro lens group 22 Zoom lens group 23 TV camera 24 Ring lens for illumination 25 Optical fiber bundle 26 Rotating ring 27 Input prism 28 Image correction device 29 Correction prism 30 Holder 31 Rotary mechanism 32 Drive motor 33 Rotation transmission Shaft 34 Transmission gear
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｈ０４Ｎ 7/18 Ｇ０２Ｂ 27/00 Ｈ (58)調査した分野(Int.Cl.7，ＤＢ名) G02B 27/00 G01N 21/84,21/88 G02B 5/04 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 identification code FI H04N 7/18 G02B 27/00 H (58) Field surveyed (Int.Cl. 7 , DB name) G02B 27/00 G01N 21 / 84,21 / 88 G02B 5/04
Claims (1)
プリズムを配置して、これを光軸を中心に回転させるこ
とにより、微小物体を静止させたまま３６０°方向から
ＴＶカメラを用いて観察できる装置において、マクロレ
ンズ群とＴＶカメラ間の光路内に、マクロレンズ群でと
らえた画像を奇数回反射させるミラー又はプリズムで構
成された画像補正装置を組み込むと共に、この画像補正
装置を、前記入力用ミラー又はプリズムの回転速度及び
方向に対して、速度は１／２で、回転方向は反対方向に
同期させて回転する駆動装置を設けて成る微小物体観察
装置。(57) [Claim 1] An input mirror or a prism is arranged in front of a macro lens group, and this is rotated about an optical axis, so that a minute object is kept stationary. In a device that can be observed using a TV camera from the ° direction, an image correction device including a mirror or a prism that reflects an image captured by the macro lens group an odd number of times is incorporated in an optical path between the macro lens group and the TV camera. A micro object observation device comprising a driving device that rotates the image correction device in synchronization with the rotation speed and direction of the input mirror or prism at a speed of １ ／ and the rotation direction in the opposite direction. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11599893A JP3400012B2 (en) | 1993-05-18 | 1993-05-18 | Small object observation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11599893A JP3400012B2 (en) | 1993-05-18 | 1993-05-18 | Small object observation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06331925A JPH06331925A (en) | 1994-12-02 |
| JP3400012B2 true JP3400012B2 (en) | 2003-04-28 |
Family
ID=14676322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11599893A Expired - Lifetime JP3400012B2 (en) | 1993-05-18 | 1993-05-18 | Small object observation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3400012B2 (en) |
-
1993
- 1993-05-18 JP JP11599893A patent/JP3400012B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06331925A (en) | 1994-12-02 |
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