JP3388439B2 - Gate valve - Google Patents
Gate valveInfo
- Publication number
- JP3388439B2 JP3388439B2 JP2000077438A JP2000077438A JP3388439B2 JP 3388439 B2 JP3388439 B2 JP 3388439B2 JP 2000077438 A JP2000077438 A JP 2000077438A JP 2000077438 A JP2000077438 A JP 2000077438A JP 3388439 B2 JP3388439 B2 JP 3388439B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- retainer
- wall
- valve seat
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Fluid-Driven Valves (AREA)
- Mechanically-Actuated Valves (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明はゲートバルブ、特
に、液昌製造装置で用いるプロセスチャンバーに対し被
処理体を挿，脱するためプロセスチャンバーの壁に設け
た開口を開閉するためのゲートバルブに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve, and more particularly to a gate valve for opening and closing an opening provided in a wall of a process chamber for inserting and removing an object to be processed in a process chamber used in a liquid manufacturing apparatus. It is a thing.
【０００２】[0002]
【従来の技術】図５は従来の液昌製造装置の要部を示
し、１及び２は夫々プロセスチャンバー、３は製造装置
外匣、４ａ，４ｂは両チャンバー１と２を仕切るため上
記外匣３に設けた壁、５はこの壁４ａ，４ｂに形成した
例えば縦250mm 、横1300mmの開口、6 は上記壁４ａ，４
ｂ間に形成した空間、７は上記一方の壁４ａに形成した
弁座、８は上記空間６内で上下動され上記開口５の弁座
７に上記開口５を開閉するため離接される弁板、９はこ
の弁板８に設けたシール用Ｏリング、１０は上記弁板８
を上記弁座７に離接する方向、例えば水平方向に押圧す
る弁抑え、１１はこの弁抑え１０と弁板８を例えば垂直
方向に移動せしめるための弁ロッド、１２は上記弁板８
と弁抑え１０の対向面に夫々形成した互いに対向する傾
斜浅溝、１３は上記互いに対向する傾斜溝１２間に介挿
したボール、１４は上記弁板８の下面にのみ対応する位
置で上記空間６の底部に設けたストッパーである。2. Description of the Related Art FIG. 5 shows a main part of a conventional liquid crystal manufacturing apparatus, 1 and 2 are process chambers, 3 is a manufacturing apparatus outer casing, and 4a and 4b are both chambers 1 and 2 for partitioning the chambers. Reference numeral 3 denotes a wall provided on the reference numeral 3;
A space formed between b, 7 is a valve seat formed on the one wall 4a, 8 is a valve which is moved up and down in the space 6 and is brought into contact with the valve seat 7 of the opening 5 to open and close the opening 5. A plate, 9 is an O-ring for sealing provided on the valve plate 8, and 10 is the valve plate 8
Is pressed against the valve seat 7 in a direction in which the valve seat 7 is separated from and contacted with, for example, a horizontal direction, 11 is a valve rod for moving the valve hold 10 and the valve plate 8 in the vertical direction, and 12 is the valve plate 8
And inclined shallow grooves formed on the opposite surfaces of the valve retainer 10 so as to be opposed to each other, 13 is a ball interposed between the inclined grooves 12 opposed to each other, and 14 is a space corresponding to only the lower surface of the valve plate 8. It is a stopper provided at the bottom of 6.
【０００３】このような従来のゲートバルブにおいては
弁ロッド１１を下方に移動せしめれば弁抑え１０がスプ
リング（図示せず）を介して弁板８と共に下方に移動
し、弁板８の下端が上記空間６の底部に設けた上記スト
ッパー１４に突き当った後は弁抑え１０のみが下方に移
動され、この結果傾斜浅溝１２とボール１３の作用によ
り弁板８が弁座７に対接されてシールが達成される。In such a conventional gate valve, if the valve rod 11 is moved downward, the valve retainer 10 moves downward together with the valve plate 8 via a spring (not shown), and the lower end of the valve plate 8 moves. After hitting the stopper 14 provided at the bottom of the space 6, only the valve retainer 10 is moved downward, and as a result, the valve plate 8 is brought into contact with the valve seat 7 by the action of the inclined shallow groove 12 and the ball 13. The seal is achieved.
【０００４】[0004]
【発明が解決しようとする課題】上記のような従来のゲ
ートバルブにおいては、弁板８が弁座７に接したときは
その反力によって弁抑え１０が、上記弁座７に対抗する
側の壁４ｂに押圧されるようになる。In the conventional gate valve as described above, when the valve plate 8 contacts the valve seat 7, the valve restraint 10 is provided on the side facing the valve seat 7 by the reaction force thereof. The wall 4b comes to be pressed.
【０００５】上記両チャンバー１と２内が夫々大気圧ま
たは夫々同程度の低圧または高圧のときは問題はない
が、例えば弁抑え１０側のチャンバー２が真空で弁板８
側のチャンバー１が大気圧の場合には弁板８にこれを弁
座７から引き離す力が加わり、上記の大きさの開口１の
場合にはその押圧荷重は３トン程度に達するようにな
る。There is no problem when the insides of both chambers 1 and 2 are at atmospheric pressure or at low pressure or high pressure at the same level, respectively. However, for example, the chamber 2 on the valve restraint 10 side is vacuum and the valve plate 8
When the side chamber 1 is at atmospheric pressure, a force is applied to the valve plate 8 to separate it from the valve seat 7, and in the case of the opening 1 having the above size, the pressing load reaches about 3 tons.
【０００６】この結果、弁抑え１０に接している壁部分
４ａのうち、弁ロッド１１の側の開口に連なる部分が上
記空間６に面している関係上撓み易くシール不良の原因
となる。これを防ぐためにはこの部分の壁厚を特に厚く
する必要があり、コスト高となる欠点があった。As a result, since the portion of the wall portion 4a in contact with the valve retainer 10 that is continuous with the opening on the side of the valve rod 11 faces the space 6, it easily bends and causes a sealing failure. In order to prevent this, it is necessary to make the wall thickness particularly thick at this portion, and there is a drawback that the cost becomes high.
【０００７】本発明は上記の欠点を除くようにしたもの
である。The present invention eliminates the above-mentioned drawbacks.
【０００８】[0008]
【課題を解決するための手段】本発明のゲートバルブ
は、弁板と、この弁板を弁座に押圧するための弁抑え
と、上記弁板と弁抑えを弁開口を閉じる位置と開く位置
に変位せしめるための変位手段と、上記弁開口を閉じる
位置で上記弁抑えが上記弁座から離間する方向へ移動す
ることを阻止するため上記弁座を形成した壁に形成した
移動阻止手段とより成り、上記移動阻止手段が、上記弁
抑えの一方の端部に形成した逆Ｕ字状折り曲げ部分と、
この折り曲げ部分の先端を受容するため上記弁座を形成
した壁に設けた凹部とより成り、上記弁抑えが上記弁開
口を閉じる位置にあるとき上記折り曲げ部分が上記凹部
に受容され、上記弁抑えが上記弁座から離れる方向へ移
動することが阻止されることを特徴とする。SUMMARY OF THE INVENTION A gate valve according to the present invention comprises a valve plate, a valve retainer for pressing the valve plate against a valve seat, and a position at which the valve plate and the valve retainer are closed and opened. The displacement means for displacing the valve seat and the movement prevention means formed on the wall forming the valve seat to prevent the valve retainer from moving in the direction away from the valve seat at the position where the valve opening is closed. formed is, the movement preventing means, the valve
An inverted U-shaped bent portion formed at one end of the retainer,
Form the valve seat to receive the tip of this bent portion
It is composed of a recess provided in the wall, and
When the mouth is closed, the bent portion is the concave portion.
And the valve restraint moves away from the valve seat.
Characterized Rukoto is prevented to be dynamic.
【０００９】[0009]
【００１０】また、本発明のゲートバルブにおいては、
上記弁抑えの他方の端部を受容する折り曲げ受け部は上
記壁に形成し、上記弁抑えが上記弁開口を閉じる位置に
あるとき上記折り曲げ受け部によって上記弁抑えの他方
の端部が上記弁座から離れる方向へ移動することが阻止
されるようにしたことを特徴とする。Further, in the gate valve of the present invention,
A fold receiving portion for receiving the other end of the valve restraint is formed on the wall, and when the valve restraint is in a position to close the valve opening, the fold receiving portion causes the other end of the valve restraint to be the valve. It is characterized in that it is prevented from moving away from the seat.
【００１１】[0011]
【発明の実施の形態】以下図面によって本発明の実施例
を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to the drawings.
【００１２】本発明においては、図１に示すように、弁
座７を形成した壁４ａ部分を上記空間６内において水平
方向に突出せしめ、弁抑え１０の上端部に弁座７側に向
って水平に延び弁座７の面を越えた後直角に下方に折れ
曲がる断面逆Ｕ字状の上方受け部１５を形成し、上記下
方に折れ曲がる下方先端部１６を受容する凹溝１７を弁
座７を形成した上記壁４ａ部分の上面の対応する部分に
形成する。In the present invention, as shown in FIG. 1, the portion of the wall 4a on which the valve seat 7 is formed is projected horizontally in the space 6, and the upper end of the valve retainer 10 is directed toward the valve seat 7 side. An upper receiving portion 15 having an inverted U-shaped cross section, which extends horizontally and bends downward at a right angle after crossing the surface of the valve seat 7, is provided with a groove 17 for receiving the lower tip portion 16 bent downward. It is formed on a corresponding portion of the upper surface of the formed wall 4a.
【００１３】なお、上記下方先端部１６の弁座７側の面
を下方に向って先細りとなる斜面とし、これに対応する
上記凹溝１７の対向面を上記斜面に対応する斜面とする
のが好ましい。It should be noted that the surface of the lower tip portion 16 on the valve seat 7 side is an inclined surface that tapers downward, and the facing surface of the recessed groove 17 corresponding thereto is an inclined surface corresponding to the inclined surface. preferable.
【００１４】また、上記弁座７を有する側の壁４ａの下
部に連結する部分に上方に突出する下方受け部１８を形
成し、この下方受け部１８によって上記弁抑え１０の下
端部１９の上記弁座７と反対側の面を受けるようにす
る。Further, a lower receiving portion 18 protruding upward is formed at a portion connected to a lower portion of the wall 4a on the side having the valve seat 7, and the lower receiving portion 18 causes the lower end portion 19 of the valve retainer 10 to have the above-mentioned structure. It receives the surface opposite to the valve seat 7.
【００１５】なお、上記弁抑え１０の下端部１９の上記
弁座７と反対側の面を下方に向って先細りとなる斜面と
し、これに対応する上記下方受け部１８の対向面を上記
斜面に対応する斜面とするのが好ましい。The surface of the lower end portion 19 of the valve retainer 10 opposite to the valve seat 7 is an inclined surface which tapers downward, and the corresponding surface of the lower receiving portion 18 corresponding to this is the inclined surface. Corresponding slopes are preferred.
【００１６】本発明のゲートバルブは上記のような構成
であるから、チャンバー１と２間の差圧により弁板８を
介して弁抑え１０にこれを壁４ｂ側に押圧する大きな力
が加わった場合、弁抑え１０が上記壁４ｂの上部の凹溝
１７及び壁４ａの下部の下方受け部１８によって保持さ
れているため上記壁４ｂの弁ロッド１１の側の開口部分
に連なる部分が撓むおそれがなく、従ってまた、この部
分を補強する必要が無くなる。Since the gate valve of the present invention has the above-mentioned structure, a large pressure is applied to the valve retainer 10 via the valve plate 8 by the pressure difference between the chambers 1 and 2 to press it against the wall 4b. In this case, since the valve retainer 10 is held by the groove 17 in the upper portion of the wall 4b and the lower receiving portion 18 in the lower portion of the wall 4a, the portion of the wall 4b connected to the opening portion on the valve rod 11 side may be bent. There is also no need to reinforce this part.
【００１７】図２及び図３は、上記傾斜浅溝１２とボー
ル１３を用いる代りに弁板８と弁抑え１０間をリンク２
０で接続した本発明の他の実施例を示し、その作用効果
は上記図１に示す実施例と同様である。2 and 3, instead of using the inclined shallow groove 12 and the ball 13, the link 2 between the valve plate 8 and the valve retainer 10 is used.
Another embodiment of the present invention connected by 0 is shown, and its function and effect are similar to those of the embodiment shown in FIG.
【００１８】図４は、上記傾斜浅溝１２、ボール１３や
リンク２０を用いることなくピストン２１及びシリンダ
ー２２を用いた本発明の更に他の実施例を示し、その作
用効果は上記図１に示す実施例と同様である。FIG. 4 shows still another embodiment of the present invention in which the piston 21 and the cylinder 22 are used without using the inclined shallow groove 12, the ball 13 and the link 20, and the function and effect are shown in FIG. It is similar to the embodiment.
【００１９】なお、図４において、２３は油圧ポート、
２４はベローズ、２５は復帰スプリングである。In FIG. 4, 23 is a hydraulic port,
Reference numeral 24 is a bellows, and 25 is a return spring.
【００２０】[0020]
【発明の効果】本発明のゲートバルブは、上記のような
構成であるから、シール性能を低下せしめることなくチ
ャンバー仕切壁を薄くでき、その製造コストを低下でき
る大きな利益がある。Since the gate valve of the present invention is constructed as described above, there is a great advantage that the chamber partition wall can be thinned without lowering the sealing performance and the manufacturing cost thereof can be reduced.
【図１】本発明のゲートバルブの斜視図である。FIG. 1 is a perspective view of a gate valve of the present invention.
【図２】本発明のゲートバルブの他の実施例を示す縦断
正面図である。FIG. 2 is a vertical cross-sectional front view showing another embodiment of the gate valve of the present invention.
【図３】図２に示すゲートバルブのバルブ開状態を示す
縦断正面図である。FIG. 3 is a vertical cross-sectional front view showing a valve open state of the gate valve shown in FIG.
【図４】本発明のゲートバルブの更に他の実施例を示す
縦断面図である。FIG. 4 is a vertical sectional view showing still another embodiment of the gate valve of the present invention.
【図５】従来のゲートバルブの縦断正面図である。FIG. 5 is a vertical sectional front view of a conventional gate valve.
１ プロセスチャンバー ２ プロセスチャンバー ３ 製造装置外匣 ４ａ 壁 ４ｂ 壁 ５ 開口 ６ 空間 ７ 弁座 ８ 弁板 ９ Ｏリング １０ 弁抑え １１ 弁ロッド １２ 傾斜浅溝 １３ ボール １４ ストッパー １５ 上方受け部 １６ 下方先端部 １７ 凹溝 １８ 下方受け部 １９ 下端部 ２０ リンク ２１ ピストン ２２ シリンダー ２３ 油圧ポート ２４ ベローズ ２５ 復帰スプリング 1 process chamber 2 process chamber 3 Manufacturing equipment box 4a wall 4b wall 5 openings 6 space 7 seat 8 valve plate 9 O-ring 10 valves 11 valve rod 12 inclined shallow groove 13 balls 14 Stopper 15 Upper receiving part 16 Lower tip 17 groove 18 Lower receiving part 19 Lower end 20 links 21 pistons 22 cylinders 23 Hydraulic port 24 Bellows 25 Return spring
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) F16K 3/00 - 3/36 F16K 51/02 F16K 27/04 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) F16K 3/00-3/36 F16K 51/02 F16K 27/04
Claims (2)
の弁抑えと、上記弁板と弁抑えを弁開口を閉じる位置と
開く位置に変位せしめるための変位手段と、上記弁開口
を閉じる位置で上記弁抑えが上記弁座から離間する方向
へ移動することを阻止するため上記弁座を形成した壁に
形成した移動阻止手段とより成り、上記移動阻止手段
が、上記弁抑えの一方の端部に形成した逆Ｕ字状折り曲
げ部分と、この折り曲げ部分の先端を受容するため上記
弁座を形成した壁に設けた凹部とより成り、上記弁抑え
が上記弁開口を閉じる位置にあるとき上記折り曲げ部分
が上記凹部に受容され、上記弁抑えが上記弁座から離れ
る方向へ移動することが阻止されることを特徴とするゲ
ートバルブ。1. A valve plate, a valve retainer for pressing the valve plate against a valve seat, a displacing means for displacing the valve plate and the valve retainer to a position for opening and closing a valve opening, and the valve. the valve restraining at closing the opening position Ri more a movement preventing means formed on the wall forming the valve seat to prevent the movement in a direction away from said valve seat, said movement preventing means
Is an inverted U-shaped bend formed at one end of the valve restraint
The barbed part and the tip of this bent part
It consists of a recess in the wall that forms the valve seat,
Is in a position to close the valve opening
Is received in the recess and the valve restraint moves away from the valve seat.
Gate valve according to claim Rukoto it is prevented to move to that direction.
曲げ受け部を上記壁に形成し、上記弁抑えが上記弁開口
を閉じる位置にあるとき上記折り曲げ受け部によって上
記弁抑えの他方の端部が上記弁座から離れる方向へ移動
することが阻止されるようにしたことを特徴とする請求
項１記載のゲートバルブ。2. A fold receiving portion for receiving the other end of the valve retainer is formed in the wall, and the fold receiving portion allows the other end of the valve retainer to be formed when the valve retainer is in a position to close the valve opening. the gate valve of claim 1, wherein the end portion is characterized in that as it is prevented from moving in a direction away from said valve seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000077438A JP3388439B2 (en) | 2000-03-21 | 2000-03-21 | Gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000077438A JP3388439B2 (en) | 2000-03-21 | 2000-03-21 | Gate valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001263505A JP2001263505A (en) | 2001-09-26 |
| JP3388439B2 true JP3388439B2 (en) | 2003-03-24 |
Family
ID=18595006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000077438A Expired - Fee Related JP3388439B2 (en) | 2000-03-21 | 2000-03-21 | Gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3388439B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140143064A (en) | 2013-06-05 | 2014-12-15 | 이리에 고켕 가부시키가이샤 | Gate valve and chamber |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3887221B2 (en) * | 2001-12-06 | 2007-02-28 | 石川島プラントエンジニアリング株式会社 | Hot gas slide valve |
| KR100914087B1 (en) * | 2003-05-13 | 2009-08-27 | 어플라이드 머티어리얼스, 인코포레이티드 | Methods and apparatus for sealing an opening of a processing chamber |
| WO2007013227A1 (en) * | 2005-07-29 | 2007-02-01 | Kitz Sct Corporation | Slide valve |
| KR100745668B1 (en) * | 2005-09-01 | 2007-08-02 | 최쌍석 | Step closing gate valve |
| KR101323311B1 (en) * | 2005-12-20 | 2013-10-30 | 배트 홀딩 아게 | A valve for essentially gastight closing of a flow path |
| DE102008027944B3 (en) * | 2008-06-12 | 2009-07-30 | Vat Holding Ag | spool valve |
| CN114135697B (en) * | 2021-12-03 | 2024-03-26 | 浙江新博阀门有限公司 | Multi-pass knife gate valve |
-
2000
- 2000-03-21 JP JP2000077438A patent/JP3388439B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140143064A (en) | 2013-06-05 | 2014-12-15 | 이리에 고켕 가부시키가이샤 | Gate valve and chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001263505A (en) | 2001-09-26 |
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