JP3345612B2 - Fluid controller - Google Patents
Fluid controllerInfo
- Publication number
- JP3345612B2 JP3345612B2 JP22818993A JP22818993A JP3345612B2 JP 3345612 B2 JP3345612 B2 JP 3345612B2 JP 22818993 A JP22818993 A JP 22818993A JP 22818993 A JP22818993 A JP 22818993A JP 3345612 B2 JP3345612 B2 JP 3345612B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- resin film
- locking piece
- fluid controller
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Valve Housings (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は流体制御器に係り、そ
の目的は樹脂膜及びダイアフラムをこの樹脂膜にクラッ
クが生じることなく駆動部へ取り付けることができる流
体制御器の提供にある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid controller, and an object of the present invention is to provide a fluid controller capable of attaching a resin film and a diaphragm to a drive unit without cracks in the resin film.
【０００２】[0002]
【従来の技術】従来の流体制御器は図４乃至図５に示す
ように流路（Ａ）（Ａ）を有する弁箱（Ｂ）と、この弁
箱（Ｂ）の流路（Ａ）（Ａ）と当接して設けられたポリ
テトラフルオロエチレン等からなる樹脂膜（Ｃ）と、こ
の樹脂膜（Ｃ）の上部に密着して設けられたダイアフラ
ム（Ｄ）と、このダイアフラム（Ｄ）を駆動部（Ｅ）の
ステム（Ｈ）を介して上下動させる操作機構（Ｆ）とか
ら構成されている。この樹脂膜（Ｃ）及びダイアフラム
（Ｄ）を駆動部（Ｅ）に取り付けるには、前記樹脂膜
（Ｃ）の略中央部にダイアフラム（Ｄ）を挿通して吊り
金具（Ｆ）を埋設状に固設し、この吊り金具（Ｉ）の上
部にピン（Ｇ）を打ち込み、このピン（Ｇ）を駆動部
（Ｅ）に係合させて取り付けていた。2. Description of the Related Art As shown in FIGS. 4 and 5, a conventional fluid controller includes a valve box (B) having flow paths (A) and (A), and a flow path (A) ( A) a resin film (C) made of polytetrafluoroethylene or the like provided in contact with A), a diaphragm (D) provided in close contact with the upper part of the resin film (C), and a diaphragm (D). through a stem (H) of the drive unit (E) is constructed from an operating mechanism for vertically moving (F). In order to attach the resin film (C) and the diaphragm (D) to the drive section (E), the diaphragm (D) is inserted into a substantially central portion of the resin film (C) so that the hanging fitting (F) is embedded. It was fixed, and a pin (G) was driven into the upper part of the hanging bracket (I), and the pin (G) was engaged with the driving unit (E) and attached.
【０００３】[0003]
【発明が解決しようとする課題】ところが、ピンを吊り
金具に打ち込み、このピンを駆動部に係合させて取り付
けているために、このピンを打ち込んだ際の衝撃でポリ
テトラフルオロエチレン等からなる樹脂膜との固設部分
にクラックが生じてしまう可能性があった。ピンによっ
てこの駆動部に取り付けているので、ダイアフラムで流
路を開閉した時にはピンに集中した荷重がかかることと
なり、この集中荷重によってピンが折れてしまう可能性
があった。また、吊り金具にピンを打ち込んでいるの
で、ピンの打ち込み具合が安定せず、寸法のばらつきが
あった。However, since the pin is driven into the hanging bracket and the pin is engaged with the driving portion and attached, the pin is driven and made of polytetrafluoroethylene or the like by an impact when the pin is driven. There is a possibility that cracks may occur in the portion fixed to the resin film. Since the pin is attached to the drive unit, when the flow path is opened and closed by the diaphragm, a concentrated load is applied to the pin, and the pin may be broken by the concentrated load. In addition, since the pins are driven into the hanging fittings, the driving conditions of the pins are not stable, and the dimensions vary.
【０００４】そこでこの発明者は上記実情に鑑み、樹脂
膜及びダイアフラムをこの樹脂膜にクラックが生じるこ
となく駆動部へ取り付けることができ、係止片に荷重が
かかった場合であっても折れずらく、且つこの係止片の
寸法のばらつきを低減することのできる流体制御器につ
いて鋭意研究を続けた。[0004] In view of the above circumstances, the present inventor can attach the resin film and the diaphragm to the drive unit without causing cracks in the resin film, and do not break even when a load is applied to the locking piece. Easy research has been continued on a fluid controller capable of reducing the variation in the size of the locking piece.
【０００５】[0005]
【作用】吊り金具の上部にで厚みが吊り金具の直径より
小さく長さが吊り金具の直径より大きくされた略台形状
の係止片を設け、この吊り金具の下部を樹脂膜の略中央
部にダイアフラムを挿通させて埋設状に固設するととも
に、この吊り金具の上部に設けられた係止片を駆動部に
係合して樹脂膜及びダイアフラムを駆動部に取り付け
る。従って、従来のようにピンを打ち込むことがなく、
ピンの打ち込みによる衝撃で樹脂膜との固設部分にクラ
ックが生じることがなく、またダイアフラムで流路を開
閉した時に生じる集中した荷重を従来より面積が大きい
係止片で受けるので、この係止片が折れずらい。また、
係止片の寸法のばらつきも低減することができる。[Function] A substantially trapezoidal locking piece having a thickness smaller than the diameter of the hanging metal and having a length larger than the diameter of the hanging metal is provided on the upper part of the hanging metal, and the lower part of the hanging metal is substantially in the center of the resin film. Then, the diaphragm is inserted and fixed in a buried state, and the locking piece provided at the upper part of the hanging metal fitting is engaged with the drive unit to attach the resin film and the diaphragm to the drive unit. Therefore, without hitting the pin as in the past,
There is no crack in the fixed part with the resin film due to the impact due to the driving of the pin, and the concentrated load generated when opening and closing the flow path with the diaphragm is received by the locking piece with a larger area than before, so this locking The piece is hard to break. Also,
Variations in the dimensions of the locking pieces can also be reduced.
【０００６】[0006]
【課題を解決するための手段】即ちこの発明は、流路を
有する弁箱とこの弁箱の流路と当接して設けられた樹脂
膜とこの樹脂膜の上部に密着して設けられたダイアフラ
ムとこのダイアフラムを駆動部を介して上下動させる操
作機構とからなり、樹脂膜の略中央部にはダイアフラム
を挿通する吊り金具が埋設状に固設され、この吊り金具
の上部には下辺が上辺よりも長い正面視略台形状で上面
視における厚みが吊り金具の直径より小さく且つ前記下
辺部の長さが吊り金具の直径より大きくされた係止片が
設けられこの係止片をコンプレッサに挿通させて駆動部
に係合して樹脂膜及びダイアフラムを駆動部に取り付け
てなることを特徴とする流体制御器を提供することによ
り前記従来の欠点を悉く解消した。That is, the present invention provides a valve box having a flow path, a resin film provided in contact with the flow path of the valve box, and a diaphragm provided in close contact with the upper portion of the resin film. And an operating mechanism for moving the diaphragm up and down via a drive unit, and a suspension fitting for inserting the diaphragm is fixed in a substantially buried state at a substantially central portion of the resin film, and a lower side has an upper side at an upper part of the suspension fitting. top long front view substantially trapezoidal shape than
The thickness in visual view is smaller than the diameter of the hanging bracket and
A locking piece whose side length is larger than the diameter of the hanging bracket is provided, and this locking piece is inserted into the compressor to engage with the drive unit to attach the resin film and the diaphragm to the drive unit. By providing a fluid controller as a feature, all of the above-mentioned conventional disadvantages have been solved.
【０００７】[0007]
【実施例】以下、この発明の実施例を図面に基づいて説
明する。図１はこの発明の一実施例に係る流体制御器を
示す断面図、図２は図１示のダイアフラム及び樹脂膜部
分の拡大説明図、図３は図２示の樹脂膜部に埋設状に固
設された吊り金具を示す斜視図である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view showing a fluid controller according to an embodiment of the present invention, FIG. 2 is an enlarged explanatory view of a diaphragm and a resin film part shown in FIG. 1, and FIG. 3 is embedded in a resin film part shown in FIG. It is a perspective view which shows the hanging fixture fixed.
【０００８】（１）は流体制御器であって、この流体制
御器（１）は図１に示すように、弁箱（２）と、樹脂膜
（３）と、ダイアフラム（４）と、操作機構（５）とか
らなる。弁箱（２）には流体が流れる流路（６）（６）
と、この流路を堰き止めるシール座（７）が設けられて
いる。樹脂膜（３）は弁箱（２）の流路（６）（６）と
当接して設けられており、この樹脂膜（３）の略中央部
には図２に示すように、吊り金具（８）の下部に設けら
れた固定部（９）が埋設されて該吊り金具（８）が固設
されている。この樹脂膜（３）は耐熱、耐寒性や屈曲
性、腐食性などに優れたポリテトラフルオロエチレン等
の合成樹脂からなる。また、本発明の一実施例に係る流
体制御器（１）では、樹脂膜（３）は該樹脂膜（３）の
周端部を挟持部材（１１）で挟持して固定する構成とな
っているが、特にこれに限定されず、図示する以外に、
直接樹脂膜（３）に接着等の手段によって設ける構成を
採用することもできる。[0008] (1) is a fluid controller. As shown in FIG. 1, the fluid controller (1) includes a valve box (2), a resin film (3), a diaphragm (4), and an operating member. Mechanism (5). Flow paths (6) (6) through which fluid flows in the valve box (2)
And a seal seat (7) for blocking the flow path. The resin film (3) is provided in contact with the flow paths (6) and (6) of the valve box (2), and a suspension fitting is provided at a substantially central portion of the resin film (3) as shown in FIG. The fixing part (9) provided at the lower part of (8) is embedded, and the hanging bracket (8) is fixedly provided. This resin film (3) is made of a synthetic resin such as polytetrafluoroethylene which is excellent in heat resistance, cold resistance, flexibility, corrosiveness and the like. Further, in the fluid controller (1) according to one embodiment of the present invention, the resin film (3) has a configuration in which the peripheral end of the resin film (3) is sandwiched and fixed by the sandwiching member (11). However, the present invention is not particularly limited to this, and other than the illustration,
It is also possible to adopt a configuration provided directly on the resin film (3) by means such as adhesion.
【０００９】この吊り金具（８）の上部には図３に示す
ように、略台形状の係止片（２０）が設けられており、
この係止片（２０）は後述するダイアフラム（４）の開
口部（１６）を挿通して操作機構（５）の駆動部（１
７）に係合して取り付けられている。この係止片（２
０）は図３示の如くその厚み（ｄ）は吊り金具（８）の
直径（Ｒ）より小さく、その長さ（ｌ）は前記直径
（Ｒ）より大きくされている。その理由は、ダイアフラ
ム（４）中を係止片（２０）が挿通する際にダイアフラ
ム（４）に亀裂が生じることなく且つ挿通後、係止片
（２０）と駆動部（１７）とが確実に係合できるように
している。樹脂膜（３）の略中央部に埋設される吊り金
具（８）としては、使用する流体の物性や科学的性質、
温度、圧力、使用目的などに応じて適宜任意の素材のも
のを選択して使用すればよいが、１３Ｃｒ鋼（ＳＵＳ４
０３，ＳＵＳ４１０，ＳＵＳ４２１）や１８Ｃｒ−８Ｎ
ｉ鋼（ＳＵＳ３０４，ＳＵＳ３０４Ｌ）に代表されるス
テンレス鋼やニッケル系合金が、機械的強度に優れ、且
つ耐食性や耐酸性、耐熱性などに優れているために好ま
しく用いられるが特に限定されるものではない。すなわ
ち、例えば低温での制御が必要とされる流体を用いる場
合には、低温脆性のない、オーステナイト系ステンレス
鋼、アルミニウム合金、ニッケル合金、銅合金などが好
適に使用でき、高圧での制御が要求される場合には、耐
圧性に優れた吊り金具（８）を用いればよく、特に限定
されるものではない。As shown in FIG. 3, a substantially trapezoidal locking piece (20) is provided on the upper part of the hanging metal fitting (8).
The locking piece (20) is inserted through an opening (16) of a diaphragm (4), which will be described later, to drive the driving mechanism (1) of the operating mechanism (5).
7). This locking piece (2
3), the thickness (d) is smaller than the diameter (R) of the hanging member (8) and the length (l) is larger than the diameter (R) as shown in FIG. The reason is that, when the locking piece (20) is inserted through the diaphragm (4), no crack is generated in the diaphragm (4), and after the insertion, the locking piece (20) and the drive unit (17) are surely connected. To be engaged. Substantially as the hanger (8) is embedded in the central portion, the physical properties and scientific nature of the fluid to be used in the resin film (3),
Any material may be appropriately selected and used depending on the temperature, pressure, purpose of use, etc., but 13Cr steel (SUS4
03, SUS410, SUS421) and 18Cr-8N
Stainless steels and nickel alloys typified by i-steel (SUS304, SUS304L) are preferably used because of their excellent mechanical strength and excellent corrosion resistance, acid resistance, heat resistance, etc., but are not particularly limited. Absent. That is, for example, when a fluid requiring control at low temperature is used, austenitic stainless steel, an aluminum alloy, a nickel alloy, a copper alloy, etc. having no low-temperature brittleness can be suitably used, and control at high pressure is required. In this case, a hanging metal fitting (8) having excellent pressure resistance may be used, and is not particularly limited.
【００１０】ダイアフラム（４）は樹脂膜（３）の上部
に密着して設けられており、このダイアフラム（４）の
素材としては特に限定されず、耐熱、耐寒性や屈曲性、
腐食性などに優れた従来より公知の天然ゴム、ニトリル
ゴム、スチレンゴム、ブタジエン・イソブチレン合成ゴ
ム、ポリクロロプレンゴム、ブチルゴム、フッ素ゴム、
シリコンゴム、ポリウレタンゴムなどのゴム製又はポリ
四弗化エチレン（ＰＴＦＥ）等の合成樹脂製のものが好
適に使用される。このダイアフラム（４）内には該ダイ
アフラム（４）を補強するための繊材（１０）が埋設さ
れている。また、このダイアフラム（４）も前記樹脂膜
（３）と同様に、ダイアフラム（４）の周端部を挟持部
材（１１）で挟持して固定する構成となっているが、特
にこれに限定されず、図示する以外に、直接ダイアフラ
ム（４）に接着等の手段によって設ける構成を採用する
こともできる。本発明の一実施例に係る流体制御器
（１）においては、操作機構（５）はステム（１２）
と、スプリング（１３）と、アクチュエーターキャップ
（１４）と、コンプレッサ（１５）とから構成されてい
る。The diaphragm (4) is provided in close contact with the upper portion of the resin film (3). The material of the diaphragm (4) is not particularly limited, and heat resistance, cold resistance, flexibility,
Conventionally known natural rubber excellent in corrosiveness, nitrile rubber, styrene rubber, butadiene / isobutylene synthetic rubber, polychloroprene rubber, butyl rubber, fluorine rubber,
Those made of rubber such as silicone rubber or polyurethane rubber or made of synthetic resin such as polytetrafluoroethylene (PTFE) are preferably used. A fiber material (10) for reinforcing the diaphragm (4) is embedded in the diaphragm (4). Also, the diaphragm (4) has a configuration in which, similarly to the resin film (3), the peripheral end of the diaphragm (4) is clamped and fixed by the clamping member (11), but is not particularly limited to this. Instead of being illustrated, a configuration in which the diaphragm (4) is directly provided on the diaphragm (4) by means such as adhesion may be adopted. In the fluid controller (1) according to the embodiment of the present invention, the operating mechanism (5) includes the stem (12).
, A spring (13), an actuator cap (14), and a compressor (15).
【００１１】このように構成されてなる流体制御器
（１）の使用状態を説明する。流路（６）（６）を閉鎖
する場合には、スプリング（１３）によって、ステム
（１２）の下部に固定されているコンプレッサ（１５）
を下降させる。するとダイアフラム（４）は、このダイ
アフラム（４）の周縁部を挟持部材（１１）によって締
め付け挟持されつつ弁箱（２）のシール座（７）へ圧接
されて流路（６）（６）が閉鎖される。また、インレッ
トポート（１８）よりエア通路（１９）を介してエアを
導入すると、ステム（１２）の下部に固定されているコ
ンプレッサ（１５）が上昇し、ダイアフラム（４）がシ
ール座（７）より離間されて流路（６）（６）が開放さ
れる。尚、図示する実施例では、流体制御器（１）によ
り流路（６）（６）が閉鎖された状態を示している。ま
た、流路（６）（６）の開閉を手動開閉式のダイアフラ
ムバルブで行ってもよい。The use state of the fluid controller (1) thus configured will be described. When closing the flow paths (6) and (6), the compressor (15) fixed to the lower part of the stem (12) by the spring (13)
Is lowered. Then, the diaphragm (4) is pressed against the seal seat (7) of the valve box (2) while the peripheral edge of the diaphragm (4) is clamped and clamped by the clamping member (11), and the flow paths (6) and (6) are formed. Will be closed. Further, when air is introduced from the inlet port (18) through the air passage (19), the compressor (15) fixed to the lower portion of the stem (12) rises, and the diaphragm (4) moves the seal seat (7). The channels (6) and (6) are opened further apart. In the illustrated embodiment, the flow path (6) (6) is closed by the fluid controller (1). The passages (6) and (6) may be opened and closed by a manually opened / closed diaphragm valve.
【００１２】尚、本実施例ではダイアフラム（４）を伸
縮させる操作機構を上述したように構成しているが、本
発明はこの操作機構に限られるものではなく、他の操作
機構であってもよい。In this embodiment, the operating mechanism for expanding and contracting the diaphragm (4) is configured as described above. However, the present invention is not limited to this operating mechanism, and other operating mechanisms may be used. Good.
【００１３】このように、吊り金具（８）の上部に略台
形状で厚み（ｄ）が吊り金具（８）の直径（Ｒ）より小
さく長さ（ｌ）が吊り金具（８）の直径（Ｒ）より大き
くされた係止片（２０）を設け、この吊り金具（８）の
下部を樹脂膜（３）の略中央部にダイアフラム（４）を
挿通させて埋設状に固設するとともに、この吊り金具
（８）の上部に設けられた係止片（２０）を駆動部（１
７）に係合して樹脂膜（３）及びダイアフラム（４）を
駆動部（１７）に取り付けるようにしたので、従来のよ
うにピンを打ち込むことがなく、ピンの打ち込みによる
衝撃で樹脂膜（３）との固設部分にクラックが生じるこ
とがなく、またダイアフラム（４）で流路を開閉した時
に生じる集中した荷重を従来より面積が大きい係止片
（２０）で受けるので、この係止片（２０）が折れずら
い。また、係止片（２０）の寸法のばらつきも低減する
ことができる。As described above, a substantially trapezoidal shape having a thickness (d) smaller than the diameter (R) of the hanging metal fitting (8) and a length (l) corresponding to the diameter of the hanging metal fitting (8) is provided above the hanging metal fitting (8). R) is provided with a locking piece (20) which is larger than R), and a lower portion of the hanging metal fitting (8) is fixed in a buried state by inserting a diaphragm (4) through a substantially central portion of the resin film (3). The locking piece (20) provided on the upper part of the hanging metal fitting (8) is connected to the driving unit (1).
7), the resin film (3) and the diaphragm (4) are attached to the driving portion (17). Therefore, unlike the conventional case, the pins are not driven, and the resin film (3) is impacted by the driving of the pins. No crack is generated in the fixed portion with 3), and a concentrated load generated when the flow path is opened and closed by the diaphragm (4) is received by the locking piece (20) having a larger area than the conventional one. Piece (20) is hard to break. In addition, variations in the dimensions of the locking pieces (20) can be reduced.
【００１４】[0014]
【発明の効果】この発明は以上詳述した如く、流路を有
する弁箱とこの弁箱の流路と当接して設けられた樹脂膜
とこの樹脂膜の上部に密着して設けられたダイアフラム
とこのダイアフラムを駆動部を介して上下動させる操作
機構とからなり、樹脂膜の略中央部にはダイアフラムを
挿通する吊り金具が埋設状に固設され、この吊り金具の
上部には下辺が上辺よりも長い正面視略台形状で上面視
における厚みが吊り金具の直径より小さく且つ前記下辺
部の長さが吊り金具の直径より大きくされた係止片が設
けられこの係止片をコンプレッサに挿通させて駆動部に
係合して樹脂膜及びダイアフラムを駆動部に取り付けて
なることを特徴とする流体制御器であるから、以下の効
果を奏する。As described in detail above, the present invention provides a valve box having a flow path, a resin film provided in contact with the flow path of the valve box, and a diaphragm provided in close contact with the upper portion of the resin film. And an operating mechanism for moving the diaphragm up and down via a drive unit, and a suspension fitting for inserting the diaphragm is fixed in a substantially buried state at a substantially central portion of the resin film, and a lower side has an upper side at an upper part of the suspension fitting. Longer front view, approximately trapezoidal shape, top view
Smaller and the lower side than the diameter of the hanging bracket thickness at
A locking piece whose length is larger than the diameter of the hanging bracket is provided, and the locking piece is inserted into the compressor, engaged with the drive unit, and the resin film and the diaphragm are attached to the drive unit. Therefore, the following effects can be obtained.
【００１５】すなわち、吊り金具の上部に略台形状で厚
みが吊り金具の直径より小さく長さが吊り金具の直径よ
り大きくされた係止片を設け、この吊り金具の下部を樹
脂膜の略中央部にダイアフラムを挿通させて埋設状に固
設するとともに、この吊り金具の上部に設けられた係止
片を駆動部に係合して樹脂膜及びダイアフラムを駆動部
に取り付けるようにしたので、従来のようにピンを打ち
込むことがなく、ピンの打ち込みによる衝撃で樹脂膜と
の固設部分にクラックが生じることがなく、またダイア
フラムで流路を開閉した時に生じる集中した荷重を従来
より面積が大きい係止片で受けるので、この係止片が折
れずらい。また、係止片の寸法のばらつきも低減するこ
とができる。That is, a locking piece having a substantially trapezoidal shape and a thickness smaller than the diameter of the hanging metal fitting and having a length larger than the diameter of the hanging metal fitting is provided on the upper part of the hanging metal fitting, and the lower part of the hanging metal fitting is formed substantially at the center of the resin film. Since the diaphragm is inserted into the part and fixed in a buried state, the locking piece provided at the upper part of this hanging bracket is engaged with the drive part, and the resin film and the diaphragm are attached to the drive part, so that the conventional No cracking occurs in the portion fixed to the resin film due to the impact of the pin driving, and the concentrated load generated when the flow path is opened and closed by the diaphragm has a larger area than before Since the locking piece is received, the locking piece is difficult to break. In addition, variations in the dimensions of the locking pieces can be reduced.
【図１】この発明の一実施例に係る流体制御器を示す断
面図である。FIG. 1 is a sectional view showing a fluid controller according to an embodiment of the present invention.
【図２】図１示のダイアフラム及び樹脂膜部分の拡大説
明図である。FIG. 2 is an enlarged explanatory view of a diaphragm and a resin film portion shown in FIG.
【図３】図２示の樹脂膜部に埋設状に固設された吊り金
具を示す斜視図である。FIG. 3 is a perspective view showing a hanging fixture fixedly embedded in the resin film portion shown in FIG. 2;
【図４】従来の流体制御器を示す断面図である。FIG. 4 is a sectional view showing a conventional fluid controller.
【図５】図４示のダイアフラム及び樹脂膜部分の拡大説
明図である。FIG. 5 is an enlarged explanatory view of a diaphragm and a resin film portion shown in FIG. 4;
１ 流体制御器 ２ 弁箱 ３ 樹脂膜 ４ ダイアフラム ５ 操作機構 ６ 流路 ８ 吊り金具 １７ 駆動部 ２０ 係止片 DESCRIPTION OF SYMBOLS 1 Fluid controller 2 Valve box 3 Resin film 4 Diaphragm 5 Operation mechanism 6 Flow path 8 Hanging bracket 17 Drive unit 20 Locking piece
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) F16K 7/12 - 7/17 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 7 , DB name) F16K 7/ 12-7/ 17
Claims (1)
接して設けられた樹脂膜とこの樹脂膜の上部に密着して
設けられたダイアフラムとこのダイアフラムを駆動部を
介して上下動させる操作機構とからなり、樹脂膜の略中
央部にはダイアフラムを挿通する吊り金具が埋設状に固
設され、この吊り金具の上部には下辺が上辺よりも長い
正面視略台形状で上面視における厚みが吊り金具の直径
より小さく且つ前記下辺部の長さが吊り金具の直径より
大きくされた係止片が設けられこの係止片をコンプレッ
サに挿通させて駆動部に係合して樹脂膜及びダイアフラ
ムを駆動部に取り付けてなることを特徴とする流体制御
器。1. A valve box having a flow path, a resin film provided in contact with the flow path of the valve box, a diaphragm provided in close contact with an upper portion of the resin film, and the diaphragm provided via a driving unit. It consists of an operating mechanism that moves up and down, and a suspension fitting through which the diaphragm is inserted is fixed in a buried state at the approximate center of the resin film, and the lower side is longer than the upper side at the top of this suspension fitting.
Locking piece which is larger than the diameter of the hanging metal fitting length of small and the lower portion than the diameter of the hanging bracket thickness is provided in the top view in a front view substantially trapezoidal compressor the locking piece
A fluid controller characterized in that a resin film and a diaphragm are attached to a driving unit by being inserted into the driving unit and engaged with the driving unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22818993A JP3345612B2 (en) | 1993-08-19 | 1993-08-19 | Fluid controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22818993A JP3345612B2 (en) | 1993-08-19 | 1993-08-19 | Fluid controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0755028A JPH0755028A (en) | 1995-03-03 |
| JP3345612B2 true JP3345612B2 (en) | 2002-11-18 |
Family
ID=16872608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22818993A Expired - Lifetime JP3345612B2 (en) | 1993-08-19 | 1993-08-19 | Fluid controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3345612B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7063304B2 (en) * | 2003-07-11 | 2006-06-20 | Entegris, Inc. | Extended stroke valve and diaphragm |
| DE102011080139A1 (en) | 2011-07-29 | 2013-01-31 | GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG | diaphragm valve |
-
1993
- 1993-08-19 JP JP22818993A patent/JP3345612B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0755028A (en) | 1995-03-03 |
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