JP3340603B2 - Sample holder for electron microscope - Google Patents
Sample holder for electron microscopeInfo
- Publication number
- JP3340603B2 JP3340603B2 JP25874395A JP25874395A JP3340603B2 JP 3340603 B2 JP3340603 B2 JP 3340603B2 JP 25874395 A JP25874395 A JP 25874395A JP 25874395 A JP25874395 A JP 25874395A JP 3340603 B2 JP3340603 B2 JP 3340603B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample holder
- cover member
- screw
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 1
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、透過型電子顕微鏡
において複数の試料を観察するための試料ホルダの技術
分野に属する。[0001] The present invention belongs to the technical field of a sample holder for observing a plurality of samples in a transmission electron microscope.
【０００２】[0002]
【従来の技術】現在、透過型電子顕微鏡においては、試
料ホルダに１個の試料を装填するタイプが標準である
が、２〜５個といった複数の試料を装填可能にし、真空
引きの作業を減少させ試料を効率的に観察する特殊な試
料ホルダも製作されている。2. Description of the Related Art At present, a transmission electron microscope is of a type in which one sample is loaded in a sample holder, but a plurality of samples such as 2 to 5 can be loaded, thereby reducing the evacuation work. A special sample holder for efficiently observing a sample has also been manufactured.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来の試料ホルダにおいては、特殊なネジにより試料を１
個づつ直接押さえていく方法がとられているので、試料
交換に時間を要し、また、ネジの締め方が弱ければ試料
が移動してしまう恐れがあり、ネジの締め方が強ければ
試料が破損してしまうという問題を有している。However, in the above-mentioned conventional sample holder, the sample is held by a special screw.
Since the method of pressing each piece directly is used, it takes time to change the sample, and the sample may move if the screw is weakly tightened, and the sample may be moved if the screw is tightly tightened. It has the problem of being damaged.
【０００４】本発明は、上記従来の問題を解決するもの
であって、試料交換時における時間を短縮すると共に試
料の破損を防止することができる電子顕微鏡用試料ホル
ダを提供することを目的とする。An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a sample holder for an electron microscope capable of shortening the time for exchanging a sample and preventing the sample from being damaged. .
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明の電子顕微鏡用試料ホルダは、試料移動軸の
先端に設けられ、複数の試料を載置する試料保持台と、
該試料保持台に回動自在に取り付けられたカバー部材
と、該カバー部材の下面に固定され、前記複数の試料を
押さえる板バネと、前記試料保持台及びカバー部材の先
端に形成された雌ネジ部と、該雌ネジ部に螺合する雄ネ
ジ部を根元部及び先端部に有するネジと、該ネジの先端
部の雄ネジ部と前記カバー部材の雌ネジ部の間に装着さ
れたスプリングとを備えたことを特徴とする。In order to achieve the above object, a sample holder for an electron microscope according to the present invention is provided at a tip of a sample moving shaft and has a sample holder for mounting a plurality of samples,
A cover member rotatably attached to the sample holder, a leaf spring fixed to a lower surface of the cover member and pressing the plurality of samples, and a female screw formed at a tip of the sample holder and the cover member Part, a screw having a male screw part at the root part and a tip part which is screwed to the female screw part, and a spring mounted between the male screw part at the tip part of the screw and the female screw part of the cover member. It is characterized by having.
【０００６】[0006]
【発明の実施の態様】以下、本発明の実施の態様を図面
を参照しつつ説明する。図１及び図２は、本発明の電子
顕微鏡用試料ホルダの１例を示し、図１（Ａ）は試料ホ
ルダの平面図、図１（Ｂ）は図１（Ａ）のＸ−Ｘ線に沿
って矢印方向に見た断面図、図２（Ａ）は図１の要部拡
大断面図、図２（Ｂ）は図１の板バネの平面図、図２
（Ｃ）は図２（Ｂ）のＹ−Ｙ線に沿って矢印方向に見た
断面図である。Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 show an example of a sample holder for an electron microscope according to the present invention. FIG. 1 (A) is a plan view of the sample holder, and FIG. 1 (B) is a cross-sectional view taken along line XX of FIG. 1 (A). 2 (A) is an enlarged sectional view of a main part of FIG. 1, FIG. 2 (B) is a plan view of the leaf spring of FIG. 1, and FIG.
FIG. 2C is a cross-sectional view taken along the line YY in FIG.
【０００７】図１において、試料ホルダ１は試料移動軸
２の先端に設けられ、電子顕微鏡本体内で軸方向に移動
可能にされ、試料移動軸２は図示しない球面軸受により
三次元的に移動可能に配設されている。In FIG. 1, a sample holder 1 is provided at the tip of a sample moving shaft 2 and is movable in an axial direction within the main body of the electron microscope. The sample moving shaft 2 is three-dimensionally movable by a spherical bearing (not shown). It is arranged in.
【０００８】試料ホルダ１は、試料移動軸２の先端に設
けられた試料保持台３と、試料保持台３にピン４を介し
て回動自在に取り付けられたカバー部材５と、カバー部
材５の下面にネジ６により固定されたバネ支持板７と、
バネ支持板７の下面に接着により固定された板バネ８
と、試料保持台３及びカバー部材５の先端を固定するた
めのネジ９と、ネジ９とカバー部材５の間に装着された
スプリング１３とから構成されている。The sample holder 1 includes a sample holder 3 provided at the tip of a sample moving shaft 2, a cover member 5 rotatably attached to the sample holder 3 via pins 4, and a cover member 5. A spring support plate 7 fixed to the lower surface by screws 6;
Leaf spring 8 fixed to the lower surface of spring support plate 7 by bonding
And a screw 9 for fixing the distal end of the sample holder 3 and the cover member 5, and a spring 13 mounted between the screw 9 and the cover member 5.
【０００９】試料保持台３には、例えば５つの試料観察
用穴１０が形成され、試料保持台３の上面で試料観察用
穴１０の周囲には試料載置用の溝１１がリング状に形成
され、この溝１１に試料が載置される。カバー部材５及
びバネ支持板７には略矩形状の開口１２が形成されてい
る。For example, five sample observation holes 10 are formed in the sample holding table 3, and a sample mounting groove 11 is formed in a ring shape around the sample observation hole 10 on the upper surface of the sample holding table 3. Then, the sample is placed in the groove 11. A substantially rectangular opening 12 is formed in the cover member 5 and the spring support plate 7.
【００１０】図２（Ａ）に示すように、ネジ９は、ネジ
頭部９ａ及び軸部９ｂを有し、軸部９ｂの先端部及び根
元部には軸部９ｂより大径の雄ネジ部９ｃ、９ｄが形成
されている。一方、試料保持台３及びカバー部材５の先
端には、それぞれネジ９の雄ネジ部９ｃ、９ｄが螺合す
る雌ネジ部３ａ、５ａが形成されている。そして、ネジ
９の雄ネジ部９ｃとカバー部材５の雌ネジ部５ａの間に
スプリング１３が装着されている。As shown in FIG. 2 (A), the screw 9 has a screw head 9a and a shaft 9b, and a male screw having a larger diameter than the shaft 9b is provided at the tip and the root of the shaft 9b. 9c and 9d are formed. On the other hand, female screw portions 3a and 5a into which male screw portions 9c and 9d of the screw 9 are screwed are formed at the distal ends of the sample holder 3 and the cover member 5, respectively. A spring 13 is mounted between the male screw portion 9c of the screw 9 and the female screw portion 5a of the cover member 5.
【００１１】図２（Ｂ）及び図２（Ｃ）に示すように、
板バネ８は、試料載置用の溝１１に沿って、半円二股形
状の押さえ片８ａを対向させたものが、試料の数だけ
（本例では５つ）形成されるように、矩形状のプレート
を打ち抜き、また、両側に固定用切欠８ｂを設け、さら
に、押さえ片８ａの先端を下方に折り曲げて弾性を付与
させるようにしている。As shown in FIGS. 2B and 2C,
The leaf spring 8 is formed in a rectangular shape so that a half-circle bifurcated holding piece 8a is formed along the sample mounting groove 11 so as to face the number of samples (five in this example). And a notch 8b for fixing is provided on both sides, and the tip of the holding piece 8a is bent downward to impart elasticity.
【００１２】上記構成からなる試料ホルダ１の試料の装
着方法について説明する。試料ホルダ１の試料載置用の
溝１１に複数の試料を載置した後、カバー部材５を回動
して試料保持台３に当接させ、ネジ９の雄ネジ部９ｃ、
９ｄをカバー部材５の雌ネジ部５ａ及び試料保持台３の
雌ネジ部３ａに螺合していくと、カバー部材５はスプリ
ング１３に抗して徐々に閉じると同時に、板バネ８の各
押さえ片８ａが徐々に試料を押さえていくので、試料の
破損を防止することができる。A method of mounting a sample on the sample holder 1 having the above configuration will be described. After mounting a plurality of samples in the sample mounting groove 11 of the sample holder 1, the cover member 5 is rotated and brought into contact with the sample holding table 3, and the male screw portion 9 c of the screw 9 is formed.
When the screw 9 d is screwed into the female screw 5 a of the cover member 5 and the female screw 3 a of the sample holder 3, the cover 5 gradually closes against the spring 13, and Since the piece 8a gradually holds down the sample, damage to the sample can be prevented.
【００１３】試料交換時には、ネジ９を緩めていきネジ
９の雄ネジ部９ｄがカバー部材５の雌ネジ部５ａから離
れると、カバー部材５にスプリング１３のバネ力が作用
し、カバー部材５は徐々に開いていく。このとき、板バ
ネ８の押さえ片８ａは、押さえ片８ａのバネ力がスプリ
ング１３のバネ力に抑えられ、徐々に試料から離れるた
め、試料の破損を防止することができる。ネジ９の雄ネ
ジ部９ｃが試料保持台３の雌ネジ部３ａから離れると、
カバー部材５と試料保持台３間の隙間にピンセットを差
し込むことによりカバー部材５を持ち上げて試料を交換
する。このとき、ネジ９はカバー部材５から外れること
はないので、ネジ９をなくす恐れがない。At the time of sample replacement, when the male screw 9d of the screw 9 is separated from the female screw 5a of the cover member 5 by loosening the screw 9, the spring force of the spring 13 acts on the cover member 5, and the cover member 5 Open gradually. At this time, the pressing force of the pressing piece 8a of the leaf spring 8 is suppressed by the spring force of the spring 13, and the pressing force gradually moves away from the sample, so that damage to the sample can be prevented. When the male screw portion 9c of the screw 9 separates from the female screw portion 3a of the sample holder 3,
By inserting tweezers into the gap between the cover member 5 and the sample holder 3, the cover member 5 is lifted to exchange the sample. At this time, since the screw 9 does not come off from the cover member 5, there is no possibility that the screw 9 is lost.
【００１４】本発明によれば、複数の試料を一度に全
部、板バネにより押さえるだけで装填できるので、試料
の破損を防止し且つ試料交換時間を短縮することができ
る。また、試料保持台とカバー部材の間に板バネを介在
させているため、試料交換時に板バネによる試料の破損
を防止することができる。According to the present invention, since a plurality of samples can be loaded only by pressing them all at once by a leaf spring, the damage of the samples can be prevented and the sample exchange time can be shortened. In addition, since the leaf spring is interposed between the sample holder and the cover member, it is possible to prevent the sample from being damaged by the leaf spring when exchanging the sample.
【図１】本発明の電子顕微鏡用試料ホルダの１例を示
し、図１（Ａ）は試料ホルダの平面図、図１（Ｂ）は図
１（Ａ）のＸ−Ｘ線に沿って矢印方向に見た断面図であ
る。1A and 1B show an example of a sample holder for an electron microscope of the present invention. FIG. 1A is a plan view of the sample holder, and FIG. 1B is an arrow along the line XX in FIG. It is sectional drawing seen in the direction.
【図２】図２（Ａ）は図１の要部拡大断面図、図２
（Ｂ）は図１の板バネの平面図、図２（Ｃ）は図２
（Ｂ）のＹ−Ｙ線に沿って矢印方向に見た断面図であ
る。FIG. 2A is an enlarged sectional view of a main part of FIG. 1, FIG.
FIG. 2B is a plan view of the leaf spring of FIG. 1, and FIG.
FIG. 5B is a cross-sectional view taken along the line YY of FIG.
１…試料ホルダ、２…試料移動軸、３…試料保持台、３
ａ…雌ネジ部 ５…カバー部材、５ａ…雌ネジ部、８…板バネ、８ａ…
押さえ片 ９…ネジ、９ｃ、９ｄ…雄ネジ部、１３…スプリングDESCRIPTION OF SYMBOLS 1 ... sample holder, 2 ... sample moving shaft, 3 ... sample holding stand, 3
a ... female screw part 5 ... cover member, 5a ... female screw part, 8 ... leaf spring, 8a ...
Holder 9: Screw, 9c, 9d: Male thread, 13: Spring
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 37/20 H01J 37/26 G01N 1/28 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) H01J 37/20 H01J 37/26 G01N 1/28
Claims (1)
を載置する試料保持台と、該試料保持台に回動自在に取
り付けられたカバー部材と、該カバー部材の下面に固定
され、前記複数の試料を押さえる板バネと、前記試料保
持台及びカバー部材の先端に形成された雌ネジ部と、該
雌ネジ部に螺合する雄ネジ部を根元部及び先端部に有す
るネジと、該ネジの先端部の雄ネジ部と前記カバー部材
の雌ネジ部の間に装着されたスプリングとを備えたこと
を特徴とする電子顕微鏡用試料ホルダ。1. A sample holder provided at a tip of a sample moving shaft for mounting a plurality of samples, a cover member rotatably attached to the sample holder, and fixed to a lower surface of the cover member. A leaf spring for holding the plurality of samples, a female screw portion formed at the tip of the sample holder and the cover member, and a screw having a male screw portion at a root portion and a tip portion to be screwed to the female screw portion. A sample holder for an electron microscope, comprising: a male screw part at the tip of the screw; and a spring mounted between the female screw part of the cover member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25874395A JP3340603B2 (en) | 1995-10-05 | 1995-10-05 | Sample holder for electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25874395A JP3340603B2 (en) | 1995-10-05 | 1995-10-05 | Sample holder for electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09102293A JPH09102293A (en) | 1997-04-15 |
| JP3340603B2 true JP3340603B2 (en) | 2002-11-05 |
Family
ID=17324473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25874395A Expired - Fee Related JP3340603B2 (en) | 1995-10-05 | 1995-10-05 | Sample holder for electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3340603B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT510799B1 (en) * | 2010-11-29 | 2012-12-15 | Leica Microsystems Schweiz Ag | MOUNTING FOR AN ELECTRONIC MICROSCOPIC SAMPLE CARRIER |
| AT510606B1 (en) * | 2011-02-09 | 2012-05-15 | Leica Mikrosysteme Gmbh | DEVICE AND METHOD FOR SAMPLE PREPARATION |
| TWI600890B (en) * | 2016-03-01 | 2017-10-01 | 閤康生物科技股份有限公司 | Sample holding fixture of transmission electron microscopy and operation method thereof |
| JP6965185B2 (en) * | 2018-03-05 | 2021-11-10 | 株式会社東芝 | Ion injection device and particle beam therapy device |
| JP6995093B2 (en) | 2019-09-05 | 2022-01-14 | 日本電子株式会社 | Sample plate holder |
-
1995
- 1995-10-05 JP JP25874395A patent/JP3340603B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09102293A (en) | 1997-04-15 |
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