JP3330973B2 - Joint of ceramic and metal - Google Patents
Joint of ceramic and metalInfo
- Publication number
- JP3330973B2 JP3330973B2 JP14179592A JP14179592A JP3330973B2 JP 3330973 B2 JP3330973 B2 JP 3330973B2 JP 14179592 A JP14179592 A JP 14179592A JP 14179592 A JP14179592 A JP 14179592A JP 3330973 B2 JP3330973 B2 JP 3330973B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramic
- joining
- joint
- metal member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、バルブリフター，ロッ
カーアーム，タペット，ターボチャージャーローター等
のエンジン部品，ガスタービン，バイト等の工具，電子
部品等に適用できるセラミックスと金属との接合体に関
し、詳しくはろう材を用いて接合されたセラミックスと
金属との接合体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joined body of ceramic and metal applicable to engine parts such as valve lifters, rocker arms, tappets, turbocharger rotors, tools such as gas turbines and cutting tools, and electronic parts. More specifically, the present invention relates to a joined body of ceramic and metal joined by using a brazing material.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】一般
に、セラミックスは、耐熱性，熱衝撃強度，高温時の機
械的強度，耐摩耗性，或は高絶縁性などの優れた特性を
有することから、近年種々の分野に利用されつつある。
ところがセラミックスは余り単独で用いられることはな
く、通常、機械部品などにおいては、例えば金属などと
共に用いられて、その機能を発揮する様にされている。2. Description of the Related Art Generally, ceramics have excellent properties such as heat resistance, thermal shock strength, mechanical strength at high temperatures, wear resistance, and high insulation properties. In recent years, it has been used in various fields.
However, ceramics are rarely used alone, and are usually used in mechanical parts and the like, for example, together with metal or the like to exhibit their functions.
【０００３】例えば、セラミックス部材と金属部材とを
接合して接合体とする場合には、金属部材側の突合せ接
合面（以下単に接合面と称する）を旋削やフライス等に
よって平坦に加工するとともに、セラミックス部材側の
接合面に蒸着等によってメタライズを施している。そし
て、それらの部材を銀ろう等を使用して直接に接合した
り、或はＴｉ等の活性金属を介して、ろう材を使用して
両部材を接合している（特開昭５９−５７９７３号公報
参照）。For example, when a ceramic member and a metal member are joined to form a joined body, a butt joint surface (hereinafter simply referred to as a joint surface) on the metal member side is flattened by turning or milling, and the like. Metallization is applied to the joint surface on the ceramic member side by vapor deposition or the like. These members are directly joined using silver brazing or the like, or both members are joined using a brazing material via an active metal such as Ti (JP-A-59-57973). Reference).
【０００４】また、一般にＳｉ3Ｎ4，ＳｉＣ，Ａｌ2Ｏ3
等のセラミックスは、線膨張率がスチール等の金属に比
べて小さいので、Ｃｕ，Ｎｉ等の軟質金属や、セラミッ
クスと金属との線膨張率の中間の膨張率を有する応力緩
和層を介して、ろう材を使用して接合されている。In general, Si 3 N 4 , SiC, Al 2 O 3
And the like, the coefficient of linear expansion is smaller than that of a metal such as steel. Therefore, through a soft metal such as Cu or Ni, or a stress relaxation layer having an expansion coefficient intermediate between the coefficient of linear expansion of the ceramic and the metal, Joined using brazing material.
【０００５】更に、それ以外にも、金属部材側の冷却時
のマルテンサイト変態を利用して、応力緩和層なしで直
接にセラミックスと金属とを接合する技術が提案されて
いる（特開平２−１９９０７３号公報参照）。しかしな
がら、上記の様に、ろう付けを行なってセラミックス部
材と金属部材とを接合した場合には、ある確率で接合不
良が生じるという問題があった。つまり、ろう付けされ
た接合体において、ろう材と金属部材との接合面に微少
な隙間が発生することがあり、特に接合径の大きな部材
に多く接合不良が発生するという傾向が見られたが、こ
の原因は不明であった。[0005] In addition, another technique has been proposed in which ceramics and metal are directly joined to each other without using a stress relaxation layer by utilizing martensitic transformation during cooling of the metal member side (Japanese Patent Laid-Open Publication No. Hei. 199073). However, when the ceramic member and the metal member are joined by brazing as described above, there is a problem that a joining failure occurs at a certain probability. That is, in the brazed joint, a minute gap may be generated in the joint surface between the brazing material and the metal member, and there is a tendency that a joining failure occurs particularly in a member having a large joint diameter. The cause was unknown.
【０００６】本発明は、前記課題を解決するためになさ
れ、セラミックスと金属とを接合した接合体の接合不良
を低減することができるセラミックスと金属との接合体
を提供することを目的とする。An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide a ceramic-metal bonded body capable of reducing a bonding failure of a bonded body obtained by bonding ceramic and metal.
【０００７】[0007]
【課題を解決するための手段】この目的を達成するため
の請求項１の発明は、セラミックス部材と金属部材と
を、それらの接合面にてろう材を介して接合する接合体
において、前記金属部材側の接合面の最大径又は最大対
角長さが２０mm以上であり、かつ前記金属部材側の接合
面の表面粗さが、中心線平均粗さＲａ：０．５μm以下
であることを特徴とするセラミックスと金属との接合体
を要旨とする。SUMMARY OF THE INVENTION The invention of claim 1 to achieve this object, the ceramic member and the metal member, the assembly of joined via a brazing material at their joint surfaces, the metal Maximum diameter or maximum pair of the joining surface on the member side
A joint body of ceramic and metal , wherein an angular length is 20 mm or more, and a surface roughness of a joining surface on the metal member side is a center line average roughness Ra: 0.5 μm or less. And
【０００８】請求項２の発明は、前記金属部材側の接合
面の最大径又は最大対角長さが２０mm以上であり、かつ
少なくとも該接合面の中心から半径１０mmより外側部分
の表面粗さが、中心線平均粗さＲａ：０．５μm以下で
あることを特徴とする前記請求項１記載のセラミックス
と金属との接合体を要旨とする。According to a second aspect of the present invention, the maximum diameter or the maximum diagonal length of the joining surface on the metal member side is at least 20 mm, and at least the surface roughness of a portion outside a radius of 10 mm from the center of the joining surface is reduced. The gist of the ceramic and metal joint according to claim 1, wherein the center line average roughness Ra is 0.5 μm or less.
【０００９】ここで、前記中心線平均粗さＲａとは、Ｊ
ＩＳで定められた部材の表面粗さを示す定義である。即
ち、中心線平均粗さＲａとは、粗さ曲線からその中心線
の方向に測定長さｌの部分を抜取り、この抜取り部分の
中心線をＸ軸，縦倍率の方向をＹ軸とし、粗さ曲線をｙ
＝ｆ（ｘ）で表したとき、下記（１）式によって求めら
れる値をマイクロメートル（μm）で表したものをい
う。Here, the center line average roughness Ra is J
This is a definition indicating the surface roughness of a member defined by IS. That is, the center line average roughness Ra is defined by extracting a portion having a measured length l from a roughness curve in the direction of the center line, setting the center line of the extracted portion as the X axis and the direction of the vertical magnification as the Y axis. Y curve
= F (x) means a value obtained by the following equation (1) expressed in micrometers (μm).
【００１０】[0010]
【数１】 (Equation 1)
【００１１】また、前記金属部材の素材としては、例え
ば合金鋼（ＪＩＳ：ＳＮＣＭ６３０，ＳＮＣＭ６１６）
等を用いることができ、セラミックス部材の素材として
は、Ｓｉ3Ｎ4，ＳｉＣ，Ａｌ2Ｏ3，ジルコニア，サイア
ロン等を用いることができる。また、ろう材としては、
例えばＴｉを含む銀ろう（Ａｇ−Ｃｕ−Ｉｎ−Ｔｉ系の
活性ろう材）等を使用することができる。The material of the metal member is, for example, alloy steel (JIS: SNCM630, SNCM616).
And the like, and as a material of the ceramic member, Si 3 N 4 , SiC, Al 2 O 3 , zirconia, sialon, or the like can be used. Also, as brazing material,
For example, a silver braze containing Ti (Ag-Cu-In-Ti-based active brazing material) or the like can be used.
【００１２】更に、前記接合面の中心とは、例えば接合
面が円である場合には円の中心であり、正多角形の場合
には最長の対角線の交点であり、接合面がその他の形状
の場合は接合面の図形の重心や、内接円又は外接円の中
心等の様にほぼその図形の中心を意味するものである。Further, the center of the joining surface is, for example, the center of the circle when the joining surface is a circle, or the intersection of the longest diagonal line when the joining surface is a regular polygon, and In the case of (2), the center of the figure of the figure on the joint surface is substantially the center of the figure, such as the center of the inscribed circle or the circumscribed circle.
【００１３】また、本発明においては、セラミックス部
材と金属部材とを、ろう材を用いて直接に接合する場合
に大きな効果が発揮されるが、例えばＣｕやＮｉ等の軟
質金属板などからなる応力緩和層を、セラミックス部材
と金属部材との間に配置してもよい。この応力緩和層を
使用する場合には、例えば金属部材，ろう材，応力緩和
層，ろう材，セラミックス部材の順に配置して接合する
方法がある。尚、応力緩和層とセラミックス部材との間
に配置されるろう材が通常のろう材の場合には、予めセ
ラミックス部材に金属を被着して接合を行なうが、活性
ろう材の場合には、特にその必要はない。Further, in the present invention, a great effect is exhibited when the ceramic member and the metal member are directly joined by using a brazing material. The relaxation layer may be disposed between the ceramic member and the metal member. When this stress relaxation layer is used, for example, there is a method of arranging and joining a metal member, a brazing material, a stress relaxation layer, a brazing material, and a ceramic member in this order. In addition, when the brazing material disposed between the stress relaxation layer and the ceramic member is a normal brazing material, a metal is previously applied to the ceramic member to perform joining, but in the case of an active brazing material, There is no particular need.
【００１４】[0014]
【作用】本発明者らは、旋削やフライス等により金属部
材を加工し、この加工された金属部材とセラミックス部
材とを接合した場合に、接合不良が発生する例を調べた
ところ、これは金属部材側の接合面の粗さに問題がある
ことを見い出し、本発明を完成した。The present inventors have worked on a metal member by turning, milling, or the like, and have examined an example in which when the processed metal member is joined to a ceramic member, a joining failure occurs. The inventors have found that there is a problem in the roughness of the joining surface on the member side, and have completed the present invention.
【００１５】つまり、接合不良が発生する原因は、ろう
材と金属部材の収縮率が同一ではないことに起因し、そ
のためろう付けした接合体を冷却する場合に接合不良が
発生すると考えられる。即ち、金属部材側の接合面が粗
い場合に接合体を冷却すると、ろう材が金属部材の接合
面の凹凸を乗り越えて収縮することになるので、冷却時
にろう材と金属部材に隙間が発生し易いからであると考
えられる。尚、この収縮の際の問題は、特に径の大きな
部材を接合する場合には収縮する寸法が大きくなるの
で、大きな問題となる。That is, it is considered that the cause of the occurrence of the joining failure is that the contraction rates of the brazing material and the metal member are not the same, and therefore, the joining failure occurs when the brazed joint is cooled. In other words, when the joined body is cooled when the joining surface on the metal member side is rough, the brazing material gets over the unevenness of the joining surface of the metal member and contracts, so that a gap is generated between the brazing material and the metal member during cooling. It is considered that this is easy. The problem of shrinkage is a serious problem particularly when joining members having a large diameter because the size of shrinkage increases.
【００１６】よって、請求項１の発明では、金属部材側
の接合面の最大径又は最大対角長さが２０mm以上である
ときには、金属部材側の接合面の表面粗さを、中心線平
均粗さＲａ：０．５μm以下とするので、ろう材と金属
部材との間で接合不良が生じ難い。特に接合面が大きな
部材の場合には、接合不良を低減する大きな要因となる
ので、その効果は接合面が大きな部材の場合に顕著であ
る。 Therefore, according to the first aspect of the present invention, the metal member side
The maximum diameter or the maximum diagonal length of the joint surface of is 20 mm or more
Sometimes, the surface roughness of the bonding surface of the metal member side, the center line average roughness Ra: Since a 0.5μm or less, bonding failure is not difficulty occurs between the brazing material and the metal member. In particular, in the case of a member having a large bonding surface, this is a major factor in reducing bonding defects.
Therefore, the effect is remarkable when the joining surface is large.
You.
【００１７】また、請求項２の発明では、金属部材側の
接合面の最大径又は最大対角長さが２０mm以上であると
きには、少なくとも接合面の中心から半径１０mmより外
側部分の表面粗さを、中心線平均粗さＲａ：０．５μm
以下とするので、接合面の中心部の表面粗さをそれほど
小さくしなくとも接合不良が生じ難く、よって加工時の
作業能率が向上する。According to the second aspect of the present invention, when the maximum diameter or the maximum diagonal length of the joining surface on the metal member side is 20 mm or more, at least the surface roughness of a portion outside a radius of 10 mm from the center of the joining surface is reduced. , Center line average roughness Ra: 0.5 μm
Since it is the following, even if the surface roughness of the central part of the joining surface is not so small, poor joining is unlikely to occur, so that the working efficiency at the time of processing is improved.
【００１８】[0018]
【実施例】以下に本発明の実施例を、図面とともに説明
する。 （実施例１）まず、図１に示す様に、本実施例のセラミ
ックスと金属との接合体（以下単に接合体と記す）１
は、円盤状のセラミックス板２と円柱状のスチール棒３
とがろう付けによって接合されたものである。即ち、接
合体１は、セラミックス部材としてＳｉ3Ｎ4からなる
（例えば厚さ２mm×直径２０mmの）セラミックス板２
と、金属部材としてＪＩＳ：ＳＮＣＭ６３０からなる
（例えば厚さ３０mm×直径２０mmの）スチール棒３と
を、その接合面（図示せず）にてろう材４を介して接合
して円柱状の接合体１としたものであり、ここで、特
に、スチール棒３の接合面の表面粗さＲａは、０．５μ
m以下とされている。Embodiments of the present invention will be described below with reference to the drawings. (Embodiment 1) First, as shown in FIG. 1, a joined body (hereinafter simply referred to as a joined body) 1 of a ceramic and a metal of the present embodiment.
Is a disk-shaped ceramic plate 2 and a cylindrical steel bar 3
Are joined by brazing. That is, the joined body 1 is a ceramic plate 2 (for example, 2 mm thick × 20 mm diameter) made of Si 3 N 4 as a ceramic member.
And a steel rod 3 (for example, having a thickness of 30 mm × a diameter of 20 mm) made of JIS: SNCM630 as a metal member, are joined via a brazing material 4 on a joint surface (not shown) thereof to form a columnar joint. 1, where the surface roughness Ra of the joint surface of the steel bar 3 is 0.5 μm.
m or less.
【００１９】この接合体１を製造する場合には、まず下
記及びの製造方法によってセラミックス板２及びス
チール棒３を製作し、次いで下記の工程にて、これら
の部材のろう付けを行なう。以下、製造方法について順
次説明する。 セラミックス板２の製造方法 Ｓｉ3Ｎ4の９０重量％粉末に、Ｙ2Ｏ3−Ａｌ2Ｏ3系焼結
助剤と成形バインダとを加えて混合し、金型プレスにて
円盤状に成形した後、Ｎ2ガス雰囲気で焼成した。その
後、セラミックスの板表面を平面研磨して仕上げを行っ
て、セラミックス板２を製造した。そして、セラミック
ス板２の接合面の表面粗さ（中心線平均粗さ）Ｒａは、
０．２〜０．３μmの範囲で一定にした。When manufacturing the joined body 1, first, a ceramic plate 2 and a steel rod 3 are manufactured by the following manufacturing method, and then these members are brazed in the following steps. Hereinafter, the manufacturing method will be sequentially described. 90 wt% powder manufacturing method Si 3 N 4 ceramics plate 2, and mixed with a Y 2 O 3 forming a -Al 2 O 3 sintering auxiliary binder, molded into a disk shape in a die press After that, firing was performed in a N 2 gas atmosphere. Thereafter, the surface of the ceramic plate was polished and finished to produce a ceramic plate 2. The surface roughness (center line average roughness) Ra of the bonding surface of the ceramic plate 2 is:
It was kept constant in the range of 0.2 to 0.3 μm.
【００２０】スチール棒３の製造方法 ＪＩＳ：ＳＮＣＭ６３０棒を旋盤で切削して、上記外径
（直径）とするとともに、旋盤の送りスピードを変えて
接合面の表面粗さＲａを、０．５μm以下に調節してス
チール棒３を製造した。Manufacturing method of steel bar 3 JIS: SNCM630 bar is cut with a lathe to obtain the above outer diameter (diameter) and the feed speed of the lathe is changed to reduce the surface roughness Ra of the joining surface to 0.5 μm or less. To produce a steel rod 3.
【００２１】ろう付け方法 セラミックス板２とスチール棒３との突き合わせる端面
（接合面）の間に、Ｉｎ−Ａｇ−Ｃｕ−Ｔｉ系の厚さ
０．０５mmの活性ろう材４を配置した。そして、真空中
にて７９０℃で１５分間保持し、その後Ｎ2ガス置換炉
にて冷やすことによってろう付けを行って、セラミック
スと金属との接合体１を得た。 （実験例１）次に、この様にして製造した接合体の効果
を確認するために行った実験例について説明する。Brazing Method An active brazing material 4 of 0.05 mm in thickness made of In-Ag-Cu-Ti was placed between the end faces (joining faces) of the ceramic plate 2 and the steel bar 3 where they faced each other. Then, it was held at 790 ° C. for 15 minutes in a vacuum, and then cooled in a N 2 gas replacement furnace to perform brazing, thereby obtaining a bonded body 1 of ceramics and metal. (Experimental Example 1) Next, an experimental example performed to confirm the effect of the joined body manufactured in this manner will be described.
【００２２】本実験例では、前記実施例１の接合体とし
て、表面粗さＲａが０．５μm以下で接合体の接合面の
直径（接合径）を違えたもの（１０〜４０mm）を多数製
造し、また、比較例として、表面粗さＲａが０．５μm
を上回り同様に接合体の接合径を違えたものを多数製造
した。In this experimental example, a large number of bonded bodies (10 to 40 mm) having a surface roughness Ra of 0.5 μm or less and different bonding surface diameters (bonded diameters) were manufactured as the bonded bodies of the first embodiment. As a comparative example, the surface roughness Ra was 0.5 μm
Similarly, a large number of joints having different joining diameters were manufactured.
【００２３】そして、実施例及び比較例の接合体に対
し、接合体のセラミックス側から超音波を当てて、その
エコーの高さに異常が見られるか否かを調べた。ここ
で、異常が見られるものは、セラミックスと金属との接
合面に隙間があると見なされるので、接合不良と判定さ
れる。Then, ultrasonic waves were applied to the joined bodies of the examples and comparative examples from the ceramic side of the joined bodies, and it was examined whether or not abnormalities were found in the echo height. In this case, if there is an abnormality, it is considered that there is a gap in the joining surface between the ceramic and the metal, and thus it is determined that the joining is defective.
【００２４】この実験結果を図２に示す。図２におい
て、縦軸は接合面の表面粗さＲａを示し、横軸は接合径
を示している。また図において、接合良のものを○で示
し、接合不良なものを×で示している。この図２から明
かな様に、接合面の表面粗さＲａが０．５μm以下の場
合には、接合径の小さな接合体だけでなく、接合径の大
きな接合体であっても、接合不良の発生する度合が極め
て少なく、接合状態は極めてよいことがわかる。つま
り、上記実施例１のセラミックスと金属との接合体は、
接合不良が少なく極めて優れたものである。 （実施例２）次に、実施例２について、図３に基づいて
説明する。FIG. 2 shows the results of this experiment. In FIG. 2, the vertical axis indicates the surface roughness Ra of the bonding surface, and the horizontal axis indicates the bonding diameter. In the figures, good bonding is indicated by o, and poor bonding is indicated by x. As is apparent from FIG. 2, when the surface roughness Ra of the bonding surface is 0.5 μm or less, not only a bonded body having a small bonding diameter but also a bonded body having a large bonding diameter has poor bonding. It can be seen that the degree of occurrence is extremely small and the bonding state is extremely good. That is, the joined body of the ceramic and the metal of the first embodiment is
It is extremely excellent with few bonding defects. (Embodiment 2) Next, Embodiment 2 will be described with reference to FIG.
【００２５】図３に示す様に、本実施例のセラミックス
と金属との接合体は、自動車のエンジン部品のタペット
１０であり、その大きさは、高さ５０mm×太い径部の外
径３５mm×細い径部の外径１５mmである。このタペット
１０は、Ｓｉ3Ｎ4からなる厚さ２mm×直径３５mmの円盤
状のセラミックス板１１が、ＳＮＣＭ６３０からなる金
属部材１２の先端側にて、上記実施例１と同様なろう材
にて接合されたものである。そして、この金属部材１２
の中心の半径１０mmの円の範囲内の表面粗さＲａは、
０．５μmより粗く設定されており、一方、この円の外
側の表面粗さＲａは、０．５μm以下と滑らかに設定さ
れている。 （実験例２）次に、この様にして製造した接合体の効果
を確認するために行った実験例について説明する。As shown in FIG. 3, the joined body of ceramics and metal of the present embodiment is a tappet 10 of an engine part of an automobile, and the size thereof is 50 mm in height × 35 mm in outer diameter of a large diameter portion. The outer diameter of the small diameter portion is 15 mm. In this tappet 10, a disc-shaped ceramic plate 11 made of Si 3 N 4 and having a thickness of 2 mm × a diameter of 35 mm is joined to the tip side of a metal member 12 made of SNCM630 with the same brazing material as in the first embodiment. It was done. And this metal member 12
The surface roughness Ra within a circle having a radius of 10 mm at the center of
The surface roughness Ra outside the circle is set to 0.5 μm or less, and the surface roughness Ra outside the circle is set to 0.5 μm or less. (Experimental Example 2) Next, an experimental example performed to confirm the effect of the joined body manufactured as described above will be described.
【００２６】本実験例では、前記実施例２の接合体のタ
ペットとして、表面粗さＲａが０．４μmのタペット
（試料No.１）と、上記円（φ２０）内の表面粗さＲａ
が０．８μmで円外の表面粗さＲａが０．４μmのタペッ
ト（試料No.２）と、円内の表面粗さＲａが１．２μmで
円外の表面粗さＲａが０．４μmのタペット（試料No.
３）とを製造するとともに、比較例として、表面粗さＲ
ａが０．８μmと大きなタペット（試料No.４）を製造し
た。尚、円内と円外とで表面粗さが異なる試料No.２，
３については、ＮＣによる表面の加工時の送りスピード
を切り換えて、即ち、円内の加工時は速く、一方円外の
加工時はゆっくりとしたスピードで加工を行った。In this experimental example, a tappet having a surface roughness Ra of 0.4 μm (sample No. 1) and a surface roughness Ra in the circle (φ20) were used as the tappet of the joined body of Example 2.
A tappet (sample No. 2) having a surface roughness Ra of 0.8 μm and a surface roughness Ra of 0.4 μm, and a surface roughness Ra of 1.2 μm and a surface roughness Ra of 0.4 μm outside the circle Tappet (Sample No.
3), and as a comparative example, the surface roughness R
A large tappet (sample No. 4) having a of 0.8 μm was manufactured. Sample No. 2 whose surface roughness differs between inside and outside the circle
For No. 3, the feed speed was changed at the time of processing the surface by the NC, that is, processing was performed at a high speed when processing inside a circle, and at a slow speed when processing outside the circle.
【００２７】そして、上記４種のタペットを、１２００
０ccのエンジンに組み込み、バルブクリアランスを通常
の２倍にして、エンジン回転数：３０００rpmにおける
耐久試験を行った。この評価を下記表１に示す。Then, the above four types of tappets were
A 0 cc engine was mounted, the valve clearance was doubled, and an endurance test was performed at an engine speed of 3000 rpm. This evaluation is shown in Table 1 below.
【００２８】[0028]
【表１】 [Table 1]
【００２９】この表１から明かな様に、接合面の表面粗
さＲａが０．５以下の場合には、大きな直径の接合体で
あっても、耐久性能が高く接合状態は極めてよいことが
わかる。また、円内の表面粗さＲａが０．５μmより大
きな場合でも、円外の表面粗さＲａが０．５μm以下の
場合には、上記と同様に耐久性能が高く接合状態が良い
という特長がある。それに対して、比較例の試料No.４
のものは、表面粗さＲａが０．５μmより大きいので、
耐久性能が低く接合状態が悪いので好ましくない。As is clear from Table 1, when the surface roughness Ra of the joint surface is 0.5 or less, even if the joint body has a large diameter, the durability is high and the joint state is extremely good. Understand. Further, even when the surface roughness Ra inside the circle is larger than 0.5 μm, when the surface roughness Ra outside the circle is 0.5 μm or less, the durability is high and the bonding state is good as described above. is there. On the other hand, sample No. 4 of the comparative example
Since the surface roughness Ra is larger than 0.5 μm,
It is not preferable because the durability is low and the bonding state is poor.
【００３０】尚、本発明は、本実施例に何等限定される
ことなく、本発明の要旨を逸脱しない範囲内において各
種の態様で実施できることは勿論である。例えば、使用
するセラミックス部材，金属部材，ろう材の種類の限定
されることなく実施でき、しかもセラミックスと金属と
の間にＮｉ板等の応力緩和層を配置した場合にも効果を
発揮する。It should be noted that the present invention is not limited to the present embodiment, but can be embodied in various forms without departing from the scope of the present invention. For example, the present invention can be carried out without any limitation on the types of ceramic members, metal members, and brazing materials to be used, and is also effective when a stress relaxation layer such as a Ni plate is arranged between ceramic and metal.
【００３１】[0031]
【発明の効果】以上説明した様に請求項１の発明によれ
ば、金属部材側の接合面の最大径又は最大対角長さが２
０mm以上であるときには、金属部材側の接合面の表面粗
さを、中心線平均粗さＲａ：０．５μm以下とするの
で、ろう材と金属部材との間で接合不良が生じ難い。特
にその効果は接合面が大きな部材の場合に顕著である。According to the first aspect of the present invention, as described above, the maximum diameter or the maximum diagonal length of the joint surface on the metal member side is 2 mm.
When it is 0mm or more, the surface roughness of the bonding surface of the metal member side, the center line average roughness Ra: Since a 0.5μm or less, bonding failure is not difficulty occurs between the brazing material and the metal member. In particular, the effect is remarkable in the case of a member having a large joining surface.
【００３２】また、請求項２の発明では、金属部材側の
接合面の最大径又は最大対角長さが２０mm以上であると
きには、少なくとも接合面の中心から半径１０mmより外
側部分の表面粗さを、中心線平均粗さＲａ：０．５μm
以下とするので、特に大きな接合面を有する部材の場合
には、接合面の中央部の表面粗さをそれほど小さくしな
くとも接合不良が生じ難く、よって加工時の作業能率が
向上するという利点がある。According to the second aspect of the present invention, when the maximum diameter or the maximum diagonal length of the joining surface on the metal member side is 20 mm or more, at least the surface roughness of a portion outside a radius of 10 mm from the center of the joining surface is reduced. , Center line average roughness Ra: 0.5 μm
In the case of a member having a large joint surface, the advantage is that poor joining hardly occurs even if the surface roughness of the central portion of the joint surface is not so small, and the working efficiency at the time of processing is improved. is there.
【図１】 本発明の実施例１の接合体を示す斜視図であ
る。FIG. 1 is a perspective view showing a joined body according to a first embodiment of the present invention.
【図２】 実験例１の接合状態の実験結果を示すグラフ
である。FIG. 2 is a graph showing an experimental result of a bonding state of Experimental Example 1.
【図３】 実施例２の接合体を示す正面図である。FIG. 3 is a front view showing a joined body of Example 2.
１…接合体， ２，１１…セラミックス板， ３
…スチール棒，４…ろう材， １０…タペット，
１２…金属部材DESCRIPTION OF SYMBOLS 1 ... Joined body, 2, 11 ... Ceramic plate, 3
... steel rod, 4 ... brazing material, 10 ... tappet,
12 metal parts
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−81069（ＪＰ，Ａ) 特開 昭61−107703（ＪＰ，Ａ) 特開 昭60−200868（ＪＰ，Ａ) 特開 昭62−292261（ＪＰ，Ａ) 特開 平３−23309（ＪＰ，Ａ) 特開 昭55−45512（ＪＰ，Ａ) 特公 昭60−6748（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.7，ＤＢ名) C04B 37/02 B23K 1/19 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-60-81069 (JP, A) JP-A-61-107703 (JP, A) JP-A-60-200868 (JP, A) JP-A-62 292261 (JP, A) JP-A-3-23309 (JP, A) JP-A-55-4512 (JP, A) JP-B-60-6748 (JP, B2) (58) Fields investigated (Int. 7 , DB name) C04B 37/02 B23K 1/19
Claims (2)
らの接合面にてろう材を介して接合する接合体におい
て、前記金属部材側の接合面の最大径又は最大対角長さが２
０mm以上であり、かつ 前記金属部材側の接合面の表面粗
さが、中心線平均粗さＲａ：０．５μm以下であること
を特徴とするセラミックスと金属との接合体。1. A joined body for joining a ceramic member and a metal member via a brazing material at their joint surfaces, wherein a maximum diameter or a maximum diagonal length of the joint surface on the metal member side is 2 mm.
A bonded body of ceramic and metal, wherein the bonded body has a surface roughness of 0 mm or more and a center line average roughness Ra: 0.5 μm or less.
大対角長さが２０mm以上であり、かつ少なくとも該接合
面の中心から半径１０mmより外側部分の表面粗さが、中
心線平均粗さＲａ：０．５μm以下であることを特徴と
する前記請求項１記載のセラミックスと金属との接合
体。2. The metal member side joint surface has a maximum diameter or a maximum diagonal length of 20 mm or more, and at least a surface roughness of a portion outside a radius of 10 mm from a center of the joint surface has a center line average roughness. The joined body of ceramics and metal according to claim 1, wherein Ra is 0.5 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14179592A JP3330973B2 (en) | 1992-06-02 | 1992-06-02 | Joint of ceramic and metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14179592A JP3330973B2 (en) | 1992-06-02 | 1992-06-02 | Joint of ceramic and metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05330937A JPH05330937A (en) | 1993-12-14 |
| JP3330973B2 true JP3330973B2 (en) | 2002-10-07 |
Family
ID=15300322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14179592A Expired - Fee Related JP3330973B2 (en) | 1992-06-02 | 1992-06-02 | Joint of ceramic and metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3330973B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5324945B2 (en) * | 2009-01-30 | 2013-10-23 | 太平洋セメント株式会社 | Silicon carbide bonded body and method for manufacturing the same |
| JP6839314B2 (en) * | 2019-03-19 | 2021-03-03 | 日本碍子株式会社 | Wafer mounting device and its manufacturing method |
-
1992
- 1992-06-02 JP JP14179592A patent/JP3330973B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05330937A (en) | 1993-12-14 |
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