JP3316994B2 - Accelerator tube - Google Patents
Accelerator tubeInfo
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- JP3316994B2 JP3316994B2 JP34646793A JP34646793A JP3316994B2 JP 3316994 B2 JP3316994 B2 JP 3316994B2 JP 34646793 A JP34646793 A JP 34646793A JP 34646793 A JP34646793 A JP 34646793A JP 3316994 B2 JP3316994 B2 JP 3316994B2
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- Prior art keywords
- electrode
- deceleration
- voltage
- suppress
- potential
- Prior art date
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Description
【０００１】[0001]
【産業上の利用分野】本発明は荷電粒子のビ−ムを加速
する加速管に関する。特に、広い範囲のビ−ム電流やビ
−ムエネルギ−に対してビ−ムのプロフィルを制御で
き、ビ−ムの広がりを抑えることのできる加速管に関す
る。加速管は、真空中を走行する荷電粒子ビ−ムを電界
の作用で加速するものである。円環状の電極と、円環状
の絶縁碍子を交互に並べたもので、電極には適当な電圧
を与える。絶縁碍子により経路が密封され経路の真空を
維持できる。イオン注入装置など、イオンの発生領域
と、イオンの照射領域が異なる場合にビ−ムを輸送しな
ければならない。ビ−ム輸送系が長い場合にはビ−ムの
広がりが問題になる。特にビ−ムの電流密度が高い場合
は、空間電荷の効果によりイオン同志にク−ロン斥力が
働く。特に低速の場合にク−ロン斥力による発散効果が
著しい。輸送系が長いと発散のためにビ−ムが散逸し対
象物に照射するときに十分なビ−ム密度が得られない。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration tube for accelerating a charged particle beam. In particular, the present invention relates to an acceleration tube capable of controlling the beam profile for a wide range of beam current and beam energy and suppressing the spread of the beam. The accelerating tube accelerates a charged particle beam traveling in a vacuum by the action of an electric field. An annular electrode and an annular insulator are alternately arranged, and an appropriate voltage is applied to the electrode. The path is sealed by the insulator, and the vacuum of the path can be maintained. The beam must be transported when the ion generation region and the ion irradiation region are different, such as in an ion implantation apparatus. When the beam transport system is long, the spread of the beam becomes a problem. In particular, when the current density of the beam is high, a lon repulsive force acts between ions due to the effect of space charge. Particularly at a low speed, the divergent effect due to the Kron repulsion is remarkable. If the transport system is long, the beam is dissipated due to divergence and a sufficient beam density cannot be obtained when irradiating an object.
【０００２】[0002]
【従来の技術】加速管はプラズマ発生装置のプラズマ引
き出し電極と同じように、高圧をかけている高電位電
極、負電圧を加えているサプレス電極、接地電位である
接地電極の３枚の電極よりなる。図１はこの従来例にか
かる加速管の概略断面図である。これはビ−ム経路に沿
って設置される３枚の電極を含む。高電位電極１、サプ
レス電極２、接地電極３である。加速電源４が高電位電
極１に正の高電圧を印加する。サプレス電源５がサプレ
ス電極２に負電圧を加える。2. Description of the Related Art An accelerating tube, like a plasma extracting electrode of a plasma generator, comprises three electrodes: a high-potential electrode applying a high voltage, a suppress electrode applying a negative voltage, and a ground electrode serving as a ground potential. Become. FIG. 1 is a schematic sectional view of an acceleration tube according to this conventional example. It includes three electrodes placed along the beam path. A high-potential electrode 1, a suppress electrode 2, and a ground electrode 3. An acceleration power supply 4 applies a positive high voltage to the high potential electrode 1. A suppress power supply 5 applies a negative voltage to the suppress electrode 2.
【０００３】ビ−ムは、加速電源４の電圧分だけ加速さ
れる。高電位電極１は、加速電極、正電極とも呼ばれ
る。ビ−ムが対象物などに衝突したときに二次電子が発
生する。サプレス電極２は、二次電子がビ−ムの上流側
に逆流するのを防ぐ。だからサプレス電極と呼ぶ。これ
は減速電極、負電極、抑制電極とも呼ぶ。人によって電
極の呼び名はさまざまである。ここでは高電位電極１、
サプレス電極２、接地電極３という呼び名を採用する。[0003] The beam is accelerated by the voltage of the acceleration power supply 4. The high potential electrode 1 is also called an acceleration electrode and a positive electrode. Secondary electrons are generated when the beam collides with an object or the like. The suppress electrode 2 prevents secondary electrons from flowing back upstream of the beam. Therefore, it is called a suppress electrode. This is also called the deceleration electrode, the negative electrode, and the suppression electrode. The names of the electrodes vary from person to person. Here, the high potential electrode 1,
The names of the suppress electrode 2 and the ground electrode 3 are adopted.
【０００４】電極は円形の板であって、中央に開口があ
る。この開口をビ−ムが通過する。絶縁碍子（図示しな
い）が電極板の間に存在し、ビ−ム経路を閉空間として
いる。真空ポンプ（図示しない）が接続されて経路の真
空を保持するようになっている。真空ポンプや、絶縁碍
子は簡単のため図示しない。The electrode is a circular plate having an opening in the center. The beam passes through this opening. An insulator (not shown) exists between the electrode plates, and the beam path is a closed space. A vacuum pump (not shown) is connected so as to maintain a vacuum in the path. The vacuum pump and the insulator are not shown for simplicity.
【０００５】[0005]
【発明が解決しようとする課題】加速管では、正イオン
ビ−ムまたは負イオンビ−ムが高速で飛行する。電子は
殆ど存在しないので、中性化確率が小さい。正イオンま
たは負イオンの集合として走行する。同種の荷電粒子で
あるので相互にク−ロン斥力が働く。これはビ−ムを外
側に広げる作用を及ぼす。同種の電荷を持つ粒子が空間
中に存在するのを空間電荷という。空間電荷による斥力
によりビ−ムが拡がることを空間電荷効果という。荷電
密度が低いときや速度が速い時はあまり問題にならな
い。しかし電荷密度が高い場合や、速度が遅い場合は、
空間電荷による発散が重大な問題になる。In an acceleration tube, a positive ion beam or a negative ion beam flies at a high speed. Since there are almost no electrons, the probability of neutralization is low. It travels as a set of positive or negative ions. Since they are the same kind of charged particles, Kron repulsion acts on each other. This has the effect of spreading the beam outward. Particles having the same kind of charge in space are called space charges. Spreading of the beam due to repulsion by space charge is called a space charge effect. When the charge density is low or the speed is high, there is not much problem. However, if the charge density is high or the speed is slow,
The divergence due to space charge becomes a serious problem.
【０００６】従来の加速管は、空間電荷による発散を抑
え、ビ−ムを収束させるように電極の構造が設計されて
いる。しかしある限られた条件のビ−ムに対してのみ収
束効果があるだけである。条件が異なるともはや発散防
止の効果はない。In a conventional accelerator tube, the structure of the electrodes is designed so as to suppress divergence due to space charges and to converge the beam. However, there is only a convergence effect for a beam under certain limited conditions. If the conditions are different, there is no longer any effect of preventing divergence.
【０００７】図１の高電位電極１、サプレス電極２、接
地電極３よりなる電極構造で、電極の間隔や、口径、電
圧を適当に定めて、次の条件のビ−ムに対して収束効果
があるようにしたとする。例えば、４０ｋｅＶ、５０ｍ
Ａの入射ビ−ムを６０ｋｅＶ加速し、１００ｋｅＶ、５
０ｍＡの発散の小さい出射ビ−ムを得るように設計して
あるとする。The electrode structure including the high potential electrode 1, the suppress electrode 2, and the ground electrode 3 shown in FIG. Suppose you have For example, 40 keV, 50 m
The incident beam of A is accelerated by 60 keV to 100 keV, 5
It is assumed that a design is made to obtain an emission beam with a small divergence of 0 mA.
【０００８】この加速管で、４０ｋｅＶ、５０ｍＡの入
射ビ−ムを２０ｋｅＶ加速して６０ｋｅＶ、５０ｍＡの
ビ−ムにすると収束効果が殆どない。加速電圧が小さい
ためである。このためビ−ムの広がりを抑えられない。
ビ−ムは発散してしまう。このように加速の条件が違う
ともはや発散防止の効果がない。In this accelerator tube, if the incident beam at 40 keV and 50 mA is accelerated by 20 keV to a beam at 60 keV and 50 mA, there is almost no convergence effect. This is because the acceleration voltage is small. Therefore, the spread of the beam cannot be suppressed.
The beam emanates. If the acceleration conditions are different, there is no longer any effect of preventing divergence.
【０００９】この場合、入射ビ−ムが２０ｋｅＶ、５０
ｍＡで、４０ｋｅＶ加速することにより６０ｋｅＶのイ
オンビ−ムを得ることもできる。加速電圧が大きいので
収束効果も期待できる。しかし、常にここでの加速電圧
を６０ｋｅＶに近くできるかというとそうでない。不純
物を除去するために、加速管の前に質量分析装置を置く
ことがある。質量分析のためには高エネルギ−が必要で
ある。その場合は、加速管まで低エネルギ−で輸送する
ことができない。In this case, the incident beam is 20 keV, 50
An ion beam of 60 keV can be obtained by accelerating at 40 keV at mA. Since the acceleration voltage is large, a convergence effect can be expected. However, it is not always the case that the acceleration voltage here can be close to 60 keV. A mass spectrometer may be placed in front of the accelerator to remove impurities. High energy is required for mass spectrometry. In that case, it is not possible to transport with low energy to the acceleration tube.
【００１０】イオンビ−ムの入射エネルギ−や、電流密
度、加速エネルギ−によらずビ−ムを収束させるような
機構が望まれる。電流密度や、ビ−ムのエネルギ−によ
らずイオンビ−ムを収束させることのできる加速管を提
供することが本発明の目的である。It is desired to have a mechanism that converges the beam regardless of the incident energy, current density, and acceleration energy of the ion beam. An object of the present invention is to provide an acceleration tube capable of converging an ion beam irrespective of current density or beam energy.
【００１１】[0011]
【課題を解決するための手段】本発明の加速管は、高電
圧が印加された高電位電極１と、このあとに設けられ、
より高圧が印加された減速電極６と、この後にあって負
電圧を印加したサプレス電極２と、接地電位の接地電極
３とより成る。いずれの電極も円形あるいは多角形の導
電板であるが、中心にイオンビ−ムが通るための穴があ
る。本発明は、減速電極６を追加したところが新規であ
る。減速電極６は高電位電極１と、サプレス電極２の中
間にある。減速電極の電位が最も高く、サプレス電極の
電位が最も低い。減速電極とサプレス電極の間が最も電
界の大きいところであり、ここで局所的に加速される。The accelerating tube according to the present invention is provided with a high-potential electrode 1 to which a high voltage is applied, and a high-potential electrode 1 provided thereafter.
It comprises a deceleration electrode 6 to which a higher voltage is applied, a suppress electrode 2 to which a negative voltage is applied, and a ground electrode 3 having a ground potential. Each of the electrodes is a circular or polygonal conductive plate, but has a hole at the center through which an ion beam passes. The present invention is novel in that a deceleration electrode 6 is added. The deceleration electrode 6 is located between the high-potential electrode 1 and the suppress electrode 2. The potential of the deceleration electrode is the highest, and the potential of the suppress electrode is the lowest. The area between the deceleration electrode and the suppress electrode is where the electric field is greatest, where the electric field is locally accelerated.
【００１２】[0012]
【作用】イオンビ−ムの輸送系において、加速すること
によりビ−ムは収束する傾向にある。発散はビ−ムと直
交する方向に働く力による。加速は、ビ−ム方向の力で
ある。これだけではビ−ムの広がりを抑えることはでき
ない。しかし穴のある電極間で形成される電気力線、等
電位面は電極に直角あるいは平行ではない。穴のある高
電位電極と、低電位電極の間の等電位面はレンズ型に歪
む。電気力線は紡錘形になる。このために、高電位電極
と、低電位電極の間を通るビ−ムが収束する。しかしそ
れも加速電圧がかなり高くなければ効果が薄い。In the ion beam transport system, the beam tends to converge by accelerating. The divergence is due to the force acting in the direction perpendicular to the beam. Acceleration is a beam direction force. This alone cannot suppress the spread of the beam. However, the lines of electric force and equipotential surfaces formed between the perforated electrodes are not perpendicular or parallel to the electrodes. The equipotential surface between the high-potential electrode with holes and the low-potential electrode is distorted like a lens. The lines of electric force become spindle-shaped. Therefore, the beam passing between the high potential electrode and the low potential electrode converges. However, the effect is also weak unless the acceleration voltage is considerably high.
【００１３】本発明の加速管は、高電位電極１の後に、
より高い電圧の減速電極６を設置している。高電位電極
を通った後直ぐに加速するというのではなく、一旦減速
する。この減速によりビ−ムは少し拡がる。しかし次に
減速電極６とサプレス電極２の間にできた高電圧のため
にイオンビ−ムが収束効果を受ける。そのためにビ−ム
が発散することなく走行できる減速電極６の作用は二つ
ある。The accelerating tube of the present invention is provided after the high potential electrode 1.
A higher voltage deceleration electrode 6 is provided. Instead of accelerating immediately after passing through the high-potential electrode, it temporarily decelerates. The beam spreads slightly due to this deceleration. However, the ion beam has a convergence effect due to the high voltage generated between the deceleration electrode 6 and the suppress electrode 2. Therefore, there are two functions of the deceleration electrode 6 that can travel without diverging the beam.
【００１４】ひとつは減速電圧分だけ、加速エネルギ−
を増やすことである。高電位電極（減速電極）と低電位
電極（サプレス電極）の電圧の差を大きくして、等電位
面や、電気力線の歪みを大きくして凸レンズ効果を大き
くする。もうひとつは減速することによりイオンの運動
エネルギ−を減らし、ビ−ム方向と直角の方向へ動き易
くしてレンズ効果を高めることである。One is that the acceleration energy is reduced by the deceleration voltage.
It is to increase. By increasing the voltage difference between the high-potential electrode (deceleration electrode) and the low-potential electrode (suppress electrode), the distortion of the equipotential surface and the lines of electric force is increased to increase the convex lens effect. The other is to reduce the kinetic energy of the ions by decelerating, to facilitate the movement in the direction perpendicular to the beam direction, and to enhance the lens effect.
【００１５】減速電極６により、高電位電極と減速電極
の間でビ−ムが拡がるが、この領域へのビ−ムの入射エ
ネルギ−が高いのであまり問題でない。The beam spreads between the high-potential electrode and the deceleration electrode by the deceleration electrode 6, but this is not a problem because the beam incident energy to this region is high.
【００１６】[0016]
【実施例】図２により本発明の加速管の電極構造を説明
する。イオンビ−ムの方向からみて順に、高電位電極
１、減速電極６、サプレス電極２、接地電極３が設けら
れる。いずれも中央部にイオンビ−ムを通すための開口
部がある。高電位電極１は加速電源４によって高電圧が
印加される。サプレス電極２はサプレス電源５により負
電圧が印加される。イオンビ−ムが対象物に当たると二
次電子が放出される。サプレス電極は、二次電子がイオ
ン源の方に戻るのを防ぐ作用がある。減速電極６は、加
速電源４の正極に接続されている減速電源７により更に
高い電圧が印加される。減速電源７は可変の電源であ
り、減速エネルギ−の大きさは任意に調整することがで
きる。FIG. 2 illustrates the electrode structure of the accelerating tube according to the present invention. A high potential electrode 1, a deceleration electrode 6, a suppress electrode 2, and a ground electrode 3 are provided in order from the direction of the ion beam. In each case, there is an opening at the center for passing the ion beam. A high voltage is applied to the high potential electrode 1 by an acceleration power supply 4. A negative voltage is applied to the suppress electrode 2 by a suppress power supply 5. When the ion beam hits the object, secondary electrons are emitted. The suppress electrode has the effect of preventing secondary electrons from returning to the ion source. A higher voltage is applied to the deceleration electrode 6 by the deceleration power supply 7 connected to the positive electrode of the acceleration power supply 4. The deceleration power source 7 is a variable power source, and the magnitude of the deceleration energy can be arbitrarily adjusted.
【００１７】図３は本発明の電極構造を持つ加速管にお
いて減速しない場合のビ−ムの流線を示す。入射ビ−ム
は４０ｋｅＶ、５０ｍＡのＡｒイオンビ−ムである。高
電位電極１の電圧が２０ｋＶ、減速電極６の電圧が２０
ｋＶ、サプレス電極の電圧が−５ｋＶである。減速電極
に減速電圧がかかっていない。この場合は従来例と同じ
事であり、イオンビ−ムが広がってゆく。FIG. 3 shows streamlines of a beam when the acceleration tube having the electrode structure of the present invention does not decelerate. The incident beam is an Ar ion beam of 40 keV and 50 mA. The voltage of the high potential electrode 1 is 20 kV, and the voltage of the deceleration electrode 6 is 20 kV.
kV, and the voltage of the suppress electrode is -5 kV. No deceleration voltage is applied to the deceleration electrode. In this case, it is the same as the conventional example, and the ion beam spreads.
【００１８】図４は本発明の電極構造をにおいて、減速
電極６に２０ｋＶの減速電圧を加えた場合である。高電
位電極１が２０ｋＶ、減速電極６が４０ｋＶ、サプレス
電極２が−５ｋＶである。この場合は収束効果がある。
細いビ−ムになって加速管を通り抜ける。減速電極に減
速電圧を印加しビ−ムの速度を減じてから再び大きく加
速することにより、収束効果が得られるということがわ
かる。FIG. 4 shows a case where a deceleration voltage of 20 kV is applied to the deceleration electrode 6 in the electrode structure of the present invention. The high potential electrode 1 has 20 kV, the deceleration electrode 6 has 40 kV, and the suppress electrode 2 has -5 kV. In this case, there is a convergence effect.
It passes through the accelerating tube as a thin beam. It can be seen that a convergence effect can be obtained by applying a deceleration voltage to the deceleration electrode to reduce the beam speed and then increasing the beam speed again.
【００１９】[0019]
【発明の効果】本発明は、高電位電極１と、サプレス電
極２の間に、減速電極６を設けたので、減速電極と、サ
プレス電極の間の加速電圧を大きく取ることができ、加
速電圧を大きくすることにより収束効果を大きくしてい
る。減速電極によりビ−ムの速度が一旦低下するので余
計にビ−ムの収束性が高まる。電圧のパラメータがひと
つ増えるので制御性が高揚する。高電位電極に印加する
電圧は、最終的な加速電圧により決まっているのでこれ
は予め決まっている。変更することができない。しかし
減速電極６に印加する電圧は任意に変更できるパラメー
タである。これを変更してもビ−ムの最終的なエネルギ
−には影響しない。According to the present invention, since the deceleration electrode 6 is provided between the high-potential electrode 1 and the suppress electrode 2, the acceleration voltage between the deceleration electrode and the suppress electrode can be increased. Is increased to increase the convergence effect. Since the beam speed is temporarily reduced by the deceleration electrode, the convergence of the beam is further increased. Since the voltage parameter is increased by one, controllability is enhanced. Since the voltage applied to the high potential electrode is determined by the final acceleration voltage, this is predetermined. Cannot be changed. However, the voltage applied to the deceleration electrode 6 is a parameter that can be arbitrarily changed. Changing this does not affect the final energy of the beam.
【００２０】ビ−ムのエネルギ−や、ビ−ム電流が変化
しても減速電圧を調整することによりビ−ムを収束させ
ることができる。これはパラメータがひとつ多いことに
よる。広い電流、エネルギ−の範囲で、ビ−ムの発散が
抑えられる。長いビ−ムの輸送系などの加速管に最適で
ある。Even if the beam energy or the beam current changes, the beam can be converged by adjusting the deceleration voltage. This is because there is one more parameter. Beam divergence can be suppressed within a wide range of current and energy. Ideal for accelerating tubes in long beam transport systems.
【図１】従来例に係る加速管の概略断面図。FIG. 1 is a schematic cross-sectional view of an acceleration tube according to a conventional example.
【図２】本発明の加速管の概略断面図。FIG. 2 is a schematic sectional view of an acceleration tube of the present invention.
【図３】本発明の電極構造の加速管において、減速電圧
が０Ｖの時のイオンビ−ムの流線を示す断面図。FIG. 3 is a sectional view showing streamlines of an ion beam when a deceleration voltage is 0 V in an acceleration tube having an electrode structure according to the present invention.
【図４】本発明の電極構造の加速管において、減速電圧
が２０ｋＶの時のイオンビ−ムの流線を示す断面図。FIG. 4 is a sectional view showing streamlines of the ion beam when the deceleration voltage is 20 kV in the acceleration tube having the electrode structure of the present invention.
１ 高電位電極 ２ サプレス電極 ３ 接地電極 ４ 加速電源 ５ サプレス電源 ６ 減速電極 ７ 減速電源 DESCRIPTION OF SYMBOLS 1 High potential electrode 2 Suppress electrode 3 Ground electrode 4 Acceleration power supply 5 Suppress power supply 6 Deceleration electrode 7 Deceleration power supply
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 37/248 H01J 37/30 ──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. 7 , DB name) H01J 37/248 H01J 37/30
Claims (1)
ムを加速するための加速管であって、開口を有し高電圧
が印加された高電位電極と、高電位電極に続いて設けら
れ開口を有し高電位電極よりもなお高電圧が印加された
減速電極と、減速電極に続いて設けられ負電圧が印加さ
れたサプレス電極と、サプレス電極に続いて設けられ開
口を有し接地電位の接地電極とより成り、イオンビ−ム
は高電位電極と減速電極の間で減速され、減速電極とサ
プレス電極の間でより強く加速されるようにしたことを
特徴とする加速管。An ion beam provided in a transport system of an ion beam.
A high-potential electrode having an opening and a high voltage applied thereto, and an opening provided following the high-potential electrode and having a higher voltage applied than the high-potential electrode. A deceleration electrode, a suppress electrode provided following the deceleration electrode and to which a negative voltage is applied, and a ground electrode having an opening and provided with an opening and connected to the suppress electrode and having a ground potential. An acceleration tube which is decelerated between a deceleration electrode and accelerated more strongly between a deceleration electrode and a suppress electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34646793A JP3316994B2 (en) | 1993-12-22 | 1993-12-22 | Accelerator tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34646793A JP3316994B2 (en) | 1993-12-22 | 1993-12-22 | Accelerator tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07182998A JPH07182998A (en) | 1995-07-21 |
| JP3316994B2 true JP3316994B2 (en) | 2002-08-19 |
Family
ID=18383626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34646793A Expired - Fee Related JP3316994B2 (en) | 1993-12-22 | 1993-12-22 | Accelerator tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3316994B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106061092B (en) * | 2016-06-07 | 2018-04-10 | 中国工程物理研究院核物理与化学研究所 | A kind of high current quadrupole lense ion accelerating tube |
-
1993
- 1993-12-22 JP JP34646793A patent/JP3316994B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07182998A (en) | 1995-07-21 |
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