JP3315893B2 - Electromagnetic drive for optical deflection device - Google Patents
Electromagnetic drive for optical deflection deviceInfo
- Publication number
- JP3315893B2 JP3315893B2 JP13689397A JP13689397A JP3315893B2 JP 3315893 B2 JP3315893 B2 JP 3315893B2 JP 13689397 A JP13689397 A JP 13689397A JP 13689397 A JP13689397 A JP 13689397A JP 3315893 B2 JP3315893 B2 JP 3315893B2
- Authority
- JP
- Japan
- Prior art keywords
- pair
- axis
- coils
- permanent magnet
- leaf spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Description
【０００１】[0001]
【技術分野】本発明は、ミラー、プリズム等の光偏向手
段を電磁作用により駆動して偏向させる光学偏向装置の
電磁駆動装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic driving device of an optical deflecting device for deflecting a light deflecting means such as a mirror and a prism by driving it by electromagnetic action.
【０００２】[0002]
【従来の技術及びその問題点】この種の光学偏向装置の
電磁駆動装置として、例えばガルバノミラーが広く知ら
れている。このガルバノミラーは、ヨーク部材に弾性手
段を介して回動可能にミラーを支持し、このミラー（可
動部）側にコイルを、ヨーク部材側に一対の半割永久磁
石セグメントをそれぞれ固定してなっている。コイルに
正逆に電流を流すと、永久磁石との電磁作用により、ミ
ラーが回動し、該ミラーに入射する光ビームが偏向され
る。2. Description of the Related Art Galvano mirrors, for example, are widely known as electromagnetic driving devices for this type of optical deflection device. In this galvanometer mirror, a mirror is rotatably supported on a yoke member via elastic means, a coil is fixed on the mirror (movable portion) side, and a pair of half permanent magnet segments are fixed on the yoke member side. ing. When a current is applied to the coil in the opposite direction, the mirror rotates due to the electromagnetic action with the permanent magnet, and the light beam incident on the mirror is deflected.
【０００３】このような電磁駆動光学偏向装置は、小型
化と一層の高速駆動とが要求されている。駆動速度は、
基本的に、永久磁石の磁束密度Ｂとコイルの長さＬとの
積Ｂ・Ｌに依存する。永久磁石の磁束密度（大きさ）
は、装置全体の小型化の要求によって限界があるから、
コイル推力を大きくして駆動速度を上げるには、コイル
の有効長を長くすることが好ましい。ところが、細い線
を用いてコイル有効長を長くすると、抵抗、コイルイン
ダクタンスが増加し、電流が流れにくくなる。その結
果、高速駆動が得られない。また、コイルを分割するこ
とで抵抗を小さくすると、コイルの相互インダクタンス
が大きくなり同様に高速駆動が得られない。また、飽和
磁束を大きくするために、ヨーク部材も大型化せざるを
得ない。[0003] Such an electromagnetically driven optical deflector is required to be downsized and driven at a higher speed. The driving speed is
Basically, it depends on the product B · L of the magnetic flux density B of the permanent magnet and the length L of the coil. Magnetic flux density (size) of permanent magnet
Is limited by the demand for miniaturization of the entire device,
In order to increase the driving speed by increasing the coil thrust, it is preferable to increase the effective length of the coil. However, if the effective length of the coil is increased by using a thin wire, the resistance and the coil inductance increase, making it difficult for the current to flow. As a result, high-speed driving cannot be obtained. Further, if the resistance is reduced by dividing the coil, the mutual inductance of the coil increases, and similarly high-speed driving cannot be obtained. Further, in order to increase the saturation magnetic flux, the size of the yoke member must be increased.
【０００４】[0004]
【発明の目的】本発明は、従来装置についての以上の問
題意識に基づき、小型化と高速駆動との両者の要求に応
えることができる光学偏向装置の電磁駆動装置を得るこ
とを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide an electromagnetic driving device for an optical deflection device which can meet the requirements of both miniaturization and high-speed driving, based on the above awareness of the problems with the conventional device.
【０００５】[0005]
【発明の概要】本発明は、可動部に固定するコイルを一
対に分割した上で、流す電流の方向を逆にすれば、コイ
ルインダクタンスを小さくできること、及び一対のコイ
ルに流す電流の方向を逆にしたとき、可動部に同じ方向
の回動推力を与えるためには、一対のコイルに対応させ
て永久磁石も分割してその極性を逆にすればよいこと、
に着眼してなされたものである。SUMMARY OF THE INVENTION According to the present invention, by dividing a coil fixed to a movable portion into a pair and reversing the direction of a current flowing therethrough, the coil inductance can be reduced, and the direction of a current flowing through a pair of coils is reversed. In order to apply a rotational thrust in the same direction to the movable part, the permanent magnets may be divided corresponding to the pair of coils and their polarities may be reversed.
It was made with an eye on.
【０００６】本発明は、ヨーク部材に対し、弾性手段を
介して、弾性主軸線を中心に回動可能に可動部を軸支さ
せ、この可動部に光ビームを偏向させるための光偏向手
段を搭載し、可動部とヨーク部材にそれぞれ、電磁作用
により該可動部に弾性主軸線を中心とする正逆の回動運
動を生じさせるコイルと一対の半割永久磁石セグメント
とを固定してなる光学偏向装置の電磁駆動装置におい
て、可動部に、弾性主軸線を含みコイルの中心軸と直交
する平面の前後に位置させて、一対の互いに独立したコ
イルを固定し、ヨーク部材に、この一対のコイルに対応
させて、かつ弾性主軸線を含みコイルの中心軸と直交す
る平面の前後に位置させてそれぞれ、一対ずつの半割永
久磁石セグメントを固定するとともに、この前後の一対
ずつの半割永久磁石セグメントの極性をそれぞれ互いに
異ならせ（反対にし）、一対のコイルに、可動部の駆動
時に、互いに反対方向の電流を流すことを特徴としてい
る。光偏向手段は、例えば、反射型のミラー、あるいは
透過型のプリズムから構成することができる。According to the present invention, there is provided an optical deflecting means for pivotally supporting a movable portion about an elastic main axis with respect to a yoke member via an elastic means, and deflecting a light beam to the movable portion. An optical element comprising a coil and a pair of half-permanent permanent magnet segments which are mounted and fixed to a movable portion and a yoke member, respectively, to cause the movable portion to perform forward and reverse rotational movement about an elastic main axis by electromagnetic action. In the electromagnetic drive device of the deflecting device, a pair of mutually independent coils is fixed to a movable portion, before and after a plane including an elastic main axis and orthogonal to a central axis of the coil, and the pair of coils is fixed to a yoke member. , And a pair of half permanent magnet segments are fixed at the front and back of a plane including the elastic main axis and orthogonal to the center axis of the coil, respectively, and a pair of half permanent magnets before and after the pair are fixed. Segment, respectively made different from each other polarity (the opposite), the pair of coils, at the time of driving the movable portion, and wherein the flowing currents in opposite directions to each other. The light deflecting means can be composed of, for example, a reflection type mirror or a transmission type prism.
【０００７】[0007]
【発明の実施の形態】図１ないし図３は、本発明による
電磁駆動光学偏向装置の基本構成を示す図である。磁性
材料からなるヨーク部材（ベース部材）１０は、筒状部
１０Ｃを有している。この筒状部１０Ｃ内に位置する筒
状の可動部１２は、光偏向手段として、鎖線で示す反射
ミラー１２Ｒまたはプリズム１２Ｂを有している。反射
ミラー１２Ｒは、反射型の光偏向部材の例であり、プリ
ズム１２Ｂは透過型の光偏向部材の例である。反射ミラ
ー１２Ｒで反射する光ビームの例をＬ１で、プリズム１
２Ｂを透過する光ビームの例をＬ２で示した。1 to 3 show the basic structure of an electromagnetically driven optical deflection device according to the present invention. The yoke member (base member) 10 made of a magnetic material has a cylindrical portion 10C. The cylindrical movable portion 12 located inside the cylindrical portion 10C has a reflecting mirror 12R or a prism 12B indicated by a chain line as a light deflecting means. The reflection mirror 12R is an example of a reflection type light deflection member, and the prism 12B is an example of a transmission type light deflection member. An example of the light beam reflected by the reflection mirror 12R is L1, and the prism 1
An example of the light beam transmitted through 2B is indicated by L2.
【０００８】可動部１２は、筒状部１０Ｃと可動部１２
とを接続する弾性手段２２を介して、弾性主軸線Ｚ（Ｚ
軸）回りに弾性的に回動自在に支持されている。図で
は、弾性手段２２を最も簡単に太線で描いたが、可動部
１２をＺ軸回りに弾性的に回動自在に支持できるもので
あれば、その形態は問わない。[0008] The movable portion 12 includes a cylindrical portion 10C and the movable portion 12.
And an elastic main axis Z (Z
It is supported so as to be resiliently rotatable around an axis. In the figure, the elastic means 22 is drawn with a bold line in the simplest manner, but the form is not limited as long as the movable part 12 can be elastically supported to be rotatable around the Z axis.
【０００９】可動部１２の外周面には、一対の互いに独
立したコイル１２Ｃ、１２Ｄが固定されている。このコ
イル１２Ｃと１２Ｄは、該コイル１２Ｃ、１２Ｄの中心
軸と直交し、Ｚ軸を含む平面の前後に対称に配置したも
ので、同一のコイルからなっている。A pair of independent coils 12C and 12D are fixed to the outer peripheral surface of the movable portion 12. The coils 12C and 12D are orthogonal to the central axes of the coils 12C and 12D, are symmetrically arranged before and after a plane including the Z axis, and are made of the same coil.
【００１０】一方、ヨーク部材１０の筒状部１０Ｃの内
面には、このコイル１２Ｃと１２Ｄに対応（対向）させ
て、かつコイル１２Ｃ、１２Ｄの中心軸と直交し、Ｚ軸
を含む平面の前後に位置させてそれぞれ、一対ずつの半
環状の半割永久磁石セグメント１８と２０が固定されて
いる。一対の半割永久磁石セグメント１８は、それぞれ
互いに極性が逆であり、一対の半割永久磁石セグメント
２０も互いに極性が逆である。すなわち永久磁石セグメ
ント１８と２０はそれぞれ、その一方が内周側がＮ極で
外周側がＳ極、他方は内周側がＳ極で外周側がＮ極であ
る。そして、この半割永久磁石セグメントの極性は、コ
イル１２Ｃ、１２Ｄの中心軸と直交しＺ軸を含む平面の
前後に位置する半割永久磁石セグメント１８と２０間で
も互いに逆になるように分極処理されている。On the other hand, on the inner surface of the cylindrical portion 10C of the yoke member 10, the coils 12C and 12D correspond to (oppose) and are perpendicular to the center axes of the coils 12C and 12D, and are located in front of and behind a plane including the Z axis. , A pair of semi-circular half permanent magnet segments 18 and 20 are fixed respectively. The pair of half permanent magnet segments 18 have polarities opposite to each other, and the pair of half permanent magnet segments 20 also have polarities opposite to each other. That is, one of the permanent magnet segments 18 and 20 has an N pole on the inner circumference side and an S pole on the outer circumference side, and the other has an S pole on the inner circumference side and an N pole on the outer circumference side. The polarities of the half permanent magnet segments are reversed so that the polarities of the half permanent magnet segments 18 and 20 that are orthogonal to the central axes of the coils 12C and 12D and located before and after a plane including the Z axis are opposite to each other. Have been.
【００１１】上記構成の本装置は、可動部１２をＺ軸を
中心に正逆に回転駆動するとき、コイル１２Ｃと１２Ｄ
に、互いに反対方向に電流を流す。図３は、半割永久磁
石セグメント１８と２０の極性が図２の場合に、コイル
１２Ｃと１２Ｄに流す電流の方向と、可動部１２に生じ
る回動推力Ｆの一例を示している。勿論、コイル１２Ｃ
と１２Ｄに流す電流の方向を互いに逆にすれば、図３と
は逆の方向の回動推力Ｆが生じる。When the movable unit 12 is driven to rotate forward and backward around the Z axis, the coils 12C and 12D
Currents flow in opposite directions. FIG. 3 shows an example of the direction of the current flowing through the coils 12C and 12D and the rotational thrust F generated in the movable portion 12 when the polarities of the half permanent magnet segments 18 and 20 are as shown in FIG. Of course, coil 12C
If the directions of the currents flowing through the first and second directions are reversed, a rotational thrust F in the direction opposite to that in FIG. 3 is generated.
【００１２】このように一対のコイル１２Ｃと１２Ｄに
互いに反対方向の電流を流すと、コイルの相互インダク
タンスが小さくなる。また半割永久磁石セグメント１８
と２０の極性が互いに逆であると、半割永久磁石セグメ
ント１８、２０及びヨーク部材１０によって構成される
磁気回路が飽和しにくくなり、ヨーク部材１０（筒状部
１０Ｃ）の薄型化が可能である。When currents in opposite directions flow through the pair of coils 12C and 12D, the mutual inductance of the coils decreases. Also, the half permanent magnet segment 18
If the polarities of the yoke member 10 and the yoke member 20 are opposite to each other, the magnetic circuit formed by the half permanent magnet segments 18 and 20 and the yoke member 10 is less likely to be saturated, and the yoke member 10 (cylindrical portion 10C) can be made thinner. is there.
【００１３】次に、本発明をより具体化した好適な実施
形態を図４ないし図９について説明する。ベース部材１
０は、基台部１０Ａと、この基台部１０Ａから一体的に
直立したフレーム部１０Ｂとから成る。ベース部材１０
は本光学偏向装置が光学系の一構成要素として組み込ま
れる際に取付部として機能する。フレーム部１０Ｂは円
形開口部１０Ｃを郭成するような環状形態とされる。短
円筒形の可動部１２は、フレーム部１０Ｂの円形開口部
（筒状部）１０Ｃ内に配置され、弾性手段２２を介して
ベース部材１０のフレーム部１０Ｂによって支持され
る。Next, a preferred embodiment of the present invention will be described with reference to FIGS. Base member 1
Reference numeral 0 denotes a base portion 10A and a frame portion 10B that stands upright from the base portion 10A. Base member 10
Functions as a mounting part when the optical deflecting device is incorporated as a component of the optical system. The frame portion 10B has an annular shape defining the circular opening 10C. The short cylindrical movable part 12 is arranged in a circular opening (cylindrical part) 10C of the frame part 10B, and is supported by the frame part 10B of the base member 10 via the elastic means 22.
【００１４】ベース部材１０の前方側には略矩形状カバ
ー部材１４が適宜装着され、このカバー部材１４の中央
には円形開口部１４Ａが形成される。一方、ベース部材
１０の後方側には永久磁石用ホルダ部材１６が適宜装着
され、この永久磁石用ホルダ部材１６は短円筒形の形態
を持つホルダ部１６Ａと、このホルダ部１６Ａから一体
的に直径方向に張り出た一対の取付板１６Ｂとから成
る。ホルダ部１６Ａ内には、コイル１２Ｃ、１２Ｄの中
心軸と直交しＺ軸を含む平面の前後に位置させて設けた
一対ずつの半割永久磁石セグメント１８及び２０が収容
されている。これらの半割永久磁石セグメント１８及び
２０に対する分極処理は、図２で説明したのと同様であ
る。なお、図４では、一対のセグメント形永久磁石２０
の一方だけが描かれている。A substantially rectangular cover member 14 is appropriately mounted on the front side of the base member 10, and a circular opening 14A is formed in the center of the cover member 14. On the other hand, on the rear side of the base member 10, a permanent magnet holder member 16 is appropriately mounted. The permanent magnet holder member 16 has a holder portion 16A having a short cylindrical shape and a diameter integrally formed from the holder portion 16A. And a pair of mounting plates 16B projecting in the direction. A pair of half permanent magnet segments 18 and 20 are provided in the holder portion 16A, and each of the permanent magnet segments 18 and 20 is provided at a position perpendicular to the center axis of the coils 12C and 12D and before and after a plane including the Z axis. The polarization process for these half permanent magnet segments 18 and 20 is the same as that described with reference to FIG. In FIG. 4, a pair of segment-shaped permanent magnets 20 is shown.
Only one of them is drawn.
【００１５】一対の取付板１６Ｂは永久磁石用ホルダ部
材１６をベース部材１０のフレーム部１０Ｂに装着する
ために使用され、その装着時ホルダ部材１６Ａはフレー
ム部１０の円形開口部１０Ｃ内に収容されると共に二対
の半割永久磁石セグメント１８及び２０の周囲を覆うよ
うに配置される。なお、カバー部材１４及びホルダ部材
１６については好ましくはベース部材１０と同じ材料で
形成される。A pair of mounting plates 16B are used to mount the permanent magnet holder member 16 to the frame portion 10B of the base member 10. At the time of mounting, the holder member 16A is housed in the circular opening 10C of the frame portion 10. And is arranged so as to cover the periphery of the two pairs of half permanent magnet segments 18 and 20. Note that the cover member 14 and the holder member 16 are preferably formed of the same material as the base member 10.
【００１６】図５を参照すると、可動部１２が分解斜視
図として拡大されて図示され、この可動部１２は短円筒
形の形態を持つ光学偏向素子用ホルダ部材１２Ａと、こ
の光学偏向素子用ホルダ部材１２Ａ内に装着されたプリ
ズム１２Ｂとから成る。なお、本実施形態では、光学偏
向素子としてプリズム１２Ｂが使用されているが、その
他の光学偏向素子としては、例えば光反射用ミラーや光
ビーム偏向用ホログラム等が挙げられる。Referring to FIG. 5, the movable portion 12 is shown in an enlarged exploded perspective view. The movable portion 12 has an optical deflecting element holder member 12A having a short cylindrical shape, and the optical deflecting element holder. And a prism 12B mounted in the member 12A. In this embodiment, the prism 12B is used as an optical deflecting element, but other optical deflecting elements include, for example, a light reflecting mirror and a light beam deflecting hologram.
【００１７】図５に示すように、光学偏向素子用ホルダ
部材１２Ａは多角形の形態を持つ中央フランジ部１２Ａ
1 と、この中央フランジ部１２Ａ1 の両側から突出する
カラー部１２Ａ2 及び１２Ａ3 を包含する。可動部１２
は更に光学ホルダ部材１２Ａのカラー部１２Ａ2 及び１
２Ａ3 のそれぞれに装着されたコイル１２Ｃ及び１２Ｄ
を具備している。これらコイル１２Ｃ及び１２Ｄは、互
いに独立していて別個に電流を流すことができ、前述の
ように、半割永久磁石セグメント１８及び２０と協働し
て可動部１２を駆動させるための駆動機構として機能す
る。なお、図５では、コイル１２Ｃ及び１２Ｄは環状リ
ング形として図示されているが、各コイル１２Ｃ、１２
Ｄは導線を環状リング形に巻回することにより得られる
ものであり、これらのコイル１２Ｃ、１２Ｄへの給電線
の図示は省かれている。As shown in FIG. 5, the optical deflection element holder member 12A has a polygonal central flange portion 12A.
Include 1, the collar portion 12A 2 and 12A 3 projecting from both sides of the central flange portion 12A 1. Movable part 12
Are the collar portions 12A 2 and 1 of the optical holder member 12A.
Coil 12C and 12D mounted on each of 2A 3
Is provided. These coils 12C and 12D are independent of each other and can supply current separately, and as described above, act as a driving mechanism for driving the movable portion 12 in cooperation with the half permanent magnet segments 18 and 20. Function. In FIG. 5, the coils 12C and 12D are shown as annular rings, but the coils 12C and 12D
D is obtained by winding a conductive wire in an annular ring shape, and illustration of power supply lines to these coils 12C and 12D is omitted.
【００１８】また、可動部１２は更に光学偏向素子用ホ
ルダ部材１２Ａの中央フランジ部１２Ａ1 の直径方向の
両側に取り付けられた板ばね用カップリング１２Ｅを具
備する。なお、図５には片側の板ばね用カップリング１
２Ｅだけが図示されているが、同様な板ばね用カップリ
ングは中央フランジ部１２Ａ1 の直径方向の反対側にも
設けられる。板ばね用カップリング１２Ｅは中央フラン
ジ部１２Ａ1 に固定されるようになった固定カップリン
グ部１２Ｅ1 と、この固定カップリング部１２Ｅ1 に対
して着脱自在となった可動カップリング部１２Ｅ2 とか
ら成る。Further, the movable unit 12 further comprises a leaf spring coupling 12E mounted on either side of the central flange portion 12A 1 in the diameter direction of the optical deflection element holder member 12A. FIG. 5 shows a coupling 1 for a leaf spring on one side.
2E but it is shown coupling a similar leaf spring is also provided on the opposite side of the diametrical direction of the central flange portion 12A 1. Coupling 12E for the leaf spring and the stationary coupling part 12E1 adapted to be fixed to the central flange portion 12A 1, consisting of freely and since the movable coupling portion 12E2 Metropolitan detachable from the fixed coupling part 12E1.
【００１９】各板ばね用カップリング１２Ｅには複合板
ばね体（弾性手段）２２が連結され、この複合板ばね体
２２は本実施形態では４枚の板ばね要素２２Ａから構成
される。図６に詳しく示すように、本実施形態では、Ｈ
字状板ばね素材にそれを半分割するような態様でスリッ
ト２４が入れられ、これにより該Ｈ字状板ばね素材に一
対の板ばね要素２２Ａが形成される。このような２枚の
Ｈ字状板ばね素材をそれらのスリット２４に沿って組み
合わせることにより、図５に示すような複合板ばね体
（弾性手段）２２が得られ、このとき複合板ばね体２２
にはかかるスリット２４の長手方向中心軸線の回りに４
枚の板ばね要素２２Ａが90度の角度で等間隔に配置され
る。A composite leaf spring body (elastic means) 22 is connected to each leaf spring coupling 12E. In this embodiment, the composite leaf spring body 22 is composed of four leaf spring elements 22A. As shown in detail in FIG. 6, in the present embodiment, H
A slit 24 is formed in the L-shaped leaf spring material in such a manner as to divide it in half, thereby forming a pair of leaf spring elements 22A in the H-shaped leaf spring material. By combining such two H-shaped leaf spring materials along their slits 24, a composite leaf spring body (elastic means) 22 as shown in FIG. 5 is obtained.
Around the longitudinal central axis of the slit 24.
The leaf spring elements 22A are arranged at regular intervals at an angle of 90 degrees.
【００２０】図５に示すように、板ばね用カップリング
１２Ｅの反対側には別の板ばね用カップリング２６が設
けられ、この板ばね用カップリング２６は、ベース部材
１０のフレーム部１０Ｂに固定される固定カップリング
部２６1 と、この固定カップリング部２６1 に対して着
脱自在な可動カップリング部２６2 とから成る。板ばね
用カップリング２６は、固定カップリング部２６1 が貫
通孔を備えた取付ブロック片２８と一体化されている点
を除けば、上述した板ばね用カップリング１２Ｅの構成
と同じである。As shown in FIG. 5, another leaf spring coupling 26 is provided on the opposite side of the leaf spring coupling 12E, and this leaf spring coupling 26 is attached to the frame portion 10B of the base member 10. and fixing the coupling portion 26 1 which is fixed, consisting of freely movable coupling portion 26 2 which detachable from the fixed coupling part 26 1. Cup plate spring ring 26, except that the fixing coupling portion 26 1 is integrated with the mounting block piece 28 having a through-hole is the same as the configuration of the coupling 12E for leaf springs described above.
【００２１】図７に更に詳しく図示するように、固定カ
ップリング部２６1 は取付ブロック片２８から一体的に
突出する管状短軸部材２６Ａとして形成され、この管状
短軸部材２６Ａの自由端面からは４本の爪要素２６Ｂが
突出しる。４本の爪要素２６Ｂは管状短軸部材２６Ａの
円周方向に沿って90度の角度で等間隔に配置され、各爪
要素２６Ａの横断面は図示するようにセグメント形状と
なっている。管状短軸部材２６Ａの側方部には直径方向
に互いに向かい合った一対の平坦面２６Ｃが形成され
る。なお、図７にあっては、一対の平坦面２６Ｃの一方
だけが描かれている。As shown in more detail in FIG. 7, the fixed coupling part 26 1 is formed as a tubular short shaft member 26A integrally projecting from the mounting block piece 28, and from the free end face of the tubular short shaft member 26A. Four claw elements 26B protrude. The four claw elements 26B are arranged at regular intervals at an angle of 90 degrees along the circumferential direction of the tubular short axis member 26A, and the cross section of each claw element 26A is segment-shaped as shown. A pair of flat surfaces 26C diametrically opposed to each other are formed on the side of the tubular short shaft member 26A. In addition, in FIG. 7, only one of the pair of flat surfaces 26C is illustrated.
【００２２】一方、可動カップリング部２６2 も管状短
軸部材２６Ｄとして形成されるが、その直径は管状短軸
部材２６Ａよりも大きく、管状短軸部材２６Ａは管状短
軸部材２６Ｄ内に緩く嵌合し得るようになっている。管
状短軸部材２６Ａの場合と同様に、管状短軸部材２６Ｄ
の一方の自由端面からは４本の爪要素２６Ｅが突出し、
これら４本の爪要素２６Ｅは管状短軸部材２６Ｄの円周
方向に沿って90度の角度で等間隔に配置され、各爪要素
２６Ｅの横断面は図示するようにセグメント形状となっ
ている。図８から明らかなように、管状短軸部材２６Ｄ
の側方部には直径方向に互いに向かい合った二対の平坦
面２６Ｆ及び２６Ｇが形成される。なお、図７では、二
対の平坦面２６Ｆ及び２６Ｇのそれぞれの一方だけが描
かれている。On the other hand, is also movable coupling portion 26 2 is formed as a tubular minor axis member 26D, the diameter of which is larger than the tubular minor axis member 26A, the tubular short axis member 26A is fitted loosely in a tubular minor axis member 26D It is possible to match. As in the case of the tubular short shaft member 26A, the tubular short shaft member 26D
Four claw elements 26E protrude from one free end face of
These four claw elements 26E are arranged at equal intervals at an angle of 90 degrees along the circumferential direction of the tubular short axis member 26D, and the cross section of each claw element 26E has a segment shape as shown. As is clear from FIG. 8, the tubular short shaft member 26D
Are formed with two pairs of flat surfaces 26F and 26G diametrically opposed to each other. Note that FIG. 7 illustrates only one of each of the two pairs of flat surfaces 26F and 26G.
【００２３】図８に示すように、管状短軸部材２６Ｄに
形成された二対の平坦面２６Ｆ及び２６Ｇにはそれぞれ
ねじ孔２６Ｈ及び２６Ｉが形成され、各一対のねじ孔２
６Ｈ、２６Ｉは管状短軸部材２６Ｄの長手方向中心軸線
に対して反対方向にずらされて偏心させられる。即ち、
図７及び図８に示す例では、図７で見ることのできる平
坦面２６Ｆに形成されたねじ孔２６Ｈは管状短軸部材２
６Ｄの４つの爪要素２６Ｅ側から見たとき反時計方向側
にずらされて位置させられ、また該平坦面２６Ｆに対し
て直径方向の反対側の平坦面２６Ｆ（図８）に形成され
たねじ孔２６Ｈも反時計方向にずらされて位置させられ
る。なお、図８から明らかなように、他方の一対の平坦
面２６Ｇに形成された一対のねじ孔２６Ｉについても上
述した一対のねじ孔２６Ｈと同じことが言える。As shown in FIG. 8, two pairs of flat surfaces 26F and 26G formed in the tubular short shaft member 26D are formed with screw holes 26H and 26I, respectively.
6H and 26I are eccentrically shifted in opposite directions with respect to the longitudinal center axis of the tubular short shaft member 26D. That is,
In the example shown in FIGS. 7 and 8, the screw hole 26H formed in the flat surface 26F which can be seen in FIG.
When viewed from the four claw elements 26E side of 6D, the screw is shifted counterclockwise and formed on a flat surface 26F (FIG. 8) diametrically opposite to the flat surface 26F. The hole 26H is also displaced counterclockwise. As is clear from FIG. 8, the same can be said for the pair of screw holes 26I formed in the other pair of flat surfaces 26G as in the above-described pair of screw holes 26H.
【００２４】従って、可動カップリング部２６2 を固定
カップリング部２６1 を装着させて双方の爪要素２６Ｂ
及び２６Ｅを図８に示すような態様で互いにそれぞれ係
合させた後に一対の止めねじ要素３０（図７）を例えば
一対のねじ孔２６Ｈにねじ込むと、該止めねじ要素３０
の先端が先ず固定カップリング部２６1 の平坦面２６Ｃ
に当接し、更に止めねじ要素３０をねじ込むことによ
り、可動カップリング部２６2 及び固定カップリング部
２６1 は共に互いに反対方向の回動力を受け、これによ
り爪要素２６Ｂ及び２６Ｅは互いにその係合面を互いに
押圧し合うように作用させられる。爪要素２６Ｂ及び２
６Ｅ間のそれぞれに複合板ばね体２２の各板ばね要素２
２Ａの該当端部を挟み込んだ状態で上述したような一対
の止めねじ要素３０のねじ込み操作を行うことにより、
複合板ばね体２２は板ばね用カップリング２６に固定連
結される。Therefore, the movable coupling part 26 2 is attached to the fixed coupling part 26 1 , and the two claw elements 26 B
8 and 26E are engaged with each other in a manner as shown in FIG. 8, and then a pair of setscrew elements 30 (FIG. 7) are screwed into, for example, a pair of screw holes 26H.
Is the flat surface 26C of the fixed coupling part 26 1 first.
Contact, by further screwing the set screw element 30, the movable coupling part 26 2 and the fixed coupling part 26 1 are both subjected to the opposite direction of the turning force to one another, the engagement thereby pawl elements 26B and 26E each other in The surfaces are urged against each other. Claw elements 26B and 2
6E each leaf spring element 2 of the composite leaf spring body 22
By performing the screwing operation of the pair of setscrew elements 30 as described above while sandwiching the corresponding end of 2A,
The composite leaf spring body 22 is fixedly connected to a leaf spring coupling 26.
【００２５】なお、上述したように、板ばね用カップリ
ング２６の構成自体は板ばね用カップリング１２Ｅと同
じであり、複合板ばね体２２は同様な態様で板ばね用カ
ップリング１２Ｅに対して固定連結される。As described above, the configuration of the leaf spring coupling 26 is the same as that of the leaf spring coupling 12E, and the composite leaf spring body 22 is similar to the leaf spring coupling 12E in the same manner. Fixedly connected.
【００２６】図４には可動部１２が組み立てられた状態
で示され、このとき一対の板ばね用カップリング１２Ｅ
の各々には複合板ばね体２２の一端側が固定連結される
と共に該複合板ばね体２２の他端側には板ばね用カップ
リング２６が固定連結されている。各板ばね用カップリ
ング２６の固定カップリング部２６2 の取付ブロック片
２８にはその貫通孔にボルト要素３２が挿通させられ、
各ボルト要素３２は更にベース部材１０のフレーム１０
Ｂの直径方向に形成されたねじ孔１０Ｄに螺着される。
図４から明らかなように、各ねじ孔１０Ｄはフレーム部
１０Ｂに形成された窪み部に配置され、各ボルト要素３
２による取付ブロック片２８の螺着時、その取付ブロッ
ク片２８はかかる窪み部に収容される。FIG. 4 shows the movable part 12 in an assembled state. At this time, a pair of leaf spring couplings 12E is provided.
Is fixedly connected to one end of the composite leaf spring body 22, and a leaf spring coupling 26 is fixedly connected to the other end of the composite leaf spring body 22. The fixed coupling part 26 2 of the mounting block piece 28 of each plate spring coupling 26 is a bolt element 32 is inserted into the through hole,
Each bolt element 32 is further connected to the frame 10 of the base member 10.
B is screwed into a screw hole 10D formed in the diameter direction.
As is clear from FIG. 4, each screw hole 10D is arranged in a recess formed in the frame portion 10B, and each bolt element 3D is formed.
When the mounting block piece 28 is screwed into the mounting block piece 2, the mounting block piece 28 is accommodated in the recess.
【００２７】かくして、可動部１２は一対の複合板ばね
体２２を介してベース部材１０のフレーム部１０Ｂに支
持されることになり、このとき可動部１２は板ばね用カ
ップリング１２Ｅ及び２６の長手方向中心軸線即ち複合
板ばね体２２の長手方向中心軸線の回りで最も動き易く
なる。詳述すると、図９に示すように、複合板ばね体２
２の中心を原点とする三次元座標系を設定し、このとき
一方の一対の板ばね要素２２ＡがＸ−Ｚ平面内に位置
し、他方の一対の板ばね要素２２ＡがＹ−Ｚ平面内に位
置するとした場合、Ｘ軸回り（α）のコンプライアンス
とＹ軸回り（β）のコンプライアンスとは互いに実質的
に同じであり、しかもＺ軸回り（γ）のコンプライアン
スと比べると大巾に小さなものとなる。要するに、図示
するような複合板ばね体２２の構成にあっては、高コン
プライアンス性はＺ軸回り（γ）だけに得られる。Thus, the movable portion 12 is supported by the frame portion 10B of the base member 10 via the pair of composite leaf spring bodies 22, and at this time, the movable portion 12 is provided on the longitudinal sides of the leaf spring couplings 12E and 26. It is most easy to move around the directional center axis, that is, the longitudinal center axis of the composite leaf spring body 22. More specifically, as shown in FIG.
A three-dimensional coordinate system having the origin at the center of 2 is set. At this time, one pair of leaf spring elements 22A is located in the XZ plane, and the other pair of leaf spring elements 22A is located in the YZ plane. If the position, the compliance of the compliance and Y-axis of the X-axis (α) (β) are substantially identical to one another, yet greatly to small ones compared with the compliance of the Z-axis (gamma) Becomes In short, in the configuration of the composite leaf spring body 22 as shown, high compliance is obtained only around the Z axis (γ).
【００２８】一方、可動部１２のコイル１２Ｃ及び１２
Ｄが二対の半割永久磁石セグメント１８及び２０によっ
て得られる磁界内で通電されると、可動部１２はフレミ
ングの左手の法則によりＺ軸まわりでの回動力を受け、
その回動方向はコイル１２Ｃ及び１２Ｄに対する通電方
向に依存する。要するに、Ｚ軸が可動部１２の回動軸線
即ち弾性主軸線とされる。On the other hand, the coils 12C and 12C of the movable portion 12
When D is energized in the magnetic field provided by the two pairs of half-permanent permanent magnet segments 18 and 20, the movable part 12 receives a rotating force about the Z-axis according to Fleming's left-hand rule,
The direction of rotation depends on the direction of energization of the coils 12C and 12D. In short, the Z axis is the rotation axis of the movable section 12, that is, the elastic main axis.
【００２９】以上のような複合板ばね体２２の配置構成
によれば、可動部１２の弾性主軸線（Ｚ軸）回りだけに
高コンプライアンス性を与えることができるので、可動
部１２の駆動時に外部振動のような外力が光学偏向装置
に加えられたとしても、可動部１２は弾性主軸線（Ｚ
軸）回りだけで安定して回動することができる。According to the arrangement configuration of the composite leaf spring body 22 described above, only around the elastic main axis (Z-axis) of the movable portion 12.
Since high compliance can be provided, even when an external force such as external vibration is applied to the optical deflecting device when the movable unit 12 is driven, the movable unit 12 can be moved along the elastic main axis (Z
It can rotate stably only around the axis).
【００３０】好ましくは、可動部１２の重心がその弾性
主軸線（Ｚ軸）上に実質的に位置するように該可動部１
２の全体の質量バランスが配慮される。即ち、可動部１
２の弾性主軸線（Ｚ軸）を該可動部１２の慣性主軸線に
実質的に一致させることが好ましく、この場合には可動
部１２での構造連成振動の発生を効果的に排除すること
が可能である。Preferably, the movable unit 1 is arranged such that the center of gravity of the movable unit 12 is substantially located on its elastic main axis (Z axis).
2, the overall mass balance is taken into account. That is, the movable unit 1
Preferably, the elastic main axis (Z axis) of the second section 2 substantially coincides with the inertia main axis of the movable section 12, and in this case, occurrence of structurally coupled vibration in the movable section 12 is effectively eliminated. Is possible.
【００３１】また、好ましくは、コイル１２Ｃ及び１２
Ｄの通電時に可動部１２が回動力を受ける際の回動中心
がその弾性主軸線（Ｚ軸）上に実質的に位置するように
該可動部１２の全体の質量バランスが配慮される。即
ち、可動部１２の弾性主軸線（Ｚ軸）を該可動部１２の
推力主軸線に実質的に一致させることが好ましく、この
場合には可動部１２での推力連成振動の発生を効果的に
排除することが可能である。Preferably, the coils 12C and 12C
Consideration is given to the overall mass balance of the movable part 12 so that the center of rotation when the movable part 12 receives rotational power during the energization of D is substantially located on its elastic main axis (Z axis). That is, it is preferable that the elastic main axis (Z axis) of the movable part 12 substantially coincides with the thrust main axis of the movable part 12. In this case, the generation of the thrust coupled vibration in the movable part 12 is effective. Can be eliminated.
【００３２】さらに、可動部１２の弾性主軸線（Ｚ
軸）、慣性主軸線及び推力主軸線の三者は実質的に一致
させることが好ましい。この場合には可動部１２での構
造連成振動及び推力連成振動の双方の発生を効果的に排
除することが可能となる。Further, the elastic main axis (Z
It is preferable that the three axes (axis), the principal axis of inertia and the principal axis of thrust substantially coincide. In this case, it is possible to effectively eliminate both the structural coupled vibration and the thrust coupled vibration in the movable portion 12.
【００３３】[0033]
【発明の効果】本発明による光学偏向装置の電磁駆動装
置によれば、可動部側のコイルを独立した一対のコイル
に分割し、ヨーク部材側に固定する半割永久磁石セグメ
ントも、この一対のコイルに対応させて一対ずつを設け
てその極性を互いに逆にし、駆動時には一対のコイルに
逆方向の電流を流すようにしたから、一対のコイルの相
互インダクタンスを小さくして駆動速度を高めることが
できる。また、飽和磁束を大きくするためにヨーク部材
を大型化する必要がなく、よって小型化ができる。According to the electromagnetic deflector of the optical deflecting device according to the present invention, the coil on the movable portion side is divided into a pair of independent coils, and the half permanent magnet segment fixed to the yoke member side is also a pair of permanent magnet segments. A pair of coils is provided for each pair, the polarities are reversed, and a current in the opposite direction is applied to the pair of coils during driving, so that the mutual inductance of the pair of coils can be reduced to increase the driving speed. it can. Further, it is not necessary to increase the size of the yoke member in order to increase the saturation magnetic flux, so that the size can be reduced.
【図１】本発明による光学偏向装置の電磁駆動装置の一
実施形態を示す正面図である。FIG. 1 is a front view showing an embodiment of an electromagnetic driving device of an optical deflection device according to the present invention.
【図２】図２のII−II線に沿う断面図である。FIG. 2 is a sectional view taken along the line II-II in FIG.
【図３】図２から一対のコイルを有する可動体を取り出
した断面図である。FIG. 3 is a sectional view of a movable body having a pair of coils taken out of FIG. 2;
【図４】本発明による光学偏向装置の電磁駆動装置をよ
り具体的にした実施形態の分解斜視図である。FIG. 4 is an exploded perspective view of a more specific embodiment of the electromagnetic driving device of the optical deflection device according to the present invention.
【図５】図４に示した装置の可動部の分解斜視図であ
る。FIG. 5 is an exploded perspective view of a movable portion of the device shown in FIG.
【図６】図５に示した可動部を支持する複合板ばね体
（弾性部材）の分解斜視図である。FIG. 6 is an exploded perspective view of a composite leaf spring body (elastic member) supporting the movable portion shown in FIG.
【図７】図６に示した複合板ばね体連結するための板ば
ね用カップリングの分解斜視図である。FIG. 7 is an exploded perspective view of a leaf spring coupling for connecting the composite leaf spring body shown in FIG. 6;
【図８】図７に示した板ばね用カップリングの端面図で
ある。FIG. 8 is an end view of the leaf spring coupling shown in FIG. 7;
【図９】図６に示した複合板ばね体の組立斜視図であっ
て、その特性を説明するための説明図である。FIG. 9 is an assembled perspective view of the composite leaf spring body shown in FIG. 6, and is an explanatory diagram for explaining its characteristics.
１０ ベース部材（ヨーク部材） １０Ａ 基台部 １０Ｂ フレーム部 １０Ｃ 円形開口部（筒状部） １２ 可動部 １２Ｒ 反射ミラー（光偏向部材） １２Ｂ プリズム（光偏向部材） １２Ａ 光学偏向素子用ホルダ部材 １２Ａ1 中央フランジ部 １２Ａ2 、１２Ａ3 カラー部 １２Ｃ、１２Ｄ コイル １８、２０ 永久磁石 ２２ 弾性手段 Ｚ 弾性主軸線DESCRIPTION OF SYMBOLS 10 Base member (yoke member) 10A Base part 10B Frame part 10C Circular opening (cylindrical part) 12 Movable part 12R Reflection mirror (light deflecting member) 12B Prism (light deflecting member) 12A Optical deflecting element holder member 12A 1 Central flange portion 12A 2 , 12A 3 Collar portion 12C, 12D Coil 18, 20 Permanent magnet 22 Elastic means Z Elastic main axis
Claims (3)
弾性主軸線を中心に回動可能に可動部を軸支させ、 この可動部に光ビームを偏向させるための光偏向手段を
搭載し、 上記可動部とヨーク部材にそれぞれ、電磁作用により該
可動部に上記弾性主軸線を中心とする正逆の回動運動を
生じさせるコイルと一対の半割永久磁石セグメントとを
固定してなる光学偏向装置の電磁駆動装置において、 上記可動部に、上記弾性主軸線を含みコイルの中心軸と
直交する平面の前後に位置させて、一対の互いに独立し
たコイルを固定し、 上記ヨーク部材に、この一対のコイルに対応させて、か
つ上記弾性主軸線を含みコイルの中心軸と直交する平面
の前後に位置させてそれぞれ、一対ずつの半割永久磁石
セグメントを固定するとともに、この前後の一対ずつの
半割永久磁石セグメントの極性をそれぞれ互いに異なら
せ、 上記一対のコイルに、上記可動部の駆動時に、互いに反
対方向の電流を流すことを特徴とする光学偏向装置の電
磁駆動装置。1. The method according to claim 1, further comprising:
The movable portion is rotatably supported about an elastic main axis, and a light deflecting means for deflecting a light beam is mounted on the movable portion. The movable portion and the yoke member are each electromagnetically actuated by the movable portion. An electromagnetic drive device for an optical deflecting device, comprising: a coil generating a forward / reverse rotational movement about the elastic main axis and a pair of half-permanent permanent magnet segments. A pair of coils independent of each other are fixed before and after a plane including the wire and orthogonal to the center axis of the coil, and the yoke member includes a coil corresponding to the pair of coils and including the elastic main axis. A pair of half permanent magnet segments are fixed to each other before and after a plane orthogonal to the central axis of the pair, and the polarities of the pair of half permanent magnet segments before and after An electromagnetic driving device for an optical deflecting device, characterized in that currents in opposite directions flow through the pair of coils when the movable portion is driven.
１記載の電磁駆動装置。2. The electromagnetic driving device according to claim 1, wherein said light deflecting means is a mirror.
項１記載の電磁駆動装置。3. The electromagnetic driving device according to claim 1, wherein said light deflecting means is a prism.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13689397A JP3315893B2 (en) | 1997-05-27 | 1997-05-27 | Electromagnetic drive for optical deflection device |
| DE19823725A DE19823725B4 (en) | 1997-05-27 | 1998-05-27 | Optical deflection device |
| US09/085,232 US6266300B1 (en) | 1997-05-27 | 1998-05-27 | Optical deflection device having electromagnetic driver assembled therein for rotationally driving optical deflection element |
| GB9811392A GB2327131B (en) | 1997-05-27 | 1998-05-27 | Optical deflection device having electromagnetic driver assembled therein for rotationally driving optical deflection element |
| GB0129281A GB2367112B (en) | 1997-05-27 | 1998-05-27 | Optical deflection device having electromagnetic driver assembled therein for rrotationally driving optical deflection element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13689397A JP3315893B2 (en) | 1997-05-27 | 1997-05-27 | Electromagnetic drive for optical deflection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10333071A JPH10333071A (en) | 1998-12-18 |
| JP3315893B2 true JP3315893B2 (en) | 2002-08-19 |
Family
ID=15186026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13689397A Expired - Fee Related JP3315893B2 (en) | 1997-05-27 | 1997-05-27 | Electromagnetic drive for optical deflection device |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6266300B1 (en) |
| JP (1) | JP3315893B2 (en) |
| DE (1) | DE19823725B4 (en) |
| GB (1) | GB2327131B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3315893B2 (en) * | 1997-05-27 | 2002-08-19 | 旭光学工業株式会社 | Electromagnetic drive for optical deflection device |
| JP2002287046A (en) * | 2001-03-23 | 2002-10-03 | Miyota Kk | Planar type galvano-mirror |
| EP1491678B8 (en) * | 2002-03-29 | 2009-04-22 | Kazari-Ichi Co., Ltd. | Composite comprising heat-resistant fiber and siloxane polymer |
| CN110792048B (en) * | 2019-11-11 | 2021-06-29 | 潘倩韵 | Prevent far-reaching light formula new forms of energy road reflector |
| CN116893489A (en) * | 2022-04-06 | 2023-10-17 | 奥普托图尼瑞士股份公司 | Carrier arrangement for an optical device |
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| US3624574A (en) * | 1969-11-24 | 1971-11-30 | Gen Scannings Inc | Actuator |
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| JPS5848033U (en) * | 1981-09-22 | 1983-03-31 | 萬世工業株式会社 | lens drive device |
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| JPS5890174A (en) * | 1981-11-25 | 1983-05-28 | Tokyo Keiki Co Ltd | Accelerometer |
| JPS6332755A (en) * | 1986-07-28 | 1988-02-12 | Toshiba Corp | Magneto-optical head |
| US4855982A (en) * | 1987-05-18 | 1989-08-08 | Eastman Kodak Company | Lens position-sensing apparatus for optical recording system |
| US5455706A (en) * | 1988-04-18 | 1995-10-03 | Brotz; Gregory R. | Mirror-moving system |
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| US4998802A (en) * | 1988-06-03 | 1991-03-12 | Kabushiki Kaisha Sankyo Seiki Seisakusho | Objective lens driving device in an optical pickup |
| US5486944A (en) * | 1989-10-30 | 1996-01-23 | Symbol Technologies, Inc. | Scanner module for symbol scanning system |
| US5099352A (en) * | 1989-10-13 | 1992-03-24 | Mitsubishi Denki Kabushiki Kaisha | Reflector oscillating apparatus |
| US5870219A (en) * | 1997-01-20 | 1999-02-09 | Geo. Labs, Inc. | Ultra compact scanning system for a wide range of speeds, angles and field depth |
| JPH0728585Y2 (en) | 1990-12-17 | 1995-06-28 | 旭光学工業株式会社 | Galvano mirror device |
| JP2542148Y2 (en) | 1990-12-17 | 1997-07-23 | 旭光学工業株式会社 | Galvano mirror device |
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| US5463612A (en) * | 1991-12-05 | 1995-10-31 | Canon Kabushiki Kaisha | Objective lens drive apparatus used in optical information recording/reproducing apparatus |
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| JP3315893B2 (en) * | 1997-05-27 | 2002-08-19 | 旭光学工業株式会社 | Electromagnetic drive for optical deflection device |
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- 1997-05-27 JP JP13689397A patent/JP3315893B2/en not_active Expired - Fee Related
-
1998
- 1998-05-27 GB GB9811392A patent/GB2327131B/en not_active Expired - Fee Related
- 1998-05-27 DE DE19823725A patent/DE19823725B4/en not_active Expired - Fee Related
- 1998-05-27 US US09/085,232 patent/US6266300B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10333071A (en) | 1998-12-18 |
| GB9811392D0 (en) | 1998-07-22 |
| DE19823725A1 (en) | 1998-12-03 |
| GB2327131B (en) | 2002-02-20 |
| DE19823725B4 (en) | 2004-12-09 |
| US6266300B1 (en) | 2001-07-24 |
| GB2327131A (en) | 1999-01-13 |
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