JP3300151B2 - Manufacturing method of polishing laminate - Google Patents
Manufacturing method of polishing laminateInfo
- Publication number
- JP3300151B2 JP3300151B2 JP66494A JP66494A JP3300151B2 JP 3300151 B2 JP3300151 B2 JP 3300151B2 JP 66494 A JP66494 A JP 66494A JP 66494 A JP66494 A JP 66494A JP 3300151 B2 JP3300151 B2 JP 3300151B2
- Authority
- JP
- Japan
- Prior art keywords
- laminate
- adhesive
- adhesive sheet
- polishing
- prepreg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、液晶ディスプレイ用ガ
ラス、シリコンウエハなどを研磨する用途に使用される
紙フェノール、ガラスエポキシなどの積層板の製造方法
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a laminate of paper phenol, glass epoxy or the like used for polishing glass for liquid crystal displays, silicon wafers and the like.
【０００２】[0002]
【従来の技術】従来、液晶ディスプレイ用ガラスやシリ
コンウエハなどを紙フェノール或いはガラスエポキシ積
層板で研磨するときには、これら積層板を保持部材に貼
り付けて使用している。積層板を保持部材に貼り付けて
研磨治具を製作する工程は、まず、積層板に接着剤のプ
ライマ処理を施す。次いで、積層板をＮＣ加工機などで
所定の寸法、形状に裁断加工し、保持部材と裁断加工し
た前記積層板を加熱加圧により接着する工程を経る。し
かし、前記の加工工程の中で、保持部材と積層板の接着
のために行なうプライマ処理は、プライマとして使用す
る接着剤の特性が変動しやすく、接着性バラツキが問題
となっている。さらに、プライマ接着剤の特性管理に非
常に工数がかるという問題がある。このため、近年、プ
ライマ処理の代わりに熱可塑性樹脂などからなる接着シ
ートを積層板表面に加熱加圧により貼り合わせることが
行なわれるようになった。2. Description of the Related Art Conventionally, when polishing glass for a liquid crystal display or a silicon wafer with a paper phenol or glass epoxy laminate, these laminates are attached to a holding member for use. In the step of manufacturing the polishing jig by attaching the laminate to the holding member, first, the laminate is subjected to an adhesive primer treatment. Next, the laminated board is cut into a predetermined size and shape by an NC machine or the like, and the holding member and the cut laminated board are bonded by heating and pressing. However, in the above-mentioned processing, in the primer treatment performed for bonding the holding member and the laminate, the characteristics of the adhesive used as the primer tend to fluctuate, and there is a problem of uneven adhesion. Further, there is a problem that it takes a lot of man-hours to control the characteristics of the primer adhesive. For this reason, in recent years, instead of the primer treatment, an adhesive sheet made of a thermoplastic resin or the like has been bonded to the surface of the laminate by heating and pressing.
【０００３】[0003]
【発明が解決しようとする課題】上記接着シートを積層
板表面に貼り合わせる技術では、プライマに関係する問
題点は解消したが、樹脂の硬化がＣステ−ジまで進んだ
積層板と接着シートの接着性は十分ではない。接着シー
トを介して保持部材に貼り付けた積層板が、液晶ディス
プレイ用ガラスやシリコンウエハなどの研磨中に剥離し
たり、研磨に使用する薬液などが積層板と保持部材の界
面に浸入するという問題点があった。本発明が解決しよ
うとする課題は、保持部材との接着性に優れ、且つ接着
性バラツキも少ない研磨研磨用途として適した接着層付
き積層板を製造することである。In the above-mentioned technique of bonding the adhesive sheet to the surface of the laminate, the problem relating to the primer has been solved, but the curing of the resin and the laminate having progressed to the C stage have been completed. Adhesion is not sufficient. The problem that the laminated plate adhered to the holding member via the adhesive sheet is peeled off during polishing of glass for liquid crystal display or silicon wafer, or a chemical solution used for polishing enters the interface between the laminated plate and the holding member. There was a point. The problem to be solved by the present invention is to produce a laminated board with an adhesive layer which is excellent in adhesiveness to a holding member and has little variation in adhesiveness and is suitable for use in polishing and polishing.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するため
に、本発明に係る製造法は、プリプレグ１枚若しくは複
数枚からなるプリプレグ構成体を加熱加圧成形する方法
において、前記プリプレグ構成体の片側の最外層に熱可
塑性接着シートを配置し加熱加圧積層することを特徴と
する。熱可塑性接着シートは、好ましくは、ポリウレタ
ン或いは変性ポリウレタンからなるものである。In order to solve the above-mentioned problems, a manufacturing method according to the present invention is directed to a method of heating and pressing a prepreg structure comprising one or more prepregs, wherein A thermoplastic adhesive sheet is disposed on the outermost layer on one side and laminated by heating and pressing. The thermoplastic adhesive sheet is preferably made of polyurethane or modified polyurethane.
【０００５】[0005]
【作用】本発明の特徴は、接着シートを積層板を成形す
る工程において一体化する点にある。この特徴により、
以下の作用が生じる。 （１）従来の方法では、積層板を構成する熱硬化性樹脂
が不溶不融のＣステージになっているため、これに接着
シートを貼り付けても積層板と接着シートの間の接着性
が劣り、また接着力にもバラツキがあった。本発明に係
る方法によれば、プリプレグの樹脂がＢステージのとき
に接着シートを一体化するため、プリプレグと接着シー
トの各々の樹脂が成形中に相溶、或いは所定の架橋を生
じるために、接着性が従来と比較して優れたものとな
り、また接着性のバラツキも低減する。 （２）従来の方法では、積層板の製造後に、積層板に接
着シートを貼り付ける工程が必要であったが、積層板の
成形工程で接着シートを同時に積層するため、研磨用治
具作製の製造工程が１工程減少し、生産性が向上する。The feature of the present invention resides in that the adhesive sheet is integrated in the step of forming a laminate. With this feature,
The following actions occur. (1) In the conventional method, since the thermosetting resin constituting the laminate is in an insoluble and infusible C stage, the adhesiveness between the laminate and the adhesive sheet can be maintained even when an adhesive sheet is attached thereto. It was inferior and had a variation in adhesive strength. According to the method of the present invention, in order to integrate the adhesive sheet when the resin of the prepreg is at the B stage, the respective resins of the prepreg and the adhesive sheet are compatible during molding, or in order to cause a predetermined cross-linking, Adhesiveness is superior to that of the prior art, and variations in adhesiveness are reduced. (2) In the conventional method, a step of attaching an adhesive sheet to the laminate after the production of the laminate was necessary. However, since the adhesive sheets were simultaneously laminated in the step of forming the laminate, a polishing jig was prepared. The number of manufacturing steps is reduced by one, and productivity is improved.
【０００６】[0006]
【実施例】本発明において、積層板の種類は、紙基材フ
ェノール、綿布基材フェノール、ガラス基材エポキシ、
ポリイミド積層板などであり、研磨材として使用できる
積層板であれば、特に限定するものではない。また、接
着シートの樹脂系としては、本発明者等が検討した範囲
内では、ウレタン系すなわちポリウレタン或いは変性ポ
リウレタンが良好であった。しかし、前記のプリプレグ
構成体と接着性を有し、研磨用治具を作製するために保
持部材と接着するものであれば、特に限定するものでは
ない。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, the type of laminate is paper-based phenol, cotton-based phenol, glass-based epoxy,
The laminate is not particularly limited as long as it is a polyimide laminate or the like and can be used as an abrasive. As the resin system of the adhesive sheet, a urethane system, that is, a polyurethane or a modified polyurethane was favorable within the range examined by the present inventors. However, there is no particular limitation as long as it has adhesiveness to the above-mentioned prepreg construct and adheres to a holding member for producing a polishing jig.
【０００７】実施例１（図１参照） ガラス織布（旭シュエーベル製「＃７６２８」，単位重
量２０５ｇ／m2）にエポキシ樹脂ワニスを含浸乾燥した
樹脂付着量４０重量％のガラス織布プリプレグを準備し
た。次に、前記プリプレグ２プライからなるプリプレグ
構成体２の片方の最外層に、離型紙の付いた厚さ５０μ
ｍのポリウレタン接着シート３を接着面を内側にして配
置し、また、プリプレグ構成体１の他方の最外層には、
厚さ６０μｍのポリプロピレンフィルム１を配置した。
この積層構成物を鏡面板４に挟んで常法により加熱加圧
成形し、厚さ０．４mmの接着層付き積層板を得た。上記
の接着層付き積層板と保持部材との接着性を確認するた
めに、積層板をＮＣ加工機で所定のサイズ、形状に裁断
加工し、離型紙を剥がしてこの面に保持部材を重ね、温
度１２０℃、圧力２０Kgf／cm2で２分間加熱加圧接着を
行い、研磨用治具を作製した。Example 1 (See FIG. 1) A glass woven fabric (“# 7628” manufactured by Asahi Schwebel, unit weight 205 g / m 2 ) was impregnated with an epoxy resin varnish and dried. Got ready. Next, one of the outermost layers of the prepreg construct 2 composed of the two ply of the prepreg has a thickness of 50 μm with release paper.
m of the polyurethane adhesive sheet 3 with the adhesive surface inside, and the other outermost layer of the prepreg construct 1
A polypropylene film 1 having a thickness of 60 μm was arranged.
The laminated component was sandwiched between the mirror plates 4 and subjected to heat and pressure molding by a conventional method to obtain a laminated plate with an adhesive layer having a thickness of 0.4 mm. In order to check the adhesiveness between the laminated board with the adhesive layer and the holding member, the laminated board was cut into a predetermined size and shape with an NC machine, the release paper was peeled off, and the holding member was stacked on this surface, Heat and pressure bonding was performed for 2 minutes at a temperature of 120 ° C. and a pressure of 20 kgf / cm 2 to prepare a polishing jig.
【０００８】実施例２ 接着シートがエポキシ樹脂で変性したポリウレタンから
なるものであること以外は、実施例１と同様にして接着
層付き積層板を製造した。そして、実施例１と同様にし
て研磨用治具を作製した。Example 2 A laminate with an adhesive layer was manufactured in the same manner as in Example 1 except that the adhesive sheet was made of polyurethane modified with an epoxy resin. Then, a polishing jig was produced in the same manner as in Example 1.
【０００９】実施例３ 紙にフェノール樹脂を含浸乾燥した樹脂付着量が４５重
量％の紙フェノールプリプレグを準備した。次に、前記
プリプレグ４プライからなるプリプレグ構成体の片方の
最外層に、離型紙の付いた厚さ５０μｍのポリウレタン
接着性シートを接着面を内側にして配置し、また、プリ
プレグ構成体の他方の最外層には、離型剤（レシチン）
を塗布した離型紙を配置した。この積層構成物を鏡面板
に挟んで常法により加熱加圧成形し、厚さ０．８mmの接
着層付き紙フェノール積層板を得た。そして、実施例１
と同様にして研磨用治具を作製した。Example 3 A paper phenol prepreg was prepared by impregnating a paper with a phenol resin and drying the resin so that the resin adhesion amount was 45% by weight. Next, a 50 μm-thick polyurethane adhesive sheet with release paper is disposed on one outermost layer of the prepreg structure composed of the prepreg 4 plies with the bonding surface inside, and the other of the prepreg structure The outermost layer contains a release agent (lecithin)
The release paper coated with was applied. The laminated component was sandwiched between mirror plates and molded by heating and pressing in a conventional manner to obtain a 0.8 mm thick paper phenol laminate with an adhesive layer. And Example 1
A polishing jig was produced in the same manner as described above.
【００１０】実施例４ 接着シートがエポキシ樹脂で変性したポリウレタンから
なるものであること以外は、実施例３と同様にして接着
層付き積層板を製造した。そして、実施例１と同様にし
て研磨用治具を作製した。Example 4 A laminate with an adhesive layer was produced in the same manner as in Example 3 except that the adhesive sheet was made of polyurethane modified with an epoxy resin. Then, a polishing jig was produced in the same manner as in Example 1.
【００１１】実施例５ 接着シートがポリエステルからなるものであること以外
は、実施例１と同様にして接着層付き積層板および研磨
用治具を作製した。Example 5 A laminate with an adhesive layer and a polishing jig were prepared in the same manner as in Example 1 except that the adhesive sheet was made of polyester.
【００１２】実施例６ 接着シートがポリビニルブチラールからなるものである
こと以外は、実施例１と同様にして接着層付き積層板お
よび研磨用治具を作製した。Example 6 A laminate with an adhesive layer and a polishing jig were produced in the same manner as in Example 1 except that the adhesive sheet was made of polyvinyl butyral.
【００１３】従来例１ 常法により、サイズ１ｍ×１ｍ、厚さ０．４mmのガラス
エポキシ積層板を成形した。次いで、前記積層板を５０
０mm角に裁断し、これの片面に実施例１と同じ接着シー
トを接着面を内側にして配置し、温度１３０℃、圧力２
０Kgf／cm2の条件で５分間加熱加圧し一体に貼り合わせ
た。そして、ＮＣ加工機で所定のサイズ、形状に裁断加
工し、実施例１と同様にして研磨用治具を作製した。Conventional Example 1 A glass epoxy laminate having a size of 1 mx 1 m and a thickness of 0.4 mm was formed by a conventional method. Then, the laminated plate is
The sheet was cut into a square of 0 mm, and the same adhesive sheet as in Example 1 was placed on one side of the sheet with the adhesive side inward.
Heating and pressurizing was performed for 5 minutes under the condition of 0 Kgf / cm 2 , and they were integrally bonded. Then, it was cut into a predetermined size and shape by an NC processing machine, and a polishing jig was produced in the same manner as in Example 1.
【００１４】従来例２ 常法により、サイズ１ｍ×１ｍ、厚さ０．４mmのガラス
エポキシ積層板を成形した。次いで、前記積層板を５０
０mm角に裁断し、これの片面に実施例２と同じ接着シー
トを接着面を内側にして配置し、温度１３０℃、圧力２
０Kgf／cm2の条件で５分間加熱加圧し一体に貼り合わせ
た。そして、ＮＣ加工機で所定のサイズ、形状に裁断加
工し、実施例１と同様にして研磨用治具を作製した。Conventional Example 2 A glass epoxy laminate having a size of 1 mx 1 m and a thickness of 0.4 mm was formed by a conventional method. Then, the laminated plate is
The sheet was cut into a square of 0 mm, and the same adhesive sheet as in Example 2 was placed on one side of the sheet with the adhesive side facing inward.
Heating and pressurizing was performed for 5 minutes under the condition of 0 Kgf / cm 2 , and they were integrally bonded. Then, it was cut into a predetermined size and shape by an NC processing machine, and a polishing jig was produced in the same manner as in Example 1.
【００１５】従来例３ 常法により、サイズ１ｍ×１ｍ、厚さ０．８mmの紙フェ
ノール積層板を成形した。次いで、前記積層板を５００
mm角に裁断し、これの片面に実施例１と同じ接着シート
を接着面を内側にして配置し、温度１３０℃、圧力２０
Kgf／cm2の条件で５分間加熱加圧し一体に貼り合わせ
た。そして、ＮＣ加工機で所定のサイズ、形状に裁断加
工し、実施例１と同様にして研磨用治具を作製した。Conventional Example 3 A paper phenol laminate having a size of 1 mx 1 m and a thickness of 0.8 mm was formed by a conventional method. Next, the laminate was
The same adhesive sheet as in Example 1 was placed on one side thereof with the adhesive side inside, and the temperature was 130 ° C and the pressure was 20 mm.
It was heated and pressed for 5 minutes under the condition of Kgf / cm 2 and bonded together. Then, it was cut into a predetermined size and shape by an NC processing machine, and a polishing jig was produced in the same manner as in Example 1.
【００１６】表１に実施例および従来例の研磨用治具の
特性を示す。表中、接着力は、積層板と保持部材との接
着力を示す。研磨治具作製工数は従来例の工数を１００
とした場合の指数で示す。Table 1 shows the characteristics of the polishing jigs of the embodiment and the conventional example. In the table, the adhesive strength indicates the adhesive strength between the laminate and the holding member. Polishing jig manufacturing man-hour is 100 times that of the conventional example.
It is shown by an index when
【００１７】[0017]
【表１】 [Table 1]
【００１８】[0018]
【発明の効果】上述したように本発明に係る方法によれ
ば、積層板の成形工程で接着シートを貼り合わせたた
め、従来の研磨用治具に比べ、保持部材と積層板の接着
力が優れており、接着力のバラツキも減少する。また、
本発明ににより製造した接着層付き積層板を用いれば、
研磨用治具を作製するときの工数が減少し生産性が向上
する。接着シートがポリウレタン或いは変性ポリウレタ
ンであるときは、さらに接着力が大きくなり、接着力の
バラツキも小さくなる。As described above, according to the method of the present invention, since the adhesive sheet is bonded in the step of forming the laminate, the adhesive strength between the holding member and the laminate is superior to that of the conventional polishing jig. And the variation in adhesive strength is reduced. Also,
If the laminate with the adhesive layer manufactured according to the present invention is used,
The number of steps for manufacturing the polishing jig is reduced, and the productivity is improved. When the adhesive sheet is made of polyurethane or modified polyurethane, the adhesive strength is further increased, and the variation in the adhesive strength is reduced.
【図１】本発明に係る実施例において接着層付き積層板
を製造するときの材料層構成を示す説明図である。FIG. 1 is an explanatory view showing a material layer configuration when manufacturing a laminate with an adhesive layer in an example according to the present invention.
１はポリプロピレンフィルム（離型フィルム） ２はプリプレグ構成体 ３は接着シート ４は鏡面板 1 is a polypropylene film (release film) 2 is a prepreg construct 3 is an adhesive sheet 4 is a mirror plate
フロントページの続き (56)参考文献 特開 昭58−186570（ＪＰ，Ａ) 特開 昭56−111637（ＪＰ，Ａ) 特開 平１−193386（ＪＰ，Ａ) 特開 昭50−18571（ＪＰ，Ａ) 特開 昭56−14282（ＪＰ，Ａ) 特開 平３−328352（ＪＰ，Ａ) 実開 平４−51358（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) B29C 43/18 - 43/20 B29C 43/32 - 43/34 B24B 37/04 B24D 3/00,3/28 B24D 7/00 - 7/24 C09J 7/00 B29C 43/18 Continuation of front page (56) References JP-A-58-186570 (JP, A) JP-A-56-111637 (JP, A) JP-A-1-193386 (JP, A) JP-A-50-18571 (JP) JP-A-56-14282 (JP, A) JP-A-3-328352 (JP, A) JP-A-4-51358 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB B29C 43/18-43/20 B29C 43/32-43/34 B24B 37/04 B24D 3 / 00,3 / 28 B24D 7/00-7/24 C09J 7/00 B29C 43/18
Claims (2)
リプレグ構成体を加熱加圧成形する方法において、前記
プリプレグ構成体の片側の最外層に熱可塑性接着シート
を配置し加熱加圧積層することを特徴とする研磨用積層
板の製造法。1. A method for heat-press molding a prepreg structure comprising one or more prepregs, wherein a thermoplastic adhesive sheet is disposed on the outermost layer on one side of the prepreg structure, and the laminate is heated and pressed. Production method of a polishing laminate.
変性ポリウレタンからなるものであることを特徴とする
請求項１記載の研磨用積層板の製造法。2. The method according to claim 1, wherein the thermoplastic adhesive sheet is made of polyurethane or modified polyurethane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP66494A JP3300151B2 (en) | 1994-01-10 | 1994-01-10 | Manufacturing method of polishing laminate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP66494A JP3300151B2 (en) | 1994-01-10 | 1994-01-10 | Manufacturing method of polishing laminate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07205171A JPH07205171A (en) | 1995-08-08 |
| JP3300151B2 true JP3300151B2 (en) | 2002-07-08 |
Family
ID=11480005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP66494A Expired - Fee Related JP3300151B2 (en) | 1994-01-10 | 1994-01-10 | Manufacturing method of polishing laminate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3300151B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100482771B1 (en) * | 2002-09-30 | 2005-04-14 | 민경열 | a method of the abrasive material |
| TWI304321B (en) | 2002-12-27 | 2008-12-11 | Toray Industries | Layered products, electromagnetic wave shielding molded articles and method for production thereof |
| JP4543696B2 (en) * | 2003-02-21 | 2010-09-15 | 東レ株式会社 | FIBER-REINFORCED COMPOSITE MATERIAL, ITS MANUFACTURING METHOD, AND INTEGRATED MOLDED ARTICLE |
| JP2012006124A (en) * | 2010-06-25 | 2012-01-12 | Nippon Resibon Corp | Rotary elastic grinding wheel |
-
1994
- 1994-01-10 JP JP66494A patent/JP3300151B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07205171A (en) | 1995-08-08 |
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