JP3278018B2 - Electrostatic actuator - Google Patents
Electrostatic actuatorInfo
- Publication number
- JP3278018B2 JP3278018B2 JP08588294A JP8588294A JP3278018B2 JP 3278018 B2 JP3278018 B2 JP 3278018B2 JP 08588294 A JP08588294 A JP 08588294A JP 8588294 A JP8588294 A JP 8588294A JP 3278018 B2 JP3278018 B2 JP 3278018B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- stator
- electrostatic actuator
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Micromachines (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は微小な静電アクチュエー
タのステータの構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a stator of a minute electrostatic actuator.
【０００２】[0002]
【従来の技術】従来の静電アクチュエータのステータ構
造を図６に示す。図において１はステータ電極、２は絶
縁体、３は導線である。ステータ電極１は円周上に絶縁
体２を介して等間隔に配置され、２つ置きにステータ電
極１を接続することによって３つの電圧相に分け、各電
圧相の電極に順次、電圧を印加して、ロータ電極を引き
つけながら回転駆動させていた。このような構成におい
て、同一相の電極を電気的に結合するために微小なワイ
ヤ線を用いてはんだ付け等の手段により配線していた。2. Description of the Related Art FIG. 6 shows a stator structure of a conventional electrostatic actuator. In the figure, 1 is a stator electrode, 2 is an insulator, and 3 is a conductor. The stator electrodes 1 are arranged on the circumference at equal intervals via an insulator 2, and are divided into three voltage phases by connecting every third stator electrode 1, and a voltage is sequentially applied to the electrodes of each voltage phase. Then, the rotor electrode is driven to rotate while attracting the rotor electrode. In such a configuration, in order to electrically connect electrodes of the same phase, wiring is performed by means such as soldering using a fine wire.
【０００３】[0003]
【発明が解決しようとする課題】ところが、従来技術で
はその構造から、隣合う電極間には必ず絶縁物が必要で
あるために電極間距離を狭めることができなかった。そ
のためステータ電極を切り換える際、図７にトルクカー
ブを示すように大きいトルクリップルが発生する。ま
た、配線においては、アクチュエータを小型化、高出力
化するためには電極の微細化が必要となるが、従来技術
のはんだつけでは取り付け部分の面積を小さくすること
ができないため、小型化、高出力化の妨げとなる問題点
もある。そこで、本発明の目的はトルクリップルが小さ
くステータの配線が容易な小型、高出力の静電アクチュ
エータを提供することにある。However, in the prior art, the distance between the electrodes could not be reduced because the structure required an insulator between adjacent electrodes. Therefore, when switching the stator electrodes, a large torque ripple is generated as shown in a torque curve in FIG. Also, in the case of wiring, miniaturization of electrodes is necessary in order to reduce the size and increase the output of the actuator. There are also problems that hinder output. SUMMARY OF THE INVENTION An object of the present invention is to provide a small-sized, high-output electrostatic actuator having a small torque ripple and easy wiring of a stator.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明は、円周方向に複数個の電極が一定の間隔で
配置され、かつ前記電極は複数の電圧相に区分された円
筒形のステータと、前記ステータ電極の対向面に前記ス
テータ電極の間隔に対して所定の関係で配置された電極
を有するロータとからなり、前記電圧相に順次電圧を印
加することにより駆動される静電アクチュエータにおい
て、前記ステータは内周部に一定の間隔で設けた電極用
突起を有する同一形状からなるリング状の電極板を円周
方向に所定の間隔でずらせ、リング状の絶縁板を介して
複数積層し、同一の電圧相に属する前記電極用突起が円
周上の同じ場所に位置するようにし、かつ電圧相間の電
極用突起が所定の間隔になるように配置した構成にして
いる。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to a cylindrical electrode in which a plurality of electrodes are arranged at regular intervals in a circumferential direction and the electrodes are divided into a plurality of voltage phases. And a rotor having electrodes disposed on a surface facing the stator electrodes in a predetermined relationship with respect to a distance between the stator electrodes, and an electrostatic drive driven by sequentially applying a voltage to the voltage phase. in the actuator, the stator is a ring-shaped electrode plates having the same shape having electrode projections provided at regular intervals on the inner circumferential portion circumferentially
At predetermined intervals in the direction, through a ring-shaped insulating plate
A plurality of the electrode protrusions belonging to the same voltage phase
Be located at the same place on the circumference, and
The pole projections are arranged at predetermined intervals .
【０００５】[0005]
【作用】上記手段により、リング状の電極板を円周方向
にずらせて積層したステータを用いているので、隣接す
る電極のピッチを小さくすることができる。これによ
り、トルクの最大値からの低下が小さい位置で電圧を切
り換えることができ、トルクリップルを低減することが
できる。また、電極外周部に突起を設け同一相の電極を
同じ一に配置したので、ステータ電極の位置合わせとし
て利用でき、ステータの組立や電気的接続が容易にな
る。According to the above-mentioned means, since the stator in which the ring-shaped electrode plates are shifted in the circumferential direction and stacked is used, the pitch between adjacent electrodes can be reduced. Thus, the voltage can be switched at a position where the decrease from the maximum value of the torque is small, and the torque ripple can be reduced. In addition, since the protrusions are provided on the outer periphery of the electrodes and the electrodes of the same phase are arranged in the same position, they can be used for positioning the stator electrodes, and the assembly and electrical connection of the stator become easy.
【０００６】[0006]
【実施例】以下、本発明の実施例を図に基づいて説明す
る。図１は本発明の静電アクチュエータに用いたステー
タの構造を示す斜視図である。図において４はリング形
状の電極板、４１は電極板４の内周部に設けた電極用突
起、４２は電極板４の外周部に設けた端子用突起、５は
電極板４間の絶縁を保つフィルムからなる絶縁板であ
る。電極板４は絶縁板５に張り付けた銅の薄板をフォト
エッチングにより作製したもので、内周部に電極用突起
４１を８個、外周部に端子用突起４２を１個もうけてい
る。電極用突起４１と凹部との寸法比は１：２である。
ステータの組立ては図２に示す分解斜視図のようにして
行なった。電圧相を３相とし、まず、１番目の電極板４
ａをセットし、絶縁板５を介してこの上に２番目の電極
板４ｂを時計方向に電極用突起４１を１個分ずらして積
層する。つぎに、絶縁板５を介して３番目の電極板４ｃ
を電極板４ａから反時計方向に電極用突起４１の１個分
ずらして積層する。この場合の位置決めは端子用突起４
２を基準として行なった。この工程を繰り返した後、接
着剤により電極板を固定しステータを作製した。最後に
端子用突起４２を各電圧相毎に軸方向に折り曲げてはん
だ付けし電気的な接続を行った。つぎに、動作について
説明する。図３はステータ内周部を円周方向に展開した
展開図である。ロータ電極６は凸部の長さをステータ電
極の電極用突起４１の長さとほぼ同等にし、凹部の長さ
を凸部の２倍とした。いま、ステータ電極４ａに電圧を
印加するとロータ電極６は図中ｄにその中心が位置す
る。ここで電圧を印加するステータ電極を４ｂに切り換
えるとロータ電極６は図中ｅの位置に移動する。以下順
次、電圧を印加する電極を切り換えることによりロータ
を回転させることができる。このようにして得られた本
発明の静電アクチュエータのトルクカーブを図５に示
す。電極ピッチを小さくすると、従来例（図７）に比べ
てトルクリップルが小さくなっていることが分かる。本
実施例では電極用突起４１を８個としたが、これに限ら
ず、多くすると、さらにトルクリップルを小さくでき
る。図５はその他の応用例を示したものである。これは
電極板４の板厚を大きくしたもので、銅のブロックを放
電加工により成形して、ブロック電極８にしたものであ
る。これにより製造工程及び組立行程をより容易にする
ことができる。ブロック電極８の材料は銅に限らずアル
ミニウムや銀など導電材料であればなんでもよい。な
お、本実施例では電極板の内部形状を矩形としたが、こ
れに限られるものではなく、目的にあった種々の形状を
選択することができる。また、絶縁板４はあらかじめス
テータ電極の表面に薄膜として形成させておいてもよ
い。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the structure of a stator used in the electrostatic actuator of the present invention. In the figure, 4 is a ring-shaped electrode plate, 41 is an electrode projection provided on the inner periphery of the electrode plate 4, 42 is a terminal projection provided on the outer periphery of the electrode plate 4, and 5 is an insulator between the electrode plates 4. It is an insulating plate made of a film to keep. The electrode plate 4 is formed by photo-etching a copper thin plate adhered to the insulating plate 5, and has eight electrode projections 41 on the inner periphery and one terminal projection 42 on the outer periphery. The dimensional ratio between the electrode projection 41 and the recess is 1: 2.
The stator was assembled as shown in the exploded perspective view shown in FIG. First, the first electrode plate 4 has three voltage phases.
is set, and the second electrode plate 4b is laminated on the insulating plate 5 with the electrode protrusion 41 shifted clockwise by one. Next, the third electrode plate 4c is interposed via the insulating plate 5.
Are stacked counterclockwise from the electrode plate 4a by one electrode protrusion 41. In this case, the positioning is performed by the terminal protrusion 4.
2 was used as a reference. After repeating this process, the electrode plate was fixed with an adhesive to produce a stator. Lastly, the terminal projections 42 were bent in the axial direction for each voltage phase and soldered for electrical connection. Next, the operation will be described. FIG. 3 is a development view in which the inner peripheral portion of the stator is developed in the circumferential direction. The length of the protrusion of the rotor electrode 6 was substantially equal to the length of the electrode projection 41 of the stator electrode, and the length of the recess was twice as long as the protrusion. Now, when a voltage is applied to the stator electrode 4a, the center of the rotor electrode 6 is located at d in the figure. Here, when the stator electrode to which the voltage is applied is switched to 4b, the rotor electrode 6 moves to the position e in the figure. Thereafter, the rotor can be rotated by sequentially switching the electrodes to which the voltage is applied. FIG. 5 shows the thus obtained torque curve of the electrostatic actuator of the present invention. It can be seen that when the electrode pitch is reduced, the torque ripple is smaller than in the conventional example (FIG. 7). In this embodiment, the number of the electrode projections 41 is eight. However, the number is not limited to this, and when the number is increased, the torque ripple can be further reduced. FIG. 5 shows another application example. In this example, the thickness of the electrode plate 4 is increased, and a copper block is formed by electric discharge machining to form a block electrode 8. Thereby, the manufacturing process and the assembly process can be made easier. The material of the block electrode 8 is not limited to copper, but may be any conductive material such as aluminum or silver. In this embodiment, the internal shape of the electrode plate is rectangular. However, the present invention is not limited to this, and various shapes suitable for the purpose can be selected. Further, the insulating plate 4 may be previously formed as a thin film on the surface of the stator electrode.
【０００７】[0007]
【発明の効果】以上述べたように本発明によれば、ステ
ータを電極板の積層によって形成する構造を取ったこと
により、トルクリップルが低減でき、かつステータ電極
の配線が容易な静電アクチュエータを得る効果がある。As described above, according to the present invention, by adopting a structure in which the stator is formed by laminating the electrode plates, an electrostatic actuator in which the torque ripple can be reduced and the wiring of the stator electrodes is easy is provided. There is an effect to get.
【図１】本発明の静電アクチュエータのステータを示す
斜視図である。FIG. 1 is a perspective view showing a stator of an electrostatic actuator according to the present invention.
【図２】本発明のステータの電極板の配置を示す分解斜
視図である。FIG. 2 is an exploded perspective view showing an arrangement of electrode plates of a stator according to the present invention.
【図３】本発明のステータ電極の内周部を展開した展開
側面図である。FIG. 3 is a developed side view in which an inner peripheral portion of the stator electrode of the present invention is developed.
【図４】本発明の静電アクチュエータのトルク特性を示
す特性図である。FIG. 4 is a characteristic diagram showing torque characteristics of the electrostatic actuator of the present invention.
【図５】本発明のステータ電極板の他の応用例を示す斜
視図である。FIG. 5 is a perspective view showing another application example of the stator electrode plate of the present invention.
【図６】従来の静電アクチュエータのステータを示す斜
視図である。FIG. 6 is a perspective view showing a stator of a conventional electrostatic actuator.
【図７】従来の静電アクチュエータのトルク特性を示す
特性図である。FIG. 7 is a characteristic diagram showing torque characteristics of a conventional electrostatic actuator.
１ ステータ電極 ２ 絶縁体 ３ 導線 ４ 電極板 ４１ 電極用突起 ４２ 端子用突起 ５ 絶縁層 ６ ロータ電極 ７ ブロック電極 DESCRIPTION OF SYMBOLS 1 Stator electrode 2 Insulator 3 Conductor 4 Electrode plate 41 Protrusion for electrode 42 Protrusion for terminal 5 Insulating layer 6 Rotor electrode 7 Block electrode
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H02N 1/00 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) H02N 1/00
Claims (3)
置され、かつ前記電極は複数の電圧相に区分された円筒
形のステータと、前記ステータ電極の対向面に前記ステ
ータ電極の間隔に対して所定の関係で配置された電極を
有するロータとからなり、前記電圧相に順次電圧を印加
することにより駆動される静電アクチュエータにおい
て、 前記ステータは内周部に一定の間隔で設けた電極用突起
を有する同一形状からなるリング状の電極板を円周方向
に所定の間隔でずらせ、リング状の絶縁板を介して複数
積層し、同一の電圧相に属する前記電極用突起が円周上
の同じ場所に位置するようにし、かつ電圧相間の電極用
突起が所定の間隔になるように配置したことを特徴とす
る静電アクチュエータ。A plurality of electrodes are arranged at regular intervals in a circumferential direction, and said electrodes are formed in a cylindrical stator divided into a plurality of voltage phases. An electrostatic actuator comprising a rotor having electrodes arranged in a predetermined relationship with respect to an interval, and driven by sequentially applying a voltage to the voltage phase, wherein the stator is provided at a constant interval on an inner peripheral portion. circumferential ring-shaped electrode plates having the same shape with the electrode protrusions
At predetermined intervals, and a plurality of
The electrode projections that belong to the same voltage phase
For the electrodes between the voltage phases
An electrostatic actuator, wherein the projections are arranged at predetermined intervals .
子用突起が設けられ、この突起の位置を電圧相毎に同じ
位置に配置したことを特徴とする請求項１記載の静電ア
クチュエータ。2. The electrostatic actuator according to claim 1, wherein the electrode plate has at least one terminal protrusion on an outer peripheral portion thereof, and the position of the protrusion is arranged at the same position for each voltage phase. .
たことを特徴とする請求項２記載の静電アクチュエー
タ。3. The electrostatic actuator according to claim 2, wherein said electrode plate has a block shape with a large plate thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08588294A JP3278018B2 (en) | 1994-03-30 | 1994-03-30 | Electrostatic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08588294A JP3278018B2 (en) | 1994-03-30 | 1994-03-30 | Electrostatic actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07274541A JPH07274541A (en) | 1995-10-20 |
| JP3278018B2 true JP3278018B2 (en) | 2002-04-30 |
Family
ID=13871283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08588294A Expired - Fee Related JP3278018B2 (en) | 1994-03-30 | 1994-03-30 | Electrostatic actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3278018B2 (en) |
-
1994
- 1994-03-30 JP JP08588294A patent/JP3278018B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07274541A (en) | 1995-10-20 |
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