JP3260720B2 - Inspection method and inspection device for printed circuit board - Google Patents
Inspection method and inspection device for printed circuit boardInfo
- Publication number
- JP3260720B2 JP3260720B2 JP09510699A JP9510699A JP3260720B2 JP 3260720 B2 JP3260720 B2 JP 3260720B2 JP 09510699 A JP09510699 A JP 09510699A JP 9510699 A JP9510699 A JP 9510699A JP 3260720 B2 JP3260720 B2 JP 3260720B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- circuit board
- printed circuit
- capacitance
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、プリント基板およ
びその検査方法に関し、特にプリント基板に設けられた
配線の良否を判定するプリント基板の検査方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed circuit board and a method for inspecting the same, and more particularly, to a method for inspecting a printed circuit board for determining the quality of wiring provided on the printed circuit board.
【０００２】[0002]
【従来の技術】図２に従来のプリント基板の検査装置を
示す。2. Description of the Related Art FIG. 2 shows a conventional printed circuit board inspection apparatus.
【０００３】図２において、対向電極５に対向して１ミ
リメートル程度の一定の間隔でプリント基板１を設置す
る。対向電極５はプリント基板１を十分に覆うことがで
きる大きさの金属板からなる。測定針６は測定アーム４
を介して電気容量計７に接続され、対向電極５も電気的
に電気容量計７に接続されている。測定ア−ム４に取り
付けられた測定針６を、プリント基板１の電気配線２上
の端子３に接触させ、電気配線２と対向する対向電極５
間の電気容量を電気容量計７で測定する。測定される電
気容量は、プリント基板１の電気配線２を構成する上層
配線１３と対向電極５間の電気容量Ｃ１と、中層配線１
４と対向電極５間の電気容量Ｃ２と、下層配線１５と対
向電極５間の電気容量Ｃ３の総和（電気容量の総和をＣ
とした場合Ｃ＝Ｃ１＋Ｃ２＋Ｃ３）となる。In FIG. 2, a printed circuit board 1 is placed at a constant interval of about 1 mm so as to face a counter electrode 5. The opposing electrode 5 is made of a metal plate large enough to cover the printed circuit board 1. The measuring needle 6 is the measuring arm 4
And the counter electrode 5 is also electrically connected to the capacitance meter 7. The measurement needle 6 attached to the measurement arm 4 is brought into contact with the terminal 3 on the electric wiring 2 of the printed circuit board 1, and the counter electrode 5 facing the electric wiring 2.
The electric capacity between them is measured by the electric capacity meter 7. The measured electric capacity is the electric capacity C1 between the upper layer wiring 13 and the counter electrode 5 constituting the electric wiring 2 of the printed circuit board 1 and the middle layer wiring 1
4 and the total capacitance C3 between the lower wiring 15 and the counter electrode 5 (the total capacitance is C
C = C1 + C2 + C3).
【０００４】その後、良否判定部８にて、測定値と配線
長格納部１０に格納された電気配線２を構成する上層配
線１３、中層配線１４、下層配線１５それぞれの設計上
の線長情報と、検査条件入力部１１によって外部から与
えられた上層配線１３、中層配線１４、下層配線１５そ
れぞれの設計上の条件から求められる単位線長当たりの
電気容量（それぞれを単位Ｃ１、単位Ｃ２、単位Ｃ３と
称す。）により、期待値データ算出部９にて期待値（上
層線１３の設計上の線長をＬ１とし、中層配線１４の設
計上の線長をＬ２とし、上層配線１５の設計上の線長を
Ｌ３とし、期待値をＣｓｔｄとした場合、Ｃｓｔｄ＝Ｌ
１×単位Ｃ１＋Ｌ２×単位Ｃ２＋Ｌ３×単位Ｃ３）を算
出したものとを比較し、良否判定を行い、その結果を良
否表示部１２にて表示していた。Then, the pass / fail judgment unit 8 stores the measured values and the design line length information of the upper layer wiring 13, the middle layer wiring 14, and the lower layer wiring 15 constituting the electric wiring 2 stored in the wiring length storage unit 10. , The electric capacity per unit line length obtained from the design conditions of each of the upper layer wiring 13, the middle layer wiring 14, and the lower layer wiring 15 externally given by the inspection condition input unit 11 (the units C 1, C 2, C 3, respectively) ), The expected value data calculation unit 9 sets the expected value (the designed line length of the upper layer line 13 to L1, the designed line length of the middle layer line 14 to L2, and the design value of the upper layer line 15). When the line length is L3 and the expected value is Cstd, Cstd = L
(1 × unit C1 + L2 × unit C2 + L3 × unit C3) was compared with the calculated result, and the quality was determined, and the result was displayed on the quality display unit 12.
【０００５】[0005]
【発明が解決しようとする課題】上述の従来のプリント
配線基板の検査方法では、予め検査条件入力部１１によ
って、外部より入力する上層配線１３、中層配線１４、
下層配線１５それぞれの単位線長当たりの電気容量（そ
れぞれを単位Ｃ１、単位Ｃ２、単位Ｃ３と称す。）が正
確である事が重要であるが、被試験物であるプリント基
板１の多層化、高密度化が進むと共に正確な値を求める
ことが非常に難しくなり、誤差の大きな値を入力し、誤
った良否判定をする可能性が大きいという問題があっ
た。In the above-described conventional method for inspecting a printed wiring board, the upper-layer wiring 13, the intermediate-layer wiring 14, and the inner-layer wiring 14, which are input from the outside by the inspection condition input unit 11 in advance.
It is important that the electric capacity per unit line length of each of the lower wirings 15 (referred to as a unit C1, a unit C2, and a unit C3) is accurate. As the density increases, it becomes very difficult to obtain an accurate value, and there is a problem that a value having a large error is input and an erroneous pass / fail judgment is highly likely to be made.
【０００６】[0006]
【課題を解決するための手段】本発明は、プリント基板
（図１の１）に対向して対向電極（図１の５）を配置
し、前記プリント基板に設けられた配線である対象配線
（図１の２）と前記対向電極との間の電気容量である対
象容量を測定し、この対象容量により前記対象配線の良
否を判定するプリント基板の検査方法において、前記プ
リント基板に長さが既知の標準配線（図１の１６、１
７、１８）を設けておき、この標準配線と前記対向電極
との間の電気容量である標準容量を測定し、前記標準配
線の長さ、前記標準容量および前記対象配線の設計上の
長さから算出する期待値容量と前記対象容量とを比較す
ることを特徴とする。According to the present invention, a counter electrode (5 in FIG. 1) is arranged to face a printed circuit board (1 in FIG. 1), and a target wiring (wiring provided on the printed circuit board) is provided. In a printed circuit board inspection method of measuring a target capacitance, which is an electric capacitance between 2) of FIG. 1 and the counter electrode, and determining whether the target wiring is good or not based on the target capacitance, the length of the printed substrate is known. Standard wiring (16, 1 in FIG. 1)
7, 18) are provided, and a standard capacitance, which is an electric capacitance between the standard wiring and the counter electrode, is measured. The length of the standard wiring, the standard capacitance, and the designed length of the target wiring are measured. And comparing the expected capacity calculated from the above with the target capacity.
【０００７】本発明は、プリント基板（図１の１）に対
向して対向電極（図１の５）を配置し、前記プリント基
板の複数の層に設けられた配線（図１の１３、１４、１
５）が接続された対象配線（図１の２）と前記対向電極
との間の電気容量である対象容量を測定し、この対象容
量により前記対象配線の良否を判定するプリント基板の
検査方法において、前記プリント基板の前記対象配線が
及ぶ各層に互いに分離された長さが既知の標準配線（図
１の１６、１７、１８）を設けておき、これら各層の標
準配線と前記対向電極との間の電気容量である標準容量
を測定し、各層ごとに前記標準配線の長さ、前記標準容
量および前記対象配線の対応する層における設計上の長
さから各層の期待値容量を算出し、これら各層の期待値
容量を合計した期待値容量と前記対象容量とを比較する
ことを特徴とする。According to the present invention, a counter electrode (5 in FIG. 1) is arranged to face a printed board (1 in FIG. 1), and wirings (13 and 14 in FIG. 1) provided on a plurality of layers of the printed board are provided. , 1
5) In a printed circuit board inspection method, a target capacitance, which is an electric capacitance between a target wiring (2 in FIG. 1) connected to the counter electrode and the counter electrode, is measured, and the quality of the target wiring is determined based on the target capacitance. A standard wiring having a known length (16, 17, 18 in FIG. 1) is provided on each layer of the printed circuit board that the target wiring covers, and between the standard wiring of each layer and the counter electrode. The standard capacitance, which is the electric capacitance of each layer, is measured, and the expected value capacitance of each layer is calculated from the length of the standard wiring for each layer, the standard capacitance and the designed length of the corresponding layer of the target wiring corresponding to each layer. And comparing the expected capacity obtained by summing the expected capacity with the target capacity.
【０００８】[0008]
【０００９】本発明は、プリント基板（図１の１）に設
けられた対象配線（図１の２）の良否を判定するプリン
ト基板の検査装置において、前記プリント基板に対向し
て配置する対向電極（図１の５）と、測定針（図１の
３）と、この測定針を前記プリント基板に設けられた導
体に接触させた時の前記プリント基板と前記対向電極と
の間の電気容量を測定する電気容量計（図１の７）と、
前記対象配線の設計上の長さを格納しておく配線長格納
部（図１の１０）と、前記プリント基板に設けておいた
長さが既知の標準配線（図１の１６、１７、１８）に前
記測定針を接触させた時の前記電気容量計で測定した標
準容量および前記配線長格納部に格納された前記対象配
線の長さから当該対象配線の期待値容量を算出する期待
値データ算出部（図１の９）と、前記測定針を前記対象
配線に接触させた時の前記電気容量計で測定した対象容
量を期待値容量と比較する良否判定部（図１の８）とを
含むことを特徴とする。The present invention relates to an inspection apparatus for a printed circuit board for judging the quality of a target wiring (2 in FIG. 1) provided on a printed circuit board (1 in FIG. 1). (5 in FIG. 1), a measuring needle (3 in FIG. 1), and an electric capacitance between the printed board and the counter electrode when the measuring needle is brought into contact with a conductor provided on the printed board. An electric capacity meter (7 in FIG. 1) for measuring;
A wiring length storage unit (10 in FIG. 1) for storing the designed length of the target wiring, and standard wirings (16, 17, and 18 in FIG. 1) having known lengths provided on the printed circuit board. The expected value data for calculating the expected value capacity of the target wiring from the standard capacitance measured by the capacitance meter when the measuring needle is brought into contact with the measuring needle and the length of the target wiring stored in the wiring length storage unit A calculation unit (9 in FIG. 1) and a pass / fail determination unit (8 in FIG. 1) for comparing the target capacitance measured by the capacitance meter when the measuring needle is brought into contact with the target wiring with the expected value capacitance. It is characterized by including.
【００１０】本発明は、プリント基板（図１の１）の複
数の層に設けられた配線が接続された対象配線（図１の
２）の良否を判定するプリント基板の検査装置におい
て、前記プリント基板に対向して配置する対向電極（図
１の５）と、測定針（図１の３）と、この測定針を前記
プリント基板に設けられた導体に接触させた時の前記プ
リント基板と前記対向電極との間の電気容量を測定する
電気容量計（図１の７）と、前記対象配線の各層におけ
る配線（図１の１３、１４、１５）設計上の長さを格納
しておく配線長格納部（図１の１０）と、前記プリント
基板の前記対象配線が及ぶ各層に設けておいた互いに分
離された長さが既知の標準配線（図１の１６、１７、１
８）それぞれに前記測定針を接触させた時の前記電気容
量計で測定した標準容量および前記配線長格納部に格納
された前記対象配線の対応する層における配線の設計上
の長さそれぞれから当該対象配線の各層における配線の
期待値容量を算出しこれらの各層の期待値容量を合計し
て当該対象配線の期待値容量を算出する期待値データ算
出部（図１の９）と、前記測定針を前記対象配線に接触
させた時の前記電気容量計で測定した対象容量を前記対
象配線の期待値容量と比較する良否判定部（図１の８）
とを含むことを特徴とする。The present invention relates to a printed circuit board inspection apparatus for judging pass / fail of a target wiring (2 in FIG. 1) to which wirings provided in a plurality of layers of a printed circuit board (1 in FIG. 1) are connected. A counter electrode (5 in FIG. 1) arranged opposite to the substrate, a measuring needle (3 in FIG. 1), and the printed board and the printed board when the measuring needle is brought into contact with a conductor provided on the printed board; An electric capacitance meter (7 in FIG. 1) for measuring the electric capacitance between the counter electrode and wiring for storing the designed length of the wiring (13, 14, 15 in FIG. 1) in each layer of the target wiring The length storing section (10 in FIG. 1) and standard wirings (16, 17, 1 in FIG. 1) provided in each layer of the printed circuit board and covered by the target wiring and having a known length separated from each other.
8) The standard capacitance measured by the capacitance meter when the measuring needle is brought into contact with the measuring needle and the designed length of the wiring in the corresponding layer of the target wiring stored in the wiring length storage unit. An expected value data calculating section (9 in FIG. 1) for calculating an expected value capacity of the wiring in each layer of the target wiring and calculating an expected value capacity of the target wiring by summing the expected value capacities of these layers; Pass / fail determination unit (8 in FIG. 1) for comparing a target capacitance measured by the capacitance meter when the sample is brought into contact with the target wiring with an expected value capacitance of the target wiring.
And characterized in that:
【００１１】[0011]
【００１２】[0012]
【００１３】[0013]
【００１４】[0014]
【発明の実施の形態】次に、本発明の実施の形態につい
て図面を参照して詳細に説明する。Next, embodiments of the present invention will be described in detail with reference to the drawings.
【００１５】図１は、本発明の実施の形態のプリント基
板の検査装置の示す構成図である。FIG. 1 is a configuration diagram showing a printed circuit board inspection apparatus according to an embodiment of the present invention.
【００１６】図１の検査装置は、測定ア−ム４、対向電
極５、測定針６、電気容量計７、良否判定部８、期待値
データ算出部９、配線長格納部１０および良否表示部１
２で構成する。The inspection apparatus shown in FIG. 1 comprises a measuring arm 4, a counter electrode 5, a measuring needle 6, an electric capacity meter 7, a pass / fail judgment section 8, an expected value data calculating section 9, a wiring length storage section 10, and a pass / fail display section. 1
It consists of two.
【００１７】被試験物であるプリント基板１は、上層の
標準配線１６に接続された標準端子１８、中層の標準配
線１７に接続された標準端子２０および下層の標準端子
１８に接続された標準端子２１が設けられている。The printed circuit board 1 to be tested has a standard terminal 18 connected to the standard wiring 16 in the upper layer, a standard terminal 20 connected to the standard wiring 17 in the middle layer, and a standard terminal connected to the standard terminal 18 in the lower layer. 21 are provided.
【００１８】次に、本発明の実施の形態の検査手順につ
いて図１を参照して説明する。Next, an inspection procedure according to the embodiment of the present invention will be described with reference to FIG.
【００１９】まず、対向電極５に対向するようにプリン
ト基板１を設置する。被検査対象である電気配線２の検
査をする前に、予めプリント基板１上に設けた標準端子
１９に、測定ア−ム４上に取り付けられた測定針６を接
触させ、上層に配線された単位線長を有する標準配線１
６と対向電極５間の電気容量Ｃａを電気容量計７で測定
し、期待値データ算出部９に記憶させておく。同様に標
準端子２０に、測定ア−ム４上に取り付けられた測定針
６を接触させ、中層に配線された単位線長を有する標準
配線１７と対向電極５間の電気容量Ｃｂを電気容量計７
で測定し、期待値データ算出部９に記憶させ、下層に配
線された単位線長を有する標準配線１８と対向電極５間
の電気容量Ｃｃを電気容量計７で測定し、期待値データ
算出部９に記憶させておく。First, the printed circuit board 1 is set so as to face the counter electrode 5. Before inspecting the electric wiring 2 to be inspected, the measuring needle 6 mounted on the measuring arm 4 was brought into contact with the standard terminal 19 provided on the printed circuit board 1 in advance, and the wiring was formed in the upper layer. Standard wiring 1 with unit line length
The capacitance Ca between the electrode 6 and the counter electrode 5 is measured by the capacitance meter 7 and stored in the expected value data calculator 9. Similarly, the measuring needle 6 attached on the measuring arm 4 is brought into contact with the standard terminal 20 to measure the electric capacitance Cb between the standard wiring 17 having a unit line length wired in the middle layer and the counter electrode 5 with an electric capacitance meter. 7
, And the measured value is stored in the expected value data calculation unit 9. The capacitance Cc between the standard wiring 18 having the unit line length and the counter electrode 5, which is wired in the lower layer, is measured by the capacitance meter 7. 9 is stored.
【００２０】次に、被検査対象である電気配線２の測定
に移る。測定ア−ム４に取り付けられた測定針６を、プ
リント基板１の電気配線２に接続された端子３に接触さ
せ、電気配線２と対向する対向電極５間の電気容量を電
気容量計７で測定する。 測定される電気容量は、電気
配線２を構成する上層配線１３と対向電極５間の電気容
量Ｃ１と、中層配線１４と対向電極５間の電気容量Ｃ２
と、下層配線１５と対向電極５間の電気容量Ｃ３の総和
（電気配線２の電気容量をＣとした場合、Ｃ＝Ｃ１＋Ｃ
２＋Ｃ３）となる。Next, the process proceeds to the measurement of the electric wiring 2 to be inspected. The measuring needle 6 attached to the measuring arm 4 is brought into contact with the terminal 3 connected to the electric wiring 2 of the printed circuit board 1, and the electric capacitance between the electric wiring 2 and the opposing electrode 5 is measured by the electric capacitance meter 7. Measure. The measured electric capacitance is an electric capacitance C1 between the upper wiring 13 and the counter electrode 5 constituting the electric wiring 2 and an electric capacitance C2 between the middle wiring 14 and the counter electrode 5.
And the sum of the electric capacitances C3 between the lower wiring 15 and the counter electrode 5 (where C is the electric capacitance of the electric wiring 2, C = C1 + C
2 + C3).
【００２１】その後、良否判定部８にて、この電気配線
２と対向電極５貫の電気容量の測定値と、配線長格納部
１０に格納された電気配線２を構成する上層配線１３、
中層配線１４および下層配線１５の設計上の線長情報Ｌ
１、Ｌ２およびＬ３と、前に予め測定しておいた、上層
配線１３、中層配線１４および下層配線１５それぞれの
単位線長当たりの電気容量に相当するＣａ、Ｃｂ、Ｃｃ
により、期待値データ算出部−９にて期待値（期待値を
Ｃｓｔｄとした場合、Ｃｓｔｄ＝Ｌ１×Ｃａ＋Ｌ２×Ｃ
ｂ＋Ｌ３×Ｃｃ）を算出したものとを比較し良否判定を
行い、その結果を良否表示部１１にて表示する。なお、
標準配線１６、１７および１８は単位線長のものでなく
ても、それぞれが異なる線長のものでも、予め長さが分
かっていれば、対向電極５間の電気容量の測定値から単
位線長当たりの電気容量が換算できるので、本発明は適
用可能である。Thereafter, the pass / fail determination unit 8 determines the measured value of the electric capacitance between the electric wiring 2 and the counter electrode 5 and the upper wiring 13 constituting the electric wiring 2 stored in the wiring length storage unit 10.
Designed line length information L of the middle layer wiring 14 and the lower layer wiring 15
1, L2, and L3, and Ca, Cb, and Cc corresponding to the capacitance per unit line length of each of the upper-layer wiring 13, the middle-layer wiring 14, and the lower-layer wiring 15 measured beforehand.
As a result, the expected value is calculated by the expected value data calculating unit -9 (when the expected value is Cstd, Cstd = L1 × Ca + L2 × C
b + L3 × Cc) is compared with the calculated result, and the quality is determined, and the result is displayed on the quality display unit 11. In addition,
Even if the standard wirings 16, 17 and 18 are not of the unit line length or of different line lengths, if the length is known in advance, the unit line length can be obtained from the measured value of the electric capacitance between the counter electrodes 5. Since the electric capacity per unit can be converted, the present invention is applicable.
【００２２】また、被検査対象である電気配線は、上
層、中層および下層に渡って配されたものでなく、いず
れかの層のみに配線されたものでも、プリント基板の表
面に配線されたものでも、さらに４層以上に渡って配線
されたものでも、本発明は適用可能である。The electric wiring to be inspected is not distributed over the upper, middle and lower layers, but may be wired only on any one of the layers, or may be wired on the surface of the printed circuit board. However, the present invention can be applied to a case where wiring is further performed in four or more layers.
【００２３】[0023]
【発明の効果】以上説明したように、本発明のプリント
基板の検査方法および検査方法は、プリント基板上の被
検査対象である電気配線と対向電極間の電気容量を測定
する前に、測定ア−ムに取り付けられた測定針を、予め
プリント基板の対象配線を構成する層と同一層に設けて
おいた標準端子に接触させ、その時の電気容量を測定
し、各層の単位線長当たりの電気容量値を入手する事
で、電気配線の良否判断に必要な電気配線の各層の単位
線長当たりの電気容量値を外部から入力する必要がなく
なるとともに、実際の値から外れた単位線長当たりの電
気容量値を入力することでの誤判定がなくなる効果があ
る。As described above, according to the printed board inspection method and the inspection method of the present invention, the measurement electrode is measured before measuring the capacitance between the electric wiring to be inspected on the printed board and the counter electrode. -The measurement needle attached to the system is brought into contact with the standard terminal provided in advance on the same layer as the layer constituting the target wiring of the printed circuit board, and the electric capacity at that time is measured, and the electric capacity per unit line length of each layer is measured. Obtaining the capacitance value eliminates the need to externally input the electric capacitance value per unit line length of each layer of electric wiring necessary for determining the quality of electric wiring, and also eliminates the per unit line length deviation from the actual value. There is an effect that erroneous determination by inputting the capacitance value is eliminated.
【図１】本発明の実施の形態のプリント基板の検査装置
の構成図である。FIG. 1 is a configuration diagram of a printed circuit board inspection apparatus according to an embodiment of the present invention.
【図２】従来のプリント基板の検査装置の構成図であ
る。FIG. 2 is a configuration diagram of a conventional printed circuit board inspection apparatus.
１ プリント基板 ２ 電気配線 ３ 端子 ４ 測定アーム ５ 対向電極 ６ 測定針 ７ 電気容量計 ８ 良否判定部 ９ 期待値データ算出部 １０ 配線長格納部 １１ 検査条件入力部 １２ 良否表示部 １３ 配線 １４ 配線 １５ 配線 １６ 標準配線 １７ 標準配線 １８ 標準配線 １９ 標準端子 ２０ 標準端子 ２１ 標準端子 DESCRIPTION OF SYMBOLS 1 Printed circuit board 2 Electric wiring 3 Terminal 4 Measurement arm 5 Counter electrode 6 Measuring needle 7 Electric capacity meter 8 Pass / fail judgment part 9 Expected value data calculation part 10 Wire length storage part 11 Inspection condition input part 12 Pass / fail indication part 13 Wiring 14 Wiring 15 Wiring 16 Standard wiring 17 Standard wiring 18 Standard wiring 19 Standard terminal 20 Standard terminal 21 Standard terminal
Claims (4)
し、前記プリント基板に設けられた配線である対象配線
と前記対向電極との間の電気容量である対象容量を測定
し、この対象容量により前記対象配線の良否を判定する
プリント基板の検査方法において、 前記プリント基板に長さが既知の標準配線を設けてお
き、この標準配線と前記対向電極との間の電気容量であ
る標準容量を測定し、前記標準配線の長さ、前記標準容
量および前記対象配線の設計上の長さから算出する期待
値容量と前記対象容量とを比較することを特徴とするプ
リント基板の検査方法。An opposing electrode is disposed facing a printed circuit board, and a target capacitance, which is an electric capacitance between a target wiring, which is a wiring provided on the printed circuit board, and the counter electrode is measured. In the inspection method of the printed circuit board to determine the quality of the target wiring according to, a standard wiring having a known length is provided on the printed circuit board, and a standard capacitance which is an electric capacitance between the standard wiring and the counter electrode is determined. A method for inspecting a printed circuit board, comprising: measuring a length of the standard wiring, a standard capacitance, and an expected capacitance calculated from a design length of the target wiring and the target capacitance.
し、前記プリント基板の複数の層に設けられた配線が接
続された対象配線と前記対向電極との間の電気容量であ
る対象容量を測定し、この対象容量により前記対象配線
の良否を判定するプリント基板の検査方法において、 前記プリント基板の前記対象配線が及ぶ各層に互いに分
離された長さが既知の標準配線を設けておき、これら各
層の標準配線と前記対向電極との間の電気容量である標
準容量を測定し、各層ごとに前記標準配線の長さ、前記
標準容量および前記対象配線の対応する層における設計
上の長さから各層の期待値容量を算出し、これら各層の
期待値容量を合計した期待値容量と前記対象容量とを比
較することを特徴とするプリント基板の検査方法。2. A method according to claim 1, further comprising: arranging a counter electrode facing the printed circuit board, and setting a target capacitance, which is an electric capacitance between the target wiring to which wirings provided on a plurality of layers of the printed board are connected and the counter electrode. In a printed circuit board inspection method of measuring and determining the quality of the target wiring based on the target capacitance, standard wirings having known lengths separated from each other are provided on each layer of the printed circuit board covered by the target wiring. The standard capacitance, which is the electric capacitance between the standard wiring of each layer and the counter electrode, is measured, and the length of the standard wiring for each layer, the standard capacitance and the designed length of the target wiring corresponding to the corresponding layer are calculated from A method for inspecting a printed circuit board, comprising calculating an expected value capacity of each layer, and comparing the expected value capacity obtained by summing the expected value capacity of each layer with the target capacity.
否を判定するプリント基板の検査装置において、 前記プリント基板に対向して配置する対向電極と、測定
針と、この測定針を前記プリント基板に設けられた導体
に接触させた時の前記プリント基板と前記対向電極との
間の電気容量を測定する電気容量計と、前記対象配線の
設計上の長さを格納しておく配線長格納部と、前記プリ
ント基板に設けておいた長さが既知の標準配線に前記測
定針を接触させた時の前記電気容量計で測定した標準容
量および前記配線長格納部に格納された前記対象配線の
長さから当該対象配線の期待値容量を算出する期待値デ
ータ算出部と、前記測定針を前記対象配線に接触させた
時の前記電気容量計で測定した対象容量を期待値容量と
比較する良否判定部とを含むことを特徴とするプリント
基板の検査装置。3. An inspection apparatus for a printed circuit board for judging the quality of a target wiring provided on a printed circuit board, comprising: a counter electrode arranged to face the printed circuit board; a measuring needle; An electric capacitance meter for measuring an electric capacitance between the printed circuit board and the counter electrode when brought into contact with a provided conductor; and a wiring length storage unit for storing a designed length of the target wiring. The length of the target wire stored in the wire length storage unit and the standard capacitance measured by the capacitance meter when the measuring needle is brought into contact with the standard wire having a known length provided on the printed circuit board. Then, an expected value data calculation unit for calculating an expected value capacity of the target wiring, and a pass / fail determination of comparing the target capacity measured by the capacitance meter when the measuring needle is brought into contact with the target wiring with the expected value capacity. Department Inspection apparatus of a printed circuit board characterized by Mukoto.
線が接続された対象配線の良否を判定するプリント基板
の検査装置において、 前記プリント基板に対向して配置する対向電極と、測定
針と、この測定針を前記プリント基板に設けられた導体
に接触させた時の前記プリント基板と前記対向電極との
間の電気容量を測定する電気容量計と、前記対象配線の
各層における配線の設計上の長さを格納しておく配線長
格納部と、前記プリント基板の前記対象配線が及ぶ各層
に設けておいた互いに分離された長さが既知の標準配線
それぞれに前記測定針を接触させた時の前記電気容量計
で測定した標準容量および前記配線長格納部に格納され
た前記対象配線の対応する層における配線の設計上の長
さそれぞれから当該対象配線の各層における配線の期待
値容量を算出しこれらの各層の期待値容量を合計して当
該対象配線の期待値容量を算出する期待値データ算出部
と、前記測定針を前記対象配線に接触させた時の前記電
気容量計で測定した対象容量を前記対象配線の期待値容
量と比較する良否判定部とを含むことを特徴とするプリ
ント基板の検査装置。4. An inspection apparatus for a printed circuit board for judging the quality of a target wiring to which wirings provided on a plurality of layers of a printed circuit board are connected, comprising: a counter electrode arranged to face the printed circuit board; An electric capacitance meter for measuring an electric capacitance between the printed circuit board and the counter electrode when the measuring needle is brought into contact with a conductor provided on the printed circuit board; and a design of wiring in each layer of the target wiring. When the measuring needle is brought into contact with each of the standard wirings having a known length, which are provided on each layer of the printed circuit board and over which the target wiring extends and whose lengths are known, the wiring length storing unit for storing the length of the target wiring. Of the wiring in each layer of the target wiring from each of the standard capacitance measured by the capacitance meter and the designed length of the wiring in the corresponding layer of the target wiring stored in the wiring length storage unit. An expected value data calculator for calculating a waiting capacity and summing the expected capacity of each of these layers to calculate the expected capacity of the target wiring; and the electric capacity when the measuring needle is brought into contact with the target wiring. A printed circuit board inspection device, comprising: a pass / fail determination unit that compares a target capacitance measured by a meter with an expected value capacitance of the target wiring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09510699A JP3260720B2 (en) | 1999-04-01 | 1999-04-01 | Inspection method and inspection device for printed circuit board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09510699A JP3260720B2 (en) | 1999-04-01 | 1999-04-01 | Inspection method and inspection device for printed circuit board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000292472A JP2000292472A (en) | 2000-10-20 |
| JP3260720B2 true JP3260720B2 (en) | 2002-02-25 |
Family
ID=14128626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09510699A Expired - Lifetime JP3260720B2 (en) | 1999-04-01 | 1999-04-01 | Inspection method and inspection device for printed circuit board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3260720B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001330579A (en) * | 2000-05-23 | 2001-11-30 | Nec Ibaraki Ltd | Pattern inspection method and pattern inspection device and recording medium |
| JP2003014808A (en) * | 2001-06-28 | 2003-01-15 | Hioki Ee Corp | Creation method for reference data and circuit-board inspection apparatus |
| AT507468B1 (en) * | 2008-10-15 | 2010-10-15 | Dtg Int Gmbh | DETERMINATION OF CHARACTERISTICS OF AN ELECTRICAL DEVICE |
| JP6076208B2 (en) * | 2013-06-21 | 2017-02-08 | 株式会社日本マイクロニクス | Wiring board inspection apparatus and wiring board inspection method |
-
1999
- 1999-04-01 JP JP09510699A patent/JP3260720B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000292472A (en) | 2000-10-20 |
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