JP3243299B2 - Solution preparation apparatus and preparation method - Google Patents

Solution preparation apparatus and preparation method

Info

Publication number
JP3243299B2
JP3243299B2 JP28846692A JP28846692A JP3243299B2 JP 3243299 B2 JP3243299 B2 JP 3243299B2 JP 28846692 A JP28846692 A JP 28846692A JP 28846692 A JP28846692 A JP 28846692A JP 3243299 B2 JP3243299 B2 JP 3243299B2
Authority
JP
Japan
Prior art keywords
liquid
solution
storage tank
suction
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28846692A
Other languages
Japanese (ja)
Other versions
JPH06165927A (en
Inventor
文夫 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikkiso Co Ltd
Original Assignee
Nikkiso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikkiso Co Ltd filed Critical Nikkiso Co Ltd
Priority to JP28846692A priority Critical patent/JP3243299B2/en
Priority to TW082102917A priority patent/TW243504B/zh
Publication of JPH06165927A publication Critical patent/JPH06165927A/en
Application granted granted Critical
Publication of JP3243299B2 publication Critical patent/JP3243299B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Landscapes

  • Accessories For Mixers (AREA)
  • Control Of Non-Electrical Variables (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、溶液の調製技術さらに
はイオンクロマトグラフィーによるイオン種の検出に適
用して特に有効な技術に関し、例えばイオンクロマトグ
ラフィーによる分析装置におけるイオン交換体に流す溶
離液の調製に利用して有用な技術に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for preparing a solution, and particularly to a technique which is particularly effective when applied to the detection of ionic species by ion chromatography. For example, an eluent flowing through an ion exchanger in an analyzer by ion chromatography The present invention relates to a technique useful for the preparation of a compound.

【0002】[0002]

【従来の技術】例えば、沸騰水型動力炉における原子炉
の炉水中に存在するイオン種の検出や、半導体製造工場
で使用される超純水中に存在するイオン種の検出には、
一般にイオンクロマトグラフィーによる分析装置が用い
られる。この分析装置の稼働時には、その分離カラム
に、所定の試薬を純水等で希釈することにより所定濃度
に調製してなる溶離液を常時流し続けることが要請され
る。
2. Description of the Related Art For example, detection of ionic species present in reactor water of a boiling water power reactor and detection of ionic species present in ultrapure water used in a semiconductor manufacturing plant are described below.
Generally, an analyzer using ion chromatography is used. During the operation of this analyzer, it is required that an eluent prepared by diluting a predetermined reagent to a predetermined concentration by diluting a predetermined reagent with pure water or the like always flows through the separation column.

【0003】この要請に対して、従来は、予め試薬の原
液に純水を混合させて所定濃度に希釈した溶離液を大型
の貯留タンクに大量に溜め、この貯留タンクから直接ポ
ンプを介して分離カラムに溶離液を流すようにしてい
る。或は、試薬の原液および純水を夫々個別に比較的小
型の貯留タンクに溜め、それら2液を各貯留タンクから
別々のポンプを介して一旦希釈タンクに貯留して混合す
ることにより溶離液を調製し、その希釈タンクからさら
に別のポンプを介して分離カラムに溶離液を流すように
している。しかし、上述した2例は、貯留タンクが大型
であったり、希釈タンクおよび多数のポンプを必要とす
るなど、何れもタンクやポンプの設置に広大なスペース
が必要であるため、狭いスペースへの設置には適さな
い。
[0003] In response to this demand, conventionally, a large amount of eluate, which has been diluted to a predetermined concentration by previously mixing pure water with a reagent stock solution, is stored in a large storage tank and separated from this storage tank directly via a pump. The eluent is allowed to flow through the column. Alternatively, the undiluted solution and pure water of the reagents are individually stored in relatively small storage tanks, and the two liquids are temporarily stored in the dilution tanks from the respective storage tanks via separate pumps and mixed, so that the eluent is obtained. The eluent is prepared and the eluent is allowed to flow from the dilution tank to the separation column via another pump. However, the two examples described above require a large space for installing the tank or the pump, such as a large storage tank, a dilution tank and a large number of pumps, and so the installation in a narrow space is required. Not suitable for

【0004】そこで、試薬の原液を純水で希釈して溶離
液を調製しながらその溶離液を分離カラムに流す装置に
付いて、限られたスペース内に設置可能であるととも
に、さらに各貯留タンクへの試薬の原液や純水の補給が
長期間にわたり不要となるような小型の装置の開発が望
まれている。
[0004] Therefore, a device for diluting a reagent stock solution with pure water to prepare an eluent and flowing the eluate through a separation column can be installed in a limited space, and furthermore, each storage tank There is a demand for the development of a small-sized apparatus that does not require replenishment of undiluted solution of reagents or pure water into the apparatus for a long time.

【0005】かかる事情に鑑みて、本発明者は、鋭意研
究を重ねた結果、試薬の原液を貯留する比較的小容量の
試薬タンクと、純水を貯留する比較的小容量の溶媒タン
クとに、試薬の原液および純水を同期させた状態で吸引
吐出するダブルプランジャポンプを連結し、そのポンプ
にコイル状や蛇行状や渦巻状の混合配管を連結してなる
試薬の希釈装置について先に提案した。この装置によれ
ば、イオンクロマトグラフィーによる分析装置等に組み
込むことが可能な程度の十分な小型化を達成することが
できた。
In view of such circumstances, as a result of intensive studies, the present inventor has found that a relatively small-capacity reagent tank for storing an undiluted reagent solution and a relatively small-capacity solvent tank for storing pure water are provided. Proposal of a reagent diluting device that connects a double plunger pump that suctions and discharges the undiluted solution and pure water in synchronization with each other, and connects a coiled, meandering, or spiral mixing pipe to the pump did. According to this apparatus, it was possible to achieve a sufficiently small size that can be incorporated into an ion chromatography analyzer or the like.

【0006】[0006]

【発明が解決しようとする課題】従って、次なる課題
は、貯留タンクに貯留させる試薬等を長期間にわたり補
給せずに済むようにすることである。
Therefore, the next object is to avoid the need to replenish reagents and the like stored in the storage tank for a long period of time.

【0007】本発明はかかる事情に鑑みてなされたもの
で、装置の大型化を招くことなく、試薬等の補給が長期
間にわたり不要となる溶液の調製装置および調製方法を
提供することを主たる目的としている。
The present invention has been made in view of such circumstances, and has as its main object to provide an apparatus and a method for preparing a solution in which replenishment of reagents and the like is not required for a long period of time without increasing the size of the apparatus. And

【0008】[0008]

【課題を解決するための手段】本発明に係る溶液の調製
装置においては、溶質、溶媒、濃度および水素イオン指
数等の少なくとも一つが異なる第1の液体と第2の液体
とを個別に夫々貯留する第1の貯留タンクおよび第2の
貯留タンクに、夫々独立した流路を介して、それら各タ
ンク内の第1の液体および第2の液体を同期させた状態
で吸引するとともに吐出する吸引吐出手段が連結され、
該吸引吐出手段に第1の液体と第2の液体とを混合する
混合流路が連結され、該混合流路に、第1の液体と第2
の液体とが混合されてなる溶液を貯留する溶液貯留タン
クが連結されているとともに、該溶液貯留タンクの水位
に応じて前記吸引吐出手段の作動および停止を行う作動
停止手段が設けられていて、前記第1の貯留タンクまた
は前記第2の貯留タンクに、同タンクの水位に応じて作
動および停止が行われる純水製造装置が連結されている
構成とした。
In the apparatus for preparing a solution according to the present invention, a first liquid and a second liquid having at least one of different solutes, solvents, concentrations, hydrogen ion exponents and the like are separately stored. The first and second storage tanks are respectively suctioned and discharged by synchronizing suction and discharge of the first liquid and the second liquid in the respective tanks via independent flow paths, respectively. Means are connected,
A mixing flow path for mixing the first liquid and the second liquid is connected to the suction / discharge means, and the first liquid and the second liquid are connected to the mixing flow path.
A solution storage tank for storing a solution that is mixed with the liquid is connected, and operation stop means for operating and stopping the suction and discharge means according to the water level of the solution storage tank is provided , The first storage tank or
Works in the second storage tank according to the water level in the tank.
A pure water production apparatus that is operated and stopped is connected .

【0009】前記吸引吐出手段と前記混合流路との間
に、第1の液体の流路および第2の液体の流路を夫々所
定の圧力に保持する第1の圧力保持弁および第2の圧力
保持弁が設けられていてもよい。そして、前記第1の貯
留タンクと前記吸引吐出手段との間に、第1の液体中に
溶存している気体成分を除去する溶存ガス除去装置が設
けられていてもよい。さらに、前記第2の貯留タンクは
大気から遮断されていてもよい。
A first pressure holding valve and a second pressure holding valve for holding a first liquid flow path and a second liquid flow path at predetermined pressures between the suction / discharge means and the mixing flow path, respectively. A pressure holding valve may be provided. Further, a dissolved gas removing device for removing a gas component dissolved in the first liquid may be provided between the first storage tank and the suction / discharge unit. Further, the second storage tank may be shielded from the atmosphere.

【0010】本発明に係る溶液の調製方法においては、
第1の貯留タンクおよび第2の貯留タンクに夫々貯留さ
れてなる溶質、溶媒、濃度および水素イオン指数等の少
なくとも一つが異なる第1の液体と第2の液体を、夫々
独立した流路を介して、吸引吐出手段により同期させた
状態で吸引するとともに吐出させ、この吸引吐出手段に
より吐出された第1の液体と第2の液体を混合流路に導
き、該混合流路により第1の液体と第2の液体を混合し
て溶液に調製し、その溶液を溶液貯留タンクに貯留する
とともに、作動停止手段により溶液貯留タンクの水位に
応じて前記吸引吐出手段の作動および停止を行い、か
つ、前記第1の貯留タンクに、同タンクの水位に応じ
て、純水製造装置からの純水の供給および停止を行う
うにした。
In the method for preparing a solution according to the present invention,
The first liquid and the second liquid having different solutes, solvents, concentrations, hydrogen ion indices, and the like stored in the first storage tank and the second storage tank, respectively, are separated through independent flow paths. The first liquid and the second liquid discharged by the suction / discharge unit are guided to a mixing channel, and the first liquid and the second liquid discharged by the suction / discharge unit are guided by the mixing channel. And the second liquid are mixed to prepare a solution, and the solution is stored in the solution storage tank, and the suction and discharge unit is operated and stopped according to the water level of the solution storage tank by the operation stop unit .
In the first storage tank, according to the water level of the tank
Thus, the supply and the stop of the pure water from the pure water producing apparatus are performed .

【0011】[0011]

【作用】本発明に係る溶液の調製装置によれば、第1の
液体および第2の液体を同期させた状態で吸引吐出する
吸引吐出手段に混合流路が連結され、該混合流路に溶液
貯留タンクが連結されているとともに、溶液貯留タンク
の水位に応じて前記吸引吐出手段の作動および停止を行
う作動停止手段が設けられているため、第1の液体と第
2の液体は、吸引吐出された後、混合流路において混合
されて所定の溶液に調製されてから、溶液貯留タンクに
貯留される。そして、このタンクの水位が所定の高水位
になると、吸引吐出手段が停止して溶液の調製が停止す
る。また、調製された溶液がこのタンクから目的箇所に
供給されることによりタンクの水位が下がり、所定の低
水位になると、吸引吐出手段が作動して溶液の調製が開
始する。そして、第1の貯留タンクまたは第2の貯留タ
ンクに、同タンクの水位に応じて作動および停止が行わ
れる純水製造装置が連結されているので、第1の貯留タ
ンクまたは第2の貯留タンクに純水を貯留させる場合
に、純水製造装置からタンクに純水が適宜供給される。
According to the solution preparation apparatus of the present invention, the mixing flow path is connected to the suction and discharge means for suctioning and discharging the first liquid and the second liquid in a synchronized state, and the solution is connected to the mixing flow path. Since the storage tank is connected and the operation stop means for operating and stopping the suction and discharge means according to the water level of the solution storage tank is provided, the first liquid and the second liquid are suctioned and discharged. After that, the mixture is mixed in a mixing channel to prepare a predetermined solution, and then stored in a solution storage tank. When the water level in the tank reaches a predetermined high water level, the suction / discharge means stops, and the preparation of the solution stops. Further, when the prepared solution is supplied from the tank to the target location, the water level in the tank drops, and when the water level reaches a predetermined low water level, the suction / discharge means operates to start preparing the solution. And the first storage tank or the second storage tank
Start and stop according to the water level in the tank
Since the pure water production equipment to be connected is connected, the first storage tank
When storing pure water in the tank or the second storage tank
Then, pure water is supplied to the tank from the pure water production apparatus as appropriate.

【0012】本発明に係る溶液の調製方法によれば、第
1の液体と第2の液体を、吸引吐出手段により同期させ
た状態で吸引吐出させ、混合流路に導き混合することに
より所定の溶液に調製し、その溶液を溶液貯留タンクに
貯留するとともに、作動停止手段により適宜吸引吐出手
段の作動・停止を行うようにしたため、第1の液体およ
び第2の液体の浪費等を抑制しつつ、常時、適量の溶液
が溶液貯留タンクに貯留される。そして、第1の貯留タ
ンクには、その水位に応じて純水製造装置から純水が適
宜供給される。
According to the solution preparation method of the present invention, the first liquid and the second liquid are suction-discharged in a state of being synchronized by the suction-discharge means, and are guided to the mixing flow path to be mixed. A solution is prepared, the solution is stored in a solution storage tank, and the suction / discharge unit is operated / stopped by the operation stop unit as appropriate, so that waste of the first liquid and the second liquid is suppressed. An appropriate amount of the solution is always stored in the solution storage tank. And the first storage tank
Pure water is applied to the tank from the pure water production equipment according to the water level.
Supplied as needed.

【0013】[0013]

【実施例】本発明に係る溶液の調製装置および調製方法
を、第1の液体および第2の液体として夫々純水および
炭酸ナトリウムからなる緩衝溶液(若しくは塩酸溶液)
等の試薬の原液を用いて、純水により試薬の原液を希釈
してなる溶液を調製する場合に適用した例を挙げ、図1
および図2に基づいて、本装置および本方法の特徴とす
るところをあきらかにする。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An apparatus and a method for preparing a solution according to the present invention will be described by using a buffer solution (or hydrochloric acid solution) comprising pure water and sodium carbonate as a first liquid and a second liquid, respectively.
FIG. 1 shows an example in which an undiluted solution of a reagent is used to prepare a solution obtained by diluting the undiluted solution of the reagent with pure water.
Based on FIG. 2 and FIG. 2, features of the present apparatus and the present method will be clarified.

【0014】この溶液の調製装置1(以下、単に「調製
装置1」とする。)は、図1に示すように、純水を貯留
する純水タンク10(第1の貯留タンク)と試薬の原液
を貯留する試薬タンク20(第2の貯留タンク)とに、
各タンク内から純水および試薬の原液を夫々吸引すると
ともに吐出するポンプ30(吸引吐出手段)が連結さ
れ、該ポンプ30に純水側保圧弁40(第1の圧力保持
弁)および試薬側保圧弁50(第2の圧力保持弁)を介
して、混合カラム60(混合流路)が連結され、該混合
カラム60に溶液タンク70(溶液貯留タンク)が連結
されてなるものである。そして、ポンプ30は作動停止
手段により溶液タンク70の水位の高低に応じて作動・
停止するようになっている。
As shown in FIG. 1, a solution preparation apparatus 1 (hereinafter, simply referred to as “preparation apparatus 1”) includes a pure water tank 10 (first storage tank) for storing pure water and a reagent storage tank. A reagent tank 20 (second storage tank) for storing the undiluted solution;
A pump 30 (suction / discharge means) which sucks and discharges pure water and the undiluted solution of the reagent from each tank is connected, and the pump 30 is connected to the pure water side pressure holding valve 40 (first pressure holding valve) and the reagent side pressure holding valve. A mixing column 60 (mixing flow path) is connected via a pressure valve 50 (second pressure holding valve), and a solution tank 70 (solution storage tank) is connected to the mixing column 60. Then, the pump 30 is operated according to the level of the water level of the solution tank 70 by the operation stopping means.
It is designed to stop.

【0015】また、純水タンク10には純水製造装置1
3および溶存ガス除去装置16が連結されている。この
純水製造装置13は純水タンク10の水位の高低に応じ
て作動・停止するようになっている。
The pure water tank 10 contains a pure water producing device 1.
3 and the dissolved gas removing device 16 are connected. The pure water production apparatus 13 is operated and stopped according to the level of the water level in the pure water tank 10.

【0016】上記した各構成要素はチューブにより相互
に連結されている。即ち、純水製造装置13の流出口1
3bと純水タンク10の流入口10aとはチューブ80
により、純水タンク10の流出口10bと溶存ガス除去
装置16の流入口16aとはチューブ81により、溶存
ガス除去装置16の流出口16bとポンプ30の一方の
吸入口31aとはチューブ82により、ポンプ30の一
方の吐出口31bと純水側保圧弁40の流入口40aと
はチューブ83により、夫々連結されている。一方、試
薬タンク20の流出口20bとポンプ30の他方の吸入
口32aとはチューブ84により、ポンプ30の他方の
吐出口32bと試薬側保圧弁50の流入口50aとはチ
ューブ85により、夫々連結されている。純水側保圧弁
40および試薬側保圧弁50の各流出口40b,50b
と混合カラム60の流入口60aとはチューブ86によ
り、混合カラム60の流出口60bと溶液タンク70の
流入口70aとはチューブ87により、夫々連結されて
いる。なお、純水製造装置13の流入口13aにはその
内部に水を導くチューブ88が連結され、また溶液タン
ク70の流出口70bには調製済みの溶液を送る目的箇
所に連通接続されたチューブ89が連結されている。
The above-mentioned components are interconnected by a tube. That is, the outlet 1 of the pure water production apparatus 13
3b and the inlet 10a of the pure water tank 10
Thereby, the outlet 10b of the pure water tank 10 and the inlet 16a of the dissolved gas removing device 16 are connected by a tube 81, and the outlet 16b of the dissolved gas removing device 16 and one suction port 31a of the pump 30 are connected by a tube 82. One discharge port 31b of the pump 30 and the inflow port 40a of the pure water-side pressure-holding valve 40 are connected by a tube 83, respectively. On the other hand, the outlet 20b of the reagent tank 20 and the other inlet 32a of the pump 30 are connected by a tube 84, and the other outlet 32b of the pump 30 and the inlet 50a of the reagent-side pressure holding valve 50 are connected by a tube 85. Have been. Outlets 40b, 50b of the pure water side pressure holding valve 40 and the reagent side pressure holding valve 50
The inflow port 60a of the mixing column 60 is connected by a tube 86, and the outflow port 60b of the mixing column 60 and the inflow port 70a of the solution tank 70 are connected by a tube 87. In addition, a tube 88 for guiding water into the inflow port 13a of the pure water producing apparatus 13 is connected to the inflow port 13a, and a tube 89 connected to a destination for sending the prepared solution is connected to an outflow port 70b of the solution tank 70. Are connected.

【0017】以下、調製装置1による溶液の調製の流れ
に沿って、上記各構成要素等に付いて詳細に説明する。
Hereinafter, each of the above components will be described in detail along the flow of the preparation of a solution by the preparation apparatus 1.

【0018】先ず、純水製造装置13を作動させて純水
を作り、チューブ80を介して純水タンク10に溜め
る。純水タンク10には、タンク内の純水の水位を検出
する検出手段が設けられている。この検出手段には、周
知のものを種々適用可能であるが、例えば液面検出セン
サーなどが使用される。即ち、純水タンク10の上部お
よび下部に夫々高水位センサー11および低水位センサ
ー12が設けられ、それら各センサーの位置と液面とが
一致しているか否かを判断するものである。そして、高
水位センサー11により液面が高水位に達したことが検
出されると、純水製造装置13が停止させられて、純水
タンク10から純水が溢れるのが防止される。一方、低
水位センサー12により液面が低水位まで下がったこと
が検出されると、純水製造装置13が作動させられて、
純水タンク10に純水が補給される。ここで、純水製造
装置13は周知のものである。
First, the pure water producing device 13 is operated to produce pure water, which is stored in the pure water tank 10 via the tube 80. The pure water tank 10 is provided with detection means for detecting the level of pure water in the tank. As the detecting means, various known means can be applied. For example, a liquid level detecting sensor or the like is used. That is, a high water level sensor 11 and a low water level sensor 12 are provided at the upper part and the lower part of the pure water tank 10, respectively, to judge whether or not the position of each of the sensors and the liquid level match. When the high water level sensor 11 detects that the liquid level has reached the high water level, the pure water production device 13 is stopped, and the pure water tank 10 is prevented from overflowing. On the other hand, when the low water level sensor 12 detects that the liquid level has dropped to the low water level, the pure water production device 13 is operated,
Pure water is supplied to the pure water tank 10. Here, the pure water production device 13 is a known device.

【0019】純水タンク10に溜められた純水は、ポン
プ30の吸引によりチューブ81を介して溶存ガス除去
装置16に流れる。この溶存ガス除去装置16を通過す
ることによって、純水中に溶け込んでいる溶存酸素等の
気体成分が除去され、溶存ガスの発泡により引き起こさ
れるポンプ30の作動不良、即ちエアロック現象の発生
が防止される。そして、溶存ガス除去装置16を通過し
た純水はチューブ82を介してポンプ30に至る。
The pure water stored in the pure water tank 10 flows to the dissolved gas removing device 16 via the tube 81 by suction of the pump 30. By passing through the dissolved gas removing device 16, gas components such as dissolved oxygen dissolved in pure water are removed, and malfunction of the pump 30 caused by foaming of dissolved gas, that is, occurrence of an airlock phenomenon is prevented. Is done. The pure water that has passed through the dissolved gas removing device 16 reaches the pump 30 via the tube 82.

【0020】一方、試薬タンク20には試薬の原液を注
入し溜めておく。例えば、試薬タンク20は、タンク内
に塵埃等が混入したり、試薬の蒸発や大気中のガスの吸
収などを防ぐために、フィルター等により大気から遮断
されている。そして、試薬タンク20内の試薬はチュー
ブ84を介してポンプ30に吸引される。ここで、チュ
ーブ84は耐薬品性に優れるフッ素樹脂等からできてい
る。なお、試薬タンク20に、タンクが空であることを
検出する低水位センサー等の図示しない検出手段が設け
られているのはいうまでもない。
On the other hand, an undiluted solution of a reagent is injected and stored in the reagent tank 20. For example, the reagent tank 20 is shut off from the atmosphere by a filter or the like in order to prevent dust or the like from entering the tank, evaporation of the reagent, absorption of gas in the atmosphere, and the like. Then, the reagent in the reagent tank 20 is sucked by the pump 30 via the tube 84. Here, the tube 84 is made of a fluorine resin or the like having excellent chemical resistance. Needless to say, the reagent tank 20 is provided with a detecting means (not shown) such as a low water level sensor for detecting that the tank is empty.

【0021】ポンプ30は、所謂ダブルプランジャポン
プであり、図2に示すように同期させた状態で、2個の
プランジャをモータおよびカムを用いて駆動させる形
式、2個のプランジャを流体圧により駆動させる形式、
或は2個のプランジャを電磁力により駆動させる形式の
ものなどがあり、何れも適用可能である。また、ポンプ
30は、2個のプランジャによる純水および試薬の原液
の吐出量を別々に調整することができるようになってい
る。即ち、2個のプランジャの径を違えることにより、
純水を多く吐出させる一方、試薬の吐出量を少なくする
ことができる。このように吐出量を調整することによっ
て、得られる溶液の濃度を任意に設定することができ
る。
The pump 30 is a so-called double plunger pump, in which two plungers are driven using a motor and a cam in a synchronized state as shown in FIG. 2, and the two plungers are driven by fluid pressure. Format,
Alternatively, there is a type in which two plungers are driven by electromagnetic force, and any of them is applicable. Further, the pump 30 can separately adjust the discharge amounts of the pure water and the reagent stock solution by the two plungers. That is, by changing the diameter of the two plungers,
It is possible to discharge a large amount of pure water while reducing the amount of discharged reagent. By adjusting the ejection amount in this manner, the concentration of the obtained solution can be arbitrarily set.

【0022】ポンプ30から吐出された純水および試薬
の原液は、夫々、チューブ83,85を介して純水側保
圧弁40および試薬側保圧弁50に至る。これら保圧弁
は、ポンプ30の吐出口31b,32bから保圧弁に至
る流路の圧力を、混合カラム60から溶液タンク70に
至る流路の圧力(例えば、本実施例では大気圧であ
る。)よりも高めることにより、ポンプ30からの純水
および試薬の各吐出量を正確に保つようになっている。
また、これら保圧弁は、混合カラム60からの逆流を防
ぐ逆止弁も兼ねている。チューブ83,85は耐圧性に
優れ、さらにチューブ85は耐薬品性に優れるフッ素樹
脂等からできている。
The pure water and the stock solution of the reagent discharged from the pump 30 reach the pure water side pressure holding valve 40 and the reagent side pressure holding valve 50 via the tubes 83 and 85, respectively. In these pressure-holding valves, the pressure in the flow path from the discharge ports 31b and 32b of the pump 30 to the pressure-holding valve is changed to the pressure in the flow path from the mixing column 60 to the solution tank 70 (for example, atmospheric pressure in the present embodiment). By increasing the pressure, the discharge amounts of pure water and reagent from the pump 30 are accurately maintained.
Further, these pressure holding valves also serve as check valves for preventing backflow from the mixing column 60. The tubes 83 and 85 are excellent in pressure resistance, and the tube 85 is made of fluorine resin or the like having excellent chemical resistance.

【0023】純水側保圧弁40および試薬側保圧弁50
を経た純水および試薬の原液は、チューブ86を介して
混合カラム60に流れる。混合カラム60は、例えば耐
薬品性に優れるフッ素樹脂等からなる筒体、即ちカラム
内にガラスビーズが封入されてなるもので、その混合カ
ラム60内を純水および試薬が通過することにより均一
に混合されて所定濃度の溶液が調製される。チューブ8
6は耐圧性および耐薬品性に優れるフッ素樹脂等からで
きている。
Pure water side pressure holding valve 40 and reagent side pressure holding valve 50
The pure water and the undiluted solution of the reagent that have passed through flow through the tube 86 into the mixing column 60. The mixing column 60 is, for example, a cylindrical body made of a fluororesin or the like having excellent chemical resistance, that is, a column in which glass beads are sealed. The pure water and the reagent pass through the mixing column 60 to be uniform. The mixture is mixed to prepare a solution having a predetermined concentration. Tube 8
Reference numeral 6 is made of a fluorine resin or the like having excellent pressure resistance and chemical resistance.

【0024】混合カラム60を経た溶液は、チューブ8
7を介して溶液タンク70に流入し、溜められる。溶液
タンク70には、上述した試薬タンク20と同様に、タ
ンク内の溶液の水位を検出する検出手段が設けられてい
る。この検出手段には、周知のものを種々適用可能であ
るが、例えば液面検出センサーなどが使用される。即
ち、溶液タンク70の上部および下部に夫々高水位セン
サー71および低水位センサー72が設けられ、高水位
センサー71により液面が高水位に達したことが検出さ
れると、作動停止手段によりポンプ30が停止させられ
て、溶液タンク70から溶液が溢れるのが防止される。
一方、低水位センサー72により液面が低水位まで下が
ったことが検出されると、作動停止手段によりポンプ3
0が作動させられて、溶液タンク70に溶液が補給され
る。このような作動停止手段に付いては周知のものの適
用が可能である。ここで、チューブ87は耐薬品性に優
れるフッ素樹脂等からできている。なお、チューブ89
も耐薬品性に優れるフッ素樹脂等からできているのはい
うまでもない。
The solution having passed through the mixing column 60 is supplied to a tube 8
The solution flows into the solution tank 70 through the reservoir 7 and is stored therein. The solution tank 70 is provided with detection means for detecting the water level of the solution in the tank, similarly to the reagent tank 20 described above. As the detecting means, various known means can be applied. For example, a liquid level detecting sensor or the like is used. That is, a high water level sensor 71 and a low water level sensor 72 are provided at the upper and lower portions of the solution tank 70, respectively, and when the high water level sensor 71 detects that the liquid level has reached the high water level, the pump 30 is turned off by the operation stopping means. Is stopped, and the solution is prevented from overflowing from the solution tank 70.
On the other hand, when the low water level sensor 72 detects that the liquid level has dropped to the low water level, the operation stopping means turns the pump 3 off.
0 is operated to supply the solution to the solution tank 70. Well-known means can be applied to such an operation stopping means. Here, the tube 87 is made of a fluorine resin or the like having excellent chemical resistance. The tube 89
Needless to say, it is made of fluororesin or the like having excellent chemical resistance.

【0025】以上、詳述したように、本実施例によれ
ば、純水および試薬の原液をポンプ30で吸引吐出し、
混合カラム60で混合して、溶液タンク70に溜めると
ともに、作動停止手段により溶液タンク70の水位に応
じて適宜ポンプ30が作動・停止させられるので、純水
および試薬の原液の浪費等が抑制され、装置の大型化を
招くことなく、試薬等の補給を長期間にわたり行わずに
済む。
As described above in detail, according to the present embodiment, the pure water and the undiluted solution of the reagent are sucked and discharged by the pump 30,
The mixture is mixed in the mixing column 60 and stored in the solution tank 70, and the pump 30 is operated and stopped as appropriate according to the water level of the solution tank 70 by the operation stopping means, so that waste of pure water and the undiluted solution of the reagent is suppressed. In addition, it is not necessary to replenish reagents or the like for a long time without increasing the size of the apparatus.

【0026】以上本発明者によってなされた発明を実施
例に基づき具体的に説明したが、本発明は上記実施例に
限定されるものではなく、その要旨を逸脱しない範囲で
種々変更可能であることはいうまでもない。
Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the above-described embodiments, and can be variously modified without departing from the gist thereof. Needless to say.

【0027】例えば、上記実施例においては、第1の液
体および第2の液体として夫々純水および試薬の原液を
用いて、調製装置1により試薬の原液を純水で希釈する
場合に付いて説明したが、これに限定されるものではな
く、第2の液体が試薬を希釈してなる適当な濃度の溶液
でもよいし、また第1の液体も試薬の原液やそれを希釈
してなる適当な濃度の溶液でもよく、調製装置1はそれ
ら2液を混合してなる溶液を調整する場合にも適用可能
である。第1の液体が試薬の場合には、純水製造装置1
3が不要になり、チューブ81,82,83が耐薬品性
に優れるフッ素樹脂等からできているのはいうまでもな
い。
For example, in the above-described embodiment, a description will be given of a case where the undiluted reagent solution is diluted with pure water by the preparation apparatus 1 using pure water and undiluted reagent solution as the first liquid and the second liquid, respectively. However, the present invention is not limited to this, and the second liquid may be a solution having an appropriate concentration obtained by diluting the reagent, and the first liquid may be an undiluted solution of the reagent or an appropriate solution obtained by diluting the reagent. A solution having a concentration may be used, and the preparation apparatus 1 is also applicable to a case where a solution obtained by mixing these two solutions is prepared. When the first liquid is a reagent, the pure water producing apparatus 1
Needless to say, the tube 3 becomes unnecessary, and the tubes 81, 82, 83 are made of fluorine resin or the like having excellent chemical resistance.

【0028】また、第1の液体および第2の液体は水溶
液に限らず、例えば油等の有機溶剤など、液体であれば
如何なるものでもよい。
The first liquid and the second liquid are not limited to an aqueous solution, but may be any liquid such as an organic solvent such as oil.

【0029】さらに、調製装置1の各構成要素は、上記
実施例のものに限らず、同等の機能を有するものであれ
ば如何なるものでもよい。例えば、混合流路として混合
カラム60の代わりに従来のコイル状や蛇行状や渦巻状
の混合配管を用いてもよいのはいうまでもないし、吸引
吐出手段としてダブルプランジャ式のポンプ30の代わ
りに、第1の液体および第2の液体を同期させて吸引吐
出することができれば如何なる形式のポンプを用いても
よい。また、プランジャの数を3個以上にすれば、3種
類以上の液体を混合させることができる。
Further, the components of the preparation apparatus 1 are not limited to those of the above embodiment, but may be any components having the same function. For example, it is needless to say that a conventional coiled, meandering or spiral mixing pipe may be used instead of the mixing column 60 as the mixing channel, and the suction and discharge means may be replaced with the double plunger pump 30. Any type of pump may be used as long as the first liquid and the second liquid can be synchronously suctioned and discharged. If the number of plungers is three or more, three or more kinds of liquids can be mixed.

【0030】さらにまた、調製装置1を単独で使用しも
よいし、例えばイオンクロマトグラフィーによる分析装
置と組み合わせて溶離液の調整に適用してもよいし、分
光分析装置等と組み合わせてもよいし、電解研磨装置や
放電加工装置や湿式鍍金装置等と組み合わせてそれら装
置に使用される電解液等の組成の管理などに適用しても
よい。
Furthermore, the preparation apparatus 1 may be used alone, may be applied to the preparation of an eluent in combination with, for example, an ion chromatography analyzer, or may be combined with a spectroscopic analyzer or the like. Alternatively, the present invention may be applied to the management of the composition of an electrolytic solution or the like used in such an apparatus in combination with an electrolytic polishing apparatus, an electric discharge machining apparatus, a wet plating apparatus, or the like.

【0031】[0031]

【発明の効果】本発明に係る溶液の調製装置によれば、
第1の液体および第2の液体を同期させた状態で吸引吐
出する吸引吐出手段に混合流路が連結され、該混合流路
に溶液貯留タンクが連結されているとともに、溶液貯留
タンクの水位に応じて前記吸引吐出手段の作動および停
止を行う作動停止手段が設けられているため、吸引吐出
手段および混合流路により吸引吐出・混合されて調製さ
れた溶液が溶液貯留タンクに溜り、その水位に応じて適
宜吸引吐出手段が作動・停止させられるので、第1の液
体および第2の液体の浪費等が抑制され、装置の大型化
を招くことなく、それら液体の補給を長期間にわたり行
わずに済む。そして、第1の貯留タンクまたは第2の貯
留タンクに、同タンクの水位に応じて作動および停止が
行われる純水製造装置が連結されており、第1の貯留タ
ンクまたは第2の貯留タンクに純水を貯留させる場合
に、純水製造装置からタンクに純水が適宜供給されるの
で、人手による純水の補給を行わずに済む。
According to the apparatus for preparing a solution according to the present invention,
A mixing flow path is connected to a suction and discharge unit that suctions and discharges the first liquid and the second liquid in a synchronized state, and a solution storage tank is connected to the mixing flow path, and a water level of the solution storage tank is adjusted. Since the operation stop means for operating and stopping the suction and discharge means is provided in response, the solution prepared by suction and discharge and mixing by the suction and discharge means and the mixing flow path accumulates in the solution storage tank and reaches the water level. Since the suction / discharge means is appropriately operated / stopped accordingly, waste of the first liquid and the second liquid is suppressed, and the liquid is not replenished for a long time without increasing the size of the apparatus. I'm done. And the first storage tank or the second storage tank.
Start and stop according to the water level of the tank
The pure water production equipment to be performed is connected to the first storage tank.
When storing pure water in the tank or the second storage tank
In addition, pure water is supplied to the tank from the pure water production equipment as appropriate.
Therefore, it is not necessary to supply pure water manually.

【0032】また、前記吸引吐出手段と前記混合流路と
の間に第1の圧力保持弁および第2の圧力保持弁が設け
られていることにより、吸引吐出手段から吐出される第
1の液体および第2の液体の各流路が溶液貯留タンクに
対して所定の圧力となり、それら各液体の吐出量を正確
に保つことができるとともに、それら圧力保持弁が逆止
弁となって、混合流路から吸引吐出手段に混合済みの溶
液が逆流するのを防ぐことができる。
Further, the first pressure holding valve and the second pressure holding valve are provided between the suction / discharge means and the mixing channel, so that the first liquid discharged from the suction / discharge means is provided. Each flow path of the second liquid has a predetermined pressure with respect to the solution storage tank, and the discharge amount of each liquid can be accurately maintained. The mixed solution can be prevented from flowing backward from the path to the suction / discharge means.

【0033】[0033]

【0034】前記第1の貯留タンクと前記吸引吐出手段
との間に、第1の液体中に溶存している気体成分を除去
する溶存ガス除去装置が設けられていれば、第1の液体
中の気体成分の発泡により引き起こされる吸引吐出手段
の作動不良、即ちエアロック現象の発生を防ぐことがで
きる。
If a dissolved gas removal device for removing gas components dissolved in the first liquid is provided between the first storage tank and the suction / discharge means, the first liquid The malfunction of the suction / discharge means caused by the bubbling of the gas component, that is, the airlock phenomenon can be prevented.

【0035】前記第2の貯留タンクが大気から遮断され
ていれば、大気から第2の液体中に塵埃等が混入するの
を防ぐことができるとともに、第2の液体から大気中へ
蒸気が放散されることによる液体の濃度変化や、大気中
の炭酸ガス等を吸収することによる水素イオン指数の変
化等が生じるのを防ぐことができる。
If the second storage tank is shut off from the atmosphere, it is possible to prevent dust and the like from entering the second liquid from the atmosphere and to diffuse vapor from the second liquid into the atmosphere. It is possible to prevent a change in the concentration of the liquid caused by the removal of the gas, a change in the hydrogen ion index caused by absorbing carbon dioxide gas in the atmosphere, and the like.

【0036】本発明に係る溶液の調製方法によれば、第
1の液体と第2の液体を、吸引吐出手段により同期させ
た状態で吸引吐出させ、混合流路に導き混合することに
より所定の溶液に調製し、その溶液を溶液貯留タンクに
貯留するとともに、作動停止手段により適宜吸引吐出手
段の作動・停止を行うようにしたため、第1の液体およ
び第2の液体の浪費等を抑制しつつ、常時、適量の溶液
を溶液貯留タンクに貯留させることができ、一度の試薬
等の補給により、上述した溶液調製装置を長期間作動さ
せることができる。そして、第1の貯留タンクには、そ
の水位に応じて純水製造装置から純水が適宜供給される
ので、人手による純水の補給を行わずに済む。
According to the method for preparing a solution according to the present invention, the first liquid and the second liquid are suctioned and discharged in a state of being synchronized by the suction and discharge means, and are guided to the mixing flow path and mixed to thereby obtain a predetermined liquid. A solution is prepared, the solution is stored in a solution storage tank, and the suction / discharge unit is operated / stopped by the operation stop unit as appropriate, so that waste of the first liquid and the second liquid is suppressed. An appropriate amount of solution can always be stored in the solution storage tank, and the above-described solution preparation apparatus can be operated for a long time by replenishing the reagent once. Then, the first storage tank
Pure water is supplied from the pure water production equipment according to the water level
Therefore, it is not necessary to supply pure water manually.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る調製装置の一実施例を示す装置の
概略構成図である。
FIG. 1 is a schematic configuration diagram of an apparatus showing one embodiment of a preparation apparatus according to the present invention.

【図2】その調製装置におけるポンプの作動時の特性を
示す特性図である。
FIG. 2 is a characteristic diagram showing characteristics at the time of operating a pump in the preparation apparatus.

【符号の説明】[Explanation of symbols]

1 調製装置(溶液の調製装置) 10 純水タンク(第1の貯留タンク) 13 純水製造装置 16 溶存ガス除去装置 20 試薬タンク(第2の貯留タンク) 30 ポンプ(吸引吐出手段) 40 純水側保圧弁(第1の圧力保持弁) 50 試薬側保圧弁(第2の圧力保持弁) 60 混合カラム(混合流路) 70 溶液タンク(溶液貯留タンク) DESCRIPTION OF SYMBOLS 1 Preparation apparatus (solution preparation apparatus) 10 Pure water tank (1st storage tank) 13 Pure water production apparatus 16 Dissolved gas removal apparatus 20 Reagent tank (2nd storage tank) 30 Pump (suction discharge means) 40 Pure water Side pressure holding valve (first pressure holding valve) 50 Reagent side pressure holding valve (second pressure holding valve) 60 Mixing column (mixing flow path) 70 Solution tank (solution storage tank)

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 溶質、溶媒、濃度および水素イオン指数
等の少なくとも一つが異なる第1の液体と第2の液体と
を個別に夫々貯留する第1の貯留タンクおよび第2の貯
留タンクに、夫々独立した流路を介して、それら各タン
ク内の第1の液体および第2の液体を同期させた状態で
吸引するとともに吐出する吸引吐出手段が連結され、該
吸引吐出手段に第1の液体と第2の液体とを混合する混
合流路が連結され、該混合流路に、第1の液体と第2の
液体とが混合されてなる溶液を貯留する溶液貯留タンク
が連結されているとともに、該溶液貯留タンクの水位に
応じて前記吸引吐出手段の作動および停止を行う作動停
止手段が設けられていて、前記第1の貯留タンクまたは
前記第2の貯留タンクに、同タンクの水位に応じて作動
および停止が行われる純水製造装置が連結されている
とを特徴とする溶液の調製装置。
1. A first storage tank and a second storage tank for individually storing a first liquid and a second liquid, each of which differs in at least one of a solute, a solvent, a concentration, and a hydrogen ion index. A suction / discharge unit that suctions and discharges the first liquid and the second liquid in the respective tanks in a synchronized state through independent flow paths is connected to the first liquid and the second liquid. A mixing channel for mixing the second liquid is connected, and a solution storage tank for storing a solution obtained by mixing the first liquid and the second liquid is connected to the mixing channel, Operation stopping means for operating and stopping the suction / discharge means according to the water level of the solution storage tank is provided , and the first storage tank or
Operate according to the water level of the second storage tank
And a deionized water production device to be stopped is connected .
【請求項2】 前記吸引吐出手段と前記混合流路との間
に、第1の液体の流路および第2の液体の流路を夫々所
定の圧力に保持する第1の圧力保持弁および第2の圧力
保持弁が設けられていることを特徴とする請求項1記載
の溶液の調製装置。
2. A first pressure holding valve for holding a first liquid flow path and a second liquid flow path at a predetermined pressure between the suction / discharge unit and the mixing flow path, respectively. 2. The solution preparation apparatus according to claim 1, further comprising two pressure holding valves.
【請求項3】 前記第1の貯留タンクと前記吸引吐出手
段との間に、第1の液体中に溶存している気体成分を除
去する溶存ガス除去装置が設けられていることを特徴と
する請求項1または2記載の溶液の調製装置。
3. A dissolved gas removing device for removing a gas component dissolved in a first liquid is provided between the first storage tank and the suction / discharge means. An apparatus for preparing a solution according to claim 1.
【請求項4】 前記第2の貯留タンクは大気から遮断さ
れていることを特徴とする請求項1、2または3記載の
溶液の調製装置。
4. The solution preparation apparatus according to claim 1, wherein the second storage tank is shielded from the atmosphere.
【請求項5】 第1の貯留タンクおよび第2の貯留タン
クに夫々貯留されてなる溶質、溶媒、濃度および水素イ
オン指数等の少なくとも一つが異なる第1の液体と第2
の液体を、夫々独立した流路を介して、吸引吐出手段に
より同期させた状態で吸引するとともに吐出させ、この
吸引吐出手段により吐出された第1の液体と第2の液体
を混合流路に導き、該混合流路により第1の液体と第2
の液体を混合して溶液に調製し、その溶液を溶液貯留タ
ンクに貯留するとともに、作動停止手段により溶液貯留
タンクの水位に応じて前記吸引吐出手段の作動および停
止を行い、かつ、前記第1の貯留タンクに、同タンクの
水位に応じて、純水製造装置からの純水の供給および停
止を行うことを特徴とする溶液の調製方法。
5. The first liquid and the second liquid having different solutes, solvents, concentrations, hydrogen ion indices, and the like stored in the first storage tank and the second storage tank, respectively.
Are sucked and discharged in a synchronized state by suction and discharge means through independent flow paths, and the first liquid and the second liquid discharged by the suction and discharge means are mixed into a mixing flow path. Guiding the first liquid and the second liquid through the mixing channel.
The solution is mixed to prepare a solution, the solution is stored in a solution storage tank, and the suction / discharge means is operated and stopped according to the water level of the solution storage tank by operation stop means , and Storage tank
Supply and stop of pure water from the pure water production equipment according to the water level
Process for the preparation of solutions and performs stop.
JP28846692A 1992-10-27 1992-10-27 Solution preparation apparatus and preparation method Expired - Lifetime JP3243299B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP28846692A JP3243299B2 (en) 1992-10-27 1992-10-27 Solution preparation apparatus and preparation method
TW082102917A TW243504B (en) 1992-10-27 1993-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28846692A JP3243299B2 (en) 1992-10-27 1992-10-27 Solution preparation apparatus and preparation method

Publications (2)

Publication Number Publication Date
JPH06165927A JPH06165927A (en) 1994-06-14
JP3243299B2 true JP3243299B2 (en) 2002-01-07

Family

ID=17730576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28846692A Expired - Lifetime JP3243299B2 (en) 1992-10-27 1992-10-27 Solution preparation apparatus and preparation method

Country Status (2)

Country Link
JP (1) JP3243299B2 (en)
TW (1) TW243504B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103521104A (en) * 2012-07-05 2014-01-22 上海市东方医院 Program-controlled preparation device and method of liquid-state reagents

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688454B2 (en) * 2004-09-06 2011-05-25 花王株式会社 Mixing attachments and drug spreaders
JP5642137B2 (en) * 2012-10-25 2014-12-17 日機装株式会社 Solution preparation apparatus and solution preparation method
CN110095403A (en) * 2019-05-31 2019-08-06 中国电力科学研究院有限公司 A kind of method and system controlling dry-type transformer environmental test electrical conductivity of solution
CN111135752A (en) * 2019-12-16 2020-05-12 安徽德利来环保科技有限公司 Device for continuously producing urea solution for low biuret vehicle
CN112755824A (en) * 2020-12-07 2021-05-07 安徽兴锂新能源有限公司 Fluid mixing configuration system
CN112828494B (en) * 2021-01-06 2022-04-29 研迈电子材料(上海)有限公司 Novel brazing flux production method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103521104A (en) * 2012-07-05 2014-01-22 上海市东方医院 Program-controlled preparation device and method of liquid-state reagents
CN103521104B (en) * 2012-07-05 2016-02-10 上海市东方医院 The program control device for formulating of liquid reagent and method thereof

Also Published As

Publication number Publication date
TW243504B (en) 1995-03-21
JPH06165927A (en) 1994-06-14

Similar Documents

Publication Publication Date Title
JP5642137B2 (en) Solution preparation apparatus and solution preparation method
US20200391163A1 (en) Systems and Methods for Generating a Conductive Liquid Comprising Deionized Water with Ammonia Gas Dissolved Therein
JP5258560B2 (en) Integrated deaeration and deaerator
JP3243299B2 (en) Solution preparation apparatus and preparation method
US20080006578A1 (en) Method and apparatus for pervaporation control in chromatographic systems
CN101140858A (en) Substrate processing device
EP1904213B1 (en) Integrated degassing and debubbling apparatus
US6588927B2 (en) Purified developer producing equipment and method
JP2014062827A (en) Deaeration liquid feeding device and analyzer
US10920764B2 (en) Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method
JP2568791B2 (en) Reagent dilution apparatus and dilution method
JP4248989B2 (en) High pressure processing apparatus and high pressure processing method
TW423985B (en) Apparatus for removing impurities in air
KR100849634B1 (en) Apparatus and method for detecting a concentration of a metal
JP2002020101A (en) Hydrogen supply system
JP7328840B2 (en) Gas-dissolved water production device and method
KR20090088955A (en) Method of treating a gas stream
JP2003107063A (en) Deaeration apparatus and method of high performance liquid chromatography
CN113433258B (en) Ion chromatograph with multiple working modes
JPS5932990A (en) Apparatus for removal of dissolved oxygen in reverse- osmotic desalinator
JP3168015B2 (en) Aqueous solution evaporator
JPH0324625B2 (en)
CN116603805A (en) Liquid path bubble removing device and removing method
CN116536685A (en) Online double-ion acid-base salt solution electrochemical automatic generation device and method
JPH0833280A (en) Sealed oil supply for electric rotating machine

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071019

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101019

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121019

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121019

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131019

Year of fee payment: 12

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131019

Year of fee payment: 12