JP3239957B2 - Thin film cavity resonator with pole piece - Google Patents
Thin film cavity resonator with pole pieceInfo
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- JP3239957B2 JP3239957B2 JP09290992A JP9290992A JP3239957B2 JP 3239957 B2 JP3239957 B2 JP 3239957B2 JP 09290992 A JP09290992 A JP 09290992A JP 9290992 A JP9290992 A JP 9290992A JP 3239957 B2 JP3239957 B2 JP 3239957B2
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- cavity
- resonator
- magnetic field
- cavity resonator
- thin film
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、空洞共振器に関し、よ
り詳しくは、電子スピン共鳴装置における測定スペクト
ルの安定度、感度向上を図ったポールピース付き薄膜空
洞共振器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cavity resonator, and more particularly to a thin-film cavity resonator with a pole piece for improving the stability and sensitivity of a measured spectrum in an electron spin resonance apparatus.
【０００２】[0002]
【従来の技術と発明が解決しようとする課題】電子スピ
ン共鳴装置において、磁場変調のための高周波磁場が、
空洞共振器側壁を透過するとき、側壁に発生する渦電流
は、印加静磁場と干渉し、空洞共振器に振動を惹起す
る。この振動の周波数は磁場変調周波数と等しいので、
感度への影響が大きい。これに対しては既に、G.Feher
がガラス製空洞に銀をコーティングし、渦電流を低減
し、この影響が避けられると提案している(B.S.T.J.,Ma
rch,1957) 。2. Description of the Related Art In an electron spin resonance apparatus, a high-frequency magnetic field for modulating a magnetic field is
When passing through the side wall of the cavity resonator, the eddy current generated on the side wall interferes with the applied static magnetic field, and causes vibration in the cavity resonator. Since the frequency of this vibration is equal to the magnetic field modulation frequency,
Significant effect on sensitivity. G. Feher has already
Proposes that glass cavities can be coated with silver to reduce eddy currents and avoid this effect (BSTJ, Ma
rch, 1957).
【０００３】しかしこの提案は、その後、市販装置とし
て採用されることなく、従来の空洞共振器は、銅等の金
属製ブロックを用い、これに所要の寸法形状の空洞を穿
ち、内面に防錆のための金メッキ等を施して共鳴検出用
の空洞共振器となっている。磁場変調による振動は、コ
イルを空洞内部に配置することにより、変調磁場の空洞
側壁への貫通を避け、加えてジャッキ等で空洞共振器を
ポールピースに圧着固定して凌いでいる。However, this proposal was not adopted as a commercially available device, but the conventional cavity resonator used a metal block made of copper or the like, bored a cavity having a required size and shape, and provided rust prevention on the inner surface. For this reason, a cavity resonator for resonance detection is formed by applying gold plating or the like. By virtue of the magnetic field modulation, the coil is disposed inside the cavity to prevent the modulated magnetic field from penetrating into the side wall of the cavity.
【０００４】G.Feher の時代には事実上工業化の困難で
あった彼の提案も現在では、真空成形によるガラスの精
密仕上げ等により可能となっているが、さらに高分子材
料、セラミックス材料の発達によっても、必要な精度で
空洞共振器を製作できるようになった。そのように製作
された非導電体製の空洞共振器本体の内壁を、銅、金の
ような導電度の良い金属で覆い、その厚さを、(1) マイ
クロ波の表皮効果の厚さ（Ｘバンドで約０．５μｍ）よ
りは充分厚く、(2) 磁場変調周波数の表皮効果の厚さ
（１００ｋＨｚで約１５７μｍ）よりは充分に薄く、仕
上げることにより、渦電流による振動を避けることがで
きる。[0004] His proposal, which was practically difficult to industrialize in the era of G. Feher, is now possible by precision finishing of glass by vacuum forming, etc. Has made it possible to manufacture a cavity resonator with the required accuracy. The inner wall of the non-conductive cavity resonator body manufactured in such a manner is covered with a metal having good conductivity such as copper or gold, and its thickness is defined as (1) the thickness of the skin effect of the microwave ( The thickness is sufficiently thicker than about 0.5 μm in the X band, and (2) sufficiently thinner than the thickness of the skin effect of the magnetic field modulation frequency (about 157 μm at 100 kHz). .
【０００５】この効果は、本願空洞共振器においても、
なお保持され得ることは言うまでもない。[0005] This effect can be obtained even in the cavity resonator of the present invention.
Needless to say, it can be retained.
【０００６】先に述べた空洞内部に変調コイルを配置す
る従来の多くの方式では、次のような問題が付随する。[0006] Many of the above-described conventional methods of disposing a modulation coil inside a cavity have the following problems.
【０００７】（１）共振空洞内部に設けられた変調コイ
ルのために、共振空洞のＱが低下する。(1) The Q of the resonant cavity is reduced due to the modulation coil provided inside the resonant cavity.
【０００８】（２）上記Ｑの低下のため、内部変調コイ
ルは、効率のよい巻数、形状を制約される。実用されて
いる巻数は、僅か１〜２ターンに過ぎない。このため、
過大な変調電流を供給しなければならない。(2) Due to the reduction in Q, the number of turns and shape of the internal modulation coil are restricted efficiently. The number of turns in practical use is only 1-2 turns. For this reason,
Excessive modulation current must be supplied.
【０００９】（３）コイルは共振空洞内壁を貫通するた
め、マイクロ波の漏洩を生じ、細心な操作が要求され
る。また貫通部には、過大な変調電流によるコイルの温
度上昇のために、しばしば緩みを生じる等々の問題があ
る。(3) Since the coil penetrates through the inner wall of the resonance cavity, microwave leakage occurs, and careful operation is required. In addition, there is a problem in the through portion that the coil is often loosened due to an increase in coil temperature due to an excessive modulation current.
【００１０】さらに他の対策として、従来、しばしば用
いられたのが、変調周波数を下げ、渦電流による損失を
避けた外部変調法である。たとえば、８０Ｈｚ、２７０
Ｈｚ等の変調周波数が用いられている。[0010] As another measure, an external modulation method often used in the past is to lower the modulation frequency and avoid loss due to eddy current. For example, 80 Hz, 270
A modulation frequency such as Hz is used.
【００１１】この場合には、Ｑの低下は避けられるが、
検波器雑音の多い低周波で、マイクロ波を検波すること
になるので、装置の感度低下は覆うべくもない。In this case, although a decrease in Q can be avoided,
Since microwaves are detected at a low frequency with a large amount of detector noise, a decrease in the sensitivity of the apparatus cannot be covered.
【００１２】従来装置に見られたこのような諸問題は、
非導電性材料による空洞本体内面に導電性薄膜を施した
共振器によって、過大な高周波出力装置を備える事な
く、またＱ値の低下を招く変調コイルを空洞内に設け
ず、外部から印加した高周波磁界を有効に空洞共振器内
に透過させることができる。[0012] These problems encountered in the conventional device are as follows.
By using a resonator with a conductive thin film on the inner surface of the cavity body made of non-conductive material, there is no excessive high-frequency output device, and no modulation coil that reduces the Q value is provided in the cavity. The magnetic field can be effectively transmitted into the cavity resonator.
【００１３】電子スピン共鳴では、極めて高い安定度の
分極磁場を必要とする。[0013] Electron spin resonance requires a polarization field of extremely high stability.
【００１４】分極磁場の温度依存性は、温度による磁束
密度の変化と磁場分布の変化に分けられる。そしてこの
原因となる温度の変化は周囲温度の変化が基本要因であ
るが、特に永久磁石を使用する装置の場合、磁場掃引お
よび磁場変調に伴うそれらコイルの発熱に影響されるこ
とが多い。The temperature dependence of the polarization magnetic field can be divided into a change in magnetic flux density and a change in magnetic field distribution due to temperature. The change in temperature that causes this is basically a change in ambient temperature, but particularly in the case of a device using a permanent magnet, it is often affected by heat generated by those coils due to magnetic field sweeping and magnetic field modulation.
【００１５】このうち、磁束密度の温度変化は、マグネ
ットの磁気特性の変化もあるが、磁極間隙の変化が大き
く影響している。したがって、膨張係数の非常に低い空
洞共振器母材の両側にポールピースが固定されれば、温
度の変化にもかかわらず、磁極間隙は不変に保たれ、温
度による磁束密度の変化は軽減される。Among these changes in temperature of the magnetic flux density, there is a change in the magnetic properties of the magnet, but a change in the magnetic pole gap has a great effect. Therefore, if the pole pieces are fixed on both sides of the cavity resonator base material having a very low expansion coefficient, the magnetic pole gap is kept constant despite the temperature change, and the change in the magnetic flux density due to the temperature is reduced. .
【００１６】さらに磁場掃引コイル、磁場変調コイルを
も低膨張係数の空洞本体部分に配置すれば、空洞本体は
発熱に影響されることが少なく、ポールピースとマグネ
ット磁極との間隙に伝導が妨げられて、発熱がマグネッ
トの磁極等に温度変化を与えることも軽減される。そし
てコイルの発熱は、前記間隙および空洞本体に加えられ
る適切な対流または通風により装置外に放散される。Further, if the magnetic field sweeping coil and the magnetic field modulating coil are also arranged in the hollow main body having a low expansion coefficient, the hollow main body is less affected by heat generation, and conduction is hindered by the gap between the pole piece and the magnet magnetic pole. Thus, it is also possible to reduce the occurrence of temperature change in the magnetic poles of the magnet due to heat generation. The heat generated by the coil is then radiated out of the device by appropriate convection or ventilation applied to the gap and the cavity body.
【００１７】磁場分布の変化は、ポールピースの平行度
の変化によることが多い。本発明によれば、ポールピー
スの平行面は膨張係数の非常に低い母材によって定まる
ので、平行度の変化、したがって磁場分布の変化もまた
著しく軽減される。Changes in the magnetic field distribution are often due to changes in the parallelism of the pole pieces. According to the invention, the parallel plane of the pole piece is determined by the base material having a very low coefficient of expansion, so that the change in the parallelism and therefore the change in the magnetic field distribution are also significantly reduced.
【００１８】このように、非導電性材料を母体とし、平
行平面に仕上げた両側面にポールピースを固定し、その
中心に空洞を穿ち、内面を導電性薄膜で覆った空洞共振
器を形成することにより、振動、静磁場のドリフト、磁
場均一度の変化等信号検出に影響する諸要因を、同時に
除去または軽減し、装置の感度・安定度を著しく向上す
ることができる。As described above, a pole resonator is fixed to both sides of a base made of a non-conductive material, finished in parallel planes, a cavity is formed at the center thereof, and a cavity resonator is formed in which the inner surface is covered with a conductive thin film. As a result, various factors affecting signal detection, such as vibration, drift of a static magnetic field, and change in magnetic field uniformity, can be eliminated or reduced at the same time, and the sensitivity and stability of the apparatus can be significantly improved.
【００１９】上述したように従来においては、Ｑの低
下、感度低下、温度変化の影響等、種々の問題がある。As described above, in the prior art, there are various problems such as a decrease in Q, a decrease in sensitivity, and an influence of a temperature change.
【００２０】そこで、本発明は、感度、安定度が良好な
空洞共振器を提供することを目的とするものである。Therefore, an object of the present invention is to provide a cavity resonator having good sensitivity and stability.
【００２１】[0021]
【課題を解決するための手段】本発明は、電子スピン共
鳴装置に用いられる空洞共振器であって、膨脹係数が僅
少の非導電体材料を母材とし、内部に所要のマイクロ波
共振が得られる空洞を設けこの空洞の壁面に高導電率の
金属薄膜を付着するとともに対向する両端面を平行平面
に仕上げた共振器本体と、この共振器本体の両端面に各
々密着固定した分極磁場用のポールピースとを具備する
ものである。SUMMARY OF THE INVENTION The present invention relates to a cavity resonator used in an electron spin resonance apparatus, which is made of a non-conductive material having a small expansion coefficient as a base material and has a required microwave resonance inside. A cavity body with a high conductivity metal thin film attached to the wall surface of the cavity, and opposing both end faces of which are finished to be parallel planes, and a polarization magnetic field fixed to both end faces of the resonator body in close contact with each other. And a pole piece.
【００２２】[0022]
【作用】本発明によれば、非導電材料を母材とする平行
平面に仕上げた共振器本体の両端面にポールピースを固
定し、また、共振器本体の内部に所要のマイクロ波共振
が得られる空洞を設け、この空洞の壁面に高導電率の金
属薄膜を付着したので、振動、静磁場のドリフト、磁場
均一度の変化等信号検出に影響する諸要因を同時に除去
又は軽減し、感度、安定度を著しく向上することができ
る。According to the present invention, pole pieces are fixed to both end faces of a resonator body finished in a parallel plane using a nonconductive material as a base material, and required microwave resonance is obtained inside the resonator body. Since a metal thin film of high conductivity is attached to the wall of this cavity, various factors affecting signal detection such as vibration, drift of static magnetic field, change in magnetic field uniformity are eliminated or reduced at the same time, sensitivity, The stability can be significantly improved.
【００２３】また、過大な高周波出力装置を備えること
なく、また、Ｑ値の低下を招く変調コイルを空洞内に設
けていないので外部から印加した高周波磁界を有効に共
振器本体内に透過させることができる。Also, since there is no excessive high-frequency output device and no modulation coil that causes a decrease in the Q value is provided in the cavity, it is possible to effectively transmit an externally applied high-frequency magnetic field into the resonator body. Can be.
【００２４】[0024]
【実施例】以下に本発明の実施例を図面を参照して詳述
する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００２５】図１、図２に示す本実施例の空洞共振器１
は、円筒空洞共振器でありＸバンドＴＥ011 モードで後
述する電子スピン共鳴装置１００に用いられるものであ
る。The cavity resonator 1 of this embodiment shown in FIGS. 1 and 2
Is a cylindrical cavity resonator used in an electron spin resonance apparatus 100 described later in an X-band TE0111 mode.
【００２６】この空洞共振器１は、膨脹係数が僅少の非
導電体材料を母材とし、内部に所要のマイクロ波共振が
得られる円筒状の空洞３を設け、この空洞３の壁面に高
導電率の金属薄膜４を付着するとともに対向する両端面
を平行平面に仕上げた全体として直方体状又は立方体状
の共振器本体２と、この共振器本体２の両端面に各々密
着固定した分極磁場用の一対のポールピース５Ａ、５Ｂ
とを具備している。This cavity resonator 1 is made of a non-conductive material having a small expansion coefficient as a base material, and has a cylindrical cavity 3 inside which a required microwave resonance is obtained. And a rectangular parallelepiped or cubic resonator main body 2 having oppositely finished metal thin films 4 adhered thereto and both opposing end faces thereof being made into parallel planes, and a polarizing magnetic field tightly fixed to both end faces of the resonator main body 2 respectively. A pair of pole pieces 5A, 5B
Is provided.
【００２７】前記共振器本体２の母材としては、膨脹係
数が僅少の非導電体材料である石英ガラスを挙げること
ができるが、これに限らず、低膨脹係数のセラミックス
又は高分子材料を用いることもできる。Examples of the base material of the resonator body 2 include quartz glass which is a non-conductive material having a small expansion coefficient, but is not limited thereto, and a ceramic or a polymer material having a low expansion coefficient is used. You can also.
【００２８】前記円筒状の空洞３は、直径約４２ｍｍ程
度に形成され、この空洞３の両端部には、図２に示すよ
うに、円盤状の一対の端板６Ａ、６Ｂを設けている。The cylindrical cavity 3 is formed to have a diameter of about 42 mm, and a pair of disk-shaped end plates 6A and 6B are provided at both ends of the cavity 3, as shown in FIG.
【００２９】一対の端板６Ａ、６Ｂは、図２には明示し
てないが、ねじ結合構造により各々前記空洞３の穿設方
向に微動可能で、これにより、共振周波数の微調整がで
きるようになっている。Although not explicitly shown in FIG. 2, the pair of end plates 6A and 6B can be finely moved in the direction in which the cavity 3 is formed by a screw connection structure, so that the resonance frequency can be finely adjusted. It has become.
【００３０】一対の端板６Ａ、６Ｂの各直径は空洞３の
直径よりも幾分小さく、かつ、いわゆるλ／４チョ−ク
構造部６Ｃ、６Ｄを設けている。The diameter of each of the pair of end plates 6A and 6B is somewhat smaller than the diameter of the cavity 3, and is provided with so-called λ / 4 choke structures 6C and 6D.
【００３１】即ち、端板６Ａ、６Ｂは、空洞３を形成す
る内壁とは直接接触していないが、マイクロ波的には良
好な接触状態を形成しており、この結果、空洞３内にお
いて高いＱをもった空洞共振が得られるようになってい
る。That is, the end plates 6A and 6B are not in direct contact with the inner wall forming the cavity 3, but form a good contact condition in terms of microwaves. A cavity resonance having Q is obtained.
【００３２】尚、前記端板６Ａ、６Ｂには、前記共振器
本体２の両端面に配置する磁場変調コイル７による磁場
がかからないので、この端板６Ａ、６Ｂを絶縁体でも金
属でも形成することができる。Since no magnetic field is applied to the end plates 6A and 6B by the magnetic field modulation coils 7 arranged on both end surfaces of the resonator body 2, the end plates 6A and 6B may be formed of either an insulator or a metal. Can be.
【００３３】前記空洞３の内面、前記端板６Ａ、６Ｂの
内面及びλ／４チョ−ク構造部６Ｃ、６Ｄには、厚さ５
乃至１０μｍの金属薄膜４を付着している。The inner surface of the cavity 3, the inner surfaces of the end plates 6A and 6B and the λ / 4 choke structures 6C and 6D have a thickness of 5 mm.
A metal thin film 4 of about 10 μm is attached.
【００３４】前記共振器本体２の外側の端面は平行度の
高い平面に仕上げられ、各々円盤状のポールピース５
Ａ、５Ｂが密着配置されている。The outer end face of the resonator body 2 is finished to a plane with high parallelism, and each of the pole pieces 5 has a disk shape.
A and 5B are arranged in close contact.
【００３５】ポールピース５Ａ、５Ｂと共振器本体２と
は非磁性材料（ステンレス）のボルト９、ナット１０に
より固定されている。The pole pieces 5A and 5B and the resonator body 2 are fixed by bolts 9 and nuts 10 made of a non-magnetic material (stainless steel).
【００３６】前記磁場変調コイル７に高周波電流を流す
ことにより、空洞外から前記空洞３内に磁場変調をかけ
るようになっている。また、共鳴測定のための磁場掃引
は図示しない磁場掃引コイルに掃引電流を流すことによ
り行われる。By applying a high-frequency current to the magnetic field modulation coil 7, the magnetic field is modulated from outside the cavity into the cavity 3. The magnetic field sweep for resonance measurement is performed by passing a sweep current through a magnetic field sweep coil (not shown).
【００３７】前記共振器本体２には、結合孔１２が穿設
され、この結合孔１２に導波管１３を接続している。結
合孔１２は、マイクロ波エネルギーを供給し、共鳴信号
を取り出すために設けるものである。A coupling hole 12 is formed in the resonator body 2, and a waveguide 13 is connected to the coupling hole 12. The coupling hole 12 is provided for supplying microwave energy and extracting a resonance signal.
【００３８】さらに、前記端板６Ａ、６Ｂの中心部に
は、測定試料を挿入するための試料孔１４を対称配置に
設けている。Further, sample holes 14 for inserting a measurement sample are provided symmetrically at the center of the end plates 6A and 6B.
【００３９】上述した構成の空洞共振器１によれば、非
導電材料を母材とする平行平面に仕上げた共振器本体２
の両端面にポールピース５Ａ、５Ｂを固定しているの
で、この空洞共振器１のさらに外側に配置する磁極の間
隔は殆ど不変に保たれ、温度による磁束密度の変化も殆
ど無くなる。According to the cavity resonator 1 having the above-described configuration, the resonator main body 2 is formed into a parallel plane using a non-conductive material as a base material.
The pole pieces 5A and 5B are fixed to both end surfaces of the cavity resonator 1, so that the distance between the magnetic poles disposed further outside the cavity resonator 1 is kept almost unchanged, and the change in the magnetic flux density due to the temperature is almost eliminated.
【００４０】また、前記磁場変調コイル７、図示しない
磁場掃引コイルを空洞共振器１内に配置しているが、膨
脹係数の僅少な共振器本体２を用いているので、共振器
本体２は発熱に影響されることはない。前記磁場変調コ
イル７、磁場掃引コイルの発熱は、共振器本体２に適切
な対流又は通風を行うことで外部に放散することができ
る。Although the magnetic field modulation coil 7 and the magnetic field sweeping coil (not shown) are arranged in the cavity resonator 1, since the resonator body 2 having a small expansion coefficient is used, the resonator body 2 generates heat. It is not affected by. Heat generated by the magnetic field modulation coil 7 and the magnetic field sweeping coil can be radiated to the outside by performing appropriate convection or ventilation on the resonator main body 2.
【００４１】このように、本実施例の空洞共振器１によ
れば、振動、静磁場のドリフト、磁場均一度の変化等信
号検出に影響する諸要因を同時に除去又は軽減し、感
度、安定度を著しく向上することができる。As described above, according to the cavity resonator 1 of this embodiment, various factors affecting signal detection, such as vibration, drift of a static magnetic field, and change in magnetic field uniformity, are simultaneously eliminated or reduced, and sensitivity and stability are improved. Can be significantly improved.
【００４２】また、過大な高周波出力装置を備えること
なく、しかも、Ｑ値の低下を招く変調コイル７を空洞３
内に設けていないので、外部から印加した高周波磁界を
有効に共振器本体２内に透過させることができる。Further, the modulation coil 7 which does not have an excessively high-frequency output device and causes a decrease in the Q value is provided in the cavity 3.
Since it is not provided inside, the high-frequency magnetic field applied from the outside can be effectively transmitted into the resonator main body 2.
【００４３】次に、本発明の他の実施例を図３、図４を
参照して説明する。Next, another embodiment of the present invention will be described with reference to FIGS.
【００４４】図３に示す空洞共振器１Ａは、直六面体空
洞共振器でありＸバンドＴＥ102 モードで動作するもの
である。The cavity shown in FIG. 3 1A is for operating at X-band TE 102 mode is hexahedral cavity resonator.
【００４５】この空洞共振器１Ａにおいて、前記空洞共
振器１Ａと同一の機能を有するものには同一の符号を付
して示す。In this cavity resonator 1A, those having the same functions as those of the cavity resonator 1A are denoted by the same reference numerals.
【００４６】同図に示す空洞共振器１Ａは、前記共振器
本体２の代りに、図４にも示す２分割構成の共振器本体
２０を具備することが特徴である。The cavity resonator 1A shown in FIG. 3 is characterized in that a resonator body 20 having a two-part structure shown in FIG.
【００４７】即ち、共振器本体２０は、有底で上部が開
口した直方体状に形成され内部に下空洞２１ａを有する
受体２１と、この受体２１の側面及び上面を包囲する下
側が開口した蓋体２２とを重ね合わせることにより構成
している。蓋体２２の内部上側には前記下空洞２１ａと
同じ形状の上空洞２２ａを設けている。That is, the resonator main body 20 is formed in a rectangular parallelepiped shape having a bottom and an upper part opened and has a lower cavity 21a therein, and a lower part surrounding the side surface and the upper surface of the receiver 21 is opened. It is configured by overlapping the lid 22. An upper cavity 22a having the same shape as the lower cavity 21a is provided on the upper inside of the lid 22.
【００４８】下空洞２１ａと上空洞２２ａとにより、直
六面体状の空洞２３を形成している。 前記下空洞２１
ａ、上空洞２２ａの内面には、各々金属薄膜を付着して
いる。 また、蓋体２２の下側部には前記受体２１の側
面外周を覆う下側片２２ｂを設けている。The lower cavity 21a and the upper cavity 22a form a rectangular hexahedral cavity 23. The lower cavity 21
a, a metal thin film is attached to the inner surface of the upper cavity 22a. A lower piece 22b that covers the outer periphery of the side surface of the receiver 21 is provided on the lower side of the lid 22.
【００４９】前記受体２１の上端部には半円状の下孔１
２ｂが、また、蓋体２２の上空洞２２ａを形成する下端
面には半円状の上孔１２ａが各々設けられ、蓋体２２を
受体２１に重ね合わせたとき、前記上孔１２ａと下孔１
２ｂとで結合孔１２を形成するようになっている。The upper end of the receiver 21 has a semicircular pilot hole 1.
2b, a semicircular upper hole 12a is provided at the lower end surface forming the upper cavity 22a of the lid 22. When the lid 22 is overlapped with the receiver 21, the upper hole 12a and the lower hole Hole 1
2b is formed with the coupling hole 12.
【００５０】さらに、前記受体２１、蓋体２２には、各
々測定試料を挿入するための試料孔１４を対称配置に設
けている。Further, the receiver 21 and the lid 22 are provided with symmetrically arranged sample holes 14 for inserting a measurement sample.
【００５１】このような共振器本体２０を具備する空洞
共振器１Ａの場合、共振器本体２０が金属薄膜付着のた
め２分割構成であるが、分割方向はいわゆるＥ面中心線
に沿っているため、このＥ面中心線を横切る方向にはマ
イクロ波管壁電流は流れないので、空洞共振器１ＡのＱ
の低下はない。In the case of the cavity resonator 1A provided with such a resonator main body 20, the resonator main body 20 is divided into two parts because a metal thin film is adhered, but the dividing direction is along the so-called E-plane center line. The microwave tube wall current does not flow in the direction crossing the center line of the E plane.
Does not decrease.
【００５２】尚、前記共振器本体２０の両外側面に磁場
変調コイル７やポールピース５Ａ、５Ｂが固定されるこ
とは前記空洞共振器１の場合と同様である。The magnetic field modulation coil 7 and the pole pieces 5A and 5B are fixed to both outer surfaces of the resonator main body 20, as in the case of the cavity resonator 1.
【００５３】このような共振器本体２０を具備する空洞
共振器１Ａの場合、前記空洞共振器１ほどのＱ値は得ら
れないが、空洞共振器１と比較すると空洞容積がかなり
小さいこと、マイクロ波磁界分布が広いこと及び所要磁
極間隔が狭く分極磁場で供給する磁石を小型化すること
ができることという特長がある。In the case of the cavity resonator 1A having such a resonator main body 20, the Q value of the cavity resonator 1 cannot be obtained, but the cavity volume is considerably smaller than that of the cavity resonator 1, It has the characteristics that the wave magnetic field distribution is wide, the required magnetic pole interval is narrow, and the magnet supplied by the polarizing magnetic field can be downsized.
【００５４】この結果、前記空洞共振器１は高感度測定
用に、前記空洞共振器１Ａは小型磁石を使用した一般測
定装置用及び水溶液試料測定等の特殊測定用に各々重用
される。As a result, the cavity resonator 1 is used for high-sensitivity measurement, and the cavity resonator 1A is used for general measurement devices using small magnets and for special measurements such as measurement of an aqueous solution sample.
【００５５】次に、前記空洞共振器１（又は空洞共振器
１Ａ）を用いた電子スピン測定装置１００について図５
を参照して説明する。Next, an electron spin measuring apparatus 100 using the above-described cavity resonator 1 (or cavity resonator 1A) will be described with reference to FIG.
This will be described with reference to FIG.
【００５６】この電子スピン測定装置１００は、マイク
ロ波発信器電源３０により駆動され所定の周波数のマイ
クロ波を出力するマイクロ波発信器３１と、このマイク
ロ波発信器３１から反射波が発振器に入ることを防ぐア
イソレータ３２と、このアイソレータ３２からのマイク
ロ波出力を測定試料に適切なレベルに調整する第１の減
衰器３３と、この第１の減衰器３３からのマイクロ波を
増幅するマイクロ波電力増幅器３４と、このマイクロ波
電力増幅器３４により増幅されたマイクロ波を空洞共振
器１に供給するとともに空洞共振器１からの共鳴信号を
増幅器３６に送出するサーキュレータ３５と、前記アイ
ソレータ３２からのマイクロ波を検波器３９，４０に適
切なバイアスを与えるための第２の減衰器３７と、この
第２の減衰器３７からのマイクロ波の周波数移相を行う
第１の移相器３８と、前記増幅器３６により増幅した共
鳴信号と前記第１の移相器３８により周波数移相を行っ
たマイクロ波とをハイブリッドティ４５を経て入力し、
所謂ホモダイン検波を行う検波器３９、４０と、検波さ
れた信号をこれを増幅する信号増幅器４１を経て入力す
る位相検波器４４と、前記空洞共振器１の磁場変調コイ
ル７に変調電流を供給する変調周波発信器４２と、この
変調周波発信器４２からの変調信号の周波数移相を行う
第２の移相器４３と、この第２の移相器４３の出力信号
を基に前記信号増幅器４１からの出力信号の位相検波を
行い検波結果を電子スピン測定装置１００の出力信号と
して送出する第１の位相検波器４４とを具備している。The electron spin measuring apparatus 100 includes a microwave transmitter 31 which is driven by a microwave transmitter power supply 30 and outputs a microwave of a predetermined frequency, and a reflected wave from the microwave transmitter 31 enters an oscillator. , A first attenuator 33 for adjusting the microwave output from the isolator 32 to an appropriate level for the measurement sample, and a microwave power amplifier for amplifying the microwave from the first attenuator 33 34, a circulator 35 for supplying the microwave amplified by the microwave power amplifier 34 to the cavity resonator 1 and transmitting a resonance signal from the cavity resonator 1 to the amplifier 36, and a microwave from the isolator 32. A second attenuator 37 for applying an appropriate bias to the detectors 39 and 40, and a second attenuator 37 A first phase shifter 38 for performing a frequency phase shift of the microwaves, a hybrid tee 45 that combines the resonance signal amplified by the amplifier 36 and the microwaves whose frequency has been phase shifted by the first phase shifter 38. And enter
A modulation current is supplied to detectors 39 and 40 for performing so-called homodyne detection, a phase detector 44 for inputting the detected signal through a signal amplifier 41 for amplifying the detected signal, and a magnetic field modulation coil 7 of the cavity resonator 1. A modulation frequency transmitter 42, a second phase shifter 43 for performing a phase shift of the frequency of the modulation signal from the modulation frequency transmitter 42, and the signal amplifier 41 based on an output signal of the second phase shifter 43. And a first phase detector 44 for performing phase detection of an output signal from the electronic spin measuring device 100 and transmitting a detection result as an output signal of the electron spin measuring device 100.
【００５７】また、前記空洞共振器１の各ポールピス５
Ａ、５Ｂの両側には各々永久磁石の磁極４５Ａ、４５Ｂ
を配置している。前記空洞共振器１の図示しない掃引コ
イルは磁場掃引電源４６により励磁するようになってい
る。Each pole piece 5 of the cavity resonator 1
A and 5B have permanent magnet poles 45A and 45B respectively on both sides.
Has been arranged. The sweep coil (not shown) of the cavity resonator 1 is excited by a magnetic field sweep power supply 46.
【００５８】さらに、空洞共振器１の共鳴信号は整流器
４７により整流された後、増幅器４８で増幅され、第２
の位相検波器４９により位相検波されて前記マイクロ波
発信器電源３０の発信周波数を制御する制御信号として
用いられるようになっている。 尚、前記マイクロ波発
信器電源３０は自動周波数制御（ＡＦＣ）発信器５０に
より駆動され、また、前記第２の位相検波器４９は、前
記自動周波数制御発信器５０の発信出力の周波数移相を
行う第３の移相器５１により駆動されるようになってい
る。Further, the resonance signal of the cavity resonator 1 is rectified by the rectifier 47, and then amplified by the amplifier 48.
And is used as a control signal for controlling the oscillation frequency of the microwave oscillator power supply 30. Note that the microwave transmitter power supply 30 is driven by an automatic frequency control (AFC) transmitter 50, and the second phase detector 49 detects the frequency phase shift of the transmission output of the automatic frequency control transmitter 50. The third phase shifter 51 performs the driving.
【００５９】このような電子スピン測定装置１００に本
実施例の空洞共振器１（又は空洞共振器１Ａ）を用いる
ことで、既述したように、振動、静磁場のドリフト、磁
場均一度の変化等信号検出に影響する諸要因を同時に除
去又は軽減し、感度、安定度を著しく向上した動作を発
揮させることができる。As described above, by using the cavity resonator 1 (or the cavity resonator 1A) of the present embodiment in such an electron spin measuring apparatus 100, as described above, the vibration, the drift of the static magnetic field, and the change in the magnetic field uniformity are obtained. Various factors affecting the detection of the equal signal can be eliminated or reduced at the same time, and an operation with significantly improved sensitivity and stability can be exhibited.
【００６０】本発明は、上述した実施例の他、その要旨
の範囲内で種々の変形が可能である。The present invention can be variously modified within the scope of the gist, in addition to the above-described embodiment.
【００６１】[0061]
【発明の効果】以上詳述した本発明によれば、上述した
構成としたことにより、振動、静磁場のドリフト、磁場
均一度の変化等信号検出に影響する諸要因を同時に除去
又は軽減し、感度、安定度を著しく向上し得る空洞共振
器を提供することができる。According to the present invention described in detail above, by employing the above-described configuration, various factors affecting signal detection, such as vibration, drift of a static magnetic field, and change in magnetic field uniformity, can be eliminated or reduced at the same time. A cavity resonator capable of significantly improving sensitivity and stability can be provided.
【図１】図１は本発明の実施例である空洞共振器の一部
を切欠して示す上面図である。FIG. 1 is a partially cutaway top view showing a cavity resonator according to an embodiment of the present invention.
【図２】図２は本発明の実施例である空洞共振器の一部
を切欠して示す側面図である。FIG. 2 is a partially cutaway side view of a cavity resonator according to an embodiment of the present invention.
【図３】図３は本発明の他の実施例である空洞共振器の
分解斜視図である。FIG. 3 is an exploded perspective view of a cavity resonator according to another embodiment of the present invention.
【図４】図４は本発明の他の実施例である空洞共振器の
共振器本体を示す分解斜視図である。FIG. 4 is an exploded perspective view showing a resonator main body of a cavity resonator according to another embodiment of the present invention.
【図５】図５は本発明の実施例である空洞共振器を用い
た電子スピン測定装置の構成ブロック図である。FIG. 5 is a block diagram showing a configuration of an electron spin measuring device using a cavity resonator according to an embodiment of the present invention.
【符号の説明】 １ 空洞共振器 １Ａ 空洞共振器 ２ 共振器本体 ３ 空洞 ４ 金属薄膜 ５Ａ ポールピース ５Ｂ ポールピース １００ 電子スピン測定装置[Description of Signs] 1 Cavity resonator 1A Cavity resonator 2 Resonator main body 3 Cavity 4 Metal thin film 5A Pole piece 5B Pole piece 100 Electron spin measurement device
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中川 和雄 東京都渋谷区恵比寿３丁目43番２号 日 機装株式会社内 (72)発明者 常田 誠 東京都渋谷区恵比寿３丁目43番２号 日 機装株式会社内 (72)発明者 糠信 敦司 東京都渋谷区恵比寿３丁目43番２号 日 機装株式会社内 (56)参考文献 特開 昭53−15883（ＪＰ，Ａ) 特公 昭47−1434（ＪＰ，Ｂ１) アルガー著、「電子スピン共鳴」、第 １刷、吉岡書店、1973年４月、ｐ．142 −146及びｐ．189−193 (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 24/00 - 24/14 G01N 22/00 - 22/04 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Kazuo Nakagawa, Inventor Kazuo 3-43-2 Ebisu, Shibuya-ku, Tokyo Inside Machinery Co., Ltd. (72) Inventor Makoto Tsuneda 3-43-2, Ebisu, Shibuya-ku, Tokyo Sun Inside Kiso Co., Ltd. (72) Inventor Atsushi Nukanobu 3-43-2 Ebisu, Shibuya-ku, Tokyo Japan Kiso Co., Ltd. (56) References JP-A-53-15883 (JP, A) Japanese Patent Publication No. 47 -1434 (JP, B1) by Algar, "Electron Spin Resonance", 1st printing, Yoshioka Shoten, April 1973, p. 142-146 and p. 189-193 (58) Field surveyed (Int.Cl. 7 , DB name) G01N 24/00-24/14 G01N 22/00-22/04
Claims (1)
振器であって、膨脹係数が僅少の非導電体材料を母材と
し、内部に所要のマイクロ波共振が得られる空洞を設
け、この空洞の内壁面に高導電率の金属薄膜を形成した
共振器本体のその対向する外側両端面を平行平面に仕上
げてなり、この外側両端面に分極磁場用のポールピース
を密着固定してなることを特徴とする空洞共振器。1. A cavity resonator used in an electron spin resonance apparatus, wherein a non-conductive material having a small expansion coefficient is used as a base material.
And a cavity for obtaining the required microwave resonance
A high conductivity metal thin film was formed on the inner wall of the cavity.
Finish the opposing outer end faces of the resonator body in parallel planes
The pole pieces for the polarizing magnetic field
Characterized by being fixedly adhered to a cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09290992A JP3239957B2 (en) | 1992-04-13 | 1992-04-13 | Thin film cavity resonator with pole piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09290992A JP3239957B2 (en) | 1992-04-13 | 1992-04-13 | Thin film cavity resonator with pole piece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05288821A JPH05288821A (en) | 1993-11-05 |
| JP3239957B2 true JP3239957B2 (en) | 2001-12-17 |
Family
ID=14067616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09290992A Expired - Lifetime JP3239957B2 (en) | 1992-04-13 | 1992-04-13 | Thin film cavity resonator with pole piece |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3239957B2 (en) |
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|---|---|---|---|---|
| US7589529B1 (en) * | 2005-11-14 | 2009-09-15 | Active Spectrum, Inc. | Method of and apparatus for in-situ measurement of degradation of automotive fluids and the like by micro-electron spin resonance (ESR) spectrometry |
| EP4019995B1 (en) * | 2020-12-22 | 2023-08-16 | Bruker BioSpin GmbH | Epr spectrometer with at least one pole piece made at least partially of a function material |
-
1992
- 1992-04-13 JP JP09290992A patent/JP3239957B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| アルガー著、「電子スピン共鳴」、第１刷、吉岡書店、１９７３年４月、ｐ．１４２−１４６及びｐ．１８９−１９３ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05288821A (en) | 1993-11-05 |
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