JP3226649B2 - Friction force microscope - Google Patents
Friction force microscopeInfo
- Publication number
- JP3226649B2 JP3226649B2 JP02949093A JP2949093A JP3226649B2 JP 3226649 B2 JP3226649 B2 JP 3226649B2 JP 02949093 A JP02949093 A JP 02949093A JP 2949093 A JP2949093 A JP 2949093A JP 3226649 B2 JP3226649 B2 JP 3226649B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- leaf spring
- sample
- friction force
- force microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、探針を試料近傍で走
査し、この探針−試料間に働く力を画像化する原子間力
顕微鏡に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an atomic force microscope which scans a probe near a sample and images the force acting between the probe and the sample.
【０００２】[0002]
【従来の技術】プローブ顕微鏡の一種である原子間力顕
微鏡（Atomic Force Microscope)は、ＳＴＭの発明者で
あるG.Binniig らによって考案された(Physical Review
Letters Vol.56 P930 1986)以来、絶縁物物質の表面形
状観察手段として研究が進められている。2. Description of the Related Art Atomic force microscope, a kind of probe microscope, was devised by G. Binniig et al., The inventor of STM (Physical Review).
Since Letters Vol.56 P930 1986), research has been conducted as a means of observing the surface shape of insulating materials.
【０００３】原理は、試料−探針間に働く力を、微少な
板バネで変位に変え、この変位を光学的手段等で検出
し、前記板バネの変位量が一定になるように、ピエゾ素
子をフィードバック制御する。この制御信号が形状情報
となる。変位検出系としては、図１にレバーの変位を光
路の変化とし検出する光テコ方式や光波干渉を用いた方
式がある。図１において、２は板ばね、１４はフレー
ム、１１８はレーザードライバー、１０６は半導体レー
ザ、１０８はレンズａ、１１０は鏡、１０９はレンズ
ｂ、１１１は光検出素子、２１５は２分割のポジショ
ン、センシティブ・ディテクタ、１９１は差分アンプ、
１２０はサーボ系、１２２はコンピュータ、１０５は粗
動機構、１０４は微動素子であるＰＺＴ、１０１は試
料、１０２は先端探針である。摩擦力顕微鏡は光テコ方
式に属するので、今後は光テコ方式について記す。[0003] The principle is that the force acting between the sample and the probe is converted into a displacement by a very small leaf spring, and this displacement is detected by optical means or the like, and the piezo is moved so that the displacement of the leaf spring becomes constant. The element is feedback controlled. This control signal becomes the shape information. As the displacement detection system, there is an optical lever system for detecting the displacement of the lever as a change in the optical path in FIG. 1 or a system using light wave interference. In FIG. 1, 2 is a leaf spring, 14 is a frame, 118 is a laser driver, 106 is a semiconductor laser, 108 is a lens a, 110 is a mirror, 109 is a lens b, 111 is a photodetector, 215 is a two-divided position, Sensitive detector, 191 is a difference amplifier,
Reference numeral 120 denotes a servo system, 122 denotes a computer, 105 denotes a coarse movement mechanism, 104 denotes PZT which is a fine movement element, 101 denotes a sample, and 102 denotes a tip probe. Since the friction force microscope belongs to the optical lever method, the optical lever method will be described in the future.
【０００４】図２に直流方式摩擦力顕微鏡を示す。図２
において、２は板バネ、１０６は半導体レーザー、１１
０は鏡、１１５は４分割ポジション・センシティブ・デ
ィテクタ、１９２はプリアンプ、１２０ａはＺ軸サーボ
系、１２０ｂはＡ／Ｄコンバータ、１２１は画像表示装
置、１３０はｘ，ｙサスタースキャン系、１０４はＰＺ
Ｔ、１０１は試料である。板バネ２は、板バネ２の垂直
方向の変位および試料と探針の摩擦により生じるねじれ
が生じる。半導体レザー１０６よりの光は、板バネ２の
背面で反射され、４分割のポジション・センシティブ・
ディテクタ(Position Sensitive Detector:以下P.S.D.
と略す）115 により検出される。板バネの垂直方向の変
位Ｚsig は、４分割された信号の｜（ＩA ＋ＩB ）−
（ＩC＋ＩD ）｜で得られ、板バネ２のねじれすなわち
試料の水平方向の摩擦力Ｆsigは４分割された信号の｜
（ＩA ＋ＩD ）−（ＩB ＋ＩC ）｜により求まる。Ｚsi
g は、従来のＡＦＭと同様Ｚ軸サーボ系１２０ａに入力
し、板バネの変位が一定になるように三次元スキャナＰ
ＺＴ１０４を制御する。一方、ｘ，ｙラスタースキャン
系１３０によりＰＺＴ１０４をｘ，ｙラスター走査し、
同時にＺsig 信号を画像表示装置１２１により表示する
と形状像（ＴＯＰＯ像）になり、Ｆsig 信号を表示する
と摩擦像になる。従って直流方式摩擦力顕微鏡は、従来
のＴＯＰＯ像と摩擦像を同時に得ることができる。FIG. 2 shows a direct current type friction force microscope. FIG.
, 2 is a leaf spring, 106 is a semiconductor laser, 11
0 is a mirror, 115 is a 4-division position-sensitive detector, 192 is a preamplifier, 120a is a Z-axis servo system, 120b is an A / D converter, 121 is an image display device, 130 is an x, y sustain scan system, and 104 is PZ
T and 101 are samples. The leaf spring 2 is twisted due to the vertical displacement of the leaf spring 2 and the friction between the sample and the probe. Light from the semiconductor laser 106 is reflected on the back surface of the leaf spring 2 and is divided into four position-sensitive portions.
Detector (Position Sensitive Detector: PSD
Is abbreviated as 115). Displacement Zsig vertical leaf spring 4 divided signal | (I A + I B) -
(I C + I D ) |, and the torsion of the leaf spring 2, that is, the frictional force Fsig in the horizontal direction of the sample, is |
(I A + I D) - (I B + I C) | by obtained. Zsi
g is input to the Z-axis servo system 120a similarly to the conventional AFM, and the three-dimensional scanner P is controlled so that the displacement of the leaf spring becomes constant.
It controls ZT104. On the other hand, the PZT 104 is subjected to x, y raster scanning by the x, y raster scanning system 130,
At the same time, when the Zsig signal is displayed on the image display device 121, it becomes a shape image (TOPO image), and when the Fsig signal is displayed, it becomes a friction image. Therefore, the direct current friction microscope can obtain a conventional TOPO image and a friction image at the same time.
【０００５】[0005]
【発明が解決しようとする課題】この発明は、摩擦力顕
微鏡において、試料の傾き形状によらず、試料固有の摩
擦力をＳ／Ｎよく測定できる摩擦力顕微鏡の提供を目的
とするものである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a friction force microscope capable of measuring a frictional force inherent to a sample with good S / N regardless of the inclination shape of the sample. .
【０００６】[0006]
【課題を解決するための手段】この発明は、従来の直流
方式摩擦力顕微鏡に対して、板バネにねじりが生じる方
向の走査信号に微少な交流信号を重畳させながら走査
し、この応答出力を位相検波する手段により、微少交流
走査に対する摩擦力を検出するものである。According to the present invention, a conventional DC friction microscope is scanned while superimposing a small AC signal on a scanning signal in a direction in which a leaf spring is twisted, and outputting the response output. The means for phase detection detects the frictional force with respect to the minute AC scanning.
【０００７】[0007]
【作用】この発明は、上記手段を講じることにより、試
料各点での摩擦力が測定できる。According to the present invention, by taking the above measures, the frictional force at each point of the sample can be measured.
【０００８】[0008]
【実施例】まず交流式摩擦力顕微鏡の構成を図面に基づ
き説明する。図３に示すように、試料１０１は、三次元
スキャナ（ＰＺＴ）１０４の上に載せられ、ｘラスタス
キャン系１３０ａおよびｙラスタスキャン系１３０ｂラ
スタスキャナによって鋸歯状波を与えられ平面的走査を
行う。ここでは板バネ２のねじれ方向（ｘ方向）のラス
タースキャン系１３０ａに発振器１４０より微少な交流
信号が重畳されている。試料１０１の形状および摩擦を
反映した板バネ２の垂直方向の変位およびねじれによる
水平方向の変位を４分割のP.S.D.１１５により検出す
る。それぞれの検出器（Ａ〜Ｃ）までの信号は、プリア
ンプ１９２により、板バネの垂直方向の変位、Ｚsig ｜
＝（ＩA ＋ＩB ）−（ＩC ＋ＩD ）｜と、水平方向の変
位Ｆsig ＝｜（ＩA ＋ＩD ）−（ＩB ＋Ｉ C ）｜に構成
される。Ｚsig は従来のＡＦＭと同様にＺ軸サーボ系１
２０ａに入力され、板バネ２の垂直方向の変位を一定に
なるように、三次元スキャナ（ＰＺＴ）１０４を制御す
る。この制御信号をＡ／Ｄ変換器１２０ｂを通し、前記
ｘラスタスキャン系１３０ａ、ｙラスタスキャン系１３
０ｂの信号とともに画像表示装置１２１により形状デー
タが得られる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, the configuration of an AC friction force microscope will be described with reference to the drawings. As shown in FIG. 3, the sample 101 is placed on a three-dimensional scanner (PZT) 104, and is subjected to a sawtooth wave by an x raster scan system 130a and a y raster scan system 130b to perform a planar scan. Here, a smaller AC signal than the oscillator 140 is superimposed on the raster scan system 130 a in the torsion direction (x direction) of the leaf spring 2. The displacement in the vertical direction and the displacement in the horizontal direction due to torsion of the leaf spring 2 reflecting the shape and friction of the sample 101 are detected by the PSD 115 divided into four parts. The signals to the respective detectors (A to C) are converted by the preamplifier 192 into the vertical displacement of the leaf spring, Zsig |
= (I A + I B) - (I C + I D) | and, horizontal displacement Fsig = | (I A + I D) - (I B + I C) | in constructed. Zsig is a Z-axis servo system 1 like the conventional AFM.
20A, the three-dimensional scanner (PZT) 104 is controlled so that the displacement of the leaf spring 2 in the vertical direction becomes constant. The control signal is passed through an A / D converter 120b, and the x raster scan system 130a and the y raster scan system 13
Shape data is obtained by the image display device 121 together with the signal of 0b.
【０００９】一方、Ｆsig は位相検波器（ロックインア
ンプ）１５０により位相検波され、Ｆsig meanとなり、
Ａ／Ｄ変換器１２０ｂを通し、前記ラスタスキャン信号
とともに画像表示装置１２１により摩擦像が得られる。
次に、交流方式摩擦力顕微鏡の原理を示す。板バネ２の
ねじれ方向（ｘ方向）のＰＺＴ１０４の変位をｘl とす
ると ｘl ＝α(t) ＋βsin ωt （１） となる。On the other hand, Fsig is phase-detected by a phase detector (lock-in amplifier) 150 and becomes Fsig mean .
Through the A / D converter 120b, a friction image is obtained by the image display device 121 together with the raster scan signal.
Next, the principle of the AC friction force microscope will be described. When the displacement of PZT104 twist direction of the plate spring 2 (x-direction) and x l x l = a α (t) + βsin ωt ( 1).
【００１０】図４にｘ方向走査図を示す。Ｐ1 〜Ｐn は
画像取り込み点である。図４に示すようにα（ｔ）をラ
ンプ関数とし、βを重畳した交流の振幅に対応する変位
の振幅ωを交流の角周波数とする。今、画像の１ライン
を走査する時間をＴ1 、観測ピクセル数をｎとすると、FIG. 4 shows a scanning diagram in the x direction. P 1 to P n are image capture points. As shown in FIG. 4, α (t) is a ramp function, and the displacement amplitude ω corresponding to the AC amplitude with β superimposed is the AC angular frequency. Now, assuming that the time for scanning one line of the image is T 1 and the number of observed pixels is n,
【００１１】[0011]
【数１】 (Equation 1)
【００１２】となるようにωを選択設定する。一方、試
料と探針間に働く摩擦力は、Ω is selected and set so that On the other hand, the frictional force acting between the sample and the probe is
【００１３】[0013]
【数２】 (Equation 2)
【００１４】数２のような関数形と思われる。ｆ（Ｆ
VXS ) は板バネに印加された力ＦV と探針試料間の面積
ｓをかけたような関数形である。ａ1 ａ2 は試料に固有
な比例係数であり、ｄ2 ｘl ／ｄｔ2 以上の項は微少と
思われる。今、走査により図５に示すように探針がｘl1
傾いたとすると摩擦力Ｆm はバネのねじり力と釣り合っ
たので、 ｘl1＝ｇ（ｘl ) （４） Ｆm ＝Ｃt ｘl1＝Ｃt γθl ＝Ｃt γｋ Ｆsig （５） ( ｇ（ｘl ) ＝ｘl 関数 Ｃt ＝板バネのねじり方向のバネ定数 γ ＝探針長さ θl ＝光線の振れ角 ｋ ＝比例定数 ） の上式が得られる。It seems to be a functional form as shown in Equation 2. f (F
VXS ) is a function form obtained by multiplying the force F V applied to the leaf spring by the area s between the probe samples. a 1 a 2 is a proportional coefficient peculiar to the sample, and the term of d 2 xl / dt 2 or more seems to be minute. Now, the probe as shown in FIG. 5 by scanning x l1
Since the friction force F m and the inclined commensurate with torsional force of the spring, x l1 = g (x l ) (4) F m = C t x l1 = C t γθ l = C t γk Fsig (5) (g ( Xl ) = xl function Ct = spring constant in the torsion direction of the leaf spring γ = probe length θl = beam deflection angle k = proportional constant)
【００１５】従って、光テコによって光線の振れ角θl
に対応した信号Ｆsig を測定することによって、その点
のＦm がわかる。今 ｘl は１）式に示す交流であるの
でＦm は、摩擦力の周波数応答を示す。簡単のために例
として、摩擦を速度に比例する項のみとした場合は、 Ｆm ＝Ｃt ａ2 βω cos (ωt −δ) （６） ここでδは位相遅れである。角周波数ωで位相検波する
と、 Ｆm ＝Ｃt ａ2 βω cosφ φ＝ωｔ−δ となり、Ｃt ，β，ω，δが一定として試料に固有のａ
2 を求めることができる。測定のモードとしては、図６
に示すように各ピクセルごとでαｔ＝一定とするような
走査を行い各ピクセルごとに位相検波を同期して行え
ば、２式の条件は緩和される。Ｐ1 〜Ｐn は画像取り込
み点である。Accordingly, the deflection angle θ l of the light beam is determined by the optical lever.
By measuring the signal Fsig corresponding to reveals F m of the point. F m because now x l is the exchange shown in 1) shows the frequency response of the frictional force. Examples For simplicity, the case of only a term proportional friction speed, the F m = C t a 2 βω cos (ωt -δ) (6) where δ is the phase lag. When the phase detected by the angular frequency ω, F m = C t a 2 βω cosφ φ = ωt-δ becomes, C t, β, ω, δ is sample specific a as constant
You can ask for 2 . Fig. 6
As shown in (2), if the scanning is performed such that αt = constant for each pixel and the phase detection is performed for each pixel in synchronization, the condition of Equation 2 is relaxed. P 1 to P n are image capture points.
【００１６】次に、上記条件で特定の１点でのωをリニ
アに変化させ、その時の摩擦力を観測することにより、
図７に示すように摩擦力の周波数依存性が容易に得られ
る。この量は試料の構成分子特有のものであり、構成分
子の選択性を得ることができる。Next, under the above conditions, ω at a specific point is linearly changed, and the frictional force at that time is observed, whereby
As shown in FIG. 7, the frequency dependency of the frictional force can be easily obtained. This amount is specific to the constituent molecules of the sample, and the selectivity of the constituent molecules can be obtained.
【００１７】[0017]
【発明の効果】交流式摩擦力顕微鏡は、従来の直流方式
で得られなかった以下に示す利点を持つ。 Ｓ／Ｎ比が良いこと、これは信号の周波数帯域が直
流方式の帯域に比較して狭くできるためである。The AC type friction force microscope has the following advantages which cannot be obtained by the conventional DC type. The S / N ratio is good, because the frequency band of the signal can be narrower than the band of the DC system.
【００１８】 試料の傾き勾配の影響を無視できる。
図８に昇り勾配の場合を示す。図８において、Ｆl は水
平方向の力、Ｆs は試料に平行な力、Ｆv は垂直方向の
力である。試料の傾き勾配をθとすると、Ｆl ＝Ｆs co
s θ、Ｆv ＝Ｆs sin θと表わせる。勾配のないところ
では、Ｆl ＝Ｆs である。The effect of the sample gradient can be neglected.
FIG. 8 shows the case of a rising gradient. In FIG. 8, F l is the horizontal force, F s is parallel to the sample the force, F v the vertical force. Assuming that the gradient of the sample is θ, F l = F s co
s θ, F v = F s sin θ Where there is no gradient, F l = F s .
【００１９】図から明らかなように、直流方式の場合
は、走査に伴って試料と垂直方向の分力ＦV （押しつけ
る方向）が働き、この力によって見掛け上摩擦力が増加
したように見える。交流方式の場合は、一周期のうちの
昇り勾配と下り勾配が等しく生じ、この分力の影響を打
ち消すことが可能となる。As is apparent from the figure, in the case of the direct current system, a component force F V (pressing direction) in the vertical direction acts on the sample in accordance with the scanning, and this force appears to increase the frictional force apparently. In the case of the AC system, an ascending gradient and a descending gradient in one cycle are equal, and it is possible to cancel the influence of this component force.
【００２０】 任意の点で走査速度と摩擦力の関係が
得られ、この関係は構成分子の組成、形状等と分子に固
有のものであるので、分子種の選択、あるいは分子の状
態の変化等が観測できる。 前記測定モードで述べたように、直流方式の場合は
探針の走査速度が摩擦力を与える速度と一致するが交流
方式の場合は、探針の走査速度（画像を取り込む速度）
と摩擦力を与える速度とを分離でき、広範囲な設定条件
で試料評価ができる。At any point, the relationship between the scanning speed and the frictional force is obtained. Since this relationship is specific to the composition and shape of the constituent molecules and the molecules, the selection of the molecular species or the change in the state of the molecules, etc. Can be observed. As described in the measurement mode, in the case of the DC method, the scanning speed of the probe matches the speed at which the frictional force is applied, but in the case of the AC method, the scanning speed of the probe (the speed at which an image is captured).
And the speed at which the frictional force is applied, and the sample can be evaluated under a wide range of setting conditions.
【図１】従来方式の光テコ式原子間力顕微鏡のブロック
図である。FIG. 1 is a block diagram of a conventional optical lever type atomic force microscope.
【図２】従来の直流方式摩擦力顕微鏡のブロック図であ
る。FIG. 2 is a block diagram of a conventional DC friction microscope.
【図３】この発明による交流方式摩擦力顕微鏡のブロッ
ク図である。FIG. 3 is a block diagram of an AC friction microscope according to the present invention.
【図４】ｘ方向走査図である。FIG. 4 is an x-direction scanning diagram.
【図５】探針−試料間のねじれの様子を示した模式図で
ある。FIG. 5 is a schematic diagram showing a state of twist between a probe and a sample.
【図６】ｘ方向走査図である。FIG. 6 is an x-direction scanning diagram.
【図７】摩擦力の周波数の応答図である。FIG. 7 is a frequency response diagram of a frictional force.
【図８】探針が斜面を走査した場合の分力の模式図であ
る。FIG. 8 is a schematic diagram of a component force when a probe scans a slope.
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 11/00 - 11/30 G01B 21/30 G01N 13/16 Continuation of the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01B 11/00-11/30 G01B 21/30 G01N 13/16
Claims (3)
を、変位に変換する板バネと、その変位をレーザ光の照
射によって反射光の位置ずれとして光検出素子にて検出
する変位検出手段と、試料と板バネを三次元的に走査す
る粗動機構および微動素子と、板バネの変位を一定にす
るように微動素子を制御する手段を有するプローブ顕微
鏡において、板バネのねじれ方向のラスタスキャナー部
に微少な周期関数の摂動を加え検出された信号を上記周
期関数と同期して位相検波し、試料の表面形状と摩擦の
面分布を同時に測定することを特徴とする摩擦力顕微
鏡。1. A leaf spring for converting an atomic force or a frictional force received from a sample surface into a displacement, and a displacement detecting means for detecting the displacement as a displacement of reflected light by irradiating a laser beam with a light detecting element. In a probe microscope having a coarse movement mechanism and a fine movement element for three-dimensionally scanning a sample and a leaf spring, and a means for controlling the fine movement element so as to keep the displacement of the leaf spring constant, a raster scanner in a torsion direction of the leaf spring is provided. A friction force microscope characterized in that a perturbation of a minute periodic function is applied to a portion and a detected signal is phase-detected in synchronization with the periodic function to simultaneously measure the surface shape of the sample and the surface distribution of friction.
意の複数点の場所で探針の走査を中断し、この点におい
て上記微少周期関数の、振幅または周波数を変化させて
摩擦力の走査速度依存性マッピングすることができる請
求項１に記載の摩擦力顕微鏡。2. In the friction force microscope, the scanning of the probe is interrupted at arbitrary plural points on the sample surface, and at this point, the scanning speed of the frictional force is changed by changing the amplitude or frequency of the minute periodic function. The friction force microscope according to claim 1, wherein dependency mapping can be performed.
クセルにおいて、ランプ状の電圧印加を一定とし、前記
微少周期関数を印加し、この信号と同期して位相検波す
ることを特徴とする請求項１に記載の摩擦力顕微鏡。3. The friction force microscope according to claim 1, wherein a ramp-shaped voltage is applied to each pixel of the scanning, the minute periodic function is applied, and phase detection is performed in synchronization with the signal. 2. The friction force microscope according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02949093A JP3226649B2 (en) | 1993-02-18 | 1993-02-18 | Friction force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02949093A JP3226649B2 (en) | 1993-02-18 | 1993-02-18 | Friction force microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06241762A JPH06241762A (en) | 1994-09-02 |
| JP3226649B2 true JP3226649B2 (en) | 2001-11-05 |
Family
ID=12277523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02949093A Expired - Fee Related JP3226649B2 (en) | 1993-02-18 | 1993-02-18 | Friction force microscope |
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| Country | Link |
|---|---|
| JP (1) | JP3226649B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2567244B1 (en) * | 2010-05-07 | 2020-12-09 | Centre National de la Recherche Scientifique (CNRS) | Methods of measurement and of modification of a surface through a local probe microscope working in a continuous curvilinear mode, local probe microscope and device for their realisation |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100343652C (en) * | 2003-06-30 | 2007-10-17 | 广东工业大学 | Ultramicro mass and ultramicro load variance detecting device and detecting methods thereof |
| JP5714941B2 (en) | 2011-03-04 | 2015-05-07 | 株式会社日立ハイテクサイエンス | Friction force microscope |
| CN108828268B (en) * | 2018-06-06 | 2020-07-03 | 北京航空航天大学 | Large-range flexible structure scanner suitable for atomic force microscope |
| CN109884347A (en) * | 2019-02-25 | 2019-06-14 | 燕山大学 | The method for delaying probe tip to wear under AFM tapping-mode |
-
1993
- 1993-02-18 JP JP02949093A patent/JP3226649B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2567244B1 (en) * | 2010-05-07 | 2020-12-09 | Centre National de la Recherche Scientifique (CNRS) | Methods of measurement and of modification of a surface through a local probe microscope working in a continuous curvilinear mode, local probe microscope and device for their realisation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06241762A (en) | 1994-09-02 |
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