JP3193100B2 - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JP3193100B2 JP3193100B2 JP05566192A JP5566192A JP3193100B2 JP 3193100 B2 JP3193100 B2 JP 3193100B2 JP 05566192 A JP05566192 A JP 05566192A JP 5566192 A JP5566192 A JP 5566192A JP 3193100 B2 JP3193100 B2 JP 3193100B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor element
- wiring board
- pbsn
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体装置に係り、特
に半導体素子のバンプ電極を加熱再溶融して配線基板か
ら半導体素子を引き剥がす際、バンプ材を配線基板側に
残存し難くしてバンプ材の除去を容易にすることができ
る半導体装置に関する。近年、システムの高集積化、高
速化に伴いＣＯＢ（Chip On Boad) 化が進められてお
り、半導体素子をマルチチップ化したＣＯＢが増加する
傾向にある。特に、フリップチップでは高集積化するこ
とが期待されており、フリップチップの中でもリペアが
容易なフリップチップは広範囲に利用することができ、
期待されている。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to a method in which a bump material is hardly left on a wiring substrate when a semiconductor device is peeled off from a wiring substrate by heating and re-melting a bump electrode of the semiconductor device. The present invention relates to a semiconductor device capable of easily removing a bump material. In recent years, COB (Chip On Boad) has been promoted along with higher integration and higher speed of the system, and the number of COBs in which semiconductor elements are multi-chip tends to increase. In particular, flip-chips are expected to be highly integrated. Among flip-chips, flip-chips that can be easily repaired can be widely used.
Expected.
【０００２】[0002]
【従来の技術】図３は従来の半導体装置の構造を示す断
面図である。図３において、31はＰｂＳｎ等の単層から
なるバンプ電極32が形成された半導体素子であり、33は
電極34が形成された配線基板である。従来、半導体素子
31と配線基板33の接続方法にはフリップチップ方法が用
いられており、これは半導体素子31を配線基板33に対し
てフェースダウンし、半導体素子31に形成されたバンプ
電極32を加熱溶融して半導体素子31のバンプ電極32と配
線基板33の電極34を接合することにより半導体素子31と
配線基板33を接続していた。2. Description of the Related Art FIG. 3 is a sectional view showing a structure of a conventional semiconductor device. In FIG. 3, reference numeral 31 denotes a semiconductor element on which a bump electrode 32 made of a single layer of PbSn or the like is formed, and reference numeral 33 denotes a wiring board on which an electrode 34 is formed. Conventionally, semiconductor element
A flip chip method is used to connect the wiring board 31 and the wiring board 33. In this method, the semiconductor element 31 is face-down with respect to the wiring board 33, and the bump electrode 32 formed on the semiconductor element 31 is heated and melted. The semiconductor element 31 and the wiring board 33 are connected by joining the bump electrode 32 of the semiconductor element 31 and the electrode 34 of the wiring board 33.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記し
た従来の半導体装置では、半導体素子31と配線基板33の
接続を同一材質の単層からなるバンプ電極32を加熱溶融
して行っており、半導体素子31をリペアするのを半導体
素子31上に形成されたバンプ電極32を加熱再溶融するこ
とにより配線基板33より引き剥がして行っていたため、
バンプ材が配線基板33の電極34上に多量に残存し易く、
バンプ材の除去が困難であった。このため、半導体素子
のリペア作業が面倒であるという問題があった。However, in the above-described conventional semiconductor device, the connection between the semiconductor element 31 and the wiring board 33 is performed by heating and melting the bump electrode 32 made of a single layer of the same material. Since the repair of 31 was performed by peeling off the wiring substrate 33 by heating and re-melting the bump electrode 32 formed on the semiconductor element 31,
A large amount of bump material easily remains on the electrodes 34 of the wiring board 33,
It was difficult to remove the bump material. Therefore, there is a problem that the repair work of the semiconductor element is troublesome.
【０００４】そこで本発明は、半導体素子のバンプ電極
を加熱再溶融して配線基板から半導体素子を引き剥がす
際、バンプ材を配線基板側に残存し難くしてバンプ材の
除去を容易にすることができ、半導体素子のリペア作業
を容易にすることができる半導体装置を提供することを
目的としている。Accordingly, an object of the present invention is to make it easier to remove a bump material by making it difficult for the bump material to remain on the wiring substrate side when the semiconductor device is peeled off from the wiring substrate by heating and re-melting the bump electrode of the semiconductor device. It is an object of the present invention to provide a semiconductor device that can perform a semiconductor element repair operation easily.
【０００５】[0005]
【課題を解決するための手段】本発明による半導体装置
は上記目的達成のため、半導体素子上に高融点ＰｂＳｎ
層が形成され、更に該高融点ＰｂＳｎ層上に低融点Ｐｂ
Ｓｎ層がコートされてなるバンプ電極を有し、更に配線
基板の電極上にＳｎ鍍金されたＳｎ鍍金層を有し、該半
導体素子の該バンプ電極と該配線基板の該Ｓｎ鍍金層と
が接合されてなるものである。In order to achieve the above object, a semiconductor device according to the present invention has a high melting point PbSn on a semiconductor element.
A layer having a low melting point Pb is further formed on the high melting point PbSn layer.
It has a bump electrode coated with an Sn layer, and further has a wiring
A Sn plating layer plated with Sn on an electrode of the substrate;
The bump electrode of the conductor element and the Sn plating layer of the wiring board are joined.
【０００６】本発明による半導体装置は上記目的達成の
ため、半導体素子上に高融点ＰｂＳｎ層が形成され、更
に該高融点ＰｂＳｎ層上にＰｂ層がコートされてなるバ
ンプ電極を有し、配線基板の電極上にＳｎ鍍金されたＳ
ｎ鍍金層を有し、該半導体素子の該バンプ電極と該配線
基板のＳｎ鍍金層とが接合されてなるものである。本発
明においては、前記Ｐｂ層中のＰｂと前記Ｓｎ鍍金層中
のＳｎとの最も好ましい重量比は４：６である場合であ
り、この場合、加熱溶融してＰｂとＳｎを合金化する
と、低融点ＰｂＳｎ層を効率よく形成することができ
る。また、請求項3の発明に係る半導体装置の製造方法
は、半導体素子の低融点ＰｂSｎ層を配線基板の電極に
接合することにより半導体素子を配線基板上に仮止め接
合する工程、該半導体素子と該配線基板とが仮止め接合
された状態で電気的試験を実施する工程、及び半導体素
子の良品及び不良品のスクリーニングとして、該半導体
素子が不良の場合には、例えば200 ℃程度に加熱して、
前記低融点ＰｂＳｎ層を再加熱し溶融することにより前
記配線基板より該半導体素子を取り外す工程、又は該半
導体素子が良品の場合には、例えば300 ℃〜350 ℃の温
度に加熱することにより、バンプ本体の高融点ＰｂＳｎ
層を加熱溶融して該半導体素子を該配線基板に本止め接
合する工程、とから構成される。 In order to achieve the above object, a semiconductor device according to the present invention has a bump electrode formed by forming a high melting point PbSn layer on a semiconductor element and further coating a Pb layer on the high melting point PbSn layer. S plated with Sn on the electrode of
an n-plated layer, wherein the bump electrode of the semiconductor element and the Sn-plated layer of the wiring board are joined. In the present invention, the most preferable weight ratio of Pb in the Pb layer to Sn in the Sn plating layer is 4: 6. In this case, when Pb and Sn are alloyed by heating and melting, The low melting point PbSn layer can be efficiently formed. Further, a method for manufacturing a semiconductor device according to the invention of claim 3
Uses the low melting point PbSn layer of the semiconductor element as the electrode of the wiring board
The semiconductor element is temporarily fixed on the wiring board by bonding.
Joining step, the semiconductor element and the wiring substrate are temporarily bonded.
Conducting an electrical test in a state where
The screening of non-defective and defective products
If the element is defective, heat it to, for example, about 200 ° C.
By reheating and melting the low melting point PbSn layer,
Removing the semiconductor element from the wiring board, or
If the conductor element is good, for example, a temperature of 300 ° C to 350 ° C
Heating the bump to a high melting point PbSn of the bump body.
The layer is heated and melted, and the semiconductor element is permanently fixed to the wiring board.
Combining).
【０００７】[0007]
【作用】本発明では、後述する図１に示す如く、半導体
素子１のバンプ電極２を厚膜の高融点ＰｂＳｎ層２ａと
薄膜の低融点ＰｂＳｎ層２ｂで構成し、まず低融点Ｐｂ
Ｓｎ層２ｂが溶融される温度で低融点ＰｂＳｎ層２ｂを
溶融して半導体素子１を配線基板３に仮止め接合し、こ
の状態で半導体素子１が正常であるか否かを試験した結
果、半導体素子１が不良の場合には、薄膜の低融点Ｐｂ
Ｓｎ層２ｂが溶融される温度で低融点ＰｂＳｎ層２ｂを
溶融して半導体素子１を配線基板３から取り外すように
している。このように、半導体素子１を配線基板３から
取り外す際、厚膜の高融点ＰｂＳｎ層２ａは溶融されず
薄膜の低融点ＰｂＳｎ層２ｂ部分のみ溶融することがで
きるため、従来の単層のバンプ電極全てを溶融して半導
体素子を配線基板から取り外す場合よりも配線基板３側
に残存するバンプ材を極端に減らすことができる。従っ
て、半導体素子１のリペア（再ボンディング）作業を容
易にすることができる。According to the present invention, as shown in FIG. 1 to be described later, the bump electrode 2 of the semiconductor element 1 is composed of a thick high melting point PbSn layer 2a and a thin low melting point PbSn layer 2b.
At a temperature at which the Sn layer 2b is melted, the low-melting PbSn layer 2b is melted, and the semiconductor element 1 is temporarily bonded to the wiring board 3, and in this state, it is tested whether the semiconductor element 1 is normal or not. When the element 1 is defective, the low melting point Pb of the thin film is used.
The semiconductor element 1 is detached from the wiring board 3 by melting the low-melting PbSn layer 2b at the temperature at which the Sn layer 2b is melted. As described above, when the semiconductor element 1 is detached from the wiring substrate 3, the thick high-melting PbSn layer 2a is not melted, and only the low-melting PbSn layer 2b is melted. Bump material remaining on the wiring board 3 side can be extremely reduced as compared with the case where the whole is melted and the semiconductor element is removed from the wiring board. Therefore, the repair (re-bonding) operation of the semiconductor element 1 can be facilitated.
【０００８】[0008]
【実施例】以下、本発明を図面に基づいて説明する。 （第１実施例）図１は本発明の第１実施例に則した半導
体装置の構造を示す断面図である。図１において、１は
半導体素子であり、この半導体素子１上には膜厚 100μ
程度の高融点ＰｂＳｎ層２ａ（Ｐｂ＞90％）が形成さ
れ、更にこの高融点ＰｂＳｎ層２ａ上に膜厚数μ〜５μ
程度の低融点ＰｂＳｎ層２ｂ（Ｐｂ＝40％）がコートさ
れてなるバンプ電極２が形成されている。そして、３は
電極４が形成された配線基板である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a sectional view showing a structure of a semiconductor device according to a first embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a semiconductor element.
A high melting point PbSn layer 2a (Pb> 90%) is formed, and a few μm to 5 μm thick film is formed on the high melting point PbSn layer 2a.
A bump electrode 2 formed by coating a PbSn layer 2b (Pb = 40%) having a low melting point is formed. Reference numeral 3 denotes a wiring board on which the electrodes 4 are formed.
【０００９】次に、フリップチップの接合工程について
説明する。まず、半導体素子１を配線基板３に対しフェ
ースダウンし、半導体素子１のバンプ電極２と配線基板
３の電極４を位置合わせして接触させた後、バンプ電極
２を構成する低融点ＰｂＳｎ層２ｂを190 ℃程度で加熱
溶融し、半導体素子１の低融点Ｐｂ５ｎ層２ｂを配線基
板３の電極４に接合することにより、半導体素子１を配
線基板３に仮止め接合する。この時、バンプ本体の高融
点ＰｂＳｎ層２ａは熱による変形は受けない。Next, the joining process of the flip chip will be described. First, the semiconductor element 1 is face-down with respect to the wiring board 3, and the bump electrode 2 of the semiconductor element 1 and the electrode 4 of the wiring board 3 are aligned and brought into contact with each other, and then the low melting point PbSn layer 2b constituting the bump electrode 2 is formed. Is heated and melted at about 190 ° C., and the low melting point Pb5n layer 2 b of the semiconductor element 1 is joined to the electrode 4 of the wiring board 3, thereby temporarily joining the semiconductor element 1 to the wiring board 3. At this time, the high melting point PbSn layer 2a of the bump body is not deformed by heat.
【００１０】次に、半導体素子１と配線基板３が仮止め
接合された状態で電気的試験及びスクーニングを実施し
た結果、半導体素子１が不良の場合には、200 ℃程度で
低融点ＰｂＳｎ層２ｂを再加熱し溶融することにより配
線基板３より半導体素子１を取り外す。この時、バンプ
電極２を構成する厚膜の高融点ＰｂＳｎ層２ａは溶融せ
ず、薄膜の低融点ＰｂＳｎ層２ｂのみが溶融して、低融
点ＰｂＳｎ層２ｂ中のバンプ材（ＰｂＳｎ）が配線基板
３側に残存するが、量的に微小で有るため再ボンディン
グ時に問題とはならない。Next, as a result of conducting an electrical test and screening in a state where the semiconductor element 1 and the wiring board 3 are temporarily bonded, if the semiconductor element 1 is defective, the low melting point PbSn layer 2b at about 200 ° C. The semiconductor element 1 is removed from the wiring board 3 by reheating and melting. At this time, the high-melting-point PbSn layer 2a of the thick film constituting the bump electrode 2 does not melt, only the low-melting-point PbSn layer 2b of the thin film melts, and the bump material (PbSn) in the low-melting PbSn layer 2b is Although it remains on the third side, it does not pose a problem during re-bonding because it is very small in quantity.
【００１１】そして、上記試験により半導体素子１が良
品となった場合には、高融点ＰｂＳｎ層２ａが溶融する
温度（300 ℃〜350 ℃）に加熱してバンプ本体の高融点
ＰｂＳｎ層２ａを加熱溶融することにより半導体素子１
を配線基板３に本止め接合する。このように、本実施例
では、半導体素子１のバンプ電極２を高融点ＰｂＳｎ層
２ａと低融点ＰｂＳｎ層２ｂで構成し、まず低融点Ｐｂ
Ｓｎ層２ｂが溶融される温度で低融点ＰｂＳｎ層２ｂを
溶融して半導体素子１を配線基板３に仮止め接合し、こ
の状態で半導体素子１が正常であるか否かを試験した結
果、半導体素子１が不良の場合には、低融点ＰｂＳｎ層
２ｂを溶融される温度で低融点ＰｂＳｎ層２ｂを溶融し
て半導体素子１を配線基板３から取り外すようにしてい
る。このように、半導体素子１を配線基板３から取り外
す際、高融点ＰｂＳｎ層２ａは溶融されず低融点ＰｂＳ
ｎ層２ｂ部分のみ溶融することができるため、従来の単
層のバンプ電極全てを溶融して半導体素子を配線基板か
ら取り外す場合よりも配線基板３側に残存するバンプ材
（ＰｂＳｎ）を極端に減らすことができる。従って、半
導体素子１のリペア（再ボンディング）作業を容易にす
ることができる。If the semiconductor element 1 is found to be good in the above test, the high melting point PbSn layer 2a of the bump body is heated by heating to a temperature (300 ° C. to 350 ° C.) at which the high melting point PbSn layer 2a melts. Melting the semiconductor element 1
Is fixedly joined to the wiring board 3. As described above, in this embodiment, the bump electrode 2 of the semiconductor element 1 is composed of the high melting point PbSn layer 2a and the low melting point PbSn layer 2b,
At a temperature at which the Sn layer 2b is melted, the low-melting PbSn layer 2b is melted, and the semiconductor element 1 is temporarily bonded to the wiring board 3, and in this state, it is tested whether the semiconductor element 1 is normal or not. When the element 1 is defective, the low-melting PbSn layer 2b is melted at a temperature at which the low-melting PbSn layer 2b is melted, and the semiconductor element 1 is detached from the wiring board 3. As described above, when the semiconductor element 1 is detached from the wiring board 3, the high melting point PbSn layer 2a is not melted and the low melting point PbSn layer is not melted.
Since only the n-layer 2b can be melted, the amount of the bump material (PbSn) remaining on the wiring board 3 side is extremely reduced as compared with the conventional case where all the single-layer bump electrodes are melted and the semiconductor element is removed from the wiring board. be able to. Therefore, the repair (re-bonding) operation of the semiconductor element 1 can be facilitated.
【００１２】そして、半導体素子１が良品の場合は、高
融点ＰｂＳｎ層２ａが溶融される温度で高融点ＰｂＳｎ
層２ａを溶融して半導体素子１を配線基板３に本止め接
合しているため、半導体素子１を配線基板３に確実に接
続することができる。 （第２実施例）図２は本発明の第２実施例に則した半導
体装置の構造を示す断面図である。図２において、図１
と同一符号は同一または相当部分を示し、11ａは半導体
素子１上に形成された膜厚数 10〜100μ程度の高融点Ｐ
ｂＳｎ層であり、11ｂはこの高融点ＰｂＳｎ層11ａ上に
コートされ形成された膜厚数μ程度のＰｂ層であり、こ
の高融点ＰｂＳｎ層11ａとＰｂ層11ｂからバンプ電極11
が形成されている。そして、12は配線基板３の電極４上
にＳｎ鍍金され形成された膜厚数μ程度のＳｎ鍍金層で
ある。なお、Ｐｂ層11ｂ中のＰｂとＳｎ鍍金層12中のＳ
ｎとの重量比は４：６である。If the semiconductor element 1 is a non-defective product, the high melting point PbSn is set at a temperature at which the high melting point PbSn layer 2a is melted.
Since the layer 2 a is melted and the semiconductor element 1 is permanently fixed to the wiring board 3, the semiconductor element 1 can be reliably connected to the wiring board 3. (Second Embodiment) FIG. 2 is a sectional view showing the structure of a semiconductor device according to a second embodiment of the present invention. In FIG. 2, FIG.
The same reference numerals denote the same or corresponding parts, and 11a denotes a high melting point P having a film thickness of about 10 to 100 μ formed on the semiconductor element 1.
The bSn layer 11b is a Pb layer having a thickness of about several μm coated on the high melting point PbSn layer 11a and formed from the high melting point PbSn layer 11a and the Pb layer 11b.
Are formed. Reference numeral 12 denotes a Sn plating layer having a thickness of about several μm formed by Sn plating on the electrode 4 of the wiring board 3. The Pb in the Pb layer 11b and the Sb in the Sn plating layer 12
The weight ratio with n is 4: 6.
【００１３】次に、フリップチップの接合工程について
説明する。まず、半導体素子１を配線基板３に対してフ
ェースダウンし、半導体素子１のバンプ電極11と配線基
板３の電極４を位置合わせして接触させた後、バンプ電
極11を構成するＰｂ層11ｂとＳｎ鍍金層12を190℃程度
（ＰｂとＳｎの共晶点付近）で加熱溶融し、ＰｂとＳｎ
を合金化して半導体素子１を配線基板３に仮止め接合す
る。この時、ＰｂとＳｎの重量比を４：６にしているた
め、ＰｂとＳｎが合金化されて低融点ＰｂＳｎ層が形成
される。なお、バンプ本体の高融点ＰｂＳｎ層11は熱に
よる変形は受けない。次に、半導体素子１と配線基板３
が仮止め接合された状態で電気的試験及びスクーニング
を実施した結果、半導体素子１が不良の場合には、200
℃程度でＰｂＳｎが合金化された低融点ＰｂＳｎ層を再
加熱し溶融することにより配線基板３より半導体素子１
を取り外す。この時、バンプ電極２を構成する高融点Ｐ
ｂＳｎ層11ａは溶融せず、薄膜部分のＰｂとＳｎが合金
化されたＰｂＳｎ層のみが溶融して、この低融点ＰｂＳ
ｎ層中のバンプ材（ＰｂＳｎ）が配線基板３側に残存す
るが、量的に微小で有るため再ボンディング時に問題と
はならない。Next, the bonding process of the flip chip will be described. First, the semiconductor element 1 is face-down with respect to the wiring board 3, and the bump electrodes 11 of the semiconductor element 1 and the electrodes 4 of the wiring board 3 are aligned and brought into contact with each other, and then the Pb layer 11 b constituting the bump electrodes 11 is contacted. The Sn plating layer 12 is heated and melted at about 190 ° C. (near the eutectic point of Pb and Sn), and Pb and Sn are melted.
And the semiconductor element 1 is temporarily bonded to the wiring board 3. At this time, since the weight ratio between Pb and Sn is 4: 6, Pb and Sn are alloyed to form a low melting point PbSn layer. The high melting point PbSn layer 11 of the bump body is not deformed by heat. Next, the semiconductor element 1 and the wiring board 3
As a result of conducting the electrical test and the screening in a state where the semiconductor element 1 is temporarily bonded, when the semiconductor element 1 is defective, 200
By reheating and melting the low melting point PbSn layer in which PbSn is alloyed at about
Remove. At this time, the high melting point P constituting the bump electrode 2 is used.
The bSn layer 11a does not melt, but only the PbSn layer in which Pb and Sn are alloyed in the thin film portion melts, and this low melting point PbS
The bump material (PbSn) in the n-layer remains on the wiring substrate 3 side, but does not pose a problem at the time of re-bonding because it is minute in quantity.
【００１４】そして、上記試験により半導体素子１が良
品となった場合は、高融点ＰｂＳｎ層11ａが溶融する温
度（300 ℃〜350 ℃）に加熱してバンプ本体の高融点Ｐ
ｂＳｎ層11ａを加熱溶融することにより半導体素子１を
配線基板３に本止め接合する。このように、本実施例で
は半導体素子１のバンプ電極２を高融点ＰｂＳｎ層11ａ
とＰｂ層11ｂで構成するとともに、配線基板３の電極４
上にＳｎ鍍金層12を形成し、まずＰｂ層11ｂとＳｎ鍍金
層12が溶融される温度でＰｂ層11ｂとＳｎ鍍金層12を溶
融しＰｂとＳｎを合金化して半導体素子１を配線基板３
に仮止め接合し、この状態で半導体素子１が正常である
か否かを試験した結果、半導体素子１が不良の場合に
は、薄膜のＰｂとＳｎが合金化された低融点ＰｂＳｎ層
が溶融される温度で低融点ＰｂＳｎ層を溶融して半導体
素子１を配線基板３から取り外すようにしている。この
ように、半導体素子１を配線基板３から取り外す際、高
融点ＰｂＳｎ層11ａは溶融されず薄膜の低融点のＰｂＳ
ｎ層部分のみを溶融することができるため、従来の単層
のバンプ電極全てを溶融して半導体素子を配線基板から
取り外す場合よりも、配線基板３側に残存するバンプ材
（ＰｎＳｎ）を極端に減らすことができる。従って、半
導体素子１のリペア（再ボンディング）を容易にするこ
とができる。When the semiconductor element 1 is determined to be a non-defective product by the above test, the semiconductor element 1 is heated to a temperature (300 ° C. to 350 ° C.) at which the high melting point PbSn layer 11a is melted, and the high melting point P
The semiconductor element 1 is permanently joined to the wiring board 3 by heating and melting the bSn layer 11a. As described above, in this embodiment, the bump electrode 2 of the semiconductor element 1 is replaced with the high melting point PbSn layer 11a.
And the Pb layer 11b, and the electrode 4 of the wiring board 3
An Sn plating layer 12 is formed thereon, and first, the Pb layer 11b and the Sn plating layer 12 are melted at a temperature at which the Pb layer 11b and the Sn plating layer 12 are melted, and Pb and Sn are alloyed to form the semiconductor element 1 into the wiring board 3.
The semiconductor element 1 was tested in this state to see if it was normal. If the semiconductor element 1 was defective, the low-melting PbSn layer in which Pb and Sn of the thin film were alloyed was melted. The semiconductor element 1 is detached from the wiring board 3 by melting the low-melting PbSn layer at the temperature that is set. As described above, when the semiconductor element 1 is removed from the wiring board 3, the high-melting PbSn layer 11a is not melted and the low-melting PbSn layer of the thin film is formed.
Since only the n-layer portion can be melted, the amount of the bump material (PnSn) remaining on the wiring board 3 is extremely reduced as compared with the conventional case where all the single-layer bump electrodes are melted and the semiconductor element is removed from the wiring board. Can be reduced. Therefore, repair (re-bonding) of the semiconductor element 1 can be facilitated.
【００１５】そして、半導体素子１が良品の場合には、
厚膜の高融点ＰｂＳｎ層11ａが溶融される温度で高融点
ＰｂＳｎ層11ａを溶融して半導体素子１を配線基板３に
本止め接合しているため、半導体素子１を配線基板３に
確実に接合することができる。When the semiconductor element 1 is a good product,
Since the high-melting-point PbSn layer 11a is melted at the temperature at which the thick-film high-melting-point PbSn layer 11a is melted and the semiconductor element 1 is permanently joined to the wiring board 3, the semiconductor element 1 is securely joined to the wiring board 3. can do.
【００１６】[0016]
【発明の効果】本発明によれば、半導体素子のバンプ電
極を加熱再溶融して配線基板から半導体素子を引き剥が
す際、バンプ材を配線基板側に残存し難くしてバンプ材
の除去を容易にすることができ、半導体素子のリペア作
業を容易にすることができるという効果がある。更に、
本発明の製造方法によれば、基板電極と半田（PbSn合
金）電極との接合部が低融点半田で形成され、接合部よ
りも上方のバンプ材は高融点半田からなるので、仮止め
状態で、電気的試験と半導体素子のスクリーニングが実
施でき、低融点接合部を溶融すれば、不良の半導体素子
の取り外しが容易にできるという効果もある。 According to the present invention, when the semiconductor device is peeled off from the wiring substrate by heating and re-melting the bump electrode of the semiconductor device, the bump material is hardly left on the wiring substrate side, and the bump material is easily removed. And the repair operation of the semiconductor element can be facilitated. Furthermore,
According to the manufacturing method of the present invention, the substrate electrode and the solder (PbSn
Gold) The joint with the electrode is made of low melting point solder
Since the bump material above the solder is made of high melting point solder,
Electrical testing and semiconductor device screening
If the low melting point joint is melted, defective semiconductor elements
There is also an effect that it can be easily removed.
【図１】本発明の第１実施例に則した半導体装置の構造
を示す断面図である。FIG. 1 is a sectional view showing a structure of a semiconductor device according to a first embodiment of the present invention.
【図２】本発明の第２実施例に則した半導体装置の構造
を示す断面図である。FIG. 2 is a sectional view showing a structure of a semiconductor device according to a second embodiment of the present invention.
【図３】従来例の半導体装置の構造を示す断面図であ
る。FIG. 3 is a cross-sectional view showing a structure of a conventional semiconductor device.
１ 半導体素子 ２ バンプ電極 ２ａ 高融点ＰｂＳｎ層 ２ｂ 低融点ＰｂＳｎ層 ３ 配線基板 ４ 電極 11 バンプ電極 11ａ 高融点ＰｂＳｎ層 11ｂ Ｐｂ層 12 Ｓｎ鍍金層 DESCRIPTION OF SYMBOLS 1 Semiconductor element 2 Bump electrode 2a High melting point PbSn layer 2b Low melting point PbSn layer 3 Wiring board 4 Electrode 11 Bump electrode 11a High melting point PbSn layer 11b Pb layer 12 Sn plating layer
フロントページの続き (56)参考文献 特開 昭57−106057（ＪＰ，Ａ) 特開 昭59−188147（ＪＰ，Ａ) 特開 昭60−49652（ＪＰ，Ａ) 特開 平３−283542（ＪＰ，Ａ) 特開 平５−190552（ＪＰ，Ａ) 特開 平５−160197（ＪＰ，Ａ) 特開 平５−190599（ＪＰ，Ａ) 実開 平３−63929（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 21/60 H01L 21/60 311 Continuation of the front page (56) References JP-A-57-106057 (JP, A) JP-A-59-188147 (JP, A) JP-A-60-49652 (JP, A) JP-A-3-283542 (JP) JP-A-5-190552 (JP, A) JP-A-5-160197 (JP, A) JP-A-5-190599 (JP, A) JP-A-3-63929 (JP, U) (58) Field surveyed (Int.Cl. 7 , DB name) H01L 21/60 H01L 21/60 311
Claims (3)
（11ａ）が形成され、更に該高融点ＰｂＳｎ層（11ａ）
上にＰｂ層（11ｂ）がコートされてなるバンプ電極（1
1）を有し、配線基板（３）の電極（４）上にＳｎ鍍金
されたＳｎ鍍金層（12）を有し、該半導体素子（１）の
該バンプ電極（11）と該配線基板（３）のＳｎ鍍金層
（12）とが接合されてなることを特徴とする半導体装
置。1. A high melting point PbSn layer (11a) is formed on a semiconductor element (1), and said high melting point PbSn layer (11a) is further formed.
A bump electrode (1) having a Pb layer (11b) coated thereon
1), having an Sn-plated Sn plating layer (12) on an electrode (4) of a wiring board (3), wherein the bump electrode (11) of the semiconductor element (1) and the wiring board ( 3) A semiconductor device characterized by being joined to the Sn plating layer (12).
鍍金層（12）中のＳｎとの重量比はおよそ４：６である
ことを特徴とする請求項１記載の半導体装置。2. The method according to claim 1, wherein Pb in said Pb layer (11b) and said Sn
2. The semiconductor device according to claim 1 , wherein a weight ratio with respect to Sn in the plating layer (12) is approximately 4: 6.
板の電極に接合することにより半導体素子を配線基板上
に仮止め接合する工程、 該半導体素子と該配線基板とが仮止め接合された状態で
電気的試験を実施する工程、 該半導体素子が不良の場合には、前記低融点ＰｂＳｎ層
を加熱し溶融することにより前記配線基板より該半導体
素子を取り外す工程、又は 該半導体素子が良品の場合に
は、バンプ本体の高融点ＰｂＳｎ層を加熱溶融すること
により該半導体素子を該配線基板に本止め接合する工程
とからなる半導体装置の製造方法。 3. A low melting point PbSn layer of a semiconductor element is connected to a wiring base.
Semiconductor element on wiring board by bonding to plate electrode
Temporarily bonding the semiconductor element and the wiring board in a state where they are temporarily bonded.
A step of performing an electrical test, and, if the semiconductor element is defective, the low melting point PbSn layer;
By heating and melting the semiconductor from the wiring board
In the process of removing the element, or when the semiconductor element is a good product
Is to heat and melt the high melting point PbSn layer of the bump body
Step of permanently joining the semiconductor element to the wiring board by using
A method for manufacturing a semiconductor device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05566192A JP3193100B2 (en) | 1992-03-13 | 1992-03-13 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05566192A JP3193100B2 (en) | 1992-03-13 | 1992-03-13 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05259167A JPH05259167A (en) | 1993-10-08 |
| JP3193100B2 true JP3193100B2 (en) | 2001-07-30 |
Family
ID=13005034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05566192A Expired - Fee Related JP3193100B2 (en) | 1992-03-13 | 1992-03-13 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3193100B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0997791A (en) * | 1995-09-27 | 1997-04-08 | Internatl Business Mach Corp <Ibm> | Bump structure, formation of bump and installation connection body |
| US8390131B2 (en) | 2004-06-03 | 2013-03-05 | International Rectifier Corporation | Semiconductor device with reduced contact resistance |
| US7279409B2 (en) * | 2005-10-31 | 2007-10-09 | Freescale Semiconductor, Inc | Method for forming multi-layer bumps on a substrate |
| KR101088824B1 (en) | 2010-06-16 | 2011-12-06 | 주식회사 하이닉스반도체 | Module substrate, memory module having the module substrate and method for forming the memory module |
-
1992
- 1992-03-13 JP JP05566192A patent/JP3193100B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05259167A (en) | 1993-10-08 |
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