JP3190552B2 - Starting method and apparatus for heating furnace combustion equipment - Google Patents
Starting method and apparatus for heating furnace combustion equipmentInfo
- Publication number
- JP3190552B2 JP3190552B2 JP27935595A JP27935595A JP3190552B2 JP 3190552 B2 JP3190552 B2 JP 3190552B2 JP 27935595 A JP27935595 A JP 27935595A JP 27935595 A JP27935595 A JP 27935595A JP 3190552 B2 JP3190552 B2 JP 3190552B2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- furnace temperature
- temperature
- heating
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Control Of Combustion (AREA)
- Control Of Heat Treatment Processes (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Tunnel Furnaces (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、燃焼による熱によ
って対象物を加熱する加熱炉設備の起動作業の自動化を
行うための方法及び設備であって、特に起動に時間を要
する大型の加熱炉設備の起動作業への適用に有用な自動
起動方法及び装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for automating a starting operation of a heating furnace equipment for heating an object by heat from combustion, and particularly to a large heating furnace equipment requiring a long time for starting. The present invention relates to an automatic start method and apparatus useful for application to a start operation.
【０００２】[0002]
【従来の技術】加熱炉設備において、生産量の調整等の
目的で一日の中のある時間を生産し、残りの時間は生産
を行わないような操業を行う際には、生産を行わない期
間は省エネルギーの目的のため、炉内の温度を生産時の
温度よりも大幅に低く設定して保温し、次の操業の数時
間前から炉内温度の設定を徐々に上昇させて準備してお
く操業や、更に省エネを追求するために、生産後に一旦
加熱炉の燃焼装置の運転を停止して、炉内温度が自然に
下がっていくままに放置し、前記と同じように次の生産
の数時間前から炉内温度の設定を徐々に上昇させて準備
しておく操業が行われている。2. Description of the Related Art In a heating furnace facility, production is not performed when an operation is performed during a certain day of the day for the purpose of adjusting production amount and the like and the remaining time is not performed. During the period, for the purpose of energy saving, keep the temperature inside the furnace significantly lower than the temperature at the time of production and keep it warm, and gradually raise the temperature inside the furnace several hours before the next operation to prepare. In order to pursue operations and further energy saving, after the production, the operation of the combustion device of the heating furnace is temporarily stopped, and the temperature in the furnace is allowed to drop naturally, and the next production is performed as described above. Several hours ago, the furnace temperature has been gradually increased to prepare for the operation.
【０００３】また、定期的な修繕の際には、燃焼装置の
運転をとめて炉内温度を下げて修繕作業等を行い、再度
生産にはいるために炉内温度を徐々に上昇させていく操
業が行われている。炉内温度の上昇を行うには操業者が
一定時間毎に徐々に炉内温度の設定値を上昇させていく
方法や、決められたパターンの関数で値を発生する信号
発生器を用いて発生させた信号を、炉内温度設定値とし
て炉内温度調節装置に供給して炉内温度を徐々に上昇さ
せる方法がとられている。In the case of regular repairs, the operation of the combustion device is stopped, the furnace temperature is lowered, repair work is performed, and the furnace temperature is gradually increased in order to resume production. Operations are taking place. In order to raise the furnace temperature, the operator can gradually increase the furnace temperature set value at regular intervals or use a signal generator that generates a value according to a predetermined pattern function. A method is employed in which the signal thus made is supplied to a furnace temperature controller as a furnace temperature set value to gradually raise the furnace temperature.
【０００４】[0004]
【発明が解決しようとする課題】上記のような操業形態
では、次に生産を行う時刻に炉内温度が所定の温度を得
るために、操業者が目標炉内温度と徐々に降下する実際
の炉内温度から、炉内温度上昇開始の時期を判断し炉内
温度の設定を徐々に上昇させて所定時刻に所定の炉内温
度を得る様に操業を行なう必要があり、加熱炉設備の自
動化、省力化のための操業要員の削減が難しいという問
題がある。また、適切な時期に昇温を開始しないと、昇
温開始時期が早すぎる場合にはエネルギーの無駄が発生
し、昇温開始時期が遅すぎた場合には生産を開始する時
に目標とする炉内温度が得られないといった問題が発生
する。In the above-mentioned operation mode, in order for the furnace temperature to reach a predetermined temperature at the time of the next production, the operator gradually decreases the furnace temperature from the target furnace temperature. It is necessary to judge the timing of the start of furnace temperature rise from the furnace temperature, gradually increase the furnace temperature setting, and operate so that a predetermined furnace temperature is obtained at a predetermined time. However, there is a problem that it is difficult to reduce the number of operation personnel for labor saving. If the heating is not started at an appropriate time, energy will be wasted if the heating is started too early, and if the heating is started too late, the target furnace will be used when starting production. The problem that the internal temperature cannot be obtained occurs.
【０００５】操業要員の省力化、自動化のために炉内温
度を決められた昇温パターンで上昇させる方法はパター
ン発生器を用いて炉内温度の目標値を発生し、その値を
炉内温度調節装置に入力する事で解決できるが、前記の
操業例で示した燃焼装置を停止して炉内温度が徐々に低
下していくような操業形態を採用している場合などは、
炉内温度が時間とともに変動するためパターン発生器を
いつ起動するかまたどのような炉内温度設定値からパタ
ーン発生を開始するかを自動的に限定する事が困難であ
る。A method of raising the furnace temperature in a predetermined heating pattern for labor saving and automation of operation personnel is to generate a target value of the furnace temperature by using a pattern generator, and to calculate the target value of the furnace temperature. Although it can be solved by inputting to the control device, such as when the operation mode such that the furnace temperature is gradually reduced by stopping the combustion device shown in the above operation example,
Since the furnace temperature fluctuates with time, it is difficult to automatically limit when to start the pattern generator and what kind of furnace temperature set value to start pattern generation.
【０００６】[0006]
【課題を解決するための手段】本発明はこれら課題を実
用的に解決するためになされたものであって、 （１）あらかじめ設定された昇温パターンで、予定され
た時刻に、炉内温度が目標炉内温度になる様に加熱炉の
燃焼設備を起動する方法において、前記昇温パターン、
目標炉内温度を元に常時炉内温度設定値Ｔを算出し、炉
内温度の実測値が、前記炉内温度設定値Ｔと一致した
時、炉燃焼設備の起動を行う事を特徴とする加熱炉設備
の起動方法。DISCLOSURE OF THE INVENTION The present invention has been made to solve these problems in a practical manner. (1) The temperature in the furnace is set at a predetermined time according to a preset heating pattern. In the method of starting the combustion equipment of the heating furnace so that the target furnace temperature, the temperature rising pattern,
A furnace temperature set value T is always calculated based on a target furnace temperature, and the furnace combustion equipment is started when an actual measured value of the furnace temperature matches the furnace temperature set value T. How to start heating furnace equipment.
【０００７】（２）炉内加熱装置２と、炉内温度測定装
置３と、該装置の信号を受け炉温の調節値を算出する炉
内温度調節装置４と、該調節値に基づいて操作される燃
料・空気流量調節装置５，６およびその調節弁７，８と
からなる加熱炉の燃焼設備であって、操業の開始時刻、
目標炉内温度から設定された昇温パターンに基づき、各
時刻における炉内温度設定値Ｔを演算し、前記炉内温度
測定装置３の実測値と比較し、両者の一致の時期を判定
する炉内温度上昇起動判定装置１０と、該装置から実測
値と炉内温度設定値Ｔとが一致した信号を受け、炉内温
度設定信号１１を前記炉内温度調節装置４に発信し、燃
料・空気流量調節をするごとくなした炉内温度設定信号
発生装置９とを有する事を特徴とする加熱炉燃焼設備の
起動装置を要旨とするものである。(2) In-furnace heating device 2, in-furnace temperature measuring device 3, in-furnace temperature adjusting device 4 which receives a signal from the device and calculates a furnace temperature adjustment value, and operates based on the adjustment value Heating and combustion equipment comprising a fuel / air flow control device 5, 6 and its control valve 7, 8;
Based on the heating pattern set from the target furnace temperature, the furnace temperature set value T at each time is calculated, compared with the actually measured value of the furnace temperature measuring device 3 to determine the timing of coincidence between the two. The internal temperature rise start determination device 10 receives a signal from the device that the measured value matches the furnace temperature set value T, and transmits a furnace temperature set signal 11 to the furnace temperature control device 4 to determine the fuel / air The invention also provides a starting device for a heating furnace combustion facility characterized by having a furnace temperature setting signal generating device 9 capable of adjusting a flow rate.
【０００８】[0008]
【発明の実施の形態】以下、本発明の作用について実施
の形態を示す図面を用いて説明する。図１は、本発明に
係る請求項１及び２に基づき構成した加熱炉設備の自動
起動装置の構成を示した図であり、図２は加熱炉炉内温
度の変化を示した例である。また、図３は炉内温度設定
信号発生装置９と炉内温度上昇起動判定装置１０にて行
う処理内容のフローチャートである。DESCRIPTION OF THE PREFERRED EMBODIMENTS The operation of the present invention will be described below with reference to the drawings showing an embodiment. FIG. 1 is a diagram showing a configuration of an automatic starting device of a heating furnace facility configured based on claims 1 and 2 according to the present invention, and FIG. 2 is an example showing a change in a temperature inside the heating furnace. FIG. 3 is a flowchart of the processing performed by the furnace temperature setting signal generator 9 and the furnace temperature rise start-up determination device 10.
【０００９】加熱炉本体１は炉内に被加熱物を装入して
所定の温度に加熱する炉自体で、加熱炉の温度を上昇さ
せるために炉内加熱装置２が設置されている。炉内の温
度は加熱炉本体１に設置された炉内温度測定装置３にて
計測され、計測信号は炉内温度調節装置４に伝送され炉
内温度調節装置４内で通常はＰＩＤ演算処理がなされて
炉内温度調節用の調節値が得られる。調節値は炉内加熱
装置２に供給される燃料の流量を調節する燃料流量調節
装置５及びその燃料調節弁７と燃焼空気の流量を調節す
る空気流量調節装置６及びその空気調節弁８におくられ
て炉内加熱装置２の燃焼量を調節する事で炉内の温度制
御を実現している。The heating furnace main body 1 is a furnace itself for charging an object to be heated into a furnace and heating it to a predetermined temperature. An in-furnace heating device 2 is installed to raise the temperature of the heating furnace. The temperature in the furnace is measured by an in-furnace temperature measuring device 3 installed in the heating furnace main body 1, and a measurement signal is transmitted to the in-furnace temperature adjusting device 4, where PID calculation processing is usually performed. Thus, a control value for controlling the furnace temperature is obtained. The adjustment values are stored in a fuel flow control device 5 and a fuel control valve 7 for controlling the flow rate of the fuel supplied to the in-furnace heating device 2 and an air flow control device 6 and a air control valve 8 for controlling the flow rate of the combustion air. The temperature of the furnace is controlled by adjusting the combustion amount of the furnace heating device 2.
【００１０】炉内加熱装置２を起動して炉内の温度を上
昇させるには炉内温度設定信号発生装置９から炉内温度
調節装置４におくられる炉内温度設定信号１１をあらか
じめ設定されたパターンで変化させる事で行われる。炉
内温度設定信号発生装置９が活動を開始する時期は炉内
温度上昇起動判定装置１０から指示される。In order to start the furnace heating device 2 and raise the temperature in the furnace, a furnace temperature setting signal 11 sent from the furnace temperature setting signal generator 9 to the furnace temperature controller 4 is set in advance. This is done by changing the pattern. The time at which the in-furnace temperature setting signal generator 9 starts its operation is instructed by the in-furnace temperature rise start-up determination device 10.
【００１１】以下、同図における自動燃焼装置起動によ
る炉内温度上昇の作用を説明する。本発明の作用の順序
として前回の操業が終了した時点からの動作を説明す
る。操業が終了すると炉内加熱装置２の燃焼が停止され
て加熱炉１の炉内温度が徐々に下降を始める（図２の２
２）。この時点で操業者は次の操業の開始時刻２９と操
業時の目標設定温度３０を炉内温度設定信号発生装置９
に入力する（入力１０１）。炉内温度上昇起動判定装置
１０は、あらかじめ設定された目標操業開始時刻２９と
操業開始時の目標炉内温度３０から炉内温度設定信号発
生装置９で演算される炉内温度設定値Ｔ、２５（処理１
０３、処理１２１、処理１１２）と、温度測定装置３か
らの炉内温度信号（処理１１１）を比較して（処理１１
３）炉内温度設定値Ｔ、２５が実際の炉内温度と等しい
か上回った際に炉内温度上昇動作を開始するとの判断を
行ない（判断１１４）、判断結果を、炉内温度設定信号
発生装置９へ炉内温度上昇起動信号として伝送する（処
理１１５、処理１２２）。加熱開始判断信号を受け取っ
た炉内温度設定信号発生装置９はこの時点（処理１０
４、判断１０５）から、炉内温度設定信号１１を炉内温
度調節装置へ伝送を開始する（処理１０６から１０
８）。図３の処理１０６以降の処理は従来の信号発生器
を使用した昇温動作の処理と同様のものである。Hereinafter, the effect of the rise in the furnace temperature due to the activation of the automatic combustion device in FIG. The operation from the time when the previous operation is completed will be described as the operation sequence of the present invention. When the operation is completed, the combustion in the furnace heating device 2 is stopped, and the furnace temperature of the heating furnace 1 starts to gradually decrease (2 in FIG. 2).
2). At this point, the operator sets the start time 29 of the next operation and the target set temperature 30 during the operation to the furnace temperature setting signal generator 9.
(Input 101). The in-furnace temperature rise start determination device 10 calculates the in-furnace temperature set values T, 25 calculated by the in-furnace temperature setting signal generator 9 from a preset target operation start time 29 and a target furnace temperature 30 at the start of operation. (Process 1
03, processing 121, processing 112) and the furnace temperature signal (processing 111) from the temperature measuring device 3 (processing 11).
3) When the in-furnace temperature set values T and 25 are equal to or higher than the actual in-furnace temperature, it is determined that the furnace temperature increasing operation is started (decision 114), and the result of the determination is generated by generating a furnace temperature setting signal. It is transmitted to the apparatus 9 as a furnace temperature rise start signal (steps 115 and 122). The in-furnace temperature setting signal generator 9 having received the heating start determination signal at this time (step 10
4. From the judgment 105), the in-furnace temperature setting signal 11 is transmitted to the in-furnace temperature controller (steps 106 to 10).
8). The processing after the processing 106 in FIG. 3 is the same as the processing of the temperature raising operation using the conventional signal generator.
【００１２】次に、炉内温度設定値Ｔ、２５を決定する
方法を示す。一般に炉内温度上昇割合ｄｔ、２６は時間
経過に比例した値で行われる事が多いため、時間経過比
例の場合の例で説明する。時間経過比例の場合の炉内温
度パターンは図２に示すごとくなる。すなわち、目標操
業開始時刻２９及び目標炉内温度３０が与えられると、
ＰＩＤ制御での整定時間を見込んだ無駄時間２８、無駄
時間に到達するまで一定の時間比例割合で炉内温度設定
値Ｔが上昇する期間で構成される。このような温度パタ
ーンの場合、所定の炉内温度に到達するまでの昇温時間
Ｔ、２７が設定されると現在時刻２３における炉内温度
設定値Ｔ、２５は以下で与えられる。 炉内温度設定値Ｔ＝目標炉内温度Ｔｏ−炉内温度上昇割
合ｄＴ×（昇温時間ｔ−無駄時間ｔｄ） 但し、昇温時間ｔ＝目標操業開始時刻−現在時刻Next, a method for determining the furnace temperature set values T and 25 will be described. Generally, the furnace temperature rise rate dt, 26 is often set to a value proportional to the passage of time, so an example in the case of the passage of time will be described. FIG. 2 shows a furnace temperature pattern in the case of the time lapse ratio. That is, when the target operation start time 29 and the target furnace temperature 30 are given,
It is composed of a dead time 28 in which the settling time in the PID control is anticipated, and a period in which the furnace temperature set value T rises at a constant time proportion until the dead time is reached. In the case of such a temperature pattern, when the temperature rise time T, 27 until reaching the predetermined furnace temperature is set, the furnace temperature set value T, 25 at the current time 23 is given as follows. Furnace temperature set value T = Target furnace temperature To-Furnace temperature rise rate dT x (heating time t-dead time td) where heating time t = target operation start time-current time
【００１３】例では炉内温度の上昇が時間経過比例の場
合を示したが、時間経過に対して非線形な変化、例えば
指数関数や三角関数に関しても逆関数を求める等の方法
で炉内温度設定値Ｔ、２５を求めることが出来る。例え
ば、指数関数で炉内温度を上昇させる際には以下の演算
で炉内温度設定値を求め、 炉内温度設定値Ｔ＝目標炉内温度Ｔｏ×ｅｘｐ（−Ａ×
昇温時間ｔ） 但し Ａ：加熱炉の昇温速度限界等から決まる定数 三角関数で炉内温度を上昇させる場合には以下の演算で
炉内温度設定値を求める事が出来る。 炉内温度設定値Ｔ＝目標炉内温度Ｔｏ×ｃｏｓ（φ） 但し （到達時間ｔ）≦（常温からの立上時間Ｂ）のと
き φ＝ｔ／Ｂ×π／４ （到達時間ｔ）＞（常温からの立上時間Ｂ）のとき φ＝π／４In the example, the case where the rise in the furnace temperature is proportional to the passage of time is shown. However, the furnace temperature is set by a method such as finding an inverse function with respect to a non-linear change over time, for example, an exponential function or a trigonometric function. Values T and 25 can be obtained. For example, when increasing the furnace temperature by an exponential function, the furnace temperature set value is obtained by the following calculation, and the furnace temperature set value T = target furnace temperature To × exp (−A ×
Heating time t) However, A: Constant determined by heating furnace heating rate limit, etc. When raising the furnace temperature by a trigonometric function, the furnace temperature set value can be obtained by the following calculation. Furnace temperature set value T = Target furnace temperature To × cos (φ) where (arrival time t) ≦ (rise time from normal temperature B) φ = t / B × π / 4 (arrival time t)> (Rise time from normal temperature B) φ = π / 4
【００１４】[0014]
【発明の効果】本発明によって、加熱炉の炉内温度が燃
焼を停止された事によって徐々に変化している場合でも
設定された時刻に設定された炉内温度状態を得るための
炉内温度上昇の操作を操業者の関与無しに自動で行う事
が可能となった。According to the present invention, even if the furnace temperature of the heating furnace is gradually changing due to the stoppage of combustion, the furnace temperature for obtaining the set furnace temperature state at a set time. Ascent operation can be performed automatically without operator involvement.
【図１】本発明に係る加熱炉設備の自動起動装置の構成
を示す説明図、FIG. 1 is an explanatory view showing the configuration of an automatic starter for heating furnace equipment according to the present invention;
【図２】炉内温度設定値の求め方の説明図、FIG. 2 is an explanatory diagram of a method of obtaining a furnace temperature set value,
【図３】前回の操業終了時からの炉内温度の変化と炉内
温度設定値の時間経過による関係の説明図である。FIG. 3 is an explanatory diagram of a relationship between a change in a furnace temperature from the end of a previous operation and a set time of a furnace temperature over time.
１ 加熱炉本体 ２ 炉内加熱装置 ３ 炉内温度測定装置 ４ 炉内温度調節装置 ５ 燃料流量調節装置 ６ 空気流量調節装置 ７ 燃料調節弁 ８ 空気調節弁 ９ 炉内温度設定信号発生装置 1 0 炉内温度上昇起動判定装置 1 1 炉内温度設定信号 2 1 前回操業終了時刻 2 2 自然冷却による温度降下 2 3 現在時刻 2 4 昇温開始時刻 2 5 炉内温度設定値 2 6 炉内温度上昇割合ｄＴ 2 7 昇温時間ｔ 2 8 無駄時間ｔｄ 2 9 目標操業開始時刻 3 0 目標炉内温度Ｔｏ DESCRIPTION OF SYMBOLS 1 Heating furnace main body 2 Furnace heating device 3 Furnace temperature measuring device 4 Furnace temperature control device 5 Fuel flow control device 6 Air flow control device 7 Fuel control valve 8 Air control valve 9 Furnace temperature setting signal generator 1 0 Furnace Internal temperature rise start-up judgment device 1 1 Furnace temperature setting signal 2 1 Previous operation end time 2 2 Temperature drop due to natural cooling 2 3 Current time 2 4 Heating start time 2 5 Furnace temperature set value 2 6 Furnace temperature rise rate dT 27 Heating time t 28 Dead time td 29 Target operation start time 30 Target furnace temperature To
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C21D 1/52 C21D 11/00 102 F27D 19/00 F23N 5/02 344 F23N 5/20 Continuation of the front page (58) Field surveyed (Int. Cl. 7 , DB name) C21D 1/52 C21D 11/00 102 F27D 19/00 F23N 5/02 344 F23N 5/20
Claims (2)
予定された時刻に、炉内温度が目標炉内温度になる様に
加熱炉の燃焼設備を起動する方法において、前記昇温パ
ターン、目標炉内温度を元に常時炉内温度設定値Ｔを算
出し、炉内温度の実測値が、前記炉内温度設定値Ｔと一
致した時、炉燃焼設備の起動を行う事を特徴とする加熱
炉燃焼設備の起動方法。1. A heating pattern set in advance,
In the method of starting the combustion equipment of the heating furnace so that the furnace temperature becomes the target furnace temperature at a scheduled time, the furnace temperature set value T is always calculated based on the temperature rise pattern and the target furnace temperature. And starting the furnace combustion equipment when the actual measured value of the furnace temperature matches the furnace temperature set value T.
と、該装置の信号を受け炉温の調節値を算出する炉内温
度調節装置４と、該調節値に基づいて操作される燃料・
空気流量調節装置５，６およびその調節弁７，８とから
なる加熱炉の燃焼設備であって、操業の開始時刻、目標
炉内温度から設定された昇温パターンに基づき、各時刻
における炉内温度設定値Ｔを演算し、前記炉内温度測定
装置３の実測値と比較し、両者の一致の時期を判定する
炉内温度上昇起動判定装置１０と、該装置から実測値と
炉内温度設定値Ｔとが一致した信号を受け、炉内温度設
定信号１１を前記炉内温度調節装置４に発信し、燃料・
空気流量調節をするごとくなした炉内温度設定信号発生
装置９とを有する事を特徴とする加熱炉燃焼設備の起動
装置。2. A furnace heating device 2 and a furnace temperature measuring device 3.
A furnace temperature control device 4 that receives a signal from the device and calculates a furnace temperature control value;
A heating furnace combustion facility comprising air flow controllers 5 and 6 and control valves 7 and 8 for controlling the temperature in the furnace at each time based on a start time of operation and a heating pattern set from a target furnace temperature. A temperature set value T is calculated and compared with an actually measured value of the in-furnace temperature measuring device 3 to determine a timing of coincidence between the two. Upon receiving a signal having the same value as the value T, an in-furnace temperature setting signal 11 is transmitted to the in-furnace temperature controller 4, and
A starting device for a heating furnace combustion facility, comprising: a furnace temperature setting signal generator 9 capable of adjusting an air flow rate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27935595A JP3190552B2 (en) | 1995-10-26 | 1995-10-26 | Starting method and apparatus for heating furnace combustion equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27935595A JP3190552B2 (en) | 1995-10-26 | 1995-10-26 | Starting method and apparatus for heating furnace combustion equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09119777A JPH09119777A (en) | 1997-05-06 |
| JP3190552B2 true JP3190552B2 (en) | 2001-07-23 |
Family
ID=17610025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27935595A Expired - Fee Related JP3190552B2 (en) | 1995-10-26 | 1995-10-26 | Starting method and apparatus for heating furnace combustion equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3190552B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4770498B2 (en) * | 2006-02-06 | 2011-09-14 | 横河電機株式会社 | Control device |
-
1995
- 1995-10-26 JP JP27935595A patent/JP3190552B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09119777A (en) | 1997-05-06 |
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