JP3179178B2 - Quartz crystal cell - Google Patents
Quartz crystal cellInfo
- Publication number
- JP3179178B2 JP3179178B2 JP09625292A JP9625292A JP3179178B2 JP 3179178 B2 JP3179178 B2 JP 3179178B2 JP 09625292 A JP09625292 A JP 09625292A JP 9625292 A JP9625292 A JP 9625292A JP 3179178 B2 JP3179178 B2 JP 3179178B2
- Authority
- JP
- Japan
- Prior art keywords
- cell
- quartz oscillator
- pressure adjusting
- pressure
- cell component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Measuring Fluid Pressure (AREA)
Description
【0001】[0001]
【産業上の利用分野】この発明は、発酵工業、高分子化
学工業、環境計測などの物理化学計測分野における粘
性、密度、吸着量あるいはそれらの変化の計測に用いら
れる水晶振動子セルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quartz oscillator cell used for measuring viscosity, density, adsorption amount or a change thereof in the field of physical chemical measurement such as fermentation industry, polymer chemical industry and environmental measurement.
【0002】[0002]
【従来の技術】物理化学的な指標のうち、特に従来の粘
度測定の手法としては、主として、回転式粘度計が用い
られてきた。回転式粘度計は、試料液中で、円筒あるい
は円錐状の金属棒を回転させて、剪断応力を求めること
によって粘度を求めるものである。また、本発明者らに
よって、水晶振動子を用いる粘度測定法も開示されてい
る。2. Description of the Related Art Among physicochemical indices, a rotary viscometer has been mainly used as a conventional viscosity measurement method. The rotary viscometer is a device for obtaining a viscosity by rotating a cylindrical or conical metal rod in a sample liquid and obtaining a shear stress. The present inventors have also disclosed a viscosity measurement method using a quartz oscillator.
【0003】[0003]
【発明が解決しようとする課題】従来の回転式粘度計を
用いた場合には、容器内の試料に回転体を浸漬しなくて
はならないため、高圧処理が必要な容器内あるいは高圧
下で測定を行う場合には、回転体と応力測定部分との間
をシールすることが難しく測定には適さなかった。When a conventional rotary viscometer is used, the rotating body must be immersed in the sample in the container, so that the measurement is performed in a container requiring high-pressure treatment or under high pressure. When performing the above, it was difficult to seal between the rotating body and the stress measurement part, and it was not suitable for measurement.
【0004】一方、近年新たに開発された水晶振動子を
使用する方法では、センサーと測定回路の間は電気信号
線によって接続されるため、高圧処理が必要な容器内あ
るいは高圧下で測定を行う場合でも、センサーと測定回
路の間をシールすることは容易である。ただし、水晶振
動子の2つの電極間を絶縁して使用する場合に、水晶振
動子の水晶板の周辺部をシールし、水晶振動子の片側の
面だけが、測定液に接するように、もう一方の電極側に
空間を持たせるカバーを構成する必要があるが、圧力存
在下では、セル内の空間に外部から液体あるいは蒸気が
リークすることがあり、その場合内部に進入した液体あ
るいは蒸気の凝結によって、センサーのベースラインに
変動が生じるという問題点があった。On the other hand, in the method using a crystal resonator newly developed in recent years, since the sensor and the measuring circuit are connected by an electric signal line, the measurement is performed in a container requiring high-pressure processing or under high pressure. Even in this case, it is easy to seal between the sensor and the measurement circuit. However, in the case where the two electrodes of the crystal unit are used insulated, seal the periphery of the crystal plate of the crystal unit so that only one side of the crystal unit is in contact with the measuring solution. It is necessary to construct a cover that has a space on one electrode side.However, in the presence of pressure, liquid or vapor may leak from the outside to the space inside the cell, in which case the liquid or vapor that has entered the inside may be leaked. There was a problem that the condensation caused a fluctuation in the baseline of the sensor.
【0005】[0005]
【課題を解決するための手段】本発明の水晶振動子セル
は、水晶振動子の水晶板の周辺部をシールし、水晶振動
子の片側の面だけが、測定液に接するようにするととも
に、もう一方の電極側に密閉空間を持たせるカバーを構
成し、このカバーの一部に圧力調整手段を設けた。さら
に、上記密閉空間に液体を充填した。A quartz oscillator cell according to the present invention seals a peripheral portion of a quartz plate of a quartz oscillator so that only one surface of the quartz oscillator contacts a liquid to be measured. A cover having a closed space was formed on the other electrode side, and a pressure adjusting means was provided in a part of the cover. Further, the closed space was filled with liquid.
【0006】[0006]
【作用】水晶振動子セル内部の圧力が、圧力調製手段に
よって、外部の圧力と均等になるため、圧力差によっ
て、外部から液体や液体の蒸気が侵入することがなくな
り、水晶振動子の裏側に不用意に液体が入ることによっ
て、出力に変動が生じることをなくすことができる。The pressure inside the quartz resonator cell is made equal to the outside pressure by the pressure adjusting means, so that the pressure difference prevents liquid or liquid vapor from intruding from the outside. It is possible to prevent the output from fluctuating due to carelessly entering the liquid.
【0007】[0007]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。図1は、本発明の水晶振動子セルの斜視断面図で
あり、水晶振動子1はセル部品A2およびセル部品B3
に、挟まれた構造を持ち、水晶振動子の周囲が、シール
材によって、封止されている。セル部品B3とセル部品
C4の間に圧力調整手段として、ゴム等の弾性膜あるい
はフッ素樹脂等の薄膜で形成された圧力調整膜5を設け
ており、セル部品Bと圧力調整膜5の間に内部空間6が
できている。この内部空間6の中には、水あるいは、水
晶振動子の周囲で使用する媒質を充填することができ
る。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective sectional view of a crystal unit cell according to the present invention, and a crystal unit 1 includes a cell part A2 and a cell part B3.
And the periphery of the crystal unit is sealed with a sealing material. A pressure adjusting film 5 formed of an elastic film such as rubber or a thin film such as a fluororesin is provided as a pressure adjusting means between the cell component B3 and the cell component C4. An internal space 6 is formed. This internal space 6 can be filled with water or a medium used around the quartz oscillator.
【0008】図2は、圧力調整膜9をセル部品E8を介
して、水晶振動子を保持するセル部品D7とは、別に設
けた例である。水晶振動子とセル部品は、接着剤あるい
はOリングによって密封して接続する。セル部品と圧力
調整膜9間の密閉は、Oリングあるいは圧力調整膜自身
の弾性によって、確保することができる。FIG. 2 shows an example in which a pressure adjusting film 9 is provided via a cell component E8 separately from a cell component D7 that holds a crystal unit. The crystal unit and the cell component are hermetically connected by an adhesive or an O-ring. The sealing between the cell component and the pressure adjusting film 9 can be ensured by the elasticity of the O-ring or the pressure adjusting film itself.
【0009】図3は、本発明の水晶振動子セル10と水
晶振動子の特性計測装置14との接続関係を示したもの
である。本発明の水晶振動子セル10は、圧力容器11
のセル挿入穴を塞ぎ、セルを保持する支持具12に接続
される。水晶振動子の両面の電極に接続された2本のリ
ード線13は、支持具の中を通り、外部に取り出され、
水晶振動子の特性計測装置14に接続されている。ここ
で用いられる、水晶振動子の特性計測装置は、発振回路
あるいはインピーダンス計測回路によって、水晶振動子
の共振周波数あるいは共振抵抗を計測するものである。FIG. 3 shows the connection relationship between the crystal unit 10 of the present invention and the characteristic measuring device 14 of the crystal unit. The quartz oscillator cell 10 of the present invention includes a pressure vessel 11
And is connected to the support 12 for holding the cells. The two lead wires 13 connected to the electrodes on both sides of the crystal unit pass through the support and are taken out.
It is connected to the characteristic measuring device 14 of the crystal unit. The crystal resonator characteristic measuring device used here measures the resonance frequency or the resonance resistance of the crystal resonator using an oscillation circuit or an impedance measurement circuit.
【0010】[0010]
【発明の効果】以上説明したように、本発明による水晶
振動子セルを使用することにより、高圧下での処理が必
要な容器内あるいは高圧下において、安定な物理化学的
な計測を行うことが可能になった。As described above, the use of the quartz oscillator cell according to the present invention makes it possible to perform stable physicochemical measurements in a container requiring high-pressure treatment or in a high-pressure container. It is now possible.
【図1】本発明の水晶振動子セルの実施例を示す図であ
る。FIG. 1 is a view showing an embodiment of a crystal unit cell of the present invention.
【図2】本発明の水晶振動子セルの他の実施例を示す図
である。FIG. 2 is a view showing another embodiment of the crystal unit cell of the present invention.
【図3】本発明の水晶振動子セルを用いた特性計測装置
の接続図である。FIG. 3 is a connection diagram of a characteristic measuring device using the crystal unit cell of the present invention.
1 水晶振動子 2 セル部品A 3 セル部品B 4 セル部品C 5 圧力調整膜 6 内部空間 7 セル部品D 8 セル部品E 9 圧力調整膜 10 水晶振動子セル 11 圧力容器 12 支持具 13 リード線 14 水晶振動子の特性計測装置 DESCRIPTION OF SYMBOLS 1 Quartz crystal oscillator 2 Cell component A 3 Cell component B 4 Cell component C 5 Pressure adjusting film 6 Internal space 7 Cell component D 8 Cell component E 9 Pressure adjusting film 10 Crystal oscillator cell 11 Pressure vessel 12 Support 13 Lead wire 14 Characteristic measuring device for crystal units
───────────────────────────────────────────────────── フロントページの続き (72)発明者 坂戸 邦明 神奈川県厚木市上荻野987−37 (72)発明者 手柴 貞夫 東京都町田市能ヶ谷町1626−9 (72)発明者 軽部 征夫 神奈川県川崎市宮前区有馬2467−11 (56)参考文献 特開 平3−87634(JP,A) 特開 昭62−94139(JP,A) 実開 平4−108(JP,U) (58)調査した分野(Int.Cl.7,DB名) G01N 5/02 G01N 11/16 JICSTファイル(JOIS)──────────────────────────────────────────────────続 き Continued on the front page (72) Kuniaki Sakado, Inventor 987-37, Kamiogino, Atsugi-shi, Kanagawa (72) Inventor Sadao Teshiba, 1626-9, Nogaya-cho, Machida-shi, Tokyo (72) Inventor, Masao Karube Kanagawa 2467-11 Arima, Miyamae-ku, Kawasaki-shi (56) References JP-A-3-87634 (JP, A) JP-A-62-94139 (JP, A) JP-A-4-108 (JP, U) (58) Survey Field (Int.Cl. 7 , DB name) G01N 5/02 G01N 11/16 JICST file (JOIS)
Claims (2)
振動子を含むセルにおいて、 水晶振動子が、第1のセル部品と第2のセル部品に平行
に挟まれた構造を持ち、水晶振動子の周囲が、シ−ル材
によって封止され、さらに、第2のセル部品と第3のセ
ル部品の間に水晶振動子に平行な圧力調整膜が設置さ
れ、水晶振動子、第2のセル部品、圧力調整膜によって
形成される空間には、周囲の液体と同じ液体が充填さ
れ、圧力容器のセル挿入穴に対応するセル支持部上に構
成されている、耐高圧環境対応の水晶振動子セル。1. A cell including a quartz oscillator for detecting a physicochemical property of a measurement liquid, wherein the quartz oscillator has a structure sandwiched between a first cell component and a second cell component in parallel. The periphery of the vibrator is sealed with a sealing material, and a pressure adjusting film parallel to the quartz oscillator is provided between the second cell component and the third cell component. The space formed by the cell components and the pressure adjusting film is filled with the same liquid as the surrounding liquid, and is formed on a cell support portion corresponding to the cell insertion hole of the pressure vessel. Transducer cell.
とする請求項1記載の水晶振動子セル。2. The quartz oscillator cell according to claim 1, wherein a pressure adjusting film is separately provided.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09625292A JP3179178B2 (en) | 1992-04-16 | 1992-04-16 | Quartz crystal cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09625292A JP3179178B2 (en) | 1992-04-16 | 1992-04-16 | Quartz crystal cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05296903A JPH05296903A (en) | 1993-11-12 |
JP3179178B2 true JP3179178B2 (en) | 2001-06-25 |
Family
ID=14160026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP09625292A Expired - Lifetime JP3179178B2 (en) | 1992-04-16 | 1992-04-16 | Quartz crystal cell |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3179178B2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2748246B2 (en) * | 1995-11-14 | 1998-05-06 | デベロップメント センター フォー バイオテクノロジー | Cartridge-shaped piezoelectric sensor chip |
ATE360815T1 (en) * | 2000-08-08 | 2007-05-15 | Akubio Ltd | QUARTZ CRYSTAL SENSOR CELL |
EP1365227A1 (en) * | 2001-01-30 | 2003-11-26 | Initium, Inc. | Oscillator and mass detector |
EP1830170A4 (en) * | 2004-12-15 | 2012-04-11 | Nihon Dempa Kogyo Co | Component measuring device |
JP4669767B2 (en) * | 2005-09-30 | 2011-04-13 | 株式会社アルバック | Sensor and apparatus using the same |
JP2007121250A (en) * | 2005-10-31 | 2007-05-17 | Kyocera Kinseki Corp | Sensor for small mass measurement |
JP4811106B2 (en) * | 2006-05-08 | 2011-11-09 | 株式会社明電舎 | QCM sensor device |
JP6266313B2 (en) * | 2012-12-17 | 2018-01-24 | セイコーインスツル株式会社 | QCM sensor |
WO2015171298A1 (en) * | 2014-05-07 | 2015-11-12 | Exxonmobil Upstream Research Company | High pressure utilization of quartz crystal microbalance |
JP6446683B2 (en) * | 2015-03-05 | 2019-01-09 | 埼玉県 | Water vapor permeability measuring device and water vapor permeability measuring method of sample |
-
1992
- 1992-04-16 JP JP09625292A patent/JP3179178B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH05296903A (en) | 1993-11-12 |
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