JP3172568B2 - Solvent processing equipment - Google Patents
Solvent processing equipmentInfo
- Publication number
- JP3172568B2 JP3172568B2 JP07189792A JP7189792A JP3172568B2 JP 3172568 B2 JP3172568 B2 JP 3172568B2 JP 07189792 A JP07189792 A JP 07189792A JP 7189792 A JP7189792 A JP 7189792A JP 3172568 B2 JP3172568 B2 JP 3172568B2
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- gas
- sheet
- suction
- adsorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、塗装工場や半導体製造
工場などから排出される溶剤（トルエンやキシレンで代
表される有機溶剤等で３０〜３００ｐｐｍ程度の濃度）
含有の排気を処理する、つまり、排気中の溶剤を除去処
理する技術のうち、最終処理量の減量を図るように溶剤
の濃度を濃縮する技術で、詳しくは、溶剤吸着シートを
用い、溶剤を含有する処理対象ガスを、溶剤吸着シート
内を厚さ方向で透過するように供給してその処理対象ガ
ス中の溶剤を溶剤吸着シートに吸着させることにより溶
剤を除去する技術に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solvent (concentration of about 30 to 300 ppm of an organic solvent represented by toluene or xylene) discharged from a coating plant or a semiconductor manufacturing plant.
Among the technologies for treating the exhaust gas containing, that is, for removing the solvent in the exhaust gas, this technology concentrates the concentration of the solvent so as to reduce the final treatment amount.Specifically, using a solvent adsorption sheet, the solvent is removed. The present invention relates to a technique for removing a solvent by supplying a contained gas to be treated so as to pass through a solvent adsorption sheet in a thickness direction and adsorbing the solvent in the gas to be treated onto the solvent adsorption sheet.
【０００２】[0002]
【従来の技術】溶剤吸着シートを用いて溶剤を処理する
場合（シート式）には、例えば、繊維状活性炭をペーパ
化し、段加工して多数のガス通路を有するハニカム状に
成形し、それを枠に支持させたブロック状の溶剤吸着体
を用い、その溶剤吸着体のガス通路内に沿って処理対象
ガスを透過させることにより、繊維状活性炭が分散する
ガス通路周囲壁に接触させて溶剤を吸着させる場合（ハ
ニカムロータ式）に比較して、次のような利点がある。
つまり、ハニカムロータ式の場合には、ガス通路周囲壁
に沿って処理対象ガスを流動させて吸着材に接触させる
ことで吸着させるため、溶剤吸着体の大きさの割りには
吸着材と溶剤との接触面積が小さくて吸着材と溶剤との
接触効率が悪く、その上、加工数が多く、溶剤吸着体の
大きさの割りには処理能力が小さくてコストの高いもの
になる。しかも、溶剤吸着体を加熱して脱着する際、溶
剤吸着体が大きく、加えて、支持用の枠に熱を取られる
ことにより、多量の熱量が必要であり、かつ、脱着後に
吸着可能状態に復帰させる上で冷却を必要とすることも
あり、ランニングコストが高くつく。これに対して、本
発明が対象とするシート式の場合には、溶剤吸着シート
を、繊維状活性炭のフェルトから構成することなどによ
り、接触面積を大きくして接触効率を優れたものにでき
る割りには溶剤吸着シートの厚さを薄くでき、その結
果、溶剤吸着シートを加熱・冷却し易いものにできて、
脱着のための加熱に要するランニングコストが安くて済
み、また、特別な装置類を要することなく脱着後の吸着
のための冷却を行える。そのような利点を有する溶剤処
理技術として、従来では、図１６に示すように、溶剤吸
着シート３を第１のロールＲ１から繰り出すとともに、
第２のロールＲ２で巻き取り、その第１のロールＲ１か
ら第２のロールＲ２への移動途中で、処理対象ガスＧ１
を供給して溶剤を溶剤吸着シート３に吸着させ、第２の
ロールＲ２を収納する加熱室Ｈに脱着用ガスＧ２として
の加熱空気を供給して溶剤吸着シート３から溶剤を脱着
する技術が知られている（例えば特公昭５３―９５８７
号公報）。2. Description of the Related Art When a solvent is treated using a solvent-adsorbing sheet (sheet type), for example, fibrous activated carbon is formed into paper, step-processed, and formed into a honeycomb shape having a large number of gas passages. By using a block-shaped solvent adsorbent supported by a frame and allowing the gas to be treated to permeate along the gas passage of the solvent adsorbent, the solvent is brought into contact with the gas passage peripheral wall in which the fibrous activated carbon is dispersed, and the solvent is removed. There are the following advantages as compared with the case of adsorbing (honeycomb rotor type).
In other words, in the case of the honeycomb rotor type, the gas to be treated flows along the peripheral wall of the gas passage and is adsorbed by being brought into contact with the adsorbent. The contact area between the adsorbent and the solvent is poor due to the small contact area, and the number of processes is large, and the processing capacity is small and the cost is high depending on the size of the solvent adsorbent. Moreover, when the solvent adsorbent is heated and desorbed, the solvent adsorbent is large and, in addition, heat is taken by the supporting frame, so that a large amount of heat is required, and the desorbable state is obtained after desorption. In some cases, cooling is required for returning, and the running cost is high. On the other hand, in the case of the sheet type which is the object of the present invention, the solvent adsorption sheet is made of fibrous activated carbon felt or the like, so that the contact area can be increased and the contact efficiency can be improved. The thickness of the solvent adsorption sheet can be reduced, and as a result, the solvent adsorption sheet can be easily heated and cooled,
The running cost required for heating for desorption is low, and cooling for adsorption after desorption can be performed without requiring special equipment. Conventionally, as a solvent treatment technique having such an advantage, as shown in FIG. 16, the solvent adsorption sheet 3 is unwound from the first roll R1, and
It is wound up by the second roll R2, and during the movement from the first roll R1 to the second roll R2, the processing target gas G1
To adsorb the solvent on the solvent adsorption sheet 3 and supply heated air as a desorption gas G2 to the heating chamber H accommodating the second roll R2 to desorb the solvent from the solvent adsorption sheet 3. (For example, Japanese Patent Publication No. 53-9587).
No.).
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記従来技術
によるときは、溶剤吸着シートを第１のロールから繰り
出しつつ第２のロールで巻き取ることで移動させて溶剤
吸着シートに溶剤を吸着させるから、そのような移動時
に加熱室に加熱空気を並行して供給することにより、吸
着と同時に脱着を行えるものの、第２のロールに溶剤吸
着シートが最後まで巻き取られると、第１のロールに溶
剤吸着シートを巻き戻しする必要があって、処理形態
が、吸脱着と巻き戻しとを交互に繰り返す形態とならざ
るを得ない。その結果、長時間の処理を行うには、第１
のロールから溶剤吸着シートの全部を繰り出しての１回
の吸着作業時間を長くしたり、或いは、複数の溶剤処理
装置を設けて一方のものが吸脱着しているときに他方の
ものが巻き戻しするように交互に使用したりする必要が
ある。そして、前者の場合には、溶剤吸着シートの巻き
取り径が大きくなってそれに付帯する装置の大型化、コ
ストアップを招来するのみならず、第２のロールに巻き
取られた状態で加熱室で溶剤吸着シートが加熱される時
間が長くなることで、溶剤吸着シートの異常な昇温を招
来することがあって、それを防止するための構成が別途
必要になり、装置の大型化、コストアップが不可避であ
る。このことは、特に、高濃度の処理対象ガスを処理す
るために溶剤吸着シートの移動速度を速くした場合に顕
著である。他方、後者の場合には、溶剤処理装置の数が
増えて、やはり、装置の大型化、コストアップが不可避
である。本発明の目的は、上記欠点を解消する点、つま
り、たとえ前記従来例の主使用領域濃度に比べて高濃度
の処理対象ガスであっても、装置の大型化、コストアッ
プを招来することなく長時間連続処理できるようにする
点にある。However, in the case of the above prior art, the solvent-absorbing sheet is unwound from the first roll while being wound up by the second roll and moved to absorb the solvent onto the solvent-absorbing sheet. By supplying heated air to the heating chamber in parallel during such movement, desorption can be performed at the same time as adsorption, but when the solvent adsorption sheet is wound up to the end by the second roll, the solvent is applied to the first roll. It is necessary to rewind the suction sheet, and the processing mode must be a mode in which the adsorption / desorption and the rewinding are alternately repeated. As a result, in order to perform long-time processing, the first
To extend the time for one adsorption operation by unwinding the entire solvent adsorption sheet from the roll, or to provide multiple solvent treatment devices and rewind the other when one is adsorbing and desorbing. Or be used alternately. In the former case, the winding diameter of the solvent-absorbing sheet is increased, which not only leads to an increase in the size of the accompanying device and an increase in cost, but also causes the heating chamber to be wound around the second roll. Prolonged heating time of the solvent-absorbing sheet may cause an abnormal rise in the temperature of the solvent-absorbing sheet, requiring a separate configuration to prevent this, and increasing the size and cost of the apparatus. Is inevitable. This is particularly remarkable when the moving speed of the solvent-adsorbing sheet is increased to process a high-concentration processing target gas. On the other hand, in the case of the latter, the number of the solvent processing apparatuses increases, so that the size of the apparatuses and the cost increase are inevitable. An object of the present invention is to solve the above-described drawbacks, that is, even if the concentration of the gas to be treated is higher than the concentration of the main use area in the conventional example, without increasing the size and cost of the apparatus. The point is to enable continuous processing for a long time.
【０００４】[0004]
【課題を解決するための手段】請求項１に係る発明の特
徴は、輪状の溶剤吸着シートを循環経路に沿うように巻
きかけて回転移動させる移動手段と、前記循環経路の設
定箇所でその溶剤吸着シート内を厚さ方向に透過するよ
うに溶剤含有の処理対象ガスを供給して溶剤を溶剤吸着
シートに吸着させる吸着手段と、前記設定箇所とは異な
る別の設定箇所で溶剤吸着シート内を厚さ方向に透過す
るように脱着用ガスを供給して溶剤吸着シートから溶剤
を脱着する脱着手段とを設け、前記吸着手段を構成する
のに、溶剤吸着シートの前記循環経路を収容した外装ケ
ースと、その外装ケース内の溶剤吸着シート表裏一方側
の空間部に処理対象ガスを供給する吸着用供給ダクト
と、前記外装ケース内の溶剤吸着シート表裏他方側の空
間部における前記設定箇所で吸い込み口を溶剤吸着シー
トに近接させた処理ガス排出ダクトとを設け、前記脱着
手段を構成するのに、前記外装ケース内において、前記
吸着用供給ダクトから処理対象ガスが供給される前記溶
剤吸着シート表裏一方側の空間部における前記別設定箇
所で脱着用ガスの供給口を溶剤吸着シートに近接させた
脱着用供給ダクトと、前記溶剤吸着シート表裏他方側の
空間部における前記別設定箇所で吸い込み口を溶剤吸着
シートに近接させた濃縮ガス排出ダクトとを設け、 溶剤
吸着シートを挟んで前記濃縮ガス排出ダクトの吸い込み
口に対向させる前記脱着用供給ダクトの供給口を、その
外郭が前記濃縮ガス排出ダクトの吸い込み口の外側に位
置する構成にしてある点にある。The invention according to claim 1 is characterized by a moving means for winding and rotating a ring-shaped solvent-adsorbing sheet along a circulation path and a solvent at a set point of the circulation path. An adsorption means for supplying a solvent-containing processing target gas so as to permeate the inside of the adsorption sheet in the thickness direction and adsorbing the solvent to the solvent adsorption sheet, and the inside of the solvent adsorption sheet at another set point different from the set point. A desorption means for supplying a desorption gas so as to be transmitted in the thickness direction and desorbing the solvent from the solvent adsorption sheet; and an outer case containing the circulation path of the solvent adsorption sheet to constitute the adsorption means. And an adsorption supply duct for supplying a gas to be treated to a space on one side of the front and back of the solvent adsorption sheet in the outer case, and the installation duct in the space on the other side of the front and back of the solvent adsorption sheet in the outer case. A processing gas discharge duct having a suction port adjacent to the solvent adsorption sheet at a location, and the solvent to which the gas to be processed is supplied from the adsorption supply duct in the outer case to constitute the desorption means. The desorption supply duct in which the supply port of the desorption gas is brought close to the solvent adsorption sheet at the another set point in the space part on one side of the adsorption sheet front and back, and the desorption supply duct in the space part on the other side of the solvent adsorption sheet front and back. the suction port is provided and a concentrated gas exhaust duct in proximity to the solvent suction sheet, solvent
Suction of the concentrated gas discharge duct across the adsorption sheet
The supply port of the detachable supply duct facing the mouth,
The outer shell is located outside the inlet of the concentrated gas discharge duct.
The point is that it is configured to be placed .
【０００５】請求項２に係る発明の特徴は、請求項１に
係る発明の実施において、前記濃縮ガス排出ダクトの吸
い込み口の口縁に、外側へ張り出す鍔状のシート支持板
を設け、 このシート支持板に、前記脱着用供給ダクトの
供給口に対向位置してガスを吸引する吸引孔を、前記吸
い込み口の口縁方向に延びる列状配置で形成してある点
にある。[0005] A feature of the invention according to claim 2 is that, in the embodiment of the invention according to claim 1, the suction of the concentrated gas discharge duct is performed.
A flange-shaped sheet support plate that protrudes outward on the edge of the entrance
Provided on the sheet support plate,
A suction hole, which is located opposite to the supply port and sucks gas, is provided in the suction port.
The point is that it is formed in a row-like arrangement extending in the edge direction of the insertion opening .
【０００６】[0006]
【作用】請求項１に係る発明によれば、溶剤吸着シート
を循環移動させるとともに、吸着手段と脱着手段とを作
動させることにより、処理対象ガスの供給箇所と脱着用
ガスの供給箇所とに交互に繰り返して溶剤吸着シートを
循環移動させて、溶剤吸着シートによる処理対象ガスか
らの溶剤の吸着と、その吸着した溶剤の脱着用ガスへの
脱着とを行うことができるから、溶剤吸着シートの循環
移動と、その状態での処理対象ガスの供給及び脱着用ガ
スの供給とを連続して行うことにより、吸脱着を中断す
ることなく連続して行うことができるとともに、脱着時
に溶剤吸着シートを過剰に加熱することがない。また、
脱着手段を上記の如きシート挟み構造（すなわち、脱着
用ガスを供給する脱着用供給ダクトの供給口と濃縮ガス
排出ダクトの吸い込み口との間に溶剤吸着シートを挟む
状態で脱着用ガスを溶剤吸着シートに透過させる構造）
に構成することにより、先述の図１６に示す従来装置の
如く吸着作用後の溶剤吸着シート３（Ｒ２）を収容した
大容積の加熱室Ｈに対し単に脱着用ガスＧ２を供給する
ことだけで脱着を行なうに比べ、溶剤吸着シートに対す
る脱着用ガスの透過をより的確かつ効率的にして脱着効
率を効果的に高めることができ、これにより、脱着用ガ
スの少量化、ひいては、溶剤濃縮率の向上を効果的に達
成できる。そしてまた、吸着手段及び脱着手段を上記の
如き相対配置構造（略言すれば、溶剤吸着シートに近接
した状態で溶剤吸着シートに脱着用ガスを供給する脱着
用供給ダクトの供給口を、外装ケース内のうち吸着用供
給ダクトから処理対象ガスの供給を受ける空間部の内部
に配置した構造）にすることにより、脱着用供給ダクト
の供給口と溶剤吸着シートとの間の隙間から脱着用ガス
が漏れ出たとしても、漏れ出た脱着用ガスを、吸着用供
給ダクトから外装ケース内に供給される処理対象ガスと
ともに吸着過程の溶剤吸着シートを透過させた上で処理
ガス排出ダクトに導くことができ、これにより、脱着用
ガスの漏出を防止するためのシール構成を簡略にするこ
とができ、また、上記隙間として比較的大きな隙間を許
容できることで、溶剤吸着シートの損傷を効果的に防止
できるとともに、溶剤吸着シートの循環移動に要する動
力も低減することができる。According to the first aspect of the present invention, the solvent adsorption sheet is circulated and moved, and the adsorbing means and the desorbing means are operated to alternately supply the gas to be treated and the gas to be desorbed. The solvent-adsorbing sheet can be repeatedly circulated so that the solvent-adsorbing sheet can adsorb the solvent from the gas to be treated and desorb the adsorbed solvent to the desorption gas. By continuously performing the movement and the supply of the gas to be treated and the supply of the desorption gas in that state, the adsorption and desorption can be performed continuously without interruption, and the solvent adsorption sheet becomes excessive during desorption. No heating. Also,
The desorption means is a sheet sandwiching structure as described above (that is, the desorption gas is adsorbed with the solvent adsorption sheet interposed between the supply port of the desorption supply duct for supplying the desorption gas and the suction port of the concentrated gas discharge duct). Structure to transmit through sheet)
The desorption is achieved by simply supplying the desorption gas G2 to the large-volume heating chamber H containing the solvent adsorption sheet 3 (R2) after the adsorption action as in the conventional apparatus shown in FIG. As compared with the above, the desorption gas permeation through the solvent adsorption sheet can be more accurately and efficiently performed, and the desorption efficiency can be effectively increased. As a result, the desorption gas can be reduced in amount, and the solvent concentration rate can be improved. Can be effectively achieved. Further, the adsorption means and the desorption means are arranged in the above-mentioned relative arrangement structure (in short, the supply port of the desorption supply duct for supplying the desorption gas to the solvent adsorption sheet in a state close to the solvent adsorption sheet is connected to the outer case. Inside the space that receives the supply of the gas to be treated from the supply duct for adsorption), the desorption gas flows from the gap between the supply port of the supply duct for desorption and the solvent adsorption sheet. Even if it leaks, the leaked desorption gas can be guided through the solvent adsorption sheet in the adsorption process together with the target gas supplied into the outer case from the adsorption supply duct, and then guided to the processing gas discharge duct. This makes it possible to simplify the seal configuration for preventing the gas for desorption from leaking, and to allow a relatively large gap as the above gap, so that the solvent adsorption With damage to the bets can be effectively prevented, the power required for the circulation movement of solvent adsorption sheet can be reduced.
【０００７】しかも、上記の如く脱着用供給ダクトの供
給口をその外郭が濃縮ガス排出ダクトの吸い込み口の外
側に位置する構成にすることにより、脱着用供給ダクト
の供給口と溶剤吸着シートとの間の前記隙間から脱着用
ガスの一部を確実に流出させて、そのことで、溶剤吸着
シートを通じて濃縮ガス排出ダクトの吸い込み口に吸入
する脱着用ガス中への冷たいガスの混入（すなわち、外
装ケース内における処理対象ガスの混入）をより確実か
つ効果的に防止することができ、これにより、脱着用供
給ダクトの供給口を外装ケース内のうち吸着用供給ダク
トから処理対象ガスの供給を受ける空間部の内部に配置
する構造を採りながらも、溶剤吸着シートに供給する脱
着用ガス中への冷たいガスの混入による脱着効率の低下
を効果的に防止することができる。請求項２に係る発明
によれば、濃縮ガス排出ダクトの吸い込み口の口縁に設
けた鍔状のシート支持板に対し、それに形成した上記列
状の吸引孔による吸引で溶剤吸着シートを吸い付けるよ
うにして、溶剤吸着シートを鍔状のシート支持板に確実
に接触させ、これにより、濃縮ガス排出ダクトの吸い込
み口の口縁と溶剤吸着シートとの間のシール性を高める
ことができる。 また、これら吸引孔を脱着用供給ダクト
の供給口に対向位置させる（すなわち、濃縮ガス排出ダ
クトの吸い込み口とその外側に外郭を位置させた脱着用
供給ダクトの供給口との外郭差の部分に吸引孔を位置さ
せる）ことにより、これら吸引 孔への吸入ガスとして、
脱着用供給ダクトの供給口のうちその外郭近傍部分から
供給される脱着用ガスを溶剤吸着シートを介して吸引孔
に吸入させるようにし、これにより、この吸引孔への脱
着用ガスの吸入と、前述の如く脱着用供給ダクトの供給
口と溶剤吸着シートとの間の隙間から脱着用ガスの一部
を流出させることとの相乗作用をもって、溶剤吸着シー
トに供給される脱着用ガス中への冷たいガス（外装ケー
ス内における処理対象ガス）の混入を一層確実かつ効果
的に防止することができる。 In addition, as described above, the supply port of the supply / detachment supply duct is configured such that its outer shell is located outside the suction port of the concentrated gas discharge duct, so that the supply port of the supply / detachment supply duct and the solvent adsorption sheet are separated. Part of the desorbed gas is reliably discharged from the gap between the two, so that it is sucked into the inlet of the concentrated gas discharge duct through the solvent adsorption sheet.
In this case, it is possible to more reliably and effectively prevent the mixing of the cold gas into the desorption gas (that is, the mixing of the gas to be treated in the outer case). While adopting a structure in which the gas to be treated is supplied from the supply duct for adsorption from the supply duct for adsorption, the reduction of desorption efficiency due to the incorporation of cold gas into the desorption gas supplied to the solvent adsorption sheet It can be effectively prevented. Invention according to claim 2
According to the
The above-mentioned row formed on the
The solvent-absorbing sheet is sucked by suction through the suction holes.
In this way, secure the solvent adsorption sheet to the flange-shaped sheet support plate.
To the inlet of the concentrated gas discharge duct
Enhances the sealing performance between the edge of the opening and the solvent adsorption sheet
be able to. In addition, these suction holes are detached and attached to the supply duct.
(Ie, the concentrated gas discharge
Detachable with the air inlet and outer shell positioned outside
Position the suction hole at the outer edge of the supply duct from the supply port.
) , As a suction gas into these suction holes,
Of the supply port of the desorption supply duct from the vicinity of its outer shell
Suction holes for the supplied desorption gas through the solvent adsorption sheet
The suction hole,
Inhalation of wearing gas and supply of supply duct for desorption as described above
Part of the desorption gas from the gap between the mouth and the solvent adsorption sheet
Has a synergistic effect with the solvent
Cold gas (developer case)
Of gas to be treated in gas
Can be prevented.
【０００８】[0008]
【発明の効果】請求項１に係る発明によれば、上記作用
により、先述の従来装置の如き装置の大型化及びコスト
アップを招来することなく、高濃度の溶剤含有ガスを長
時間連続処理でき、しかも、脱着効率の向上による装置
性能の向上、シール構成の簡略化、溶剤吸着シートの損
傷防止、溶剤吸着シートの循環移動に要する動力の低減
といったことも併せ効果的に達成することができる。そ
して特に、脱着用ガス中への冷たいガスの混入を確実か
つ効果的に防止できるという上記作用により、脱着効率
の向上、ひいては、その脱着効率の向上による装置性能
の向上を一層確実かつ効果的なものにすることができ
る。また、請求項２に係る発明によれば、前記の如く濃
縮ガス排出ダクトの吸い込み口の口縁と溶剤吸着シート
との間のシール性を高め得ることと、脱着用ガス中への
冷たいガスの混入を一層確実かつ効果的に防止できるこ
ととで、装置性能をさらに高めることができる。 According to the first aspect of the present invention, a high-concentration solvent-containing gas can be continuously processed for a long time by the above-mentioned operation without increasing the size and cost of the conventional apparatus. In addition, it is possible to effectively improve the performance of the apparatus by improving the desorption efficiency, simplify the seal configuration, prevent damage to the solvent adsorption sheet, and reduce the power required for circulating the solvent adsorption sheet. So
Especially to ensure that cold gases enter the desorption gas.
The above-described effect of effectively preventing the occurrence of the above-mentioned problem makes it possible to more reliably and effectively improve the desorption efficiency, and further improve the device performance due to the improved desorption efficiency. Further, according to the invention of claim 2, conc said as
Edge of inlet of compressed gas exhaust duct and solvent adsorption sheet
To improve the sealing between
More reliable and effective prevention of cold gas contamination
Thus, the device performance can be further improved.
【０００９】[0009]
【実施例】溶剤処理設備は、図１に示すように、溶剤を
含有する処理対象ガスＧ１を濃縮する前処理用の溶剤処
理装置１と、そこからの濃縮ガスｇ２から溶剤を除去す
る最終処理装置２とからなる。前記溶剤処理装置１は、
図２，図３に示すように、通気性を有する輪状（無端帯
状）の溶剤吸着シート３を循環経路に巻き掛け設置し、
その溶剤吸着シート３を循環経路に沿って回転移動させ
る移動手段を設け、前記循環経路の設定箇所でその溶剤
吸着シート３内を厚さ方向に透過するように処理対象ガ
スＧ１を供給して溶剤を前記溶剤吸着シート３に吸着さ
せる吸着手段と、前記設定箇所とは異なる別の設定箇所
で溶剤吸着シート３を厚さ方向に透過するように脱着用
ガスＧ２を供給して溶剤吸着シート３から溶剤を脱着す
る脱着手段と、分離手段と、位置規制手段とを設けて構
成されている。前記循環経路は、同図２に示すように、
上昇経路部と、それの上端に連なる水平の上側経路部
と、その終端に連なる下降経路部と、その下降経路部か
ら上昇経路部への水平な下側経路部とからなる。前記溶
剤吸着シート３は、図４乃至図６に示すように、活性炭
を吸着材として、常温で処理対象ガスＧ１中の溶剤を吸
着し、加熱（１００〜１３０度）により脱着するもので
あり、具体的には、その表面保護のためにその表裏に不
織布等からなる保護層３ａが重ねられた繊維状活性炭の
フェルト３Ａと、そのフェルト３Ａのうち移動方向にそ
った側端縁に固定した補強体３Ｂと、フェルト３Ａの長
手方向（前後方向）の両端に固定した第２の補強体３Ｃ
と、両端の第２の補強体３Ｃ同士を接続して全体を輪状
にするための接続構造とからなる。前記フェルト３Ａの
実数値例を挙げると、活性炭繊維の径は１０〜２０μ
ｍ、厚さは１０から２０ｍｍ、目付け量は６００ｇ／ｍ
2 程度である。なお、図では判りやすくする上で保護層
３ａを厚く示してあるが、保護層３ａの実際の厚さは非
常に薄いものである。前記補強体３Ｂ及び第２の補強体
３Ｃは、ともに、耐熱性、耐溶剤性、可撓性（柔軟性）
を有するとともに、フェルト３Ａよりも大きい抗張力を
有する。そして、図４に示すように、表面端部と端面と
裏面端部とを一連に覆うものであり、そのフェルト３Ａ
への固定手段は、縫合であり、固定構造としては、図４
の（イ）に示すように、フェルト３Ａの端部を圧密した
状態で縫合した構造や、図４の（ロ）に示すように、フ
ェルト３Ａの端部を圧密しない状態で縫合した構造、図
４の（ハ）に示すように、フェルト３Ａの端部を耐熱性
のパッキン３ｂを介して圧密した状態で縫合した構造を
挙げることができる。前記接続構造は、フェルト３Ａの
両端を幅方向で位置決めした状態で接続するための構造
であって、図５、図６に示すように、スライダ４のスラ
イドにより係脱自在な務歯５の一方を第２の補強体３Ｃ
のうちの一方に装着し、かつ、他方の務歯５を他方の第
２の補強体３Ｃに装着したファスナー６と、前記スライ
ダ４を除去した状態のそのファスナー６の務歯５同士の
離脱を阻止する連結材７とからなる。つまり、ファスナ
ー６は、図５の（イ）に示すように、フェルト３Ａの幅
よりも長いものとしてフェルト３Ａに装着されていて、
接合後に、図５の（ロ）に示すように、フェルト３Ａの
幅に一致するように両端部を切断除去され、連結材７
は、切断除去後のファスナー６の両端において務歯５同
士が離脱しないように固定するものである。８は、第２
の補強体３Ｃ同士にわたって位置することでその第２の
補強体３Ｃ間をシールする遮蔽シートであり、一方の第
２の補強体３Ｃに固定されている。この遮蔽シート８及
び第２の補強体３Ｃ、ファスナー６は、一回の縫合で一
括的にフェルト３Ａに固定しても良く、また、別々に固
定しても良い。加えて、各種の固定に接着剤を併用して
も良い。接着剤としては、耐熱性のものが好ましい。前
記移動手段は、図１０にも示すように、前記溶剤吸着シ
ート３の内周面を重ねた状態でその溶剤吸着シート３を
前記の循環経路に沿って移送するネットコンベア９であ
り、コンベアネット９Ａと、それを移動案内するガイド
機構と、駆動ローラ９Ｂと、テンション機構とからな
る。前記コンベアネット９Ａは、図７、図８に示すよう
に、平帯状のネット材を編織して構成されている。ネッ
ト材のうち、移動方向に沿う姿勢のネット材９ａは、抗
張力が大きいアラミド樹脂製であり、幅方向に沿う姿勢
のネット材９ｂは、テフロン樹脂製である。そして、コ
ンベアネット９Ａの厚さｔは、良好な可撓性を得る上で
０．５〜１ｍｍ程度としてあり、目の大きさは５ｍｍ×
５ｍｍ程度、ネット材の幅は１ｍｍ程度である。かつ、
コンベアネット９Ａの移動方向にそった端縁には、補強
ベルト９ｃが固定されている。前記ガイド機構は、図２
に示すように、循環経路のコーナ部に配置したガイドロ
ーラ９Ｃと、上昇経路部、下降経路部、上側経路部のそ
れぞれに配置したガイドレール９Ｄとからなる。ガイド
レール９Ｄは、図８、図９に示すように、コンベアネッ
ト９Ａの補強ベルト９ｃに固定したピン１０に係合する
ことにより、コンベアネット９Ａの幅方向の位置ずれを
規制するガイド溝９ｄと、コンベアネット９Ａの内周面
に摺動してそのコンベアネット９Ａの厚さ方向での振れ
を防止するガイド面９ｅとを備え、ガイド面９ｅのうち
移動上手側の端部分９ｆは、ガイドレール９Ｄの端面に
ピン１０が引っ掛からないようにするため傾斜姿勢に形
成されている。前記駆動ローラ９Ｂは、ガイドローラ９
Ｃの一つをモータ１１などのアクチュエータに連動させ
ることで構成されており、その周面は、コンベアネット
９Ａの目に入り込んで係合するようにゴム等の軟質材Ｓ
から構成されている。前記テンション機構は、図２に示
すように、循環経路のうち下側経路部において、テンシ
ョンローラ１２でコンベアネット９Ａを上方に持ち上げ
てそのコンベアネット９Ａにテンションを付与するもの
であり、このテンション付与の作用でコンベアネット９
Ａが溶剤吸着シート３から上方に分離して溶剤吸着シー
ト３が自由状態となる。つまり、テンション機構が、コ
ンベアネット９Ａを溶剤吸着シート３から上方に分離し
て溶剤吸着シート３を自由状態にする前記分離手段を構
成している。前記吸着手段は、図２、図３及び図１１に
示すように、前記循環経路のうち上昇経路部と下降経路
部とで前記溶剤吸着シート３にその溶剤吸着シート３を
厚さ方向に透過するように前記処理対象ガスＧ１を供給
して溶剤をその溶剤吸着シート３に吸着させる手段であ
って、全体を収容する外装ケース１３と、上昇経路部と
下降経路部とにおいて外側から処理対象ガスＧ１を供給
するように外装ケース１３に形成の供給口１４ａを介し
て外装ケース１３内に処理対象ガスＧ１を供給する吸着
用供給ダクト１４と、溶剤吸着シート３の内側に近接位
置して溶剤吸着シート３内から透過ガスを吸引する吸い
込み口１５ａを有する処理ガスｇ１の排出ダクト１５と
からなる。前記脱着手段は、図２、図３及び図１１に示
すように、前記循環経路のうち上側経路部で溶剤吸着シ
ート３にその溶剤吸着シート３を厚さ方向に透過するよ
うに高温の脱着用ガスＧ２を供給して溶剤吸着シート３
から溶剤を脱着する手段であり、上側経路部において外
側から脱着用ガスを供給する脱着用供給ダクト１６と、
その脱着用供給ダクト１６の供給口１６ａに溶剤吸着シ
ート３を挟んで対向位置して透過ガスを吸引する吸い込
み口１７ａを備えた濃縮ガスｇ２の排出ダクト、つま
り、濃縮ガスｇ２を前記最終処理装置２に供給する排出
ダクト１７とからなる。そして、脱着用供給ダクト１６
の供給口１６ａをその外郭が吸い込み口１７ａの外側に
位置する大きさに構成し、供給口１６ａと溶剤吸着シー
ト３とに隙間ｄ（２ｍｍ〜３ｍｍ程度で、供給口１６ａ
を溶剤吸着シート３に接触させない寸法。）を形成し、
かつ、脱着用供給ダクト１６内の圧力Ｐ３を外装ケース
１３内の圧力、つまり、図１１に示すように、吸着用供
給ダクト１４内の圧力Ｐ１よりも高くして、脱着用供給
ダクト１６から隙間ｄを介して若干の脱着用ガスＧ２が
外装ケース１３内に排出されるようにすることにより、
溶剤吸着シート３を通じて濃縮ガス排出ダクト１７の吸
い込み口１７ａに吸入する脱着用ガスＧ２中に外装ケー
ス１３内の冷たいガス（すなわち、吸着用供給ダクト１
４から外装ケース１３内に供給される処理対象ガスＧ
１）が混入しないように構成してある。前記のように、
隙間ｄから脱着用ガスＧ２を排出するための制御は、脱
着用供給ダクト１６内の圧力Ｐ３と外装ケース１３内の
圧力Ｐ１とを検出し、その差圧が設定値となるように脱
着用ガスＧ２の供給圧や濃縮ガスｇ２の吸引圧を制御し
ても良いが、外装ケース１３内には、脱着用ガスＧ２の
排出量に応じて温度成層が形成される傾向にあるなど、
外装ケース１３内の温度状況と脱着用ガスＧ２の排出量
とを関係付けることができる場合には、温度に基づいて
制御しても良い。因みに、吸着用供給ダクト１４の圧力
Ｐ１と処理ガスｇ１の排出ダクト１５の圧力Ｐ２と脱着
用供給ダクト１６の圧力Ｐ３と濃縮ガスｇ２の排出ダク
ト１７の圧力Ｐ４とは、Ｐ２＜Ｐ１＜Ｐ３、Ｐ４＜Ｐ３
の関係にある。Ｆ１は、処理対象ガスＧ１の供給ファン
であり、Ｆ２は、脱着用ガスＧ２の供給ファンであり、
ｆ１は、処理ガスｇ１の排気ファンであり、ｆ２は、濃
縮ガスｇ２を最終処理装置２に供給排出する排気ファン
である。すなわち、この溶剤処理装置１では、前記吸着
手段を構成するのに、溶剤吸着シート３の循環経路を収
容した外装ケース１３と、その外装ケース１３内の溶剤
吸着シート表裏一方側（外側）の空間部に処理対象ガス
Ｇ１を供給する吸着用供給ダクト１４と、外装ケース１
３内の溶剤吸着シート表裏他方側（内側）の空間部にお
ける設定箇所で吸い込み口１５ａを溶剤吸着シート３に
近接させた処理ガスｇ１の排出ダクト１５とを設けてあ
る。そして、前記脱着手段を構成するのに、外装ケース
１３内において、吸着用供給ダクト１４から処理対象ガ
スＧ１が供給される溶剤吸着シート表裏一方側（外側）
の空間部における別設定箇所で脱着用ガスＧ２の供給口
１６ａを溶剤吸着シート３に近接させた脱着用供給ダク
ト１６と、溶剤吸着シート表裏他方側（内側）の空間部
における前記別設定箇所で吸い込み口１７ａを溶剤吸着
シート３に近接させた濃縮ガスｇ２の排出ダクト１７と
を設けてあり、略言すれば、溶剤吸着シート３に近接し
た状態で溶剤吸着シート３に脱着用ガスＧ２を供給する
脱着用供給ダクト１６の供給口１６ａを、外装ケース１
３内のうち吸着用供給ダクト１４から処理対象ガスＧ１
の供給を受ける空間部の内部に配置した構造にしてあ
る。また、吸着手段及び脱着手段には、図１２、図１３
に示すように、吸い込み口１５ａ，１７ａの全周におい
て外側へ張り出す鍔状で吸引に抗してコンベアネット９
Ａ及び溶剤吸着シート３を支持するシール用の支持板１
８と、支持体１９とが設けられている。前記支持板１８
は、吸い込み口１５ａ，１７ａのシート移動方向の前後
両端に位置するとともに、シート移動方向に設定長さＬ
を有する前後の支持部１８Ａと、吸い込み口１５ａ，１
７ａの左右方向の両端に位置するとともに、左右方向に
設定長さＬを有する左右の支持部１８Ｂとからなり、各
支持部１８Ａ，１８Ｂには、溶剤吸着シート３側からガ
スをチャンバ２２内に吸引するための丸孔状の複数の吸
引孔２０ａ，２０ｂを、各吸い込み口１５ａ，１７ａの
口縁方向に延びる列状配置で分散形成して、吸い込み口
１５ａ，１７ａの口縁部における溶剤吸着シート３との
間をシール性を高めるようにしてあり、特に脱着手段で
は、前述の如く脱着用供給ダクト１６の供給口１６ａを
その外郭が吸い込み口１７ａの外側に位置する大きさに
構成するのに対し、これら吸引口２０ａ，２０ｂを脱着
用供給ダクト１６の供給口１６ａに対向位置させ、これ
により、溶剤吸着シート３を通じて本来の吸い込み口１
７ａに吸入する脱着用ガスＧ２中への冷たいガスの混入
をさらに確実に防止するようにしてある。設定長さＬ
は、図１２に示すように、吸い込みに伴う溶剤吸着シー
ト３の変形でその溶剤吸着シート３に生じた浮き上がり
部Ａに連なる部分Ｂまでを支持部１８Ａ，１８Ｂで支持
できる長さである。また、図１１に示すように、吸引孔
２０ａ，２０ｂから吸引したガスは、処理対象ガスＧ１
として回収するようになっている。前記支持体１９は、
図１２、図１３に示すように、複数のガイド板１９Ａを
その板厚方向が左右方向となるように左右方向に間隔を
隔てて配置し、それらガイド板１９Ａを移動方向に間隔
を隔てて位置する複数の丸棒利用の連結材１９Ｂで連結
固定して構成されており、連結材１９Ｂの上端はガイド
板１９Ａの上端よりも設定距離（１ｍｍ程度）低く配置
されている。前記位置規制手段は、図２、図１４に示す
ように、下側経路部の左右両脇に、コンベアネット９Ａ
から下方に離脱して自由状態にある溶剤吸着シート３の
左右の端縁に摺動することにより、溶剤吸着シート３の
幅方向での位置を規制する規制板２１を設けて構成され
ている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 1, a solvent processing equipment includes a solvent processing apparatus 1 for pretreatment for concentrating a processing target gas G1 containing a solvent and a final processing for removing the solvent from a concentrated gas g2 therefrom. Device 2. The solvent treatment device 1 includes:
As shown in FIGS. 2 and 3, a loop-shaped (endless belt-shaped) solvent-absorbing sheet 3 having air permeability is wound around a circulation path and installed.
A moving means for rotating and moving the solvent adsorption sheet 3 along a circulation path is provided, and a gas to be treated G1 is supplied at a set point of the circulation path so as to penetrate the solvent adsorption sheet 3 in the thickness direction to thereby supply the solvent. Means for adsorbing the gas onto the solvent adsorbing sheet 3, and supplying the desorption gas G2 so that the solvent adsorbing sheet 3 permeates the solvent adsorbing sheet 3 in the thickness direction at another set point different from the set point. It is provided with a desorbing means for desorbing the solvent, a separating means, and a position regulating means. The circulation path is, as shown in FIG.
The ascending path, a horizontal upper path connected to the upper end thereof, a descending path connected to the end thereof, and a horizontal lower path from the descending path to the ascending path. As shown in FIG. 4 to FIG. 6, the solvent adsorption sheet 3 adsorbs the solvent in the gas G1 to be treated at normal temperature using activated carbon as an adsorbent, and desorbs by heating (100 to 130 degrees). Specifically, a fibrous activated carbon felt 3A in which a protective layer 3a made of a nonwoven fabric or the like is superimposed on the front and back surfaces to protect the surface, and a reinforcement fixed to a side edge of the felt 3A along the moving direction. Body 3B and second reinforcing body 3C fixed to both ends in the longitudinal direction (front-back direction) of felt 3A
And a connection structure for connecting the second reinforcing bodies 3C at both ends to each other to form a ring shape. To give an example of the real value of the felt 3A, the diameter of the activated carbon fiber is 10 to 20 μm.
m, thickness is 10 to 20 mm, and basis weight is 600 g / m
About 2 . Although the protective layer 3a is shown thick in the figure for easy understanding, the actual thickness of the protective layer 3a is extremely small. The reinforcing body 3B and the second reinforcing body 3C are both heat-resistant, solvent-resistant, and flexible (flexible).
And has a higher tensile strength than the felt 3A. Then, as shown in FIG. 4, the front end, the end surface, and the back end are covered in series, and the felt 3A is used.
The means for fixing to is shown in FIG.
(A), a structure in which the ends of the felt 3A are sewn in a compacted state, and a structure in which the ends of the felt 3A are sewn without being compacted, as shown in (b) of FIG. As shown in FIG. 4 (c), a structure in which the ends of the felt 3A are sewn in a compacted state via a heat-resistant packing 3b can be exemplified. The connection structure is a structure for connecting the felt 3A in a state where both ends of the felt 3A are positioned in the width direction, and as shown in FIGS. To the second reinforcement 3C
A fastener 6 attached to one of them and the other engaging tooth 5 attached to the other second reinforcing body 3C, and a detachment of the engaging teeth 5 of the fastener 6 with the slider 4 removed. And a connecting member 7 for blocking. That is, as shown in FIG. 5A, the fastener 6 is attached to the felt 3A as being longer than the width of the felt 3A.
After the joining, as shown in FIG. 5B, both ends are cut and removed so as to match the width of the felt 3A.
Is to fix the engaging teeth 5 at both ends of the fastener 6 after cutting and removing so that the engaging teeth 5 do not come off. 8 is the second
Is a shielding sheet that is positioned over the second reinforcing members 3C to seal between the second reinforcing members 3C, and is fixed to one second reinforcing member 3C. The shielding sheet 8, the second reinforcing body 3 </ b> C, and the fastener 6 may be fixed to the felt 3 </ b> A collectively by one stitch, or may be fixed separately. In addition, an adhesive may be used for various types of fixing. As the adhesive, a heat-resistant adhesive is preferable. As shown in FIG. 10, the moving means is a net conveyor 9 for transferring the solvent adsorption sheet 3 along the circulation path in a state where the inner peripheral surfaces of the solvent adsorption sheet 3 are overlapped. 9A, a guide mechanism for moving and guiding it, a drive roller 9B, and a tension mechanism. As shown in FIGS. 7 and 8, the conveyor net 9A is formed by weaving a flat strip-shaped net material. Among the net materials, the net material 9a in the posture along the moving direction is made of aramid resin having a high tensile strength, and the net material 9b in the posture along the width direction is made of Teflon resin. The thickness t of the conveyor net 9A is about 0.5 to 1 mm in order to obtain good flexibility, and the size of the eyes is 5 mm ×
The width of the net material is about 5 mm, and the width of the net material is about 1 mm. And,
A reinforcing belt 9c is fixed to an edge along the moving direction of the conveyor net 9A. The guide mechanism is shown in FIG.
As shown in (1), the guide roller 9C includes guide rollers 9C arranged at the corners of the circulation path, and guide rails 9D arranged at the ascending path, the descending path, and the upper path. As shown in FIGS. 8 and 9, the guide rail 9D is engaged with a pin 10 fixed to the reinforcing belt 9c of the conveyor net 9A, thereby forming a guide groove 9d for restricting the displacement of the conveyor net 9A in the width direction. A guide surface 9e that slides on the inner peripheral surface of the conveyor net 9A to prevent the conveyor net 9A from swaying in the thickness direction. 9D is formed in an inclined posture to prevent the pin 10 from being caught on the end face. The driving roller 9B is a guide roller 9
C is linked to an actuator such as a motor 11, and the peripheral surface thereof is made of a soft material S such as rubber so as to enter and engage with the eyes of the conveyor net 9A.
It is composed of As shown in FIG. 2, the tension mechanism lifts the conveyor net 9A upward by the tension roller 12 and applies tension to the conveyor net 9A in a lower path portion of the circulation path. Conveyor 9 by the action of
A is separated upward from the solvent adsorption sheet 3, and the solvent adsorption sheet 3 is in a free state. That is, the tension mechanism constitutes the separating means for separating the conveyor net 9A upward from the solvent adsorption sheet 3 to make the solvent adsorption sheet 3 free. As shown in FIG. 2, FIG. 3, and FIG. 11, the adsorbing unit transmits the solvent adsorbing sheet 3 through the solvent adsorbing sheet 3 in the thickness direction in the ascending path and the descending path of the circulation path. The means for supplying the gas to be treated G1 and adsorbing the solvent to the solvent adsorption sheet 3 as described above, comprises the outer case 13 for housing the entirety, the gas to be treated G1 from outside in the ascending path and the descending path. And a supply duct 14 for supplying the gas to be treated G1 into the exterior case 13 through a supply port 14a formed in the exterior case 13 so as to supply the gas. And a discharge duct 15 for the processing gas g1 having a suction port 15a for sucking the permeated gas from the inside. As shown in FIG. 2, FIG. 3, and FIG. 11, the detaching means attaches and removes the solvent at a high temperature to the solvent adsorbing sheet 3 in the upper path portion of the circulation path so that the solvent adsorbing sheet 3 penetrates in the thickness direction. Gas G2 is supplied and solvent adsorption sheet 3
A desorption supply duct 16 for supplying a desorption gas from outside in the upper path portion,
A discharge duct for the concentrated gas g2 provided with a suction port 17a for sucking the permeated gas at a position opposite to the supply port 16a of the desorption supply duct 16 with the solvent adsorption sheet 3 interposed therebetween, that is, the concentrated gas g2 is supplied to the final treatment apparatus. 2 and a discharge duct 17 for supplying the air to the discharge duct 2. And the detachable supply duct 16
Of the supply port 16a is configured so that the outer periphery thereof is located outside the suction port 17a, and a gap d (about 2 mm to 3 mm, between the supply port 16a and the solvent adsorption sheet 3)
Does not contact the solvent adsorption sheet 3. ) To form
In addition, the pressure P3 in the supply / detachment supply duct 16 is set higher than the pressure in the outer case 13, that is, the pressure P1 in the supply duct 14 for suction as shown in FIG. By allowing some desorption gas G2 to be discharged into the outer case 13 via d,
The concentrated gas discharge duct 17 is sucked through the solvent adsorption sheet 3.
Cold gas in the outer case 13 (that is, the supply duct 1 for adsorption) is contained in the desorption gas G2 sucked into the inlet 17a.
4, the gas G to be processed supplied into the outer case 13 from
1) is configured not to be mixed. As mentioned above,
The control for discharging the desorption gas G2 from the gap d detects the pressure P3 in the desorption supply duct 16 and the pressure P1 in the outer case 13, and controls the desorption gas so that the differential pressure becomes a set value. The supply pressure of G2 and the suction pressure of concentrated gas g2 may be controlled. However, a temperature stratification tends to be formed in the outer case 13 in accordance with the discharge amount of the desorption gas G2.
If the temperature condition in the outer case 13 can be related to the discharge amount of the desorption gas G2, the control may be performed based on the temperature. Incidentally, the pressure P1 of the supply duct 14 for adsorption, the pressure P2 of the discharge duct 15 for the processing gas g1, the pressure P3 of the supply duct 16 for desorption and the pressure P4 of the discharge duct 17 for the concentrated gas g2 are P2 <P1 <P3, P4 <P3
In a relationship. F1 is a supply fan of the gas to be treated G1, F2 is a supply fan of the desorption gas G2,
f1 is an exhaust fan for the processing gas g1, and f2 is an exhaust fan for supplying and discharging the concentrated gas g2 to the final processing apparatus 2. That is, in the solvent treatment apparatus 1, the adsorbing means is constituted by the outer case 13 accommodating the circulation path of the solvent adsorbing sheet 3, and the space on one side (outside) of the front and back of the solvent adsorbing sheet in the outer case 13. Supply duct 14 for supplying the gas to be treated G1 to the section, and the outer case 1
A discharge duct 15 for the processing gas g1 is provided in which a suction port 15a is brought close to the solvent adsorption sheet 3 at a set point in a space portion on the other side (inside) of the front and back sides of the solvent adsorption sheet in 3. To constitute the desorption means, one side (outside) of the front and back of the solvent adsorption sheet to which the gas to be treated G1 is supplied from the adsorption supply duct 14 in the outer case 13.
The desorption supply duct 16 in which the supply port 16a of the desorption gas G2 is brought close to the solvent adsorption sheet 3 at another set point in the space part, and the another set point in the space part on the other side (inside) of the front and back of the solvent adsorption sheet. A discharge duct 17 for the concentrated gas g2 is provided in which the suction port 17a is close to the solvent adsorption sheet 3. In short, the desorption gas G2 is supplied to the solvent adsorption sheet 3 in a state close to the solvent adsorption sheet 3. The supply port 16a of the detachable supply duct 16 is
3, the gas G1 to be treated is supplied from the supply duct 14 for adsorption.
It is arranged inside the space receiving the supply of water. The adsorption means and the desorption means are shown in FIGS.
As shown in the figure, the conveyer net 9 has a flange shape projecting outward around the entire circumference of the suction ports 15a and 17a so as to resist suction.
A and a support plate 1 for sealing supporting the solvent adsorption sheet 3
8 and a support 19 are provided. The support plate 18
Are located at both front and rear ends of the suction ports 15a and 17a in the sheet moving direction, and have a set length L in the sheet moving direction.
Front and rear support portions 18A having suction ports 15a, 1
7a, which are located at both ends in the left-right direction and have left and right support portions 18B having a set length L in the left-right direction. Each support portion 18A, 18B receives gas from the solvent adsorption sheet 3 side into the chamber 22. A plurality of round suction holes 20a, 20b for suction are formed in each of the suction ports 15a, 17a.
Dispersedly formed in a row arrangement extending in the edge direction, and the suction port
15a, 17a with the solvent adsorption sheet 3 at the edge portions
It is designed to enhance the sealing between the parts, especially
Is connected to the supply port 16a of the supply duct 16 for detachment as described above.
The size of the shell is located outside the suction port 17a
These suction ports 20a and 20b are attached and detached
To the supply port 16a of the supply duct 16 for
As a result, the original suction port 1 through the solvent adsorption sheet 3
Mixing of cold gas into desorption gas G2 sucked into 7a
Is more reliably prevented. Set length L
As shown in FIG. 12, is a length that can be supported by the supporting portions 18A and 18B up to a portion B connected to the raised portion A generated in the solvent adsorption sheet 3 due to deformation of the solvent adsorption sheet 3 due to suction. Further, as shown in FIG. 11, the gas sucked from the suction holes 20a and 20b is the processing target gas G1.
As a collection. The support 19 is
As shown in FIGS. 12 and 13, a plurality of guide plates 19A are arranged at intervals in the left-right direction such that the thickness direction thereof is the left-right direction, and the guide plates 19A are positioned at intervals in the movement direction. The upper end of the connecting member 19B is disposed lower than the upper end of the guide plate 19A by a set distance (about 1 mm). As shown in FIGS. 2 and 14, the position regulating means is provided on both sides of the lower route section on the left and right sides of the conveyor net 9A.
A regulating plate 21 is provided to regulate the position of the solvent adsorption sheet 3 in the width direction by sliding downward on the left and right edges of the solvent adsorption sheet 3 in a free state by detaching the solvent adsorption sheet 3 downward.
【００１０】〔別実施例〕 上記実施例では、循環経路として、上昇経路部と下降経
路部と上側経路部と下側経路部とを備えたものを示した
が、循環経路の形状は適宜変更自在である。上記実施例
では、吸着を循環経路の２箇所で、脱着を１箇所で行う
ものを示したが、それらの数は不問である。上記実施例
では、接続構造としてファスナー６を示したが、接続構
造としては、図１５に示すように、鉤ホック２３を用い
たものであっても良い。つまり、鉤ホック２３の雌雄の
ホック部材の一方２３Ａを一方に第２の補強体３Ｃに、
他方２３Ｂを他方に補強体３Ｃにそれぞれ取り付ける。[Alternative Embodiment] In the above-described embodiment, the circulation path includes the ascending path, the descending path, the upper path, and the lower path. However, the shape of the circulation path is appropriately changed. It is free. In the above embodiment, the case where the adsorption is performed at two places in the circulation path and the desorption is performed at one place is shown, but the number thereof is not important. In the above embodiment, the fastener 6 is shown as the connection structure. However, as shown in FIG. 15, the hook structure may be used as the connection structure. That is, one of the male and female hook members 23A of the hook hook 23 is connected to the second reinforcing member 3C,
The other 23B is attached to the reinforcing body 3C on the other.
【００１１】尚、特許請求の範囲の項に図面との対照を
便利にするために符号を記すが、該記入により本発明は
添付図面の構成に限定されるものではない。In the claims, reference numerals are provided for convenience of comparison with the drawings, but the present invention is not limited to the configuration shown in the attached drawings.
【図１】溶剤処理設備の概念構成を示すブロック図FIG. 1 is a block diagram showing a conceptual configuration of a solvent processing facility.
【図２】溶剤処理装置の切り欠き正面図FIG. 2 is a cutaway front view of the solvent processing apparatus.
【図３】溶剤処理装置の切り欠き側面図FIG. 3 is a cutaway side view of the solvent processing apparatus.
【図４】溶剤吸着シート要部の断面図FIG. 4 is a cross-sectional view of a main part of a solvent adsorption sheet.
【図５】溶剤吸着シートの接続部の平面図FIG. 5 is a plan view of a connection portion of the solvent adsorption sheet.
【図６】溶剤吸着シートの接続部の断面図FIG. 6 is a cross-sectional view of a connection portion of the solvent adsorption sheet.
【図７】コンベアネット要部の平面図FIG. 7 is a plan view of a main part of the conveyor net.
【図８】コンベアネットとガイド機構との関係を示す要
部の横断正面図FIG. 8 is a cross-sectional front view of a main part showing a relationship between a conveyor net and a guide mechanism.
【図９】コンベアネットとガイド機構との関係を示す要
部の縦断正面図FIG. 9 is a longitudinal sectional front view of a main part showing a relationship between a conveyor net and a guide mechanism.
【図１０】移動手段要部の拡大正面図FIG. 10 is an enlarged front view of a main part of the moving means.
【図１１】溶剤処理装置の概略構成図FIG. 11 is a schematic configuration diagram of a solvent processing apparatus.
【図１２】吸い込み口部を示す要部の拡大縦断正面図FIG. 12 is an enlarged vertical sectional front view of a main part showing a suction port.
【図１３】吸い込み口部を示す要部の平面図FIG. 13 is a plan view of a main part showing a suction port.
【図１４】位置規制手段を示す要部の拡大側面図FIG. 14 is an enlarged side view of a main part showing a position regulating unit.
【図１５】別の実施例を示す溶剤吸着シートの接続部の
断面図FIG. 15 is a cross-sectional view of a connection portion of a solvent adsorption sheet showing another embodiment.
【図１６】従来例を示す断面図FIG. 16 is a sectional view showing a conventional example.
３ 溶剤吸着シート Ｇ１ 処理対象ガス Ｇ２ 脱着用ガス １３ 外装ケース １４ 吸着用供給ダクト １５ 処理ガス排出ダクト １５ａ 吸い込み口 １６ 脱着用供給ダクト １６ａ 供給口 １７ 濃縮ガス排出ダクト １７ａ 吸い込み口１８ シート支持板 ２０ａ 吸引孔 ２０ｂ 吸引孔 3 Solvent adsorption sheet G1 Processing target gas G2 Desorption gas 13 Outer case 14 Adsorption supply duct 15 Processing gas discharge duct 15a Suction port 16 Desorption supply duct 16a Supply port 17 Concentrated gas discharge duct 17a Suction port 18 Sheet support plate 20a suction Hole 20b suction hole
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭62−57629（ＪＰ，Ａ) 特開 昭51−32482（ＪＰ，Ａ) 実開 平１−128817（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) B01D 53/06 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-57629 (JP, A) JP-A-51-32482 (JP, A) JP-A-1-128817 (JP, U) (58) Field (Int.Cl. 7 , DB name) B01D 53/06
Claims (2)
に沿うように巻きかけて回転移動させる移動手段と、 前記循環経路の設定箇所でその溶剤吸着シート（３）内
を厚さ方向に透過するように溶剤含有の処理対象ガス
（Ｇ１）を供給して溶剤を溶剤吸着シート（３）に吸着
させる吸着手段と、 前記設定箇所とは異なる別の設定箇所で溶剤吸着シート
（３）内を厚さ方向に透過するように脱着用ガス（Ｇ
２）を供給して溶剤吸着シート（３）から溶剤を脱着す
る脱着手段とを設け、 前記吸着手段を構成するのに、溶剤吸着シート（３）の
前記循環経路を収容した外装ケース（１３）と、その外
装ケース（１３）内の溶剤吸着シート表裏一方側の空間
部に処理対象ガス（Ｇ１）を供給する吸着用供給ダクト
（１４）と、前記外装ケース（１３）内の溶剤吸着シー
ト表裏他方側の空間部における前記設定箇所で吸い込み
口（１５ａ）を溶剤吸着シート（３）に近接させた処理
ガス排出ダクト（１５）とを設け、 前記脱着手段を構成するのに、前記外装ケース（１３）
内において、前記吸着用供給ダクト（１４）から処理対
象ガス（Ｇ１）が供給される前記溶剤吸着シート表裏一
方側の空間部における前記別設定箇所で脱着用ガス（Ｇ
２）の供給口（１６ａ）を溶剤吸着シート（３）に近接
させた脱着用供給ダクト（１６）と、前記溶剤吸着シー
ト表裏他方側の空間部における前記別設定箇所で吸い込
み口（１７ａ）を溶剤吸着シート（３）に近接させた濃
縮ガス排出ダクト（１７）とを設け、 溶剤吸着シート（３）を挟んで前記濃縮ガス排出ダクト
（１７）の吸い込み口（１７ａ）に対向させる前記脱着
用供給ダクト（１６）の供給口（１６ａ）を、その外郭
が前記濃縮ガス排出ダクト（１７）の吸い込み口（１７
ａ）の外側に位置する構成にしてある 溶剤処理装置。A moving means for winding and rotating a ring-shaped solvent-adsorbing sheet (3) along a circulation path, and moving the solvent-adsorption sheet (3) in the thickness direction at a set point of the circulation path. An adsorbing means for supplying a solvent-containing gas to be treated (G1) so as to be permeated and adsorbing the solvent on the solvent adsorbing sheet (3); and in the solvent adsorbing sheet (3) at another set point different from the set point. Gas to allow gas to permeate in the thickness direction (G
An outer case (13) containing the circulating path of the solvent-adsorbing sheet (3) for forming the adsorbing means; and a desorbing means for supplying and removing the solvent from the solvent-adsorbing sheet (3). A suction supply duct (14) for supplying a gas to be treated (G1) to a space on one side of the solvent adsorption sheet in the outer case (13); and a front and back surface of the solvent adsorption sheet in the outer case (13). A processing gas discharge duct (15) having a suction port (15a) positioned close to the solvent adsorption sheet (3) at the set point in the other space portion, and the outer case ( 13)
In the inside, the gas (G1) to be treated is supplied from the supply duct for adsorption (14), and the desorption gas (G
The desorption supply duct (16) in which the supply port (16a) of (2) is brought close to the solvent adsorption sheet (3), and the suction port (17a) at the another set point in the space on the other side of the front and back of the solvent adsorption sheet. and a solvent suction sheet enriched gas exhaust duct in proximity to (3) (17) is provided, the concentrated gas exhaust duct across the solvent suction sheet (3)
(17) The attachment / detachment that is opposed to the suction port (17a) of (17).
The supply port (16a) of the supply duct (16)
Is a suction port (17) of the concentrated gas discharge duct (17).
a) a solvent processing apparatus configured to be located outside of (a) .
込み口（１７ａ）の 口縁に、外側へ張り出す鍔状のシー
ト支持板（１８）を設け、 このシート支持板（１８）に、前記脱着用供給ダクト
（１６）の供給口（１６ａ）に対向位置してガスを吸引
する吸引孔（２０ａ），（２０ｂ）を、前記吸い込み口
（１７ａ）の口縁方向に延びる列状配置で形成してある
請求項１記載の溶剤処理装置。2. The suction of said concentrated gas discharge duct (17).
A flange-like sheet that protrudes outward at the edge of the entrance (17a)
A support plate (18) is provided on the seat support plate (18).
The gas is sucked in a position facing the supply port (16a) of (16).
The suction holes (20a) and (20b)
2. The solvent processing apparatus according to claim 1, wherein the solvent processing apparatus is formed in a row-like arrangement extending in the edge direction of (17a) .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07189792A JP3172568B2 (en) | 1992-03-30 | 1992-03-30 | Solvent processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07189792A JP3172568B2 (en) | 1992-03-30 | 1992-03-30 | Solvent processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05277329A JPH05277329A (en) | 1993-10-26 |
| JP3172568B2 true JP3172568B2 (en) | 2001-06-04 |
Family
ID=13473788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07189792A Expired - Fee Related JP3172568B2 (en) | 1992-03-30 | 1992-03-30 | Solvent processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3172568B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100427948B1 (en) * | 2002-02-28 | 2004-04-28 | 현대자동차주식회사 | Air filter for evaporator case |
-
1992
- 1992-03-30 JP JP07189792A patent/JP3172568B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05277329A (en) | 1993-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101749076B1 (en) | Advanced filter for ccpp iron oxide cleaning and pollutant cleaning device having this | |
| JP5423841B2 (en) | Solvent treatment equipment | |
| KR101302067B1 (en) | Activated charcoal cartridge, adsorption tower including the same and refilling device therefor | |
| KR101668015B1 (en) | Dust filtration collector | |
| US20210129063A1 (en) | Filter for Purifying an Air Stream | |
| JP3172568B2 (en) | Solvent processing equipment | |
| JP3187515B2 (en) | Solvent processing equipment | |
| JP3145171B2 (en) | Solvent processing equipment | |
| JP3145170B2 (en) | Solvent processing equipment | |
| JP3335694B2 (en) | Adsorption / desorption type gas purifier | |
| JP3563068B2 (en) | Adsorption / desorption type gas purifier | |
| JP3362891B2 (en) | Adsorption / desorption type gas purifier | |
| KR101997691B1 (en) | Exhaust gas treating apparatus | |
| JP3602126B2 (en) | Adsorption / desorption type gas purifier | |
| JP3264512B2 (en) | Solvent processing equipment | |
| JP3335693B2 (en) | Adsorption / desorption type gas purifier | |
| JP5966646B2 (en) | Solvent treatment equipment | |
| JP4490155B2 (en) | Nitrogen oxide removal equipment | |
| JPH08323137A (en) | Adsorbing and desorbing device | |
| CN211384443U (en) | Organic solvent treatment device and treatment system | |
| JP3364510B2 (en) | Adsorption / desorption type gas purifier | |
| JP2020089858A (en) | Air purifier | |
| JPH09225248A (en) | Gas treating device using adsorbent mat | |
| KR20160089195A (en) | Pollutant purifying apparatus | |
| KR20010067353A (en) | Rotary adsorption/desorption gas treating apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090323 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090323 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100323 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110323 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110323 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120323 Year of fee payment: 11 |
|
| LAPS | Cancellation because of no payment of annual fees |