JP3142608B2 - Photochemical reaction treatment method - Google Patents
Photochemical reaction treatment methodInfo
- Publication number
- JP3142608B2 JP3142608B2 JP03222364A JP22236491A JP3142608B2 JP 3142608 B2 JP3142608 B2 JP 3142608B2 JP 03222364 A JP03222364 A JP 03222364A JP 22236491 A JP22236491 A JP 22236491A JP 3142608 B2 JP3142608 B2 JP 3142608B2
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- lamp
- ultraviolet
- stage
- photochemical reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】最近、例えば半導体、医薬品、原
子力等の分野において、超純水やクリーンガス等の不純
物をほとんど含まない液体又は気体等の被照射体が使用
されているが、本発明は、このような被照射体を、ラン
プの照射、特に紫外線ランプの紫外線照射による光化学
反応処理する方法に関するものである。また、本発明は
半導体チップ、医療容器、特殊金属等の被照射体を、ラ
ンプの照射による光化学反応処理をする方法に関するも
のである。2. Description of the Related Art Recently, in the fields of semiconductors, pharmaceuticals, nuclear power and the like, objects to be irradiated such as liquids or gases containing almost no impurities such as ultrapure water and clean gas have been used. The present invention relates to a method for subjecting such an object to be subjected to a photochemical reaction treatment by irradiation with a lamp, in particular, irradiation with ultraviolet light from an ultraviolet lamp. The present invention also relates to a method for subjecting an irradiation target such as a semiconductor chip, a medical container, and a special metal to a photochemical reaction treatment by irradiation with a lamp.
【０００２】[0002]
【従来の技術】ランプの照射による光化学反応処理方法
に使用するランプには、寿命と経時劣化の問題があり、
例えば低圧又は中高圧紫外線ランプにおいては、寿命は
３０００〜９０００時間といわれ、その間における紫外
線ランプの出力は、図１に示すように、徐々に経時劣化
し、最終時点には約３０〜５０％劣化するといわれてい
る。従って紫外線照射装置を製造する際には、安全確保
の点から、紫外線ランプの出力設計値を経時劣化が最大
である３０〜５０％前後を基準として設計しているのが
実情であり、図１の斜線部分に示すように、無駄な電力
を浪費していることになる。近年、紫外線照射装置が多
方の分野に使用され、かつ紫外線照射の増加の要望に従
い、紫外線ランプの設置本数の増加あるいは大電力型ラ
ンプの利用等により、この消費電力の増大が重要な問題
になってきている。2. Description of the Related Art Lamps used in a photochemical reaction treatment method by irradiation of a lamp have problems of life and deterioration with time.
For example, the life of a low-pressure or middle-high-pressure ultraviolet lamp is said to be 3000 to 9000 hours, during which the output of the ultraviolet lamp gradually deteriorates with time, as shown in FIG. It is said that. Therefore, when manufacturing an ultraviolet irradiation apparatus, in view of ensuring safety, it is a fact that the output design value of the ultraviolet lamp is designed on the basis of about 30 to 50% at which deterioration with time is the maximum, and FIG. As shown in the shaded area, wasteful power is wasted. In recent years, ultraviolet irradiation devices have been used in various fields, and in response to the demand for increased ultraviolet irradiation, the increase in the number of ultraviolet lamps installed or the use of high-power lamps has made the increase in power consumption an important issue. Is coming.
【図１】FIG.
【０００３】[0003]
【発明が解決しようとする課題】本発明は、ランプの照
射による光化学反応処理方法を行うについて、使用する
ランプの無駄な電力の浪費を防止して消費電力を節減
し、さらにランプの消耗による寿命の低下を防止してラ
ンプのライフを延長することにある。また本発明は、ラ
ンプの交換回数を減らすことによって、ランプのコスト
を削減するほか、ランプの交換に要する作業の省力化、
費用の節減をはかることにある。さらに本発明は、ラン
プの照射量を適度に抑制することによって発熱の防止、
副生成物の派生を防止するとともに、多段階の照射を行
うについて、照射量を経時的に均等化することによって
被照射体の処理効率、処理結果を改善するものである。SUMMARY OF THE INVENTION The present invention relates to a method for treating a photochemical reaction by irradiating a lamp, which saves power consumption by preventing wasteful power consumption of a lamp to be used, and furthermore, a life due to consumption of the lamp. And to prolong the life of the lamp. Further, the present invention reduces the cost of the lamp by reducing the number of times of replacing the lamp, and also saves labor required for replacing the lamp,
The goal is to save money. Further, the present invention is to prevent heat generation by appropriately suppressing the irradiation amount of the lamp,
The object of the present invention is to prevent the generation of by-products and to improve the processing efficiency and the processing result of the irradiation target by equalizing the irradiation amount with time in performing multi-step irradiation.
【０００４】[0004]
【課題を解決するための手段】本発明は、ランプ照射に
よる被照射体の光化学反応処理方法に関するもので、ラ
ンプの照射によって被照射体の光化学反応処理を行うに
ついて、ランプのライフに応じて、照射を二段階以上に
分け、最初の段階のランプの出力を、照射開始時に１０
〜４５％程度低減するように設定して照射を行い、経時
劣化によってランプの出力が２０〜５０％程度に低減す
る時点をランプの点灯時間によって予測し、その時点で
次の段階の照射に入り、この段階におけるランプの照射
開始時の出力を、最初の段階の低減値と同様にして照射
を行い、以後は必要に応じて同様の条件でランプの照射
を行い、多段階にランプ照射量を調整することを特徴と
するものであり、特に、本発明は、紫外線照射による被
照射体の光化学反応処理方法に関するもので、前述した
ように、多段階に紫外線照射量を調整することを特徴と
するものである。SUMMARY OF THE INVENTION The present invention relates to a method for performing a photochemical reaction treatment of an object to be irradiated by irradiation with a lamp. The irradiation is divided into two or more stages, and the output of the lamp at the first stage is set to 10 at the start of irradiation.
Irradiation is performed by setting so as to reduce by about 45%, and a point in time when the output of the lamp is reduced to about 20 to 50% due to deterioration over time is predicted based on the lighting time of the lamp. In this stage, the output at the start of the irradiation of the lamp is irradiated in the same manner as the reduced value in the first stage, and then the lamp is irradiated under the same conditions as necessary. In particular, the present invention relates to a photochemical reaction treatment method for an irradiation target by ultraviolet irradiation, as described above, characterized in that the amount of ultraviolet irradiation is adjusted in multiple stages. Is what you do.
【０００５】[0005]
【実施例】以下、本発明の実施態様の一例を、紫外線照
射による光化学反応処理方法について説明すると、図２
において１は、周知の紫外線照射装置のステンレス製の
処理筒であって、この処理筒１内に紫外線ランプ２を配
設し、紫外線照射によって被照射体中の細菌の殺菌、有
機物の酸化分解、有害物質の分解等の処理を行う流路を
形成するが、紫外線ランプ２は紫外線透過率が高く、か
つ被照射体に溶出物が流出しない材質、たとえば石英ガ
ラスよりなる透過筒３に収めることが通常である。しか
しこの透過筒３は必ずしも設けなくともよく、紫外線ラ
ンプ２を直接に被照射体に触れるように処理筒１内に取
り付けてもよい。また本発明は、外照式の紫外線照射装
置、すなわち紫外線ランプ２を石英ガラスよりなる通液
筒（図示せず）の外部に設け、通液筒内を通過する被照
射体に紫外線を照射するように構成してもかまわない。
処理筒１の側面に取り付けた架台４には、公知の電流調
整器５を付設し、これを紫外線ランプ２に電気的に接続
し、紫外線ランプ２の照射開始時の紫外線出力を設定す
るものであるが、この電流調整器５としては、調光器を
使用することが一般的であるが、これ以外に、接点の切
り換えやコンデンサ、コイル、サイリスタ等を使用して
電流値を変化させるものであれば、どのようなものでも
利用することができる。なお、紫外線ランプ２の照射開
始時の紫外線出力は、前述の電流値を変化させる方法以
外に、電圧、周波数、波形を変える方法で調整してもよ
い。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to a photochemical reaction treatment method by irradiation with ultraviolet rays.
Numeral 1 is a stainless steel processing tube of a known ultraviolet irradiation device, in which an ultraviolet lamp 2 is disposed, and sterilization of bacteria in an irradiation target, oxidative decomposition of organic matter, Although a flow path for performing processing such as decomposition of harmful substances is formed, the ultraviolet lamp 2 may be housed in a transmission cylinder 3 made of a material having a high ultraviolet transmittance and not allowing an eluted substance to flow out to an irradiation target, for example, quartz glass. Normal. However, the transmission tube 3 is not necessarily provided, and the ultraviolet lamp 2 may be mounted in the processing tube 1 so as to directly touch the irradiation target. Further, in the present invention, an externally illuminated ultraviolet irradiation apparatus, that is, an ultraviolet lamp 2 is provided outside a liquid passage cylinder (not shown) made of quartz glass, and the object to be irradiated passing through the liquid passage cylinder is irradiated with ultraviolet rays. It may be configured as follows.
A known current regulator 5 is attached to a gantry 4 attached to the side surface of the processing tube 1, and is electrically connected to the ultraviolet lamp 2 to set an ultraviolet output at the start of irradiation of the ultraviolet lamp 2. However, a dimmer is generally used as the current regulator 5, but in addition to this, a current is changed by switching contacts or using a capacitor, a coil, a thyristor, or the like. Anything can be used. The UV output at the start of the irradiation of the UV lamp 2 may be adjusted by changing the voltage, frequency, or waveform in addition to the above-described method of changing the current value.
【図２】FIG. 2
【０００６】なお電流調整器５による紫外線出力の設定
は、予め装置の設計段階において、紫外線ランプ２のラ
イフ、紫外線照射段階数、処理筒１に流入する被照射体
の流量、不純物濃度等の種々の処理条件に応じて、紫外
線ランプ２の照射開始時の紫外線出力を設定しておくも
ので、手動設定でもよいし、タイマー等を利用して自動
設定にしてもよい。The setting of the ultraviolet output by the current regulator 5 is performed in advance in the design stage of the apparatus, such as the life of the ultraviolet lamp 2, the number of ultraviolet irradiation steps, the flow rate of the irradiation object flowing into the processing tube 1, the impurity concentration, and the like. The ultraviolet output at the start of the irradiation of the ultraviolet lamp 2 is set in accordance with the processing conditions described above, and may be set manually or automatically using a timer or the like.
【０００７】低圧紫外線ランプであって、寿命が９００
０時間の場合を例にすると、図３に示すように、紫外線
照射を三段階、すなわち一段階の紫外線照射時間を約５
０００時間に分け、最初の段階の紫外線ランプの照射開
始時の出力を、従来の場合のように１００％（１００
Ｗ）の照射をせずに、例えば、あえて２０％程度低減し
て８０％程度になるように、電流調整器５によって予め
設定した電流値（従来０．４０Ａであったのを０．３２
Ａに低減させた値）に基づいて紫外線の照射を行うもの
で、光化学反応処理に影響が出ないところまで紫外線出
力をカットして無駄を省くものである。そして、紫外線
の照射の継続により紫外線ランプの出力は、徐々に経時
劣化して第一段階の最終時点においては、紫外線ランプ
の出力が５０％程度に低減するので、この時点で、次の
第二段階の紫外線照射に入り、この段階における紫外線
ランプの照射開始時の電流値を、図３に示すように、電
流調整器５によって予め設定した最初の段階の照射開始
時の電流値と同じ値に回復させて紫外線の照射を行うも
ので、前段階と同様に、紫外線出力をカットして無駄を
多段に省くものである。以後の第三段階の紫外線照射に
おいても、同様の条件で紫外線の照射を行い、このよう
に紫外線照射による被照射体の光化学反応処理を行うに
ついて、多段階にわたって紫外線照射量を可能な限り低
減し、かつ出来るだけ均等に調整するものである。A low-pressure ultraviolet lamp having a life of 900
Taking the case of 0 hour as an example, as shown in FIG. 3, the ultraviolet irradiation is performed in three stages, that is, the ultraviolet irradiation time of one stage is about 5 hours.
000 hours, and the output at the start of irradiation of the ultraviolet lamp in the first stage is 100% (100%) as in the conventional case.
Without irradiation of W), the current value preset by the current regulator 5 (for example, 0.32 A instead of 0.40 A in the past) so as to be reduced by about 20% to about 80%, for example.
UV irradiation is performed based on the value (reduced to A), and the UV output is cut to a point where the photochemical reaction treatment is not affected, thereby eliminating waste. Then, the output of the ultraviolet lamp gradually deteriorates with the lapse of time due to the continuation of the ultraviolet irradiation, and the output of the ultraviolet lamp is reduced to about 50% at the final point of the first stage. As shown in FIG. 3, the current value at the start of the irradiation of the ultraviolet lamp at this stage is set to the same value as the current value at the start of the irradiation at the first stage set by the current regulator 5 as shown in FIG. It recovers and irradiates with ultraviolet rays. As in the previous step, the ultraviolet output is cut to reduce waste. In the subsequent UV irradiation in the third step, UV irradiation is performed under the same conditions, and the amount of UV irradiation is reduced as much as possible over multiple steps for performing the photochemical reaction treatment of the irradiation target by the UV irradiation. , And make adjustments as evenly as possible.
【図３】FIG. 3
【０００８】以上、本発明の実施例を紫外線ランプの紫
外線照射による光化学反応処理方法について説明した
が、紫外線ランプ以外に、ナトリウムランプ、タリウム
ランプ、ハロゲンランプ、赤外線ランプ等のランプの照
射によって、前述した場合と同様に多段階にランプの照
射量を調整して被照射体の光化学反応処理方法を行うこ
とができる。なお、本発明の光化学反応処理方法によっ
て、半導体、医薬品、原子力等で用いる超純水やクリー
ンガス等の不純物をほとんど含まない液体又は気体等の
被照射体を得ることができる他、さらに、本発明の光化
学反応処理方法によって、不純物の存在しない、殺菌さ
れた半導体チップやウエハー、医療容器、特殊金属等の
被照射体を得ることができる。Although the embodiments of the present invention have been described with reference to the photochemical reaction treatment method by irradiating an ultraviolet lamp with an ultraviolet ray, the above-mentioned method can be performed by irradiating a lamp such as a sodium lamp, a thallium lamp, a halogen lamp, and an infrared lamp in addition to the ultraviolet lamp. In the same manner as described above, the irradiation amount of the lamp can be adjusted in multiple stages to perform the photochemical reaction processing method on the irradiation target. The photochemical reaction treatment method of the present invention can be used to obtain an object to be irradiated such as a liquid or a gas containing almost no impurities such as ultrapure water or clean gas used in semiconductors, pharmaceuticals, nuclear power, and the like. According to the photochemical reaction treatment method of the present invention, a sterilized semiconductor chip or wafer, a medical container, a special metal or the like to be irradiated can be obtained without impurities.
【０００９】[0009]
【発明の効果】以上述べたように、本発明においては、
被照射体のランプ照射による光化学反応処理を行うにつ
いて、ランプの照射を二段階以上に分け、各段階のラン
プの照射開始時の出力を、１０〜４５％程度低減してラ
ンプの照射を行うため、従来のように無駄な電力を浪費
せず、消費電力を５〜３０％節減可能であり、エネルギ
ーコスト面で非常に有利であり、ランプの照射量を適度
に抑制することによってランプの消耗度が低くくなり、
ランプのライフを１．２〜５倍延長することができるメ
リットもある。また本発明は、ランプの交換回数を減ら
すことによって、ランプのコストを２０〜５０％削減す
るほか、ランプの交換に要する作業の大幅に省力化する
ことができ、かつランプの交換に要する費用を格段に削
減できる。さらに本発明は、ランプの照射量を適度に抑
制することによって発熱を防止して装置の故障を少なく
すると同時に、副生成物の派生を防止して被照射体の処
理結果を改善することができ、かつ多段階のランプ照射
量を経時的に均等化することによって被照射体の処理効
率を向上させることもできる。As described above, in the present invention,
Regarding the photochemical reaction treatment by irradiation of the object to be irradiated with the lamp, the irradiation of the lamp is divided into two or more stages, and the output at the start of irradiation of the lamp in each stage is reduced by about 10 to 45% to perform the irradiation of the lamp. It is possible to reduce power consumption by 5 to 30% without wasting power as in the related art, and it is very advantageous in terms of energy cost. Becomes lower,
There is also an advantage that the life of the lamp can be extended by 1.2 to 5 times. Further, the present invention can reduce the cost of the lamp by 20 to 50% by reducing the number of times of replacing the lamp, can greatly reduce the labor required for replacing the lamp, and can reduce the cost required for replacing the lamp. It can be significantly reduced. Further, the present invention can prevent the generation of heat by reducing the irradiation amount of the lamp appropriately to reduce the failure of the apparatus, and at the same time, prevent the generation of by-products and improve the processing result of the irradiation target. In addition, the treatment efficiency of the object to be irradiated can be improved by equalizing the irradiation amount of the lamp in multiple stages with time.
【図１】従来の光化学反応処理に使用する低圧紫外線ラ
ンプの寿命と経時劣化を示す説明図である。FIG. 1 is an explanatory diagram showing the life and deterioration over time of a low-pressure ultraviolet lamp used in a conventional photochemical reaction process.
【図２】本発明の光化学反応処理を実施する周知の紫外
線照射装置の断面図である。FIG. 2 is a cross-sectional view of a known ultraviolet irradiation device that performs a photochemical reaction process of the present invention.
【図３】本発明の光化学反応処理に使用する低圧紫外線
ランプによる多段階に紫外線照射量を調整する状態を示
す説明図である。FIG. 3 is an explanatory diagram showing a state in which the amount of ultraviolet irradiation is adjusted in multiple stages by a low-pressure ultraviolet lamp used in the photochemical reaction treatment of the present invention.
１ 処理筒 ２ 紫外線ランプ ３ 透過筒 ４ 架台 ５ 電流調節器 DESCRIPTION OF SYMBOLS 1 Processing cylinder 2 Ultraviolet lamp 3 Transmission cylinder 4 Mounting stand 5 Current controller
Claims (2)
応処理を行うについて、ランプのライフに応じて、照射
を二段階以上に分け、最初の段階のランプの出力を、照
射開始時に１０〜４５％程度低減するように設定して照
射を行い、経時劣化によってランプの出力が２０〜５０
％程度に低減する時点をランプの点灯時間によって予測
し、その時点で次の段階の照射に入り、この段階におけ
るランプの照射開始時の出力を、最初の段階の低減値と
同様にして照射を行い、以後は必要に応じて同様の条件
でランプの照射を行い、多段階にランプ照射量を調整す
ることを特徴とするランプ照射による被照射体の光化学
反応処理方法In the photochemical reaction treatment of an object to be irradiated by irradiation of a lamp, the irradiation is divided into two or more stages in accordance with the life of the lamp, and the output of the lamp at the first stage is changed to 10 to 45 at the start of irradiation. %, The irradiation is performed, and the lamp output is reduced by 20 to 50 due to deterioration over time.
% Is predicted by the lighting time of the lamp. At that time, the irradiation starts in the next stage, and the output at the start of irradiation of the lamp in this stage is set in the same manner as the reduction value in the first stage. And thereafter, irradiating the lamp under the same conditions as necessary, and adjusting the amount of irradiation of the lamp in multiple stages.
体の光化学反応処理を行うについて、紫外線ランプのラ
イフに応じて、紫外線照射を二段階以上に分け、最初の
段階の紫外線ランプの出力を、照射開始時に１０〜４５
％程度低減するように設定して紫外線の照射を行い、経
時劣化によって紫外線ランプの出力が２０〜５０％程度
に低減する時点を紫外線ランプの点灯時間によって予測
し、その時点で次の段階の紫外線照射に入り、この段階
における紫外線ランプの照射開始時の出力を、最初の段
階の低減値と同様にして紫外線の照射を行い、以後は必
要に応じて同様の条件で紫外線の照射を行い、多段階に
紫外線照射量を調整することを特徴とする紫外線照射に
よる被照射体の光化学反応処理方法2. The method according to claim 1, wherein the irradiation of the object to be irradiated is performed by ultraviolet irradiation of an ultraviolet lamp. The ultraviolet irradiation is divided into two or more stages in accordance with the life of the ultraviolet lamp. 10-45 at the start
% Of the UV lamp is set, and the time at which the output of the UV lamp is reduced to about 20 to 50% due to aging is predicted based on the lighting time of the UV lamp. The irradiation is started, and the irradiation at the start of the irradiation of the ultraviolet lamp at this stage is performed in the same manner as the reduced value in the first stage, and the irradiation is performed under the same conditions as necessary. Photochemical reaction treatment method for an object to be irradiated by ultraviolet irradiation, wherein the amount of ultraviolet irradiation is adjusted in stages
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03222364A JP3142608B2 (en) | 1991-08-08 | 1991-08-08 | Photochemical reaction treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03222364A JP3142608B2 (en) | 1991-08-08 | 1991-08-08 | Photochemical reaction treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0550061A JPH0550061A (en) | 1993-03-02 |
| JP3142608B2 true JP3142608B2 (en) | 2001-03-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03222364A Expired - Fee Related JP3142608B2 (en) | 1991-08-08 | 1991-08-08 | Photochemical reaction treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3142608B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3934287B2 (en) * | 1999-09-21 | 2007-06-20 | 株式会社荏原製作所 | UV sterilizer |
| JP3563373B2 (en) * | 2001-06-14 | 2004-09-08 | 株式会社日本フォトサイエンス | Discharge lamp, ultraviolet irradiation device, and operation method thereof |
| JP4959072B2 (en) * | 2001-07-11 | 2012-06-20 | 株式会社日本フォトサイエンス | Photochemical reaction processing apparatus and photochemical reaction processing method |
-
1991
- 1991-08-08 JP JP03222364A patent/JP3142608B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0550061A (en) | 1993-03-02 |
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