JP3136545B2 - Piezoelectric vibration gyro - Google Patents
Piezoelectric vibration gyroInfo
- Publication number
- JP3136545B2 JP3136545B2 JP03223616A JP22361691A JP3136545B2 JP 3136545 B2 JP3136545 B2 JP 3136545B2 JP 03223616 A JP03223616 A JP 03223616A JP 22361691 A JP22361691 A JP 22361691A JP 3136545 B2 JP3136545 B2 JP 3136545B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- piezoelectric
- vibration
- electrode
- vibrating gyroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【０００１】[0001]
【産業上の利用分野】本発明は，船舶や自動車等の移動
自身及びこれに搭載される機器の姿勢制御や自動車のナ
ビゲーションシステムなどに用いられるジャイロスコー
プの内，特に圧電振動子の超音波振動を用いた，いわゆ
る圧電振動ジャイロに関し，特に圧電セラミックス円柱
からなる振動子を用いた圧電振動ジャイロの振動子の駆
動方法及び検出方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibration of a piezoelectric vibrator, particularly a gyroscope used for attitude control of a moving vehicle such as a ship or a car and the equipment mounted thereon, and a navigation system of a car. The present invention relates to a so-called piezoelectric vibrating gyroscope using a piezoelectric vibrator, and more particularly to a method of driving and detecting a vibrator of a piezoelectric vibrating gyroscope using a vibrator formed of a piezoelectric ceramic cylinder.
【０００２】[0002]
【従来の技術】圧電振動ジャイロは振動している物体に
回転角速度が与えられると，その振動方向と直角な方向
にコリオリ力を生ずるという力学現象を利用したジャイ
ロスコープである。一方の振動を励振した状態で，振動
子を回転させると，前述のコリオリ力の作用によりこの
振動と直角な方向に力が働き，他方の振動が励振され
る。この振動の大きさは入力側の振動の大きさ及び回転
角速度に比例するため，入力電圧を一定にした状態で，
この振動の大きさに比例した出力電圧の大きさから回転
角速度の大きさを求めることが出来る。2. Description of the Related Art A piezoelectric vibrating gyroscope is a gyroscope utilizing a mechanical phenomenon that when a rotating angular velocity is given to a vibrating object, a Coriolis force is generated in a direction perpendicular to the direction of the vibration. When the vibrator is rotated in a state where one vibration is excited, a force acts in a direction perpendicular to the vibration by the action of the aforementioned Coriolis force, and the other vibration is excited. Since the magnitude of this vibration is proportional to the magnitude of the vibration on the input side and the rotational angular velocity, with the input voltage kept constant,
The magnitude of the rotational angular velocity can be determined from the magnitude of the output voltage proportional to the magnitude of the vibration.
【０００３】図６は従来の圧電振動ジャイロの一構成を
示す概略図である。図６において，正方形断面形状を有
する金属角柱５７の隣合う面に，厚さ方向に分極された
圧電セラミックス薄板５８，５９が夫々接合されてい
る。この金属角柱５７は，中心軸に交差する方向に互い
に直角な二つの方向（Ｘ，Ｙ）に，ほぼ同じ共振周波数
で屈曲振動が可能であり，圧電セラミックス薄板５８に
この共振周波数に等しい周波数の電圧を印加すると，圧
電セラミックス薄板５８を接合した面が凹凸となる方向
に屈曲振動する。この状態で，金属角柱５７を長さ方向
を軸（Ｚ）として回転させるとコリオリ力の作用により
金属角柱５７は圧電セラミックス薄板５９を接合した面
が凹凸となる方向に屈曲振動し，圧電セラミックス５９
に回転角速度に比例した電圧が発生する。FIG. 6 is a schematic diagram showing one configuration of a conventional piezoelectric vibrating gyroscope. In FIG. 6, piezoelectric ceramic thin plates 58, 59 polarized in the thickness direction are respectively joined to adjacent surfaces of a metal prism 57 having a square cross section. The metal prism 57 can bend and vibrate at substantially the same resonance frequency in two directions (X, Y) perpendicular to each other in a direction intersecting the center axis. When a voltage is applied, the piezoelectric ceramic thin plate 58 is bent and vibrated in a direction in which the surface to which the piezoelectric ceramic thin plate 58 is joined becomes uneven. In this state, when the metal prism 57 is rotated about the length direction as the axis (Z), the metal prism 57 bends and vibrates in a direction in which the surface to which the piezoelectric ceramic thin plate 59 is bonded becomes uneven due to the action of Coriolis force.
, A voltage proportional to the rotational angular velocity is generated.
【０００４】[0004]
【発明が解決しようとする課題】しかし，図６に示した
従来の励振，検出方法によると，振動の変極点では，振
動子の速度は零であり，回転速度によるコリオリ力は生
じないために検出感度及び応答性が悪いという問題があ
る。また，振動子に設けられた電極の一部（一個又は複
数）を用いて振動子を一方向に励振するため振動の変位
すなわち速度が小さく，検出感度が低いという問題があ
る。そこで，本発明の技術的課題は圧電振動ジャイロの
励振，検出方法において応答性が早く検出感度が大き
く，したがって高精度な圧電振動ジャイロを提供するこ
とにある。However, according to the conventional excitation and detection method shown in FIG. 6, at the inflection point of the vibration, the speed of the vibrator is zero, and the Coriolis force due to the rotation speed does not occur. There is a problem that detection sensitivity and response are poor. In addition, since the vibrator is excited in one direction by using a part (one or more) of the electrodes provided on the vibrator, there is a problem that the displacement, that is, the speed of the vibration is small and the detection sensitivity is low. Therefore, a technical problem of the present invention is to provide a piezoelectric vibrating gyroscope that has a high response speed and a high detection sensitivity in the method of exciting and detecting the piezoelectric vibrating gyroscope, and therefore has high accuracy.
【０００５】[0005]
【課題を解決するための手段】本発明によれば，円筒形
外周面を有する圧電セラミックスと，前記外周面に形成
された複数の帯状電極とを有し，前記圧電セラミックス
の圧電横効果による屈曲振動を行う圧電振動子におい
て，前記複数の帯状電極は，前記外周面に長さ方向に沿
って形成されており，前記複数の帯状電極は，接地され
る基準電極と，該基準電極以外の全ての帯状電極からな
る駆動電極を持ち該駆動電極の全て又は一部からなる検
出電極とを備えていることを特徴とする圧電振動ジャイ
ロ用振動子が得られる。本発明によれば，前記圧電振動
ジャイロ用振動子の駆動方法であって，前記駆動電極の
うち少なくとも２つに，当該振動子の屈曲振動の共振周
波数とほぼ等しく且つ位相の異なる少なくとも２種の交
流電圧を加えることによって前記振動子に円を含む楕円
振動を励振することを特徴とする圧電振動ジャイロの駆
動方法が得られる。本発明によれば，前記圧電振動ジャ
イロ用振動子による振動の検出方法であって，前記振動
子の長さ方向を軸として，当該軸回りに加わった回転角
速度を，前記円振動の接線に垂直な方向に加わったコリ
オリ力による旋回角の変化としてとらえ，該旋回角の変
化を駆動電極の電位変化として検出することを特徴とす
る回転角速度の検出方法が得られる。According to the present invention, there is provided a piezoelectric ceramic having a cylindrical outer peripheral surface, and a plurality of strip electrodes formed on the outer peripheral surface, wherein the piezoelectric ceramic is bent by a piezoelectric transverse effect. In a piezoelectric vibrator that vibrates, the plurality of strip electrodes are formed along the length direction on the outer peripheral surface, and the plurality of strip electrodes are a grounded reference electrode and all other than the reference electrode. And a detection electrode consisting of all or a part of the drive electrodes, and a vibrator for a piezoelectric vibratory gyroscope is obtained. According to the present invention, there is provided a method of driving the vibrator for a piezoelectric vibrating gyroscope, wherein at least two of the driving electrodes have at least two kinds of resonance frequencies substantially equal to a resonance frequency of a bending vibration of the vibrator and having different phases. A driving method of a piezoelectric vibrating gyroscope is characterized in that an elliptical vibration including a circle is excited in the vibrator by applying an AC voltage. According to the invention, there is provided a method for detecting vibration by the vibrator for a piezoelectric vibrating gyroscope, wherein a rotational angular velocity applied around the longitudinal axis of the vibrator is perpendicular to a tangent of the circular vibration. Thus, a method of detecting the rotational angular velocity is obtained, in which the change in the turning angle is detected as a change in the turning angle due to the Coriolis force applied in various directions, and the change in the turning angle is detected as a change in the potential of the drive electrode.
【０００６】[0006]
【作用】本発明においては，円又は楕円振動を励振した
振動子の，ある着目点の質量をｍ，円運動の接線方向で
表される速度の大きさをｖとすると，振動子の長さ方向
を軸として回転角速度ωを加えると，励振された円運動
の接線に垂直な方向に Ｆ＝２×ｍ×ｖ×ω であらわされるコリオリ力が発生する。このコリオリ力
により，各検出電極には圧電効果によってコリオリ力に
応じた起電力が生じ，検出電極の電位が変化する。この
電位の変位を検出することにより，振動子に加えられた
回転角速度を検出することができる。また，前記のよう
に円又は楕円振動を全ての電極から励振する事により，
１ヶ又は複数の電極（全てを除く）から１方向の単振動
を励振する従来の駆動方法と比較して，振動の変位が大
きく，すなわち，振動子のある着目点での速度が早く，
従って検出感度の高い圧振動ジャイロを得ることができ
る。In the present invention, if the mass of a point of interest of a vibrator that excites a circular or elliptical vibration is m and the magnitude of the velocity expressed in the tangential direction of the circular motion is v, the length of the vibrator When a rotational angular velocity ω is applied with the direction as an axis, a Coriolis force represented by F = 2 × m × v × ω is generated in a direction perpendicular to the tangent line of the excited circular motion. Due to this Coriolis force, an electromotive force corresponding to the Coriolis force is generated in each detection electrode by a piezoelectric effect, and the potential of the detection electrode changes. By detecting this potential change, the rotational angular velocity applied to the vibrator can be detected. In addition, by exciting the circular or elliptical vibration from all the electrodes as described above,
Compared with the conventional driving method that excites a single vibration in one direction from one or a plurality of electrodes (except for all), the displacement of vibration is large, that is, the speed at a certain point of interest of the vibrator is high,
Therefore, a pressure vibration gyro having high detection sensitivity can be obtained.
【０００７】[0007]
【実施例】以下，本発明の実施例について図面を用いて
説明する。図１は，本発明の圧電振動ジャイロに用いら
れる圧電セラミックス円柱の一例を示す斜視図である。
圧電セラミックス円柱１からなる圧電振動子（以下圧電
振動子と呼ぶ）１０の外周面上に長さ方向と平行な２ｎ
個（ｎは２以上）の帯状電極２（ここではｎ＝８で説
明）が形成されている。帯状電極２は，曲面スクリーン
印刷で直接形成するか，あるいはメッキ等で全面に形成
された電極の不要部分をフォトエッチングにより除去す
ることにより容易に得られる。この振動子は，共振周波
数による振動の節の部分をリング等を装着して円筒内に
固定される。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an example of a piezoelectric ceramic cylinder used in the piezoelectric vibrating gyroscope of the present invention.
On the outer peripheral surface of a piezoelectric vibrator (hereinafter referred to as a piezoelectric vibrator) 10 composed of a piezoelectric ceramic cylinder 1, 2n parallel to the length direction is provided.
A plurality (n is 2 or more) of strip electrodes 2 (here, n = 8) are formed. The strip electrode 2 can be easily obtained by directly forming the screen electrode by curved screen printing, or by removing unnecessary portions of the electrode formed on the entire surface by plating or the like by photoetching. This vibrator is fixed in a cylinder by attaching a ring or the like to a node of vibration at a resonance frequency.
【０００８】以下説明を簡単にするためにｎの値が４
（８分割）の場合について説明する。図２は図１に示し
た圧電セラミックス円柱１の分極方向を示す断面図であ
る。図１において，圧電セラミックス円柱１に，等間隔
で８個の帯状電極２１，２２，２３，２４，２５，２
６，２７及び２８を形成している。これらの電極を互い
に一つおきの帯状電極２１，２３，２５，２７および２
２，２４，２６，２８を電気的に接続して２端子として
分極処理を施すと圧電セラミックス円柱の断面方向の分
極の向きは破線の矢印で示される方向となる。これらの
各帯状電極の間隙部をそれぞれＧ１，Ｇ２，Ｇ３，Ｇ
４，Ｇ５，Ｇ６，Ｇ７及びＧ８とする。今，間隙部Ｇ１
に交流電圧を印加すると，印加電界の向きが分極の向き
と等しい場合は間隙部Ｇ１に伸び歪が発生し，印加電界
の向きが分極の向きと逆向きの場合は間隙部Ｇ１に縮み
歪が発生する。従って，間隙部Ｇ１部に圧電セラミック
ス円柱１の屈曲振動モードの共振周波数にほぼ等しい周
期数の励振用の交流電圧を印加すると圧電セラミックス
円柱１は圧電横効果により間隙部Ｇ１の中心と円柱の中
心とを結ぶ矢印２９の方向に屈曲振動する。In order to simplify the description, the value of n is 4
The case of (8 divisions) will be described. FIG. 2 is a sectional view showing the polarization direction of the piezoelectric ceramic column 1 shown in FIG. In FIG. 1, eight strip electrodes 21, 22, 23, 24, 25, 2 are arranged on a piezoelectric ceramic column 1 at equal intervals.
6, 27 and 28 are formed. These electrodes are connected to every other strip electrode 21, 23, 25, 27 and 2
When the electrodes 2, 24, 26, and 28 are electrically connected and subjected to polarization processing as two terminals, the direction of polarization in the cross-sectional direction of the piezoelectric ceramic cylinder becomes the direction indicated by the broken arrow. G1, G2, G3, G
4, G5, G6, G7 and G8. Now, the gap G1
When an AC voltage is applied to the electrode, an elongation strain occurs in the gap G1 when the direction of the applied electric field is equal to the direction of the polarization, and a contraction strain occurs in the gap G1 when the direction of the applied electric field is opposite to the direction of the polarization. appear. Therefore, when an AC voltage for excitation having a period substantially equal to the resonance frequency of the bending vibration mode of the piezoelectric ceramic cylinder 1 is applied to the gap G1, the piezoelectric ceramic cylinder 1 is moved by the transverse piezoelectric effect to the center of the gap G1 and the center of the cylinder. Flexurally vibrates in the direction of arrow 29 connecting.
【０００９】図３は本発明の実施例に於ける圧電振動ジ
ャイロの接続及び駆動方法を説明するための断面図であ
る。帯状電極２１，２３，２５，２７にそれぞれ結合抵
抗４１，４２，４３，４４を介して駆動源３１，３２，
３３，３４に接続されている。駆動源３１，３２，３
３，３４に圧電セラミックス円柱１の屈曲振動モードの
共振周波数にほぼ等しく，それぞれ隣り合わせた駆動源
と９０°づつ位相が遅れた交流電圧 COSθ， SINθ，−
COSθ，− SINθを印加すると圧電セラミックス円柱２
０の断面方向には図４の破線３６に示すように円振動が
励振される。ここで圧電セラミックス円柱２０の長さ方
向を軸として回転運動を加えると，回転方向に応じて図
４の破線に示す円振動の接線に垂直な方向３７に，円振
動の接線方向の速度と回転運動の角速度に比例したコリ
オリ力が働き，従って回転方向に応じて円振動の旋回角
３５（図４（ｂ）に示す）を減少又は増大させる方向に
力が生ずる。FIG. 3 is a sectional view for explaining a connection and driving method of the piezoelectric vibrating gyroscope in the embodiment of the present invention. The drive sources 31, 32, and 34 are connected to the strip electrodes 21, 23, 25, and 27 via coupling resistors 41, 42, 43, and 44, respectively.
33 and 34 are connected. Drive sources 31, 32, 3
AC voltages COSθ, SINθ, −3 which are almost equal to the resonance frequency of the bending vibration mode of the piezoelectric ceramic cylinder 1 and whose phases are delayed by 90 ° with respect to the adjacent driving sources.
When COSθ,-SINθ is applied, the piezoelectric ceramic cylinder 2
A circular vibration is excited in the cross-sectional direction 0 as shown by a broken line 36 in FIG. Here, when a rotational motion is applied about the longitudinal direction of the piezoelectric ceramic cylinder 20 as an axis, the speed and rotation in the tangential direction of the circular vibration in a direction 37 perpendicular to the tangent of the circular vibration shown by the broken line in FIG. Coriolis force acts in proportion to the angular velocity of the motion, and accordingly, a force is generated in a direction to decrease or increase the turning angle 35 (shown in FIG. 4B) of the circular vibration according to the rotation direction.
【００１０】さらに図５の各部波形図を用いて詳細に説
明する。図５（Ａ）は駆動電極２１の駆動電圧波形，図
５（Ｂ）は駆動電極２３の駆動電圧波形である。図５
（Ｃ）は時間ｔ１，ｔ２，ｔ３，ｔ４での振動子のある
着目点２０の位置及び接線方向で表される速度１２及び
回転運動の軌跡１１及びコリオリ力１３及び振動子に加
えられる回転角速度の方向１３を示す断面図である。駆
動電極２５及び２７の駆動電圧は駆動電極２１，２３の
逆相であるので省略する。図５（Ａ）及び（Ｂ）のよう
な交流電圧を加えると，振動子のある着目点２０は図５
（Ｃ）の破線で示すように円運動する。この円運動して
いる振動子に，振動子の長さ方向を軸として回転角速度
１４を加えると，振動子の着目点２０の接線方向で表さ
れる速度（図５（Ｃ）１２）に垂直な方向に，コリオリ
力１３が加わる。コリオリ力１３の方向は時間ｔ１→ｔ
２→ｔ３→ｔ４の旋回による振動子の着目点２０の位置
によって図５（ｃ）のＣ１，Ｃ２，Ｃ３，Ｃ４の矢印１
３に示すように変化する。このコリオリ力によって駆動
電極にはそれぞれ図５（Ａ）及び図５（Ｂ）の一点鎖線
で示すような起電力を生じる。駆動電圧とコリオリ力に
よる起電力の合成により，駆動電極の電位は図５（Ａ）
及び（Ｂ）の破線で示すように変化する。この電位の変
化を検出する事によって振動ジャイロの回転角速度を検
出する事ができる。この電位の変化は駆動電極に用いた
帯状電極２１，２３，２５，２７の全てに発生し，一部
あるいは全電極から検出される。Further, a detailed description will be given with reference to waveform diagrams of respective parts shown in FIG. FIG. 5A shows a drive voltage waveform of the drive electrode 21, and FIG. 5B shows a drive voltage waveform of the drive electrode 23. FIG.
(C) is the position of the point of interest 20 of the vibrator at time t1, t2, t3, and t4, the velocity 12 represented by the tangential direction, the trajectory 11 of the rotational motion, the Coriolis force 13, and the rotational angular velocity applied to the vibrator. It is sectional drawing which shows the direction 13 of FIG. The drive voltages of the drive electrodes 25 and 27 are the opposite phases of the drive electrodes 21 and 23, and thus description thereof is omitted. When an AC voltage is applied as shown in FIGS.
A circular motion is made as shown by the broken line in (C). When a rotational angular velocity 14 is applied to the vibrator in a circular motion about the longitudinal direction of the vibrator as an axis, the velocity is perpendicular to the velocity (12 in FIG. 5C) represented by the tangential direction of the point of interest 20 of the vibrator. Coriolis force 13 is applied in a desired direction. The direction of Coriolis force 13 is time t1 → t
Arrow 1 of C1, C2, C3, C4 in FIG. 5C depends on the position of the point of interest 20 of the vibrator by turning from 2 to t3 to t4.
It changes as shown in FIG. Due to this Coriolis force, an electromotive force is generated in the drive electrode as shown by a chain line in FIGS. 5A and 5B, respectively. By combining the driving voltage and the electromotive force generated by the Coriolis force, the potential of the driving electrode becomes as shown in FIG.
And (B) as shown by the broken line. By detecting the change in the potential, the rotational angular velocity of the vibrating gyroscope can be detected. This change in potential occurs in all of the strip electrodes 21, 23, 25, and 27 used as drive electrodes, and is detected from some or all of the electrodes.
【００１１】以上の説明は，圧電セラミックス円柱で構
成した圧電振動ジャイロについて説明したが，圧電セラ
ミックスパイプや，金属柱と圧電素子等で構成した圧電
振動ジャイロについても同様な効果が期待できることは
明白である。In the above description, a piezoelectric vibrating gyroscope composed of a piezoelectric ceramic cylinder has been described. However, it is apparent that a similar effect can be expected with a piezoelectric ceramic pipe or a piezoelectric vibrating gyroscope composed of a metal column and a piezoelectric element. is there.
【００１２】[0012]
【発明の効果】以上説明したように，本発明の振動ジャ
イロの駆動，検出方法によれば，従来の振動ジャイロの
励振，検出方法と比較して，駆動される振動の変位すな
わち速度が大きいため，回転角速度の検出感度が良くな
る。しかも全方向に均一に励振し，しかも励振される振
動に変極点がないから，回転角速度に対して常にコリオ
リ力が働き，振動子の加工精度や材料の異方性による振
動方向のずれや，振動体やそれを支持するための支持具
の経時変化等の影響が小さく，安定に回転角速度を検出
する事ができる。以上のように検出感度が高く，しかも
経時的にも安定な振動ジャイロを提供する事ができ，工
業的価値は大である。As described above, according to the method for driving and detecting a vibrating gyroscope according to the present invention, the displacement of the driven vibration, that is, the speed, is larger than the conventional method for driving and detecting a vibrating gyroscope. , The detection sensitivity of the rotational angular velocity is improved. In addition, since the excitation is performed uniformly in all directions and the excited vibration has no inflection point, Coriolis force always acts on the rotational angular velocity, and the deviation of the vibration direction due to the processing accuracy of the vibrator and the anisotropy of the material, The influence of the aging of the vibrating body and the support for supporting the vibrating body is small, and the rotational angular velocity can be stably detected. As described above, it is possible to provide a vibrating gyro having high detection sensitivity and stable over time, and has a great industrial value.
【図１】本発明の実施例に於ける圧電振動ジャイロに用
いられる圧電振動子の構造を示す斜視図である。FIG. 1 is a perspective view showing a structure of a piezoelectric vibrator used in a piezoelectric vibrating gyroscope according to an embodiment of the present invention.
【図２】本発明の実施例に於ける圧電振動ジャイロの振
動子の分極の状態及び基本原理を説明するための断面図
である。FIG. 2 is a cross-sectional view illustrating a polarization state and a basic principle of a vibrator of a piezoelectric vibrating gyroscope according to an embodiment of the present invention.
【図３】本発明の実施例に於ける圧電振動ジャイロの接
続及び駆動方法を説明するための断面図である。FIG. 3 is a cross-sectional view for explaining a connection and driving method of the piezoelectric vibrating gyroscope according to the embodiment of the present invention.
【図４】（ａ）は本発明の実施例に於ける圧電振動ジャ
イロの振動の状態及び振動子回転時のコリオリ力の方向
を示すための断面図である。 （ｂ）は本発明の実施例に於ける圧電振動ジャイロに駆
動される円振動の旋回角を説明するための図である。FIG. 4A is a cross-sectional view showing a state of vibration of a piezoelectric vibrating gyroscope and a direction of a Coriolis force when a vibrator rotates in an embodiment of the present invention. (B) is a diagram for explaining the turning angle of the circular vibration driven by the piezoelectric vibrating gyroscope in the embodiment of the present invention.
【図５】駆動電極に加えられる駆動電圧及びコリオリ力
により生じる起電力及び駆動電圧とコリオリ力による起
電力の合成波形とそのときの振動子の状態を説明するた
めの図である。FIG. 5 is a diagram for explaining an electromotive force generated by a driving voltage and a Coriolis force applied to a driving electrode, a composite waveform of the driving voltage and an electromotive force by a Coriolis force, and a state of a vibrator at that time.
【図６】従来の圧電振動ジャイロの一構造例を示す斜視
図である。FIG. 6 is a perspective view showing a structural example of a conventional piezoelectric vibrating gyroscope.
１ 圧電セラミックス円柱 ２ 帯状電極 １０ 圧電ジャイロ用振動子 １１ 振動子に励振される円運動の軌跡を表す破線 １２ 振動子のある着目点２０の時間ｔに於ける接線方
向の速度を表すための矢印 １３ コリオリ力の方向を示す矢印 １４ 振動子の長さ方向を軸に加えられる回転角速度 ２０ 振動子のある着目点 ２１ 帯状電極 ２２ 帯状電極 ２３ 帯状電極 ２４ 帯状電極 ２５ 帯状電極 ２６ 帯状電極 ２７ 帯状電極 ３１ 駆動源 ３２ 駆動源 ３３ 駆動源 ３４ 駆動源 ３５ 圧電セラミックス円柱に駆動される円振動の旋回
角 ４１ 結合抵抗 ４２ 結合抵抗 ４３ 結合抵抗 ４４ 結合抵抗 ５７ 金属角柱 ５８ 圧電セラミックス薄板 ５９ 圧電セラミックス薄板DESCRIPTION OF SYMBOLS 1 Piezoelectric ceramic cylinder 2 Strip electrode 10 Piezoelectric gyro vibrator 11 Dashed line representing the trajectory of circular motion excited by the vibrator 12 Arrow for expressing the tangential velocity at a point of interest 20 of the vibrator at time t 13 Arrow indicating the direction of the Coriolis force 14 Rotational angular velocity applied to the axis in the longitudinal direction of the transducer 20 Point of interest of the transducer 21 Strip electrode 22 Strip electrode 23 Strip electrode 24 Strip electrode 25 Strip electrode 26 Strip electrode 27 Strip electrode REFERENCE SIGNS LIST 31 drive source 32 drive source 33 drive source 34 drive source 35 turning angle of circular vibration driven by piezoelectric ceramic cylinder 41 coupling resistance 42 coupling resistance 43 coupling resistance 44 coupling resistance 57 metal prism 58 piezoelectric ceramic thin plate 59 piezoelectric ceramic thin plate
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01C 19/56 G01P 9/04 Continuation of front page (58) Field surveyed (Int.Cl. 7 , DB name) G01C 19/56 G01P 9/04
Claims (3)
と，前記外周面に形成された複数の帯状電極とを有し，
前記圧電セラミックスの圧電横効果による屈曲振動を行
う圧電振動子において，前記複数の帯状電極は，前記外
周面に長さ方向に沿って形成されており，前記複数の帯
状電極は，接地される基準電極と，該基準電極以外の全
ての帯状電極からなる駆動電極を持ち該駆動電極の全て
又は一部からなる検出電極とを備えていることを特徴と
する圧電振動ジャイロ用振動子。A piezoelectric ceramic having a cylindrical outer peripheral surface; and a plurality of strip electrodes formed on the outer peripheral surface.
In a piezoelectric vibrator that performs bending vibration by the piezoelectric transverse effect of the piezoelectric ceramic, the plurality of strip electrodes are formed along the length direction on the outer peripheral surface, and the plurality of strip electrodes are connected to a ground reference. A vibrator for a piezoelectric vibrating gyroscope, comprising: an electrode; and a detection electrode having a drive electrode formed of all band-shaped electrodes other than the reference electrode and having all or a part of the drive electrode.
駆動方法であって，前記駆動電極のうち少なくとも２つ
に，当該振動子の屈曲振動の共振周波数とほぼ等しく且
つ位相の異なる少なくとも２種の交流電圧を加えること
によって前記振動子に円を含む楕円振動を励振すること
を特徴とする圧電振動ジャイロの駆動方法。2. The method of driving a vibrator for a piezoelectric vibrating gyroscope according to claim 1, wherein at least two of said driving electrodes have at least two different phases substantially equal to a resonance frequency of bending vibration of said vibrator. A driving method for a piezoelectric vibratory gyroscope, wherein an elliptical vibration including a circle is excited in the vibrator by applying a kind of AC voltage.
よる振動の検出方法であって，前記振動子の長さ方向を
軸として，当該軸回りに加わった回転角速度を，前記円
振動の接線に垂直な方向に加わったコリオリ力による旋
回角の変化としてとらえ，該旋回角の変化を駆動電極の
電位変化として検出することを特徴とする回転角速度の
検出方法。3. The method for detecting vibrations by a vibrator for a piezoelectric vibrating gyroscope according to claim 1, wherein the rotational angular velocity applied around the longitudinal direction of the vibrator is taken as a tangent to the circular vibration. A rotation angle caused by a Coriolis force applied in a direction perpendicular to the rotation angle, and detecting the change in the rotation angle as a potential change of a drive electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03223616A JP3136545B2 (en) | 1991-08-09 | 1991-08-09 | Piezoelectric vibration gyro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03223616A JP3136545B2 (en) | 1991-08-09 | 1991-08-09 | Piezoelectric vibration gyro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0545169A JPH0545169A (en) | 1993-02-23 |
| JP3136545B2 true JP3136545B2 (en) | 2001-02-19 |
Family
ID=16800996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03223616A Expired - Lifetime JP3136545B2 (en) | 1991-08-09 | 1991-08-09 | Piezoelectric vibration gyro |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3136545B2 (en) |
-
1991
- 1991-08-09 JP JP03223616A patent/JP3136545B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0545169A (en) | 1993-02-23 |
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