JP3133210B2 - Electric quantity measuring device - Google Patents
Electric quantity measuring deviceInfo
- Publication number
- JP3133210B2 JP3133210B2 JP06065938A JP6593894A JP3133210B2 JP 3133210 B2 JP3133210 B2 JP 3133210B2 JP 06065938 A JP06065938 A JP 06065938A JP 6593894 A JP6593894 A JP 6593894A JP 3133210 B2 JP3133210 B2 JP 3133210B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- current
- pair
- constant
- input terminals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Measuring Magnetic Variables (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Hall/Mr Elements (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、被測定系の電流又は電
力をホール素子を用いて測定する電気量測定装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric quantity measuring device for measuring a current or a power of a system to be measured by using a Hall element.
【０００２】[0002]
【従来の技術】ホール素子を用いた従来の電気量測定装
置としては、例えば図７に示すようなものがある。図の
例は、被測定系の電流をその電流値に正比例した電圧と
して出力する電流測定装置である。被測定系の電流が直
流の場合は出力は直流電圧、交流の場合は出力は交流電
圧となる。図７において、１はホール素子であり、１対
の電流入力端子Ｔ1 ，Ｔ2 と１対の電圧出力端子Ｔ3 ，
Ｔ4 が備えられている。１対の電流入力端子Ｔ1 ，Ｔ2
間に定電流源３により一定値の直流電流が流れ、被測定
系の電流値に正比例した磁界Ｂが印加されると、１対の
電圧出力端子Ｔ3，Ｔ4 間に被測定系の電流値に正比例
したホール電圧が発生する。４は出力手段としての減算
器であり、１対の電圧出力端子Ｔ3 ，Ｔ4 間に発生する
ホール電圧の差（Ｖa −Ｖb ）をｋ倍に増幅して出力端
子Ｔout に出力する。電圧差（Ｖa−Ｖb ）が被測定系
の電流値に正比例した値であり、出力端子Ｔout の出力
電圧を読みとることにより被測定系の電流値が測定され
る。図８は、被測定系の電流値に正比例した磁界Ｂを得
る手段を示しており、コイル端子ＴＩ1 ，ＴＩ2 に被測
定系の電流を入力させるとコア２によりその被測定系の
電流に正比例した磁界Ｂが得られ、その磁界Ｂがホール
素子１に印加される。2. Description of the Related Art As a conventional electric quantity measuring device using a Hall element, for example, there is one shown in FIG. The example shown in the figure is a current measuring device that outputs a current of a system to be measured as a voltage directly proportional to the current value. If the current of the measured system is DC, the output is a DC voltage, and if the current is AC, the output is an AC voltage. In FIG. 7, reference numeral 1 denotes a Hall element, which is a pair of current input terminals T 1 , T 2 and a pair of voltage output terminals T 3 ,
T 4 is provided. A pair of current input terminals T 1 , T 2
When a constant DC current flows between the pair of voltage output terminals T 3 and T 4 between the pair of voltage output terminals T 3 and T 4 when a constant value DC current flows between the pair of voltage output terminals T 3 and T 4. A Hall voltage is generated that is directly proportional to the value. Reference numeral 4 denotes a subtractor as output means, which amplifies the difference (V a −V b ) between the pair of voltage output terminals T 3 and T 4 by a factor of k and outputs the amplified voltage to the output terminal T out . I do. The voltage difference (V a −V b ) is a value that is directly proportional to the current value of the measured system, and the current value of the measured system is measured by reading the output voltage of the output terminal T out . FIG. 8 shows a means for obtaining a magnetic field B that is directly proportional to the current value of the measured system. When a current of the measured system is input to the coil terminals TI 1 and TI 2 , the core 2 changes the current of the measured system. A magnetic field B in direct proportion is obtained, and the magnetic field B is applied to the Hall element 1.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、ホール
素子を用いた従来の電気量測定装置では、ホール素子に
酸化等による経年変化や印加される機械的応力、温度に
よるストレス等により感度（一定電流印加時における出
力電圧値）の変動が生じて測定誤差が生じ易いという問
題があった。However, in a conventional electric quantity measuring device using a Hall element, sensitivity (a constant current application) is applied to the Hall element due to aging due to oxidation or the like, applied mechanical stress, stress due to temperature, and the like. The output voltage value at the time), and a measurement error is likely to occur.
【０００４】そこで、本発明は、ホール素子の経年変化
や外乱の影響による感度の変動を抑えて高精度の測定を
行うことができ電気量測定装置を提供することを目的と
する。Accordingly, an object of the present invention is to provide an electric quantity measuring apparatus capable of performing high-accuracy measurement while suppressing a change in sensitivity due to aging of a Hall element or the influence of disturbance.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
に、本発明は、第１に、１対の電流入力端子、１対の電
圧出力端子及び素子内キャリアに対する斥力又は引力に
より当該キャリアの移動径路を制御するための半導体層
を備え、被測定系の電流値に正比例した磁界が印加され
るホール素子と、前記１対の電流入力端子間に一定値の
直流電流を流す定電流源と、前記一定値の直流電流によ
り前記１対の電流入力端子間に発生する電圧を入力し出
力電圧を前記半導体層に帰還して当該１対の電流入力端
子間に発生する電圧が一定電圧値に保持されるように制
御する演算増幅器と、前記１対の電圧出力端子間に発生
するホール電圧を検出する出力手段とを有することを要
旨とする。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention firstly provides a pair of current input terminals, a pair of voltage output terminals, and a repulsive or attractive force of a carrier in a device. A Hall element including a semiconductor layer for controlling a moving path, to which a magnetic field that is directly proportional to a current value of a measured system is applied; and a constant current source that supplies a constant DC current between the pair of current input terminals. A voltage generated between the pair of current input terminals by the constant DC current is input, and an output voltage is fed back to the semiconductor layer so that the voltage generated between the pair of current input terminals becomes a constant voltage value. The gist of the present invention is to include an operational amplifier that controls the voltage to be held and an output unit that detects a Hall voltage generated between the pair of voltage output terminals.
【０００６】第２に、１対の電流入力端子、１対の電圧
出力端子及び素子内キャリアに対する斥力又は引力によ
り当該キャリアの移動径路を制御するための半導体層を
備え、被測定系の電流値に正比例した磁界が印加される
ホール素子と、反転入力端子に抵抗器を介して一定の直
流電圧が与えられるとともに非反転入力端子にグランド
レベルが与えられ、前記反転入力端子と出力端子の間に
前記１対の電流入力端子が接続されて当該１対の電流入
力端子間に前記一定の直流電圧と前記抵抗器の抵抗値で
規定される一定値の直流電流を流す第１の演算増幅器
と、前記一定値の直流電流により前記１対の電流入力端
子間に発生する電圧を入力し出力電圧を前記半導体層に
帰還して当該１対の電流入力端子間に発生する電圧が一
定電圧値に保持されるように制御する第２の演算増幅器
と、前記１対の電圧出力端子間に発生するホール電圧を
検出する出力手段とを有することを要旨とする。Secondly, the semiconductor device includes a pair of current input terminals, a pair of voltage output terminals, and a semiconductor layer for controlling a moving path of the carrier by a repulsive or attractive force to the carrier in the device. A constant direct-current voltage is applied to the inverting input terminal via a resistor, and a ground level is applied to the non-inverting input terminal.A ground element is applied between the inverting input terminal and the output terminal. A first operational amplifier to which the pair of current input terminals are connected to flow the constant DC voltage and a constant DC current defined by a resistance value of the resistor between the pair of current input terminals; A voltage generated between the pair of current input terminals by the constant DC current is input, and an output voltage is fed back to the semiconductor layer to maintain a voltage generated between the pair of current input terminals at a constant voltage value. Is A second operational amplifier for controlling such, and summarized in that an output means for detecting the Hall voltage generated between the pair of voltage output terminals.
【０００７】第３に、１対の電流入力端子、１対の電圧
出力端子及び素子内キャリアに対する斥力又は引力によ
り当該キャリアの移動径路を制御するための半導体層を
備え、被測定系の交流電流値に正比例した磁界が印加さ
れるホール素子と、前記１対の電流入力端子間に一定値
の直流電流を流す定電流源と、前記１対の電圧出力端子
間に発生するホール電圧を検出する出力手段と、該出力
手段からの出力電圧のゼロクロスを検出してゼロクロス
検出パルスを発生するゼロクロス検出手段と、前記ゼロ
クロス検出パルスの発生時における前記一定値の直流電
流により前記１対の電流入力端子間に発生する電圧をホ
ールドするサンプルホールド手段と、該サンプルホール
ド手段にホールドされた電圧を入力し、出力電圧を前記
半導体層に帰還して前記１対の電流入力端子間に発生す
る電圧が一定電圧値を保持するように制御する演算増幅
器とを有することを要旨とする。Third, there is provided a pair of current input terminals, a pair of voltage output terminals, and a semiconductor layer for controlling a moving path of the carrier by a repulsive or attractive force with respect to the carrier in the element. A Hall element to which a magnetic field in direct proportion to the value is applied, a constant current source for supplying a constant DC current between the pair of current input terminals, and a Hall voltage generated between the pair of voltage output terminals. Output means, zero-cross detection means for detecting a zero-cross of an output voltage from the output means to generate a zero-cross detection pulse, and the pair of current input terminals based on the DC current having a constant value when the zero-cross detection pulse is generated. Sample-and-hold means for holding a voltage generated therebetween, and inputting the voltage held by the sample-and-hold means, and returning an output voltage to the semiconductor layer. And summarized in that voltage generated between the pair of current input terminals and an operational amplifier for controlling so as to maintain a constant voltage value.
【０００８】第４に、前記１対の電流入力端子間に、一
定時間毎に一定値の直流電流と被測定系の電圧値に正比
例した電流とを切換え流入させるとともに、前記１対の
電流入力端子間に一定値の直流電流を流入させている時
は当該一定値の直流電流により前記１対の電流入力端子
間に発生する電圧出力をオン状態に設定して前記出力手
段の出力はオフ状態に設定し、前記１対の電流入力端子
間に被測定系の電圧値に正比例した電流を流入させてい
る時は前記一定値の直流電流により前記１対の電流入力
端子間に発生する電圧出力はオフ状態に設定して前記出
力手段の出力をオン状態に設定するタイミング手段を設
けてなることを要旨とする。Fourthly, a constant DC current and a current directly proportional to the voltage value of the system to be measured are switched and introduced between the pair of current input terminals at regular time intervals, and the pair of current input terminals are supplied. When a constant value of DC current flows between the terminals, the voltage output generated between the pair of current input terminals by the constant value of DC current is set to an ON state, and the output of the output means is set to an OFF state. When a current that is directly proportional to the voltage value of the system under test flows into the pair of current input terminals, a voltage output generated between the pair of current input terminals by the constant DC current. Is characterized in that timing means for setting the output of the output means to the on state by setting the output state to the off state is provided.
【０００９】[0009]
【作用】上記構成において、第１に、定電流源による一
定値の直流電流によりホール素子の１対の電流入力端子
間に発生する電圧が演算増幅器に入力され、その出力電
圧が半導体層に帰還されて１対の電流入力端子間に発生
する電圧が一定電圧値に保持されるように積極的に制御
される。これにより１対の電流入力端子間の抵抗値が一
定、つまりホール素子中のキャリアの移動径路が外乱の
影響を受けにくい半導体内陸部の領域となるように積極
的に制御され、経年変化や外乱の影響による感度の変動
が抑えられて高精度の電流測定を行うことが可能とな
る。In the above arrangement, first, a voltage generated between a pair of current input terminals of the Hall element by a constant value DC current from the constant current source is input to the operational amplifier, and the output voltage is fed back to the semiconductor layer. Then, the voltage generated between the pair of current input terminals is actively controlled so as to be maintained at a constant voltage value. As a result, the resistance value between the pair of current input terminals is positively controlled, that is, the moving path of the carriers in the Hall element is positively controlled so as to be in an inland region of the semiconductor which is hardly affected by disturbance. The fluctuation of the sensitivity due to the influence of the above is suppressed, and the current measurement with high accuracy can be performed.
【００１０】第２に、反転入力端子に抵抗器を介して一
定の直流電圧が与えられ、非反転入力端子にはグランド
レベルが与えられ、その反転入力端子と出力端子との間
にホール素子における１対の電流入力端子が接続された
第１の演算増幅器により、その１対の電流入力端子間に
上記一定の直流電圧と抵抗器の抵抗値で規定される一定
値の直流電流が流される。したがって、しばしば複雑な
構成となる定電流源回路を用いずに１対の電流入力端子
間に一定値の直流電流を流すことが可能となる。Second, a constant DC voltage is applied to an inverting input terminal via a resistor, a ground level is applied to a non-inverting input terminal, and a Hall element is connected between the inverting input terminal and the output terminal. A first operational amplifier to which a pair of current input terminals is connected causes a constant DC current defined by the constant DC voltage and the resistance value of the resistor to flow between the pair of current input terminals. Therefore, it is possible to flow a constant DC current between a pair of current input terminals without using a constant current source circuit that often has a complicated configuration.
【００１１】第３に、交流電流の測定装置において、出
力手段からの出力電圧のゼロクロスが検出され、このゼ
ロクロス検出時における一定値の直流電流により１対の
電流入力端子間に発生する電圧がサンプルホールド手段
にホールドされる。そして、このホールドされた電圧が
演算増幅器に入力され、その出力電圧が半導体層に帰還
されて１対の電流入力端子間に発生する電圧が一定電圧
値に保持されるように積極的に制御される。これにより
交流電流の測定において、過大な磁界が印加された場合
においても、１対の電流入力端子間の抵抗値は、その磁
界の影響を受けることなく一定に制御され、ホール素子
中のキャリアの移動径路が外乱の影響を受けにくい半導
体内陸部の領域に確実に設定される。Third, in the AC current measuring apparatus, a zero cross of the output voltage from the output means is detected, and a voltage generated between a pair of current input terminals by a constant DC current at the time of the zero cross detection is sampled. It is held by the holding means. Then, the held voltage is input to the operational amplifier, and the output voltage is fed back to the semiconductor layer and is actively controlled so that the voltage generated between the pair of current input terminals is maintained at a constant voltage value. You. As a result, in the measurement of the alternating current, even when an excessive magnetic field is applied, the resistance value between the pair of current input terminals is controlled to be constant without being affected by the magnetic field, and the carrier of the Hall element is controlled. The moving path is reliably set in an inland semiconductor region that is less susceptible to disturbances.
【００１２】第４に、被測定系の電流値が磁界に変換さ
れてホール素子に印加されている状態で、タイミング手
段により次のようなタイミング制御が行われる。即ち、
ホール素子における１対の電流入力端子間に、一定時間
毎に一定値の直流電流と被測定系の電圧値に正比例した
電流とが切換え流入される。そして１対の電流入力端子
間に一定値の直流電流が流入している時は、その一定値
の直流電流により１対の電流入力端子間に発生する電圧
がオン状態に設定されて演算増幅器により、その発生電
圧の一定値制御、つまりホール素子中のキャリアの移動
径路を半導体内陸部の領域に積極的に設定する制御が行
われる。また１対の電流入力端子間に被測定系の電圧値
に正比例した電流が流入している時は、出力手段の出力
がオン状態に設定されて電力値演算が行われる。これに
より、電流入力端子間の抵抗値を一定に保ってキャリア
の移動径路を半導体内陸部の領域に積極的に設定する制
御と、電力値演算とが並行して行われて高精度の電力測
定が可能となる。Fourthly, the following timing control is performed by the timing means in a state where the current value of the measured system is converted into a magnetic field and applied to the Hall element. That is,
Between a pair of current input terminals of the Hall element, a constant DC current and a current that is directly proportional to the voltage value of the system to be measured are switched and introduced at regular intervals. When a constant value of DC current flows between the pair of current input terminals, the voltage generated between the pair of current input terminals is set to the ON state by the constant value of DC current, and the voltage is set by the operational amplifier. The control of the generated voltage is performed at a constant value, that is, the control for positively setting the moving path of the carriers in the Hall element in the region of the semiconductor inland portion is performed. When a current that is directly proportional to the voltage value of the measured system flows between the pair of current input terminals, the output of the output means is set to the ON state, and the power value calculation is performed. As a result, the control for positively setting the carrier movement path in the inland region of the semiconductor while keeping the resistance value between the current input terminals constant, and the power value calculation are performed in parallel, and high-precision power measurement is performed. Becomes possible.
【００１３】[0013]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。まず、図５、図６を用いて、後述する各実施例に
共通の本電気量測定装置の基本原理から説明する。図５
はホール素子１の半導体構造を示しており、同図（ａ）
は平面図、同図（ｂ）は同図（ａ）のＹ−Ｙ線断面図で
ある。図５（ｂ）に示すのように、キャリアがホール
素子１の表面近くに移動ルートをとった場合は、酸化、
機械的温度的ストレス、光の影響等を含む外乱を受け、
感度に経年変化を起し易い。一方、キャリアがに示す
ような移動ルートをとった場合は、キャリアは半導体内
陸部を移動するので外乱の影響を受けにくい。そこで素
子内キャリアに対する斥力又は引力により当該キャリア
の移動径路を制御するための半導体層ＬＹ１又はＬＹ２
を設け、その半導体層ＬＹ１又はＬＹ２に電圧を印加し
てキャリアの移動ルートが半導体内陸部になるように制
御する。図６はホール素子１の等価回路を示している。
端子Ｔ1 〜Ｔ4 における相隣る端子間に等価抵抗Ｒa ，
Ｒb ，Ｒc ，Ｒd がそれぞれ形成されている。Ｒo は電
流入力端子Ｔ1 ，Ｔ2 間の抵抗値（Ｒa 〜Ｒd の合成抵
抗値）、ΔＲh は印加磁界Ｂに対応した値である。抵抗
値Ｒo はキャリアの移動ルートにより異った値を示す。
したがって、抵抗値Ｒo が常に一定になるように制御す
れば図５（ｂ）に示すホール素子１中のキャリアは一定
の移動ルートをとることになる。具体的には、電流入力
端子Ｔ1 ，Ｔ2 間に一定電流Ｉo を流した場合、その電
流入力端子Ｔ1 ，Ｔ2 間に発生する電圧Ｖo が一定にな
るように半導体層ＬＹ（ＬＹ１，ＬＹ２の何れか）に電
圧を印加して制御すれば抵抗値Ｒo を一定、つまり半導
体中のキャリアの移動ルートを一定に制御していること
になる。Embodiments of the present invention will be described below with reference to the drawings. First, the basic principle of the electric quantity measuring device common to each embodiment described later will be described with reference to FIGS. FIG.
Shows the semiconductor structure of the Hall element 1, and FIG.
FIG. 3B is a plan view, and FIG. 3B is a sectional view taken along line YY in FIG. As shown in FIG. 5B, when the carrier takes a movement route near the surface of the Hall element 1, oxidation,
Subject to disturbances including mechanical temperature stress, light effects, etc.
Sensitivity tends to change over time. On the other hand, when the carrier takes the movement route shown in the following, since the carrier moves in the semiconductor inland portion, it is hardly affected by disturbance. Therefore, the semiconductor layer LY1 or LY2 for controlling the movement path of the carrier by the repulsive force or the attractive force to the carrier in the element.
And a voltage is applied to the semiconductor layer LY1 or LY2 to control the carrier movement route to the semiconductor inland portion. FIG. 6 shows an equivalent circuit of the Hall element 1.
The equivalent resistance R a between terminals T 1 to T 4 ,
R b , R c , and R d are formed respectively. Ro is a resistance value between the current input terminals T 1 and T 2 (combined resistance value of R a to R d ), and ΔR h is a value corresponding to the applied magnetic field B. The resistance value Ro varies depending on the carrier movement route.
Therefore, if the resistance Ro is controlled to be always constant, the carriers in the Hall element 1 shown in FIG. 5B take a constant moving route. Specifically, when a constant current I o between the current input terminal T 1, T 2, the semiconductor layer so that the voltage V o becomes constant generated across the current input terminal T 1, T 2 LY ( LY1, if applied to control the voltage to either) of LY2 resistance R o a constant, that is, to the movement route of the carriers in the semiconductor is controlled to be constant.
【００１４】図１には、本発明の第１実施例を示す。な
お、図１及び後述の第２〜第４実施例を示す図におい
て、前記図７における機器及び素子等と同一ないし均等
のものは、前記と同一符号を以って示し、重複した説明
を省略する。図１において１０は素子内キャリアの移動
径路を制御するための半導体層ＬＹを備えたホール素子
であり、印加される磁界Ｂは、被測定系の電流値に正比
例している。ＯＰ２は演算増幅器であり、その反転入力
端子には一定値の直流電流Ｉo により１対の電流入力端
子Ｔ1 ，Ｔ2 間に発生する電圧Ｖo が入力され、非反転
入力端子には基準電圧源５により基準電圧Ｖref が与え
られている。基準電圧Ｖref は、一定値の直流電流Ｉo
と所望のキャリア移動径路に対応するホール素子１０の
抵抗値Ｒoにより得られる電圧Ｖref ＝Ｉo ・Ｒo に設
定されている。そして演算増幅器ＯＰ２の出力電圧がホ
ール素子１０の半導体層ＬＹに帰還されている。この演
算増幅器ＯＰ２により、一定値の直流電流Ｉo により１
対の電流入力端子Ｔ1 ，Ｔ2間に発生する電圧Ｖo が基
準電圧Ｖref と等しくなるようにフィードバック制御さ
れ、抵抗値Ｒo が一定、つまりホール素子１０中のキャ
リアの移動径路が一定に制御される。演算増幅器ＯＰ２
の非反転入力端子（＋）、反転入力端子（−）への接続
は、ホール素子１０の半導体構成により入れ替り、負帰
還となるような端子接続がとられる。FIG. 1 shows a first embodiment of the present invention. In FIG. 1 and the drawings showing the second to fourth embodiments described later, those which are the same as or equivalent to those in FIG. 7 are denoted by the same reference numerals as those described above, and redundant description is omitted. I do. In FIG. 1, reference numeral 10 denotes a Hall element provided with a semiconductor layer LY for controlling the movement path of carriers in the element, and the applied magnetic field B is directly proportional to the current value of the system to be measured. OP2 is an operational amplifier, a voltage V o generated between a pair of current input terminals T 1, T 2 by the DC current I o of a predetermined value is input to its inverting input terminal, a reference to a non-inverting input terminal A reference voltage V ref is provided by a voltage source 5. The reference voltage V ref is a constant DC current I o
And the voltage V ref = I o · R o obtained from the resistance value R o of the Hall element 10 corresponding to the desired carrier movement path. Then, the output voltage of the operational amplifier OP2 is fed back to the semiconductor layer LY of the Hall element 10. With the operational amplifier OP2, 1 is generated by the constant value DC current Io.
Voltage V o generated between the current input terminal T 1, T 2 of the pair is feedback controlled so as to be equal to the reference voltage V ref, a constant resistance value R o is, that the movement path of the carrier in the Hall element 10 is constant Is controlled. Operational amplifier OP2
The connection to the non-inverting input terminal (+) and the inverting input terminal (-) is switched by the semiconductor configuration of the Hall element 10, and a terminal connection for negative feedback is taken.
【００１５】このように、本実施例によれば、１対の電
流入力端子Ｔ1 ，Ｔ2 間の抵抗値Ｒo が常に一定になる
ように制御され、ホール素子１０中のキャリアの移動径
路が電気的に積極的に外乱の影響を受けにくい半導体内
陸部の領域に設定される。したがって出力端子Ｔout か
らの出力電圧ｋ（Ｖa −Ｖb ）は経年変化や外乱の影響
を受けず安定したものとなり、精度のよい電流測定が可
能となる。As described above, according to the present embodiment, the resistance value Ro between the pair of current input terminals T 1 and T 2 is controlled to be always constant, and the moving path of the carrier in the Hall element 10 is controlled. Is set in an inland semiconductor region that is less electrically positively affected by disturbance. Therefore, the output voltage k (V a −V b ) from the output terminal T out is stable without being affected by aging or disturbance, and accurate current measurement can be performed.
【００１６】図２には、本発明の第２実施例を示す。本
実施例は、第１実施例と同様に被測定系の電流値を電圧
に変換して測定する電流測定装置である。第１実施例
（図１）では、ホール素子１０における１対の電流入力
端子Ｔ1 ，Ｔ2 間に定電流源により一定値の直流電流Ｉ
o を流すようにしていたが、定電流源回路はしばしば複
雑な構成となる。本実施例は、これを改善したものであ
る。ＯＰ１は第１の演算増幅器であり、その反転入力端
子には基準電圧源６から抵抗器Ｒ１を介して一定の直流
電圧Ｖref ２が与えられ、非反転入力端子はグランドレ
ベルとなっている。そして反転入力端子と出力端子との
間に１対の電流入力端子Ｔ1 ，Ｔ2 が接続されている。
第１の演算増幅器ＯＰ１の作用によりホール素子１０に
おける電流入力端子Ｔ1 の電位は常にグランドレベルに
なり、１対の電流入力端子Ｔ1 ，Ｔ2 間には、一定値の
直流電流Ｉo ＝Ｖref ２／Ｒ１が流れることになる。そ
して第２の演算増幅器ＯＰ２により、この一定値の直流
電流Ｉo により１対の電流入力端子Ｔ1 ，Ｔ2 間に発生
する電圧Ｖo が基準電圧Ｖref ２と等しくなるようにフ
ィードバック制御され、抵抗値Ｒo が一定、つまりホー
ル素子１０中のキャリアの移動径路が一定となるように
制御される。このように、本実施例では、定電流源回路
を用いずに構成されるので、より安価な電気量測定装置
となる。FIG. 2 shows a second embodiment of the present invention. This embodiment is a current measuring device that converts a current value of a system to be measured into a voltage and measures the same as in the first embodiment. In the first embodiment (FIG. 1), a constant value DC current I is applied between a pair of current input terminals T 1 and T 2 of the Hall element 10 by a constant current source.
o , but the constant current source circuit often has a complicated configuration. The present embodiment improves this. OP1 is a first operational amplifier, and its inverting input terminal is supplied with a constant DC voltage Vref2 from the reference voltage source 6 via the resistor R1, and its non-inverting input terminal is at the ground level. A pair of current input terminals T 1 and T 2 are connected between the inverting input terminal and the output terminal.
Will always be the ground level potential of the current input terminal T 1 of the Hall element 10 by the action of the first operational amplifier OP1, Between 1 current input terminal T 1 of the pair, T 2, DC constant value current I o = V ref 2 / R1 will flow. And the second operational amplifier OP2, the DC current I o the voltage V o to be generated between a pair of current input terminals T 1, T 2 of the predetermined value is feedback-controlled to be equal to the reference voltage V ref 2 Is controlled so that the resistance value Ro is constant, that is, the moving path of the carriers in the Hall element 10 is constant. As described above, in this embodiment, since the configuration is performed without using the constant current source circuit, a more inexpensive electric quantity measuring device can be obtained.
【００１７】図３には、本発明の第３実施例を示す。本
実施例は、磁界Ｂを被測定系の交流電流値に正比例させ
て交流電流測定装置としたものである。前記第１、第２
の実施例においては、１対の電流入力端子Ｔ1 ，Ｔ2 間
の抵抗値Ｒo は磁界の影響はないものとして一定値に制
御するようにしたが、過大な磁界が印加された場合は、
Ｒo 自体が磁界の影響を受けることも考えられる。そこ
で、交流電流測定装置の場合、高精度の測定を行うため
には、被測定交流電流値がゼロ（磁界Ｂがゼロ）となる
瞬間に抵抗値Ｒo が一定になるように制御することが必
要になってくる。本実施例は、これを行うための回路を
付設したものである。FIG. 3 shows a third embodiment of the present invention. In this embodiment, an alternating current measuring device is provided in which the magnetic field B is directly proportional to the alternating current value of the system to be measured. The first and second
In the embodiment of the present invention, the resistance Ro between the pair of current input terminals T 1 and T 2 is controlled to a constant value assuming that there is no influence of the magnetic field. However, when an excessive magnetic field is applied, ,
It is also conceivable that Ro itself is affected by the magnetic field. Therefore, in the case of an AC current measuring device, in order to perform highly accurate measurement, it is necessary to control the resistance value Ro to be constant at the moment when the measured AC current value becomes zero (the magnetic field B becomes zero). It becomes necessary. In the present embodiment, a circuit for performing this is additionally provided.
【００１８】図３において、ＯＰ３はコンパレータであ
り、出力手段としての減算器４の出力電圧ｋ（Ｖa −Ｖ
b ）がゼロクロスする毎にＬレベルとＨレベルの信号を
交互に発生する。７はワンショット回路であり、コンパ
レータＯＰ３の出力がＬレベルとＨレベルに入れ替る毎
にゼロクロス検出パルスとしてのワンショットパルスを
発生する。而してコンパレータＯＰ３とワンショット回
路７により、出力手段からの出力電圧のゼロクロスを検
出してゼロクロス検出パルスを発生するゼロクロス検出
手段が構成されている。ワンショット回路７からのワン
ショットパルスはサンプルホールド回路８に入力されて
いる。ワンショットパルスのパルス幅を被測定系の交流
電流周波数の一周期より十分短かくしておけば、サンプ
ルホールド回路８は、磁界Ｂがゼロとなったときの電流
入力端子Ｔ1 ，Ｔ2 間の電圧Ｖoをホールドする。演算
増幅器ＯＰ２は、このサンプルホールド回路８にホール
ドされた電圧Ｖo を入力して、磁界がゼロのときの電流
入力端子Ｔ1 ，Ｔ2 間の抵抗値Ｒo が一定、つまりホー
ル素子１０中のキャリアの移動径路を一定に制御する。In FIG. 3, OP3 is a comparator, and an output voltage k (V a -V) of a subtractor 4 as an output means.
Each time b ) crosses zero, signals of L level and H level are generated alternately. Reference numeral 7 denotes a one-shot circuit, which generates a one-shot pulse as a zero-cross detection pulse every time the output of the comparator OP3 switches between L level and H level. Thus, the comparator OP3 and the one-shot circuit 7 constitute a zero-cross detecting means for detecting a zero-cross of the output voltage from the output means and generating a zero-cross detecting pulse. The one-shot pulse from the one-shot circuit 7 is input to the sample and hold circuit 8. If the pulse width of the one-shot pulse is set to be sufficiently shorter than one cycle of the AC current frequency of the measured system, the sample-and-hold circuit 8 will operate the voltage between the current input terminals T 1 and T 2 when the magnetic field B becomes zero. to hold the V o. Operational amplifier OP2, the sample-hold circuit 8 to enter the held voltage V o, the magnetic field is the resistance value R o between current input terminal T 1, T 2 when the zero constant, i.e. in the Hall element 10 Is controlled to be constant.
【００１９】図４には、本発明の第４実施例を示す。本
実施例は、被測定系の電流と電圧の積、即ち電力を測定
する電力測定装置である。図４の回路構成では、前記図
２の電流測定装置の構成を基にして、これにタイミング
手段としてのタイミング回路９を含むタイミング系を付
設し、電流入力端子Ｔ1 ，Ｔ2 間の抵抗値Ｒo を一定に
保つ制御と、電力値演算とを一定時間毎に交互に行うよ
うにしている。図４において、ＴＶ1 ，ＴＶ2 は被測定
系の電圧を入力する電圧入力端子、抵抗Ｒ２，Ｒ３は被
測定系の電圧を本装置の内部回路に適応したレベルに変
換するアツテネータ、ＯＰ４はバッファ、１１はインバ
ータ、１２は電流入力端子Ｔ1 ，Ｔ2 間の電圧Ｖo をホ
ールドするサンプルホールド回路、１３は減算器４の出
力電圧をホールドするサンプルホールド回路、１４は平
滑回路である。FIG. 4 shows a fourth embodiment of the present invention. The present embodiment is a power measuring device for measuring a product of a current and a voltage of a measured system, that is, a power. In the circuit configuration of FIG. 4, based on the configuration of the current measuring device of FIG. 2, a timing system including a timing circuit 9 as timing means is added thereto, and the resistance value between the current input terminals T 1 and T 2 is added. The control for keeping Ro constant and the calculation of the power value are alternately performed at regular intervals. In FIG. 4, TV 1 and TV 2 are voltage input terminals for inputting a voltage of a system to be measured, resistors R2 and R3 are attenuators for converting the voltage of the system to be measured to a level suitable for an internal circuit of the apparatus, and OP4 is a buffer. , 11 inverter, 12 is a sample hold circuit for holding the voltage V o between the current input terminal T 1, T 2, 13 is a sample hold circuit for holding the output voltage of the subtracter 4, 14 is a smoothing circuit.
【００２０】被測定系の電流値は図８のコアにより磁界
Ｂに変換されてホール素子１０に印加され、電圧値は電
圧入力端子ＴＶ1 ，ＴＶ2 に印加されている。タイミン
グ回路９からＬレベル信号が出力されている時は、ＳＷ
１がオンとなって電流入力端子Ｔ1 ，Ｔ2 間には被測定
系の電圧に正比例した電流が流れ、またサンプルホール
ド回路１３のスイッチがオンとなって減算器４の出力が
サンプルホールド回路１３にホールドされて被測定系の
電力値演算が行われる。その間サンプルホールド回路１
２のスイッチはオフとなって前回のサンプル値を保持し
ている。一方、タイミング回路９からＨレベル信号が出
力されている時は、スイッチＳＷ２がオンとなって電流
入力端子Ｔ1 ，Ｔ2 間には一定値の直流電流Ｉo が流
れ、またサンプルホールド回路１２のスイッチがオンと
なって一定値の直流電流Ｉo により電流入力端子Ｔ1 ，
Ｔ2 間に発生する電圧Ｖo が演算増幅器ＯＰ２に入力さ
れ、電流入力端子Ｔ1 ，Ｔ2 間の抵抗値Ｒo が一定、つ
まりホール素子１０中のキャリアの移動径路を一定にす
る制御が行われる。その間サンプルホールド回路１３の
スイッチはオフである。このように、本実施例では電流
入力端子Ｔ1 ，Ｔ2 間の抵抗値Ｒo を一定に保つ制御
と、電力値演算とが一定時間毎に交互に行われて高精度
の電力測定が可能となる。なお、図４の回路構成は、第
２実施例である図２を基にしているが、本実施例は、第
１、第３の各実施例（図１、図３）にも適用できる。The current value of the system to be measured is converted into a magnetic field B by the core shown in FIG. 8 and applied to the Hall element 10, and the voltage value is applied to the voltage input terminals TV 1 and TV 2 . When the L level signal is output from the timing circuit 9, the SW
1 is turned on, a current that is directly proportional to the voltage of the system to be measured flows between the current input terminals T 1 and T 2 , and the switch of the sample and hold circuit 13 is turned on and the output of the subtracter 4 is changed to the sample and hold circuit 13 and the power value of the measured system is calculated. Meanwhile, sample and hold circuit 1
The switch of No. 2 is turned off and holds the previous sample value. Meanwhile, when it is output an H-level signal from the timing circuit 9, the DC current I o of a predetermined value between the current input terminal T 1, T 2 and the switch SW2 is turned on to flow, also the sample and hold circuit 12 current input terminal T 1 by the DC current I o of a constant value of the switch is turned on,
Voltage V o generated between T 2 is input to the operational amplifier OP2, a constant resistance value R o between current input terminal T 1, T 2, that is, control for constant movement path of the carriers in the Hall element 10 Done. During that time, the switch of the sample hold circuit 13 is off. As described above, in the present embodiment, the control for keeping the resistance Ro between the current input terminals T 1 and T 2 constant and the calculation of the power value are alternately performed at regular time intervals, so that highly accurate power measurement is possible. Becomes Although the circuit configuration of FIG. 4 is based on FIG. 2 which is the second embodiment, the present embodiment can be applied to the first and third embodiments (FIGS. 1 and 3).
【００２１】[0021]
【発明の効果】以上説明したように、各請求項記載の発
明によれば、それぞれ次のような効果を奏する。As described above, according to the inventions described in the claims, the following effects can be obtained.
【００２２】請求項１記載の発明によれば、素子内キャ
リアの移動径路を制御するための半導体層を備え、被測
定系の電流値に正比例した磁界が印加されるホール素子
と、該ホール素子における１対の電流入力端子間に一定
値の直流電流を流す定電流源と、前記一定値の直流電流
により前記１対の電流入力端子間に発生する電圧を入力
し出力電圧を前記半導体層に帰還して当該１対の電流入
力端子間に発生する電圧が一定電圧値に保持されるよう
に制御する演算増幅器とを具備させたため、１対の電流
入力端子間の抵抗値が一定、つまりホール素子中のキャ
リアの移動径路が外乱の影響受けにくい半導体内陸部の
領域となるように積極的に制御されてホール素子の経年
変化や外乱の影響による感度の変動が抑えられ、高精度
の電流測定を行うことができる。According to the first aspect of the present invention, there is provided a Hall element including a semiconductor layer for controlling a moving path of carriers in the element, wherein a magnetic field which is directly proportional to a current value of a measured system is applied; And a constant current source for flowing a constant value of DC current between the pair of current input terminals, and a voltage generated between the pair of current input terminals due to the constant value of DC current, and outputting an output voltage to the semiconductor layer. An operational amplifier that controls the voltage generated between the pair of current input terminals by feedback so as to be maintained at a constant voltage value, so that the resistance value between the pair of current input terminals is constant, The path of movement of carriers in the element is actively controlled so that it is in the semiconductor inland area that is not easily affected by disturbance, and the aging of the Hall element and the fluctuation of sensitivity due to the influence of disturbance are suppressed, and high-precision current measurement is performed. I do Door can be.
【００２３】請求項２記載の発明によれば、反転入力端
子に抵抗器を介して一定の直流電圧が与えられるととも
に非反転入力端子にグランドレベルが与えられ、前記反
転入力端子と出力端子の間にホール素子における１対の
電流入力端子が接続された第１の演算増幅器により、当
該１対の電流入力端子間に前記一定の直流電圧と前記抵
抗器の抵抗値で規定される一定値の直流電流を流すよう
にしたため、請求項１記載の発明の効果に加えてさら
に、複雑な構成となる定電流源回路を用いずに１対の電
流入力端子間に一定値の直流電流を流すことができて、
より安価な電気量測定装置を提供することができる。According to the second aspect of the present invention, a constant DC voltage is applied to the inverting input terminal via the resistor and a ground level is applied to the non-inverting input terminal. A first operational amplifier having a pair of current input terminals of a Hall element connected thereto has a constant DC voltage defined by the constant DC voltage and the resistance value of the resistor between the pair of current input terminals. Since the current is made to flow, in addition to the effect of the first aspect of the present invention, it is possible to make a DC current of a constant value flow between a pair of current input terminals without using a complicated constant current source circuit. Done,
It is possible to provide a less expensive electricity measuring device.
【００２４】請求項３記載の発明によれば、１対の電流
入力端子、１対の電圧出力端子及び素子内キャリアに対
する斥力又は引力により当該キャリアの移動径路を制御
するための半導体層を備え、被測定系の交流電流値に正
比例した磁界が印加されるホール素子と、前記１対の電
流入力端子間に一定値の直流電流を流す定電流源と、前
記１対の電圧出力端子間に発生するホール電圧を検出す
る出力手段と、該出力手段からの出力電圧のゼロクロス
を検出してゼロクロス検出パルスを発生するゼロクロス
検出手段と、前記ゼロクロス検出パルスの発生時におけ
る前記一定値の直流電流により前記１対の電流入力端子
間に発生する電圧をホールドするサンプルホールド手段
と、該サンプルホールド手段にホールドされた電圧を入
力し、出力電圧を前記半導体層に帰還して前記１対の電
流入力端子間に発生する電圧が一定電圧値を保持するよ
うに制御する演算増幅器とを具備せさたため、交流電流
の測定において、過大な磁界が加わった場合においても
１対の電流入力端子間の抵抗値は、その磁界の影響を受
けることなく一定に制御され、ホール素子中のキャリア
の移動径路が外乱の影響を受けにくい半導体内陸部の領
域に確実に設定されてホール素子の経年変化や外乱の影
響による感度の変動が抑えられ、高精度の交流電流測定
を行うことができる。According to the third aspect of the present invention, there is provided a pair of current input terminals, a pair of voltage output terminals, and a semiconductor layer for controlling a moving path of the carrier by a repulsive or attractive force to the carrier in the element. A Hall element to which a magnetic field in direct proportion to the alternating current value of the system to be measured is applied, a constant current source for flowing a constant value of DC current between the pair of current input terminals, and a voltage generated between the pair of voltage output terminals Output means for detecting a Hall voltage to be generated, zero-cross detection means for detecting a zero-cross of the output voltage from the output means to generate a zero-cross detection pulse, and the DC current having the constant value when the zero-cross detection pulse is generated. Sample-and-hold means for holding a voltage generated between a pair of current input terminals; input of the held voltage to the sample-and-hold means; An operational amplifier that controls the voltage generated between the pair of current input terminals by feeding back to the semiconductor layer so as to maintain a constant voltage value. In such a case, the resistance value between the pair of current input terminals is controlled to be constant without being affected by the magnetic field, and the moving path of the carrier in the Hall element is in a region of the semiconductor inland portion which is hardly affected by disturbance. It is set reliably, fluctuations in sensitivity due to aging of the Hall element and influences of disturbances are suppressed, and highly accurate AC current measurement can be performed.
【００２５】請求項４記載の発明によれば、ホール素子
における１対の電流入力端子間に、一定時間毎に一定値
の直流電流と被測定系の電圧値に正比例した電流とを切
換え流入させるとともに、前記１対の電流入力端子間に
一定値の直流電流を流入させている時は当該一定値の直
流電流により前記１対の電流入力端子間に発生する電圧
出力をオン状態に設定して出力手段の出力はオフ状態に
設定し、前記１対の電流入力端子間に被測定系の電圧値
に正比例した電流を流入させている時は前記一定値の直
流電流により前記１対の電流入力端子間に発生する電圧
出力はオフ状態に設定して前記出力手段の出力をオン状
態に設定するタイミング手段を設けたため、１対の電流
入力端子間の抵抗値を一定に保ってキャリアの移動径路
を半導体内陸部の領域に積極的に設定する制御と、電力
値演算とを並行して行うことができて高精度の電力測定
を行うことができる。According to the fourth aspect of the present invention, a constant DC current and a current directly proportional to the voltage value of the system to be measured are switched and introduced between the pair of current input terminals of the Hall element at regular intervals. In addition, when a constant value of DC current is flowing between the pair of current input terminals, a voltage output generated between the pair of current input terminals by the constant value of DC current is set to an ON state. The output of the output means is set to an off state, and when a current directly proportional to the voltage value of the system to be measured is caused to flow between the pair of current input terminals, the pair of current inputs is generated by the constant DC current. Timing means for setting the voltage output generated between the terminals to the off state and setting the output of the output means to the on state is provided, so that the resistance value between the pair of current input terminals is kept constant and the moving path of the carrier is maintained. The semiconductor inland It is possible to perform the control for setting aggressively frequency, and can be performed in parallel and an operation power value highly accurate power measurement.
【図１】本発明に係る電気量測定装置の第１実施例を示
す回路図である。FIG. 1 is a circuit diagram showing a first embodiment of an electric quantity measuring device according to the present invention.
【図２】本発明の第２実施例を示す回路図である。FIG. 2 is a circuit diagram showing a second embodiment of the present invention.
【図３】本発明の第３実施例を示す回路図である。FIG. 3 is a circuit diagram showing a third embodiment of the present invention.
【図４】本発明の第４実施例を示す回路図である。FIG. 4 is a circuit diagram showing a fourth embodiment of the present invention.
【図５】上記各実施例に共通のホール素子の半導体構造
を示す図である。FIG. 5 is a diagram showing a semiconductor structure of a Hall element common to each of the above embodiments.
【図６】ホール素子の等価回路を示す図である。FIG. 6 is a diagram showing an equivalent circuit of a Hall element.
【図７】従来の電気量測定装置の回路図である。FIG. 7 is a circuit diagram of a conventional electric quantity measuring device.
【図８】電流値に正比例した磁界を得る手段であるコア
を示す図である。FIG. 8 is a diagram showing a core which is a means for obtaining a magnetic field directly proportional to a current value.
３ 定電流源 ４ 出力手段となる減算器 ６ 一定の直流電圧を供給する基準電圧源 ７ コンパレータと共にゼロクロス検出手段を構成する
ワンショット回路 ８，１２，１３ サンプルホールド回路（サンプルホー
ルド手段） ９ タイミング回路（タイミング手段） １０ ホール素子 ＬＹ１，ＬＹ２ 半導体層 ＯＰ１ 第１の演算増幅器 ＯＰ２ 第２の演算増幅器 ＯＰ３ コンパレータ Ｒ１ 抵抗器 Ｔ1 ，Ｔ2 １対の電流入力端子 Ｔ3 ，Ｔ4 １対の電圧出力端子 ＴＶ1 ，ＴＶ2 被測定系の電圧が入力する電圧入力端
子 Ｔout 出力端子Reference Signs List 3 Constant current source 4 Subtractor serving as output means 6 Reference voltage source supplying a constant DC voltage 7 One shot circuit constituting zero cross detection means together with comparator 8, 12, 13 Sample hold circuit (sample hold means) 9 Timing circuit (timing means) 10 Hall element LY1, LY2 semiconductor layer OP1 first operational amplifier OP2 second operational amplifier OP3 comparator R1 resistor T 1, T 2 1 pair of current input terminals T 3, T 4 1-to-voltage output Terminals TV 1 , TV 2 Voltage input terminal to which the voltage of the measured system is input T out output terminal
フロントページの続き (72)発明者 藤井 佳苗 神奈川県川崎市幸区柳町70番地 株式会 社東芝 柳町工場内 (56)参考文献 特開 平５−223848（ＪＰ，Ａ) 特開 平７−244083（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01R 15/20 G01R 21/08 G01R 33/07 H01L 43/06 Continuation of the front page (72) Inventor Kanae Fujii 70 Yanagimachi, Saiwai-ku, Kawasaki-shi, Kanagawa Prefecture Inside the Yanagimachi Plant, Toshiba Corporation (56) References JP-A-5-223848 (JP, A) JP-A-7-244083 ( JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G01R 15/20 G01R 21/08 G01R 33/07 H01L 43/06
Claims (4)
子及び素子内キャリアに対する斥力又は引力により当該
キャリアの移動径路を制御するための半導体層を備え、
被測定系の電流値に正比例した磁界が印加されるホール
素子と、前記１対の電流入力端子間に一定値の直流電流
を流す定電流源と、前記一定値の直流電流により前記１
対の電流入力端子間に発生する電圧を入力し出力電圧を
前記半導体層に帰還して当該１対の電流入力端子間に発
生する電圧が一定電圧値に保持されるように制御する演
算増幅器と、前記１対の電圧出力端子間に発生するホー
ル電圧を検出する出力手段とを有することを特徴とする
電気量測定装置。1. A semiconductor layer for controlling a moving path of a carrier by a repulsive force or an attractive force with respect to a carrier in a device, comprising: a pair of current input terminals; a pair of voltage output terminals;
A Hall element to which a magnetic field that is directly proportional to the current value of the system to be measured is applied; a constant current source that supplies a constant DC current between the pair of current input terminals;
An operational amplifier that inputs a voltage generated between a pair of current input terminals, feeds an output voltage back to the semiconductor layer, and controls the voltage generated between the pair of current input terminals to be maintained at a constant voltage value; Output means for detecting a Hall voltage generated between the pair of voltage output terminals.
子及び素子内キャリアに対する斥力又は引力により当該
キャリアの移動径路を制御するための半導体層を備え、
被測定系の電流値に正比例した磁界が印加されるホール
素子と、反転入力端子に抵抗器を介して一定の直流電圧
が与えられるとともに非反転入力端子にグランドレベル
が与えられ、前記反転入力端子と出力端子の間に前記１
対の電流入力端子が接続されて当該１対の電流入力端子
間に前記一定の直流電圧と前記抵抗器の抵抗値で規定さ
れる一定値の直流電流を流す第１の演算増幅器と、前記
一定値の直流電流により前記１対の電流入力端子間に発
生する電圧を入力し出力電圧を前記半導体層に帰還して
当該１対の電流入力端子間に発生する電圧が一定電圧値
に保持されるように制御する第２の演算増幅器と、前記
１対の電圧出力端子間に発生するホール電圧を検出する
出力手段とを有することを特徴とする電気量測定装置。2. A semiconductor layer for controlling a moving path of a carrier by a pair of current input terminals, a pair of voltage output terminals, and a repulsive force or an attractive force to a carrier in the element,
A Hall element to which a magnetic field in direct proportion to the current value of the system to be measured is applied, and a constant DC voltage is applied to an inverting input terminal via a resistor, and a ground level is applied to a non-inverting input terminal. And between the output terminal
A first operational amplifier to which a pair of current input terminals are connected to flow the constant DC voltage and a constant DC current defined by the resistance value of the resistor between the pair of current input terminals; A voltage generated between the pair of current input terminals by a DC current having a value is input, an output voltage is fed back to the semiconductor layer, and a voltage generated between the pair of current input terminals is maintained at a constant voltage value. And an output means for detecting a Hall voltage generated between the pair of voltage output terminals.
子及び素子内キャリアに対する斥力又は引力により当該
キャリアの移動径路を制御するための半導体層を備え、
被測定系の交流電流値に正比例した磁界が印加されるホ
ール素子と、前記１対の電流入力端子間に一定値の直流
電流を流す定電流源と、前記１対の電圧出力端子間に発
生するホール電圧を検出する出力手段と、該出力手段か
らの出力電圧のゼロクロスを検出してゼロクロス検出パ
ルスを発生するゼロクロス検出手段と、前記ゼロクロス
検出パルスの発生時における前記一定値の直流電流によ
り前記１対の電流入力端子間に発生する電圧をホールド
するサンプルホールド手段と、該サンプルホールド手段
にホールドされた電圧を入力し、出力電圧を前記半導体
層に帰還して前記１対の電流入力端子間に発生する電圧
が一定電圧値を保持するように制御する演算増幅器とを
有することを特徴とする電流量測定装置。3. A semiconductor layer comprising: a pair of current input terminals; a pair of voltage output terminals; and a semiconductor layer for controlling a moving path of the carrier by a repulsive or attractive force to the carrier in the device.
A Hall element to which a magnetic field in direct proportion to the alternating current value of the system to be measured is applied, a constant current source for flowing a constant value of DC current between the pair of current input terminals, and a voltage generated between the pair of voltage output terminals Output means for detecting a Hall voltage to be generated, zero-cross detection means for detecting a zero-cross of the output voltage from the output means to generate a zero-cross detection pulse, and the DC current having the constant value when the zero-cross detection pulse is generated. Sample-and-hold means for holding a voltage generated between a pair of current input terminals; input of the held voltage to the sample-and-hold means; and an output voltage fed back to the semiconductor layer to provide a voltage between the pair of current input terminals. And an operational amplifier for controlling the voltage generated in the circuit to maintain a constant voltage value.
毎に一定値の直流電流と被測定系の電圧値に正比例した
電流とを切換え流入させるとともに、前記１対の電流入
力端子間に一定値の直流電流を流入させている時は当該
一定値の直流電流により前記１対の電流入力端子間に発
生する電圧出力をオン状態に設定して前記出力手段の出
力はオフ状態に設定し、前記１対の電流入力端子間に被
測定系の電圧値に正比例した電流を流入させている時は
前記一定値の直流電流により前記１対の電流入力端子間
に発生する電圧出力はオフ状態に設定して前記出力手段
の出力をオン状態に設定するタイミング手段を設けてな
ることを特徴とする請求項１，２又は３記載の電気量測
定装置。4. A constant DC current and a current that is directly proportional to the voltage value of the system under test are switched between a pair of current input terminals at regular time intervals, and between the pair of current input terminals. When a DC current of a constant value flows into the pair, the voltage output generated between the pair of current input terminals by the DC current of the constant value is set to an ON state, and the output of the output means is set to an OFF state. When a current that is directly proportional to the voltage value of the system to be measured flows between the pair of current input terminals, the voltage output generated between the pair of current input terminals by the constant DC current is turned off. 4. The electric quantity measuring device according to claim 1, further comprising timing means for setting the output to an ON state by setting the state to an ON state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06065938A JP3133210B2 (en) | 1994-04-04 | 1994-04-04 | Electric quantity measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06065938A JP3133210B2 (en) | 1994-04-04 | 1994-04-04 | Electric quantity measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07280844A JPH07280844A (en) | 1995-10-27 |
| JP3133210B2 true JP3133210B2 (en) | 2001-02-05 |
Family
ID=13301412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06065938A Expired - Fee Related JP3133210B2 (en) | 1994-04-04 | 1994-04-04 | Electric quantity measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3133210B2 (en) |
-
1994
- 1994-04-04 JP JP06065938A patent/JP3133210B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07280844A (en) | 1995-10-27 |
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