JP3111858B2 - Piezoelectric sensor - Google Patents
Piezoelectric sensorInfo
- Publication number
- JP3111858B2 JP3111858B2 JP07181675A JP18167595A JP3111858B2 JP 3111858 B2 JP3111858 B2 JP 3111858B2 JP 07181675 A JP07181675 A JP 07181675A JP 18167595 A JP18167595 A JP 18167595A JP 3111858 B2 JP3111858 B2 JP 3111858B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- piezoelectric
- package
- acceleration sensor
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば加速度また
は振動などを検出する圧電センサに関する。The present invention relates to a piezoelectric sensor for detecting, for example, acceleration or vibration.
【０００２】[0002]
【従来の技術】圧電センサのうち、加速度を検出する加
速度センサでは、プリント基板に対する実装形態とし
て、加速度センサの感度軸をプリント基板に対して、ほ
ぼ平行に設定する場合と、ほぼ垂直に設定する場合とが
ある。2. Description of the Related Art Among the piezoelectric sensors, in an acceleration sensor for detecting acceleration, as a mounting form on a printed circuit board, a sensitivity axis of the acceleration sensor is set substantially parallel to the printed circuit board, and set substantially vertically. There are cases.
【０００３】通常、加速度センサは、プリント基板に対
して半田などにより固定されるが、半田付け処理時にお
いて加速度センサが倒れるなどして、姿勢が変わると、
加速度センサの感度軸の方向が狂うことになるので、半
田付け処理時に加速度センサの姿勢の崩れを防止する必
要がある。Normally, an acceleration sensor is fixed to a printed circuit board by soldering or the like. However, if the posture of the acceleration sensor changes during the soldering process due to a fall or the like,
Since the direction of the sensitivity axis of the acceleration sensor is out of order, it is necessary to prevent the posture of the acceleration sensor from being collapsed during the soldering process.
【０００４】このような理由から、加速度センサの外形
を偏平な直方体形状に形成し、加速度センサの実装時の
姿勢はその長方形の端面を横長とする状態にしている。
ちなみに、従来の加速度センサの端面の縦横の寸法比
は、一般的に、ほぼ０．５〜０．７：１に設定されてい
る。For this reason, the external shape of the acceleration sensor is formed in a flat rectangular parallelepiped shape, and the posture of the acceleration sensor when mounted is such that the rectangular end face is horizontally long.
Incidentally, the vertical and horizontal dimensional ratio of the end face of the conventional acceleration sensor is generally set to approximately 0.5 to 0.7: 1.
【０００５】そして、従来では、加速度センサについ
て、外形を偏平な直方体形状にしながら、その感度軸の
方向別に構造の異なる二種類のものを製作している。つ
まり、感度軸の方向を長方形の端面の長辺に対して、平
行に設定する構造と、垂直に設定する構造とである。[0005] Conventionally, two types of acceleration sensors having different structures depending on the direction of the sensitivity axis are manufactured while the external shape is a flat rectangular parallelepiped shape. That is, a structure in which the direction of the sensitivity axis is set parallel to the long side of the rectangular end face, and a structure in which the direction is set perpendicular to the long side of the rectangular end face.
【０００６】[0006]
【発明が解決しようとする課題】ところで、上記従来の
加速度センサでは、感度軸の方向別に構造の異なる二種
類のものを製作する必要があるので、製造コストが高く
つくだけでなく、製造後の保管に関するコストが高くつ
くなど、製品価格の高騰を余儀なくされている。However, in the above-mentioned conventional acceleration sensor, it is necessary to manufacture two types of structures having different structures depending on the direction of the sensitivity axis. The cost of storage is high and the price of products has to rise.
【０００７】したがって、本発明は、プリント基板に対
する実装時に要求される感度軸の方向に応じて姿勢を変
えるだけで対応できるようにしながら、どの姿勢でも座
りがよくて安定性が高い圧電センサの提供を目的として
いる。Accordingly, the present invention provides a piezoelectric sensor that can be seated in any posture and has high stability while changing the posture only in accordance with the direction of the sensitivity axis required for mounting on a printed circuit board. It is an object.
【０００８】[0008]
【課題を解決するための手段】本発明は、特定の感度軸
を有する圧電素子をパッケージで囲んだ構成の圧電セン
サにおいて、次のような構成をとる。According to the present invention, a piezoelectric sensor having a configuration in which a piezoelectric element having a specific sensitivity axis is surrounded by a package has the following configuration.
【０００９】本発明の請求項１に係る圧電センサは、前
記パッケージの外形が、直方体形状に形成されていると
ともに、その両端面の縦横の寸法比が１：１に設定され
ており、前記両端面及び両端側周面に前記圧電素子の外
部引出電極が層状に形成されている。 [0009] The piezoelectric sensor according to claim 1 of the present invention, the outer shape of the package, with formed in a rectangular parallelepiped shape, dimensional ratio of the aspect of the end faces is 1: is set to 1, the opposite ends Outside of the piezoelectric element
Part extraction electrodes are formed in layers.
【００１０】本発明の請求項２に係る圧電センサは、前
記圧電素子が、上下に接合した二枚一対の短冊形状の圧
電セラミック板からなり、前記パッケージが、圧電素子
の長手方向に沿う少なくとも一端部位を上下から挟持し
て該圧電素子を架橋状に支持する二つの挟持部品と、こ
の挟持部品の両側に取り付けられて前記圧電素子の左右
両側面を覆う二つの蓋部品とからなり、かつ、前記パッ
ケージの外形が、直方体形状に形成されているととも
に、その両端面の縦横の寸法がほぼ１：１に設定されて
おり、前記両端面及び両端側周面に前記圧電素子の外部
引出電極が層状に形成されている。 According to a second aspect of the present invention, in the piezoelectric sensor, the piezoelectric element comprises a pair of strip-shaped piezoelectric ceramic plates joined up and down, and the package has at least one end along a longitudinal direction of the piezoelectric element. It consists of two holding parts for holding the portion from above and below and supporting the piezoelectric element in a cross-linking manner, and two lid parts attached to both sides of the holding part and covering both left and right sides of the piezoelectric element, and The outer shape of the package is formed in a rectangular parallelepiped shape, and the vertical and horizontal dimensions of both end surfaces are set to approximately 1: 1.
The outer surface of the piezoelectric element is provided on both end surfaces and peripheral surfaces on both end sides.
The extraction electrodes are formed in layers.
【００１１】[0011]
【発明の実施の形態】以下、本発明の詳細を図１ないし
図５に示す実施例に基づいて説明する。ここでは、圧電
センサとして加速度を検出する加速度センサを例に挙げ
ている。図１ないし図５は本発明の一実施例にかかり、
図１は、加速度センサを一部破断して示す斜視図、図２
は、同センサの分解斜視図、図３は、加速度の作用時に
おける圧電素子の変形状態を模式的に示す説明図、図４
は、加速度センサのプリント基板に対する実装時の姿勢
を示す説明図、図５は、加速度センサに関するテープキ
ャリアを示す説明図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the embodiments shown in FIGS. Here, an acceleration sensor that detects acceleration is taken as an example of the piezoelectric sensor. 1 to 5 relate to an embodiment of the present invention,
FIG. 1 is a perspective view showing the acceleration sensor with a part cut away, and FIG.
FIG. 3 is an exploded perspective view of the sensor, and FIG. 3 is an explanatory view schematically showing a deformed state of the piezoelectric element when an acceleration is applied.
Is an explanatory view showing a posture of the acceleration sensor with respect to the printed board at the time of mounting, and FIG. 5 is an explanatory view showing a tape carrier relating to the acceleration sensor.
【００１２】図例の加速度センサ１は、バイモルフ型と
呼ばれる圧電素子２と、パッケージ３と、外部引出電極
４，４とで構成されており、感度軸の方向は、矢印で示
すように圧電素子２の厚み方向（下記参照）と平行にな
っている。The illustrated acceleration sensor 1 is composed of a piezoelectric element 2 called a bimorph type, a package 3, and external extraction electrodes 4 and 4. The direction of the sensitivity axis is as shown by an arrow. 2 is parallel to the thickness direction (see below).
【００１３】圧電素子２は、共に短冊形状とされ主表面
にそれぞれ信号取出電極６，６及び中間電極７，７が形
成された一対の圧電セラミック板５，５を備え、これら
の中間電極７，７どうしを対面接合したものである。こ
こでは圧電セラミック板５，５の積層方向を圧電素子２
の厚み方向と言う。圧電セラミック板５，５それぞれ
は、長手方向において境界線Ｌで区分けされる３つの部
分５ａ，５ｂ，５ｂを有しており、各部分５ａ，５ｂ，
５ｂは、加速度Ｇの作用に伴って発生する応力が「引っ
張り」と「圧縮」とに異なるようになっている。中央部
分５ａ及び端部分５ｂ，５ｂのそれぞれは、各圧電セラ
ミック板４の板厚方向に沿いつつ互いに逆となる向き
（図では、矢印Ａ，ＢとＣ，Ｄで示す）に従って分極さ
れているとともに、中央部分５ａそれぞれにおける分極
の向きＡ及びＣは互いに近ずきあう内向きとされる一
方、端部分５ｂ，５ｂにおける分極の向きＢ及びＤは互
いに遠ざかる外向きとされている。The piezoelectric element 2 includes a pair of piezoelectric ceramic plates 5, 5 each having a strip shape and having signal extraction electrodes 6, 6 and intermediate electrodes 7, 7 formed on the main surface thereof. 7 were joined face to face. Here, the lamination direction of the piezoelectric ceramic plates 5 and 5 is
Thickness direction. Each of the piezoelectric ceramic plates 5, 5 has three portions 5a, 5b, 5b separated by a boundary line L in the longitudinal direction, and each of the portions 5a, 5b,
5b, the stress generated by the action of the acceleration G is different between “tensile” and “compressive”. Each of the central portion 5a and the end portions 5b, 5b is polarized according to directions (indicated by arrows A, B and C, D in the figure) opposite to each other along the thickness direction of each piezoelectric ceramic plate 4. At the same time, the polarization directions A and C in the central portion 5a are inwardly approaching each other, while the polarization directions B and D in the end portions 5b, 5b are outwardly away from each other.
【００１４】パッケージ３は、圧電素子２の長手方向に
沿う両端を上下から挟持する側面視ほぼ「コ」字形の二
つの挟持部品８，９と、この挟持部品８，９の左右両側
に取り付けられて圧電素子２の左右両側面を覆う縦横断
面ほぼ「コ」字形の二つの蓋部品１０，１１とからな
る。このパッケージ３の全体の外形としては、直方体形
状に形成されており、その端面の縦横の寸法比がほぼ
１：１つまりほぼ正方形に設定されている。なお、端面
の縦寸法をＡとし、横寸法をＢとした場合、Ａ／Ｂを
「１」つまりＡ＝Ｂに設定するのが理想的であるが、Ａ
／Ｂを「０．９〜１．１」の範囲に設定したものも含
む。The package 3 has two holding parts 8, 9 having a substantially U-shape in side view for holding both ends along the longitudinal direction of the piezoelectric element 2 from above and below, and is attached to the left and right sides of the holding parts 8, 9. And two lid parts 10 and 11 having a substantially "U" -shaped vertical and horizontal cross section that cover the left and right side surfaces of the piezoelectric element 2. The overall outer shape of the package 3 is formed in a rectangular parallelepiped shape, and the vertical and horizontal dimensional ratio of the end face is set to approximately 1: 1, that is, approximately square. If the vertical dimension of the end face is A and the horizontal dimension is B, it is ideal to set A / B to “1”, that is, A = B.
/ B in the range of “0.9 to 1.1” is also included.
【００１５】外部引出電極４，４は、圧電素子２の長手
方向両端面を含むパッケージ３の長手方向両端面に層状
に形成されているとともに、パッケージ３の長手方向両
端側の周面にも層状に形成されている。この一方の外部
引出電極４が、各圧電セラミック板５，５上に形成され
た信号取出電極６，６の一方に、また、他方の外部引出
電極４が残りの信号取出電極６に、それぞれ接続されて
いる。The external extraction electrodes 4 and 4 are formed in layers on both ends in the longitudinal direction of the package 3 including both ends in the longitudinal direction of the piezoelectric element 2, and are also formed in layers on the peripheral surfaces on both ends in the longitudinal direction of the package 3. Is formed. One of the external extraction electrodes 4 is connected to one of the signal extraction electrodes 6 and 6 formed on each of the piezoelectric ceramic plates 5 and 5, and the other external extraction electrode 4 is connected to the remaining signal extraction electrodes 6. Have been.
【００１６】次に、上述した加速度センサ１の動作およ
び作用を説明する。加速度Ｇが作用することに伴い、圧
電素子２が図３に示すように上向きに湾曲すると、この
圧電素子２の撓み方向外側に位置する圧電セラミック板
５の中央部分５ａにおける外側主表面には分極の向きＡ
と引っ張り応力Ｐｔとの関係に基づいて正（＋）の電荷
が発生し、また、その端部分５ｂにおける外側主表面で
も分極の向きＢ及び圧縮応力Ｐｃの関係から正の電荷が
発生する。Next, the operation and operation of the above-described acceleration sensor 1 will be described. When the piezoelectric element 2 is bent upward as shown in FIG. 3 due to the action of the acceleration G, the outer main surface of the central portion 5a of the piezoelectric ceramic plate 5 located outside the bending direction of the piezoelectric element 2 has polarization. Direction A
A positive (+) charge is generated based on the relationship between and the tensile stress Pt, and a positive charge is also generated on the outer main surface of the end portion 5b from the relationship between the polarization direction B and the compressive stress Pc.
【００１７】そこで、この圧電セラミック板５の中央部
分５ａ及び端部分５ｂそれぞれの外側主表面に発生した
正の電荷は互いに強めあいながら、信号取出電極６から
外部引出電極４へと伝わることになる。さらに、このと
き、圧電素子２の撓み方向内側に位置する圧電セラミッ
ク板５の中央部分５ａにおける外側主表面には分極の向
きＣと圧縮応力Ｐｃとの関係から負（−）の電荷が発生
し、また、その端部分５ｂにおける外側主表面にも分極
の向きＤと引っ張り応力Ｐｔとの関係から負の電荷が発
生することになり、これら負の電荷は信号取出電極６か
ら外部引出電極４へと伝わることになる。Therefore, the positive charges generated on the outer main surfaces of the central portion 5a and the end portion 5b of the piezoelectric ceramic plate 5 are transmitted from the signal extracting electrode 6 to the external extracting electrode 4 while strengthening each other. . Further, at this time, a negative (-) charge is generated on the outer main surface of the central portion 5a of the piezoelectric ceramic plate 5 located inside the bending direction of the piezoelectric element 2 due to the relationship between the polarization direction C and the compressive stress Pc. Negative charges are also generated on the outer main surface of the end portion 5b due to the relationship between the direction of polarization D and the tensile stress Pt, and these negative charges are transferred from the signal extraction electrode 6 to the external extraction electrode 4. Will be transmitted.
【００１８】なお、加速度Ｇの作用に伴って圧電素子２
を構成する各圧電セラミック板５，５に発生する応力が
「引っ張り」と「圧縮」とに分かれる理由を説明する。
まず、加速度センサ１の全体に対して加速度Ｇが作用す
ると、圧電素子２を固定支持するパッケージ３に対して
は加速度Ｇが直接的に作用することになり、これらのパ
ッケージ３は共に加速度Ｇの作用方向に沿って移動しよ
うとする。ところが、この際においても、圧電素子２に
対して直接的な加速度Ｇが作用することはないから、圧
電素子２は加速度Ｇの作用する以前における状態をその
まま維持し続けようとし、この圧電素子２には加速度Ｇ
の作用に伴って発生した慣性力が作用することになる。
そこで、圧電素子２を構成する各圧電セラミック板５，
５の端部分５ｂ，５ｂそれぞれはパッケージ３と共に移
動しようとする一方、各々の中央部分５ａそれぞれは当
初位置のまま残ろうとする結果、この圧電素子２は加速
度Ｇの作用側に向かって撓んだ湾曲形状（図では、上向
きの凸形状）となるように変形する。そのため、図３で
示すように、撓み方向外側（図では、上側）に位置する
圧電セラミック板５の中央部分５ａには引っ張り応力Ｐ
ｔ、また、その端部分５ｂには圧縮応力Ｐｃが現れるこ
とになる一方、撓み方向内側（図では、下側）に位置す
る圧電セラミック板５の中央部分５ａには圧縮応力Ｐ
ｃ、また、その端部分５ｂには引っ張り応力Ｐｔが現れ
ることになる。Note that the piezoelectric element 2
The reason why the stress generated in each of the piezoelectric ceramic plates 5 and 5 is divided into “tensile” and “compressive” will be described.
First, when the acceleration G acts on the entire acceleration sensor 1, the acceleration G directly acts on the package 3 which fixedly supports the piezoelectric element 2. Attempts to move along the direction of action. However, even at this time, since the acceleration G does not act directly on the piezoelectric element 2, the piezoelectric element 2 tries to keep the state before the acceleration G acts, and Acceleration G
The inertial force generated due to the action of acts.
Therefore, each of the piezoelectric ceramic plates 5,
Each of the end portions 5b of the piezoelectric element 5 is bent toward the working side of the acceleration G as a result of each of the end portions 5b and 5b trying to move together with the package 3 while each of the central portions 5a is trying to remain at the initial position. It is deformed to have a curved shape (upward convex shape in the figure). Therefore, as shown in FIG. 3, a tensile stress P is applied to the central portion 5a of the piezoelectric ceramic plate 5 located on the outer side in the bending direction (upper side in the figure).
At the end portion 5b, the compressive stress Pc appears, while the compressive stress Pc is applied to the central portion 5a of the piezoelectric ceramic plate 5 located on the inner side in the bending direction (the lower side in the figure).
c, and a tensile stress Pt appears at the end portion 5b.
【００１９】以上、詳細に説明した加速度センサ１は、
プリント基板１２に対して、図４（ａ）および（ｂ）に
示すように、設計上、要求される感度軸の方向に応じて
四面のうちの所要の面を上向きとする姿勢で実装され
る。この圧電センサ１の姿勢によって感度軸の方向が特
定される。いずれの面を上向きとする姿勢で実装して
も、加速度センサ１がその半田付け処理の過程で倒れて
姿勢が変わるといった不具合が全く起こらない。なお、
図４において、１ａは上面、１ｂは下面、１ｃは右側
面、１ｄは左側面を示しており、感度軸の方向は、図４
（ａ）の場合、矢印のようにプリント基板１２に対して
平行な方向に、また、図４（ｂ）の場合、垂直な方向
に、それぞれ沿わされている。The acceleration sensor 1 described in detail above is
As shown in FIGS. 4A and 4B, the printed circuit board 12 is mounted in a posture in which a required surface of the four surfaces faces upward according to the direction of the sensitivity axis required in design. . The direction of the sensitivity axis is specified by the attitude of the piezoelectric sensor 1. Even if any surface is mounted in an upright posture, there is no problem that the acceleration sensor 1 falls down during the soldering process and the posture changes. In addition,
In FIG. 4, 1a indicates an upper surface, 1b indicates a lower surface, 1c indicates a right side surface, and 1d indicates a left side surface.
In the case of (a), it is along the direction parallel to the printed circuit board 12 as shown by the arrow, and in the case of FIG. 4 (b), it is along the perpendicular direction.
【００２０】このような加速度センサ１の実装工程で
は、例えば図５に示すようなテープキャリア２０が用い
られる。つまり、テープキャリア２０は、上記加速度セ
ンサ１を複数個、個別に収納するものであり、長手方向
の所定間隔おきに加速度センサ１の外形に近似したほぼ
正方形の凹部２３を有するエンボステープ２１と、この
エンボステープ２１の上面に貼着されて前述の凹部２３
を閉塞する上側テープ２２とからなる。そして、各凹部
２３に対しては、総ての加速度センサ１がその感度軸の
方向を図中の矢印で示すように一定の方向に揃えた状態
で収納される。つまり、プリント基板などに対して搭載
するときの加速度センサ１の感度軸の方向に応じて、例
えば加速度センサ１の左側面１ｄをテープキャリア２０
の凹部２３の開口に位置させるなどして、テープキャリ
ア２０の凹部２３に対する加速度センサ１の収納姿勢を
決定すればよいのである。In the mounting process of such an acceleration sensor 1, for example, a tape carrier 20 as shown in FIG. 5 is used. In other words, the tape carrier 20 is configured to individually house a plurality of the acceleration sensors 1, and has an embossed tape 21 having a substantially square concave portion 23 that approximates the outer shape of the acceleration sensor 1 at predetermined intervals in the longitudinal direction. The embossed tape 21 is adhered to the upper surface of the
And an upper tape 22 that closes off the tape. Then, all the acceleration sensors 1 are accommodated in each of the concave portions 23 in a state where the directions of the sensitivity axes thereof are aligned in a certain direction as indicated by arrows in the figure. That is, for example, the left side 1 d of the acceleration sensor 1 is set to the tape carrier 20 in accordance with the direction of the sensitivity axis of the acceleration sensor 1 when mounted on a printed circuit board or the like.
The storage posture of the acceleration sensor 1 with respect to the concave portion 23 of the tape carrier 20 may be determined by, for example, being positioned at the opening of the concave portion 23.
【００２１】このようにしていれば、テープキャリア２
０を用いて加速度センサ１をプリント基板などに実装す
る場合には、このテープキャリア２０の上側テープ２２
をはがして、凹部２３の開口から、この開口に位置する
加速度センサ１の面を図示しない吸着治具によって吸着
して取り出し、プリント基板の所要位置に搭載するだけ
でよくなる。In this manner, the tape carrier 2
When the acceleration sensor 1 is mounted on a printed circuit board or the like using the
It is only necessary to peel off the surface of the acceleration sensor 1 located at the opening from the opening of the concave portion 23 by sucking the surface of the acceleration sensor 1 by a suction jig (not shown), and to mount the surface at a required position on the printed circuit board.
【００２２】なお、本発明は上記実施例のみに限定され
るものではなく、種々な応用や変形が考えられる。It should be noted that the present invention is not limited to only the above embodiment, and various applications and modifications are conceivable.
【００２３】（１） 圧電素子２をいわゆるユニモルフ
型の構成とし、この圧電素子２の長手方向両端ではなく
一端のみを挟持部品８，９で挟持支持させる、片持ち梁
構造としたものも本発明に含む。(1) The present invention also provides a cantilever structure in which the piezoelectric element 2 has a so-called unimorph structure and only one end of the piezoelectric element 2 is sandwiched and supported by sandwiching parts 8, 9 instead of both ends in the longitudinal direction. Included.
【００２４】（２） 上記実施例では、加速度センサを
例に挙げているが、振動センサとすることもできる。(2) In the above embodiment, an acceleration sensor is taken as an example, but a vibration sensor may be used.
【００２５】（３） 上記実施例では、外部引出電極４
を、パッケージ３の端面とパッケージ３の長手方向両端
の周面とに形成しているが、パッケージ３の端面のみに
形成したものも本発明に含む。(3) In the above embodiment, the external extraction electrode 4
Are formed on the end face of the package 3 and the peripheral faces at both ends in the longitudinal direction of the package 3, but those formed only on the end face of the package 3 are also included in the present invention.
【００２６】（４） 圧電素子２としては、圧電セラミ
ック板５の中央部分５ａそれぞれにおける分極の向きＡ
及びＣを互いに遠ざかる外向きとするとともに、端部分
５ｂ，５ｂにおける分極の向きＢ及びＤを互いに遠ざか
る外向きとする構成のものも本発明に含む。(4) As the piezoelectric element 2, the polarization direction A at each central portion 5 a of the piezoelectric ceramic plate 5
And C are directed outward away from each other, and the polarization directions B and D at the end portions 5b, 5b are directed outward away from each other.
【００２７】[0027]
【発明の効果】本発明の圧電センサでは、プリント基板
に対する実装時の姿勢を変えても常に座りがよくなり安
定化するように工夫しているから、要求される感度軸の
方向に応じてプリント基板に対して実装するときの姿勢
を変えるだけで、種々な感度軸に変更できるようになる
など、単一種類の構造でありながら、感度軸の異なる複
数種類のものとして流用できるようになる。このように
汎用性を高めたので、圧電センサの製造コストおよび管
理コストを従来に比べて大幅に削減できるようになり、
価格低減を実現できるようになる。According to the piezoelectric sensor of the present invention, even if the posture at the time of mounting on a printed circuit board is changed, the seating is always improved and the device is stabilized so that the printing is performed in accordance with the direction of the required sensitivity axis. It is possible to change to a variety of sensitivity axes simply by changing the posture when mounted on a substrate. For example, a single type of structure can be used as a plurality of types having different sensitivity axes. This increased versatility has made it possible to significantly reduce the cost of manufacturing and managing piezoelectric sensors compared to the past.
Price reduction can be realized.
【図１】本発明の一実施例の加速度センサを一部破断し
て示す斜視図FIG. 1 is a perspective view showing an acceleration sensor according to an embodiment of the present invention with a part thereof broken away.
【図２】図１の加速度センサの分解斜視図FIG. 2 is an exploded perspective view of the acceleration sensor of FIG. 1;
【図３】加速度の作用時における圧電素子の変形状態を
模式的に示す説明図FIG. 3 is an explanatory view schematically showing a deformation state of a piezoelectric element when an acceleration is applied.
【図４】図１の加速度センサのプリント基板に対する実
装時の姿勢を示す説明図FIG. 4 is an explanatory view showing a posture of the acceleration sensor of FIG. 1 when mounted on a printed circuit board;
【図５】図１の加速度センサに関するテープキャリアを
示す説明図FIG. 5 is an explanatory view showing a tape carrier related to the acceleration sensor of FIG. 1;
１ 加速度センサ ２ 圧電素子 ３ パッケージ ４ 外部引出電極 ５ 圧電素子を構成する圧電セラミック板 ６ 圧電素子の信号取出電極 ７ 圧電素子の中間電極 ８，９ パッケージを構成する挟持部品 １０，１１ パッケージを構成する蓋部品 DESCRIPTION OF SYMBOLS 1 Acceleration sensor 2 Piezoelectric element 3 Package 4 External lead-out electrode 5 Piezoelectric ceramic plate which constitutes a piezoelectric element 6 Signal extraction electrode of a piezoelectric element 7 Intermediate electrode of a piezoelectric element 8, 9 Holding parts which constitute a package 10, 11 Form a package Lid parts
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01P 15/08 - 15/09 G01H 11/08 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01P 15/08-15/09 G01H 11/08
Claims (2)
ージで囲んだ構成の圧電センサであって、 前記パッケージの外形が、直方体形状に形成されている
とともに、その両端面の縦横の寸法比が１：１に設定さ
れており、前記両端面及び両端周面に前記圧電素子の外
部引出電極が層状に形成されている、ことを特徴とする
圧電センサ。1. A piezoelectric sensor having a configuration in which a piezoelectric element having a specific sensitivity axis is surrounded by a package, wherein an outer shape of the package is formed in a rectangular parallelepiped shape, and a vertical and horizontal dimension ratio of both end surfaces is set. The ratio is set to 1: 1, and both ends and peripheral surfaces of both ends are outside the piezoelectric element.
A piezoelectric sensor, wherein a part extraction electrode is formed in a layer shape .
ージで囲んだ構成の圧電センサであって、 前記圧電素子が、上下に接合した二枚一対の短冊形状の
圧電セラミック板からなり、 前記パッケージが、圧電素子の長手方向に沿う少なくと
も一端部位を上下から挟持して該圧電素子を架橋状に支
持する二つの挟持部品と、この挟持部品の両側に取り付
けられて前記圧電素子の左右両側面を覆う二つの蓋部品
とからなり、 かつ、前記パッケージの外形が、直方体形状に形成され
ているとともに、その両端面の縦横の寸法がほぼ１：１
に設定されており、前記両端面及び両端周面に前記圧電
素子の外部引出電極が層状に形成されている、ことを特
徴とする圧電センサ。2. A piezoelectric sensor having a configuration in which a piezoelectric element having a specific sensitivity axis is surrounded by a package, wherein the piezoelectric element is formed of a pair of strip-shaped piezoelectric ceramic plates joined vertically. There are two sandwiching parts for sandwiching at least one end portion along the longitudinal direction of the piezoelectric element from above and below to support the piezoelectric element in a cross-linking manner, and the left and right sides of the piezoelectric element attached to both sides of the sandwiching part. and consists of a two lid parts, covering, outer shape of the package, with formed in a rectangular parallelepiped shape, height and width of the two end faces of approximately 1: 1
And the piezoelectric material is provided on both end surfaces and peripheral surfaces of both ends.
A piezoelectric sensor, wherein an external extraction electrode of the element is formed in a layer .
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07181675A JP3111858B2 (en) | 1995-07-18 | 1995-07-18 | Piezoelectric sensor |
| US08/683,231 US6043588A (en) | 1995-07-18 | 1996-07-18 | Piezoelectric sensor and acceleration sensor |
| US09/170,845 US6353325B1 (en) | 1995-07-18 | 1998-10-13 | Apparatus for examining posture of an electronic part |
| US09/746,346 US6429670B2 (en) | 1995-07-18 | 2000-12-22 | Method of examining posture of an electronic part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07181675A JP3111858B2 (en) | 1995-07-18 | 1995-07-18 | Piezoelectric sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0933560A JPH0933560A (en) | 1997-02-07 |
| JP3111858B2 true JP3111858B2 (en) | 2000-11-27 |
Family
ID=16104913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07181675A Expired - Lifetime JP3111858B2 (en) | 1995-07-18 | 1995-07-18 | Piezoelectric sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3111858B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3301397B2 (en) * | 1998-11-25 | 2002-07-15 | 株式会社村田製作所 | Acceleration sensor |
| JP2002122614A (en) | 2000-10-12 | 2002-04-26 | Murata Mfg Co Ltd | Acceleration sensor |
| WO2014171175A1 (en) * | 2013-04-17 | 2014-10-23 | 株式会社村田製作所 | Acceleration detection device |
-
1995
- 1995-07-18 JP JP07181675A patent/JP3111858B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0933560A (en) | 1997-02-07 |
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