JP3105382B2 - Ultra low dew point air generator - Google Patents
Ultra low dew point air generatorInfo
- Publication number
- JP3105382B2 JP3105382B2 JP05171036A JP17103693A JP3105382B2 JP 3105382 B2 JP3105382 B2 JP 3105382B2 JP 05171036 A JP05171036 A JP 05171036A JP 17103693 A JP17103693 A JP 17103693A JP 3105382 B2 JP3105382 B2 JP 3105382B2
- Authority
- JP
- Japan
- Prior art keywords
- dew point
- dehumidifier
- air
- point temperature
- regenerative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
- F24F3/1411—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant
- F24F3/1423—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant with a moving bed of solid desiccants, e.g. a rotary wheel supporting solid desiccants
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1016—Rotary wheel combined with another type of cooling principle, e.g. compression cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1032—Desiccant wheel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1056—Rotary wheel comprising a reheater
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1072—Rotary wheel comprising two rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1088—Rotary wheel comprising three flow rotor segments
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は除湿機の配置構成に係
り、特に半導体製造プロセスにおいて採用されるような
超低露点のドライエアを発生するための装置構成に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an arrangement of a dehumidifier, and more particularly to an arrangement for generating dry air having an extremely low dew point as employed in a semiconductor manufacturing process.
【０００２】[0002]
【従来の技術】近年、例えば１６Ｍ以上のＤＲＡＭのよ
うな半導体デバイスの高集積化に伴い、半導体製造プロ
セスを密閉環境にて実行することが要求されている。か
かる密閉環境には、従来より窒素やアルゴンなどのドラ
イガスを使用している。しかし、これらのドライガスは
安全性およびランニングコストの面で問題があり、ドラ
イエアを代替使用する方法が検討されている。2. Description of the Related Art In recent years, as a semiconductor device such as a DRAM of 16 M or more has been highly integrated, it has been required to execute a semiconductor manufacturing process in a sealed environment. Conventionally, a dry gas such as nitrogen or argon is used for such a sealed environment. However, these dry gases have problems in terms of safety and running cost, and methods of using dry air instead are being studied.
【０００３】しかしながら、従来の再生式除湿機を用い
た除湿では、固定床式であろうと回転式であろうと、使
用される吸湿剤の到達乾燥度と超低露点温度操作との関
係に起因する再生系での装置上の制約があるため、残留
水分等の問題が生じ、到達露点温度としては、−７０℃
〜−７５℃が限界とされていた。[0003] However, in the conventional dehumidification using a regenerative dehumidifier, whether it is a fixed bed type or a rotary type, the relationship between the ultimate drying degree of the used moisture absorbent and the operation of the ultra-low dew point temperature is caused. Since there are restrictions on the apparatus in the regeneration system, problems such as residual moisture occur, and the ultimate dew point temperature is -70 ° C.
~ -75 ° C was the limit.
【０００４】すなわち、現行の装置を用いた超低露点温
度操作において、除湿運転および再生運転が交互にまた
は連続的に行われた場合、再生系で生じた高湿分空気が
壁面吸着し、その湿分が除湿系へ混入し、最終出口湿分
を上昇させることは機構上回避することができない。そ
の結果、従来の再生式除湿機では−７０℃〜−７５℃の
露点温度のドライエアを供給できるに過ぎず、半導体製
造プロセスにおいて要求される基準には遥かに及ばない
ものであった。[0004] That is, when the dehumidifying operation and the regeneration operation are performed alternately or continuously in the ultra-low dew-point temperature operation using the current apparatus, the high-humidity air generated in the regeneration system is adsorbed on the wall surface. It is mechanically inevitable that moisture is mixed into the dehumidifying system and raises the final outlet moisture. As a result, the conventional regenerative dehumidifier can only supply dry air having a dew point temperature of -70 ° C to -75 ° C, far below the standards required in a semiconductor manufacturing process.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、従来の除湿
機の配置構成の有する上記のような問題点に鑑みてなさ
れたものであり、したがって、その目的とするところ
は、安全性およびランニングコストに優れた−９０℃以
下の露点温度を有する超低露点温度ドライエアを発生す
ることが可能な新規かつ改良された超低露点空気発生装
置を提供することである。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the conventional arrangement of a dehumidifier. An object of the present invention is to provide a new and improved ultra-low dew point air generator capable of generating an ultra-low dew point temperature dry air having a dew point temperature of -90 ° C or less, which is excellent in cost.
【０００６】[0006]
【課題を解決するための手段】上記課題を解決するため
に本発明によれば、取り入れ空気を中間到達露点温度に
まで除湿するための１段または複数段の再生式除湿機
と、その再生式除湿機の下流側に直列設置され中間到達
露点温度にまで除湿された空気を最終到達露点温度にま
で除湿するための非再生式除湿機とを備えたことを特徴
とする超低露点空気発生装置が提供される。According to the present invention, there is provided a regenerative dehumidifier having one or more stages for dehumidifying intake air to an intermediate attainable dew point temperature. A non-regenerative dehumidifier installed in series downstream of the dehumidifier to dehumidify the air dehumidified to an intermediate attainable dew point to a final attainable dew point. Is provided.
【０００７】また上記装置において、中間到達露点温度
として−７０℃ないし−７５℃に設定することが好まし
く、最終到達露点温度として−９０℃以下に設定するこ
とが好ましい。さらに、非再生式除湿機に使用される乾
燥剤として、到達乾燥度の低いゼオライトを使用するこ
とが好ましい。In the above apparatus, the intermediate dew point temperature is preferably set to -70 ° C to -75 ° C, and the final dew point temperature is preferably set to -90 ° C or lower. Furthermore, it is preferable to use a zeolite having a low ultimate drying degree as a desiccant used in the non-regenerative dehumidifier.
【０００８】[0008]
【作用】本発明によれば、装置内に取り入れた空気を、
除湿能力の高い再生式除湿機により、例えば−７０℃な
いし−７５℃の中間到達露点温度にまで除湿することが
可能である。その際、この再生式除湿機を多段構成とす
ることにより、より効率的にかつ短時間で段階的に除湿
をすることができる。その後、例えば−７０℃ないし−
７５℃の中間到達露点温度にまで除湿された空気を、非
再生式除湿機により、例えば−９０℃以下の最終到達露
点温度にまで除湿することが可能である。この場合、前
処理装置である再生式除湿機により大部分の湿分は予め
除湿されているので、後処理装置である非再生式除湿機
においては少量の除湿剤を用いれば良く、しかも再生処
理は不要となる。その結果、省設備費で省運転費の除湿
機にて超低露点空気を発生することが可能となる。According to the present invention, the air taken into the device is
With a regenerative dehumidifier having a high dehumidifying capacity, it is possible to dehumidify to an intermediate ultimate dew point temperature of, for example, -70 ° C to -75 ° C. At this time, by making this regenerative dehumidifier into a multi-stage configuration, dehumidification can be performed more efficiently and stepwise in a short time. Then, for example, from -70 ° C to-
Air that has been dehumidified to an intermediate dew point temperature of 75 ° C. can be dehumidified by a non-regenerative dehumidifier to a final dew point temperature of −90 ° C. or less, for example. In this case, since most of the moisture has been previously dehumidified by the regenerative dehumidifier as the pretreatment device, a small amount of dehumidifier may be used in the non-regenerative dehumidifier as the post-treatment device, and furthermore, the regeneration treatment is performed. Becomes unnecessary. As a result, it becomes possible to generate ultra-low dew-point air with a dehumidifier with reduced equipment costs and reduced operating costs.
【０００９】[0009]
【実施例】以下添付図面を参照しながら本発明に基づい
て構成された超低露点空気発生装置の好適な実施例につ
いて詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an ultra-low dew point air generator constructed according to the present invention will be described below in detail with reference to the accompanying drawings.
【００１０】図示のように本発明装置は、前処理装置で
ある２段式除湿機１と後処理装置である固定床式除湿機
２とから構成されている。図示の例では前処理装置１を
第１の回転式乾式除湿機３（ＤＡ１）および第２の回転
式乾式除湿機４（ＤＡ２）から成る２段構成としている
が、本発明はこれに限定されない。必要な到達露点温度
や処理速度に応じて、１段構成あるいは３段以上の多段
構成することも可能である。As shown, the apparatus of the present invention comprises a two-stage dehumidifier 1 as a pretreatment device and a fixed-bed dehumidifier 2 as a post-treatment device. In the illustrated example, the pretreatment device 1 has a two-stage configuration including a first rotary dry dehumidifier 3 (DA1) and a second rotary dry dehumidifier 4 (DA2), but the present invention is not limited to this. . A single-stage configuration or a multi-stage configuration of three or more stages is also possible depending on the required ultimate dew point temperature and processing speed.
【００１１】第１の除湿送風機５（ＭＦ１）にて吸引さ
れた外気（ＯＡ＝必要空気量＋再生排気風量）は、第１
の外気入口フィルタ６（ｆ１）にて集塵濾過された後、
気密ダンパ７（Ｖ１）を介して外気処理空調機８（ＯＡ
Ｃ）に送られる。外気はこの外気処理空調機８により除
湿され、第１のプレクーラー９（ＰＣ１）にて温調さ
れ、第１の回転式乾式除湿機３において、第１の中間到
達露点温度、例えば−５４℃にまで除湿される。The outside air (OA = required air amount + regeneration exhaust air amount) sucked by the first dehumidification blower 5 (MF1) is equal to the first air.
After being filtered by the outside air inlet filter 6 (f1)
External air processing air conditioner 8 (OA) through airtight damper 7 (V1)
C). The outside air is dehumidified by the outside air processing air conditioner 8 and the temperature is controlled by the first precooler 9 (PC1). Dehumidified up to.
【００１２】次いで、第１の中間到達露点温度にまで除
湿された空気は、第２の除湿送風機１０（ＭＦ２）によ
り、次段に送られる。この第２段においても第１段と同
様に、第２のプレクーラー１１（ＰＣ２）にて温調さ
れ、第２の回転式乾式除湿機４において、第２の中間到
達露点温度、例えば−７５℃にまで除湿され、最終除湿
機である固定床式除湿機１２（ＤＡ３）に送られる。Next, the air dehumidified to the first intermediate dew point temperature is sent to the next stage by the second dehumidifying blower 10 (MF2). In the second stage, similarly to the first stage, the temperature is controlled by the second precooler 11 (PC2), and in the second rotary dry dehumidifier 4, the second intermediate dew point temperature, for example, -75. C. and is sent to the fixed-bed dehumidifier 12 (DA3), which is the final dehumidifier.
【００１３】一方、第１の回転式乾式除湿機３における
除湿で吸着された水分は、第１の再生送風機１３（ＲＦ
１）により第２の外気入口フィルタ１３（ｆ２）を介し
て取り入れられ、第１の再生ヒータ１５（ＨＣ１）によ
り加熱された再生用空気により除去される。この結果、
第１の回転式乾式除湿機３の図示しない除湿手段として
は連続的に再生され、一定の送風露点温度、例えば−５
４℃を維持することが可能である。On the other hand, the moisture adsorbed by the dehumidification in the first rotary dry dehumidifier 3 is supplied to the first regenerative blower 13 (RF
According to 1), it is taken in through the second outside air inlet filter 13 (f2) and removed by the regeneration air heated by the first regeneration heater 15 (HC1). As a result,
The dehumidifying means (not shown) of the first rotary dry dehumidifier 3 is continuously regenerated and has a constant dew point temperature, for example, -5.
It is possible to maintain 4 ° C.
【００１４】同様に、第２の回転式乾式除湿機４での除
湿において吸着された水分は、第２の再生送風機１６
（ＲＦ２）により再生系に取り入れられ、第２の再生ヒ
ータ１７（ＨＣ２）により加熱された再生用空気により
除去される。この結果、第２の回転式乾式除湿機４の図
示しない除湿手段についても連続的に再生され、一定の
送風露点温度、例えば−７５℃を維持することが可能で
ある。Similarly, the water adsorbed in the dehumidification by the second rotary dry dehumidifier 4 is supplied to the second regenerative blower 16.
It is taken into the regeneration system by (RF2) and removed by the regeneration air heated by the second regeneration heater 17 (HC2). As a result, the dehumidifying means (not shown) of the second rotary dry dehumidifier 4 is also continuously regenerated, and it is possible to maintain a constant blower dew point temperature, for example, -75 ° C.
【００１５】しかしながら、先に説明したように、上記
のような前処理装置１である回転式乾式除湿機では再生
系における高湿の空気が壁面吸着により除湿手段に付着
し、それが除湿系へと混入し、最終出口湿分を上昇させ
ることが構造上回避することができないため、到達露点
温度としては−７０℃ないし−７５℃が限界とされてい
る。そこで、本発明装置においては、前処理装置１の下
流側に後処理装置２として非再生式の除湿機を直列配置
することにより、ドライエアの到達露点温度の限界を−
９０℃にまで下げることを可能にしている。However, as described above, in the rotary dry dehumidifier, which is the pretreatment device 1 as described above, high-humidity air in the regeneration system adheres to the dehumidification means by wall surface adsorption, and the air enters the dehumidification system. The final dew point temperature is limited to −70 ° C. to −75 ° C. because it is unavoidable to increase the final outlet moisture due to the structure. Therefore, in the apparatus of the present invention, a non-regenerative dehumidifier is disposed in series as the post-processing apparatus 2 downstream of the pre-processing apparatus 1 so that the limit of the ultimate dew point temperature of the dry air can be reduced.
It is possible to lower the temperature to 90 ° C.
【００１６】すなわち、前処理装置１である２段式除湿
機を出た送風露点−７５℃の空気はアフタークーラー１
８（ＡＣ）において温調され、ダンパ１９（Ｖ３）を介
して最終除湿機である固定床式除湿機１２に送られ、そ
こで最終到達露点温度である−９０℃以下にまで除湿さ
れ、ダンパ２０（Ｖ５）およびファイナルフィルタ２１
（ｆｆ）を介して所望の温調空間に供給される。That is, the air having a blast dew point of -75 ° C., which has exited the two-stage dehumidifier as the pretreatment device 1, is supplied to the aftercooler 1
8 (AC), and sent to a fixed bed dehumidifier 12 as a final dehumidifier via a damper 19 (V3), where it is dehumidified to a final dew point temperature of -90 ° C or less. (V5) and final filter 21
It is supplied to a desired temperature control space via (ff).
【００１７】ここで、−９０℃以下の最終到達露点温度
を得るためには、固定床式除湿機１２において到達乾燥
度の低い吸湿剤、例えばゼオライトなどを使用すること
ができる。ただし、本発明装置において使用される吸湿
剤はゼオライトに限定されず、所望の最終到達露点温度
に応じて各種吸湿剤を使用することが可能である。Here, in order to obtain a final attained dew point temperature of -90 ° C. or less, a moisture absorbent having a low attainable drying degree, for example, zeolite or the like can be used in the fixed-bed dehumidifier 12. However, the moisture absorbent used in the apparatus of the present invention is not limited to zeolite, and various moisture absorbents can be used according to a desired final dew point temperature.
【００１８】また後処理装置２である固定床式除湿機１
２の形状としては、ゼオライトなどの使用吸湿剤がペレ
ット状であるため、空気流速や接触時間を調整すること
により吸湿効率を高める構造を採用することが好まし
い。A fixed-bed dehumidifier 1 as a post-processing device 2
As the shape of No. 2, since the used moisture absorbent such as zeolite is in the form of pellets, it is preferable to adopt a structure that improves the moisture absorption efficiency by adjusting the air flow rate and the contact time.
【００１９】なお、本発明装置においては、前処理装置
１である２段式除湿機において中間到達露点温度とし
て、例えば−７５℃程度まで除湿されているので、最終
到達露点温度として、例えば−９０℃以下に設定した場
合であっても、後処理装置２である固定床式除湿機１２
の吸湿剤にかかる負荷を軽減し、ゼオライトなどの吸湿
剤による除湿水分量を、一般領域の除湿水分量に比較し
て著しく小さく抑えることができる。In the apparatus of the present invention, the two-stage dehumidifier, which is the pretreatment apparatus 1, is dehumidified to an intermediate dew point temperature of, for example, about -75 ° C. ° C or lower, the fixed-bed dehumidifier 12 as the post-processing device 2
And the amount of dehumidifying moisture due to a desiccant such as zeolite can be significantly reduced as compared with the dehumidifying moisture amount in a general region.
【００２０】したがって、後処理装置２において除湿さ
れる水分量に相当する使用吸湿剤の量を小さくすること
ができ、しかも、その吸湿剤の破過時間を長くすること
が可能である。本発明装置によれば後処理装置２におけ
る吸湿剤を例えば前処理装置１における吸湿剤と同量と
した場合であっても、後処理装置２における吸湿剤を例
えば１年程度使用することが可能である。また、上記理
由より後処理装置２における吸湿剤は再生処理の必要が
なく、設備費および運転費を大幅に節約することが可能
である。Therefore, the amount of the used moisture absorbent corresponding to the amount of water to be dehumidified in the post-processing device 2 can be reduced, and the breakthrough time of the moisture absorbent can be prolonged. According to the apparatus of the present invention, even when the amount of the hygroscopic agent in the post-processing device 2 is the same as the amount of the hygroscopic agent in the pre-processing device 1, for example, the hygroscopic agent in the post-processing device 2 can be used for about one year, for example. It is. Further, for the above reason, the desiccant in the post-processing device 2 does not need to be regenerated, and it is possible to greatly reduce equipment costs and operation costs.
【００２１】なお、参考までに従来の窒素ガスを用いた
クリーンドライエアと、本発明装置によるクリーンドラ
イエアとのランニングコストを比較すれば、クリーンド
ライエアが１．５（円／ｍ3）であるのに対して、クリ
ーンドライ窒素ガスが１６（円／ｍ3）となり、本発明
装置によるクリーンドライエアはランニングコストに関
して格段に優れていることが分かる。しかもクリーンド
ライエアはクリーンドライガスに比較して、安全性およ
び取り扱いにおいても優れており、半導体製造プロセス
などの各種分野において応用することが可能である。For reference, comparing the running cost of the clean dry air using the conventional nitrogen gas and the running cost of the clean dry air according to the apparatus of the present invention, the clean dry air is 1.5 (yen / m 3). Thus, the clean dry nitrogen gas was 16 (yen / m 3), which indicates that the clean dry air according to the apparatus of the present invention is significantly superior in running cost. Moreover, clean dry air is superior in safety and handling compared to clean dry gas, and can be applied in various fields such as a semiconductor manufacturing process.
【００２２】また本発明装置を運転する場合には、装置
全体が低露点で操作されるため、いくつかの点に留意す
る必要がある。例えば、運転停止時には外気を遮断して
結露を防止することが好ましい。さらに、立ち上がり時
には後処理装置２である固定床式除湿機１２に中間露点
温度の空気を送るタイミングを調整し、後処理装置２の
除湿剤にかかる負荷を軽減する必要がある。When operating the apparatus of the present invention, it is necessary to pay attention to several points since the entire apparatus is operated at a low dew point. For example, when the operation is stopped, it is preferable to block the outside air to prevent dew condensation. Furthermore, at the time of startup, it is necessary to adjust the timing of sending air having an intermediate dew point to the fixed-bed dehumidifier 12 as the post-processing device 2 to reduce the load on the dehumidifier of the post-processing device 2.
【００２３】なお、以上の説明においては、本発明装置
を２段の回転式乾式除湿機およびゼオライトを吸湿剤と
して用いた固定床式除湿機に関連して説明したが、本発
明はかかる構成に限定されない。本発明装置は、特許請
求の範囲に記載された技術的思想の範囲内で、各種除湿
機の配置構成について適用することが可能である。In the above description, the apparatus of the present invention has been described with reference to a two-stage rotary dry dehumidifier and a fixed bed dehumidifier using zeolite as a desiccant. Not limited. The device of the present invention can be applied to the arrangement of various dehumidifiers within the scope of the technical idea described in the claims.
【００２４】[0024]
【発明の効果】以上説明したように、本発明装置によれ
ば、従来の再生式除湿機では不可能であった例えば−９
０℃以下の超低露点空気を効率的に形成することができ
る。その際、本発明装置によれば、取り入れ空気を前処
理装置である再生式除湿機にて一旦、−７０℃ないし−
７５℃の中間到達露点温度にまで除湿するので、後処理
装置として少量の除湿剤を備えた非再生式除湿機を用い
て、所望の超低露点温度、例えば−９０℃以下にまで除
湿することができる。その結果、従来のドライガスに比
較して安全性およびランニングコストに優れる超露点温
度のドライガスを形成することができる。As described above, according to the apparatus of the present invention, for example, -9, which was impossible with the conventional regenerative dehumidifier, was used.
Ultra low dew point air of 0 ° C. or less can be efficiently formed. At this time, according to the apparatus of the present invention, the intake air is once cooled to -70 ° C.
Since dehumidification is performed up to an intermediate dew point temperature of 75 ° C., dehumidification is performed to a desired ultra-low dew point temperature, for example, −90 ° C. or less, using a non-regenerative dehumidifier equipped with a small amount of a dehumidifier as a post-treatment device. Can be. As a result, it is possible to form a dry gas having a super dew point temperature which is superior in safety and running cost as compared with a conventional dry gas.
【図１】本発明に基づいて構成された超低露点空気発生
装置の系統図である。FIG. 1 is a system diagram of an ultra-low-dew-point air generator configured according to the present invention.
１ 前処理装置 ２ 後処理装置 ３ 第１の回転式乾式除湿機 ４ 第２の回転式乾式除湿機 ５ 第１の除湿送風機 ６ 外気入口フィルタ ８ 外調機 ９ 第１のプレヒータ １０ 第２の除湿送風機 １１ 第２のプレヒータ １２ 固定床式除湿機 １３ 第１の再生送風機 １４ 外気入口フィルタ １５ 第１の再生ヒータ １６ 第２の再生送風機 １７ 第２の再生ヒータ １８ アフターヒータ ２１ ファイナルフィルタ DESCRIPTION OF SYMBOLS 1 Pre-processing apparatus 2 Post-processing apparatus 3 1st rotary dry dehumidifier 4 2nd rotary dry dehumidifier 5 1st dehumidification blower 6 Outside air inlet filter 8 External conditioner 9 1st preheater 10 2nd dehumidification Blower 11 Second preheater 12 Fixed-bed dehumidifier 13 First regenerative fan 14 Outside air inlet filter 15 First regenerative heater 16 Second regenerative fan 17 Second regenerative heater 18 Afterheater 21 Final filter
Claims (3)
湿するための１段または複数段の再生式除湿機と、その
再生式除湿機の下流側に直列設置され中間到達露点温度
にまで除湿された空気を最終到達露点温度にまで除湿す
るための非再生式除湿機とを備えたことを特徴とする超
低露点空気発生装置。1. A regenerative dehumidifier having one or more stages for dehumidifying intake air to an intermediate attainable dew point temperature, and installed in series downstream of the regenerative dehumidifier and dehumidified to an intermediate attainable dew point temperature. A non-regenerative dehumidifier for dehumidifying compressed air to a final attained dew point temperature.
７５℃であり、前記最終到達露点温度が−９０℃以下で
あることを特徴とする、請求項１に記載の超低露点空気
発生装置。2. The method according to claim 1, wherein said intermediate dew point temperature is from -70.degree.
The ultra low dew point air generator according to claim 1, wherein the temperature is 75C and the final attained dew point temperature is -90C or less.
剤として含有することを特徴とする、請求項１また２に
記載の超低露点空気発生装置。3. The ultra-low dew point air generator according to claim 1, wherein said non-regenerative dehumidifier contains zeolite as a desiccant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05171036A JP3105382B2 (en) | 1993-06-16 | 1993-06-16 | Ultra low dew point air generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05171036A JP3105382B2 (en) | 1993-06-16 | 1993-06-16 | Ultra low dew point air generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07754A JPH07754A (en) | 1995-01-06 |
| JP3105382B2 true JP3105382B2 (en) | 2000-10-30 |
Family
ID=15915906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05171036A Expired - Lifetime JP3105382B2 (en) | 1993-06-16 | 1993-06-16 | Ultra low dew point air generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3105382B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR9105929A (en) * | 1990-01-08 | 1992-10-20 | Cabot Corp | CARBON BLACK AND RUBBER COMPOSITION |
| DE69104191T2 (en) * | 1990-03-13 | 1995-04-13 | Cabot Corp | IMPROVED TREAD WEAR / HYSTERESIS RUSSES. |
| EP0546008B1 (en) * | 1990-08-29 | 1995-06-21 | Cabot Corporation | Improved performance carbon blacks |
| JP3485161B2 (en) * | 1998-08-27 | 2004-01-13 | 高砂熱学工業株式会社 | Dehumidification system |
| JP4827906B2 (en) * | 2008-10-03 | 2011-11-30 | 新晃工業株式会社 | A desiccant air conditioner that supplies dry air with an ultra-low dew point temperature without a purge zone. |
| JP5844611B2 (en) * | 2011-11-02 | 2016-01-20 | 新晃工業株式会社 | Desiccant air conditioner |
| JP2020165630A (en) * | 2019-03-29 | 2020-10-08 | 日本スピンドル製造株式会社 | Dew-point temperature adjusting dehumidifying device |
-
1993
- 1993-06-16 JP JP05171036A patent/JP3105382B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07754A (en) | 1995-01-06 |
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