JP3099942B2 - Ultrasonic vibration bonding resonator - Google Patents

Ultrasonic vibration bonding resonator

Info

Publication number
JP3099942B2
JP3099942B2 JP08210099A JP21009996A JP3099942B2 JP 3099942 B2 JP3099942 B2 JP 3099942B2 JP 08210099 A JP08210099 A JP 08210099A JP 21009996 A JP21009996 A JP 21009996A JP 3099942 B2 JP3099942 B2 JP 3099942B2
Authority
JP
Japan
Prior art keywords
screw
ultrasonic horn
ultrasonic
hole
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP08210099A
Other languages
Japanese (ja)
Other versions
JPH1052768A (en
Inventor
茂 佐藤
貢 勝見
誠也 中居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultex Corp
Original Assignee
Ultex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultex Corp filed Critical Ultex Corp
Priority to JP08210099A priority Critical patent/JP3099942B2/en
Priority to US08/856,583 priority patent/US5931367A/en
Priority to CA002206412A priority patent/CA2206412C/en
Publication of JPH1052768A publication Critical patent/JPH1052768A/en
Application granted granted Critical
Publication of JP3099942B2 publication Critical patent/JP3099942B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B23K20/106—Features related to sonotrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
    • B29C65/081—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations having a component of vibration not perpendicular to the welding surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/81—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps
    • B29C66/814—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the design of the pressing elements, e.g. of the welding jaws or clamps
    • B29C66/8141—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the design of the pressing elements, e.g. of the welding jaws or clamps characterised by the surface geometry of the part of the pressing elements, e.g. welding jaws or clamps, coming into contact with the parts to be joined
    • B29C66/81433—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the design of the pressing elements, e.g. of the welding jaws or clamps characterised by the surface geometry of the part of the pressing elements, e.g. welding jaws or clamps, coming into contact with the parts to be joined being toothed, i.e. comprising several teeth or pins, or being patterned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/81—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps
    • B29C66/816—General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the mounting of the pressing elements, e.g. of the welding jaws or clamps
    • B29C66/8167—Quick change joining tools or surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】この発明は、重ね合わせた被
接合部材を超音波振動で接合する装置に用いられる共振
器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resonator used for an apparatus for joining superposed members by ultrasonic vibration.

【０００２】[0002]

【従来の技術】特公昭５４−１３３４９号公報に開示さ
れたように、超音波振動を発生する振動子に結合した共
振器と搭載台とでそれらの間に重ね合わせた被接合部材
を加圧保持し、振動子から共振器に超音波振動を伝達す
ることにより、被接合部材の重ね合わせ面間を接合する
ようにした超音波振動接合装置が知られている。2. Description of the Related Art As disclosed in Japanese Patent Publication No. 54-13349, a member to be joined superimposed between a resonator and a mounting table coupled to a vibrator for generating ultrasonic vibration is pressurized therebetween. 2. Description of the Related Art There is known an ultrasonic vibration bonding apparatus configured to hold and transmit ultrasonic vibration from a vibrator to a resonator to bond between overlapping surfaces of members to be bonded.

【０００３】[0003]

【発明が解決しようとする課題】このような超音波振動
接合装置に用いられる共振器は、アルミニウム、鉄、チ
タン等のいずれか１つの材料で、被接合部材の材質・厚
さ・形状、振動子の発振出力等から設定される形状や大
きさに切削加工して１次加工品を作り、この１次加工品
を振動子に結合して実際に振動させて、その共振状態が
所望の状態となるように、長さや太さを調整するような
２次加工を１次加工品に施して、共振状態のチューニン
グを行うことで、使用に供されるが、接合時の温度で共
振器の接合作用部が拡散を起こして摩耗する。このよう
な摩耗が繰り返されて、共振器の接合作用部の表面性状
が荒れると、被接合部材の接合不良を発生したり、被接
合部材の表面に接合痕が付いて、品質感及び信頼性に欠
けることから、共振器の接合作用部の表面を研磨して補
修する。しかし、補修には共振器を装置より取り外さな
ければならず、その再組立、調整に多大な労力と時間と
を要する。しかも、接合作用部の研磨しろは、適切な共
振状態を作る関係から、余り多く設定することができ
ず、数回程度の補修で使用不可能となり、不経済であ
る。The resonator used in such an ultrasonic vibration bonding apparatus is made of any one of aluminum, iron, titanium and the like. The primary processed product is made by cutting into the shape and size set from the oscillation output of the vibrator, etc., and the primary processed product is actually vibrated by coupling to the vibrator, and the resonance state is the desired state. The primary processing product is subjected to secondary processing such as adjusting the length and thickness so that the resonance state is tuned, and the resonator is tuned. The joint action part causes diffusion and wear. If such abrasion is repeated and the surface properties of the joining action portion of the resonator become rough, poor joining of the members to be joined may occur, or joining marks may be formed on the surface of the members to be joined, resulting in a sense of quality and reliability. Therefore, the surface of the bonding portion of the resonator is polished and repaired. However, the repair requires removal of the resonator from the device, and reassembly and adjustment thereof require a great deal of labor and time. In addition, the margin of polishing of the joining action portion cannot be set too much because of an appropriate resonance state, and cannot be used after several repairs, which is uneconomical.

【０００４】そこで、この発明は、接合作用部を共振器
本体を構成する超音波ホーンと別体のチップに形成し、
このチップを超音波ホーンにその振動方向と交差する方
向よりねじ手段で固定して、経済的で品質信頼性を向上
することができる超音波振動接合装置用共振器を提供し
ようとするものである。Therefore, according to the present invention, the bonding action portion is formed on a chip separate from the ultrasonic horn constituting the resonator main body,
It is an object of the present invention to provide a resonator for an ultrasonic vibration bonding apparatus which can fix the tip to an ultrasonic horn with a screw means in a direction intersecting the vibration direction thereof and can improve the quality and reliability of the ultrasonic horn. .

【０００５】[0005]

【課題を解決するための手段】１つの本発明にあって
は、超音波振動を発生する振動子に連結される超音波ホ
ーンは最大振動振幅点位置で外側面に形成された凹部と
凹部の開口側に雌ねじが形成されたねじ孔部とを有し、
接合作用部は凹部に内接嵌合されたチップベースとチッ
プベースの上面より突出されたチップ本体とを有し、超
音波ホーンの振動方向と垂直に進退可能なねじ部材はチ
ップ本体を非接触に取込むことが可能に形成された内側
の貫通孔と超音波ホーンのねじ孔部に嵌合する外側の雄
ねじ部とを有し、チップ本体がねじ部材の貫通孔に取込
まれ、ねじ部材が雄ねじ部を介して超音波ホーンのねじ
孔部に締結されることにより、チップ本体の先端部が被
接合部材と接触し得るようにねじ部材及び超音波ホーン
より突出されると共に、チップベースがねじ部材の下面
と凹部の底面とで挟まれる形態となり、接合作用部が超
音波ホーンに取り付けられたことを特徴としている。こ
の１つの発明の構成によれば、接合作用部のチップベー
スを超音波ホーンの凹部に内接嵌合し、接合作用部のチ
ップ本体をねじ部材の貫通孔に取込みつつ、ねじ部材の
雄ねじ部を超音波ホーンのねじ孔部に締結して、接合作
用部を超音波ホーンに取り付けることにより、接合作用
部が超音波ホーンの振動と同じように振動して、超音波
振動による接合を適切に行うことができる。もう１つの
本発明にあっては、超音波振動を発生する振動子に連結
される超音波ホーンは最大振動振幅点位置で外側面に形
成された凹部と凹部の底面に形成された貫通孔とを有
し、接合作用部は凹部に内接嵌合されたチップ本体とチ
ップ本体の底面より貫通孔を経由して突出された雄ねじ
部とを有し、超音波ホーンの振動方向と垂直に進退可能
なねじ部材は接合作用部の雄ねじ部に嵌合する雌ねじ部
が形成されたねじ孔部を有し、ねじ部材がねじ孔部を介
して接合作用部の雄ねじ部に締結されることにより、チ
ップ本体の先端部が被接合部材と接触し得るように超音
波ホーンより突出されると共に、チップ本体が凹部の底
面に接触する形態となり、接合作用部が超音波ホーンに
取り付けられたことを特徴としている。 このもう１つの
発明の構成によれば、接合作用部の雄ねじ部を超音波ホ
ーンの凹部より貫通孔を経由して超音波ホーンの外側に
突出させると共に、接合作用部 のチップ本体を超音波ホ
ーンの凹部に内接嵌合し、超音波ホーンより突出した接
合作用部の雄ねじ部にナットのようなねじ部材のねじ孔
部を締結して、接合作用部を超音波ホーンに取り付ける
ことにより、接合作用部が超音波ホーンの振動と同じよ
うに振動して、超音波振動による接合を適切に行うこと
ができる。 更なるもう１つの本発明にあっては、超音波
振動を発生する振動子に連結される超音波ホーンは最大
振動振幅点位置で外側面に形成された凹部と凹部の底面
に形成された貫通孔とを有し、凹部の１組の側面が凹部
の開口側より底面側に行くに従って間隔が狭くなる傾斜
面に形成されており、接合作用部は凹部に嵌合されたチ
ップベースとチップベースの上面より突出されたチップ
本体とチップベースの底面に雌ねじが形成されたねじ孔
部とを有し、チップベースの１組の側面が凹部の傾斜面
に合う傾斜面に形成されており、超音波ホーンの振動方
向と垂直に進退可能なねじ部材は接合作用部の雌ねじに
嵌合する雄ねじが形成された雄ねじ部と雄ねじ部の一端
に形成された大形の頭部とを有し、ねじ部材が雄ねじ部
を介して超音波ホーンの貫通孔より接合作用部のねじ孔
部に締結されることにより、凹部の傾斜面とチップベー
スの傾斜面と互いに接触されると共に、凹部の底面とチ
ップベースの底面との間に隙間が形成される形態とな
り、接合作用部が超音波ホーンに取り付けられたことを
特徴としている。この更なるもう１つの発明の構成によ
れば、接合作用部におけるチップベースの１組の傾斜面
と超音波ホーンの凹部における１組の傾斜面とが対応さ
れるように、接合作用部のチップベースを超音波ホーン
の凹部に嵌合し、有頭ボルトのようなねねじ部材の雄ね
じ部を超音波ホーンの凹部とは反対側より貫通孔を経由
し接合作用部におけるチップベースのねじ孔部に締結し
て、接合作用部を超音波ホーンに取り付けることによ
り、接合作用部が超音波ホーンの振動と同じように振動
して、超音波振動による接合を適切に行うことができ
る。 又、前記何れの発明にあっても、接合作用部のチッ
プ本体の表面研磨による補修が繰り返されて、接合作用
部が使用不能となった場合、超音波ホーンを装置に付け
たまま、古い接合作用部を新しい接合作用部に交換する
だけで、共振状態のチューニングが適切に取れている超
音波ホーンを再使用することができ、経済的であるう
え、品質信頼性を向上することができる。Means for Solving the Problems According to one aspect of the present invention,
The ultrasonic horn connected to the vibrator that generates ultrasonic vibration has a recess formed on the outer surface at the position of the maximum vibration amplitude.
A screw hole in which a female screw is formed on the opening side of the recess,
The joining action part is in contact with the chip base
Having a chip body protruding from the upper surface of the
A screw member that can move back and forth perpendicular to the vibration direction of the
The inside is formed so that the main body can be taken in without contact
Outer male fitting into the through hole of the ultrasonic horn and the screw hole of the ultrasonic horn
With a screw part, the chip body is taken into the through hole of the screw member
Rarely, the screw member is screwed into the ultrasonic horn
The tip of the chip body is covered by being fastened to the hole.
Screw member and ultrasonic horn so as to be able to contact the joining member
And the tip base is under the screw member
And the bottom surface of the concave portion.
It is characterized by being attached to a sonic horn . According to the configuration of this one aspect of the invention , the tip base of the joining action portion is provided.
In the recess of the ultrasonic horn.
While taking the main body into the through hole of the screw member,
The male thread is fastened to the threaded hole of the ultrasonic horn,
The use portions by Fit the ultrasonic horn, bonding working portion is vibrated in the same way as the vibration of the ultrasonic horn, it is possible to properly carry out bonding by ultrasonic vibrations. Another
In the present invention, it is connected to a vibrator that generates ultrasonic vibration
Of the ultrasonic horn is formed on the outer surface at the point of the maximum vibration amplitude.
And a through hole formed in the bottom of the recess.
The joining action part is in contact with the chip body
Male screw protruding from the bottom of the main body through the through hole
Part and can move back and forth perpendicular to the vibration direction of the ultrasonic horn
The female screw part which fits the male screw part of the joint action part
The screw member has a screw hole formed with
To the male thread of the joint
Ultrasonic so that the tip of the
The tip body is projected from the wave horn and the tip body is
It comes into contact with the surface, and the joint action part becomes an ultrasonic horn.
It is characterized by being attached. This another
According to the configuration of the present invention, the male screw part of the joining action part is ultrasonically heated.
Outside of the ultrasonic horn through the through hole
And the tip body of the joint
Contact with the recess of the horn and project from the ultrasonic horn.
The screw hole of a screw member such as a nut in the male thread of the joint
Fasten the part and attach the joint working part to the ultrasonic horn
As a result, the joint action part is the same as the vibration of the ultrasonic horn.
Vibrating properly and performing proper bonding by ultrasonic vibration
Can be. In yet another aspect of the invention, an ultrasonic
The maximum ultrasonic horn connected to the vibrator
The recess formed on the outer surface at the position of the vibration amplitude and the bottom of the recess
And a set of side surfaces of the concave portion has a concave portion.
The gap becomes narrower as you go from the opening side to the bottom side
Surface, and the joining action portion is connected to the
Tip protruding from the top of the chip base and chip base
Screw holes with internal threads on the bottom of the body and chip base
And a pair of side surfaces of the chip base are inclined surfaces of a concave portion.
The ultrasonic horn vibrates
The screw member that can move forward and backward perpendicular to the
Male thread with male thread to fit and one end of male thread
And a large-sized head formed in
Through the through hole of the ultrasonic horn through the screw hole of the joint action part
To the inclined surface of the recess and the tip base.
Contact with the inclined surface of
Gap is formed between the bottom of the
And that the joint action part has been attached to the ultrasonic horn
Features. According to the structure of this still another invention.
If so, a set of inclined surfaces of the chip base in the joining action portion
And the set of inclined surfaces in the recess of the ultrasonic horn correspond
So that the tip base of the joint
Male threaded member such as a headed bolt
Through the through hole from the side opposite to the concave part of the ultrasonic horn
To the screw hole of the chip base at the joint
By attaching the joint to the ultrasonic horn
And the joint action part vibrates in the same way as the ultrasonic horn
To achieve proper bonding by ultrasonic vibration.
You. Also, in any of the above inventions, the chip of the joining action portion
If the joints become unusable due to repeated repairs by polishing the surface of the pump body , simply replacing the old joints with the new joints with the ultrasonic horn attached to the device will result in a resonance condition. The ultrasonic horn which has been properly tuned can be reused, and it is economical and quality reliability can be improved.

【０００６】[0006]

【発明の実施の形態】図１は第１実施形態を示し、共振
器本体を構成する超音波ホーン１は、アルミニウム、
鉄、チタン等のいずれか１つの材料で棒状に形成された
一端に、図外のブースタを介在させるか、又は直接、図
外の超音波発生器から供給された電力により所定周波数
の縦波の超音波振動を発生して出力する電気エネルギー
を機械エネルギーに変換する圧電素子又は磁歪素子等か
らなる電気音響変換器又は電気振動変換器である振動子
を同軸に結合し、振動子からブースタを介して伝達され
た超音波振動に共振するか、又は振動子から直接伝達さ
れた超音波振動に共振する、共振周波数の１／２波長の
整数倍の長さを有している。この超音波ホーン１は、そ
の長さが例えば１／２波長の場合は振動子とは反対側の
端部の最大振動振幅点の位置に、１波長の場合は中央の
最大振動振幅点の位置に、超音波ホーン１と別体のアル
ミニウム、鉄、チタン等の中の１つの材料にてチップに
形成された接合作用部２を、超音波ホーン１の振動方向
Ｘと垂直に進退可能なねじ手段としてのねじ部材３で固
定的に取り付けてある。接合作用部２の材料は超音波ホ
ーン１と同一材料でも異種材料でもよいが、被接合部材
であるワークの材質とのつりあいより決められるのが好
ましい。FIG. 1 shows a first embodiment, in which an ultrasonic horn 1 constituting a resonator main body is made of aluminum,
One end of a bar made of any one of iron, titanium and the like is provided with a booster (not shown) at one end, or a longitudinal wave of a predetermined frequency is generated directly by electric power supplied from an ultrasonic generator (not shown). A transducer, which is an electroacoustic transducer or an electrovibration transducer composed of a piezoelectric element or a magnetostrictive element that generates and outputs ultrasonic vibration and converts electric energy to mechanical energy, is coaxially coupled, and the vibrator passes through a booster. It has a length that is an integral multiple of a half wavelength of the resonance frequency, which resonates with the ultrasonic vibration transmitted through the vibrator or resonates with the ultrasonic vibration transmitted directly from the vibrator. When the length of the ultrasonic horn 1 is, for example, 波長 wavelength, the position of the maximum vibration amplitude point at the end opposite to the vibrator is located at the position of the maximum vibration amplitude point at the center when the length is 1 wavelength. Then, the ultrasonic horn 1 is connected to a chip 2 made of one of aluminum, iron, titanium, etc. separately from the ultrasonic horn 1 by using a screw capable of moving back and forth in the direction perpendicular to the vibration direction X of the ultrasonic horn 1. It is fixedly attached with a screw member 3 as a means. The material of the joining section 2 may be the same as or different from that of the ultrasonic horn 1, but is preferably determined based on the balance with the material of the workpiece to be joined.

【０００７】この実施形態の場合、超音波ホーン１はそ
の外側面１ａに円形の凹部１ｂを形成し、凹部１ｂの外
側面１ａ寄りの内周面に雌ねじを形成したねじ孔１ｃを
連接している。接合作用部２は、ねじ孔１ｃより凹部１
ｂに内接嵌合する円板形のチップベース２ａの上面に、
四角柱のような角柱形のチップ本体２ｂを同軸に突設し
ている。チップベース２ａは凹部１ｂの雌ねじが形成さ
れていない部分の深さ以上の厚さを有する。チップ本体
２ｂはねじ部材３の厚さ以上の高さを有する。ねじ部材
３はその外周面にねじ孔１ｃの雌ねじに嵌合する雄ねじ
が形成されたねじ部３ａを有し、その上面にそれよりも
小形な工具掛部３ｂを突設し、その中心に貫通孔３ｃを
形成してある。貫通孔３ｃは、チップベース２ａを凹部
１ｂに収容し、ねじ部材３をねじ孔１ｃに締結する際、
チップ本体２ｂと干渉しない大きさの孔径を有してい
る。In the case of this embodiment, the ultrasonic horn 1 has a circular recess 1b formed on the outer surface 1a thereof, and a threaded hole 1c formed with a female screw on the inner peripheral surface of the recess 1b near the outer surface 1a. I have. The joint action portion 2 is provided with the concave portion 1 through the screw hole 1c.
b on the upper surface of the disk-shaped chip base 2a inscribed in
A rectangular column-shaped chip body 2b such as a quadrangular column is protruded coaxially. The chip base 2a has a thickness equal to or greater than the depth of a portion of the recess 1b where the female screw is not formed. The tip body 2b has a height equal to or greater than the thickness of the screw member 3. The screw member 3 has a screw portion 3a on the outer peripheral surface of which a male screw is formed to fit into the female screw of the screw hole 1c, and a tool holding portion 3b smaller than the screw portion 3b is protrudingly provided on the upper surface thereof. A hole 3c is formed. When the through hole 3c accommodates the chip base 2a in the recess 1b and fastens the screw member 3 to the screw hole 1c,
It has a hole diameter large enough not to interfere with the chip body 2b.

【０００８】この実施形態によれば、接合作用部２のチ
ップベース２ａを超音波ホーン１のねじ孔１ｃより凹部
１ｂに収容し、その接合作用部２のチップ本体２ｂをね
じ部材３の貫通孔３ｃの内部に取り込むようにして、ね
じ部材３のねじ部３ａを超音波ホーン１のねじ孔１ｃに
嵌合し、ねじ部材３の工具掛部３ｂにスパナのような締
結工具を嵌めて、当該締結工具でねじ部材３を超音波ホ
ーン１に締結することで、チップ本体２ｂがねじ部材３
の貫通孔３ｃ及び超音波ホーン１の外周面１ａより突出
すると共に、チップベース２ａがねじ部材３の下面と凹
部１ｂの底面とで挟まれる形態で、接合作用部２が超音
波ホーン１に振動方向Ｘと垂直に進退可能なねじ部材３
のねじ部３ａと超音波ホーン１のねじ孔１ｃとからなる
ねじ手段により、固定的に取り付けられる。この状態に
おいて、チップベース２ａの外周面が凹部１ｂの内周面
に接触し、チップベース２ａの底面が凹部１ｂの底面に
接触しているので、超音波ホーン１をそれに結合した図
外の振動子からの超音波振動に共振した場合、接合作用
部２が凹部１ｂの内部で踊ることなく超音波ホーン１の
振動と同じように振動して、超音波振動による接合を適
切に行うことができる。According to this embodiment, the tip base 2a of the joining section 2 is accommodated in the recess 1b through the screw hole 1c of the ultrasonic horn 1, and the tip body 2b of the joining section 2 is inserted into the through hole of the screw member 3. 3c, the screw portion 3a of the screw member 3 is fitted into the screw hole 1c of the ultrasonic horn 1, and a fastening tool such as a wrench is fitted into the tool hook 3b of the screw member 3; By fastening the screw member 3 to the ultrasonic horn 1 with a fastening tool, the tip body 2b
Of the ultrasonic horn 1 and the tip base 2a is sandwiched between the lower surface of the screw member 3 and the bottom surface of the concave portion 1b. Screw member 3 capable of moving back and forth perpendicular to direction X
Is fixedly attached by a screw means including a screw portion 3a of the ultrasonic horn 1 and a screw hole 1c of the ultrasonic horn 1. In this state, the outer peripheral surface of the chip base 2a is in contact with the inner peripheral surface of the concave portion 1b, and the bottom surface of the chip base 2a is in contact with the bottom surface of the concave portion 1b. When resonating with the ultrasonic vibration from the child, the bonding section 2 vibrates in the same manner as the vibration of the ultrasonic horn 1 without dancing inside the concave portion 1b, and the bonding by the ultrasonic vibration can be appropriately performed. .

【０００９】そして、超音波振動による接合作業とチッ
プ本体２ａの表面研磨による補修とが繰り返されて、接
合作用部２が使用不可能となった場合、ねじ部材３の工
具掛部３ｂに前述のような締結工具を嵌めて、ねじ部材
３を緩めて超音波ホーン１より取り外して、当該使用不
能となった古い接合作用部２を超音波ホーン１の凹部１
ｂより取り外す。その後、上記と同じ手順により、新し
い接合作用部２を超音波ホーン１にねじ部材３で固定的
に取り付ければ、超音波ホーン１を繰り返して使用する
ことができる。つまり、超音波ホーン１を装置に付けた
まま、古い接合作用部２を新しい接合作用部２に交換す
るだけで、共振状態のチューニングが適切に取られてい
る超音波ホーン１を再使用することができて、経済的で
あるうえ、品質信頼性を向上することができる。When the joining operation by the ultrasonic vibration and the repair by polishing the surface of the chip main body 2a are repeated and the joining action portion 2 becomes unusable, the above-mentioned tool hooking portion 3b of the screw member 3 is attached to the tool engaging portion 3b. Such a fastening tool is fitted, the screw member 3 is loosened and removed from the ultrasonic horn 1, and the unusable old joining action portion 2 is removed from the concave portion 1 of the ultrasonic horn 1.
Remove from b. After that, the ultrasonic horn 1 can be used repeatedly if the new joining action part 2 is fixedly attached to the ultrasonic horn 1 with the screw member 3 in the same procedure as described above. In other words, the ultrasonic horn 1 whose resonance state has been appropriately tuned can be reused simply by replacing the old bonding operation part 2 with the new bonding operation part 2 with the ultrasonic horn 1 attached to the apparatus. In addition to being economical, quality reliability can be improved.

【００１０】図２は第２実施形態を示し、接合作用部２
のチップベース２ａの上面と外周面との連接角部に截頭
円錐形の傾斜面部２ｃを形成する一方、ねじ部材３の底
面と貫通孔３ｃとの連接角部に傾斜面部２ｃの傾斜面と
整合する傾斜角度を有する截頭円錐形の傾斜孔３ｄ（図
２のｃ図参照）を形成し、接合作用部２を超音波ホーン
１の凹部１ｂにその振動方向Ｘと垂直に進退可能なねじ
孔１ｃとねじ部３ａとからなるねじ手段により固定的に
取り付ける際に、傾斜面部２ｃと傾斜孔３ｄとによる楔
を利かせてある。FIG. 2 shows a second embodiment, in which
A frusto-conical inclined surface portion 2c is formed at the connecting angle between the upper surface of the chip base 2a and the outer peripheral surface, while the inclined surface of the inclined surface portion 2c is formed at the connecting angle between the bottom surface of the screw member 3 and the through hole 3c. A frusto-conical inclined hole 3d (see FIG. 2c) having a matching inclination angle is formed, and the joining action part 2 can be inserted into the concave part 1b of the ultrasonic horn 1 and reciprocated perpendicular to the vibration direction X. A wedge formed by the inclined surface portion 2c and the inclined hole 3d is used when fixedly attached by the screw means including the hole 1c and the screw portion 3a.

【００１１】この実施形態によれば、超音波ホーン１を
振動子からの超音波振動に共振した場合、その振動に対
し、傾斜面部２ｃと傾斜孔３ｄとによる楔が相互に土手
のように働くので、ねじ部材３による締結を強固にしな
くても、接合作用部２が凹部１ｂの内部で踊ることなく
超音波ホーン１の振動と同じように振動して、超音波振
動による接合を適切に行うことができる。According to this embodiment, when the ultrasonic horn 1 resonates with the ultrasonic vibration from the vibrator, the wedge formed by the inclined surface portion 2c and the inclined hole 3d acts like a bank against the vibration. Therefore, even if the fastening by the screw member 3 is not strengthened, the joining action portion 2 vibrates in the same manner as the vibration of the ultrasonic horn 1 without dancing inside the concave portion 1b, and the joining by the ultrasonic vibration is appropriately performed. be able to.

【００１２】図３は第３実施形態を示し、超音波ホーン
１が外側面１ａに角形としての四角形に形成された凹部
１ｄを有し、凹部１ｄの外側面１ａ寄りにそれよりも大
径のねじ孔１ｅを凹部１ｄと同軸に有している。接合作
用部２は、凹部１ｄに内接嵌合する四角板形のチップベ
ース２ｄの上面に、角柱形のチップ本体２ｂを同軸に突
設している。チップベース２ｄは凹部１ｄの深さ以上の
厚さを有する。ねじ部材３は接合作用部２のチップベー
ス２ｄを覆う大径なねじ部３ｅの上面に工具掛部３ｂを
同軸に突設し、その中心に貫通孔３ｃを形成している。FIG. 3 shows a third embodiment, in which an ultrasonic horn 1 has a quadrangular concave portion 1d on the outer surface 1a, and a larger diameter portion near the outer surface 1a of the concave portion 1d. The screw hole 1e is coaxial with the recess 1d. The joining action portion 2 has a prismatic chip main body 2b coaxially protruding from an upper surface of a square plate-shaped chip base 2d fitted in the concave portion 1d. The chip base 2d has a thickness greater than the depth of the recess 1d. The screw member 3 has a tool hook 3b coaxially protruding from the upper surface of a large-diameter screw portion 3e that covers the chip base 2d of the joining action portion 2, and a through hole 3c is formed at the center thereof.

【００１３】この実施形態によれば、チップベース２ｄ
をねじ孔１ｅより凹部１ｄに嵌合し、チップ本体２ｂを
ねじ部材３の貫通孔３ｃの内部に取り込むようにして、
ねじ部材３のねじ部３ｅを超音波ホーン１のねじ孔１ｅ
に嵌合し、ねじ部材３を超音波ホーン１に締結すること
で、振動方向Ｘと垂直に進退可能なねじ孔１ｅとねじ部
３ｅとからなるねじ手段により、接合作用部２が超音波
ホーン１に固定的に取り付けられて凹部１ｄの内部で踊
ることなく超音波ホーン１の振動と同じように振動し
て、超音波振動による接合を適切に行うことができる。According to this embodiment, the chip base 2d
Into the recess 1d through the screw hole 1e so that the chip main body 2b is taken into the through hole 3c of the screw member 3.
The screw portion 3e of the screw member 3 is screwed into the screw hole 1e of the ultrasonic horn 1.
, And the screw member 3 is fastened to the ultrasonic horn 1, so that the joining action part 2 is connected to the ultrasonic horn by a screw means composed of a screw hole 1 e and a screw part 3 e capable of moving back and forth in a direction perpendicular to the vibration direction X. 1 and vibrates in the same manner as the vibration of the ultrasonic horn 1 without dancing inside the concave portion 1d, so that bonding by ultrasonic vibration can be appropriately performed.

【００１４】又、接合作用部２のチップベース２ｄと超
音波ホーン１の凹部１ｄとを互いに整合する四角形に形
成してあり、チップベース２ｄを凹部１ｄに入れること
で、接合作用部２が超音波ホーン１に正確に位置決めさ
れるので、例えば、図外のワークである被接合部材によ
って、接合作用部２のチップ本体２ｂの接合作用面とし
ての上面をメッシュ（正確に配置された多数の凹凸、一
方向に整列された連続する山と谷のような凹凸）、ブラ
スト（任意に配置された多数の凹凸）等と呼ばれる表面
性状に形成した場合、それらの凹凸を超音波ホーン１の
振動方向Ｘに対し予め設定された角度で正確に配置し
て、被接合部材の接合強度を適切に維持することができ
る。Further, the tip base 2d of the joining action part 2 and the concave part 1d of the ultrasonic horn 1 are formed in a rectangular shape which is aligned with each other. Since the positioning is accurately performed on the sonic horn 1, the upper surface as the joining operation surface of the chip main body 2 b of the joining operation unit 2 is meshed by a member to be joined, which is a work (not shown), for example. When formed into a surface property called a ridge (a plurality of arbitrarily arranged irregularities) such as continuous peaks and valleys arranged in one direction, the irregularities are formed in the vibration direction of the ultrasonic horn 1. By arranging accurately at a preset angle with respect to X, the joining strength of the members to be joined can be appropriately maintained.

【００１５】図４は第４実施形態を示し、超音波ホーン
１が凹部１ｂの底面に角形孔としての方形孔１ｆを凹部
１ｂと同軸に有する一方、この方形孔１ｆに内接嵌合す
る凸部２ｄ’（図４のｃ図参照）をチップベース２ａの
底面に同軸に形成し、この凸部２ｄ’を方形孔１ｆに取
り込み、ねじ部材３を超音波ホーン１に締結すること
で、振動方向Ｘと垂直に進退可能なねじ孔１ｃとねじ部
３ａとからなるねじ手段により固定的に取り付ける際
に、接合作用部２の位置決めを行う。FIG. 4 shows a fourth embodiment in which the ultrasonic horn 1 has a rectangular hole 1f as a rectangular hole coaxially with the concave portion 1b on the bottom surface of the concave portion 1b, and a convex which is inscribed in the rectangular hole 1f. A portion 2d '(see FIG. 4c) is formed coaxially on the bottom surface of the chip base 2a, the convex portion 2d' is taken into the square hole 1f, and the screw member 3 is fastened to the ultrasonic horn 1 to vibrate. When fixedly attached by a screw means including a screw hole 1c and a screw portion 3a which can advance and retreat in a direction perpendicular to the direction X, the joining action portion 2 is positioned.

【００１６】この実施形態によれば、凸部２ｄ’を方形
孔１ｆに入れることで、接合作用部２が超音波ホーン１
に正確に位置決めされるので、上記実施形態３と同様に
チップ本体２ｂの接合作用面がメッシュやブラスト等の
表面性状を有する場合、それらの凹凸を超音波ホーン１
の振動方向Ｘに対し予め設定された角度で正確に配置し
て、被接合部材の接合強度を適切に維持することができ
る。According to this embodiment, the projection 2d 'is inserted into the square hole 1f, so that the joining action portion 2 is connected to the ultrasonic horn 1
When the bonding surface of the chip main body 2b has a surface property such as mesh or blast, as in the case of the third embodiment, the unevenness of the ultrasonic horn 1
Can be accurately arranged at a preset angle with respect to the vibration direction X, and the joining strength of the members to be joined can be appropriately maintained.

【００１７】図５は第５実施形態を示し、超音波ホーン
１が外側面１ａに平坦面部１ｇを振動方向Ｘと平行に有
し、この平坦面部１ｇに複数のねじ孔１ｈを振動方向Ｘ
と直交する方向に所定間隔を以て形成している。接合作
用部２は外周面に雄ねじが形成されたねじ部２ｅにそれ
よりも大径な円板状のチップ本体２ｆを同軸に連接した
頭付きねじのような形状を有している。チップ本体２ｆ
はその外周面に平行に相対峙する一対の平坦面よりなる
工具掛部２ｇを備えている。FIG. 5 shows a fifth embodiment in which the ultrasonic horn 1 has a flat surface portion 1g on the outer surface 1a parallel to the vibration direction X, and a plurality of screw holes 1h formed in the flat surface portion 1g in the vibration direction X.
Are formed at predetermined intervals in a direction perpendicular to the direction. The joining action part 2 has a shape like a headed screw in which a disk-shaped chip main body 2f having a larger diameter is coaxially connected to a screw part 2e having an external thread formed on the outer peripheral surface. Chip body 2f
Is provided with a tool hook 2g composed of a pair of flat surfaces facing each other in parallel to the outer peripheral surface.

【００１８】この実施形態によれば、接合作用部２のね
じ部２ｅを超音波ホーン１のねじ孔１ｈに装着して、工
具掛部２ｇに嵌めたスパナのような工具でねじ部２ｅを
ねじ孔１ｈに締結し、チップ本体２ｆのねじ部２ｅより
外側に突出する底面を超音波ホーン１の平坦面部１ｇに
当接することで、振動方向Ｘと垂直に締結可能なねじ部
２ｅとねじ孔１ｈとからなるねじ手段により、接合作用
部２が超音波ホーン１に固定的に取り付けられて超音波
ホーン１の振動と同じように振動して、超音波振動によ
る接合を適切に行うことができる。According to this embodiment, the screw portion 2e of the joint action portion 2 is mounted on the screw hole 1h of the ultrasonic horn 1, and the screw portion 2e is screwed with a tool such as a spanner fitted into the tool hook 2g. The bottom surface of the tip body 2f, which protrudes outward from the screw portion 2e, comes into contact with the flat surface portion 1g of the ultrasonic horn 1 so that the screw portion 2e and the screw hole 1h can be fastened perpendicularly to the vibration direction X. The joining means 2 is fixedly attached to the ultrasonic horn 1 and vibrates in the same manner as the vibration of the ultrasonic horn 1, so that the ultrasonic vibration can be appropriately joined.

【００１９】又、複数の接合作用部２を複数のねじ孔１
ｈのそれぞれに締結することで、超音波ホーン１に複数
の接合作用部２を振動方向Ｘと直交する方向に所定間隔
で整列配置することができる。Further, a plurality of joining action parts 2 are connected to a plurality of screw holes 1.
By fastening to each of h, a plurality of joining action parts 2 can be arranged in the ultrasonic horn 1 at predetermined intervals in a direction orthogonal to the vibration direction X.

【００２０】図６は第６実施形態を示し、超音波ホーン
１が平坦面部１ｇに溝１ｉを振動方向Ｘと直交する方向
に延設し、この溝１ｉの底面に複数の貫通孔１ｊを振動
方向Ｘと直交する方向に所定間隔で配置形成し、貫通孔
１ｊの両端の開口縁に傾斜面部１ｋ，１ｍを形成してい
る。接合作用部２は貫通孔１ｊよりも長さが長いねじ部
２ｈ、截頭円錐形の傾斜面部２ｉ、チップ本体２ｆを同
軸に下から上に順に連接した頭付きねじのような形状を
有している。チップ本体２ｆの外周面には溝１ｉの幅と
略同一寸法で平行に相対峙する一対の平坦面により形成
された回止部２ｊを備えている。この接合作用部２のね
じ部２ｈの先端外周面に形成された雄ねじに締結するナ
ット４はそのねじ孔４ａまわりの一端部に傾斜面部１ｋ
に整合する截頭円錐形の傾斜面部４ｂを有する。FIG. 6 shows a sixth embodiment in which an ultrasonic horn 1 has a groove 1i extending in a direction perpendicular to the vibration direction X in a flat surface portion 1g, and a plurality of through holes 1j formed in the bottom surface of the groove 1i. They are arranged at predetermined intervals in a direction orthogonal to the direction X, and inclined surface portions 1k and 1m are formed at the opening edges at both ends of the through hole 1j. The joint action portion 2 has a shape like a headed screw in which a screw portion 2h longer than the through hole 1j, a frusto-conical inclined surface portion 2i, and a tip body 2f are coaxially connected in order from bottom to top. ing. The outer peripheral surface of the chip body 2f is provided with a locking portion 2j formed by a pair of flat surfaces facing each other in parallel to each other with substantially the same dimensions as the width of the groove 1i. A nut 4 to be fastened to a male screw formed on the outer peripheral surface of the distal end of the screw portion 2h of the joining action portion 2 has an inclined surface portion 1k at one end around the screw hole 4a.
Has a frusto-conical inclined surface portion 4b which matches the shape of the inclined surface 4b.

【００２１】この実施形態によれば、接合作用部２のね
じ部２ｈを超音波ホーン１の溝１ｉより貫通孔１ｊに挿
入し、チップ本体２ｆの回止部２ｊを溝１ｉに内接嵌合
するように挿入配置し、溝１ｉの反対側で貫通孔１ｊよ
り突出するねじ部２ｈにナット４の傾斜面部４ｂ側より
ねじ孔４ａを装着して、ナット４をスパナのような締結
工具で締結すると、接合作用部２の傾斜面部２ｉが超音
波ホーン１の傾斜面部１ｋに当接し、傾斜面部２ｉより
外側に突出するチップ本体２ｆの底面が溝１ｉの底面に
当接し、ナット４の傾斜面部４ｂが超音波ホーン１の傾
斜面部１ｍに当接することで、振動方向Ｘと垂直に締結
可能なねじ部２ｈとねじ孔４ａとからなるねじ手段によ
り、接合作用部２が超音波ホーン１に固定的に取り付け
られる。According to this embodiment, the screw portion 2h of the joining action portion 2 is inserted into the through hole 1j from the groove 1i of the ultrasonic horn 1, and the locking portion 2j of the tip body 2f is fitted in the groove 1i. The nut 4 is attached to the screw portion 2h projecting from the through hole 1j on the opposite side of the groove 1i from the inclined surface 4b side of the nut 4 and the nut 4 is fastened with a fastening tool such as a spanner. Then, the inclined surface portion 2i of the joining action portion 2 comes into contact with the inclined surface portion 1k of the ultrasonic horn 1, the bottom surface of the tip body 2f projecting outward from the inclined surface portion 2i comes into contact with the bottom surface of the groove 1i, and the inclined surface portion of the nut 4 4b is brought into contact with the inclined surface 1m of the ultrasonic horn 1 so that the joint action portion 2 is fixed to the ultrasonic horn 1 by a screw means comprising a screw portion 2h and a screw hole 4a which can be fastened perpendicularly to the vibration direction X. Can be attached

【００２２】上記ナット４を締結する際、チップ本体２
ｆの回止部２ｊが溝１ｉに取り込まれているので、接合
作用部２を超音波ホーン１に対して確実に回り止めして
的確に固定することができる。When fastening the nut 4, the tip body 2
Since the detent portion 2j of f is taken in the groove 1i, the joining action portion 2 can be reliably stopped from rotating with respect to the ultrasonic horn 1 and fixed accurately.

【００２３】そして、超音波ホーン１を図外の振動子か
らの超音波振動に共振した場合、その振動に対し、傾斜
面部１ｋ，２ｉ，１ｍ，４ｂ間での楔が相互に土手のよ
うに働いて、ナット４による締結を強固にしなくても、
接合作用部２が踊ることなく超音波ホーン１の振動と同
じように振動して、超音波振動による接合を適切に行う
ことができる。When the ultrasonic horn 1 resonates with the ultrasonic vibration from the vibrator (not shown), the wedges between the inclined surfaces 1k, 2i, 1m, and 4b react with each other like a bank. Even if you work and do not tighten the nut 4
The joining section 2 vibrates in the same manner as the vibration of the ultrasonic horn 1 without dancing, and the joining by the ultrasonic vibration can be appropriately performed.

【００２４】図７は第７実施形態を示し、頭付きねじの
ような接合作用部２のねじ部２ｈを超音波ホーン１の溝
１ｉより貫通孔１ｊに挿入し、チップ本体２ｆの回止部
２ｊを溝１ｉに内接嵌合するように挿入配置して回り止
めした状態で、溝１ｉの反対側で貫通孔１ｊより突出す
るねじ部２ｈにナット４をスパナのような締結工具で締
結して、接合作用部２を超音波ホーン１に固定的に取り
付けている。FIG. 7 shows a seventh embodiment, in which a screw portion 2h of a joint action portion 2 such as a headed screw is inserted into a through hole 1j through a groove 1i of an ultrasonic horn 1, and a detent portion of a tip body 2f. With the nut 2j inserted and arranged so as to be inscribed in the groove 1i and stopped from rotating, the nut 4 is fastened to the screw portion 2h protruding from the through hole 1j on the opposite side of the groove 1i with a fastening tool such as a spanner. Thus, the joining action section 2 is fixedly attached to the ultrasonic horn 1.

【００２５】この実施形態によれば、振動方向Ｘと垂直
に締結可能なねじ部２ｈとねじ孔４ａとからなるねじ手
段により、接合作用部２が超音波ホーン１に固定的に取
り付けられ、超音波ホーン１の振動と同じように振動し
て、超音波振動による接合を適切に行うことができる。According to this embodiment, the joining action portion 2 is fixedly attached to the ultrasonic horn 1 by the screw means comprising the screw portion 2h and the screw hole 4a which can be fastened perpendicularly to the vibration direction X. By vibrating in the same manner as the vibration of the sonic horn 1, bonding by ultrasonic vibration can be appropriately performed.

【００２６】図８は第８実施形態を示し、超音波ホーン
１は平坦面部１ｇに嵌合溝１ｎを振動方向Ｘと直交する
方向に延設し、この嵌合溝１ｎの振動方向Ｘに相対峙す
る面を平坦面部１ｇ側から嵌合溝１ｎの底面側に行くに
従って徐々に間隔が狭くなるような傾斜面部１ｐ，１ｑ
に形成し、この嵌合溝１ｎの底面に複数の貫通孔１ｊを
形成している。接合作用部２は、嵌合溝１ｎに嵌め込ま
れる帯状のチップベース２ｋの上面に、複数のチップ本
体２ｍを振動方向Ｘと直交する方向に所定間隔を以て突
設している。チップベース２ｋの振動方向Ｘに相対峙す
る面は嵌合溝１ｎの傾斜面部１ｐ，１ｑに整合する傾斜
面部２ｎ，２ｐに形成されている。チップベース２ｋの
底面には複数のねじ孔２ｑを貫通孔１ｊと対応する位置
に形成してある。各ねじ孔２ｑには嵌合溝１ｎの反対側
より貫通孔１ｊに挿入された頭付きねじ部材５の先端に
形成されたねじ部５ａが嵌合する。FIG. 8 shows an eighth embodiment in which the ultrasonic horn 1 has a fitting groove 1n extending in a direction perpendicular to the vibration direction X on the flat surface portion 1g, and the ultrasonic horn 1 is arranged in the vibration direction X of the fitting groove 1n. The inclined surfaces 1p and 1q whose distances gradually decrease as the opposing surfaces go from the flat surface 1g to the bottom of the fitting groove 1n.
And a plurality of through holes 1j are formed in the bottom surface of the fitting groove 1n. The joining action part 2 has a plurality of chip bodies 2m protruding at a predetermined interval in a direction orthogonal to the vibration direction X on the upper surface of a band-shaped chip base 2k fitted into the fitting groove 1n. The surfaces of the chip base 2k that face each other in the vibration direction X are formed on the inclined surfaces 2n and 2p that match the inclined surfaces 1p and 1q of the fitting groove 1n. On the bottom surface of the chip base 2k, a plurality of screw holes 2q are formed at positions corresponding to the through holes 1j. A screw portion 5a formed at the tip of the headed screw member 5 inserted into the through hole 1j from the opposite side of the fitting groove 1n is fitted into each screw hole 2q.

【００２７】この実施形態によれば、接合作用部２のチ
ップベース２ｋを超音波ホーン１の嵌合溝１ｎに挿入
し、嵌合溝１ｎの反対側より貫通孔１ｊにねじ部材５を
挿入して、その頭部に形成された図外の工具用孔に挿入
した６角レンチのような工具で、先端のねじ部５ａをね
じ孔２ｑに締結すると、ねじ部材５で接合作用部２のチ
ップベース２ｋが嵌合溝１ｎの底面側に引き込まれ、チ
ップベース２ｋの傾斜面部２ｎ，２ｐと嵌合溝１ｎの傾
斜面部１ｐ，１ｑとが互いに接触して、振動方向Ｘと垂
直に締結可能なねじ部５ａとねじ孔２ｑとからなるねじ
手段により、接合作用部２が超音波ホーン１に固定的に
取り付けられ、超音波ホーン１の振動と同じように振動
して、超音波振動による接合を適切に行うことができ
る。According to this embodiment, the tip base 2k of the joining action portion 2 is inserted into the fitting groove 1n of the ultrasonic horn 1, and the screw member 5 is inserted into the through hole 1j from the opposite side of the fitting groove 1n. When the screw 5a at the tip is fastened to the screw hole 2q with a tool such as a hexagon wrench inserted into a tool hole (not shown) formed in the head, the tip of the joint action portion 2 is screwed by the screw member 5. The base 2k is drawn into the bottom side of the fitting groove 1n, and the inclined surfaces 2n, 2p of the chip base 2k and the inclined surfaces 1p, 1q of the fitting groove 1n come into contact with each other, and can be fastened perpendicularly to the vibration direction X. The joining action part 2 is fixedly attached to the ultrasonic horn 1 by a screw means including the screw part 5a and the screw hole 2q, and vibrates in the same manner as the vibration of the ultrasonic horn 1 to perform the joining by the ultrasonic vibration. Can be done properly.

【００２８】この実施形態ではチップ本体２ｍをチップ
ベース２ｋに点在配置した形態を図示して説明したが、
各チップ本体２ｍをチップベース２ｋの延設方向に一連
に連結した帯状に形成しても同様の効果がある。In this embodiment, the form in which the chip main body 2m is scattered and arranged on the chip base 2k is illustrated and described.
The same effect can be obtained even if each chip body 2m is formed in a band shape connected in series in the extending direction of the chip base 2k.

【００２９】図９〜１６は第１〜８実施形態の中のいず
れかを用いた超音波ホーン１の第９〜１６実施形態を示
している。FIGS. 9 to 16 show ninth to sixteenth embodiments of the ultrasonic horn 1 using any one of the first to eighth embodiments.

【００３０】図９に示す第９実施形態の超音波ホーン１
は、両支持の形態で、共振周波数の１波長の長さを有
し、その長さ方向中央の最大振動振幅点ｆ３に上下で平
行する一対の平坦面部１ｇを有し、一方の平坦面部１ｇ
に複数の接合作用部２を振動方向Ｘと直交方向に所定間
隔で列状に配置するように、図５に示すねじ孔１ｈとね
じ部２ｅとからなるねじ手段により、固定的に取り付け
てある。An ultrasonic horn 1 according to a ninth embodiment shown in FIG.
Has a length of one wavelength of the resonance frequency, has a pair of flat surface portions 1g vertically parallel to the maximum vibration amplitude point f3 at the center in the length direction, and has one flat surface portion 1g.
5 is fixedly mounted by means of a screw means comprising a screw hole 1h and a screw portion 2e shown in FIG. 5 so that a plurality of bonding action portions 2 are arranged in a row at predetermined intervals in a direction orthogonal to the vibration direction X. .

【００３１】図１０に示す第１０実施形態の超音波ホー
ン１は、両支持の形態で、共振周波数の１波長の長さを
有し、その長さ方向中央の最大振動振幅点ｆ３において
上下で平行する一対の平坦面部１ｇのそれぞれに振動方
向Ｘと直交方向に延設された溝１ｉを有し、上側の溝１
ｉに複数の接合作用部２を当該溝１ｉの延設方向に所定
間隔で列状に配置するように、図６に示すねじ部２ｈと
ねじ孔４ａとからなるねじ手段により、固定的に取り付
けてある。下側の溝１ｉの底面には図示は省略したが、
ナット４の図６に示す傾斜面部４ｂが整合する傾斜面部
１ｍを形成してある。The ultrasonic horn 1 of the tenth embodiment shown in FIG. 10 has a length of one wavelength of the resonance frequency in the form of a double support, and is vertically moved at the maximum vibration amplitude point f3 at the center in the length direction. Each of a pair of parallel flat surface portions 1g has a groove 1i extending in a direction orthogonal to the vibration direction X, and the upper groove 1
In order to arrange a plurality of joining action parts 2 at a predetermined interval in the extending direction of the groove 1i, a plurality of joining action parts 2 are fixedly attached to the i by a screw means including a screw part 2h and a screw hole 4a shown in FIG. It is. Although illustration is omitted on the bottom surface of the lower groove 1i,
The nut 4 has an inclined surface portion 1m that is aligned with the inclined surface portion 4b shown in FIG.

【００３２】図１１に示す第１１実施形態の超音波ホー
ン１は、両支持の形態で、共振周波数の１波長の長さを
有し、その長さ方向中央の最大振動振幅点ｆ３において
上下で平行する一対の平坦面部１ｇの一方に振動方向Ｘ
と直交方向に延設された嵌合溝１ｎを有し、その嵌合溝
１ｎに図８に示す接合作用部２のチップベース２ｋを挿
入してねじ部材５で締結して、図８に示すねじ部５ａと
ねじ孔２ｑとからなるねじ手段により、固定的に取り付
けてある。The ultrasonic horn 1 of the eleventh embodiment shown in FIG. 11 has a length of one wavelength of the resonance frequency in the form of a double support, and is vertically shifted at the maximum vibration amplitude point f3 at the center in the length direction. The vibration direction X is applied to one of the pair of parallel flat surface portions 1g.
8 has a fitting groove 1n extending in a direction orthogonal to the above. The tip base 2k of the joining action portion 2 shown in FIG. 8 is inserted into the fitting groove 1n and fastened with the screw member 5, and shown in FIG. It is fixedly attached by screw means including a screw portion 5a and a screw hole 2q.

【００３３】図１２に示す第１２実施形態の超音波ホー
ン１は、片支持の形態で、共振周波数の１／２波長の長
さを有し、最小振動振幅点ｆ７より徐々に絞り込まれた
矩形体の最大振動振幅点ｆ８において、上下で平行する
一対の平坦面部１ｇに、複数の接合作用部２を、振動方
向Ｘと直交方向に所定間隔で列状に配置するように、図
５に示すねじ孔１ｈとねじ部２ｅとからなるねじ手段に
より、固定的に取り付けてある。The ultrasonic horn 1 of the twelfth embodiment shown in FIG. 12 is a single-supported ultrasonic horn having a length of one-half wavelength of the resonance frequency and gradually narrowing down from the minimum vibration amplitude point f7. At the maximum vibration amplitude point f8 of the body, FIG. 5 shows that a plurality of bonding action parts 2 are arranged in a row at a predetermined interval in a direction orthogonal to the vibration direction X on a pair of flat surfaces 1g vertically parallel to each other. It is fixedly attached by screw means comprising a screw hole 1h and a screw portion 2e.

【００３４】図１３に示す第１３実施形態の超音波ホー
ン１は、片支持の形態で、共振周波数の１／２波長の長
さを有し、最小振動振幅点ｆ７より徐々に絞り込まれた
矩形体の最大振動振幅点ｆ８において、上下で平行する
一対の平坦面部１ｇの一方に、振動方向Ｘと直交方向に
延設された嵌合溝１ｎを有し、その嵌合溝１ｎに図８に
示す接合作用部２のチップベース２ｋを挿入してねじ部
材５で締結して、図８に示すねじ部５ａとねじ孔２ｑと
からなるねじ手段により、固定的に取り付けてあるが、
この接合作用部２は図８に示すチップ本体２ｍに代え
て、チップベース２ｋの延設方向に一連に連結した帯状
に形成した形態のチップ本体２ｍ’を備えている。The ultrasonic horn 1 of the thirteenth embodiment shown in FIG. 13 is a single-supported ultrasonic horn having a half wavelength of the resonance frequency and a rectangular shape gradually narrowed from the minimum vibration amplitude point f7. At the maximum vibration amplitude point f8 of the body, one of a pair of upper and lower flat surfaces 1g has a fitting groove 1n extending in a direction perpendicular to the vibration direction X, and the fitting groove 1n is provided in FIG. Although the tip base 2k of the joining action part 2 shown is inserted and fastened with the screw member 5, it is fixedly attached by the screw means including the screw part 5a and the screw hole 2q shown in FIG.
The joining action section 2 is provided with a chip body 2m 'in the form of a band connected in series in the extending direction of the chip base 2k, instead of the chip body 2m shown in FIG.

【００３５】図１４に示す第１４実施形態の超音波ホー
ン１は、片支持の形態で、共振周波数の１／２波長の長
さを有し、最小振動振幅点ｆ７より徐々に絞り込まれた
四角柱の最大振動振幅点ｆ８において、前後に相対峙す
る一対の平坦面部１ｇに、尖端を有する丸棒状の接合作
用部２を、図５に示すねじ部２ｅとねじ孔１ｈとからな
るねじ手段により、固定的に取り付けている。The ultrasonic horn 1 of the fourteenth embodiment shown in FIG. 14 is a single support type, has a length of 波長 wavelength of the resonance frequency, and is gradually narrowed from the minimum vibration amplitude point f7. At the maximum vibration amplitude point f8 of the prism, a round bar-shaped joining action portion 2 having a pointed end is screwed to a pair of flat surface portions 1g facing each other by a screw means including a screw portion 2e and a screw hole 1h shown in FIG. , Fixedly attached.

【００３６】図１５に示す第１５実施形態の超音波ホー
ン１は、片支持の形態で、共振周波数の１／２波長の長
さを有し、最小振動振幅点ｆ７より徐々に絞り込まれた
四角柱の最大振動振幅点ｆ８において、前後に相対峙す
る一対の平坦面部１ｇに、図７に示す接合作用部２を、
ねじ部２ｈとねじ孔４ａとからなるねじ手段により、超
音波ホーン１に固定的に取り付けている。The ultrasonic horn 1 of the fifteenth embodiment shown in FIG. 15 is a single-supported ultrasonic horn having a length of one-half wavelength of the resonance frequency and gradually narrowed from the minimum vibration amplitude point f7. At the maximum vibration amplitude point f8 of the prism, the joining action part 2 shown in FIG.
The ultrasonic horn 1 is fixedly attached to the ultrasonic horn 1 by screw means including a screw portion 2h and a screw hole 4a.

【００３７】図１６に示す第１６実施形態の超音波ホー
ン１は、片支持の形態で、共振周波数の１／２波長の長
さを有し、最小振動振幅点ｆ７より徐々に絞り込まれた
四角柱の最大振動振幅点ｆ８において、前後左右の平坦
面部１ｇに、図５に示す接合作用部２を、ねじ部２ｅと
ねじ孔１ｈとからなるねじ手段により、超音波ホーン１
に固定的に取り付けている。The ultrasonic horn 1 of the sixteenth embodiment shown in FIG. 16 is a single support type, has a length of 波長 wavelength of the resonance frequency, and is gradually narrowed from the minimum vibration amplitude point f7. At the maximum vibration amplitude point f8 of the prism, the joining action portion 2 shown in FIG. 5 is attached to the front, rear, left and right flat surface portions 1g by a screw means including a screw portion 2e and a screw hole 1h.
Fixedly attached to

【００３８】尚、第９〜１１実施形態では、超音波ホー
ン１の両端の中心には図外のブースタ又は図外の振動子
を結合する際に使用するねじ孔を有しているが、その一
方のねじ孔に符号１ｒを付して図示してある。In the ninth to eleventh embodiments, the ultrasonic horn 1 has screw holes at the centers of both ends used for connecting a booster (not shown) or a vibrator (not shown). One screw hole is denoted by reference numeral 1r.

【００３９】又、第９〜１１実施形態では、超音波ホー
ン１を図外のブースタ又は図外の振動子に締結する際、
最大振動振幅点ｆ１から最小振動振幅点ｆ２までの部
分、最小振動振幅点ｆ４から最大振動振幅点ｆ５までの
部分のそれぞれに上下で平行に形成された平坦面部１ｓ
に、図外の締結工具を掛けるようになっている。In the ninth to eleventh embodiments, when the ultrasonic horn 1 is fastened to a booster (not shown) or a vibrator (not shown),
A flat surface portion 1s formed in parallel with the upper and lower portions of the portion from the maximum vibration amplitude point f1 to the minimum vibration amplitude point f2 and the portion from the minimum vibration amplitude point f4 to the maximum vibration amplitude point f5.
Then, a fastening tool (not shown) is applied to the apparatus.

【００４０】又、第１２〜１３実施形態では、超音波ホ
ーン１を図外のブースタ又は図外の振動子に締結する
際、最大振動振幅点ｆ６から最小振動振幅点ｆ７までの
部分に上下で平行に形成された平坦面部１ｓに、図外の
締結工具を掛けるようになっている。In the twelfth and thirteenth embodiments, when the ultrasonic horn 1 is fastened to a booster (not shown) or a vibrator (not shown), the ultrasonic horn 1 is vertically moved to a portion from the maximum vibration amplitude point f6 to the minimum vibration amplitude point f7. An unillustrated fastening tool is applied to the flat surface portion 1s formed in parallel.

【００４１】又、第１２〜１６実施形態では、超音波ホ
ーン１の最大振動振幅点ｆ６における端面の中心に、図
外のブースタ又は図外の振動子を結合する際に使用する
図外のねじ孔を有している。In the twelfth to sixteenth embodiments, an unillustrated booster or an unillustrated screw used for connecting an unillustrated booster or an unillustrated vibrator to the center of the end face of the ultrasonic horn 1 at the maximum oscillation amplitude point f6. Has holes.

【００４２】更に、第１４〜１６実施形態では、超音波
ホーン１を図外のブースタ又は図外の振動子に締結する
際、最大振動振幅点ｆ６から最小振動振幅点ｆ７までの
円柱部の外周面に形成された図外の工具用孔に図外の締
結工具を掛けるようになっている。Further, in the fourteenth to sixteenth embodiments, when the ultrasonic horn 1 is fastened to a booster (not shown) or a vibrator (not shown), the outer periphery of the cylindrical portion from the maximum vibration amplitude point f6 to the minimum vibration amplitude point f7. An unillustrated fastening tool is to be hung on an unillustrated tool hole formed on the surface.

【図面の簡単な説明】[Brief description of the drawings]

【図１】 第１実施形態を示し、ａ図は分解斜視図、ｂ
図は組立平面図、ｃ図はｂ図のＡ−Ａ線断面図。FIG. 1 shows a first embodiment, FIG. 1A is an exploded perspective view, and FIG.
The figure is an assembly plan view, and the figure c is a sectional view taken along the line AA of the figure b.

【図２】 第２実施形態を示し、ａ図は分解斜視図、ｂ
図は組立平面図、ｃ図はｂ図のＢ−Ｂ線断面図。FIG. 2 shows a second embodiment, FIG. 2A is an exploded perspective view, and FIG.
The figure is an assembly plan view, and the figure c is a sectional view taken along the line BB in the figure b.

【図３】 第３実施形態を示し、ａ図は分解斜視図、ｂ
図は組立平面図、ｃ図はｂ図のＣ−Ｃ線断面図。FIG. 3 shows a third embodiment, wherein FIG. 3A is an exploded perspective view and FIG.
The figure is an assembly plan view, and the figure c is a sectional view taken along line CC of the figure b.

【図４】 第４実施形態を示し、ａ図は分解斜視図、ｂ
図は組立平面図、ｃ図はｂ図のＤ−Ｄ線断面図。FIG. 4 shows a fourth embodiment, wherein FIG. 4A is an exploded perspective view and FIG.
The figure is an assembly plan view, and the figure c is a sectional view taken along line DD of the figure b.

【図５】 第５実施形態を示し、ａ図は分解斜視図、ｂ
図はｃ図のＥ−Ｅ線断面図、ｃ図は組立平面図。FIG. 5 shows a fifth embodiment, wherein FIG. 5A is an exploded perspective view, and FIG.
The figure is a sectional view taken along line E-E of the figure c, and the figure c is a plan view of the assembly.

【図６】 第６実施形態を示し、ａ図は分解斜視図、ｂ
図はｃ図のＦ−Ｆ線断面図、ｃ図は組立平面図。FIG. 6 shows a sixth embodiment, wherein FIG. 6A is an exploded perspective view and FIG.
The figure is a sectional view taken along line FF of FIG.

【図７】 第７実施形態を示し、ａ図は分解斜視図、ｂ
図はｃ図のＧ−Ｇ線断面図、ｃ図は組立平面図。7A and 7B show a seventh embodiment, wherein FIG. 7A is an exploded perspective view and FIG.
The figure is a sectional view taken along the line GG of the figure c, and the figure c is an assembly plan view.

【図８】 第８実施形態を示し、ａ図は分解斜視図、ｂ
図はｃ図のＨ−Ｈ線断面図、ｃ図は組立平面図。FIG. 8 shows an eighth embodiment, wherein FIG. 8A is an exploded perspective view and FIG.
The figure is a cross-sectional view taken along the line HH in FIG.

【図９】 第９実施形態を示す斜視図。FIG. 9 is a perspective view showing a ninth embodiment.

【図１０】 第１０実施形態を示す斜視図。FIG. 10 is a perspective view showing a tenth embodiment.

【図１１】 第１１実施形態を示す斜視図。FIG. 11 is a perspective view showing an eleventh embodiment.

【図１２】 第１２実施形態を示す斜視図。FIG. 12 is a perspective view showing a twelfth embodiment.

【図１３】 第１３実施形態を示す斜視図。FIG. 13 is a perspective view showing a thirteenth embodiment.

【図１４】 第１４実施形態を示す斜視図。FIG. 14 is a perspective view showing a fourteenth embodiment.

【図１５】 第１５実施形態を示す斜視図。FIG. 15 is a perspective view showing a fifteenth embodiment.

【図１６】 第１６実施形態を示す斜視図。FIG. 16 is a perspective view showing a sixteenth embodiment.

【符号の説明】[Explanation of symbols]

１ 超音波ホーン １ａ 外側面 １ｂ，１ｄ 凹部 １ｃ，１ｅ，１ｈ，２ｑ，４ａ ねじ孔 １ｋ，１ｍ，１ｐ，１ｑ，２ｃ，２ｎ，２ｐ，３ｄ，４
ｂ 傾斜面部 ２ 接合作用部 ２ａ，２ｄ，２ｋ チップベース ２ｂ，２ｆ，２ｍ，２ｍ’ チップ本体 ２ｅ，２ｈ，３ａ，３ｅ，５ａ ねじ部 ３，５ ねじ部材 ４ ナットReference Signs List 1 ultrasonic horn 1a outer surface 1b, 1d recess 1c, 1e, 1h, 2q, 4a screw hole 1k, 1m, 1p, 1q, 2c, 2n, 2p, 3d, 4
b Inclined surface portion 2 Joining action portion 2a, 2d, 2k Tip base 2b, 2f, 2m, 2m 'Tip body 2e, 2h, 3a, 3e, 5a Screw portion 3, 5 Screw member 4 Nut

フロントページの続き (56)参考文献 特開 昭49−2753（ＪＰ，Ａ) 実開 平４−98383（ＪＰ，Ｕ) 米国特許4088257（ＵＳ，Ａ) 米国特許3389845（ＵＳ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B23K 20/10 B60B 1/02 Continuation of the front page (56) References JP-A-49-2753 (JP, A) JP-A-4-98383 (JP, U) US Patent 4,088,257 (US, A) US Patent 3,389,845 (US, A) (58) Field surveyed (Int.Cl. 7 , DB name) B23K 20/10 B60B 1/02

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項１】 超音波振動を発生する振動子に連結され
る超音波ホーンは最大振動振幅点位置で外側面に形成さ
れた凹部と凹部の開口側に雌ねじが形成されたねじ孔部
とを有し、接合作用部は凹部に内接嵌合されたチップベ
ースとチップベースの上面より突出されたチップ本体と
を有し、超音波ホーンの振動方向と垂直に進退可能なね
じ部材はチップ本体を非接触に取込むことが可能に形成
された内側の貫通孔と超音波ホーンのねじ孔部に嵌合す
る外側の雄ねじ部とを有し、チップ本体がねじ部材の貫
通孔に取込まれ、ねじ部材が雄ねじ部を介して超音波ホ
ーンのねじ孔部に締結されることにより、チップ本体の
先端部が被接合部材と接触し得るようにねじ部材及び超
音波ホーンより突出されると共に、チップベースがねじ
部材の下面と凹部の底面とで挟まれる形態となり、接合
作用部が超音波ホーンに取り付けられたことを特徴とす
る超音波振動接合用共振器。1. A is formed on the outer surface in the ultrasonic horn maximum vibration amplitude point position connected to the vibrator for generating ultrasonic vibration
Screw holes with female threads formed on the opening side of the recess and the recess
And the joining action portion is a tip
And the chip body protruding from the upper surface of the chip base
It can move back and forth perpendicular to the vibration direction of the ultrasonic horn
The screw member is formed so that the chip body can be taken in non-contact
With the through hole on the inside and the screw hole of the ultrasonic horn.
And a tip body having a threaded member.
The ultrasonic member is inserted into the through hole and the screw member is
Screw into the screw hole of the
The screw member and the ultra
It is projected from the sonic horn and the tip base is screwed
Joined between the bottom surface of the member and the bottom surface of the recess, joining
A resonator for ultrasonic vibration bonding, wherein an action part is attached to an ultrasonic horn . 【請求項２】 超音波振動を発生する振動子に連結され2. An ultrasonic vibration generating oscillator connected to a vibrator.
る超音波ホーンは最大振動振幅点位置で外側面に形成さUltrasonic horn is formed on the outer surface at the point of maximum vibration amplitude.
れた凹部と凹部の底面に形成された貫通孔とを有し、接And a through hole formed in the bottom surface of the recess.
合作用部は凹部に内接嵌合されたチップ本体とチップ本The mating part consists of the chip body and the chip
体の底面より貫通孔を経由して突出された雄ねじ部とをThe male screw part protruding from the bottom of the body via the through hole
有し、超音波ホーンの振動方向と垂直に進退可能なねじHas a screw that can move forward and backward perpendicular to the vibration direction of the ultrasonic horn
部材は接合作用部の雄ねじ部に嵌合する雌ねじ部が形成The member has an internal thread that fits into the external thread of the joint
されたねじ孔部を有し、ねじ部材がねじ孔部を介して接Threaded screw holes, and the screw member is connected via the screw holes.
合作用部の雄ねじ部に締結されることにより、チップ本The tip is fastened to the male thread of the joint
体の先端部が被接合部材と接触し得るように超音波ホーUltrasonic horn so that the tip of the body can come into contact with the workpiece
ンより突出されると共に、チップ本体が凹部の底面に接And the chip body contacts the bottom of the recess.
触する形態となり、接合作用部が超音波ホーンに取り付It comes into contact form, and the joint action part is attached to the ultrasonic horn
けられたことを特徴とする超音波振動接合用共振器。A resonator for ultrasonic vibration bonding, characterized in that the resonator has been shaken. 【請求項３】 超音波振動を発生する振動子に連結され3. An ultrasonic vibration generating oscillator connected to an oscillator.
る超音波ホーンは最大振動振幅点位置で外側面に形成さUltrasonic horn is formed on the outer surface at the point of maximum vibration amplitude.
れた凹部と凹部の底面に形成された貫通孔とを有し、凹And a through hole formed in the bottom surface of the recess.
部の１組の側面が凹部の開口側より底面側に行くに従っAs one set of sides of the part goes from the opening side of the recess to the bottom side
て間隔が狭くなる傾斜面に形成されており、接合作用部Is formed on an inclined surface where the gap is narrower
は凹部に嵌合されたチップベースとチップベースの上面Is the chip base fitted in the recess and the top surface of the chip base
より突出されたチップ本体とチップベースの底面に雌ねThe protruding tip body and the bottom of the tip base
じが形成されたねじ孔部とを有し、チップベースの１組A pair of chip bases, each having a threaded hole formed with a thread.
の側面が凹部の傾斜面に合う傾斜面に形成されており、Is formed on an inclined surface that matches the inclined surface of the concave portion,
超音波ホーンの振動方向と垂直に進退可能なねじ部材はThe screw member that can move back and forth perpendicular to the vibration direction of the ultrasonic horn is
接合作用部の雌ねじに嵌合する雄ねじが形成された雄ねA male thread with a male thread that fits into the female thread of the joint
じ部と雄ねじ部の一端に形成された大形の頭部とを有And a large head formed at one end of the male thread.
し、ねじ部材が雄ねじ部を介して超音波ホーンの貫通孔And the screw member is inserted through the through hole of the ultrasonic horn
より接合作用部のねじ孔部に締結されることにより、凹By being fastened to the screw hole of the joint action part,
部の傾斜面とチップベースの傾斜面と互いに接触されるThe inclined surface of the part and the inclined surface of the chip base are in contact with each other
と共に、凹部の底面とチップベースの底面との間に隙間And a gap between the bottom of the recess and the bottom of the chip base.
が形成される形態となり、接合作用部が超音波ホーンにIs formed, and the joint action part becomes an ultrasonic horn.
取り付けられたことを特徴とする超音波振動接合用共振Ultrasonic vibration bonding resonance characterized by being attached
器。vessel.
JP08210099A 1996-08-08 1996-08-08 Ultrasonic vibration bonding resonator Expired - Fee Related JP3099942B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP08210099A JP3099942B2 (en) 1996-08-08 1996-08-08 Ultrasonic vibration bonding resonator
US08/856,583 US5931367A (en) 1996-08-08 1997-05-15 Removable bonding working portions for an ultrasonic welder
CA002206412A CA2206412C (en) 1996-08-08 1997-05-28 Ultrasonic vibration bonding resonator with removable workpiece-engagingportions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08210099A JP3099942B2 (en) 1996-08-08 1996-08-08 Ultrasonic vibration bonding resonator

Publications (2)

Publication Number Publication Date
JPH1052768A JPH1052768A (en) 1998-02-24
JP3099942B2 true JP3099942B2 (en) 2000-10-16

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JP08210099A Expired - Fee Related JP3099942B2 (en) 1996-08-08 1996-08-08 Ultrasonic vibration bonding resonator

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US (1) US5931367A (en)
JP (1) JP3099942B2 (en)
CA (1) CA2206412C (en)

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CA2206412A1 (en) 1998-02-08
CA2206412C (en) 2000-07-18
US5931367A (en) 1999-08-03
JPH1052768A (en) 1998-02-24

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