JP3099475B2 - Turbo molecular pump - Google Patents
Turbo molecular pumpInfo
- Publication number
- JP3099475B2 JP3099475B2 JP31942591A JP31942591A JP3099475B2 JP 3099475 B2 JP3099475 B2 JP 3099475B2 JP 31942591 A JP31942591 A JP 31942591A JP 31942591 A JP31942591 A JP 31942591A JP 3099475 B2 JP3099475 B2 JP 3099475B2
- Authority
- JP
- Japan
- Prior art keywords
- inner peripheral
- support
- peripheral side
- fixed
- wing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、高真空や超高真空の発
生・維持を始めとして、中真空や低真空下での連続的な
気体の排気等に用いられるターボ分子ポンプに関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turbo-molecular pump used for generating and maintaining a high vacuum or an ultra-high vacuum, and for continuously exhausting a gas under a medium vacuum or a low vacuum. .
【０００２】[0002]
【従来の技術】図３に、従来のターボ分子ポンプの一例
を示す。このものは、ロータ１の外周に突設した回転翼
群２と、ステータ３の内周に突設した固定翼群４とを回
転軸ｍ方向に多段に交互配置してタービンＴを形成し、
このタービンＴにより、吸気口５から排気口６に向かっ
て排気作用を営み得るように構成されている。各段の回
転翼群２は、ロータ１に一体的に形成した円環状をなす
内周側支え２ａの外周等角位置に多数の回転翼２ｃを突
出形成したものであり、また、各段の固定翼群４は、円
環状をなす外周側支え４ａおよび内周側支え４ｂの間の
等角位置に多数の固定翼４ｃを形成したものである。こ
の固定翼群４について説明を捕捉すると、図４に示すよ
うに、薄肉円環状をなすステンレス製あるいはアルミニ
ウム製の板の中央部に翼となる部分をエッチング法によ
って切出し、その切出した部分にプレス加工による曲げ
加工を施して固定翼４ｃを形成したものである。その
際、内外周に切り残した部位にそれぞれ円環状の外周側
支え４ａおよび内周側支え４ｂを形成している。そし
て、この固定翼群４の外周側支え４ａを、外筒の内周に
積層した各スペーサ３ａ間に挾持させることにより、固
定翼群４をステータ３側に支持させている。なお、この
固定翼群４は組付け時に半割りにされ、ロータ１の両側
に差し込まれた状態で円環状に組み合わせられる。2. Description of the Related Art FIG. 3 shows an example of a conventional turbo-molecular pump. The turbine T is formed by alternately arranging a group of rotating blades 2 protruding from the outer periphery of a rotor 1 and a group of stationary blades 4 protruding from the inner periphery of a stator 3 in the direction of the rotation axis m.
The turbine T is configured to perform an exhaust operation from the intake port 5 to the exhaust port 6. The rotating blade group 2 of each stage has a large number of rotating blades 2c protrudingly formed at equiangular positions on the outer periphery of an annular inner support 2a formed integrally with the rotor 1. The fixed wing group 4 has a large number of fixed wings 4c formed at equiangular positions between an outer peripheral support 4a and an inner peripheral support 4b that form an annular shape. The description of the fixed blade group 4 is as follows. As shown in FIG. 4, a portion to be a wing is cut out at the center of a thin annular stainless or aluminum plate by an etching method, and a pressed portion is formed on the cut portion. The fixed wing 4c is formed by performing a bending process. At this time, annular outer-peripheral supports 4a and inner-peripheral supports 4b are respectively formed at the portions left uncut on the inner and outer peripheries. The fixed blade group 4 is supported by the stator 3 by holding the outer peripheral side support 4a of the fixed blade group 4 between the spacers 3a stacked on the inner periphery of the outer cylinder. The fixed blade group 4 is halved at the time of assembling, and is assembled in an annular shape while being inserted on both sides of the rotor 1.
【０００３】[0003]
【発明が解決しようとする課題】ところで、前記タービ
ンＴは、１Torr以下の真空中で回転翼群２が高速回転す
ることにより排気作用を営むものであり、その回転数は
通常 20000〜90000 rpmで、回転翼２ｃの先端での周速
度は 200〜400 m/s に達する。この運転中に、誤操作等
によりポンプ内に大気が突入し、内部の圧力が急激に上
昇したときには、図５に示すように固定翼４ｃのまわり
に強い旋回気流ｕを生じる。ｖはその際の回転翼２ｃの
回転方向を示している。そして、その気流ｕによって、
固定翼４ｃに揚力Ｆを生じ、固定翼４ｃがその外周側支
え４ａとともに図６中想像線で示すように吸気口５側に
向かって変形する。その際、従来のターボ分子ポンプに
おいては、同図に示すように、曲げ加工によって形成さ
れる固定翼４ｃの内周側吸気口端４ｄと回転翼２ｃの内
周側排気口端２ｄとの間の軸方向離間距離ｄ2 が、当該
固定翼４ｃがねじられた分だけ、固定翼群４の内周側支
え４ｂとこの内周側支え４ｂに吸気口５側において対面
する回転翼群２の内周側支え２ａとの間の軸方向離間距
離ｄ1 よりも小さくなっている。そのため、前述した揚
力Ｆに基づく変形が生じたときには、固定翼内周側支え
４ｂが回転翼内周側支え２ａに接触するよりも先に、固
定翼４ｃが回転翼２ｃに接触し、その結果、それらの翼
４ｃ、２ｃ同士が噛み合ってタービンＴが破損するとい
う重大な事故に発展する。By the way, the turbine T performs an exhausting operation by rotating the rotor blade group 2 at a high speed in a vacuum of 1 Torr or less, and its rotation speed is usually 20,000 to 90,000 rpm. The peripheral velocity at the tip of the rotary blade 2c reaches 200 to 400 m / s. During this operation, when the air enters the pump due to an erroneous operation or the like and the internal pressure rises rapidly, a strong swirling airflow u is generated around the fixed blade 4c as shown in FIG. “v” indicates the rotation direction of the rotor 2c at that time. And by the air flow u,
A lift F is generated in the fixed wing 4c, and the fixed wing 4c is deformed together with the outer peripheral side support 4a toward the intake port 5 as shown by an imaginary line in FIG. At this time, in the conventional turbo-molecular pump, as shown in the same figure, between the inner peripheral side intake end 4d of the fixed wing 4c formed by bending and the inner peripheral side exhaust end 2d of the rotary wing 2c. The distance d 2 in the axial direction is equal to the amount by which the fixed blade 4c is twisted, of the inner peripheral side support 4b of the fixed blade group 4 and the rotating blade group 2 facing the inner peripheral side support 4b on the intake port 5 side. It is smaller than the axial distance d 1 between the inner peripheral side support 2a. Therefore, when the deformation based on the above-described lift F occurs, the fixed blade 4c contacts the rotating blade 2c before the fixed blade inner circumferential side support 4b contacts the rotating blade inner circumferential side support 2a, and as a result, The wings 4c and 2c are engaged with each other, and the turbine T is damaged, which leads to a serious accident.
【０００４】そこで、従来では、大気突入があっても
固定翼４ｃの変形が十分小さくなるように、固定翼４ｃ
の翼厚を十分厚くして変形を小さくするか、固定翼４
ｃと回転翼２ｃとの軸方向離間距離ｄ2 を十分広くとる
かによって、そのような事態を回避するようにしてい
た。[0004] Therefore, conventionally, the fixed wings 4c are so designed that the deformation of the fixed wings 4c is sufficiently small even if there is an entry into the atmosphere.
Of the fixed wing 4
Depending taking sufficiently wide axial distance d 2 between the c and the rotating blades 2c, it had to avoid such a situation.
【０００５】ところが、上述したの手法では、固定翼
４ｃと回転翼２ｃの間の空間が狭められ、排気流路が狭
められることになるので、結果的に排気速度を低下させ
るという不具合につながる欠点がある。また、の手法
では、回転翼群２の軸方向間隔が大きくなり、それに伴
ってロータ１を支持する軸受部も大きくする必要が生じ
るので、ポンプ全体の大形化につながるという欠点があ
る。However, in the above-described method, the space between the fixed blade 4c and the rotary blade 2c is narrowed, and the exhaust flow path is narrowed. As a result, there is a disadvantage that the exhaust speed is reduced. There is. Further, in the method (1), the axial interval between the rotor blade groups 2 is increased, and accordingly, it is necessary to increase the size of a bearing portion for supporting the rotor 1. Therefore, there is a disadvantage that the entire pump is enlarged.
【０００６】本発明は、このような課題に着目してなさ
れたものであって、排気速度の低下やポンプの大形化を
招くことなく、大気突入からタービンを有効に保護し得
るようにしたターボ分子ポンプを提供することを目的と
している。The present invention has been made in view of such a problem, and is capable of effectively protecting the turbine from entering the atmosphere without lowering the exhaust speed or increasing the size of the pump. It is intended to provide a turbo molecular pump.
【０００７】[0007]
【課題を解決するための手段】本発明は、かかる目的を
達成するために、次のような構成を採用したものであ
る。In order to achieve the above object, the present invention employs the following configuration.
【０００８】すなわち、本発明に係るターボ分子ポンプ
は、円環状をなす内周側支えを介してロータに支持させ
た回転翼群と、外周側支えおよび内周側支えを介してス
テータに支持させた固定翼群とを具備してなり、それら
回転翼群および固定翼群を軸方向に多段に交互配置して
タービンを形成してなるターボ分子ポンプにおいて、あ
る固定翼群の内周側支えとこの内周側支えに吸気口側に
おいて対面する回転翼群の内周側支えとの間の軸方向離
間距離を、当該固定翼の内周側吸気口端と当該回転翼の
内周側排気口端との間の軸方向離間距離よりも小さくし
たことを特徴とする。That is, the turbo-molecular pump according to the present invention has a rotor blade group supported by a rotor via an annular inner support, and a rotor blade supported by a stator via an outer support and an inner support. A turbine blade formed by alternately arranging the rotating blade group and the fixed blade group in multiple stages in the axial direction to form a turbine. The axial separation distance between the inner peripheral side support and the inner peripheral side support of the rotating blade group facing the intake port side is set to the inner peripheral side intake end of the fixed blade and the inner peripheral side exhaust port of the rotary blade. It is characterized in that it is smaller than the axial separation distance from the end.
【０００９】[0009]
【作用】このような構成のものであると、回転翼が高速
回転している状態で大気がポンプに突入し、固定翼に強
い揚力を生じてその内周側が吸気口側に向かって変形し
ても、内周側支えと回転翼の内周側支えとの間の距離
が、その固定翼の内周側吸気口端とその回転翼の内周側
排気口端との距離よりも小さい値に設定してあるので、
固定翼が回転翼に接触するよりも先に、固定翼の内周側
支えが回転翼の内周側支えに接触することになる。しか
して、固定翼の内周側支えは回転翼の内周側支えに添接
した以降はそれ以上に変形しようがなく、その位置で回
転翼の内周側支えに対して相対摺動し続けるので、固定
翼もその位置に保持されてそれ以上回転翼側へ接近する
ことが禁止される。このため、このものは大気突入時に
固定翼と回転翼が接触する事態を確実に回避できるもの
となる。With this configuration, the air enters the pump while the rotor is rotating at a high speed, and a strong lift is generated on the stationary blade, and the inner periphery of the rotor is deformed toward the intake port. However, the distance between the inner peripheral side support and the inner peripheral side support of the rotor is smaller than the distance between the inner peripheral side intake end of the fixed blade and the inner peripheral side exhaust end of the rotor. Is set to
Before the fixed wing contacts the rotating wing, the inner circumferential support of the fixed wing contacts the inner circumferential support of the rotating wing. However, the inner peripheral support of the fixed wing does not deform any more after being attached to the inner peripheral support of the rotor, and continues to slide relative to the inner peripheral support of the rotor at that position. Therefore, the fixed wing is also held at that position, and further approaching to the rotating wing side is prohibited. For this reason, this can surely avoid the situation where the fixed wing and the rotating wing come into contact with each other when entering the atmosphere.
【００１０】[0010]
【実施例】以下、本発明の一実施例を、図１および図２
を参照して説明する。なお、図３〜図６と共通する部分
には同一符号を付し、その説明を一部省略する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will now be described with reference to FIGS.
This will be described with reference to FIG. 3 to 6 are denoted by the same reference numerals, and the description thereof will be partially omitted.
【００１１】このターボ分子ポンプは、従来と同様の固
定翼群４を備えている。すなわち、この固定翼群４は、
図４に示したような薄肉円環状をなすステンレス製ある
いはアルミニウム製の板の中央部において翼となる部分
をエッチング法によって切出し、その切出した部分にプ
レス加工による曲げ加工を施して固定翼４ｃを形成する
とともに、内外周に切り残した部位にそれぞれ円環状の
外周側支え４ａおよび内周側支え４ｂを形成したもので
ある。また、回転翼群２も、従来と同様にしてロータ１
に形成した円環状の内周側支え２ａの外周等角位置に一
体突設したものであるが、その際に、円環状の内周側支
え２ａの下面に、その肉を一部排気口６側に向かって図
２に示すように膨出させることにより、円環状の段部２
ｅを一体的に形成している。この段部２ｅを前記内周側
支え２ａの下面に設けておくことにより、その段部２ｅ
部分に対応した固定翼４ｃの内周側支え４ｂと、この内
周側支え４ｂに吸気口５側において対面する回転翼２ｃ
の内周側支え２ａとの軸方向寸法ｄ3 が、その固定翼４
の内周側吸気口端４ｄとその回転翼２ｃの内周側排気口
端２ｄとの間の軸方向離間距離ｄ2 よりも小さくなるよ
うにしている。This turbo molecular pump has a fixed blade group 4 similar to the conventional one. That is, this fixed wing group 4
At the center of a stainless steel or aluminum plate having a thin annular shape as shown in FIG. 4, a portion to be a wing is cut out by an etching method, and the cut out portion is subjected to bending by press working to form a fixed blade 4c. The annular support 4a and the inner support 4b are respectively formed at the portions that are formed and left uncut on the inner and outer circumferences. In addition, the rotor group 2 also has a rotor 1
The inner peripheral support 2a is formed integrally with the annular inner peripheral support 2a, and is partially protruded from the lower surface of the annular inner peripheral support 2a. By bulging toward the side as shown in FIG.
e are integrally formed. By providing the step 2e on the lower surface of the inner peripheral side support 2a, the step 2e is provided.
An inner peripheral support 4b of the fixed wing 4c corresponding to the portion, and a rotary wing 2c facing the inner peripheral support 4b on the intake port 5 side.
The axial dimension d 3 with the inner peripheral side support 2a of the
Designed to be smaller than the axial distance d 2 between the inner peripheral side inlet end 4d and the inner circumferential side outlet end 2d of the rotor blades 2c of.
【００１２】このような構成のものであると、回転翼２
ｃが高速回転している状態で大気がポンプに突入し、固
定翼４ｃに図２中想像線で示すように強い揚力Ｆが生じ
て、固定翼４ｃが内周側支え４ｂとともに同図中想像線
で示すように吸気口５側に変形しても、ｄ3 ＜ｄ2 とし
ておくことにより、固定翼４ｃが回転翼２ｃに接触する
よりも先に、固定翼４ｃの内周側支え４ｂを回転翼２ｃ
の段部２ｅ部分での内周側支え２ａに接触させることが
できる。しかして、固定翼４ｃの内周側支え４ｂは回転
翼２ｃの内周側支え２ａに添接した以降はそれ以上変形
しようがなく、その位置で内周側支え２ａに対して相対
摺動し続けるので、固定翼４ｃもその位置に保持されて
それ以上回転翼２ｃ側へ接近することが禁止される。そ
のため、この構造は固定翼４ｃと回転翼２ｃとの接触を
確実に回避することができる。以上により、このターボ
分子ポンプは、排気速度の低下やポンプ自体の大形化を
招かずに、大気突入時におけるタービンＴの破損を有効
に保護できるものとなる。換言すれば、タービンＴの堅
牢さが従来ポンプと同一レベルであると仮定した場合
に、そのポンプよりも本実施例に係るポンプの排気速度
を向上させることができ、ポンプ自体も相対的に小形化
することができるという効果が奏される。With such a structure, the rotating blades 2
The air rushes into the pump while c is rotating at a high speed, and a strong lift F is generated on the fixed wing 4c as shown by the imaginary line in FIG. 2, and the fixed wing 4c is imagined in FIG. Even if the fixed blade 4c is deformed toward the intake port 5 as shown by the line, by setting d 3 <d 2 , the inner peripheral side support 4b of the fixed blade 4c is moved before the fixed blade 4c contacts the rotating blade 2c. Rotor blade 2c
Can be brought into contact with the inner peripheral support 2a at the step 2e. However, after the inner peripheral support 4b of the fixed wing 4c is attached to the inner peripheral support 2a of the rotary wing 2c, the inner peripheral support 4b does not deform any more, and slides relative to the inner peripheral support 2a at that position. Since the continuation is continued, the fixed wing 4c is also held at that position, and the further approach to the rotating wing 2c side is prohibited. Therefore, this structure can reliably avoid contact between the fixed wing 4c and the rotary wing 2c. As described above, this turbo-molecular pump can effectively protect the turbine T from being damaged at the time of entry into the atmosphere without lowering the pumping speed or increasing the size of the pump itself. In other words, assuming that the robustness of the turbine T is at the same level as that of the conventional pump, the pumping speed of the pump according to the present embodiment can be improved more than that of the conventional pump, and the pump itself is also relatively small. The effect that it can be made is produced.
【００１３】なお、前記実施例は磁気軸受方式のターボ
分子ポンプについて説明したが、本発明が他の軸受方式
にも同様に適用可能であることは言うまでもない。ま
た、各部の構成も図示例に限定されるものではなく、本
発明の趣旨を逸脱しない範囲で種々変形が可能である。Although the above embodiment has been described with respect to the turbo-molecular pump of the magnetic bearing type, it goes without saying that the present invention can be applied to other bearing types as well. Further, the configuration of each unit is not limited to the illustrated example, and various modifications can be made without departing from the spirit of the present invention.
【００１４】[0014]
【発明の効果】本発明は、以上説明した寸法設定を行う
ことにより、大気突入等により固定翼に揚力が生じ、吸
気口側に向かって変形しても、その固定翼が回転翼に接
触するよりも先に、固定翼の内周側支えを回転翼の内周
側支えに摺接させることができる。そのため、固定翼の
一定以上の変形を禁止して、回転翼と接触することによ
る破損からタービンを確実に保護することができるとい
う効果が得られる。According to the present invention, by setting the dimensions described above, a lift is generated in the fixed wing due to the entry into the atmosphere and the like, and even if the fixed wing is deformed toward the intake port side, the fixed wing contacts the rotating wing. Prior to this, the inner peripheral support of the fixed wing can be brought into sliding contact with the inner peripheral support of the rotary wing. Therefore, an effect is obtained that the deformation of the fixed wing over a certain level is prohibited and the turbine can be reliably protected from damage caused by contact with the rotating wing.
【図１】本発明の一実施例を示す全体縦断面図。FIG. 1 is an overall vertical sectional view showing one embodiment of the present invention.
【図２】図１の要部拡大図。FIG. 2 is an enlarged view of a main part of FIG.
【図３】従来例を示す図１に対応した全体縦断面図。FIG. 3 is an overall vertical sectional view corresponding to FIG. 1 showing a conventional example.
【図４】同従来例で用いられている固定翼群を示す斜視
図。FIG. 4 is a perspective view showing a fixed wing group used in the conventional example.
【図５】同従来例の固定翼と回転翼の相互作用を説明す
るための展開図。FIG. 5 is an exploded view for explaining the interaction between the fixed wing and the rotary wing in the conventional example.
【図６】図３の要部拡大図。FIG. 6 is an enlarged view of a main part of FIG. 3;
１…ロータ ２…回転翼群 ２ａ…内周側支え ２ｃ…回転翼 ２ｄ…内周側排気口端 ３…ステータ ４…固定翼群 ４ａ…外周側支え ４ｂ…内周側支え ４ｃ…固定翼 ４ｄ…内周側吸気口端 ｄ2 、ｄ3 …軸方向離間距離 ｍ…回転軸 Ｔ…タービンDESCRIPTION OF SYMBOLS 1 ... Rotor 2 ... Rotating blade group 2a ... Inner peripheral side support 2c ... Rotating blade 2d ... Inner peripheral side exhaust port end 3 ... Stator 4: Fixed blade group 4a ... Outer peripheral side support 4b ... Inner peripheral side support 4c ... Fixed blade 4d … Inner end of intake port d 2 , d 3 … Distance in axial direction m… Rotary axis T… Turbine
Claims (1)
支持させた回転翼群と、外周側支えおよび内周側支えを
介してステータに支持させた固定翼群とを具備してな
り、それら回転翼群および固定翼群を軸方向に多段に交
互配置してタービンを形成してなるターボ分子ポンプに
おいて、ある固定翼群の内周側支えとこの内周側支えに
吸気口側において対面する回転翼群の内周側支えとの間
の軸方向離間距離を、当該固定翼の内周側吸気口端と当
該回転翼の内周側排気口端との間の軸方向離間距離より
も小さくしたことを特徴とするターボ分子ポンプ。A rotating blade group supported by a rotor via an annular inner support, and a fixed blade group supported by a stator via an outer support and an inner support. In a turbo-molecular pump in which the rotating blade group and the fixed blade group are alternately arranged in multiple stages in the axial direction to form a turbine, an inner peripheral side support of a fixed blade group and an intake port side are attached to the inner peripheral side support. The axial separation distance between the inner peripheral side support of the rotating blade group facing in the axial direction, the axial separation distance between the inner peripheral side intake end of the fixed wing and the inner peripheral side exhaust end of the rotary wing. A turbo molecular pump characterized by being smaller than the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31942591A JP3099475B2 (en) | 1991-12-03 | 1991-12-03 | Turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31942591A JP3099475B2 (en) | 1991-12-03 | 1991-12-03 | Turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05157090A JPH05157090A (en) | 1993-06-22 |
| JP3099475B2 true JP3099475B2 (en) | 2000-10-16 |
Family
ID=18110053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31942591A Expired - Fee Related JP3099475B2 (en) | 1991-12-03 | 1991-12-03 | Turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3099475B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3096020A1 (en) * | 2015-05-18 | 2016-11-23 | Pfeiffer Vacuum Gmbh | Vacuum pump |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3013083B2 (en) | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | Turbo molecular pump |
| JP5276321B2 (en) * | 2005-07-01 | 2013-08-28 | エドワーズ株式会社 | Turbo molecular pump |
| JP2007309245A (en) * | 2006-05-19 | 2007-11-29 | Boc Edwards Kk | Vacuum pump |
| JP4853266B2 (en) * | 2006-12-12 | 2012-01-11 | 株式会社島津製作所 | Turbo molecular pump |
| CN107044430B (en) * | 2016-02-05 | 2021-10-15 | 埃地沃兹日本有限公司 | Vacuum pump and rotor and stator used therein |
-
1991
- 1991-12-03 JP JP31942591A patent/JP3099475B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3096020A1 (en) * | 2015-05-18 | 2016-11-23 | Pfeiffer Vacuum Gmbh | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05157090A (en) | 1993-06-22 |
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