JP3093440B2 - Magneto-optical recording medium and method of manufacturing the same - Google Patents
Magneto-optical recording medium and method of manufacturing the sameInfo
- Publication number
- JP3093440B2 JP3093440B2 JP04133098A JP13309892A JP3093440B2 JP 3093440 B2 JP3093440 B2 JP 3093440B2 JP 04133098 A JP04133098 A JP 04133098A JP 13309892 A JP13309892 A JP 13309892A JP 3093440 B2 JP3093440 B2 JP 3093440B2
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- recording medium
- optical recording
- dielectric layer
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光磁気ディスク装置に
用いられる記録媒体に関し、特に記録磁界感度及び消去
磁界感度の優れた光磁気記録媒体及びその製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a recording medium used in a magneto-optical disk drive, and more particularly to a magneto-optical recording medium having excellent recording magnetic field sensitivity and erasing magnetic field sensitivity and a method of manufacturing the same.
【０００２】[0002]
【従来の技術】光ディスク装置は、大容量ファイルメモ
リの１つとして注目されている。中でも光磁気ディスク
装置は、記録情報の書換えが可能であると言う利点をも
っていることから、コ−ドデ−タファイルメモリを始
め、画像ファイルメモリ等広範囲な応用が各所で盛んに
研究されている。2. Description of the Related Art An optical disk device is receiving attention as one of large-capacity file memories. Among them, a magneto-optical disk device has an advantage that recorded information can be rewritten. Therefore, a wide range of applications including a code data file memory and an image file memory have been actively studied in various places.
【０００３】記録媒体としては、ポリカ−ボネイト等の
樹脂基体上に、ＳｉＮから成る第一の誘電体層、希土類
金属と鉄族遷移金属との組合せによって作製されるＴｂ
ＦｅＣｏのような非晶質磁性合金膜から成る記録層、Ｓ
ｉＮから成る第二の誘電体層の順に成膜する方法、さら
にはＡｌ等の反射膜を形成する方法が知られている。As a recording medium, a first dielectric layer made of SiN is formed on a resin base such as polycarbonate or the like, and Tb formed by a combination of a rare earth metal and an iron group transition metal is used.
A recording layer made of an amorphous magnetic alloy film such as FeCo;
A method of forming a second dielectric layer made of iN in order and a method of forming a reflective film of Al or the like are known.
【０００４】これらを用いた光磁気ディスク装置は、パ
ーソナルコンピュータのコ−ドデ−タファイルメモリ分
野を始めとして、既に、実用レベルにあり、用途拡大が
期待されている。用途の拡大に伴い、光磁気記録媒体に
情報を記録、再生する光磁気ディスク装置の形状の小型
化が強く期待されている。[0004] Magneto-optical disk devices using these are already at a practical level, such as in the field of code data memory for personal computers, and are expected to expand their applications. With the expansion of applications, miniaturization of the shape of a magneto-optical disk device for recording and reproducing information on a magneto-optical recording medium is strongly expected.
【０００５】[0005]
【発明が解決しようとする課題】上述した従来の成膜方
法で作製された光磁気記録媒体は、情報の記録及び消去
を行う場合に大きな外部印加磁界が必要である。The magneto-optical recording medium manufactured by the above-mentioned conventional film forming method requires a large externally applied magnetic field when recording and erasing information.
【０００６】従って、磁界を発生させるための電磁石が
大きくなり、光磁気ディスク装置の形状の小型化が困難
であるという問題がある。Therefore, there is a problem that the size of the electromagnet for generating the magnetic field becomes large, and it is difficult to reduce the size of the magneto-optical disk device.
【０００７】本発明の目的は、記録膜層形成前に、Ｓｉ
Ｎから成る第１の誘電体層をスパッタエッチングして光
磁気記録媒体を作製することにより、上記の欠点を解消
し、従来より小さい記録磁界及び消去磁界においてデ−
タの記録及び消去が可能な光磁気記録媒体を提供し、光
磁気記録媒体に情報を記録、再生する光磁気ディスク装
置の形状の小型化を図る光磁気記録媒体及びその製造方
法を提供することにある。It is an object of the present invention to provide a method for forming a recording layer before forming a recording film layer.
By manufacturing a magneto-optical recording medium by sputter-etching a first dielectric layer made of N, the above-mentioned drawbacks are eliminated, and the data is recorded in a smaller recording magnetic field and erasing magnetic field than the conventional one.
Provided is a magneto-optical recording medium capable of recording and erasing data, and a magneto-optical recording medium for reducing the size of a magneto-optical disk device for recording and reproducing information on and from the magneto-optical recording medium, and a method of manufacturing the same. It is in.
【０００８】[0008]
【課題を解決するための手段】本第一の発明の光磁気記
録媒体の製造方法では、有機樹脂基板上に、少なくと
も、ＳｉＮからなる第１の誘電体層と、希土類金属と鉄
族遷移金属との組合せによって作製される非晶質磁性合
金からなる記録膜層と、ＳｉＮからなる第２の誘電体層
と、ＡｌＴｉ合金からなる反射膜層とを、この順に成膜
された光磁気記録媒体の製造方法において、記録膜層形
成前に、第１の誘電体層をスパッタエッチング工程によ
りスパッタエッチング量を５オングストローム〜２０オ
ングストロームの範囲に形成する工程を有することを特
徴とする。 According to the method of manufacturing a magneto-optical recording medium of the first invention, at least a first dielectric layer made of SiN, a rare earth metal and an iron group transition metal are formed on an organic resin substrate. A magneto-optical recording medium in which a recording film layer made of an amorphous magnetic alloy, a second dielectric layer made of SiN, and a reflective film layer made of an AlTi alloy are formed in this order. In the manufacturing method of (1), before forming the recording film layer, the first dielectric layer is subjected to a sputter etching step.
5 Angstroms to 20 Ohms
It has a process of forming in the range of
Sign.
【０００９】本第二の発明の光磁気記録媒体では、上記
第一の発明の光磁気記録媒体の製造方法で作製された光
磁気記録媒体であって、第１の誘電体層のスパッタエッ
チング量が５オングストローム〜２０オングストローム
の範囲にあるように構成されている。A magneto-optical recording medium according to a second aspect of the present invention is a magneto-optical recording medium manufactured by the method for manufacturing a magneto-optical recording medium according to the first aspect of the present invention, wherein the first dielectric layer has a sputter etching amount. Is in the range of 5 Å to 20 Å.
【００１０】[0010]
【実施例】次に、本発明の実施例について図面を参照し
て説明する。Next, embodiments of the present invention will be described with reference to the drawings.
【００１１】図１は本発明の一実施例の光磁気記録媒体
の基本構造を示す断面図である。図１において、本実施
例の光磁気記録媒体は、厚さ１．２ｍｍ、直径１３０ｍ
ｍのポリカ−ボネイト基板１上に、ＳｉＮからなる厚さ
１１００オングストロームの第１の誘電体層２、第１の
誘電体層２の表面を１０オングストロームスパッタエッ
チングしたスパッタエッチング面３、ＴｂＦｅＣｏＴｉ
から成る厚さ２００オングストロームの記録層４、Ｓｉ
Ｎから成る厚さ３００オングストロームの第２の誘電体
層５、ＡｌＴｉから成る厚さ３００オングストロームの
金属反射層６の順に形成されている。上記各層は、イン
ラインスパッタ装置を用いて次のようにして基板上に連
続成膜される。まずＳｉＮから成る厚さ１１００オング
ストロームの第１の誘電体層２は、Ｓｉタ−ゲットを用
い、タ−ゲットと基板間距離１５ｃｍ、パワ−密度８
（Ｗ／ｃｍ2 ）、ＡｒとＮ2 のガス流量Ａｒ／Ｎ2 ＝１
００／５５（ＳＣＣＭ）、スパッタガス圧０．３（Ｐ
ａ）で成膜される。第１の誘電体層２の表面を１０オン
グストロームスパッタエッチングしたスパッタエッチン
グ面３はパワ−密度０．１５（Ｗ／ｃｍ2 ）、Ａｒ＝２
５（ＳＣＣＭ）、ガス圧０．１（Ｐａ）でスパッタエッ
チングされる。ＴｂＦｅＣｏＴｉから成る厚さ２００オ
ングストロームの記録層４は、Ｔｂタ−ゲットとＦｅＣ
ｏＴｉ合金タ−ゲット（Ｆｅ84Ｃｏ12Ｔｉ4 ａｔｍ％）
を用いた２元ＤＣマグネトロンスパッタ法により、基板
を回転しながら、タ−ゲットと基板間距離１０ｃｍ、Ｔ
ｂタ−ゲット及びＦｅＣｏＴｉ合金タ−ゲットのパワ−
密度、各々１．５（Ｗ／ｃｍ2 ）及び３．０（Ｗ／ｃｍ
2 ）、Ａｒ＝５０（ＳＣＣＭ）、ガス圧０．１４（Ｐ
ａ）で成膜される。また、ＳｉＮから成る厚さ３００オ
ングストロームの第２の誘電体層５は第１の誘電体層２
と同じ条件で成膜される。ＡｌＴｉ合金膜から成る厚さ
３００オングストロームの金属反射層６は、Ｔｉを１ｗ
ｔ％含有するＡｌＴｉ合金タ−ゲットを用い、Ａｒガス
をスパッタガスとしてタ−ゲットと基板間距離１５（ｃ
ｍ）、パワ−密度３．０（Ｗ／ｃｍ2 ）、ガス圧０．１
（Ｐａ）で成膜される。上述したスパッタエッチング面
３のエッチング量を０〜５０オングストロームの範囲で
変化させた媒体を９種類作製した。これらの媒体を単板
状態でマグネットハブを付け、線速９．４（ｍ／ｓｅ
ｃ）、周波数６．２（ＭＨｚ）、パルス幅５０（ｎ
ｓ）) 、再生パワ−１（ｍｗ）、記録及び消去パワ−１
０（ｍｗ）の条件下において最小記録磁界及び最小消去
磁界の測定を行った。図２は本実施例の光磁気記録媒体
の最小記録磁界及び最小消去磁界のスパッタエッチング
量依存性を示す図である。図２よりスパッタエッチング
量が５オングストローム以上の媒体は最小記録磁界及び
最小消去磁界が２００（Ｏｅ）以下になることがわか
る。一方、スパッタエッチング量が３０オングストロー
ム以上になると、再生ビ−ムの連続照射により保存デ−
タが劣化することが判明した。図３は本実施例の光磁気
記録媒体の保存デ−タの劣化状態をＣＮ比の低下量で表
した図である。図３に示すように、スパッタエッチング
量が０〜２５オングストロームの範囲ではＣＮ比の低下
が認められないが３０オングストローム以上になるとＣ
Ｎ比の劣化が始まる。以上のことからスパッタエッチン
グ量が５〜２０オングストロームの範囲の媒体は小さい
記録磁界及び消去磁界でデ−タの記録及び消去が可能と
なり、さらに保存デ−タの劣化のない媒体であることが
判る。また、デ−タの記録及び消去時の外部印加磁界が
２００（Ｏｅ）) 以下となるため、印加磁界の方向転換
が高速で行うことが可能となり、オ−バ−ライト媒体と
しての適用も可能である。尚、記録膜の組成やＡｌ合金
の組成及び媒体の各々の層厚は上述のものに限定される
ものではなく、所望の記録再生特性に応じて適宜選択さ
れ、これらに対しても同様の効果があることは言うまで
もない。FIG. 1 is a sectional view showing the basic structure of a magneto-optical recording medium according to one embodiment of the present invention. In FIG. 1, the magneto-optical recording medium of this embodiment has a thickness of 1.2 mm and a diameter of 130 m.
A first dielectric layer 2 of SiN having a thickness of 1100 angstroms, a sputter-etched surface 3 obtained by sputtering the surface of the first dielectric layer 2 by 10 angstroms, and a TbFeCoTi
200 Å thick recording layer 4 of Si
A second dielectric layer 5 made of N and having a thickness of 300 Å and a metal reflective layer 6 made of AlTi and having a thickness of 300 Å are formed in this order. Each of the above layers is continuously formed on a substrate using an inline sputtering apparatus as follows. First, the first dielectric layer 2 made of SiN and having a thickness of 1100 angstroms is made of a Si target, a distance between the target and the substrate is 15 cm, and a power density is 8%.
(W / cm 2 ), gas flow rate of Ar and N 2 Ar / N 2 = 1
00/55 (SCCM), sputtering gas pressure 0.3 (P
The film is formed in a). Sputter etching down with the first surface of the dielectric layer 2 was 10 Å sputter etching
Surface 3 has a power density of 0.15 (W / cm 2 ) and Ar = 2
Sputter etching is performed at 5 (SCCM) at a gas pressure of 0.1 (Pa). The 200 angstrom thick recording layer 4 made of TbFeCoTi has a Tb target and FeC
oTi alloy target (Fe 84 Co 12 Ti 4 atm%)
The distance between the target and the substrate is 10 cm while rotating the substrate by a binary DC magnetron sputtering method using
b. Power of target and FeCoTi alloy target
Density, 1.5 (W / cm 2 ) and 3.0 (W / cm 2 , respectively)
2 ), Ar = 50 (SCCM), gas pressure 0.14 (P
The film is formed in a). The second dielectric layer 5 made of SiN and having a thickness of 300 Å is formed on the first dielectric layer 2.
The film is formed under the same conditions as described above. The metal reflective layer 6 having a thickness of 300 angstroms, made of an AlTi alloy film,
Using an AlTi alloy target containing 0.1% by mass and using an Ar gas as a sputtering gas, the distance between the target and the substrate is 15 (c).
m), power density 3.0 (W / cm 2 ), gas pressure 0.1
(Pa). Nine types of media were manufactured in which the amount of etching of the above-mentioned sputter-etched surface 3 was changed in the range of 0 to 50 angstroms. These media are attached to a magnet hub in a single plate state, and the linear velocity is 9.4 (m / sec).
c), frequency 6.2 (MHz), pulse width 50 (n)
s)), playback power-1 (mw), recording and erasing power-1
The minimum recording magnetic field and the minimum erasing magnetic field were measured under the condition of 0 (mw). FIG. 2 shows sputter etching of the minimum recording magnetic field and the minimum erasing magnetic field of the magneto-optical recording medium of this embodiment.
It is a figure which shows quantity dependence. Sputter etching from Figure 2
It can be seen that the medium having an amount of 5 Å or more has a minimum recording magnetic field and a minimum erasing magnetic field of 200 (Oe) or less. On the other hand, when the sputter etching amount exceeds 30 angstroms, the stored data is continuously irradiated with the reproducing beam.
Was found to have deteriorated. FIG. 3 is a diagram showing the state of deterioration of the stored data of the magneto-optical recording medium according to the present embodiment by the amount of decrease in the CN ratio. As shown in FIG. 3, sputter etching
When the amount is in the range of 0 to 25 angstroms, no decrease in the CN ratio is observed.
Deterioration of N ratio starts. From the above, spatter etchin
It can be seen that a medium having an amount of data in the range of 5 to 20 angstroms enables recording and erasing of data with a small recording magnetic field and an erasing magnetic field, and furthermore does not cause deterioration of stored data. Further, since the externally applied magnetic field at the time of data recording and erasing is 200 (Oe) or less, the direction of the applied magnetic field can be changed at a high speed, and it can be applied as an overwrite medium. It is. The composition of the recording film, the composition of the Al alloy and the thickness of each layer of the medium are not limited to those described above, but are appropriately selected according to the desired recording / reproducing characteristics. Needless to say, there is.
【００１２】[0012]
【発明の効果】以上説明したように、本発明の光磁気記
録媒体及びその製造方法は、記録膜層形成前に、ＳｉＮ
から成る第１の誘電体層を、スパッタエッチング量が５
オングストローム〜２０オングストロームの範囲となる
ようにスパッタエッチングして光磁気記録媒体を作製す
ることにより、従来より小さい記録磁界及び消去磁界に
おいてデ−タの記録及び消去が可能な光磁気記録媒体を
提供できる。また、上述した磁界の低減により、電磁石
の小型化が可能となり、光磁気記録媒体に情報を記録、
再生する光磁気ディスク装置の形状の小型化が期待でき
る。さらには、オ−バ−ライト媒体としての適用も可能
であるという効果がある。As described above, the magneto-optical recording medium and the method of manufacturing the same according to the present invention require the use of SiN before forming the recording film layer.
The first dielectric layer made of
By manufacturing a magneto-optical recording medium by sputter etching so as to be in the range of Angstroms to 20 Angstroms, a magneto-optical recording medium capable of recording and erasing data with a recording magnetic field and an erasing magnetic field smaller than conventional ones can be provided. . In addition, the above-described reduction of the magnetic field allows the electromagnet to be downsized, and records information on a magneto-optical recording medium.
The size of the magneto-optical disk device to be reproduced can be expected to be reduced in size. Further, there is an effect that application as an overwrite medium is also possible.
【図１】本発明の一実施例の光磁気記録媒体の基本構造
を示す断面図である。FIG. 1 is a sectional view showing a basic structure of a magneto-optical recording medium according to one embodiment of the present invention.
【図２】本実施例の光磁気記録媒体の最小記録磁界及び
最小消去磁界のスパッタエッチング層厚依存性を示す図
である。FIG. 2 is a diagram showing the sputter etching layer thickness dependence of the minimum recording magnetic field and the minimum erasing magnetic field of the magneto-optical recording medium of the present embodiment.
【図３】本実施例の光磁気記録媒体の保存デ−タの劣化
状態をＣＮ比の低下量で表した図である。FIG. 3 is a diagram showing a state of deterioration of stored data of the magneto-optical recording medium according to the present embodiment in terms of a decrease amount of a CN ratio.
１ ポリカ−ボネイト基板 ２ ＳｉＮから成る第１の誘電体層 ３ 第１の誘電体層表面のスパッタエッチング層 ４ ＴｂＦｅＣｏＴｉ合金膜から成る記録膜層 ５ ＳｉＮから成る第２の誘電体層 ６ ＡｌＴｉ合金膜から成る金属反射層 REFERENCE SIGNS LIST 1 polycarbonate substrate 2 first dielectric layer made of SiN 3 sputter-etched layer on first dielectric layer surface 4 recording film layer made of TbFeCoTi alloy film 5 second dielectric layer made of SiN 6 AlTi alloy film Metal reflective layer consisting of
Claims (1)
からなる第１の誘電体層と、希土類金属と鉄族遷移金属
との組合せによって作製される非晶質磁性合金からなる
記録膜層と、ＳｉＮからなる第２の誘電体層と、ＡｌＴ
ｉ合金からなる反射膜層とを、この順に成膜された光磁
気記録媒体の製造方法において、前記記録膜層形成前
に、前記第１の誘電体層をスパッタエッチング工程によ
りスパッタエッチング量が５オングストローム〜２０オ
ングストロームの範囲となるように削る工程を有するこ
とを特徴とする光磁気記録媒体の製造方法。1. An organic resin substrate comprising at least SiN
A first dielectric layer composed of an amorphous magnetic alloy made of a combination of a rare earth metal and an iron group transition metal; a second dielectric layer composed of SiN;
In a method of manufacturing a magneto-optical recording medium in which a reflective film layer made of an i-alloy is formed in this order, before forming the recording film layer, the first dielectric layer has a sputter etching amount of 5 sputter etching steps. A method for manufacturing a magneto-optical recording medium, comprising a step of shaving so as to fall within a range of Angstroms to 20 Angstroms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04133098A JP3093440B2 (en) | 1992-05-26 | 1992-05-26 | Magneto-optical recording medium and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04133098A JP3093440B2 (en) | 1992-05-26 | 1992-05-26 | Magneto-optical recording medium and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0660449A JPH0660449A (en) | 1994-03-04 |
| JP3093440B2 true JP3093440B2 (en) | 2000-10-03 |
Family
ID=15096786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04133098A Expired - Fee Related JP3093440B2 (en) | 1992-05-26 | 1992-05-26 | Magneto-optical recording medium and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3093440B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01156829U (en) * | 1988-04-20 | 1989-10-27 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100700519B1 (en) * | 2001-05-04 | 2007-03-28 | 엘지전자 주식회사 | Near field magneto-optical disk and manufacturing method thereof |
| KR100451160B1 (en) * | 2002-02-09 | 2004-10-02 | 엘지전자 주식회사 | Near field magneto-optical storage media and manufacturing method thereof |
| JP5276630B2 (en) | 2009-10-23 | 2013-08-28 | エア・ウォーター防災株式会社 | Gas fire extinguishing equipment |
-
1992
- 1992-05-26 JP JP04133098A patent/JP3093440B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01156829U (en) * | 1988-04-20 | 1989-10-27 |
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| Publication number | Publication date |
|---|---|
| JPH0660449A (en) | 1994-03-04 |
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