JP3085397B2 - Mirror holding device - Google Patents
Mirror holding deviceInfo
- Publication number
- JP3085397B2 JP3085397B2 JP27226690A JP27226690A JP3085397B2 JP 3085397 B2 JP3085397 B2 JP 3085397B2 JP 27226690 A JP27226690 A JP 27226690A JP 27226690 A JP27226690 A JP 27226690A JP 3085397 B2 JP3085397 B2 JP 3085397B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mirrors
- reflection
- holding device
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ミラーを有する光学装置のミラー保持装置
に関する。Description: TECHNICAL FIELD The present invention relates to a mirror holding device for an optical device having a mirror.
光学的な走査によって記録あるいは読取りを行う装置
では、光路を変換して方向を変えたり、光学系全体を小
型化するため、ミラーを用いることが多い。このような
装置に用いるミラーは高精度を必要とし、取付方法にも
注意を払わなければならない。すなわち、ミラー自身
が、変形等を生じたり、また、外部からの振動・衝突等
によって、振動,ずれなどが発生し、光路の変動,画角
の変化などの障害が発生しないような構成とする必要が
ある。特に複数のミラーを使用すると、ミラー相互の位
置精度等も考慮しなければならない。このような装置に
ついては、例えば特公昭62−23844号公報等に開示され
たような技術が知られている。In an apparatus that performs recording or reading by optical scanning, a mirror is often used in order to change the direction by changing the optical path or to reduce the size of the entire optical system. Mirrors used in such devices require high precision and attention must be paid to the mounting method. In other words, the configuration is such that the mirror itself does not deform or generate vibration or displacement due to external vibrations or collisions, and does not cause obstacles such as changes in the optical path and changes in the angle of view. There is a need. In particular, when a plurality of mirrors are used, it is necessary to consider the positional accuracy of the mirrors. With respect to such an apparatus, for example, a technique disclosed in Japanese Patent Publication No. Sho 62-23844 is known.
上に述べたような光学装置においては、一般にミラー
のわずかな変形が光路の誤差を生じ、走査面上では無視
できない大きさになる。特に、変形量が振動等によって
変化する場合は、読取あるいは記録された画像に縦方向
に波うちが発生するため、変動の許容値がきびしくな
る。また、高品位の画像を対象としたり、カラー画像を
記録又は読取するために反復走査を行う場合には、画質
の低下,色ずれなどをひきおこす。In the above-described optical device, slight deformation of the mirror generally causes an error in the optical path, and the size of the mirror on the scanning surface cannot be ignored. In particular, when the amount of deformation changes due to vibration or the like, the read or recorded image has vertical waviness, and the allowable value of the change becomes severe. In addition, when a high-quality image is targeted, or when repetitive scanning is performed to record or read a color image, the image quality deteriorates and color misregistration occurs.
鏡面自身の精度を安定してかつ比較的安価に得る目的
に対しては、ガラス製の平面ミラーを用い、これを必要
に応じて複数組合せて使用することが得策である。ミラ
ーの形状を、厚さを増大する等により強固にすることで
も改善が得られることは明らかであるが、質量の増大,
装置の大型化を招く。For the purpose of obtaining the accuracy of the mirror surface itself and at a relatively low cost, it is advisable to use a plane mirror made of glass and use a plurality of these as needed. It is clear that improvement can be obtained by strengthening the shape of the mirror by increasing the thickness, etc.
This leads to an increase in the size of the device.
本発明の目的は、上記問題点に鑑み、簡易な構式で、
ミラーの変形,振動を防止できる高精度の保持装置を提
供することにある。An object of the present invention is to provide a simple structure in view of the above problems,
An object of the present invention is to provide a high-precision holding device that can prevent deformation and vibration of a mirror.
上記の目的を達成するために、本発明では、2枚の反
射ミラーのそれぞれの両端部近傍の位置を規制する支持
部材を有し、相対する反射面が対向し且つ互いの長手方
向の軸が平行となるように前記2枚の反射ミラーを前記
支持部材によって規制し、露光光束を前記長手方向の成
分を持って前記2枚の反射ミラーのうち一方の反射ミラ
ー上で走査し、その走査される露光光束が前記他方の反
射ミラーに向けて反射されるミラー保持装置において、
前記長手方向に沿って存在する端部の一方側を、前記長
手方向の中央近傍で前記反射ミラーの反射面に平行な方
向に弾性力を持って、前記2枚の反射ミラーのそれぞれ
について押圧するよう一体に形成された板ばね材を有
し、前記2枚の反射ミラーの押圧されたそれぞれの部分
に対応する他端側の部分は規制されていないように構成
した。In order to achieve the above object, the present invention has a support member that regulates the positions near both ends of each of the two reflection mirrors. The two reflection mirrors are regulated by the support member so as to be parallel, and the exposure light beam is scanned on one of the two reflection mirrors with the component in the longitudinal direction. A mirror holding device in which the exposure light beam is reflected toward the other reflecting mirror,
One end of the end present along the longitudinal direction is pressed against each of the two reflecting mirrors with elastic force in a direction parallel to the reflecting surface of the reflecting mirror near the center in the longitudinal direction. The plate spring material is formed integrally as described above, and the other end portions corresponding to the pressed portions of the two reflection mirrors are not restricted.
規制部材は、ミラーとの接触部の構造材との接触部の
一方又は両方で、摩擦接触させる。この際の押圧はミラ
ーの反射面に垂直な方向の分力が小さくなる様な方向に
行うことにより、ミラーの変形を小さくする。また、側
面を押圧することにより、ミラーの保持は、実質的に本
来のミラー両端部で行われ、配置の精度,安全性を確保
する。The restricting member is brought into frictional contact with one or both of the contact portion of the contact portion with the mirror and the contact portion with the structural material. Pressing at this time is performed in such a direction as to reduce the component force in the direction perpendicular to the reflecting surface of the mirror, thereby reducing the deformation of the mirror. Further, by pressing the side surface, the mirror is held substantially at both ends of the original mirror, thereby ensuring the accuracy and safety of the arrangement.
外部からの衝突,振動に対して、上記の接触部の静止
摩擦力の範囲では、構造材との間で剛体的に保持し、こ
れを越えて変位を生じた場合には、摩擦損失により速や
かに減衰させる機能を有する。In the range of the above-mentioned static friction force of the contact part against external collisions and vibrations, it is held rigidly with the structural material, and if displacement occurs beyond this, it will be quickly lost due to friction loss. It has a function of attenuating.
また、複数のミラーの場合には、連結的に保持するミ
ラー相互の間で上記の機能を有すると共に変位の位相を
同期させ、ミラーの変形(振動)により光路変化を低減
する。Further, in the case of a plurality of mirrors, the mirrors having the above-mentioned functions are connected to each other, and the phases of the displacements are synchronized with each other.
更に、上記の押圧は主としてミラーの反射面と平行方
向に作用させるため、ミラーの変形による影響を小さく
することができる。Further, since the above-mentioned pressing acts mainly in a direction parallel to the reflection surface of the mirror, the influence of the deformation of the mirror can be reduced.
以下、本発明の実施例を図を用いて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第1図は本発明を、レーザプリンタの走査光学系に適
用した例を示す図である。このレーザプリンタは、レー
ザ光を微小スポットに集束し、感光体13を走査して画像
を形成する。感光体13の周上には帯電,現像,転写等の
電子写真プロセスが配置され、用紙上に印字を行うもの
である。レーザダイオード2a,コリメータ2b、を有する
レーザダイオードユニット2より出射する光ビームをポ
リゴンミラーモータ3によって偏向し、fθレンズ4に
よってドラム状に形成された感光体13上に結像させる。
レンズ等の配置は十分な精度を要するため、一体のハウ
ジング1に収納している。光ビーム14は、走査の開始側
14aから終了側14bに向って感光体13上を等速的に走査す
る。本実施例においては、光学系全体をコンパクトに
し、光ビームを感光体上の所定位置に導くために、2枚
のミラー5,6を用いている。ミラー5,6は支持台8−1,8
−2に載置され、押えバネ9(4個)によって所定の位
置,角度に保持される。なお、支持台8−1,8−2およ
び前記のレンズ等を収納するハウジング1はベース11に
固定されている。ミラー部は、鋼板で作製した上カバー
12を設け、光ビームの射出口は下カバー10,防じんガラ
ス15を設けると共に、前記のハウジング1と上カバー12
との間はシール材16を配することによって全体を密閉構
造とし、外部からの塵あいの侵入を防止する。なお、第
1図において、平面図は前記の上カバー12を取外した状
態で示している。FIG. 1 is a diagram showing an example in which the present invention is applied to a scanning optical system of a laser printer. This laser printer focuses a laser beam on a minute spot and scans the photoconductor 13 to form an image. An electrophotographic process such as charging, development, and transfer is arranged on the periphery of the photoconductor 13 to perform printing on paper. A light beam emitted from a laser diode unit 2 having a laser diode 2a and a collimator 2b is deflected by a polygon mirror motor 3 and formed into an image on a photosensitive member 13 formed in a drum shape by an fθ lens 4.
Since the arrangement of the lenses and the like requires sufficient accuracy, they are housed in an integrated housing 1. Light beam 14 is on the scan start side
The photosensitive member 13 is scanned at a constant speed from the end 14a toward the end side 14b. In this embodiment, two mirrors 5 and 6 are used to make the entire optical system compact and guide the light beam to a predetermined position on the photoconductor. Mirrors 5 and 6 are support bases 8-1 and 8
-2, and is held at a predetermined position and angle by the holding springs 9 (four). In addition, the housings 1 for housing the support tables 8-1 and 8-2 and the lenses and the like are fixed to the base 11. The mirror part is an upper cover made of steel plate
12 is provided, and the light beam emission port is provided with a lower cover 10 and a dustproof glass 15, and the housing 1 and the upper cover 12 are provided.
A seal member 16 is provided between the two to make the whole a hermetically sealed structure, thereby preventing intrusion of dust from the outside. In FIG. 1, the plan view shows a state where the upper cover 12 is removed.
ここに、ミラー5,6の側部に当接するように防振板7
を設置する。防振板7は、ばね材で作製してあり、部分
的に曲げて構成した板ばね部7aを上カバー12で押圧す
る。これによって、ミラーを防振板の当接部7b,7c、板
ばねと上カバー12の当接部が摩擦接触となる。Here, the vibration isolating plate 7 is placed so as to contact the side portions of the mirrors 5 and 6.
Is installed. The vibration isolating plate 7 is made of a spring material, and the upper cover 12 presses a leaf spring portion 7a that is partially bent. As a result, the mirror comes into frictional contact between the contact portions 7b and 7c of the vibration isolating plate and the contact portion between the leaf spring and the upper cover 12.
ミラー5,6の長さは約260mmであり、ミラーの変形の影
響を評価するため、中央部に反射面に垂直方向に100g
(0.98N)の荷重が加わった場合を仮定すると、ミラー
のたわみは中央部で約27μmとなる。ミラー5と感光体
13の間の光路長は約185mmであって、上記のたわみによ
って、同一画角に対する感光体13上の走査幅は約0.1mm
変化する。一方ミラーの平面度の変化によるスポット形
状の悪化などはほとんど無視できる。従って通常は前記
の走査幅の変化の影響を考慮すれば良い。本実施例にお
いては、ミラーの変位を静止摩擦力の範囲で拘束すると
共に、振動等による変化を当接部の摩擦によって熱とし
て消散する。また防振板7の位置の保持は、ミラーに当
接する辺の曲げと、上カバー12との圧接力によるもので
あるが、ミラーとの当接部7b,7cの一方を、接続,粘着
テープ等により固定しても良い。但し、実験によれば、
固定材のせん断方向のばね定数は十分大であることが必
要である。また、7b,7cの両方を固定することは、組立
作業時にミラーに初期たわみ変形を与えることになり、
好ましくない。The length of the mirrors 5 and 6 is about 260 mm, and in order to evaluate the influence of the deformation of the mirror, 100 g in the center in the direction perpendicular to the reflection surface
Assuming that a load of (0.98 N) is applied, the deflection of the mirror is about 27 μm at the center. Mirror 5 and photoconductor
The optical path length between 13 is about 185 mm, and due to the above-described deflection, the scanning width on the photoconductor 13 for the same angle of view is about 0.1 mm.
Change. On the other hand, deterioration of the spot shape due to a change in the flatness of the mirror can be almost ignored. Therefore, usually, it is sufficient to consider the influence of the change in the scanning width. In the present embodiment, the displacement of the mirror is restricted within the range of the static friction force, and the change due to vibration or the like is dissipated as heat by the friction of the contact portion. The position of the vibration isolating plate 7 is maintained by bending the side that comes into contact with the mirror and by pressing against the upper cover 12. One of the contact portions 7b and 7c with the mirror is connected with an adhesive tape. Alternatively, it may be fixed. However, according to experiments,
The spring constant of the fixing material in the shear direction needs to be sufficiently large. Also, fixing both 7b and 7c will give the mirror initial bending deformation during assembly work,
Not preferred.
更にまた、断振板7の材質を支持台8−1,8−2と同
程度の熱膨張率のものに選定することによって、熱膨張
率差によるミラーのたわみを最小限とすることができ
る。本実施例では、支持台8−1,8−2は普通鋼板,防
振板7はばね用ステンレス鋼板である。Furthermore, by selecting the material of the vibration isolating plate 7 to have the same coefficient of thermal expansion as the supports 8-1, 8-2, it is possible to minimize the deflection of the mirror due to the difference in coefficient of thermal expansion. . In this embodiment, the supports 8-1, 8-2 are ordinary steel plates, and the vibration isolating plate 7 is a stainless steel plate for spring.
以上述べたように、本実施例では、2枚のミラーの側
部を連結する形で一個の防振板で規制するうえ、防振板
の一部をばねとして作用させ、カバーとの曲で押圧させ
るため、簡略な構成で、特に振動に対して、非常に効果
的な抑止作用を行わせることができる。As described above, in the present embodiment, the two mirrors are connected to each other by a single vibration isolating plate so as to be connected to each other, and a part of the vibration isolating plate acts as a spring, and is bent with the cover. Because of the pressing, a very effective deterrent action can be performed with a simple configuration, especially against vibration.
第2図は、更に他の実施例を示す図であって、第1の
実施例が、防振板をばねと一体的に作用したものである
のに対し、防振板120とばね118を別体として、ネジ121
で結合したものである。ミラー110′,111′、ベース10
9′および支持板は第1の実施例と同様である。FIG. 2 is a view showing still another embodiment. In the first embodiment, the vibration isolators 120 and the springs 118 are combined, while the vibration isolators are integrated with the springs. Separately, screws 121
Are combined. Mirror 110 ', 111', base 10
9 'and the support plate are the same as in the first embodiment.
以上の実施例において、防振板の押圧力は、100g程度
(1N)で効果を有し、また、防振板の位置はミラーの長
手方向に対して20mm程度の裕度をもつことを確認してい
る。In the above examples, it was confirmed that the pressing force of the vibration isolating plate was effective at about 100 g (1 N), and that the position of the vibration isolating plate had a margin of about 20 mm with respect to the longitudinal direction of the mirror. doing.
以上説明したように、本発明によれば、両端付近を支
持したミラーの中央付近の側部を主として反射面の平行
方向に押圧し、反射面を垂直方向に剛性を有する保持部
材を用いることによって、簡易な構成でミラーの初期変
形による影響を少なくしたまま、振動,衝撃によるミラ
ーの変形,振動を効果的に防止し、記録又は読取の精度
を向上することができる。As described above, according to the present invention, the side portion near the center of the mirror supporting both ends is pressed mainly in the parallel direction of the reflection surface, and the holding member having rigidity in the vertical direction is used for the reflection surface. With a simple configuration, the deformation and vibration of the mirror due to vibration and impact can be effectively prevented while the influence of the initial deformation of the mirror is reduced, and the accuracy of recording or reading can be improved.
第1図(a),(b)は本発明の一実施例を示す平面図
および主断面図、第2図は更に他の実施例の要部を示す
断面図である。 2……レーザダイオードユニット、3……ポリゴンモー
タ、4……fθレンズ、5,6,110′,111′……ミラー、
7,113……防振板、13……感光体、105……支持板、119
……カバー。1 (a) and 1 (b) are a plan view and a main cross-sectional view showing one embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a main part of still another embodiment. 2 laser diode unit, 3 polygon motor, 4 fθ lens, 5, 6, 110 ', 111' mirror
7,113: Anti-vibration plate, 13: Photoconductor, 105: Support plate, 119
……cover.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小野瀬 勝義 茨城県日立市東多賀町1丁目1番1号 株式会社日立製作所多賀工場内 (72)発明者 永野 洋介 茨城県日立市東多賀町1丁目1番1号 株式会社日立製作所多賀工場内 (56)参考文献 特開 平2−253274(JP,A) 特開 平2−265034(JP,A) 特開 昭58−169111(JP,A) 実開 昭62−30218(JP,U) (58)調査した分野(Int.Cl.7,DB名) G02B 7/198 G02B 7/182 G03G 15/04 111 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Katsuyoshi Onose 1-1-1, Higashitaga-cho, Hitachi City, Ibaraki Prefecture Inside the Taga Plant of Hitachi, Ltd. No. 1 Inside the Taga Plant of Hitachi, Ltd. (56) References JP-A-2-253274 (JP, A) JP-A-2-265034 (JP, A) JP-A-58-169111 (JP, A) 62-30218 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) G02B 7/198 G02B 7/182 G03G 15/04 111
Claims (1)
位置を規制する支持部材を有し、相対する反射面が対向
し且つ互いの長手方向の軸が平行となるように前記2枚
の反射ミラーを前記支持部材によって規制し、露光光束
を前記長手方向の成分を持って前記2枚の反射ミラーの
うち一方の反射ミラー上で走査し、その走査される露光
光束が前記他方の反射ミラーに向けて反射されるミラー
保持装置において、前記長手方向に沿って存在する端部
の一方側を、前記長手方向の中央近傍で前記反射ミラー
の反射面に平行な方向に弾性力を持って、前記2枚の反
射ミラーのそれぞれについて押圧するよう一体に形成さ
れた板ばね材を有し、前記2枚の反射ミラーの押圧され
たそれぞれの部分に対応する他端側の部分は規制されて
いないことを特徴とするミラーの保持装置。A supporting member for regulating positions near both ends of each of the two reflecting mirrors, wherein the reflecting surfaces are opposed to each other and their longitudinal axes are parallel to each other. The two reflection mirrors are regulated by the supporting member, and the exposure light beam is scanned on one of the two reflection mirrors with the component in the longitudinal direction. In a mirror holding device that is reflected toward a reflection mirror, one end of an end present along the longitudinal direction has an elastic force in a direction parallel to a reflection surface of the reflection mirror near a center in the longitudinal direction. A leaf spring member integrally formed so as to press each of the two reflection mirrors, and the other end portion corresponding to each pressed portion of the two reflection mirrors is regulated. Not characterized by Holding device of the mirror to be.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27226690A JP3085397B2 (en) | 1990-10-12 | 1990-10-12 | Mirror holding device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27226690A JP3085397B2 (en) | 1990-10-12 | 1990-10-12 | Mirror holding device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04149401A JPH04149401A (en) | 1992-05-22 |
JP3085397B2 true JP3085397B2 (en) | 2000-09-04 |
Family
ID=17511456
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27226690A Expired - Fee Related JP3085397B2 (en) | 1990-10-12 | 1990-10-12 | Mirror holding device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3085397B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101865150B (en) * | 2006-09-22 | 2012-09-05 | 台达电子工业股份有限公司 | Multi-motor blower and impeller thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4789906B2 (en) * | 2007-11-14 | 2011-10-12 | 株式会社リコー | Optical writing unit and image forming apparatus |
-
1990
- 1990-10-12 JP JP27226690A patent/JP3085397B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101865150B (en) * | 2006-09-22 | 2012-09-05 | 台达电子工业股份有限公司 | Multi-motor blower and impeller thereof |
Also Published As
Publication number | Publication date |
---|---|
JPH04149401A (en) | 1992-05-22 |
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