JP3081921B1 - Mid-infrared solid-state laser device - Google Patents
Mid-infrared solid-state laser deviceInfo
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- JP3081921B1 JP3081921B1 JP31035999A JP31035999A JP3081921B1 JP 3081921 B1 JP3081921 B1 JP 3081921B1 JP 31035999 A JP31035999 A JP 31035999A JP 31035999 A JP31035999 A JP 31035999A JP 3081921 B1 JP3081921 B1 JP 3081921B1
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Abstract
【要約】
【課題】 小型軽量で高変換効率、かつ高出力で、波長
３〜５μｍ帯の中赤外線レーザ光を安定に出力せしめる
中赤外固体レーザ装置を提供することにある。
【解決手段】 この中赤外固体レーザ装置は、非線形光
学結晶としてＡｇＧａ１−ｘＩｎｘＳｅ２（ｘ＝０．２
５〜０．３５）結晶を用いることにより、変換効率、出
力特性のいずれも向上することを見いだしたものであ
る。ＡｇＧａ１−ｘＩｎｘＳｅ２結晶は、位相整合許容
角が△θｅｘｔ・L１／２＝８．２deg・cm１／２と大き
く、しかも位相整合条件がθ＝９０°となるため、ウォ
ーク・オフ角（励起光と出力光のずれ）が０となり、励
起光に対する出力特性が極めて優れている。したがっ
て、これを非線形光学結晶として用いれば、結晶の角度
調整が不必要となり、高い変換効率で安定した出力の３
〜５μｍ帯中赤外コヒーレント光が得られる。An object of the present invention is to provide a mid-infrared solid-state laser device capable of stably outputting mid-infrared laser light in a wavelength band of 3 to 5 μm with small size, light weight, high conversion efficiency, and high output. SOLUTION: This mid-infrared solid-state laser device uses AgGa 1-x In x Se 2 (x = 0.2) as a nonlinear optical crystal.
5 to 0.35) It has been found that use of a crystal improves both the conversion efficiency and the output characteristics. The AgGa 1-x In x Se 2 crystal has a large phase matching allowable angle of Δθ ext · L 1/2 = 8.2 deg · cm 1/2 and a phase matching condition of θ = 90 °. The off-angle (the difference between the excitation light and the output light) is 0, and the output characteristics with respect to the excitation light are extremely excellent. Therefore, if this is used as a nonlinear optical crystal, the angle adjustment of the crystal becomes unnecessary, and a stable output with high conversion efficiency is obtained.
Mid-infrared coherent light in the band of 5 μm is obtained.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光パラメトリック
発振によりコヒーレント光を励起する中赤外固体レーザ
装置に係り、特に３〜５μｍの波長でコヒーレント光を
励起する中赤外固体レーザ装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mid-infrared solid-state laser device that excites coherent light by optical parametric oscillation, and more particularly to a mid-infrared solid-state laser device that excites coherent light at a wavelength of 3 to 5 .mu.m. is there.
【０００２】[0002]
【従来の技術】従来、非線形光学論系に基づいて、非線
形光学素子（結晶）にコヒーレントな励起光（基本光）
を入力することにより、異なる波長のコヒーレント光を
出力せしめるレーザ発振器（光パラメトリック発振器）
が知られている。この発振器は、一般に励起光源と、非
線形光学素子と、その両側に配置された一対の反射鏡と
から概略構成されており、上記励起光と出力光であるシ
グナル及びアイドラー光との間には次式（１）及び
（２）に示す関係が成り立っている。2. Description of the Related Art Conventionally, a coherent pump light (basic light) is applied to a nonlinear optical element (crystal) based on a nonlinear optical theory system.
Laser oscillator (optical parametric oscillator) that outputs coherent light of different wavelengths by inputting
It has been known. This oscillator is generally composed of an excitation light source, a nonlinear optical element, and a pair of reflecting mirrors arranged on both sides of the excitation light source. The relationships shown in equations (1) and (2) hold.
【０００３】 １／λs＋１／λi＝１／λp …（１） ｎｓ／λｓ＋ｎｉ／λｉ＝ｎｐ／λｐ …（２） 但し、λｐは励起光の波長、λｓはシグナル光の波長、
λｉはアイドラー光の波長、ｎｐは励起光の屈折率、ｎ
ｓはシグナル光の屈折率、ｎｉはアイドラー光の屈折率
である。1 / λ s + 1 / λ i = 1 / λ p (1) ns / λ s + ni / λ i = n p / λ p (2) where λ p is the wavelength of the excitation light, λ s is the wavelength of the signal light,
λ i is the wavelength of idler light, n p is the refractive index of the excitation light, n
s is the refractive index of the signal light, n i is the refractive index of the idler light.
【０００４】かかる構成のレーザ発振器の１例として、
１．９〜２．３μｍの波長領域でコヒーレント光を出力
する赤外光パラメトリック発振器が本発明者等によって
「ＣＴＡ光パラメトリック発振器」（特許第２６９５３
７６号）として提案されている。これは励起光源として
１．０４７〜１．０７９６μｍの波長のレーザ光を発振
する各種固体レーザを用い、非線形光学素子としてＣｓ
ＴｉＯＡｓＯ４結晶を用いたものである。As an example of a laser oscillator having such a configuration,
An infrared light parametric oscillator that outputs coherent light in a wavelength range of 1.9 to 2.3 μm has been described by the present inventors as “CTA optical parametric oscillator” (Japanese Patent No. 26953).
No. 76). This uses various solid-state lasers that oscillate laser light having a wavelength of 1.047 to 1.0796 μm as an excitation light source and Cs as a nonlinear optical element.
This is one using TiOAsO 4 crystals.
【０００５】また、波長３〜５μｍのパラメトリック発
振を行うレーザ発振器としては、励起光源にＨｏ：ＹＬ
Ｆ、Ｈｏ：ＹＡＧ等の各種固体レーザを用い、非線形光
学素子としてＡｇＧａＳｅ２やＺｎＧｅＰ２結晶を用い
たものが知られている。As a laser oscillator that performs parametric oscillation with a wavelength of 3 to 5 μm, Ho: YL is used as an excitation light source.
There are known ones using various solid-state lasers such as F, Ho: YAG, and using AgGaSe 2 or ZnGeP 2 crystal as a nonlinear optical element.
【０００６】[0006]
【発明が解決しようとする課題】しかし、上記の波長３
〜５μｍのパラメトリック発振を発振せしめる従来のレ
ーザ発振器には以下に述べる問題があった。However, the above wavelength 3
A conventional laser oscillator that oscillates a parametric oscillation of about 5 μm has the following problems.
【０００７】即ち、非線形光学素子としてＡｇＧａＳｅ
２結晶を用いたものは位相整合角θがタイプ１（第１種
の整合）のパラメトリック発振として５０°と小さいた
め、有効非線形光学定数ｄｅｆｆ ｔｙｐｅ−１（ＡｇＧ
ａＳｅ２）も３０pm／Ｖと小さく、位相整合許容角Δθ
（ＦＷＨＭ：半値幅）も△θｅｘｔ・L＝０．９deg・cm
と極めて小さい。ここで、△θｅｘｔは結晶の外部角、
Lは結晶の長さである。さらに、ＡｇＧａＳｅ２は２μ
ｍに５％／cmという大きな吸収があり、熱吸収率がη＝
０．０１１（ｗ／cm・Ｋ）と低く、励起光のレンズ作用
により結晶が破壊されたり、変換効率が著しく低下する
という欠点があった。That is, AgGaSe is used as a nonlinear optical element.
In the case of using two crystals, since the phase matching angle θ is as small as 50 ° as parametric oscillation of type 1 (first type of matching), the effective nonlinear optical constant d eff type-1 (AgG
aSe 2 ) is as small as 30 pm / V, and the phase matching allowable angle Δθ
(FWHM: half width) also △ θ ext · L = 0.9deg · cm
And extremely small. Where △ θ ext is the external angle of the crystal,
L is the length of the crystal. Further, AgGaSe 2 is 2 μm.
m has a large absorption of 5% / cm, and the heat absorption rate is η =
As low as 0.011 (w / cm · K), there were drawbacks in that the crystal was destroyed by the lens action of the excitation light and the conversion efficiency was significantly reduced.
【０００８】また、ＺｎＧｅＰ２を非線形光学素子とし
て用いた場合には、屈折率のばらつきにより変化し、位
相整合角θは、５３〜５４°となり、有効非線形光学定
数がｄｅｆｆ ｔｙｐｅ−１＝６６pm／Ｖ、熱伝導率がη
＝０．３６（ｗ／cm・Ｋ）と大きい割には、位相整合許
容角が△θｅｘｔ・L＝１deg・cmと小さく、高品質で
２．１μｍで透過率の高い結晶が得られにくいという欠
点があった。Further, when ZnGeP 2 is used as a nonlinear optical element, it changes due to the variation of the refractive index, the phase matching angle θ becomes 53 to 54 °, and the effective nonlinear optical constant becomes d eff type −1 = 66 pm. / V, thermal conductivity is η
Despite the large value of 0.36 (w / cm · K), the phase matching allowable angle is as small as △ θ ext · L = 1deg · cm, and it is difficult to obtain a high quality, 2.1 μm high transmittance crystal. There was a disadvantage.
【０００９】本発明は、上記課題を解決するためになさ
れたものであり、その目的とするところは、高変換効
率、かつ高出力で、波長３〜５μｍの中赤外線を安定に
出力せしめる中赤外固体レーザ装置を提供することにあ
る。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a medium red light having a high conversion efficiency and a high output, and capable of stably outputting mid-infrared rays having a wavelength of 3 to 5 μm. An external solid-state laser device is provided.
【００１０】本発明のその他の目的や新規な特徴は後述
の実施の形態において明らかにする。[0010] Other objects and novel features of the present invention will be clarified in embodiments described later.
【００１１】[0011]
【課題を解決するための手段】上記の目的を達成すべく
本発明者は種々の検討を試みた結果、非線形光学素子と
してＡｇＧａ１−ｘＩｎｘＳｅ２（ｘ＝０．２５〜０．
３５）結晶を用いることにより、変換効率、出力特性の
いずれも向上することを見いだしたものである。即ち、
本発明の中赤外固体レーザ装置は、励起光源として２．
０５〜２．１μｍの波長のレーザ光を発振するＨｏ：Ｙ
ＬＦ、Ｈｏ：ＹＡＧ等の固体レーザ、あるいはＣｓＴｉ
ＯＡｓＯ４結晶を１．０４７〜１．０７９６μｍの波長
のレーザ光で励起して１．９〜２．３μｍのコヒーレン
ト光を出力するＣＴＡ光パラメトリック発振器を用い、
非線形光学素子としてＡｇＧａ１−ｘＩｎｘＳｅ２結晶
を用いて成るものである。ＡｇＧａ１−ｘＩｎｘＳｅ２
結晶は、位相整合許容角が△θｅｘｔ・L１／２＝８．
２deg・cm１／２と大きく、しかも位相整合条件がθ＝９
０°となるため、ウォーク・オフ角（励起光と出力光の
ずれ）が０となり、励起光に対する出力特性が極めて優
れている。したがって、これを非線形光学素子として用
いれば、結晶の角度調整が不必要となり、高い変換効率
で安定した出力の３〜５μｍ中赤外コヒーレント光が得
られる。The present inventor has made various studies to achieve the above object, and as a result, as a nonlinear optical element, AgGa 1-x In x Se 2 (x = 0.25-0.
35) It has been found that use of a crystal improves both the conversion efficiency and the output characteristics. That is,
The mid-infrared solid-state laser device according to the present invention includes:
Ho: Y which oscillates a laser beam having a wavelength of from 0.5 to 2.1 μm.
Solid-state laser such as LF, Ho: YAG, or CsTi
Using a CTA optical parametric oscillator that excites the OAsO 4 crystal with a laser beam having a wavelength of 1.047 to 1.0796 μm and outputs coherent light of 1.9 to 2.3 μm,
The non-linear optical element is made of AgGa 1-x In x Se 2 crystal. AgGa 1-x In x Se 2
The crystal has a phase matching allowable angle of Δθ ext · L 1/2 = 8.
2deg · cm 1/2, which is large, and the phase matching condition is θ = 9
Since the angle is 0 °, the walk-off angle (the difference between the excitation light and the output light) is 0, and the output characteristics with respect to the excitation light are extremely excellent. Therefore, if this is used as a nonlinear optical element, it becomes unnecessary to adjust the angle of the crystal, and a 3 to 5 μm mid-infrared coherent light having a high conversion efficiency and a stable output can be obtained.
【００１２】[0012]
【発明の実施の形態】以下、本発明に係る中赤外固体レ
ーザ装置の実施の形態を図面に従って説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the mid-infrared solid-state laser device according to the present invention will be described below with reference to the drawings.
【００１３】図１は、本発明の中赤外固体レーザ装置の
実施の形態を示す構成図、図２は光パラメトリック発振
用の非線形光学素子を縦方向よりみた場合と横方向より
みた場合の説明図である。FIG. 1 is a block diagram showing an embodiment of a mid-infrared solid-state laser device according to the present invention, and FIG. 2 is a diagram illustrating a case where a nonlinear optical element for optical parametric oscillation is viewed from a vertical direction and a horizontal direction. FIG.
【００１４】図中、１は励起光源、２は非線形光学素
子、３は完全反射鏡（励起光及びアイドラー光で透過率
Ｔ≧９０％、シグナル光で反射率Ｒ＝９０％〜１００
％）、４は部分反射鏡（励起光及びアイドラー光で透過
率Ｔ≧９０％、シグナル光で反射率Ｒ＝６０〜８０％）
で、λｐは励起光の波長、λｓはシグナル光の波長、λ
ｉはアイドラー光の波長（但し、λｉ＞λｓ）を示す。In the drawing, 1 is an excitation light source, 2 is a nonlinear optical element, 3 is a perfect reflecting mirror (transmittance T ≧ 90% for excitation light and idler light, reflectance R = 90% to 100 for signal light).
%), 4 is a partial reflecting mirror (transmittance T ≧ 90% for excitation light and idler light, reflectance R = 60 to 80% for signal light)
Where λ p is the wavelength of the excitation light, λ s is the wavelength of the signal light, and λ
i indicates the wavelength of the idler light (where λ i > λ s ).
【００１５】本発明の実施の形態に係る中赤外固体レー
ザ装置は、図１に示すように励起光を出射する励起光源
１と、励起光源から出射される励起光の光軸上に配置さ
れたパラメトリック発振用の非線形光学素子２と、同じ
く励起光の光軸上で励起光源１と非線形光学素子２の出
射側にそれぞれ配置された完全反射鏡３と部分反射鏡４
とから構成されている。As shown in FIG. 1, a mid-infrared solid-state laser device according to an embodiment of the present invention is provided with an excitation light source 1 for emitting excitation light and an optical axis of the excitation light emitted from the excitation light source. A non-linear optical element 2 for parametric oscillation, and a complete reflection mirror 3 and a partial reflection mirror 4 similarly arranged on the exit side of the excitation light source 1 and the non-linear optical element 2 on the optical axis of the excitation light.
It is composed of
【００１６】励起光源１には、波長２．０５〜２．１μ
ｍのレーザ光を出力する各種固体レーザを用いるが、各
種固体レーザとしてはＨｏ：ＹＬＦ、Ｈｏ：ＹＡＧ等が
用いられる。あるいは、励起光源１として、［従来の技
術］で述べた特許第２６９５３７６号にあるＣＴＡ光パ
ラメトリック発振器が用いられる。この特許第２６９５
３７６号のＣＴＡ光パラメトリック発振器は、ＣｓＴｉ
ＯＡｓＯ４結晶を１．０４７〜１．０７９６μｍの波長
のレーザ光（例えばＮｄ：ＹＬＦ、Ｎｄ：ＹＡＧ、Ｎ
ｄ：ＧＳＧＧ、Ｎｄ：ＹＡＰの各種固体レーザを励起光
源として用いる）で励起して波長１．９〜２．３μｍの
コヒーレント光を出力するＣＴＡ光パラメトリック発振
器である。The excitation light source 1 has a wavelength of 2.05 to 2.1 μm.
Various solid-state lasers that output m laser light are used. Ho: YLF, Ho: YAG, or the like is used as the various solid-state lasers. Alternatively, the CTA optical parametric oscillator disclosed in Japanese Patent No. 2695376 described in [Prior Art] is used as the excitation light source 1. This patent 2695
No. 376 CTA optical parametric oscillator uses CsTi
OAsO 4 crystal is irradiated with a laser beam having a wavelength of 1.047 to 1.0796 μm (for example, Nd: YLF, Nd: YAG, N
d: GSGG and Nd: YAP are used as pumping light sources) to output coherent light having a wavelength of 1.9 to 2.3 μm.
【００１７】このような励起光源１から出射された励起
光λｐは、完全反射鏡３を介して非線形光学素子２に入
射するようになっている。The excitation light λ p emitted from the excitation light source 1 is incident on the nonlinear optical element 2 via the perfect reflecting mirror 3.
【００１８】光パラメトリック発振用の非線形光学素子
２は、タイプ１（第１種の整合、θ＝８５〜９０°、φ
＝４５°、但し、φはｘ軸からｙ軸方向へ測定した極座
標の角度、θは角度φで引かれたｘｙ面内の線分へのｚ
軸からの極座標の角度である。）で切り出したＡｇＧａ
１−ｘＩｎｘＳｅ２（ｘ＝０．２５〜０．３５）結晶
（以下「ＡＧＩＳＥ結晶」という。）が用いられてい
る。The nonlinear optical element 2 for optical parametric oscillation is of type 1 (first type of matching, θ = 85 to 90 °, φ
= 45 °, where φ is the angle of the polar coordinate measured from the x-axis to the y-axis, θ is z to the line segment in the xy plane drawn at the angle φ
The angle in polar coordinates from the axis. AgGa cut out in)
A 1-x In x Se 2 (x = 0.25 to 0.35) crystal (hereinafter, referred to as “AGISE crystal”) is used.
【００１９】このＡＧＩＳＥ結晶は、抵抗加熱炉を用い
た水平勾配冷却製法を用いて形成したが、非線形光学定
数ｄ３６＝４１pm／Ｖと大きく、しかも位相整合角がθ
＝９０°となるため、位相整合許容角△θが△θｅｘｔ
・L１／２＝８．２deg・cm１ ／２と大きく、前記ＡｇＧ
ａＳｅ２及びＺｎＧｅＰ２結晶の８倍の大きさとなるも
のである。また、ＡｇＧａＳｅ２と異なり、２．０５〜
２．１μｍの吸収がα＝２％／cmと小さいため、励起光
における破壊しきい値が１００μｓ、１０ｋＨｚのパル
スで約２００ＭＷ／cm２と高く、位相整合条件が湿度に
対してΔＴ・L＝（１０５±５）℃・cmと非常に大き
く、反射防止膜のコートも簡単にできるという特性を有
している。This AGISE crystal was formed by a horizontal gradient cooling method using a resistance heating furnace. The nonlinear optical constant d 36 was as large as 41 pm / V, and the phase matching angle was θ.
= 90 °, the allowable phase matching angle △ θ becomes △ θ ext
· L 1/2 = 8.2deg · cm 1 /2 and greater, said AgG
It is eight times as large as the aSe 2 and ZnGeP 2 crystals. In addition, unlike the AgGaSe 2, 2.05~
Since the absorption at 2.1 μm is as small as α = 2% / cm, the destruction threshold value in the excitation light is as high as about 200 MW / cm 2 with a pulse of 100 μs and 10 kHz, and the phase matching condition is ΔT · L = (105 ± 5) ° C. · cm, which is very large, and has a property that the coating of the antireflection film can be easily performed.
【００２０】励起光源１及び非線形光学素子２の出射側
に配置された完全反射鏡３及び部分反射鏡４は、励起光
源により出射されるレーザ光の波長及びアイドラー光の
波長で高い透過率を有している。The complete reflection mirror 3 and the partial reflection mirror 4 disposed on the exit side of the excitation light source 1 and the nonlinear optical element 2 have high transmittance at the wavelength of the laser light and the wavelength of the idler light emitted by the excitation light source. doing.
【００２１】完全反射鏡３は、シグナル光の波長で９０
％以上の反射率Ｒを有し、部分反射鏡４はシグナル光の
波長で６０〜８０％の反射率Ｒ及び励起光とアイドラー
光の波長で高い透過率Ｔを有するダイクロイック反射鏡
から成っている。The perfect reflecting mirror 3 has a wavelength of 90
%, And the partial reflecting mirror 4 comprises a dichroic reflecting mirror having a reflectance R of 60 to 80% at the wavelength of the signal light and a high transmittance T at the wavelengths of the excitation light and the idler light. .
【００２２】かかる構成において、励起光源１から図で
右方に出射された波長λｐの励起光は、図２に示すよう
に非線形光学素子２でシグナル光λｓ及びアイドラー光
λｉに変換され、シグナル光は完全反射鏡３と部分反射
鏡４で共振して増幅され、部分反射鏡４により発振器の
外に出射される。また、共振しないアイドラー光はシグ
ナル光と同時に部分反射鏡４により損失なく発振器外に
出射されている。In such a configuration, the excitation light of wavelength λ p emitted from the excitation light source 1 to the right in the figure is converted into signal light λ s and idler light λ i by the nonlinear optical element 2 as shown in FIG. The signal light resonates and is amplified by the complete reflection mirror 3 and the partial reflection mirror 4 and is emitted from the oscillator by the partial reflection mirror 4. The idler light that does not resonate is emitted out of the oscillator without loss by the partial reflection mirror 4 at the same time as the signal light.
【００２３】したがって、例えば励起光源１として波長
２．１２μｍのＣＴＡ光パラメトリック発振器とＡｇＧ
ａ０．７Ｉｎ０．３Ｓｅ２（ｘ＝０．３）結晶を用いる
と非線形光学素子の角度を調整することなく、コヒーレ
ントな３．９及び４．６μｍの中赤外線を安定して得る
ことができる。Therefore, for example, a CTA optical parametric oscillator having a wavelength of 2.12 μm and an AgG
Using a 0.7 In 0.3 Se 2 (x = 0.3) crystal to stably obtain coherent 3.9 and 4.6 μm mid-infrared rays without adjusting the angle of the nonlinear optical element Can be.
【００２４】この実施の形態によれば、次の通りの効果
を得ることができる。According to this embodiment, the following effects can be obtained.
【００２５】(1) 励起光源として２．０５〜２．１μ
ｍの波長でレーザ発振する固体レーザ（Ｈｏ：ＹＬＦ、
Ｈｏ：ＹＡＧ等）あるいは本発明者等による特許第２６
９５３７６号のＣＴＡ光パラメトリック発振器［ＣｓＴ
ｉＯＡｓＯ４結晶を１．０４７〜１．０７９６μｍの波
長のレーザ光（例えばＮｄ：ＹＬＦ、Ｎｄ：ＹＡＧ、Ｎ
ｄ：ＧＳＧＧ、Ｎｄ：ＹＡＰの各種固体レーザを励起光
源として用いる）で励起して波長１．９〜２．３μｍの
コヒーレント光を出力する］を用い、光パラメトリック
発振用の非線形光学素子として、ＡｇＧａ１−ｘＩｎｘ
Ｓｅ２（ｘ＝０．２５〜０．３５）結晶を用いて中赤外
固体レーザ装置を構成したので、波長３〜５μｍの中赤
外コヒーレント光を安定した出力で効率よく得ることが
できる。(1) 2.05-2.1 μm as an excitation light source
solid laser (Ho: YLF,
Ho: YAG etc.) or Patent No. 26 by the present inventors.
95376 CTA optical parametric oscillator [CsT
IOAsO 4 crystals laser light having a wavelength of 1.047～1.0796Myuemu (e.g. Nd: YLF, Nd: YAG, N
d: GSGG and Nd: YAP are used as excitation light sources) to output coherent light having a wavelength of 1.9 to 2.3 μm], and AgGa is used as a nonlinear optical element for optical parametric oscillation. 1-x In x
Since the mid-infrared solid-state laser device is configured using Se 2 (x = 0.25 to 0.35) crystal, mid-infrared coherent light having a wavelength of 3 to 5 μm can be efficiently obtained with a stable output.
【００２６】(2) 例えば、図２に示すように中赤外固
体レーザ装置において、励起光源としてＮｄ：ＹＡＧレ
ーザで励起した波長２．１２μｍのＣＴＡ光パラメトリ
ック発振器を用い、θ＝９０°、φ＝４５°に切り出し
た長さ２cmのＡｇＧａ１−ｘＩｎｘＳｅ２結晶（ｘ＝
０．３）を用いて位相整合角θ＝９０°に固定したまま
で、発振しきい値の約３倍の入力で、平均出力２Ｗの
３．９及び４．６μｍ中赤外線が３ｋＨｚで得られた。(2) For example, as shown in FIG. 2, in a mid-infrared solid-state laser device, a CTA optical parametric oscillator having a wavelength of 2.12 μm excited by an Nd: YAG laser is used as an excitation light source, and θ = 90 °, φ = AgGa 1-x In x Se 2 crystal (x =
0.3), with the phase matching angle being fixed at θ = 90 °, an input of about three times the oscillation threshold value, 3.9 and 4.6 μm mid-infrared rays with an average output of 2 W can be obtained at 3 kHz. Was.
【００２７】以上本発明の実施の形態について説明して
きたが、本発明はこれに限定されることなく請求項の記
載の範囲内において各種の変形、変更が可能なことは当
業者には自明であろう。Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to the embodiments and various modifications and changes can be made within the scope of the claims. There will be.
【００２８】[0028]
【発明の効果】以上説明したように、本発明によれば、
励起光源として２．０５〜２．１μｍの波長でレーザ発
振する固体レーザ（Ｈｏ：ＹＬＦ、Ｈｏ：ＹＡＧ等の各
種固体レーザ）又は特許第２６９５３７６号で提案した
Ｎｄ：ＹＡＧレーザ等で励起のＣＴＡ光パラメトリック
発振器）を用い、光パラメトリック発振用の非線形光学
素子として、ＡｇＧａ１−ｘＩｎｘＳｅ２（ｘ＝０．２
５〜０．３５）結晶を用いたことで、光パラメトリック
発振により３〜５μｍ帯の波長で高出力のコヒーレント
光を高効率で安定に励起可能な中赤外固体レーザ装置を
実現できる。As described above, according to the present invention,
CTA light pumped by a solid-state laser (various solid-state lasers such as Ho: YLF, Ho: YAG) oscillating at a wavelength of 2.05 to 2.1 μm as a pumping light source or an Nd: YAG laser proposed in Japanese Patent No. 2695376. AgGa 1-x In x Se 2 (x = 0.2) as a nonlinear optical element for optical parametric oscillation using a parametric oscillator).
5 to 0.35) By using a crystal, it is possible to realize a mid-infrared solid-state laser device capable of stably pumping high-output coherent light at a wavelength in the 3 to 5 μm band with high efficiency and stability by optical parametric oscillation.
【図１】本発明に係る中赤外固体レーザ装置の実施の形
態を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of a mid-infrared solid-state laser device according to the present invention.
【図２】実施の形態で用いる光パラメトリック発振用の
非線形光学素子、及びその動作の説明図である。FIG. 2 is an explanatory diagram of a non-linear optical element for optical parametric oscillation used in the embodiment and an operation thereof.
１ 励起光源 ２ 非線形光学素子 ３ 完全反射鏡（励起光及びアイドラー光でＴ≧９０
％、シグナル光でＲ＝９０〜１００％） ４ 部分反射鏡（励起光及びアイドラー光でＴ≧９０
％、シグナル光でＲ＝６０〜８０％）DESCRIPTION OF SYMBOLS 1 Excitation light source 2 Nonlinear optical element 3 Perfect reflection mirror (T ≧ 90 by excitation light and idler light)
%, R = 90-100% for signal light) 4 Partially reflecting mirror (T ≧ 90 for excitation light and idler light)
%, R = 60-80% with signal light)
フロントページの続き (56)参考文献 Ｓｕｍｍａｒｉｅｓ ｏｆ Ｐａｐｅ ｒｓ Ｐｒｅｓｅｎｔｅｄ ａｔ ｔｈ ｅ Ｃｏｎｆｅｒｅｎｃｅ ｏｎ Ｌａ ｓｅｒｓ ａｎｄ Ｅｌｅｃｔｒｏ−Ｏ ｐｔｉｃｓ．Ｃｏｎｆｅｒｅｎｃｅ Ｅ ｄｉｔｉｏｎ．1998 Ｔｅｃｈｎｉｃａ ｌ Ｄｉｇｅｓｔ Ｓｅｒｉｅｓ，ｐ ｐ．271−272（1998）Ｐ．Ｇ．Ｓｃｈｕ ｎｅｍａｎｎ ｅｔ ａｌ. Ｏｐｔｉｃｓ Ｌｅｔｔｅｒｓ，Ｖｏ ｌ．20，Ｎｏ．20，ｐｐ．2057−2059 （1995）Ｇ．Ｃ．Ｂｈａｒ ｅｔ ａ ｌ. Ｊａｐａｎｅｓｅ Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃ ｓ，Ｖｏｌ．32，Ｓｕｐｐｌｅｍｅｎｔ 32−３，ｐｐ．120−122（1993）Ｇ. Ｃ．Ｂｈａｒ ｅｔ ａｌ. Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ Ｌ ｅｔｔｅｒｓ，Ｖｏｌ．63，Ｎｏ．10, ｐｐ．1316−1318（1993）Ｇ．Ｃ．Ｂｈ ａｒ ｅｔ ａｌ. (58)調査した分野(Int.Cl.7，ＤＢ名) G02F 1/35 - 1/39 ＣＡ（ＳＴＮ)Continuation of the front page (56) References Summeries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference E edition. 1998 Technology Digest Series, p. 271-272 (1998) p. G. FIG. Schunemann et al. Optics Letters, Vol. 20, No. 20, pp. 2057-2059 (1995); C. Bhar et al. Japanese Journal of Applied Physics, Vol. 32, Supplement 32-3, pp. 138-143. 120-122 (1993) GC. Bhar et al. Applied Physics Letters, Vol. 63, No. 10, pp. 1316-1318 (1993); C. Bhar et al. (58) Fields studied (Int. Cl. 7 , DB name) G02F 1/35-1/39 CA (STN)
Claims (2)
振用の非線形光学素子を励起し、パラメトリック発振に
より３〜５μｍ帯の波長でコヒーレント光を出力する中
赤外固体レーザ装置であって、前記励起光源として２．
０５〜２．１μｍの波長でレーザ発振する固体レーザを
用い、前記光パラメトリック発振用の非線形光学素子と
して、ＡｇＧａ１−ｘＩｎｘＳｅ２（ｘ＝０．２５〜
０．３５）結晶を用いたことを特徴とする中赤外固体レ
ーザ装置。1. A mid-infrared solid-state laser device which excites a non-linear optical element for optical parametric oscillation with excitation light of an excitation light source and outputs coherent light at a wavelength of 3 to 5 μm band by parametric oscillation. 1. As a light source
A solid-state laser that oscillates at a wavelength of from 0.5 to 2.1 μm is used, and AgGa 1−x In x Se 2 (x = 0.25 to 25) is used as the nonlinear optical element for optical parametric oscillation.
0.35) A mid-infrared solid-state laser device using a crystal.
振用の非線形光学素子を励起し、パラメトリック発振に
より３〜５μｍ帯の波長でコヒーレント光を出力する中
赤外固体レーザ装置であって、前記励起光源として、Ｃ
ｓＴｉＯＡｓＯ４結晶を１．０４７〜１．０７９６μｍ
の波長のレーザ光で励起して１．９〜２．３μｍのコヒ
ーレント光を出力するＣＴＡ光パラメトリック発振器を
用い、前記光パラメトリック発振用の非線形光学素子と
して、ＡｇＧａ１−ｘＩｎｘＳｅ２（ｘ＝０．２５〜
０．３５）結晶を用いたことを特徴とする中赤外固体レ
ーザ装置。2. A mid-infrared solid-state laser device which excites a non-linear optical element for optical parametric oscillation with excitation light of an excitation light source and outputs coherent light at a wavelength of 3 to 5 μm by parametric oscillation. As a light source, C
sTiOAsO 4 crystal of 1.047 to 1.0796 μm
Using a CTA optical parametric oscillator that is excited by a laser beam having a wavelength of 1.9 to 2.3 μm and outputs coherent light having a wavelength of 1.9 to 2.3 μm. As a nonlinear optical element for the optical parametric oscillation, AgGa 1−x In x Se 2 (x = 0.25
0.35) A mid-infrared solid-state laser device using a crystal.
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Non-Patent Citations (4)
| Title |
|---|
| Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ Ｌｅｔｔｅｒｓ，Ｖｏｌ．６３，Ｎｏ．１０，ｐｐ．１３１６−１３１８（１９９３）Ｇ．Ｃ．Ｂｈａｒ ｅｔ ａｌ． |
| Ｊａｐａｎｅｓｅ Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ，Ｖｏｌ．３２，Ｓｕｐｐｌｅｍｅｎｔ ３２−３，ｐｐ．１２０−１２２（１９９３）Ｇ．Ｃ．Ｂｈａｒ ｅｔ ａｌ． |
| Ｏｐｔｉｃｓ Ｌｅｔｔｅｒｓ，Ｖｏｌ．２０，Ｎｏ．２０，ｐｐ．２０５７−２０５９（１９９５）Ｇ．Ｃ．Ｂｈａｒ ｅｔ ａｌ． |
| Ｓｕｍｍａｒｉｅｓ ｏｆ Ｐａｐｅｒｓ Ｐｒｅｓｅｎｔｅｄ ａｔ ｔｈｅ Ｃｏｎｆｅｒｅｎｃｅ ｏｎ Ｌａｓｅｒｓ ａｎｄ Ｅｌｅｃｔｒｏ−Ｏｐｔｉｃｓ．Ｃｏｎｆｅｒｅｎｃｅ Ｅｄｉｔｉｏｎ．１９９８ Ｔｅｃｈｎｉｃａｌ Ｄｉｇｅｓｔ Ｓｅｒｉｅｓ，ｐｐ．２７１−２７２（１９９８）Ｐ．Ｇ．Ｓｃｈｕｎｅｍａｎｎ ｅｔ ａｌ． |
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