JP3069462B2 - Ceramic coating member and method of manufacturing the same - Google Patents
Ceramic coating member and method of manufacturing the sameInfo
- Publication number
- JP3069462B2 JP3069462B2 JP5068556A JP6855693A JP3069462B2 JP 3069462 B2 JP3069462 B2 JP 3069462B2 JP 5068556 A JP5068556 A JP 5068556A JP 6855693 A JP6855693 A JP 6855693A JP 3069462 B2 JP3069462 B2 JP 3069462B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- oxide
- silicon nitride
- silicon carbide
- oxide ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5027—Oxide ceramics in general; Specific oxide ceramics not covered by C04B41/5029 - C04B41/5051
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00482—Coating or impregnation materials
- C04B2111/00577—Coating or impregnation materials applied by spraying
Description
【０００１】[0001]
【産業上の利用分野】本発明は耐熱性、耐熱衝撃性、耐
食性に優れたセラミックコーティング部材とその製造方
法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic coated member having excellent heat resistance, thermal shock resistance and corrosion resistance, and a method for producing the same.
【０００２】[0002]
【従来の技術】従来より、高温で過酷な条件で使用され
る高温構造材料としては窒化珪素、炭化珪素等のセラミ
ック材料が知られている。2. Description of the Related Art Conventionally, ceramic materials such as silicon nitride and silicon carbide have been known as high-temperature structural materials used under severe conditions at high temperatures.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな窒化珪素あるいは炭化珪素は、高温耐熱材料といえ
ども、これらの材料が高速の流速をもつ燃焼ガスに晒さ
れると、高温酸化、高温腐食等により部材が減肉される
ことが多い。このため、高速の流速をもつ燃焼ガスに晒
される部材については、耐久性を向上するために耐酸化
性を向上させることが重要な課題である。However, even though such silicon nitride or silicon carbide is a high-temperature heat-resistant material, when these materials are exposed to a combustion gas having a high flow rate, high-temperature oxidation, high-temperature corrosion, and the like occur. In many cases, the thickness of the member is reduced. For this reason, it is important to improve the oxidation resistance of the members exposed to the combustion gas having a high flow velocity in order to improve the durability.
【０００４】この課題解決のため高温耐熱材料の基材表
面に酸化物セラミックスを表面コーティングする方法が
提案されるが、この方法によると、基材の表面状態によ
り酸化物セラミックスをコーティングできなかったり、
コーティングできても高温での使用により短時間で剥離
することがある。本発明の目的は、基材とコーティング
層の、密着耐久性が良好で、耐熱性、耐熱衝撃性、耐食
性に優れたセラミックコーティング部材およびその製造
方法を提供することにある。[0004] In order to solve this problem, a method of surface-coating oxide ceramics on a substrate surface of a high temperature heat-resistant material has been proposed. However, according to this method, oxide ceramics cannot be coated due to the surface condition of the substrate,
Even if it can be coated, it may peel off in a short time when used at high temperatures. An object of the present invention is to provide a ceramic coating member having good adhesion durability between a substrate and a coating layer, and excellent in heat resistance, thermal shock resistance and corrosion resistance, and a method for producing the same.
【０００５】[0005]
【課題を解決するための手段】前記課題を解決するため
の本発明によるセラミックコーティング部材は、炭化珪
素、窒化珪素、炭化珪素分散強化窒化珪素複合材から選
ばれる基材の表面に酸化物セラミックスを溶射し、形成
された酸化物セラミックス層の表面粗さとして、中心線
平均粗さ（記号Ｒａ）が５μｍ以下で、未溶融粒子の割
合が５％以下である酸化物セラミックス層を有すること
を特徴とする。ここで未溶融粒子とは、被覆材料である
酸化物セラミックス粒子が溶融せず被覆層中に形骸を示
すものである。According to the present invention, there is provided a ceramic coating member comprising an oxide ceramic on a surface of a base material selected from silicon carbide, silicon nitride, and silicon carbide dispersion strengthened silicon nitride composite material. wherein the surface roughness of the thermally sprayed, formed oxide ceramic layer, the center line average roughness (symbol Ra) is 5μm or less, to have an oxide ceramic layer proportion of unmelted particles is 5% or less And Here, the unmelted particles are those in which the oxide ceramic particles, which are the coating material, do not melt and show a form in the coating layer.
【０００６】前記セラミックコーティング部材の製造方
法は、炭化珪素、窒化珪素、炭化珪素分散強化窒化珪素
複合材から選択し、基材の表面を機械加工、熱処理また
は化学的処理し、次いで平均粒径（記号Ｄ50% ）が１０
〜５５μｍで、粒径の上限と下限の範囲が２０μｍ以下
である酸化物セラミックスを基材の表面に溶射し、酸化
物をコーティングする。[0006] The method of manufacturing the ceramic coating member is selected from silicon carbide, silicon nitride, and silicon carbide dispersion strengthened silicon nitride composite material, and the surface of the base material is machined, heat-treated or chemically treated, and then the average particle size ( Symbol D 50% ) is 10
An oxide ceramic having a particle size of up to 55 μm and an upper limit and a lower limit of the particle size of 20 μm or less is sprayed on the surface of the base material to coat the oxide.
【０００７】酸化物セラミックスとしては、アルミナ、
ムライト、ジルコン、ジルコニア、イットリアから選ば
れる１種以上である。前記酸化物セラミックスは、例え
ばプラズマ溶射により基材の表面に薄膜形成される。前
記酸化物セラミックスの平均粒径（記号Ｄ50% ）を１０
〜５５μｍとした理由は、１０μｍ未満では、酸化物セ
ラミックスが軽いため、溶射時に均質な酸化物セラミッ
クス層を形成することができない。また、５５μｍを超
える場合には、未溶融酸化物や酸化物セラミックスの重
さにより均質な酸化物セラミックス層を形成することが
できないためである。As oxide ceramics, alumina,
At least one selected from mullite, zircon, zirconia, and yttria. The oxide ceramic is formed into a thin film on the surface of the substrate by, for example, plasma spraying. The average particle size (symbol D 50% ) of the oxide ceramic is 10
The reason for the ~55μm is, it is less than 10μm, oxide cell
Since the Lamix is light, a homogeneous oxide ceramic
It is impossible to form a box layer. On the other hand, if the thickness exceeds 55 μm, a uniform oxide ceramic layer cannot be formed due to the weight of the unmelted oxide or oxide ceramic .
【０００８】[0008]
【発明の作用および効果】本発明のセラミックコーティ
ング部材の製造方法によると、コーティング前のセラミ
ック基材の表面を適正な面粗さにし、この粗面化された
基材表面に粒径ののそろった酸化物セラミックスをコー
ティングするため、セラミック基材と酸化物セラミック
ス層の密着性が高いセラミックコーティング部材が得ら
れる。According to the method for manufacturing a ceramic coated member of the present invention, the surface of the ceramic substrate before coating is made to have an appropriate surface roughness, and the surface of the roughened substrate has a uniform particle size. for coating oxide ceramics, ceramic substrate and an oxide ceramic
Thus, a ceramic coating member having high adhesion of the metal layer can be obtained.
【０００９】このセラミックコーティング部材による
と、酸化物セラミックス層の高温での酸化性、腐食性が
大幅に改善され、信頼性が高いセラミックコーティング
部材が得られる。According to this ceramic coated member, the oxidizing property and corrosiveness of the oxide ceramic layer at a high temperature are greatly improved, and a highly reliable ceramic coated member can be obtained.
【００１０】[0010]
【実施例】以下、本発明の実施例を説明する。試験片寸
法幅５ｍｍ、厚さ３ｍｍ、長さ５０ｍｍの窒化珪素基材
の表面を粗面化後、プラズマ溶射により基材表面にジル
コンをコーティングする。次に、ジルコンコーティング
した窒化珪素基材を幅５ｍｍ、厚さ３ｍｍ、長さ５ｍｍ
に切断し、断面を加工して耐久評価を行なった。耐久評
価は、大気中において温度１４００℃で３００時間熱処
理した後、コーティング層表面にビッカース圧子を荷重
５０ｋｇで１５秒間圧入し基材のコーティング層剥離面
積の割合を測定した。ジルコンの粒径、コーティング層
表面粗さ、コ−ティング層表面の未溶融粒子の割合、お
よび測定結果を表１に示す。なお、表１中において、未
溶融粒子の割合は、試料の断面を研磨し走査型電子顕微
鏡（ＳＥＭ）により断面の未溶融粒子の割合を測定した
結果を示し、剥離率は圧子を圧入した箇所を含む２５ｍ
ｍ2 中の剥離面積の割合を示す。Embodiments of the present invention will be described below. After roughening the surface of a silicon nitride substrate having a test piece size of 5 mm, a thickness of 3 mm, and a length of 50 mm, zircon is coated on the surface of the substrate by plasma spraying. Next, a zircon-coated silicon nitride substrate was prepared with a width of 5 mm, a thickness of 3 mm, and a length of 5 mm.
, And the cross section was processed to evaluate durability. The durability was evaluated by heat-treating in the air at a temperature of 1400 ° C. for 300 hours, and then pressing a Vickers indenter into the surface of the coating layer with a load of 50 kg for 15 seconds to measure the ratio of the coating layer peeling area of the substrate. Table 1 shows the particle size of zircon, the surface roughness of the coating layer, the ratio of unmelted particles on the surface of the coating layer, and the measurement results. In Table 1, the ratio of unmelted particles shows the result of polishing the cross section of the sample and measuring the ratio of unmelted particles in the cross section by a scanning electron microscope (SEM). 25m including
The ratio of the peeled area in m 2 is shown.
【００１１】[0011]
【表１】 [Table 1]
【００１２】表１の結果から、耐久性の高い部材の特徴
は、窒化珪素表面にコーティングしたジルコンの粒径に
よるものではなく、粒径の上限と下限の範囲が２０μｍ
以下のものであった。すなわち、粒子のそろったジルコ
ンをプラズマ溶射すると、耐久性が向上するほか、未溶
融粒子の割合が減少し、コーティング層表面が滑らかに
なることが判る。From the results shown in Table 1, the characteristics of the highly durable member are not due to the particle size of the zircon coated on the silicon nitride surface, but the upper and lower limits of the particle size are 20 μm.
It was the following. That is, it can be understood that when plasma is sprayed on zircon having uniform particles, the durability is improved, the ratio of unmelted particles is reduced, and the surface of the coating layer becomes smooth.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C23C 4/10 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 7 , DB name) C23C 4/10
Claims (4)
窒化珪素複合材から選ばれる基材の表面に酸化物セラミ
ックスを溶射し、形成された酸化物セラミックス層の表
面粗さとして、中心線平均粗さ（記号Ｒａ）が５μｍ以
下で、未溶融粒子の割合が５％以下である酸化物セラミ
ックス層を有することを特徴とするセラミックコーティ
ング部材。An oxide ceramic is provided on a surface of a base material selected from silicon carbide, silicon nitride, and silicon carbide dispersion strengthened silicon nitride composite material.
Spraying the box, as the surface roughness of the formed oxide ceramic layer, the center line average roughness (symbol Ra) is 5μm or less, oxide proportion of unmelted particles is 5% or less Cerami
Ceramic coating member, characterized in that it comprises a box layer.
窒化珪素複合材から選択し、基材の表面を機械加工、熱
処理または化学的処理し、次いで平均粒径（記号
Ｄ50%）が１０〜５５μｍで、粒径の上限と下限の範囲
が２０μｍ以下である酸化物セラミックスを基材の表面
に溶射することを特徴とするセラミックコーティング部
材の製造方法。2. A material selected from silicon carbide, silicon nitride, and silicon carbide dispersion-strengthened silicon nitride composite, and the surface of the substrate is machined, heat-treated or chemically treated, and then has an average particle size (symbol D 50% ) of 10 %. A method for producing a ceramic coated member, comprising spraying an oxide ceramic having a particle size of up to 55 μm and a range of an upper limit and a lower limit of 20 μm or less on a surface of a base material.
ムライト、ジルコン、ジルコニア、イットリアから選ばChoose from mullite, zircon, zirconia, yttria
れる１種以上であることを特徴とする請求項１記載のセ2. The cell according to claim 1, wherein
ラミックコーティング部材。Lamic coating material.
ムライト、ジルコン、ジルコニア、イットリアから選ばChoose from mullite, zircon, zirconia, yttria
れる１種以上であることを特徴とする請求項２記載のセ3. The cell according to claim 2, wherein
ラミックコーティング部材の製造方法。A method for manufacturing a lamic coating member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5068556A JP3069462B2 (en) | 1993-03-26 | 1993-03-26 | Ceramic coating member and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5068556A JP3069462B2 (en) | 1993-03-26 | 1993-03-26 | Ceramic coating member and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06279975A JPH06279975A (en) | 1994-10-04 |
| JP3069462B2 true JP3069462B2 (en) | 2000-07-24 |
Family
ID=13377158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5068556A Expired - Fee Related JP3069462B2 (en) | 1993-03-26 | 1993-03-26 | Ceramic coating member and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3069462B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5932356A (en) * | 1996-03-21 | 1999-08-03 | United Technologies Corporation | Abrasive/abradable gas path seal system |
| JP4743973B2 (en) * | 2000-01-24 | 2011-08-10 | コバレントマテリアル株式会社 | Silicon carbide members for firing electronic components |
| US6805952B2 (en) * | 2000-12-29 | 2004-10-19 | Lam Research Corporation | Low contamination plasma chamber components and methods for making the same |
| JP2002316874A (en) * | 2001-04-17 | 2002-10-31 | Tokai Konetsu Kogyo Co Ltd | Silicon carbide based high temperature structural material and production method therefor |
| TW200307652A (en) * | 2002-04-04 | 2003-12-16 | Tosoh Corp | Quartz glass thermal sprayed parts and method for producing the same |
| DE602006000392T2 (en) | 2005-09-06 | 2008-05-08 | Yamaha Hatsudoki Kabushiki Kaisha, Iwata | Exhaust pipe for an internal combustion engine |
-
1993
- 1993-03-26 JP JP5068556A patent/JP3069462B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06279975A (en) | 1994-10-04 |
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