JP3064127U - Clean room return chamber floor structure - Google Patents
Clean room return chamber floor structureInfo
- Publication number
- JP3064127U JP3064127U JP1999003482U JP348299U JP3064127U JP 3064127 U JP3064127 U JP 3064127U JP 1999003482 U JP1999003482 U JP 1999003482U JP 348299 U JP348299 U JP 348299U JP 3064127 U JP3064127 U JP 3064127U
- Authority
- JP
- Japan
- Prior art keywords
- floor
- panel
- return chamber
- seat
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Ventilation (AREA)
- Floor Finish (AREA)
Abstract
(57)【要約】
【課題】 クリ−ンル−ムのリタ−ンチャンバ床を、施
工性が良く、変更、拡張が容易でアウトガスの心配もな
く、メンテナンスを簡単にできるよう構成する。
【解決手段】 リタ−ンチャンバ（４）の床受材(13)
に、パネル支持板（９）を取付ける。パネル支持板
（９）は、横方向に延びる受部(16)を有する。床パネル
（８）は、上記受部(16)に載るよう座部(12)を有する。
上記床パネル（８）とパネル支持板（９）は、アルミ−
亜鉛合金メッキ鋼板で作られている。受部(16)と座部(1
2)は、間にパッキング材(17)を挟んで裏面側からねじ(2
0)で固定される。
(57) [Problem] To provide a clean room return chamber floor with good workability, easy change and expansion, no fear of outgassing, and easy maintenance. SOLUTION: A floor support (13) for a return chamber (4).
Then, a panel support plate (9) is attached. The panel support plate (9) has a laterally extending receiving portion (16). The floor panel (8) has a seat (12) so as to rest on the receiving part (16).
The floor panel (8) and the panel support plate (9) are made of aluminum.
Made of galvanized steel sheet. Receiving part (16) and seat part (1
2) Insert the screw (2) from the back side with the packing material (17)
Fixed at 0).
Description
【０００１】[0001]
本考案は、半導体製造工場等で使用されるクリ−ンル−ムに関し、特にクリ− ンル−ムから流下した空気をリタ−ンチャンバを通して循環させる際のリタ−ン チャンバ床の構造に係るものである。 The present invention relates to a clean room used in a semiconductor manufacturing plant or the like, and more particularly to a structure of a return chamber floor for circulating air flowing down from the clean room through a return chamber. .
【０００２】[0002]
クリ−ンル−ムには、種々の構成が知られているが、例えば、空気が天井から 室内に入り、床面から流出するようにしたダウンフロ−タイプの場合、空気はレ イズドフロアの下方に形成されたリタ−ンチャンバを通って側面のリタ−ンスペ −スヘ流れ、天井チャンバからファンフィルタユニット（ＦＦＵ）等を通過して クリ−ンル−ム内に循環するよう構成されている。上記リタ−ンチャンバの床と して、従来はスラブやユ−ティリティフロアをそのままリタ−ンチャンバ床とし たり、リタ−ンチャンバの下方に配管、配線等を通すダ−ティな床下チャンバを 形成するようリタ−ンチャンバ床をパネル床で構成したりしている。 Various configurations are known for the clean room. For example, in the case of a downflow type in which air enters a room from a ceiling and flows out from a floor, the air is formed below a raised floor. It is configured to flow to the side return space through the returned return chamber, and to circulate from the ceiling chamber through the fan filter unit (FFU) and the like into the clean room. Conventionally, as the floor of the return chamber, a slab or a utility floor is used as it is as a return chamber floor, or a dirty underfloor chamber is formed below the return chamber for passing piping, wiring, and the like. The chamber floor is made up of a panel floor.
【０００３】 上記のようにリタ−ンチャンバ床をスラブ等で構成したクリ−ンル−ムでは、 施工性が良く、重量のある製造装置等を載置することができるが、施工期間が長 くかかり、クリ−ンル−ムを拡張したりする際簡単に変更することがむずかしい 。また、パネル床で構成する場合、一般にサンドイッチパネルが用いられており 、このパネルの周囲にシ−ル剤を充填しながらリタ−ンチャンバの床受材上に並 べられ、リタ−ンチャンバ側からビス等で床受材等に固定するので、チャンバス ペ−スの変更や拡張性は高いが、シ−ル剤を使用するためにアウトガスの問題が 生じ、床下チャンバの側からのメンテナンスが困難であった。[0003] A clean room in which the return chamber floor is made of a slab or the like as described above has good workability and can mount a heavy-weight manufacturing apparatus or the like, but the work period is long. It is difficult to change easily when extending the clean room. In the case of using a panel floor, a sandwich panel is generally used. Around the panel is filled with a sealant and arranged on a floor receiving material of a return chamber, and a screw is provided from the return chamber side. Since it is fixed to the floor support, etc., the chamber space can be changed and expanded easily, but the use of sealant causes outgassing problems, making maintenance from the side of the underfloor chamber difficult. there were.
【０００４】[0004]
本考案の解決課題は、上記のような問題点を生じないよう施工性が良く、変更 、拡張等が容易でアウトガスの心配もなく、裏面側からのメンテナンスも容易に できるようにしたクリ−ンル−ムのリタ−ンチャンバ床の構造を提供することで ある。 The problem to be solved by the present invention is that the cleanability is improved so that the above-mentioned problems do not occur, the workability is good, the modification and expansion are easy, there is no fear of outgassing, and the maintenance from the back side is also easy. The provision of a return chamber floor structure.
【０００５】[0005]
本考案によれば、矩形状の基板部の周縁を下方に折り曲げ起立部を設け該起立 部の先端を横方向に屈曲して座部を設けた床パネルと、取付部の側縁を下方に折 り曲げその先端を横方向に屈曲して受部を設けたパネル支持板を有し、上記床パ ネルと上記パネル支持板をアルミ−亜鉛合金メッキ鋼板で形成し、上記パネル支 持板をリタ−ンチャンバの床受材に取付け、該パネル支持板の受部上にパッキン グ材を挟んで上記床パネルの座部を載置し、リタ−ンチャンバ床の裏面側から上 記受部と座部をねじ止めしたことを特徴とするクリ−ンル−ムのリタ−ンチャン バ床の構造が提供され、上記課題が解決される。 According to the present invention, the floor panel in which the periphery of the rectangular substrate portion is bent downward to provide an upright portion, the tip of the upright portion is bent laterally to provide a seat portion, and the side edge of the mounting portion is directed downward. The panel has a panel support plate having a receiving portion provided by bending the end thereof in a lateral direction, and the floor panel and the panel support plate are formed of an aluminum-zinc alloy-plated steel plate, and the panel support plate is provided. Attach it to the floor support of the return chamber, place the seat of the floor panel on the support of the panel support plate with the packing material interposed, and place the seat and the seat from the back side of the return chamber floor. The above-mentioned object is achieved by providing a clean room return chamber floor structure having a screwed portion.
【０００６】[0006]
図１は、本考案のリタ−ンチャンバ床を適用したクリ−ンル−ムの一実施例を 示す概略構成図である。図において、クリ−ンル−ム（１）の天井チャンバ（２ ）には、適宜の送風機、フィルタ、図においてはＦＦＵ（３）があり、該ＦＦＵ （３）を通してクリ−ンル−ム（１）内に流入した空気がリタ−ンチャンバ（４ ）へ流出するようグレ−ティング等のフリ−アクセスフロアを有するレイズドフ ロア（５）が形成されている。リタ−ンチャンバ（４）の側方には、該リタ−ン チャンバを通った空気を上記天井チャンバ（２）へ循環させるようリタ−ンスペ −ス（６),（６）が設けられている。 FIG. 1 is a schematic diagram showing one embodiment of a clean room to which a return chamber floor of the present invention is applied. In the figure, the ceiling chamber (2) of the clean room (1) has an appropriate blower, filter, and FFU (3) in the figure, and the clean room (1) passes through the FFU (3). A raised floor (5) having a free access floor such as a grating is formed so that the air flowing into the inside flows out to the return chamber (4). On the side of the return chamber (4), return spaces (6) and (6) are provided so as to circulate the air passing through the return chamber to the ceiling chamber (2).
【０００７】 上記リタ−ンチャンバの床面となるリタ−ンチャンバ床（７）は、床パネル（ ８）とパネル支持板（９）で構成されている。該床パネル（８）とパネル支持板 （９）は、アルミ−亜鉛合金メッキ鋼板で形成され、耐薬品（酸）性、耐食性等 に優れ、長期に亘って安心して使用することができ、アウトガスの発生を問題と することもない。The return chamber floor (7) serving as the floor surface of the return chamber is composed of a floor panel (8) and a panel support plate (9). The floor panel (8) and the panel support plate (9) are formed of an aluminum-zinc alloy-plated steel plate, and have excellent chemical (acid) resistance, corrosion resistance, etc., can be used safely over a long period of time, and outgas. There is no problem of the occurrence.
【０００８】 上記床パネル（８）は、矩形状の基板部(10)の周縁を下方に折り曲げて形成し た起立部(11)と、該起立部(11)の先端を横方向に屈曲した座部(12)を有している 。該座部(12)の屈曲方向は、図においては、基板部の端面側の座部(12a),(12a) 及び側面側の一方の座部(12b) の３辺では内方に屈曲しているが側面側の他の座 部は外方に屈曲して外方に延びる受座部(12c) となっており、図４に示すように 床パネル（８),（８）・・・を隣接する際に一方の床パネル（８）の受座部(12c ) 上に他方の床パネルの座部(12b) を載置するようにしてある。The floor panel (8) has an upright portion (11) formed by bending the periphery of a rectangular substrate portion (10) downward, and a tip of the upright portion (11) bent laterally. It has a seat (12). In the figure, the bending direction of the seat (12) is bent inward on three sides of the seats (12a) and (12a) on the end face side of the substrate and the one seat (12b) on the side face. However, the other seat on the side surface is a receiving portion (12c) that is bent outward and extends outward, and as shown in FIG. 4, floor panels (8), (8),. When adjacent to each other, the seat (12b) of the other floor panel (8) is placed on the seat (12c) of the other floor panel (8).
【０００９】 パネル支持板（９）は、リタ−ンチャンバの床受材(13)に取付けられる取付部 (14)と、該取付部(14)の両側縁を下方に折り曲げ、該折曲部(15)の先端を横方向 に屈曲して形成した受部(16)を有している。The panel support plate (9) has a mounting portion (14) to be mounted on the floor support (13) of the return chamber, and both side edges of the mounting portion (14) are bent downward to form the bent portion ( It has a receiving portion (16) formed by bending the tip of 15) in the lateral direction.
【００１０】 上記床パネル（８）やパネル支持板（９）の接合部に挟着されるようパッキン グ材(17)が設けられている。該パッキング材(17)は、有害なシロキサンやＤＯＰ を含まない合成樹脂発泡体等で構成され、図５に示すように上記座部の裏面に貼 付けたり、上記座部と受部をねじ着する際に間に挿入したりする。A packing material (17) is provided so as to be sandwiched between joints of the floor panel (8) and the panel support plate (9). The packing material (17) is made of a synthetic resin foam or the like containing no harmful siloxane or DOP, and is attached to the back of the seat as shown in FIG. Or when inserting it.
【００１１】 而して、図６に示すように、上記パネル支持板（９）は、取付部(14)をリタ− ンチャンバの床受材(13)の上面に載置し、ねじ(18)で固定することにより該床受 材(13)に取付けられる。上記床受材(13)・・・は所定間隔で並列して設けられて いるから、上記床パネル（８）の端面側の座部(12a),(12a) は、それぞれパネル 支持板（９）の受部(16)上に載置され、リタ−ンチャンバの下方の床下チャンバ (19)側、すなわちリタ−ンチャンバ床の裏面側からねじ(20)で止着される（図７ ）。この際、上記パッキング材(17)が座部(12)と受部(16)間に挟まれ、床パネル （８）とパネル支持板（９）が気密状態に接続される。上記床パネル（８）の側 面側の座部(12b) は、他方の床パネル（８）の受座部(12c) 上にパッキング材(1 7)を挟んだ状態で載置され（図８）、所望により裏面側からねじ止めされる（図 示略）。なお、上記床下チャンバ(19)からリタ−ンチャンバ（４）側へ配管(21) 等を挿通させるには、上記床パネル（８）の基板部(10)に切欠孔（図示略）を形 成し配管(21)の周囲にパッキング材(17)や低シロキサンのシ−ルを設けて支持さ せればよい。As shown in FIG. 6, in the panel support plate (9), the mounting portion (14) is placed on the upper surface of the floor support (13) of the return chamber, and the screw (18) Then, it is fixed to the floor support (13). Since the floor receiving members (13) are provided in parallel at a predetermined interval, the seats (12a) and (12a) on the end face side of the floor panel (8) are respectively provided with panel support plates (9). ), And is fastened by screws (20) from the underfloor chamber (19) below the return chamber, that is, from the back side of the return chamber floor (FIG. 7). At this time, the packing material (17) is sandwiched between the seat portion (12) and the receiving portion (16), and the floor panel (8) and the panel support plate (9) are connected in an airtight state. The seat (12b) on the side of the floor panel (8) is placed on the seat (12c) of the other floor panel (8) with the packing material (17) sandwiched therebetween (see FIG. 8) If necessary, screws are screwed from the back side (not shown). In order to insert a pipe (21) or the like from the underfloor chamber (19) to the return chamber (4) side, a cutout hole (not shown) is formed in the substrate portion (10) of the floor panel (8). A packing material (17) or a low siloxane seal may be provided and supported around the piping (21).
【００１２】[0012]
本考案は上記のように構成され、基板部の周縁を下方に折り曲げ起立部を設け 該起立部の先端を横方向に屈曲して座部を設けた床パネルと、取付部の側縁を下 方に折り曲げその先端を横方向に屈曲して受部を設けたパネル支持板を有し、上 記床パネルと上記パネル支持板をアルミ−亜鉛合金メッキ鋼板で形成し、上記パ ネル支持板をリタ−ンチャンバの床受材に取付け、該パネル支持板の受部上にパ ッキング材を挟んで上記床パネルの座部を載置し、リタ−ンチャンバの裏面側か ら上記受部と座部をねじ止めするようにしたので、簡単に施工することができ、 リタ−ンチャンバのチャンバスペ−スの変更が容易で自由な設計が可能であり、 加工が容易で拡張性も高く、シ−ル剤を用いずかつアルミ−亜鉛合金メッキ鋼板 で構成したから、アウトガスの発生がきわめて少なく、耐薬品性、耐食性等に優 れ、リタ−ンチャンバの下方の床下チャンバ側からメンテナンス等をすることが できるので作業性が良く、床パネルをねじで固定する際の発塵はダ−ティな床下 チャンバ側に落下するからクリ−ンル−ムを汚染することもなく、施工期間も短 縮でき、経済的に得ることができる。 The present invention is configured as described above, and the edge of the substrate portion is bent downward to provide an upright portion. The floor panel in which the tip of the upright portion is bent laterally to provide a seat portion, and the side edge of the mounting portion is lowered. A panel support plate having a receiving portion with its tip bent laterally, and the floor panel and the panel support plate are formed of an aluminum-zinc alloy-plated steel plate, and the panel support plate is Attached to the floor receiving material of the return chamber, the seat of the floor panel is placed on the receiving portion of the panel support plate with the packing material interposed, and the receiving portion and the seating portion are viewed from the back side of the return chamber. Can be easily installed, the return space can be easily changed and the design of the chamber space is easy, the processing is easy, the expandability is high, and the sealant is Because it is made of aluminum-zinc alloy plated steel sheet Outgassing is extremely low, chemical resistance, corrosion resistance, etc. are excellent, and maintenance can be performed from the underfloor chamber side below the return chamber, so workability is good, and when the floor panel is fixed with screws, Since the dust falls to the dirty underfloor chamber side, it does not contaminate the clean room, the construction period can be shortened, and it can be obtained economically.
【図１】クリ−ンル−ムの概略構成図。FIG. 1 is a schematic configuration diagram of a clean room.
【図２】床パネルの斜視図。FIG. 2 is a perspective view of a floor panel.
【図３】床パネルの断面図を示し、（Ａ）は縦断面図、
（Ｂ）は横断面図。FIG. 3 shows a sectional view of a floor panel, (A) is a longitudinal sectional view,
(B) is a transverse sectional view.
【図４】床パネルを連接する際の説明図。FIG. 4 is an explanatory view when connecting floor panels.
【図５】床パネルの一部の拡大断面図。FIG. 5 is an enlarged sectional view of a part of the floor panel.
【図６】リタ−ンチャンバ床の斜視図。FIG. 6 is a perspective view of a return chamber floor.
【図７】図６のＡ−Ａ線断面図。FIG. 7 is a sectional view taken along line AA of FIG. 6;
【図８】図６のＢ−Ｂ線断面図。FIG. 8 is a sectional view taken along line BB of FIG. 6;
４ リタ−ンチャンバ ７ リタ−ンチャンバ床
８ 床パネル ９パネル支持板 １０ 基板部
１２ 座部 １３ 床受材 １４ 取付部 １６
受部 １７ パッキング材 １８，２０ ねじ
１９ 床下チャンバ4 Return chamber 7 Return chamber floor
8 Floor panel 9 Panel support plate 10 Substrate
12 Seat 13 Floor support 14 Mounting part 16
Receiving part 17 Packing material 18, 20 Screw
19 Underfloor chamber
Claims (2)
起立部を設け該起立部の先端を横方向に屈曲して座部を
設けた床パネルと、取付部の側縁を下方に折り曲げその
先端を横方向に屈曲して受部を設けたパネル支持板を有
し、上記床パネルと上記パネル支持板をアルミ−亜鉛合
金メッキ鋼板で形成し、上記パネル支持板をリタ−ンチ
ャンバの床受材に取付け、該パネル支持板の受部上にパ
ッキング材を挟んで上記床パネルの座部を載置し、リタ
−ンチャンバ床の裏面側から上記受部と座部をねじ止め
したことを特徴とするクリ−ンル−ムのリタ−ンチャン
バ床の構造。1. A floor panel in which a peripheral portion of a rectangular substrate portion is bent downward to form an upright portion, a tip of the upright portion is bent laterally to provide a seat portion, and a side edge of a mounting portion is bent downward. A panel support plate having a receiving portion provided with its tip bent laterally; the floor panel and the panel support plate are formed of an aluminum-zinc alloy-plated steel plate; and the panel support plate is a floor of a return chamber. Mounting on the receiving member, placing the seat of the floor panel on the receiving portion of the panel support plate with the packing material interposed therebetween, and screwing the receiving portion and the seat from the back side of the return chamber floor. Characterized clean room return chamber floor structure.
する受座部であり、隣接する他の床パネルの座部をパッ
キング材を挟んで上記受座部に載置するようにした請求
項１に記載のクリ−ンル−ムのリタ−ンチャンバ床の構
造。2. A seat portion on one side of the floor panel is a seat portion extending outward, and a seat portion of another adjacent floor panel is placed on the seat portion with a packing material interposed therebetween. The structure of the clean room return chamber floor according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1999003482U JP3064127U (en) | 1999-05-20 | 1999-05-20 | Clean room return chamber floor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1999003482U JP3064127U (en) | 1999-05-20 | 1999-05-20 | Clean room return chamber floor structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3064127U true JP3064127U (en) | 1999-12-24 |
Family
ID=43197795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1999003482U Expired - Lifetime JP3064127U (en) | 1999-05-20 | 1999-05-20 | Clean room return chamber floor structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3064127U (en) |
-
1999
- 1999-05-20 JP JP1999003482U patent/JP3064127U/en not_active Expired - Lifetime
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| EXPY | Cancellation because of completion of term |