JP3030388B2 - Optical reflector for optical waveguide substrate and its forming method - Google Patents
Optical reflector for optical waveguide substrate and its forming methodInfo
- Publication number
- JP3030388B2 JP3030388B2 JP26647593A JP26647593A JP3030388B2 JP 3030388 B2 JP3030388 B2 JP 3030388B2 JP 26647593 A JP26647593 A JP 26647593A JP 26647593 A JP26647593 A JP 26647593A JP 3030388 B2 JP3030388 B2 JP 3030388B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- shaped groove
- substrate
- optical
- viewed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Optical Integrated Circuits (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、光導波路基板の光学
反射鏡とその形成法に関し、特に製造作業性の向上に係
わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical reflector for an optical waveguide substrate and a method of forming the same, and more particularly to improvement of manufacturing workability.
【０００２】[0002]
【従来の技術】従来の光導波路基板（例えば厚さ１mm，
幅１cm，長さ数cm）１の光学反射鏡２は、図２に示すよ
うに、例えば４５°の角度をもつ厚さ数mmのヤトイ３を
基板表面に貼り合わせ、ヤトイ３の斜面４に垂直に、回
転駆動される薄い円板状のブレード５を押し当てて研削
すると同時に、研削箇所に砥粒を含んだ液を注いで、掘
られるＵ字状溝６の内面を研磨（ポリッシング）する。
ヤトイ３を用いないでブルード５で直接基板表面を４５
°の角度で加工しようとすると、角度がずれたり、ブル
ード５を破損したりするため、４５°の角度をもつヤト
イ３が必要となる。このヤトイ３は概ねＵ字状の溝６を
形成後除去される。Ｕ字状の溝６の一方の側面が光学反
射鏡２とされ、光導波路１ａより入射した光Ｌ1 を基板
表面側へ反射させることができる。2. Description of the Related Art A conventional optical waveguide substrate (for example, having a thickness of 1 mm,
As shown in FIG. 2, an optical reflecting mirror 2 having a width of 1 cm and a length of several cm is bonded to a surface of a substrate having a thickness of several mm having an angle of, for example, 45 °. At the same time, a thin disk-shaped blade 5 that is rotationally driven is pressed and ground, and at the same time, a liquid containing abrasive grains is poured into the ground portion to polish the inner surface of the U-shaped groove 6 to be dug. .
The board surface is directly 45
If it is attempted to work at an angle of °, the angle will shift or the brood 5 will be damaged, so that a yato 3 having an angle of 45 ° is required. The yoke 3 is removed after forming a generally U-shaped groove 6. One side of the U-shaped groove 6 is an optical reflecting mirror 2, it is possible to reflect the light L 1 incident from the optical waveguide 1a to the substrate surface.
【０００３】[0003]
【発明が解決しようとする課題】従来の光導波路基板の
光学反射鏡を製造する場合、ヤトイ３が必要であるこ
と、ヤトイの４５°の角度をもつ斜面の下の底面と基
板表面との間隔を数μm以下の一定の間隔で接着するの
は難しく、ヤトイの貼り付けにかなりの手間がかかるこ
と、Ｕ字状の溝６形成後ヤトイ３を除去する手間が必
要であること等の欠点があった。When a conventional optical reflector for an optical waveguide substrate is manufactured, a yato 3 is required, and the gap between the bottom surface under the inclined surface of the yato 45 ° and the substrate surface. It is difficult to bond the toys at a constant interval of several μm or less, and it takes a considerable amount of time to attach the toys, and the time and effort to remove the toys 3 after the formation of the U-shaped groove 6 is disadvantageous. there were.
【０００４】この発明はこれら従来の欠点を除去するた
めになされたものである。The present invention has been made to eliminate these conventional disadvantages.
【０００５】[0005]
（１）請求項１の光導波路基板の光学反射鏡の形成法
は、基板表面の近傍に、その表面と平行に光導波路が形
成されている光導波路基板に対して、その光導波路の小
区間を除去するように、基板表面に、前記光導波路の側
方から見てＶ字状の溝を形成し、前記Ｖ字状の溝の前記
光導波路と交叉する一方の斜面にほゞ直角に、その光導
波路の端部を除去するように、前記光導波路の側方から
見て概ねＵ字状の溝を形成するものである。(1) A method for forming an optical reflecting mirror of an optical waveguide substrate according to claim 1, wherein the optical waveguide substrate is provided with an optical waveguide formed in the vicinity of the substrate surface in parallel with the surface. So that a V-shaped groove is formed on the surface of the substrate as viewed from the side of the optical waveguide, and the V-shaped groove is substantially perpendicular to one slope crossing the optical waveguide, A generally U-shaped groove is formed so as to remove the end of the optical waveguide, as viewed from the side of the optical waveguide.
【０００６】これにより前記Ｕ字状の溝の、前記光導波
路と交叉する一方の側面を反射面として、前記光導波路
より入射した光を前記基板表面側へ反射させる光学反射
鏡が形成される。 （２）請求項２の光導波路基板の光学反射鏡は、光導波
路基板表面の近傍に、その表面と平行に光導波路が形成
され、その光導波路の小区間を除去するように、基板表
面に、光導波路の側方から見てＶ字状の溝が形成され、
前記Ｖ字状の溝の前記光導波路と交叉する一方の斜面に
ほゞ直角に、その光導波路の端部を除去するように、前
記光導波路の側方から見て概ねＵ字状の溝が形成され
る。そのＵ字状の溝の、前記光導波路と交叉する一方の
側面を反射面として、前記光導波路より入射した光を前
記基板表面側へ反射させるものである。[0006] Thus, an optical reflecting mirror for reflecting light incident from the optical waveguide toward the substrate surface side is formed with one side surface of the U-shaped groove intersecting the optical waveguide as a reflecting surface. (2) The optical reflector of the optical waveguide substrate according to the second aspect of the present invention has an optical waveguide formed near the surface of the optical waveguide substrate and parallel to the surface, and is formed on the substrate surface so as to remove a small section of the optical waveguide. A V-shaped groove is formed when viewed from the side of the optical waveguide,
A substantially U-shaped groove as viewed from the side of the optical waveguide is formed so as to remove an end of the optical waveguide at a substantially right angle to one slope crossing the optical waveguide of the V-shaped groove. It is formed. One side of the U-shaped groove crossing the optical waveguide is used as a reflection surface to reflect light incident from the optical waveguide toward the substrate surface side.
【０００７】[0007]
【実施例】この発明の実施例を図１に、図２と対応する
部分に同じ符号を付して示す。光導波路基板１には基板
表面の近傍に（例えば５μm 程度下に）、その表面と平
行に例えば厚さ５μm 程度、幅１０μm 程度の光導波路
１ａが形成されている。この発明では先ず、その光導波
路１ａの小区間を除去するように、基板表面に、光導波
路１ａの側方から見てＶ字状の溝８を形成する。即ち、
９０°の角度をもつＶ字状の刃先７ａをもつ円板状のブ
レード７を回転させつつ、基板表面に垂直に押圧させて
研削してＶ字状の溝８を形成する。FIG. 1 shows an embodiment of the present invention, in which parts corresponding to those in FIG. In the optical waveguide substrate 1, an optical waveguide 1a having a thickness of, for example, about 5 μm and a width of about 10 μm is formed near the substrate surface (for example, about 5 μm below) and parallel to the surface. In the present invention, first, a V-shaped groove 8 as viewed from the side of the optical waveguide 1a is formed on the substrate surface so as to remove a small section of the optical waveguide 1a. That is,
While rotating a disk-shaped blade 7 having a V-shaped blade edge 7a having an angle of 90 °, the blade is pressed vertically against the substrate surface and ground to form a V-shaped groove 8.
【０００８】次に、Ｖ字状の溝８の光導波路１ａと交叉
する一方の斜面にほゞ直角に、その光導波路１ａの端部
を除去するように、光導波路１ａの側方から見て概ねＵ
字状の溝６を形成する。即ち、回転駆動される円板状の
ブレード５を上記斜面にほゞ直角に押圧させてＵ字状の
溝６を研削すると同時に、微細な砥粒を含んだ液を研削
部分に注入して、溝の内面を研磨する。Next, as viewed from the side of the optical waveguide 1a, the end of the optical waveguide 1a is removed at a right angle to one of the slopes intersecting with the optical waveguide 1a of the V-shaped groove 8 so as to be substantially perpendicular. Generally U
A U-shaped groove 6 is formed. In other words, the U-shaped groove 6 is ground by pressing the disk-shaped blade 5 that is driven to rotate substantially perpendicularly to the slope, and at the same time, a liquid containing fine abrasive grains is injected into the ground portion, Polish the inner surface of the groove.
【０００９】その結果、Ｕ字状の溝６の光導波路１ａと
交叉する一方の側面を反射面として、光導波路１ａより
入射した光Ｌa を基板表面側へ反射させる光学反射鏡２
が形成される。反射光Ｌb は入射光Ｌa に対して９０°
の角度をなしている。この角度を９０°から変える場合
には、ブルードの刃先７ａの角度を変えてＶ字状の溝８
の角度を変えればよい。As a result, an optical reflecting mirror 2 for reflecting light La incident from the optical waveguide 1a to the substrate surface side with one side surface of the U-shaped groove 6 crossing the optical waveguide 1a as a reflecting surface.
Is formed. The reflected light Lb is 90 ° with respect to the incident light La.
At an angle. When this angle is changed from 90 °, the angle of the blade 7a of the brood is changed so that the V-shaped groove 8 is formed.
Can be changed.
【００１０】[0010]
【発明の効果】以上述べたように、この発明によれば、
光導波路基板１に直接Ｖ字状の溝８を形成した後、その
Ｖ字の作る一方の側面に概ねＵ字状の溝６を形成するこ
とによって光学反射鏡２が形成される。従って、従来の
ヤトイ３が不要となり、その取付け、取り外しに要する
手間がはぶける等の効果がある。As described above, according to the present invention,
After the V-shaped groove 8 is formed directly on the optical waveguide substrate 1, the optical reflecting mirror 2 is formed by forming a substantially U-shaped groove 6 on one side surface of the V-shaped groove. Accordingly, the conventional toy 3 is not required, and there is an effect that the time required for attaching and detaching the conventional toy is reduced.
【図１】この発明の実施例を示す図で、ＡはＶ字状溝形
成工程を説明するための光導波路基板の断面図、ＢはＵ
字状溝形成工程を説明するための同基板の断面図、Ｃは
光学反射鏡完成後の同基板の斜視図。FIG. 1 is a view showing an embodiment of the present invention, wherein A is a sectional view of an optical waveguide substrate for explaining a V-shaped groove forming step, and B is U
FIG. 3 is a cross-sectional view of the substrate for explaining a step of forming a U-shaped groove, and FIG.
【図２】従来の光導波路基板の光学反射鏡の形成法を示
すための光導波路基板の断面図で、Ａは基板表面にヤト
イを貼付した状態を示す図、Ｂはヤトイを介してＵ字状
溝を形成した状態を示す図、Ｃはヤトイを取り外して、
光学反射鏡の完成した状態を示す図。FIG. 2 is a cross-sectional view of an optical waveguide substrate for illustrating a method of forming an optical reflecting mirror of a conventional optical waveguide substrate, wherein A is a state in which a toy is adhered to the substrate surface, and B is a U-shape via the toy. The figure which shows the state which formed the shape groove, C removes a toy,
The figure which shows the completed state of the optical reflection mirror.
Claims (2)
導波路が形成されている光導波路基板に対して、その光
導波路の小区間を除去するように、基板表面に、前記光
導波路の側方から見てＶ字状の溝を形成し、 前記Ｖ字状の溝の前記光導波路と交叉する一方の斜面に
ほゞ直角に、その光導波路の端部を除去するように、前
記光導波路の側方から見て概ねＵ字状の溝を形成し、 前記Ｕ字状の溝の、前記光導波路と交叉する一方の側面
を反射面として、前記光導波路より入射した光を前記基
板表面側へ反射させる、光導波路基板の光学反射鏡の形
成法。1. An optical waveguide substrate in which an optical waveguide is formed in the vicinity of the substrate surface in parallel with the surface, so that a small section of the optical waveguide is removed from the surface of the substrate. A V-shaped groove is formed when viewed from the side, and the optical waveguide is formed so as to remove an end of the optical waveguide at a right angle to one slope crossing the optical waveguide in the V-shaped groove. A substantially U-shaped groove is formed when viewed from the side of the waveguide, and one side of the U-shaped groove intersecting with the optical waveguide is used as a reflection surface, and light incident from the optical waveguide is applied to the substrate surface. A method of forming an optical reflector of an optical waveguide substrate that reflects light to the side.
平行に光導波路が形成され、その光導波路の小区間を除
去するように、基板表面に、光導波路の側方から見てＶ
字状の溝が形成され、 前記Ｖ字状の溝の前記光導波路と交叉する一方の斜面に
ほゞ直角に、その光導波路の端部を除去するように、前
記光導波路の側方から見て概ねＵ字状の溝が形成され、 そのＵ字状の溝の、前記光導波路と交叉する一方の側面
を反射面として、前記光導波路より入射した光を前記基
板表面側へ反射させる、光導波路基板の光学反射鏡。2. An optical waveguide is formed in the vicinity of the surface of the optical waveguide substrate in parallel with the surface of the optical waveguide, and V.sub.V is viewed from the side of the optical waveguide on the substrate surface so as to remove a small section of the optical waveguide.
A V-shaped groove is formed, and the V-shaped groove is viewed from the side of the optical waveguide so as to remove an end of the optical waveguide at a right angle to one of the slopes intersecting the optical waveguide. A substantially U-shaped groove is formed, and one side of the U-shaped groove intersecting the optical waveguide is used as a reflection surface to reflect light incident from the optical waveguide toward the substrate surface. Optical reflector for waveguide substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26647593A JP3030388B2 (en) | 1993-10-25 | 1993-10-25 | Optical reflector for optical waveguide substrate and its forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26647593A JP3030388B2 (en) | 1993-10-25 | 1993-10-25 | Optical reflector for optical waveguide substrate and its forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07120630A JPH07120630A (en) | 1995-05-12 |
| JP3030388B2 true JP3030388B2 (en) | 2000-04-10 |
Family
ID=17431451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26647593A Expired - Fee Related JP3030388B2 (en) | 1993-10-25 | 1993-10-25 | Optical reflector for optical waveguide substrate and its forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3030388B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100941763B1 (en) * | 2007-06-08 | 2010-02-11 | 한국광기술원 | Optically and eletrically wired module device and its manufacture method |
| GB201721814D0 (en) * | 2017-12-22 | 2018-02-07 | Optoscribe Ltd | Optical apparatus, optical assembly and methods of manufacture thereof |
-
1993
- 1993-10-25 JP JP26647593A patent/JP3030388B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07120630A (en) | 1995-05-12 |
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Legal Events
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|---|---|---|---|
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Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19991214 |
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| LAPS | Cancellation because of no payment of annual fees |